Micro to Nano Technologies
By: Brent HareLenox laser
March 30, 2004
Micro to Nano Technologies
Micro - Prefix meaning one millionth, 1/1,000,000
Nano – Prefix meaning one billionth, 1/1,000,000,000
The Powers of 10
10+0 1 Meter
10-1 10 Centimeters
10-2 1 Centimeters
10-3 1 Millimeter
10-4 100 Microns
10-5 10 Microns
10-6 1 Micron
10-7 1,000 Angstroms
10-8 100 Angstroms
10-9 1 Nanometer
10-10 1 Angstrom
10-11 10 Pico meters
10-12 1 Pico meter
10-13 100 Fermis
10-14 10 Fermis
10-15 1 Fermi
10-16 0.1 Fermis
10-17 0.01 Fermis
10-18 0.001 Fermis
Current Micro Technologies
Photonics - Optical Apertures and Flow Orifices
Electronics – Semiconductor chips, anodic bonding
MEMS – Micro Electro Mechanical Systems
Communication – Fiber optics, switching interconnects
Biotechnology - cell filtration, drug discovery
Current Nano Technologies
Molecular manufacturing – Precision down to the atomic level
Nanotubes –Building advanced lightweight materials as well as advancements in LCD technologies
Medicine – Devices that will flow through the circulatory system
Nanocomposites – Assisting in vast improvements in material compositions
Electronics – Advanced CMOS and silicon transistor integration with lithography
mms://stream.techtv.com/windows/bigthinkers/2002/bt020225b_165_0.asf
Micro scaling to Nano
Click Picture to watch Nanotechnology movie
http://www.memsoptical.com/prodserv/products/microlensar.htm
Micro - Optics
Ability to drill to ½ micron for half the wavelength
Micromirrors for next generation telescope optics
Micromirrors
Microlens Arrays
http://www.geek.com/procspec/intel/pic2p4-13.htm
Micro - Electro
Pentium 4- Top speed – 3.4ghz Built on a 0.13
micron die 168 million
transistors on 200mm2
http://www.utnl.jp/~mada-lab/research.html
Micro - Chemical
Miniature fuel cells Micro channels Chemical reactors
50 Micron Chemical Reactor
Micro Chemical Channel
Micro Fuel Cell
Photos from Pittcon
Micro Flow Devices
=
Swagelock hasbegun to minaturizeits flow components
3ft. X 4ft.
6in. x 18in.
http://www.memx.com/image_gallery.htm
Micro - Engineering
Micro gears Micro embossing and
stamping Microactuators (Tiny
Motors) Micro-valves
Micro-valves
Micro embossing
Complex Ratchet
http://us.st.com/stonline/prodpres/dedicate/mems/technolo/micro/photo.htm
Micro - Mechanical
Microactuators – tiny motors
http://www.memx.com/image_gallery.htm
Micro Mechincal
World’s smallest steam engine, the pistons are 5 microns
and it actually works
Micro Clutch mechanism, gears are 50 microns
http://www.sensorsmag.com/articles/0700/10/main.shtml
Microfluidics
Capillary uptake Piezoelectric
inkjets Flow sensing Drug dispensing Flow based
separation
Print Cartridges
Lab-On-Chip for DNADetection and Analysis
Micro Canals
http://www.lucent.com
Micro Communications
Full optical switching technologies
Most fiber optic backbone in the United States ranges from 1.3 to 1.5 micrometers and can transmit over 5 GBps and can span 93 miles Fiber optic switching
e-blox (Scaleable, Interfaceable, Stackable)
Micro to nano interfaces for simple solutions e-blox allows you to build backbones
connecting Gas, Liquid, Electro, Optical – Fiber/Micro, and nanotechnologies in order to build unique devices for MEMS and other technologies
Imagine devices built with the integration of all of these competing technologies on a Scaleable, Interfaceable, Stackable solution at the micro and nano level
http://www.smalltimes.com/document_display.cfm?document_id=5340
MEMS (Powder Metal Die Casting for building small parts)
The ability to arrange particles and then compress them into a die to build ultra small parts that can be used in MEMS technologies i.e. e-blox
They have the ability to create miniature tools and dies to help build MEMS technologies
Micro Sensor 0.051mm
http://www.solid-edge.com/
Rapid Prototyping
Use of 3D CAD modeling with SolidEdge
3D Scanning Technologies – Use of lasers and optics to scan surface objects
3D Holography Technologies – Holograms for real visualizations
3D CAD Model
http://www.epner.com/electroforming_intro.ssi
Electroforming Technologies
Electroforming is the process of fabricating a part from the plating itself. A shaped mandrel is plated long enough to build up a "stand alone" thickness. The mandrel is then removed by melting, chemically etching or exploiting differences in thermal coefficients of expansion between the electroformed part and the mandrel.
http://www.memsnet.org/mems/beginner/etch.html
Etching Technologies
Wet Etching – Dissolves materials with chemicals and the use of masks
Dry Etching - ion etching (RIE), sputter etching, and vapor phase etching are used by blasting the material surface with ion gases
http://www.intel.com/research/silicon/lithography.htm
Lithography Technologies
Lithography is a printing process where image areas and non-image areas are separated chemically
Silicon semiconductor companies use extremely small masks to mark silicon wafers with 248 nm, 193nm, and now 13.4nm wavelengths of light
Piezeo electronics (for micro to nano movement)
Pizeoelectronics are materials that produce an electrical response to a mechanical force.
Can be used in Vibration Monitoring, Imaging
Arrays, Doppler Probes, Biotech, Pharmaceutical, and Industrial & Process Control
http://www.sciam.com/article.cfm?chanID=sa002&articleID=000CE8C4-DC31-1055-973683414B7F0000&pageNumber=4&catID=2
First NanoChips
Integrated circuits can be made down to 50nm
50nm chips are made using 193nm lithography (smaller than a wavelength so they use diffraction corrections)
http://www.sciam.com/article.cfm?chanID=sa002&articleID=000CE8C4-DC31-1055-973683414B7F0000&pageNumber=4&catID=2
Next Generation Nano Lithography
To build chips smaller than 50nm, new lithography technologies must be created – The above technology can use 13nm ultraviolet wavelengths
http://www.sciam.com/article.cfm?chanID=sa002&articleID=000CE8C4-DC31-1055-973683414B7F0000&pageNumber=4&catID=2
Nano Biotechnologies
Scientists have developed a way to use DNA for minuscule wires that can be used in nanoelectronics
Ability to have insulated wires sized at 25nm and 20 microns in length
http://www.lbl.gov/Science-Articles/Archive/images4/nanotubes-model.jpg
Nanotubes Conductive and high-
strength composites Energy storage and
energy conversion devices
Sensors Medical drug delivery
and DNA research Nanometer-sized
semiconductor devices, probes, and interconnects
Nanotubes are built by arrangingseveral atoms in a closed pattern to form an unbelievably small tube