Marcel Caeyers
IT Solution Team Manager - Manufacturing
September 2013 / SAP Manufacturing Days / Den Bosch
Shop Floor Control The Road to Integrated Manufacturing
• Introducing ASML A cornerstone of the chip industry
• Impact on Operations A lean program to streamline production processes
• Program: Shop Floor Control The IT enabler for achieving business value
• Questions
Agenda
Public
Slide 2
April 2013
Introducing ASML
A cornerstone of the chip industry
ASML - A cornerstone of the chip industry
Public
Slide 4
April 2013
ASML employees
in US:1,617
Source: VLSI Research/ASML Q4 2012
Over 55 sales and service offices located worldwide
ASML employees
in Europe: 5,068
ASML employees
in Asia: 1,812
Sales to Europe
27%
sales
to US
69%
sales
to ASIA
4%
Public
Slide 5
ASML:
World’s largest semiconductor equipment vendor April 2013
Moore’s Law holds steady for more than 40 years
• Double the computing power per chip
• At equivalent power consumption
• For half the price
• Every 1.5 to 2 years
1970 1975 1980 1985 1990 1995 2000 2005 2010
Public
Slide 6
101
102
103
104
105
106
107
108
109
1010
100
Tra
nsis
tors
per
Die
Memory
Microprocessor
This graphic of Moore’s law
shows how his prediction of
transistor shrink has been
realized over 40 years.
Source: Intel
April 2013
Overlay down to
2 nanometers
1 nm = 4 silicon atoms
The technical challenges
Stacking layers: what does that mean…
April 2013
Public
Slide 7
m/sec2
0 10 20 40 70 30 50 60 80 90 100 110 120 130 140 150
The technical challenges
Acceleration: a comparison...
A stone drops at 9.8 m/sec2
A dragster accelerates at 33 m/sec2
A jet fighter in a catapult at 44 m/sec2
An attack missile at 50 to 120 m/sec2
A TWINSCAN NXT reticle stage at 150 m/sec2
April 2013
Public
Slide 8
…resulting in the systems that conquered the market
1984:
PAS 2000 Resolution:
>1m
Overlay: 250 nm
1989:
PAS 5000 Resolution:
<500 nm
overlay: 100 nm
1990’s:
PAS 5500 steppers/ scanners
Resolution:
400 to 90 nm
overlay: 100 to 12 nm
2000’s:
Twinscan Resolution:
100 to 38 nm
overlay: 20 to 4 nm
In 30 years: From 1,200 nm to less than 20 nm resolution
From <0.5M€ per system to >60M€
2010’s:
NXE EUV
systems Resolution:
32 to <20 nm
overlay: 2 nm
Public
Slide 9
April 2013
Impact on Operations
A lean program to streamline
production processes
Or do you want to become the best factory? Does your factory look like this? Public
Slide 11
What makes the difference?
April 2013
ASML Manufacturing process Public
Slide 12
WH
Suppliers Build Operations Delivery Operations
• +/- 350 Suppliers
• Added Value >90%
• 60 Partners (80%)
• +/- 10.000 People
• 9 Modules /system
•18000 m2
• 2000 Buy in Items /system
• +/- 300 goods receipts /day
• 6-12 months Training / Engineer
• 2 shifts per day /wk, 1 shift per day /weekend
• 7x24 Test Area
• 3-8 Systems / week
Suppliers Build Operations Delivery Operations
April 2013
ASML Manufacturing process Public
Slide 13
WH
What makes manufacturing @ ASML special?
Suppliers Build Operations Delivery Operations
April 2013
Dynamic Master Data - high number of Engineering Changes (100 p/wk)
Rework, Recovery, Repair - continuously due to searching the limits of technology
Master Production Sequences - contain all possible technical dependencies
Operators - highly educated
Flow: 8 key changes April 2013
Public
Slide 14
Slide 15 |
FLOW - High level impact April 2013
Public
Slide 15
The "blueprint" is introduced
Takts Regular rebalanced to improve
cycletime and delivery
Kits are adjusted on basis of the Takts
After approval: the changes are
implemented
Support and issue resolution
are improved
Improved Transparency
Takted way of working is introduced
Program: Shop Floor Control
The IT enabler for achieving business value
Shop Floor Control program @ASML
April 2013
Public
Slide 17
Work Instructions Dynamic customized per machine configuration
Introducing SAP ME - Fair work packages per operator per shift
- Blueprinting & Sequencing tooling
- Real-time monitoring / progress tracking
Production Orders - Customized per customers order
Detailed integral planning of materials, skills, people, cabins, etc.
Alert Management Real-time logging & progress tracking
of disturbances in production
Management Reporting Based on a single source of truth
MES – Machine Interfacing Fully automated system qualification
Increased delivery &
planning reliability
Reduced customer reaction time
Reduced stock & obsolescence
Improved planning efficiency
Transparency of operations
Shop Floor Control functions mapped on ISA95
April 2013
Public
Slide 18
Machine - Level 1 & 2
MES - Level 3
ERP - Level 4
Pro
du
ction
Op
era
tor
Da
shb
oa
rd (
GU
I)
SA
P B
usin
ess O
bje
cts
(R
epo
rts/D
ashb
oa
rds)
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
Quintiq
Operational
Planning
Siemens
TCE
RSuite / Coach
Test Scripts
SAP MII - Manufacturing
Integration & Intelligence
April 2013
Public
Slide 19
Machine - Level 1 & 2
MES - Level 3
ERP - Level 4
SA
P B
usin
ess O
bje
cts
(R
epo
rts/D
ashb
oa
rds)
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
Pro
du
ction
Op
era
tor
Da
shb
oa
rd (
GU
I)
SAP MII
Quintiq
Operational
Planning
Siemens
TCE
Indicenter /
Coach
Test Scripts
SA
P B
usin
ess O
bje
cts
(R
epo
rts/D
ashb
oa
rds)
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
Quintiq
Operational
Planning
Siemens
TCE
RSuite / Coach
Test Scripts
SAP MII - Manufacturing
Integration & Intelligence
Work Preparation – Create and Release Routing in ECC
Work Preparation - Create sub-routings in GRE
April 2013
Public
Slide 20
Machine - Level 1 & 2
MES - Level 3
ERP - Level 4
SA
P B
usin
ess O
bje
cts
(R
epo
rts/D
ashb
oa
rds)
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
Pro
du
ction
Op
era
tor
Da
shb
oa
rd (
GU
I)
SAP MII
Quintiq
Operational
Planning
Siemens
TCE
Indicenter /
Coach
Test Scripts
SA
P B
usin
ess O
bje
cts
(R
epo
rts/D
ashb
oa
rds)
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
Quintiq
Operational
Planning
Siemens
TCE
Indicenter /
Coach
Test Scripts
SAP MII - Manufacturing
Integration & Intelligence
Work preparation: Routing Sub-routing Work package per operator
July 2012
Public
Slide 21
1 2 3 8 9
4 5
6 7
10 20 30 Main routing in SAP-ECC
Sub-routing in Graphical Routing Editor
Optimized Work Package in SAP-ME 1 4 5 8 9
2 3 6 7
Operator A
Operator B
April 2013
Public
Slide 22
Machine - Level 1 & 2
MES - Level 3
ERP - Level 4
SA
P B
usin
ess O
bje
cts
(R
epo
rts/D
ashb
oa
rds)
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
Pro
du
ction
Op
era
tor
Da
shb
oa
rd (
GU
I)
SAP MII
Quintiq
Operational
Planning
Siemens
TCE
Indicenter /
Coach
Test Scripts
SA
P B
usin
ess O
bje
cts
(R
epo
rts/D
ashb
oa
rds)
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
Quintiq
Operational
Planning
Siemens
TCE
RSuite / Coach
Test Scripts
SAP MII - Manufacturing
Integration & Intelligence
Work Preparation - Create optimal sequence per operator
April 2013
Public
Slide 23
Machine - Level 1 & 2
MES - Level 3
ERP - Level 4
SA
P B
usin
ess O
bje
cts
(R
epo
rts/D
ashb
oa
rds)
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
Pro
du
ction
Op
era
tor
Da
shb
oa
rd (
GU
I)
SAP MII
Quintiq
Operational
Planning
Siemens
TCE
Indicenter /
Coach
Test Scripts
SA
P B
usin
ess O
bje
cts
(R
epo
rts/D
ashb
oa
rds)
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
Quintiq
Operational
Planning
Siemens
TCE
RSuite / Coach
Test Scripts
SAP MII - Manufacturing
Integration & Intelligence
Work Preparation – Release routing to SAP ME,
report to SAP ECC
April 2013
Public
Slide 24
Machine - Level 1 & 2
MES - Level 3
ERP - Level 4
SA
P B
usin
ess O
bje
cts
(R
epo
rts/D
ashb
oa
rds)
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
Pro
du
ction
Op
era
tor
Da
shb
oa
rd (
GU
I)
SAP MII
Quintiq
Operational
Planning
Siemens
TCE
Indicenter /
Coach
Test Scripts
SA
P B
usin
ess O
bje
cts
(R
epo
rts/D
ashb
oa
rds)
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
Quintiq
Operational
Planning
Siemens
TCE
RSuite / Coach
Test Scripts
SAP MII - Manufacturing
Integration & Intelligence
Manufacturing Execution: Create Production Order in ECC
Manufacturing Execution: Release Order to SAP ME
April 2013
Public
Slide 25
Machine - Level 1 & 2
MES - Level 3
ERP - Level 4
SA
P B
usin
ess O
bje
cts
(R
epo
rts/D
ashb
oa
rds)
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
Pro
du
ction
Op
era
tor
Da
shb
oa
rd (
GU
I)
SAP MII
Quintiq
Operational
Planning
Siemens
TCE
Indicenter /
Coach
Test Scripts
SA
P B
usin
ess O
bje
cts
(R
epo
rts/D
ashb
oa
rds)
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
Quintiq
Operational
Planning
Siemens
TCE
RSuite / Coach
Test Scripts
SAP MII - Manufacturing
Integration & Intelligence
April 2013
Public
Slide 26
Machine - Level 1 & 2
MES - Level 3
ERP - Level 4
SA
P B
usin
ess O
bje
cts
(R
epo
rts/D
ashb
oa
rds)
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
Pro
du
ction
Op
era
tor
Da
shb
oa
rd (
GU
I)
SAP MII
Quintiq
Operational
Planning
Siemens
TCE
Indicenter /
Coach
Test Scripts
SA
P B
usin
ess O
bje
cts
(R
epo
rts/D
ashb
oa
rds)
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
Quintiq
Operational
Planning
Siemens
TCE
RSuite / Coach
Test Scripts
SAP MII - Manufacturing
Integration & Intelligence
Manufacturing Execution: Schedule Routing Steps in time
April 2013
Public
Slide 27
Machine - Level 1 & 2
MES - Level 3
ERP - Level 4
SA
P B
usin
ess O
bje
cts
(R
epo
rts/D
ashb
oa
rds)
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
Pro
du
ction
Op
era
tor
Da
shb
oa
rd (
GU
I)
SAP MII
Quintiq
Operational
Planning
Siemens
TCE
Indicenter /
Coach
Test Scripts
SA
P B
usin
ess O
bje
cts
(R
epo
rts/D
ashb
oa
rds)
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
Quintiq
Operational
Planning
Siemens
TCE
RSuite / Coach
Test Scripts
SAP MII - Manufacturing
Integration & Intelligence
Manufacturing Execution: Start 1st Routing Step in the
Production Operator Dashboard
April 2013
Public
Slide 28
April 2013
Public
Slide 29
Machine - Level 1 & 2
MES - Level 3
ERP - Level 4
SA
P B
usin
ess O
bje
cts
(R
epo
rts/D
ashb
oa
rds)
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
Pro
du
ction
Op
era
tor
Da
shb
oa
rd (
GU
I)
SAP MII
Quintiq
Operational
Planning
Siemens
TCE
Indicenter /
Coach
Test Scripts
SA
P B
usin
ess O
bje
cts
(R
epo
rts/D
ashb
oa
rds)
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
Quintiq
Operational
Planning
Siemens
TCE
RSuite / Coach
Test Scripts
SAP MII - Manufacturing
Integration & Intelligence
Manufacturing Execution: POD accesses dashboards,
reports, work instructions, etc.
Public
Slide 30
April 2013
Public
Slide 31
April 2013
Shop Floor Control impact on FLOW improvement
• Graphical Routing Editor to define blueprint
• Calculate optimal sequence (in 2 min. instead of 5 days)
• Fair Work Packages per operator, per shift
• Dynamic sequencing
• Real-time progress tracking (even available for operator during shift)
• Monitoring and reporting
• Escalate disturbance notifications
• Assure production progress
• Trigger the just-in-time delivery of kit carts
• Dynamic Work instructions • Operator assignments
• Execute Work Packages in takts
• Disturbance resolution process
April 2013
Public
Slide 32
What’s next ?
This week : Start of Work preparation in PRD
Next week : Final UAT
Sept. 30 : Start Roll-out to 1st workcenters
Till end Q1 : Roll-out in ASML Netherlands
To be planned / follow-up projects:
- Potential enhancements after pilot in EUV factory;
- MES – Machine interfacing;
- World-Wide roll-out:
USA - Wilton
USA - San Diego
Taiwan - Linkou
- Next step for disturbance resolution (QIM ??)
- Workplace efficiency – Use of Mobile / iPad
July 2012
Public
Slide 33
Questions