KOBE STEEL, LTD.Machinery & Engineering Company
Advanced Product & Technologies Dept.
1/15
High-Resolution RBS System(HRBS-V500、HRBS1000)
・ History for RBS Equipment・ Hardware of HRBS-V500・ Principle of RBS・ Principle of High-Resolution RBS・ Examples of High-Resolution RBS・ Principle & Examples of High-Resolution ERDA・ Principle of PIXE・ Comparison of instrumentation
Outline
History for RBS Equipment2/15
He+
He+
0 100 200 300 400 500
1
10
100
1000
10000
channel
Yield
0 100 200 300 400 500
1
10
100
1000
10000
channel
Yield
0 100 200 300 400 500
1
10
100
1000
10000
channel
Yield
Si
Si Au
Si Au Si
He+Si
Si
Si
Au
Au
Sample1
Sample2
Sample3
Principle of RBS4/15
Comparison between conventional ERDA & HERDA
1MeV He+ → DLCmikro-i
500keV N+ → DLCHRBS500
Depth resolution < 0.2nm
Hydrogen depth profile in thin film was CLEARLY measured!!
Conventional ERDA High Resolution ERDA
Comparison by DLC(Diamond like Carbon) spectrumbetween conventional ERDA & HERDA
11/15
Principle of PIXE(Particle Induced X-ray Emission)
When Ion collides with atom, it radiates charasteristic X-ray which is unique in each element.
By detecting this X-ray, it turns out what elements and how many elements are included.
The feature of PIXE is high detection sensivity which is about ppm order.
L-Xray
K-Xray
Ion
Electron
K L
M
K
L
M
βα
β α
β
α
Lα
Lβ
Lγ
MKα
Kβ
14/15
Principle SIMS AES TEM STM XRRHRBS 500 Old RBS
Method Double Semiconduc Cross Scanning X Ray/Feature focussing tor Section Tunnel Reflection
magnet&MCP detector electronProbe 500keV He 1Mev He Cs/O ion electron electron needle High Power
X Ray
X線反射率
干渉振動
non-destructive ○ ○ × × × ◎ ◎
Depthresolution
0.2~0.3nm 10nm 5nm 2nm 0.01nm × 2~10nm
Composition ◎ ◎ ○ △ △ × ×
Sensitivity 1% 0.50% 0.0001% 0.50% Few % Few % Few %
Reliability ◎ ◎ △ △ △~☆ ○ △
User-friendly ○ ○ △ ○ △ ○ ○
Simplicity ofuse
Attention isneeded forsurfacetreatment
Sensivityadjustment isneeded
Charge upmeasure isneeded
Preparation ofsample isneeded
Attention isneeded forsurfacetreatment
Augerelectron
Transmissionelectron
Tunnelcurrent
RBS
DetectionParticle
Scattered ionSecondaryion
Comparison of instrumentation(evaluation of thin film)15/15