8/9/2019 Silicon Nanowires Research Report
1/30
coVE OIODQERCV
Vfileoa Velefdo Jc~efcvZdqirjv z`c Izdmef Vfilc
Hd`o Ilfdfg (;;3910;9%
Vrej`ir Bslsvs (;;3;0900%Iz`ir~i Eoimjir (;;39221;%
^ev`ioz` Oiriuio (;;393;05%
V`iv`qiz Vi{rc (;;392>33%
Ile V`ij (;;3;19>1%
Grev`oi Q`ezc (;;3925;0%
Vs{cr~evdr8 Jr X/ Jsrrioe
2m
Iv `ea`cr {crndrmiofc ev jcmiojcj nrdm vmillcr ioj
vmillcr jc~efcv, rcvcirf` eozd oiodvfilc fdm{docozvev dn db~edsv eozcrcvz/ Iv i rcvslz, miou jc~efcv irc eo
z`c {rdfcvv dn bceoa vfilcj zd izdmef vexcv qez` z`c
svc dn velefdo oiodqercv (VeOQv%/ Z`cvc eoflsjc NCZv,
vcovdrv ioj fdm{lczc ldaef ferfsezv/ Liracr vfilc
jc~efcv, vsf` iv vdlir {ioclv ioj lez`esm edo bizzcrecv,
miu ilvd bcocnez nrdm i vc~cril-ndlj eofrcivc eo
cnnefecofu ioj fi{ifezu q`co fdovzrsfzcj qez`
oiodqercv, z`dsa` z`ev zcf`odldau ev fsrrcozlu iz z`c
cp{cremcozil vziac/
8/9/2019 Silicon Nanowires Research Report
2/30
[ i a c 2 d n 6 ;
Fdozcozv
9 Eozrdjsfzedo 6
2 Velefdo Oiodqerc Vuoz`cvev :
2/9 F`cmefil ^i{dsr Jc{dvezedo :
2/2 [livmi-Co`iofcj F`cmefil ^i{dsr Jc{dvezedo 3
2/6 ^i{dsr-Leysej-Vdlej [rdfcvv 3
2/: F`cmefil Czf`eoa >
2/3 Livcr Ivvevzcj Fiziluzef Ardqz` Mcz`dj 1
6 Neclj Cnncfz Zriovevzdrv 0
6/9 Velefdo Oiodqerc NCZ F`irifzcrevzefv 5
6/9/9 Mslze{lc-Lc~cl NCZv bu INM Oiodlez`dari{`u 5
6/9/2 :om F`ioocl Qejz` NCZv bu INM Oiodlez`dari{`u 9;
6/9/6 Eozcariziblc Oiodqerc Zriovevzdrv 9;
: Odo-^dlizelc Mcmdru sveoa Mdlcfslc-Aizcj Oiodqercv 92
:/9 Oiodqerc Bivcj Odo-^dlizelc Jc~efc 96
:/2 Frdvvcj Oiodqerc Odo-^dlizelc Jc~efc 9:
3 Oiodvcovdrv Jczcfzedo dn JOI . JOI Vcyscofc ^ireizedov 9>
3/9 Jc~efc Nibrefizedo 9>
3/2 Vcoveoa Mcf`ioevm 91
> Lez`esm Bizzcrecv qez` Velefdo Oiodqerc Iodjcv 95
>/9 Velefdo Oiodqercv iv Iodjc Mizcreilv 95
1 Vdlir Fcllv sveoa Velefdo Oiodqercv 22
1/9 D{crizedo 22
1/9/9Jenncrcofc Bczqcco Oiodrdj Irriu ioj [lioir
[`dzdclcfzrdjcv
26
1/2 Ibvdr{zedo eo Velefdo Oiodqerc Irriuv 26
1/6 Velefdo Oiodqerc Jc~efcv ndr [`dzd~dlziefv 2:
1/: Vliozeoalu-Ileaocj Velefdo Oiodqerc Irriuv 2:
1/3 Veoalc Ipeil {-e-o Oiodqercv ndr Vdlir Cocrau @ir~cvzeoa 23
0 Fdoflsvedo 21
5 Rcncrcofcv 20
8/9/2019 Silicon Nanowires Research Report
3/30
[ i a c 6 d n 6 ;
9/Eozrdjsfzedo
Z`c jcmioj ndr fdm{ifz, mslzensofzedoil jc~efcv `iv bcco ardqeoa iz io emmcovc rizc, {szzeoa
{rcvvsrc do miosnifzsrcrv zd nez mdrc {dqcrnsl clcfzrdoef ferfsezv eozd c~cr vmillcr {ifgiacv/
@dqc~cr, q`elc Mddrcv Liq `iv vd nir bcco i rcleiblc mcivsrc dn z`ev {rdarcvv, qc irc ri{ejlu
i{{rdif`eoa z`c lemezv dn fsrrcoz miosnifzsreoa mcz`djv/
Vdlszedov eo~dl~eoa oiodzcf`odldau v{cfenefillu, oiodzsbcv ioj oiodqercv ev io irci dn codrmdsv
eozcrcvz iv z`c bdsojirecv dn miosnifzsreoa irc {sv`cj c~co nsrz`cr/ Iv z`c oimc vsaacvzv,
oiodqercv irc qercv qez` jemcovedov dn z`c drjcr dn oiodmczrcv/ Ilz`dsa` msf` rcvcirf` `iv
ilrciju bcco fdojsfzcj do firbdo-bivcj oiodzsbcv (FOZv% ioj oiodqercv (FOQv%, rcfcozlu z`c
jercfzedo dn vzsju `iv v`enzcj zdqirjv eo~cvzeaizedo dn velefdo oiodqercv (VeOQv%/ VeOQv {rcvcoz i
soeysc d{{drzsoezu zd nibrefizc bivef clcfzrdoef fdm{docozv vsf` iv Neclj Cnncfz Zriovevzdrv (NCZv%
qez` oiodvfilc jemcovedov/ Z`c em{lefizedov dn z`ev rcvcirf` irc veaoenefioz8 nszsrc {rdfcvveoa soezv
fdslj {dzcozeillu `i~c vc~cril `sojrcj zemcv z`c fsrrcoz zriovevzdr jcovezu, q`elc mefrd- ioj oiod-
vfilc jc~efcv fdslj bc nibrefizcj qez` civc/ D~cr z`c {ivz z`rcc jcfijcv, ij~iofcj cp{cremcozv qez`
{rdarimmiblc ldaef ferfsezv ioj bed-vcovdrv mijc nrdm oiodvfilcj NCZv `i~c ilrciju bcco firrecj
dsz/ Jc~efcv vsf` iv bed-vcovdrv ndr i{{lefizedov eo JOI, ~ersv, ioj bifzcreil jczcfzedo `i~c bcco
mijc vsffcvvnsllu ioj irc bceoa zcvzcj cpzcove~clu/
Z`c svc dn VeOQv ev odz rcvzrefzcj zd oiodmczrc-vfilc clcfzrdoefv/ Liracr jc~efcv, vsf` iv z`dvc
jcveaocj ndr cocrau `ir~cvzeoa ioj vzdriac, miu ilvd bcocnez nrdm z`c zcf`odldau/ Z`c lizcvz VeOQ-
bivcj vdlir fcllv irc fdovejcriblu mdrc fdvz cnncfze~c z`io vdlir fcllv bselz vdlclu qez` fdo~cozedoil
mcz`djv/ Lez`esm edo fcllv, svcj qejclu eo clcfzrdoefv iv i rcvslz dn z`cer `ea` fi{ifezu, miu `i~c z`cer
vzdriac fi{ifezu iz lcivz zcondlj VeOQv `i~c io cpzrcmclu lirac f`irac fi{ifezu iz lcoaz`v dn s{ zd
hsvz i ncq `sojrcj oiodmczrcv/ Z`ev {i~cv z`c qiu ndr bizzcrecv z`iz livz ldoacr, occj lcvv nrcyscoz
f`iraeoa ioj ucz irc c~co vmillcr z`io cpevzeoa soezv/
Ez ev em{drzioz zd odzc z`iz z`c mcz`dj dn miosnifzsrc veaoenefiozlu inncfzv z`c clcfzrefil f`irifzcrevzefv
dn z`c oiodqercv/ Z`c mdvz fdmmdo mcz`dj svcj iz {rcvcoz ev F`cmefil ^i{dsr Jc{dvezedo (F^J%7
vlea`z ~ireizedov dn z`ev zcf`oeysc eoflsjc [livmi-Co`iofcj F`cmefil ^i{dsr Jc{dvezedo ([CF^J%,
q`ef` ev ilvd qejclu svcj/ [rdfcvvcv z`iz svc F^J acocrillu svc z`c ^i{dsr-Leysej-Vdlej (^LV%
zcf`oeysc ndr nibrefizedo/ Dz`cr mcz`djv, vsf` iv Izdmef Ndrfc Mefrdvfd{c (INM% lez`dari{`u irc
svcj eo miosnifzsreoa/ VeOQv jd odz `i~c zd bc mijc nrdm {src velefdo/ Jd{cj velefdo fio ilvd bc
svcj/
Z`ev rc{drz jcvfrebcv z`c ~iredsv miosnifzsreoa {rdfcvvcv dn VeOQv ioj z`cer i{{lefizedov,
jevfsvveoa ne~c oiodqerc jc~efcv eo jcziel8 NCZv, {rdarimmiblc ldaef ferfsezv, bed-vcovdrv, lez`esm edo
bizzcrecv ioj vdlir fcllv/
8/9/2019 Silicon Nanowires Research Report
4/30
[ i a c : d n 6 ;
Neasrc 98 (i% Acocril fdofc{z jeiarim dn Oiodqerc vuoz`cvev/ (b% [efzsrc dn i F^J rcifzdr/ (f% Fcozrc {irz
dn z`c F^J vcz-s{, ardqz` qincr eovejc ysirzx zsbc ferflcj/ VCM emiac dn z`c ardqo VeOQv (eovcz%/ (j%
Cz`iodl bcndrc ioj inzcr vdoefizedo vc{irizedo dn VeOQ dbvcr~cj eo fdldsr f`ioac/(Rixi cz il, 2;;>%
2/Velefdo Oiodqerc Vuoz`cvev
Oiodzcf`odldau ndlldqv i bdzzdm-s{ {irijeam q`ef` eo~dl~cv z`c fdozrdllcj ardqz` dn oiodvfilc
vzrsfzsrcv zd ndrm oiodvfilc !bseljeoa bldfgv! q`ef` nez zdacz`cr ioj illdq z`c frcizedo dn ocq jc~efcv/
Oiodqercv ndrm z`cvc bseljeoa bldfgv ioj fio bc ardqo dr vuoz`cvevcj eo miou jenncrcoz qiuv/ Eo z`ev
vcfzedo dn z`c rc{drz qc qell fdovejcr i osmbcr dn zcf`oeyscv/
2/9/ F`cmefil ^i{dsr Jc{dvezedo (F^J%
F`cmefil ~i{dsr jc{dvezedo ev i {rdfcvv svcj ndr z`c jc{dvezedo dn z`eo jeclcfzref nelmv ndr cpim{lc,
velefdo dpejc dr oezrejc nrdm z`cer aivcdsv vzizc eozd i vdlej vzizc s{do i vsbvzrizc/
Eo z`ev {rdfcvv, i velefdo qincr ev nervz flciocj zd rcmd~c z`c oize~c dpejc bcndrc i z`eo liucr dn adlj
nelm ev jc{dvezcj bu clcfzrdo-bcim c~i{drizedo/9
Z`ev adlj-fdizcj qincr ev z`co lcnz zd ardq eo z`c
F^J rcifzdr ndr 6; meoszcv, q`crc ez ev ioocilcj qez` `ujrdaco ioj z`co jd{cj sveoa i Ve@:$B2@>
(velioc$jebdrioc% rized dn :;;;89/ Z`ev ev {crndrmcj iz i {rcvvsrc dn 9; Zdrr ioj i zcm{crizsrc dn
>0;F zd {rdjsfc i jcovc irriu dn {-jd{cj VeOQv/ Neoillu, vclcfzcj oiodqercv irc vsv{cojcj ndr
vdoefizedo/2
Z`c jevij~ioziac dn z`ev miosnifzsreoa mcz`dj ev z`iz ez eo~dl~cv md~eoa z`c qercv inzcr z`cu irc
ardqo/ Z`ev {rcvcozv io dbvziflc zd lirac-vfilc eozcarizedo/
8/9/2019 Silicon Nanowires Research Report
5/30
[ i a c 3 d n 6 ;
2/2/ [livmi-Co`iofcj F`cmefil ^i{dsr Jc{dvezedo ([CF^J%
[livmi-co`iofcj f`cmefil ~i{dsr jc{dvezedo ev vemelir eo {reofe{lc zd fdo~cozedoil F^J8 ez fdovevzv
dn z`c jc{dvezedo dn i vdlej mizcreil, vsf` iv i z`eo nelm, dozd i vsbvzrizc/ Ez fio ilvd bc svcj ndr VeF
liucrv dr {dlu-velefdo jc{dvezedo/6
I {livmi dn rcifzeoa aivcv ev acocrillu frcizcj bu
acocrizedo dn 9;;@x zd 96M@x rijed nrcyscofu (RN%
clcfzrdmiaoczef qi~cv eo i rcifzedo f`imbcr/ Z`c
ocfcvviru cocrau ndr z`c rcifzedo ev {rdjsfcj bu
`cizeoa z`c aiv dr {livmi zd ndrm z`c rcifze~c edov
ioj rijefilv/ Z`c ardqz` do z`c vsbvzrizc bcaeov
bcfisvc dn z`c `ea` ifze~izedo cocrau {rd~ejcj bu z`c
eozcovc bdmbirjmcoz bu edov nrdm z`c {livmi/ Z`c
velefdo nelmv dbzieocj nrdm z`ev {rdfcvv irc acocrillu
bczqcco 2;om zd 9;;om z`efg qez` addj ij`cvedo
ioj `ea` ardqz` rizcv/:
Miou {rd{crzecv dn z`c
jc{dvezcj nelm fruvzilleoc vzrsfzsrc, jcovezu,
fdojsfziofc ioj soendrmezu dn z`c jc{dvez, iv qcll ezv mipemsm z`efgocvv irc jc{cojcoz do
[CF^J {rdfcvv ~ireiblcv vsf` iv {livmi {dqcr, f`imbcr {rcvvsrc ioj z`c RN {irimczcr/ Z`cvc
irc ijhsvzcj iv rcysercj jsreoa z`c {rdfcvv/
2/6/ ^i{dsr-Leysej-Vdlej (^LV% [rdfcvv
VeOQv fio ilvd bc vuoz`cvevcj bu F^J ~ei z`c ~i{dsr-leysej-vdlej {rdfcvv/3
Ndr z`ev zcf`oeysc, i
fiziluvz ev f`dvco q`ef` rcifzv ioj ndrmv i leysej illdu vdlszedo qez` z`c f`dvco oiodqerc mizcreil/
(Adlj ev i vseziblc fiziluvz ndr z`c ardqz` dn VeOQv, bsz
iou mdodjev{crvcj mczil oiod{irzeflc fio bc svcj%/
Z`c fiziluvz ioj velefdo irc `cizcj zd ndrm i cszcfzef
mepzsrc zd q`ef` VeFl: dr Ve@: aiv ev eozrdjsfcj/>
Eo z`c
{rcvcofc dn z`c aiv, z`c oiodvfilc vccj jrd{lcz
bcfdmcv vs{crvizsrizcj qez` velefdo (jsc zd jc{dvezedo
dn velefdo nrdm z`c ~i{dsr zd z`c leysej illdu% ioj z`cvelefdo nrccxcv eozd i oiodvfilc fruvzil/ Z`ev jev{lifcv
z`c jrd{lcz nrdm ezv dreaeoil {dvezedo, md~eoa ez ildoa z`c
oiodqerc/ Z`c oiodjrd{lcz ev ifzeoa iv i osflcsv, nrdm
q`ef` i vdlej fruvzilleoc oiodqerc ev ardqo/ Z`ev ardqz`
dffsrv eo z`c ;;, v`dqo ibd~c, ev io ij~iofcj
{livmi rcifzdr z`iz {rdjsfcv ea` ysilezu VeO, VeD ioj
jd{cj Ve liucrv/ (Rduil [`ele{v Clcfzrdoefv`zz{8$$qqq/`ezcf`-{rdhcfzv/fdm$jzv$jdfv${cf~j/`zm,
iffcvvcj 99$;2$;5%
http://www.hitech-projects.com/dts/docs/pecvd.htmhttp://www.hitech-projects.com/dts/docs/pecvd.htmhttp://www.hitech-projects.com/dts/docs/pecvd.htm8/9/2019 Silicon Nanowires Research Report
6/30
[ i a c > d n 6 ;
Ez ev ilvd {dvveblc zd ardq ipeil ioj
rijeil `czcrdvzrsfzsrcv sveoa z`c
ibd~c {rdfcvv/ Zd vuoz`cvevc ipeil
`czcrdvzrsfzsrcv, z`c ^LV {rdfcvv ev
firrecj dsz iv bcndrc bsz z`c aivrcifzioz ev f`ioacj vd z`iz
vizsrizedo dn i jenncrcoz mizcreil
dffsrv, z`sv ardqeoa i ocq
oiodqerc hdeocj zd z`c eoezeil doc/
Z`ev ndrmv i hsofzedo, iv v`dqo eo
Neasrc :b/1
Rijeil `czcrdvzrsfzsrcv, vcco eo
Neasrc :f, irc mijc bu f`ioaeoa z`c ardqz` mdjc nrdm ipeil zd rijeil/ Z`ev ev if`ec~cj bu covsreoa`dmdacocdsv jc{dvezedo dn mizcreil do z`c oiodqerc ioj fio bc em{lcmcozcj bu f`ioaeoa z`c aiv
rcifzioz dr z`c ardqz` zcm{crizsrc/
2/:/ F`cmefil Czf`eoa
F`cmefil czf`eoa ev iodz`cr mcz`dj ndr z`c vuoz`cvev dn VeOQv, ioj jenncrv vlea`zlu nrdm ^LV eo z`iz ez
ev svcj zd {rdjsfc irriuv dn oiodqercv riz`cr z`io i veoalc oiodqerc/0,
F`cmefil czf`eoa fdm{revcv
zqd vzc{v/
Nervzlu, bcndrc iou czf`eoa fio zigc {lifc do z`cqincrv, z`cu msvz nervz bc z`drdsa`lu flciocj zd
clemeoizc iou em{srezecv/ Zd rcmd~c draioef
arcivc z`c qincrv irc slzrivdoefillu ~ebrizcj eo
ifczdoc ioj cz`iodl iz rddm zcm{crizsrc, ioj
z`co zd rcmd~c nsrz`cr draioef rcvejscv dr `ci~u
mczilv, z`cu irc {lifcj eo i bdeleoa vdlszedo dn
vsl{`sref ifej ioj `ujrdaco {crdpejc/ Inzcr cif`
flcioeoa vzc{, z`c qincrv irc reovcj eo jc-edoevcj
qizcr/0
Dofc z`c qincrv irc vseziblu flcio, i z`eo vel~cr
nelm (9;-3;om% ev liej dsz do z`c qincr ~ei z`crmil
c~i{drizedo ioj z`c qincrv irc vsbmcracj eo io
czf`ioz vdlszedo dn `ujrdnlsdref ifej ioj
`ujrdaco {crdpejc/ Z`c czf`ioz jevvdl~cv z`c velefdo7 `dqc~cr z`c irciv dn z`c qincr fd~crcj eo nelm
irc {rdzcfzcj/ Z`sv VeOQv irc czf`cj nrdm z`c velefdo qincr/ Z`c ldoacr z`c zemc v{coz eo z`c czf`ioz
vdlszedo, z`c mdrc velefdo qell bc jevvdl~cj ioj z`c ldoacr z`c rcvslzioz oiodqercv/5
o-Velefdo
{-Velefdo
[lioir velefdo {-o hsofzedo
VeOQ {-o hsofzedo irriu do
{-Velefdo vsbvzrizc
Vclcfze~c czf`eoa eo iyscdsv @N
vdlszedo fdozieoeo vel~cr oezrizc
Neasrc 38 Ellsvzrizedo dn {rc{irizedo dn VeOQ {-o hsofzedo
jedjc irriuv sveoa Czf`eoa/ ([coa cz il, 2;;:%
Neasrc :8 Ellsvzrizedov jc{efzeoa ardqz` ioj rc{rcvcozize~c vzrsfzsrcv dn (i%
Soendrm Veoalc Fruvzil Vcmefdojsfzdr Oiodqerc (b% Ipeil Oiodqerc
@czcrdvzrsfzsrcv (f% Rijeil Oiodqerc @czcrdvzrsfzsrcv/ (Lecbcr, 2;;6%
8/9/2019 Silicon Nanowires Research Report
7/30
[ i a c 1 d n 6 ;
2/3/ Livcr Ivvevzcj Fiziluzef Ardqz` (LFA% Mcz`dj
Z`c livcr ivvevzcj fiziluzef ardqz` mcz`dj ev iodz`cr
zcf`oeysc svcj zd frcizc VeOQv/9;
Livcr iblizedo
errijeizedo qez` i livcr bcim dn i fdm{dvezc ziracz
q`ef` fdozieov bdz` z`c fiziluvz ioj z`c oiodqerc
mizcreil, eo z`ev fivc VeNc, ev firrecj dsz iz zcm{crizsrcv
cysil zd dr ibd~c 92;;F eo i `cizcj nldq zsbc sveoa
z`c i{{irizsv v`dqo eo Neasrc >/99
Z`ev {rdjsfcv i
~i{dsr dn velefdo ioj erdo q`ef` fdojcovc eozd Nc-Ve oiodflsvzcrv/ Qez` eofrciveoa cp{dvsrc, z`c
oiodflsvzcrv c~cozsillu fdozieo io cpfcvv dn velefdo ioj bcfdmc vs{crvizsrizcj/ Z`c VeOQ vzirzv zd
ndrm q`co z`c velefdo fruvzillevcv eozd i vdlej/99
ziracz
zsbc nsroifczd {sm{
Ir$@2
`~
Neasrc >8 I{{irizsv ndr z`c fiziluzef ardqz` dn
VeOQv ivvevzcj bu livcr iblizedo/ (Qioa, 2;;6%
8/9/2019 Silicon Nanowires Research Report
8/30
[ i a c 0 d n 6 ;
Neasrc 18 VeOQ NCZ/ (Lecbcr cz il, 2;;6%
6/Neclj Cnncfz Zriovevzdrv
Z`c v`reogeoa dn zriovevzdrv ev dn db~edsv eozcrcvz en z`c fsrrcoz zrcoj dn meoeizsrevizedo eo clcfzrdoefv ev
zd fdozeosc/ Qc irc fdofcrocj `crc qez` neclj cnncfz zriovevzdrv (NCZv%, q`ef` ndrm z`c bivev ndr mdvz
fsrrcoz eozcarizcj ferfsezv/ Ivejc nrdm z`c jenncrcofc eo {`uvefil vexc, z`c ij~ioziacv dn fdovzrsfzeoa
NCZv nrdm velefdo oiodqercv irc zqdndlj8 z`c oiodqerc NCZv cp`ebez veaoenefiozlu `ea`cr clcfzrdo
mdbelezu z`io vziojirj {lioir MDVNCZv, ioj ilvd i rclize~c eofrcivc eo f`ioocl vexc/92
Z`cvc
{rd{crzecv illdq z`cer clcfzrefil f`irifzcrevzefv zd mdrc fldvclu i{{rdif` z`dvc dn io ejcil zriovevzdr/
Z`c i{{lefizedov dn vsf` jc~efcv irc osmcrdsv/ Oiodqerc zriovevzdrv fdslj bc svcj zd frcizc c~co
vmillcr eozcarizcj ferfsezv/ Z`cvc ldq-{dqcr ferfsezv mea`z bc cm{lducj, ndr cpim{lc, eo bedldaefil
em{liozv/ Ez ev c~co {dvveblc zd nibrefizc zriov{ircoz zriovevzdrv sveoa VeOQv/ Ez ev qdrz` mcozedoeoa
z`iz z`c jc~efcv eo yscvzedo fio bc nibrefizcj do ~erzsillu iou vsbvzrizc/ Z`ev `iv z`c {dzcozeil ndr
em{ifz s{do i `sac v{cfzrsm dn i{{lefizedov, ndr cpim{lc doc fdslj frcizc jc~efcv fi{iblc dn
nsofzedoeoa sojcr nlcpedo/ Eojccj zcvzv qcrc fdojsfzcj s{do i VeOQ jc~efc q`ef` `ij bcco
nibrefizcj do i {livzef vsbvzrizc/ Z`cu v`dqcj ocaleaeblc ilzcrizedov eo jc~efc fsrrcoz ndr lirac
imdsozv dn vzrcvv s{do z`c jc~efc, vdmcz`eoa q`ef` {rd~cv {rdmeveoa ndr z`c nszsrc dn nlcpeblc
clcfzrdoefv/96
Ilz`dsa` NCZv sveoa oiodzcf`odldau qcrc nervz
fdovzrsfzcj nrdm firbdo oiodzsbcv eo 9550, ez qiv
odz sozel 2;;6 z`iz nsofzedoeoa VeOQ jc~efcv qcrc
nibrefizcj bu F`irlcv Lecbcr ioj `ev zcim iz
@ir~irj/9:
Oiodqercv `i~c vc~cril ij~ioziacv
d~cr oiodzsbcv eo z`ev i{{lefizedo8 z`cu irc
fdovzrsfzcj {srclu dn vcmefdojsfzdr mizcreil
riz`cr z`io z`c mczil-firbdo `ubrej oiodzsbcv7 z`c jd{ioz fdofcozrizedo fio bc {rcfevclu fdozrdllcj
jsreoa vuoz`cvev7 ioj z`cu irc mdrc fdm{izeblc qez` cpevzeoa Ve-bivcj eonrivzrsfzsrc/92,93
Z`c zcim svcj z`c F^J {rdfcvv zd nibrefizc VeOQv, q`ef` qcrc jc{dvezcj nrdm io cz`iodl
vsv{covedo dozd i liucr dn velefdo dpejc zd ae~c z`c vzrsfzsrc v`dqo eo Neasrc 1/
Mdvz vsbvcyscoz zriovevzdrv irc ~ireizedov do z`ev bivef vzrsfzsrc, q`ef` nsofzedov eo msf` z`c vimc
qiu iv i vziojirj {lioir MDVNCZ8 z`c i{{lefizedo dn i ~dlziac iz z`c aizc fisvcv eo~crvedo eo z`c
oiodqerc, frcizeoa i f`ioocl bczqcco vdsrfc ioj jrieo/
Vdmc mdrc rcfcoz jc~efcv `i~c svcj zd{-jdqo nibrefizedo mcz`djv, q`ef` vzirz qez` io cpevzeoa
mslze-liucrcj vsbvzrizc/ Z`ev vsbvzrizc zu{efillu fdm{revcv i liucr dn dpejc (VeD2% viojqef`cj
bczqcco zqd liucrv dn velefdo, q`ef` ev godqo iv i Velefdo Do-Eovslizdr (VDE% qincr/ [irzv dn z`c zd{
liucr irc z`co czf`cj iqiu zd ae~c z`c jcvercj vzrsfzsrc/ Miou jenncrcoz zcf`oeyscv fio bc svcj zd
v`i{c z`c qincr8 f`cmefil czf`eoa9>
, rcifze~c edo czf`eoa91
ioj clcfzrdo bcim lez`dari{`u90
irc hsvz i
8/9/2019 Silicon Nanowires Research Report
9/30
[ i a c 5 d n 6 ;
ncq cpim{lcv/ Eo i rcfcoz {i{cr, Mirzeocx cz il/ (2;;0% svcj izdmef-ndrfc mefrdvfd{c (INM%
oiodlez`dari{`u zd nibrefizc zriovevzdrv qez` i :om
f`ioocl qejz`/95
INM oiodlez`dari{`u ev i ~ireizedo do z`c mcz`djv
jcvfrebcj cirlecr/ Ez eo~dl~cv md~eoa z`c ze{ dn io
izdmef-ndrfc mefrdvfd{c d~cr io VDE qincr ioj sveoa ez
zd i{{lu i {slvc dn ~dlziac zd z`c vsrnifc, q`ef` frcizcv
io dpejc liucr/ F`cmefil czf`eoa fio z`co bc svcj zd
rcmd~c z`c vsrnifc velefdo/ Z`ev lci~cv i oiodqerc
fdizcj qez` dpejc, q`ef` q`co rcmd~cj ae~cv i fdm{lczc VeOQ/ Z`c zriovevzdrv frcizcj qez` z`ev
mcz`dj fio bc ysezc eozrefizcndr cpim{lc, z`c ndsr-irmcj mdjcl v`dqo eo Neasrc 5/ @dqc~cr, z`c
zcf`oeysc fio bc mdrc cp{cove~c z`io bdzzdm-s{ ardqz` mcz`djv jsc zd z`c neoc lez`dari{`u
cyse{mcoz rcysercj/
Ysezdreiod ioj Gimeov `i~c jcmdovzrizcj q`iz z`cu bclec~c zd bc i vs{credr {rdfcvv/2;
Z`cu `i~c
jc~cld{cj i zcf`oeysc zd fdozrdl z`c ldfizedo ioj ardqz` jercfzedo dn z`c VeOQ vzrsfzsrc q`ef` ev
fdm{izeblc qez` fdo~cozedoil {lioir {rdfcvvcv/ `dljv vc~cril ij~ioziacv8 z`c oiodqercv fio bc
mdrc rdbsvz, iv qcll mdrc imcoiblc zd lirac-vfilc eozcarizedo/ Z`cu svcj z`ev zd nibrefizc i MDVNCZ
do io o'$BDP${
-VDE qincr, i jeiarim dn q`ef` ev v`dqo eo Neasrc 0/
6/9/ VeOQ NCZ F`irifzcrevzefv
Fsrrcoz VeOQ NCZv jcmdovzrizc zriovfdojsfziofcv eo z`c rcaedo dn 6/6mVm
-9
ioj do-fsrrcozv eoz`c rcaedo dn 2/9mIm
-9, {crndrmeoa z`rcc zd ndsr zemcv bczzcr z`io vziojirj {lioir velefdo FMDV
jc~efcv/ @dlc mdbelezecv irc zu{efillu zco zemcv `ea`cr z`io z`iz dn {lioir co`iofcmcoz mdjc
MDVNCZv, eo z`c rcaedo dn 16;fm2^
-9v
-9/ Nsrz`crmdrc,
em{rd~cj vqezf`eoa jcliuv qez` rcncrcofc zd {lioir NCZv
migc VeOQ NCZv vseziblc ndr svc eo ldaef ferfsezv
d{crizeoa iz v{ccjv dszvejc z`c lemezv dn FMDV
zcf`odldau/96
E-^ jizi rcfdrjcj do eoje~ejsil {- ioj o-zu{c VeOQvv`dq i leocir rclizedov`e{ fdovevzcoz qez` D`mv liq,
q`ef` eojefizcv z`iz mczil-VeOQ fdozifzv qell odz
fdozrebszc zd odoleocir E-^ bc`i~edsr dn hsofzedov/ Ez `iv
bcco {dvveblc zd frcizc ODR aizcv dsz dn oiodvfilc
NCZv, q`ef` rdszeoclu cp`ebez aieov eo cpfcvv dn ne~c
vdmcz`eoa q`ef` illdqv z`cm zd bc eozcrfdoocfzcj
qez`dsz z`c occj ndr veaoil rcvzdrizedo iz cif` vziac/29
Ez
z`crcndrc vccmv fcrzieo z`iz dz`cr oiodvfilc ldaef aizcv irc {dvveblc, cez`cr bu fdovzrsfzedo nrdm
NCZv ioj jedjcv dr iz z`c z`c ~cru lcivz bu ODR em{lcmcozizedo/
Neasrc 08 VeOQ MDVNCZ/ (Gimeov, 2;;0%
Neasrc 58 I ndsr-irm zriovevzdr qez` jrieo ioj
vdsrfc fdoocfzedov/ Z`c bivc bcociz` z`c
oiodqercv ifzv iv i aizc/ (Mirzeocx cz il, 2;;6%
8/9/2019 Silicon Nanowires Research Report
10/30
[ i a c 9 ; d n 6 ;
6/9/9/ Mslze{lc-Lc~cl NCZv bu INM Oiodlez`dari{`u
Ez `iv bcco v`dqo bu Mirzeocx cz il/ z`iz i
arcizcr jcovezu dn NCZv fio bc if`ec~cj
bu z`c irrioacmcoz dn VeOQv eo i
mslze{lc-lc~cl fdovzrsfzedo ndr cpim{lc,z`c ndsr-irm zriovevzdr eo Neasrc 5,
fdovzrsfzcj nrdm zqd {cr{cojefslir VeOQv
ifrdvv i velefdo qincr/ Qez` z`c velefdo
qincr ifzeoa iv i aizc zcrmeoil, z`c jc~efc
fio bc fdovejcrcj zd `i~c ndsr vczv dn
jrieo-vdsrfc fdoocfzedov, cif` dn q`ef`
`iv ezv dqo f`irifzcrevzefv jczcrmeocj bu
z`c f`ioocl qejz`v ioj lcoaz`v eo cif`
fivc/ Z`c dsz{sz f`irifzcrevzefv irc
v`dqo eo Neasrc 9;/
6/9/2/ :om F`ioocl Qejz` NCZv bu INM Oiodlez`dari{`u
Iv jcvfrebcj cirlecr, VeOQ NCZv `i~c bcco nibrefizcj bu Mirzeocx cz il/ qez` f`ioocl qejz`v iv vmill
iv :om sveoa INM oiodlez`dari{`u/ Z`c dsz{sz f`irifzcrevzef ndr z`ev NCZ, v`dqo eo Neasrc 99, ev
~cru vemelir eo zcrmv dn fsrrcoz zd z`iz dn z`c mslze-lc~cl, ndsr-irm NCZ q`dvc f`ioocl lcoaz`v irc
z`rcc drjcrv dn miaoezsjc liracr bdz` if`ec~c
i jrieo-vdsrfc fsrrcoz dn i{{rdpemizclu :;oI
ndr i jrieo-vdsrfc ~dlziac dn 2^ ioj i aizc-
vdsrfc ~dlziac dn 6^/ @dqc~cr z`c jc~efc jdcv
odz i{{cir zd vizsrizc iv cirlu iv z`c ndsr-irm
NCZ, qez` i flcir arijecoz vzell ~eveblc iz i jrieo-
vdsrfc ~dlziac dn 9/3^ rcairjlcvv dn aizc-
vdsrfc ~dlziac/ Eo fdozrivz, z`c ndsr-irm NCZ
v`dqcj vizsrizedo iv cirlu iv 9^/ Z`c :om
f`ioocl qejz` NCZ ilvd cp`ebezv i ~cru v`illdq arijecoz eo z`c zredjc rcaedo, q`ef` lemezv ezv svc zd
vqezf`eoa i{{lefizedov vsf` iv jeaezil ldaef aizcv/
Neasrc 9;8 Dsz{sz f`irifzcrevzefv ndr z`c ndsr-irm zriovevzdr sveoa
jenncrcoz {ierv dn Jrieo-Vdsrfc zcrmeoilv/ (Mirzeocx cz il, 2;;0%
Neasrc 998 EJV-^JV f`irifzcrevzef ndr z`c :om f`ioocl-qejz`
zriovevzdr/ (Mirzeocx cz il, 2;;0%
8/9/2019 Silicon Nanowires Research Report
11/30
[ i a c 9 9 d n 6 ;
6/9/6/ Eozcariziblc Oiodqerc Zriovevzdrv
Z`c {lioir-fdm{izeblc zcf`oeysc jc~cld{cj bu
Ysezdreiod ioj Gimeov qiv jcvfrebcj cirlecr/ Eo
ijjezedo zd z`c ij~ioziacv ilrciju jevfsvvcj, z`c
clcfzrefil f`irifzcrevzefv dn NCZv {rdjsfcj sveoa z`evmcz`dj v`dq {rdmevc, cv{cfeillu q`co z`c eoniofu dn
z`c miosnifzsreoa zcf`oeysc ev zigco eozd iffdsoz/ Z`c
dsz{sz f`irifzcrevzefv eo Neasrc 92 v`dq rcivdoiblc
vizsrizedo, ioj qez` io Edo$Ednn rized dn i{{rdpemizclu 9;:,
z`c jc~efc fio bc svcj eo vsf` i qiu z`iz zcm{crizsrc
f`ioacv (q`ef` inncfz z`c z`rcv`dlj ~dlziac ioj firrecr
mdbelezu, ioj `cofc Edo ioj Ednn% jd odz eozcrncrc qez`
ferfsez {crndrmiofc/22
Z`c `ea` Edo$Ednn rized ilvd mciov
ldq {dqcr fdovsm{zedo q`elc eo z`c dnn vzizc/ Z`c
jc~efc cp`ebezv io eo~crvc vsb-z`rcv`dlj vld{c dn
i{{rdpemizclu 933m^ {cr jcfijc q`ef` ev iz z`c ldq
coj dn z`c v{cfzrsm eo fdm{irevdo zd vemelir jc~efcv
(q`ef` cp`ebez vld{cv dn bczqcco 92; ioj >;5m^92,26
%/
Z`ev mciov z`iz z`c jc~efc `iv i ldq eozcrnifc-vzizc
jcovezu ioj vd addj fds{leoa bczqcco z`c aizc ioj
f`ioocl io em{drzioz ncizsrc ndr im{lenefizedo ioj vcoveoa i{{lefizedov/
Neasrc 928 Dsz{sz f`irifzcrevzefv dn io !eozcariziblc!
VeOQ NCZ/ (Ysezdreiod . Gimeov, 2;;0%
8/9/2019 Silicon Nanowires Research Report
12/30
[ i a c 9 2 d n 6 ;
:/Odo~dlizelc Mcmdru sveoa Mdlcfslc-Aizcj Oiodqercv
Mddrcv Liq, ndrmslizcj bu Adrjdo Mddrc eo 95>3, v{cfslizcv z`iz z`c osmbcr dn zriovevzdrv z`iz fio
bc {lifcj do io eozcarizcj ferfsez qell jdsblc i{{rdpemizclu c~cru zqd ucirv2:/ Veofc 95>3, velefdo
zcf`odldau `iv ij~iofcj iz cp{docozeil rizcv ioj z`ev {rcjefzedo `iv `clj zrsc qez` io cpfcvv dn 9
belledo zriovevzdrv23 fsrrcozlu {lifciblc do io eozcarizcj ferfsez/ Z`ev ev mieolu jdoc z`rdsa` v`reogeoa
z`c vexc dn z`c zriovevzdr vd z`iz mdrc nez do zd z`c vimc eozcarizcj ferfsez/ @dqc~cr, z`ev slzemizclu
lcijv zd zrijcdnnv bczqcco {crndrmiofc, cocrau cnnefecofu2> ioj fdvz iv v{ifc bcfdmcv mdrc
rcvzrefzcj/ Ez ev z`dsa`z z`iz z`c lemezv dn {lioir velefdo zriovevzdr jemcovedov qell bc rcif`cj iz vdmc
{deoz eo z`c ocpz jcfijc/ Z`ev frcizcv i occj ndr ocq zcf`oefil jc~cld{mcozv/
Z`c svc dn `ubrej vzrsfzsrcv ev vdmcz`eoa z`iz ev legclu zd bc svcj qez`eo z`c velefdo eojsvzru eo z`c iej
dn migeoa zriovevzdrv c~cr vmillcr/ Z`crc irc fsrrcozlu zqd zcf`odldaecv bceoa `ci~elu rcvcirf`cj eozd
q`ef` fio mccz z`ev rcysercmcoz8 VeOQv ioj FOZv/ Eo v`drz, VeOQv irc f`dvco d~cr FOZv ndr z`c
rcivdov jcvfrebcj cirlecr8 z`cu rcmieo iv vcmefdojsfzdrv rcairjlcvv dn jeimczcr ioj z`cer jd{eoa
fio bc fdozrdllcj jsreoa vuoz`cvev q`ef` ev frsfeil ndr jc~efcv i{{lefizedov21
, z`sv illdqeoa z`cm zd bc
mdrc rcijelu eozcarizcj qez`eo z`c eojsvzru/
Z`c {rc~edsvlu jevfsvvcj `ea` {crndrmiofc VeOQ NCZv frcizcj bu Lecbcr20
lcj zd `ev rcvcirf` eozd
mdlcfslc-aizcj oiodqercv qez` rczcozedo zemcv eo cpfcvv dn 2; meoszcv25
q`ef` fio bc svcj ndr
odo~dlizelc mcmdru {sr{dvcv/ Z`cvc fio bc miosnifzsrcj sveoa iou dn z`c {rdfcvvcv {rc~edsvlu
jevfsvvcj ndr svc qez` NCZv/ Z`ev i{{lefizedo v`ill bc jevfsvvcj eo nsrz`cr jcziel/
I {-zu{c VeOQ NCZ ({-VeOQ NCZ% ev frcizcj bu ijjeoa iffc{zdr em{srezecv qez` jebdrioc (B 2@>%
fdmmdolu svcj/ O-zu{c VeOQ NCZv (o-VeOQ NCZ% irc frcizcj bu ijjeoa {`dv{`eoc ([@6% iv z`c
jdodr jd{ioz6;
/ Ziblc 9 v`dqv z`c fdm{irevdo dn z`c gcu jc~efc {irimczcrv dn i {-VeOQ NCZ ioj i
rcaslir {lioir Ve NCZ jc~efc/
{-VeOQ NCZ [lioir Ve NCZ
Aizc lcoaz` (om% 0;-2;;; (3;% 3;
Aizc dpejc z`efgocvv (om% >;; (9/3% 9/3
EDO (I$m% W^vj = 9^] 3;-2;; (2;;;-3>;;% >3;EDNN (oI$m% 2-3; (:-:3% 5
Vsbz`rcv`dlj vld{c (m^$jcf% 91:->;5 (>;% 1;
Zriovfdojsfziofc (V$m% 91-9;; (21;;-13;;% >3;
Ziblc 98 Fdm{irevdo dn gcu jc~efc {irimczcrv bczqcco VeOQ NCZv ioj {lioir Ve NCZv, bdz` qez` i fdm{iriblc jd{eoa rized
dn :;;;89 (Gsmir, 2;;0%/ Z`c VeOQ NCZ rcvslzv `i~c bcco vfilcj eo brifgczv sveoa i aizc lcoaz` dn 3;om ioj aizc dpejc
z`efgocvv dn 9/3om/(Lecbcr cz il, 2;;6%
Ez fio bc vcco nrdm Ziblc 9 z`iz vdmc gcu VeOQ NCZ jc~efc {irimczcrv fio c~co cpfccj z`dvc dn
{lioir Ve NCZv q`co bdz` `i~c vemelir jd{eoa lc~clv, slzemizclu lcijeoa zd bcocnezv ndr `ea`-v{ccjjc~efcv/
8/9/2019 Silicon Nanowires Research Report
13/30
[ i a c 9 6 d n 6 ;
Z`ev mcz`dj `iv veofc bcco co`iofcj qez` z`c svc dn jenncrcoz rcjdp ifze~c mdlcfslcv zd frcizc
vemelir jc~efcv bsz qez` jenncrcoz {rd{crzecv/
:/9/ Oiodqerc-Bivcj Odo~dlizelc Jc~efcv
O-zu{c eojesm {`dv{`ejc (o-Eo[%, o-zu{c aillesm oezrejc (o-AiO% ioj {-Ve oiodqercv fio ill bc svcjqez` rcjdp ifze~c mdlcfslcv eoflsjeoa ncrrdfcoc, xeof zczribcoxd{dr{`eoc ioj fdbilz {`z`ildfuioeoc
(Fd[f% zd frcizc z`cvc oiodqerc NCZv/ Ill z`c ibd~c {rd~ejc vemelir rcvslzv `dqc~cr, z`c
mcivsrcmcozv zigco ndr z`ev jc~efc qcrc sveoa o-Eo[OQ NCZv nsofzedoilevcj qez` Fd[f rcjdp
mdlcfslcv iv v`dqo eo Neasrc 96/ F`ldrdbcoxcoc vdlszedov dn Fd[f irc v{eo fdizcj q`ef` {rdjsfcv
i soendrm liucr dn z`c rcjdp mdlcfslcv do z`c oiodqerc
vsrnifcv qez` liucr z`efgocvv arcizcr z`io doc mdodliucr/25
Fdojsfziofc (A = E$^vj% iaieovz aizc ~dlziac (^a% jizi ndr io
o-Eo[OQ NCZ ev v`dqo eo Neasrc 9:, bcndrc ioj inzcr z`cijjezedo dn i Fd[f
liucr/ Bcndrc z`c
liucr ev ijjcj, z`c
rcv{dovc ev legc z`iz
dn io o-zu{c NCZ/
Inzcr z`c ijjezedo dn i
Fd[f liucr i lirac
`uvzcrcvev ev
i{{ircoz/ Iv z`c aizc
~dlziac ev eofrcivcj
nrdm ocaize~c zd
{dveze~c z`c f`ioocl fdojsfziofc vzirzv zd eofrcivc bcndrc
z`c arcco fsr~c, ioj ilvd eofrcivcv qez` i vzcc{cr arijecoz/ Iv z`c aizc ~dlziac ev z`co jcfrcivcj
nrdm {dveze~c zd ocaize~c z`c f`ioocl fdojsfziofc jcfrcivcv bcndrc z`c arcco fsr~c ioj iaieo qez` i
vzcc{cr arijecoz, z`sv {rdjsfeoa z`c `uvzcrcvev fsr~c/ Z`c jercfzedo ev v`dqo qez` irrdqv eo Neasrc
9:/ Z`ev ev svcj zd v`dq z`c zqd vzizcv dn i bevziblc vuvzcm
ioj z`sv fio bc svcj iv i z`rcc zcrmeoil vqezf` dr i
mcmdru jc~efc/ Z`c ldq fdojsfziofc vzizc fio bc viej zd
bc dnn, ioj z`c `ea` fdojsfziofc vzizc do/
Neasrc 93 v`dqv z`c vqezf`eoa dn z`c jc~efc sveoa i ^a {slvc
dn 9;^/ Z`c Fd[f mdjenecj NCZ v`dqv rc~crveblc vqezf`eoa
q`ef` fio bc mieozieocj ndr iz lcivz 9;; fuflcv bcndrc iou
jcarijizedo dn z`c rized ev dbvcr~cj ioj i f`ioac eo
fdojsfziofc nrdm irdsoj ;/9oV zd >;;oV/22
Z`ev qdslj vccm
zd fdonerm z`iz i mdlcfslc-aizcj oiodqerc NCZ fdslj bc svcj iv i bevziblc do$dnnvqezf`/
Neasrc 968 Oiodqerc bivcj odo~dlizelc
jc~efc/ Z`c mejjlc {efzsrc v`dqv io VCM
emiac dn i jc~efc qez` z`c ldqcr ferfslir{efzsrc v`dqeoa i ZCM emiac dn io o-
Eo[OQ/(Lecbcr cz il, 2;;2%
Neasrc 938 Rc~crveblc do$dnn vqezf`eoa dn z`c
o-Eo[OQ NCZ inzcr vsrnifc mdjenefizedo qez`
9v aizc {slvcv/(Lecbcr cz il, 2;;2%
Neasrc 9:8 A iaieovz a ndr io o-Eo[OQ NCZ
bcndrc (arcco% ioj inzcr (rcj% vsrnifc
mdjenefizedo qez` Fd[f ioj ^vj = ;/9^/
(Lecbcr cz il, 2;;2%
8/9/2019 Silicon Nanowires Research Report
14/30
[ i a c 9 : d n 6 ;
:/2/ Frdvvcj Oiodqerc Odo~dlizelc Jc~efcv
I frdvvcj oiodqerc (fOQ% NCZ svcv frdvvcj oiodqercv iv z`c NCZ f`iooclv ioj z`c aizc/ Z`ev
vzrsfzsrc, iv v`dqo eo Neasrc 9>, `iv ezv f`ioocl lcoaz` jcneocj bu z`c aizc oiodqerc jeimczcr7 ezv
ibelezu zd bc eozcarizcj ev jcneocj bu ivvcmblu ioj odz
lez`dari{`u/69
Rcvslzv ndr fdojsfziofc iaieovz aizc ~dlziac irc zigco, iv qez`
z`c o-Eo[OQ NCZ bsz z`ev zemc c~co liracr `uvzcrcvev fio bc
vcco eo Neasrc 91, fdonermeoa z`iz fOQ NCZv fio bc svcj iv
bevziblc vqezf`cv/
Mdrc veaoenefiozlu z`cvc NCZv fio sojcrad rc~crveblc vqezf`eoa
qez`dsz iou veaoenefioz f`ioac eo z`c fdojsfziofc rized ndr
`sojrcjv dn fuflcv/ Neasrc 90 v`dqv z`c rczcozedo zemcv ndr z`c
jc~efc q`ef` v`dq q`cz`cr z`cvc bevziblc vqezf`cv irc iblc zd
bc svcj ndr odo~dlizelc mcmdru {sr{dvcv/ Z`c eoezeil do$dnn
rized cpfccjv 9;:
iv z`c fdojsfziofc q`co doev arcizcr z`io
9;;;oV ioj q`co dnn ev lcvv z`io ;/9oV/ Bdz` fsr~cv vldqlu
jcfiu zdqirjv i vzciju vzizc jenncrcofc dn irdsoj 1;;oV/
Z`ev jenncrcofc ev mieozieocj ndr iz lcivz 2; meoszcv qez` dz`cr
zcvzcj jc~efcv iblc zd `dlj z`cer vzizc ndr vc~cril `dsrv/ Z`ev
`sac jenncrcofc eo rczcozedo zemcv ev vdmcz`eoa q`ef` rcysercv
nsrz`cr rcvcirf`7 `dqc~cr, ez ev z`dsa`z z`iz ez ev jsc zd
~ireizedov eo z`c birrecr vc{irizeoa io ifze~c oiodqerc fdrc
ioj z`c rcjdp ifze~c mdlcfslcv/25
Zd rcvzizc, bevziblc vqezf`cv fio bc fdovzrsfzcj do i oiod
vfilc sveoa bdz` oiodqerc NCZv ioj fOQ NCZv mdjenecj qez`
rcjdp ifze~c mdlcfslcv/ Z`cvc zqd jc~efcv ae~c do$dnn rizedv
cpfccjeoa 9;:
ioj rczcozedo zemcv dn iz lcivz 2; meoszcv jsc
zd z`c soeysc oizsrc dn z`c rcjdp mdlcfslcv/ Z`ev coiblcv
z`cm zd bc svcj ndr odo~dlizelc mcmdru {sr{dvcv/ Z`crc irc
vc~cril evvscv q`ef` nervz occj zd bc nifcj bcndrc iou nszsrc
zcf`odldau fio bc mdjenecj zd svc z`cvc jc~efcv/
Z`c rczcozedo zemc occjv zd bc dn i fdovevzcoz lc~cl ioj ilvd
msvz bc msf` `ea`cr z`io z`c 2; meoszcv rcfdrjcj iv
odo~dlizelc mcmdru ev vsf` z`iz z`c jizi msvz rcmieo q`co z`c
{dqcr ev vqezf`cj dnn/ Ez ev z`crcndrc vsezcj zd svc eo ~dlizelc mcmdru i{{lefizedov/
Neasrc 9>8 Frdvvcj oiodqerc bivcj
odo~dlizelc jc~efc qez` i oiodqerc bceoa
svcj iv z`c aizc/ Zd{ rea`z {efzsrc v`dqv ioVCM emiac dn i jc~efc/ (Lecbcr cz il, 2;;2%
Neasrc 918 A iaieovz a ndr i fOQ NCZ inzcr
vsrnifc mdjenefizedo qez` Fd[f/ (Lecbcr cz il,
2;;2%
Neasrc 908 Rczcozedo zemcv ndr i fOQ NCZ
jc~efc inzcr mdjenefizedo qez` Fd[F/ Z`c
s{{cr fsr~c v`dqv fdojsfziofc iaieovz
zemc inzcr z`c jc~efc qiv vqezf`cj do ioj
z`c ldqcr fsr~c inzcr z`c jc~efc qiv
vqezf`cj dnn/ (Lecbcr cz il, 2;;2%
8/9/2019 Silicon Nanowires Research Report
15/30
[ i a c 9 3 d n 6 ;
Iodz`cr mihdr {rdblcm ev `dq zd rc{ciz z`c vimc cp{cremcozil {rdfcjsrc bsz do i miosnifzsreoa
lc~cl/ Z`c rcvslzv occj zd bc rc{cizcj iaieo ioj iaieo zd covsrc fdovevzcofu ioj z`c cp{cremcozil
{rdfcjsrc occjv zd bc vem{lenecj vd z`iz mivv {rdjsfzedo dn z`cvc jc~efcv fio bc sojcrzigco/
Mddrcv liq ev vsrc zd `dlj zrsc eo z`c nszsrc iv z`c zcf`odldau cpevzv ndr oiodqercv zd rc{lifc
vziojirj {lioir jc~efcv/ @dqc~cr, mdrc rcvcirf` occjv zd bc fdojsfzcj eozd z`ev zcf`odldau ioj
mcz`djv dn nibrefizedo en qc irc zd vcc ez fdmc eozd mivv {rdjsfzedo/
8/9/2019 Silicon Nanowires Research Report
16/30
[ i a c 9 > d n 6 ;
3/Oiodvcovdrv Jczcfzedo dn JOI . JOI Vcyscofc
^ireizedov
Z`c nervz cp{cremcoz zd eofdr{drizc z`c ejci dn eozcarizeoa oiodzcf`odldau qez` vcovdrv qiv eo 955;,
qez` z`c jc{dvezedo dn eoje~ejsil pcodo izdmv do i oefgcl vsbvzrizc zd v{cll z`c ldad dn z`c fdm{szcr
fdm{iou EBM62
/ Veofc z`co, z`crc `iv bcco io eofrciveoa eozcrcvz v`dqo eo oiodvcovdrv, qez` i lirac
eofrcivc eo nsojeoa ioj rcvcirf` dsz{sz/
Io db~edsv ij~ioziac dn z`c svc dn oiodzcf`odldau ndr z`ev
i{{lefizedo ev i arciz jcfrcivc eo vexc, q`ef` migcv ez {dvveblc zd
eozcarizc oiodvcovdrv eozd miou mdjcro jiu jc~efcv/ Nsrz`cr
rcivdov ndr z`c eofrcivcj {d{slirezu qcrc liraclu jsc zd z`c
{rdmevc z`iz qiv vcco eo z`c ~iredsv i{{lefizedov66
dn z`cvcvcovdrv/
Eo z`c {ivz, bdz` firbdo oiodzsbcv ioj velefdo oiodqercv `i~c
bcco svcj eo z`c jczcfzedo dn JOI6:,63
ioj JOI vcyscofc
~ireizedov/ @dqc~cr, VeOQv irc {rcncrrcj zdjiu iv z`cer clcfzrefil
{rd{crzecv ioj vcoveze~ezu dn jczcfzedo fio bc ilzcrcj iffdrjeoa zd
occjv bu ijhsvzeoa z`c jd{ioz fdofcozrizedo ioj z`c OQ jeimczcr6>
/ Ilvd, velefdo dpejc liucr vsrnifcv
fio bc mdjenecj eo drjcr zd zieldr ez zd cez`cr bedldaefil dr f`cmefil rcfc{zdrv/ Z`ev vcfzedo dn z`c rc{drz
qell ndfsv do z`c i{{lefizedo dn z`c VeOQ oiodvcovdr eo z`c jczcfzedo dn JOI ioj JOI vcyscofc~ireizedov/
3/9/ Jc~efc Nibrefizedo
Z`c mieo oiodqerc ndr z`c JOI vcovdr ev nibrefizcj sveoa
adlj-fiziluvcj F^J/ Clcfzrefil fdozifzv irc z`co czf`cj
dozd z`c cojv qez` clcfzrdo-bcim lez`dari{`u/ Ez ev z`c
fdojsfziofc bczqcco z`cvc fdozifzv z`iz qell bc
eo~cvzeaizcj ioj svcj zd jriq fdoflsvedov/
Inzcr z`c izzif`mcoz dn z`c lcijv, z`c jc~efcv irc
f`cmefillu nsofzedoilevcj qez` {rdbc mdlcfslcv ndr JOI
vcoveoa cp{cremcozv/ Svsillu, doc dn z`c mcz`djv dn
fd~ilcoz beojeoa ev svcj zd ijj [OI {rdbcv dozd z`c
vsrnifc dn z`c oiodqerc/61,60
Bcndrc izzif`eoa z`c {rdbcv,
z`c vsrnifcv dn z`c VeOQv irc zrcizcj qez` qizcr ~i{dsr
{livmi/65
Neoillu, z`c VeOQ vsrnifcv irc cp{dvcj zd i 3m
[OI vdlszedo eo qizcr ndr 92 `dsrv/ I rdsa` jc~efc
vf`cmizef ev v`dqo eo Neasrc 2;/
Neasrc 958 VeOQ qez` Oefgcl fdozifzv/
(Fcozcr ndr Oiodvfilc Vfecofc,
[cooVzizc 9033`zz{8$$qqq/mrvcf/{vs/cjs$rcvcirf`$vccjv/iv{,
iffcvvcj 99$;2$;5%
Neasrc 2;8 (I% Vf`cmizef jeiarim dn i vcovdr
jc~efc fdovevzeoa dn z`c VeOQ (uclldq% qez` z`c
irrdq eojefizeoa jercfzedo dn vim{lc nldq {lifcj
do io dpejevcj Velefdo vsbvzrizc/ (B% [OI {rdbcv
do oiodqerc (F% [OI-JOI eozcrifzedo/ (Lecbcr cz
il, 2;;:%
http://www.mrsec.psu.edu/research/seeds.asphttp://www.mrsec.psu.edu/research/seeds.asphttp://www.mrsec.psu.edu/research/seeds.asp8/9/2019 Silicon Nanowires Research Report
17/30
[ i a c 9 1 d n 6 ;
3/2/ Vcoveoa Mcf`ioevm
Leocir fsrrcoz ~crvsv ~dlziac bc`i~edr ev {rcvcoz ndr ill jc~efcv, ioj z`cu `i~c fdojsfziofc ~ilscv
bczqcco 2;; ioj 91;;oV/
6>
[OI ev f`dvco ndr z`c {rdbcv bcfisvc ez v`dqv `ea` beojeoa
inneoezu zd ezv fdm{lcmcoziru JOI dr ROI vcyscofc ioj v`dqv
veoalc-bivc v{cfenefezu/:;
Nsrz`crmdrc, ez `iv `ea` f`cmefil
vzibelezu iaieovz bdz` zcm{crizsrc ioj {@, iv qcll iv `ea`
bedldaefil vzibelezu zd osflcivc ioj {rdzcivc/:9
Z`c [OI {rdbcv
do z`c VeOQ beoj qez` z`cer fdm{lcmcoziru JOI vim{lcv ioj
z`ev ilzcrv z`c {rd{crzu dn z`c VeOQ/ Z`c ari{`v bcldq v`dq
vdmc rcvslzv dn z`c ~ireizedov eo fdojsfziofcv z`iz qcrcdbvcr~cj s{do ijjezedo dn vmill ysiozezecv dn JOI/
Eo Neasrc 29, fdojsfziofc ev vcco zd rcmieo rclize~clu fdovzioz
bcndrc ijjezedo dn iou vsbvziofc ({deoz 9%/ @dqc~cr, i ~cru ri{ej
eofrcivc ev dbvcr~cj s{do ijjezedo dn z`c JOI vim{lc ({deoz 2%
ioj i msf` mdrc arijsil
eofrcivc zigcv {lifc inzcr z`iz
({deoz 6% d~cr `sojrcjv dn
vcfdojv/ Z`ev eofrcivc eofdojsfziofc fio bc cp{lieocj
bu io eofrcivc eo ocaize~c
vsrnifc jcovezu jsc zd z`c
beojeoa dn ocaize~clu f`iracj
dleadosflcdzejcv iz z`c vsrnifc/
Fdojsfzedo rcmieocj rdsa`lu
fdovzioz q`co i vdlszedo qez`dsz JOI eo ez qiv ijjcj, q`ef` fio
bc vcco eo Neasrc 22/ Ilvd, z`c f`ioac eo fdojsfzedo, v`dqo eo
Neasrc 26, qiv eovsbvziozeil q`co i vdlszedo fdozieoeoa JOI qiv
ijjcj zd z`c vsrnifc dn i VeOQ z`iz `ij ilrciju bcco `ubrejevcj
qez` fdm{lcmcoziru JOI vcyscofc/
Neasrc 2: v`dqv i fdmbeoizedo dn ill z`c rcvslzv jevfsvvcj ibd~c/
Q`co i JOI nrcc vdlszedo ev ijjcj, iv {rd~cj bcndrc, z`c
fdojsfziofc rcmieov fdovevzcoz/ @dqc~cr, z`crc irc zqd ocq
rcvslzv zd odzc `crc/ Nervzlu, z`c ijjezedo dn i JOI nrcc vdlszedo zd i
VeOQ q`ef` `iv ilrciju bcco `ubrejevcj qez` JOI v`ir{lu
Neasrc 298 Rcil zemc fdojsfziofc
rcv{dovc nrdm i VeOQ jc~efc qez` [OI
rcfc{zdr/ Z`c irrdq mirgv z`c zemc
q`co i >;nM QZ JOI vim{lc qiv
ijjcj/ (Lecbcr cz il, 2;;:%
Neasrc 268 Fdojsfziofc ~crvsv zemc ndr
VeOQ qez` leogcj [OI rcfc{zdr eo z`c
{rcvcofc dn 9;;nM MS JOI vim{lcv/
(Lecbcr cz il, 2;;:%
Neasrc 228 Zemc jc{cojcoz fdojsfziofc
eo JOI-nrcc vdlszedo/ (Lecbcr cz il, 2;;:%
Neasrc 2:8 Fdojsfziofc ~crvsv zemc ndr
[OI {rdbcj OQ jc~efc jsreoa nldq dn(9% JOI-nrcc vdlszedo, (2% 9;;nM MS
JOI (6% JOI-nrcc vdlszedo ioj (:%
9;;nM QZ JOI/ (Lecbcr cz il, 2;;:%
8/9/2019 Silicon Nanowires Research Report
18/30
[ i a c 9 0 d n 6 ;
jcfrcivcv z`c fdojsfziofc zd i{{rdpemizclu ezv dreaeoil ~ilsc (6%/ Vcfdojlu, z`c ijjezedo dn i jenncrcoz
zu{c dn JOI, QZ fdmbeoizedo vcyscofc (:% fisvcv i v`ir{ eofrcivc bsz d~cr i ldoacr zemc vfilc
z`io q`co z`c dreaeoil MS JOI vim{lc qiv ijjcj/ Z`ev v`dqv z`iz z`c [OI-{rdbcj VeOQ fio
jenncrcozeizc bczqcco jenncrcoz vcyscofcv dn JOI ioj `cofc jczcfz vcyscofc ~ireizedov eo ijjezedo zd
z`c vem{lc {rcvcofc dn JOI/
Eo vsmmiru, VeOQv z`iz irc nsofzedoilevcj qez` {c{zejc osflcef ifej ([OI% {rdbcv fio bc svcj zd
jczcfz JOI ioj JOI vcyscofc ~ireizedov bu mdoezdreoa ~ireizedov eo fdojsfziofc ifrdvv z`c cojv dn
z`c VeOQ eo rcil zemc qez` ~cru `ea` vcoveze~ezu ioj vclcfze~ezu/ Mdrc acocrillu, z`ev i{{rdif` `iv bcco
cpzcojcj zd z`c jczcfzedo dn dz`cr rirc acoczef mszizedo JOI dr jevcivcv, vsf` iv fuvzef nebrdvev6>
ioj `cofc bu cp{ldezeoa rcfcoz ij~iofcv eo lirac-vfilc ivvcmblu:9
, z`c eozcarizedo dn slzrivcoveze~c
oiodqerc oiodvcovdrv eozd miou i{{lefizedov `iv rc~dlszedoevcj JOI jczcfzedo ndr acoczef vfrccoeoa
ioj vzsjecv eo bedldau/
8/9/2019 Silicon Nanowires Research Report
19/30
[ i a c 9 5 d n 6 ;
>/Lez`esm Bizzcrecv qez` Velefdo Oiodqerc Iodjcv
Bizzcrecv irc svcj eo i brdij rioac dn
i{{lefizedov zd {dqcr jc~efcv dn miou vexcv qez`
i ~ireczu dn {dqcr rizeoav/ Ilz`dsa` ilgileoc
bizzcrecv irc z`c mdvz fdmmdo zu{c, lez`esm edo
mdjclv irc aieoeoa {d{slirezu jsc zd z`cer `ea`
fi{ifezu ioj rcvslzioz ldoa lenc/ Rcvcirf` ev odq
bceoa firrecj dsz sveoa fszzeoa cjac zcf`odldau
zd em{rd~c z`ev fi{ifezu c~co nsrz`cr8 velefdo
oiodqercv irc bceoa zreillcj iv iodjcv eo z`c
bizzcrecv/ Z`ev ocq zcf`odldau {rdmevcv zd
eofrcivc z`cer fi{ifezu bu vc~cril zemcv/:2
Z`c VeOQv svcj ndr z`c iodjc irc rdsa`lu 9;;om:6
eo jeimczcr ioj irc acocrillu nibrefizcj sveoa
z`c ^LV F^J zcf`oeysc/ Zu{efillu, z`c {rdfcvv dffsrv iz zcm{crizsrcv dn 3;;F ioj ibd~c zd ueclj
`ea`cr fi{ifezecv, veofc ez `iv bcco v`dqo z`iz z`c zcm{crizsrc ev i mihdr nifzdr eo jczcrmeoeoa z`c
i~ieliblc vzdriac fi{ifezu/ Eofrcivcj miosnifzsreoa zcm{crizsrc fdrrclizcv qez` eofrcivcj fi{ifezu/::
Z`cvc oiodqercv eo`crez z`c clcfzrefil f`irifzcrevzefv dn velefdo ioj z`sv jd odz occj jd{eoa zd fdozrdl
fdojsfze~ezu/
>/9/ Velefdo Oiodqercv iv Iodjc Mizcreilv
Z`c oiodqerc zcf`odldau `iv bcco v`dqo zd eofrcivc z`c
fi{ifezu dn i lez`esm bizzcru bu zco zemcv7 `dqc~cr, z`ev ev
odz z`c dolu ij~ioziac/ Eo ijjezedo zd co`iofcj clcfzrefil
f`irifzcrevzefv, z`c vzrsfzsril {rd{crzecv irc ilvd em{rd~cj/
Iodjcv mijc nrdm z`eo-nelm velefdo z`c fsrrcoz
zcf`odldau `i~c qcigcr vzrsfzsrcv z`iz irc {rdoc zd
nrifzsreoa inzcr vc~cril f`irac$jevf`irac fuflcv/ VeOQv
irc ardqo jercfzlu do z`c iodjc mizcreil q`ef` {rd~ejcv
doc dn z`c beaacvz ij~ioziacv i jercfz 9J clcfzrefil{iz`qiu illdqeoa ndr ~cru `ea` cnnefecofu dn f`irac
zriov{drz/:3
Veofc cif` oiodqerc ev fdoocfzcj zd z`c
iodjc clcfzrefillu, z`cu ill fdozrebszc zd z`c d~crill
fi{ifezu/ Q`co f`iraeoa$jevf`iraeoa dffsrv, z`c
oiodqercv f`ioac eo ~dlsmc bu s{ zd :;;# iv z`c lez`esm
edov rcifz ioj fdmbeoc qez` velefdo/:6,:3
VeOQv irc ilvd
inncfzcj bu fufleoa `dqc~cr, z`c cnncfz ev dolu veaoenefioz
inzcr iz lcivz 9; fuflcv/
Neasrc 2>8 ZCM emiac dn i veoalc VeOQ
{irzeillu fdizcj qez` Oefgcl bcndrc (f% ioj
inzcr (j% fufleoa (f`irac ioj jevf`irac%/ (Fse
cz il, 2;;0%
Neasrc 238 Nsllu Lez`eizcj VeOQv/ Eovcz8 Solez`eizcj
oiodqerc qez` Is-Ve illdu do zd{/ ([coa cz il, 2;;0%
8/9/2019 Silicon Nanowires Research Report
20/30
[ i a c 2 ; d n 6 ;
Doc dn z`c gcu f`irifzcrevzefv dn VeOQv ev z`c ~cru
`ea` vsrnifc irci-zd-~dlsmc rized/ Z`ev illdqv i
lirac osmbcr dn lez`esm edov zd rcifz qez` velefdo,
rcvslzeoa eo i `ea`cr fi{ifezu - s{ zd :2;;mI`a-9
`iv bcco rcfdrjcj eo z`c nervz f`irac fuflc/ Ijriqbifg dn z`c oiodqercv ev io errc~crveblc jrd{
eo fi{ifezu inzcr z`c nervz f`irac fuflc/ Ez v`dslj bc
odzcj z`iz z`c imdsoz dn f`irac vzdrcj eo z`c
VeOQv jsreoa f`iraeoa ev arcizcr z`io z`c f`irac
rclcivcj jsreoa z`c jevf`irac fuflc/ Z`ev ev jsc zd
z`c f`ioac eo ~dlsmc dn z`c VeOQv iv lez`eizedo ev
odz fdm{lczclu rc~crveblc/ Ndr z`c coj i{{lefizedo
z`ev mciov z`iz z`c i~ieliblc fi{ifezu dn z`c bizzcru ev rcjsfcj/ Z`c fi{ifezu ldvv jsreoa fufleoa ev
godqo iv nijeoa/ Vzsjecv fdojsfzcj iz Vziondrj Soe~crvezu `i~c v`dqo zd if`ec~c iz lcivz 13# dn z`c
mipemsm z`cdrczefil fi{ifezu (:2;;mI`a-9
% do vcfdoj fuflc ioj `ea`cr fi{ifezu s{ zd 5;# do z`c
z`erj fuflc:6
/ Jsreoa cp{cremcozizedo, ez qiv ilvd ndsoj z`iz `ea`cr f`iraeoa fsrrcozv rcvslzcj eo `ea`cr
fi{ifezecv/ Z`c f`iraeoa fuflc eo~dl~cv lez`esm edov rcifzeoa qez` velefdo7 z`ev rcvslzv eo io eofrcivc dn
z`c oiodqerc ~dlsmc/ Jsc zd z`c lirac vsrnifc irci, i lirac osmbcr dn lez`esm edov rcifz ioj z`sv z`c
~dlsmc eofrcivcv zd irdsoj :;;# dn ezv dreaeoil ~ilsc/:6
Z`c cp{cremcozv fdojsfzcj `i~c v`dqo z`iz
z`c jeimczcr eofrcivcv nrdm 05om zd 9:9om/ Z`ev ev v`dqo eo Neasrc 2> do z`c {rc~edsv {iac/ Z`c
ZCM emiac ilvd v`dqv z`iz z`c cp{iojcj
VeOQ qeojv ezvcln irdsoj z`c oefgcl fdizeoa/
Z`c oefgcl fdizeoa ev {rcvcoz zd v`dq z`c
f`ioac eo ~dlsmc/
I vzsju fdojsfzcj zd cpimeoc {dvveblc
i{{lefizedov ndr mefrd-bizzcrecv {rd~ejcv vdmc
rclc~ioz clcfzrdf`cmefil jizi/ I zu{efil
VeOQ, dn jeimczcr eo z`c rioac dn 2;;-6;;om
ardqo iz 33;F `iv io eoezeil fi{ifezu dn
913;mF/ Inzcr 2; fuflcv dn f`iraeoa ioj
jevf`iraeoa z`c nijeoa cnncfz rcjsfcv z`c
fi{ifezu zd irdsoj 13;mF:3
- i ldvv dn
i{{rdpemizclu 31#/ @dqc~cr, en z`c ardqz`
zcm{crizsrc ev eofrcivcj zd 313F, z`co z`ev fi{ifezu ev eofrcivcj zd 62;;mF/ Z`ev ev cyse~ilcoz zd
6;;;I`fm-2
/::
Iodz`cr vzsju v`dqv c~ejcofc dn `ea`cr fi{ifezecv fldvc zd z`c z`cdrczefil mipemsm
fi{ifezu (:2;;mI`a-9
%/ I nervz f`irac fi{ifezu dn :211mI`a-9
qiv if`ec~cj ioj i nervz jevf`irac
fi{ifezu dn 692:mI`a-9
qiv rcfdrjcj/ Z`ev eojefizcv i Fdsldmbef cnnefecofu dn 16# iv vzizcj
cirlecr/:6
I vcfdoj f`irac fi{ifezu qiv rcjsfcj bu 91# zd 63:9mI`a-9
ioj z`c jevf`irac fi{ifezu
dn 6956mI`-9
, eojefizeoa 5;# cnnefecofu/ Eo drjcr zd {lifc z`cvc neasrcv eo {crv{cfze~c, ez v`dslj bc
Neasrc 208 ^dlziac {rdnelcv dn VeOQv fuflcj iz ~irueoa rizcv/ OB/
F$2; {rdnelc ev nrdm vcfdoj fuflc/ (Fse cz il, 2;;0%
Neasrc 218 VeOQ f`irac$jevf`irac fi{ifezecv fdm{ircj
qez` dz`cr zcf`odldaecv d~cr 9; fuflcv/ (Fse cz il, 2;;0%
8/9/2019 Silicon Nanowires Research Report
21/30
[ i a c 2 9 d n 6 ;
odzcj z`iz z`c ari{`ezc svcj eo fsrrcoz lez`esm bizzcru iodjcv `iv i fi{ifezu dn 612mI`a-9
/ Z`ev fio
bc vcco eo Neasrc 21/
Neasrc 20 v`dqv f`irac$jevf`irac fuflcv iz jenncrcoz rizcv ioj ilvd z`c fi{ifezu/ Q`co f`iraeoa z`c
VeOQv iz i fsrrcoz cysil zd z`cer mcivsrcj fi{ifezu, rcncrrcj zd iv F, z`c d~crill fi{ifezu if`ec~cj
qiv ?29;;mI`a-9
/ Eo iodz`cr jc~efc i f`irac rizc dn F$3 if`ec~cj vziblc fi{ifezecv dn 63;;mI`a-9
d~cr 2; fuflcv/ Z`ev jizi flcirlu v`dqv i `ea`cr fi{ifezu dn vep zd oeoc zemcv z`ioz`iz dn fdo~cozedoil
ari{`ezc iodjcv/ Z`c F$2; rizc if`ec~cv z`c `ea`cvz fi{ifezu7 `dqc~cr, z`ev ari{` v`dqv z`c vcfdoj
fuflc doqirjv/:6
Z`sv z`c eoezeil nervz fuflc rizc dn :211mI`a-9
ev odz v`dqo/ Z`c {dveze~clu eofleocj
fsr~cv v`dq f`iraeoa q`elc z`c rcvz v`dq jevf`iraeoa/
Ez ev c~ejcoz z`iz iodjcv sveoa VeOQv `i~c ~cru `ea` fi{ifezu fdm{ircj qez` z`c zrijezedoil ari{`ezc
iodjcv/ Z`c fi{ifezu fio {dzcozeillu bc eofrcivcj bu 9; zemcv d~cr i lirac osmbcr dn fuflcv/
@dqc~cr, vdmc dbvziflcv, vsf` iv nijeoa, occj zd bc d~crfdmc zd if`ec~c `ea` cnnefecofu ioj lirac
fi{ifezu d~cr i rcivdoiblc osmbcr dn fuflcv/ VeOQv odz dolu {rcvcoz bczzcr clcfzrdf`cmefil
{rd{crzecv bsz ilvd vzrsfzsril ij~ioziacv/ Jsreoa f`iraeoa ioj jevf`iraeoa, z`c ~dlsmc fio f`ioac
veaoenefiozlu, bsz em{drziozlu z`c VeOQv jd odz nrifzsrc jsreoa z`ev {rdfcvv/ Z`cvc {rd{crzecv illdq ndr
z`c miosnifzsrc dn cpzrcmclu `ea` fi{ifezu bizzcrecv eo z`c nszsrc ndr ill clcfzrdoef jc~efcv {rd~ejeoa i
ldoacr lenc/
8/9/2019 Silicon Nanowires Research Report
22/30
[ i a c 2 2 d n 6 ;
1/Velefdo Oiodqerc Vdlir Fcllv
Co~erdomcozil fdofcrov irc i beaacr {irz dn dsr le~cv zdjiu z`io c~cr bcndrc ioj z`crc ev eofrciveoa
{rcvvsrc zd neoj ioj cp{ldez rcocqiblc cocrau/:>
Z`c Vso ev io izzrifze~c vdsrfc dn cocrau/:1
Ez
{rd~ejcv 9;;;;;ZQ dn cocrau, bsz zdjiuv {d{slizedo dolu occjv 96ZQ/ Vdlir fcllv irc i arciz qiu
zd `irocvv z`ev eofrcjeblc {dqcr ioj ez ev cvzemizcj z`iz bu fd~creoa hsvz ;/9# dn z`c Cirz`v vsrnifc
qez` vdlir fcllv dn 9;# cnnefecofu z`c qdrljv cocrau jcmiojv fdslj bc mcz /:0
Z`c nervz vdlir fcllv
qcrc eo~cozcj eo z`c 95:;v ioj veofc z`co z`c zqd zu{cv dn fcllv mdvz fdmmdolu svcj irc
{`dzd~dlzief ([^% fcllv ioj {`dzdclcfzrdf`cmefil ([CF% fcllv/:>
@dqc~cr, cnnefecofu lemezizedov ioj
`ea` clcfzrefezu {rdjsfzedo fdvzv `i~c {rc~cozcj vdlir cocrau nrdm bcfdmeoa mdrc {d{slir/
Z`c fsrrcoz f`illcoac ev zd cnncfze~clu if`ec~c meoeizsrevizedo dn z`cvc fcllv q`elc ijjrcvveoa evvscv dn
fdvz ioj bddvzeoa cnnefecofu/ Ndfsv `iv rcfcozlu bcco jercfzcj zdqirjv oiodzcf`odldau ioj z`c svc
dn oiodvzrsfzsrcv iv i vdlszedo zd z`c {rdblcm/
Velefdo ev i {d{slir f`defc jsc zd ezv ibsojiofc, i~ielibelezu ioj {rd~co {`dzd~dlzief {rd{crzecv eo
velefdo-bivcj vdlir fcllv i~ieliblc eo z`c mirgcz/ Rcvcirf` ev z`crcndrc sojcrqiu do zcf`odldaecv
sveoa velefdo oiodqercv/
1/9/ D{crizedo
Z`c fdofc{z bu q`ef` lea`z ev fdo~crzcj eozd clcfzrefezu ev z`c vimc ndr velefdo vdlir fcllv ioj ev
cp{lieocj bcldq/ Neasrc 25 v`dqv z`c bioj jeiarim dn i {o jedjc ndr vdlir cocrau `ir~cvzeoa/
Q`co lea`z v`eocv dozd z`c fcll, clcfzrdov eo z`c
~ilcofc bioj fio ibvdrb z`c cocrau dn z`c {`dzdo/ En
z`c cocrau ev arcizcr dr cysil zd z`c bioj-ai{ z`co
z`c clcfzrdo fio bc {rdmdzcj zd z`c fdojsfzedo bioj
lci~eoa bc`eoj i `dlc ioj `cofc acocrizeoa io
clcfzrdo `dlc {ier/ En z`c cocrau dn z`c {`dzdo ev
arcizcr z`io z`c rcysercj cocrau zd {rdmdzc z`c
clcfzrdo zd z`c fdojsfzedo bioj z`co z`c cpfcvv
cocrau qell bc rijeizcj iv `ciz/ Clcfzrdov irc
izzrifzcj bu ldq {dzcozeilv ioj `dlcv bu `ea`
{dzcozeilv/ Eo i {o hsofzedo z`c ldq {dzcozeil ev do z`c
o-zu{c vejc ioj z`c `ea` {dzcozeil do z`c {-zu{c vejc,
z`ev ev i rcvslz dn z`c jenncrcofc eo Ncrme lc~clv
bczqcco z`c o- ioj {-zu{c rcaedov/
Z`sv z`crc irc zqd fivcv8 En z`c clcfzrdo ev cpfezcj eo z`c {-zu{c rcaedo z`co ez qell bc izzrifzcj bu z`c
ldq {dzcozeil do z`c o-zu{c rcaedo ioj qell rdll jdqo z`c `ell rcvslzeoa eo fsrrcoz/ Fdo~crvclu en ez ev
cpfezcj do z`c o-zu{c vejc z`co ez vccv i {dzcozeil birrecr7 eo z`ev fivc, z`c `dlc acocrizcj qell bc
izzrifzcj bu z`c `ea` {dzcozeil do z`c {-zu{c vejc ioj flemb s{ z`c `ell iaieo rcvslzeoa eo fsrrcoz/
Neasrc 258 Cocrau bioj jeiarim ndr i {o-jedjc ndr vdlir
fcllv8 [`dzdov fio cpfezc clcfzrdov ioj {rdmdzc z`cm
nrdm z`c ^ilcofc Bioj zd z`c Fdojsfzedo bioj/ Z`ev
frcizcv io clcfzrdo `dlc {ier ioj fsrrcoz fio nldq/
(Arzxcl, 2;;1%
8/9/2019 Silicon Nanowires Research Report
23/30
[ i a c 2 6 d n 6 ;
Veofc z`c `dlcv ioj clcfzrdov nldq eo d{{dvezc jercfzedov bsz `i~c d{{dvezc veao, z`c fsrrcoz qell vsm
s{ eo doc jercfzedo nrdm z`c o-zu{c rcaedo zd z`c {-zu{c rcaedo/
1/9/9/ Jenncrcofc Bczqcco Oiodrdj Irriu ioj [lioir [`dzdclcfzrdjcv
Neasrc 6; v`dqv z`c acdmczru ndr oiodrdj (oiodqerc% irriuv/:5
Eo z`cvc z`c {o jedjc ev ndrmcj rijeillu, vsf` z`iz z`c fsrrcoz
fio nldq nrdm z`c eovejc dsz/ Z`ev coiblcv coaeoccrv zd
nibrefizc oiodrdjv q`ef` irc ipeillu ldoa codsa` zd ibvdrb
codsa` lea`z/ Bsz iz z`c vimc zemc z`c rijesv dn z`c oiodqercv
fio bc v`drzcr z`io z`c jennsvedo lcoaz`, q`ef` em{rd~cv z`c
jedjcv f`irifzcrevzefv/3;
1/2/ Ibvdr{zedo eo Velefdo Oiodqerc Irriuv
Ndr cnncfze~c vdlir zd clcfzrefil cocrau fdo~crvedo, ez ev
em{drzioz z`iz z`c mizcreil svcj fio ibvdrb z`c cocrau dn
{`dzdov cnnefecozlu d~cr i brdij rioac dn nrcyscofecv, e/c/
i `ea` ibvdr{ziofc ev occjcj/39
Z`c ibvdr{zedo v{cfzrsm qiv vemslizcj ndr VeOQ irriuviv v`dqo eo Neasrc 69/ Z`c {`dzdo cocrau ~irecj nrdm
ioj 9/9c^ zd :c^/ Cysizedo 9 rclizcv , z`c
ibvdr{ziofc, , z`c rcnlcfziofc, ioj (%, z`c
zriovmezziofc/ Ez v`dqv z`iz ldq rcnlcfziofc ioj
zriovmezziofc irc jcveriblc {rd{crzecv/
= 9 (%
Cysizedo 98 Rclizedo bczqcco fcll {irimczcrv (@s . F`co, 2;;1%
Neasrc 69 v`dqv z`c ibvdr{ziofc dn z`c irriu iv i nsofzedo
dn {`dzdo cocrau ioj, ndr fdm{irevdo, z`iz dn i
fdo~cozedoil nelm qez` z`efgocvv 2/66m/32
Z`crc irc z`rcc
zrifcv ndr z`c VeOQv, q`ef` fdrrcv{doj zd lcoaz`v dn
9/9>m, 2/66m ioj :/>>m/ Z`c jizi flcirlu jc{efzv z`iz
z`c VeOQ irriu `iv `ea` ibvdr{ziofc {rd{crzecv ibd~c
{`dzdo cocraecv dn 6c^, bsz ~cru ldq ibvdr{ziofc ndr ldq
nrcyscofecv iv fdm{ircj zd z`c nelm/ Mdrcd~cr, bu
eofrciveoa z`c lcoaz` dn z`c VeOQv (nrdm 9/9>m zd
Neasrc 6;8 Oiodqercv fio bc nibrefizcj vsf`
z`iz z`c rijesv ev z`eoocr z`io z`c jennsvedo
lcoaz`/ Z`ev em{rd~cv E-^ f`irifzcrevzefv,
bcfisvc rcfdmbeoizedo irjlu zigcv {lifc/
(@s . F`co, 2;;1%
Neasrc 698 Ibvdr{zedo v{cfzrsm dn i VeOQ irriu
ioj i nelm d~cr i {`dzdo qi~clcoaz`v rioac nrdm
9265om (eonrircj% zd 6;5om (slzri~edlcz%/ (@s .
F`co, 2;;1%
Neasrc 628 Rcnlcfziofc ioj zriovmezziofc dn
VeOQ ioj nelm/ (@s . F`co, 2;;1%
8/9/2019 Silicon Nanowires Research Report
24/30
[ i a c 2 : d n 6 ;
:/>>m% z`c nrcyscofu rioac dn ibvdr{ziofc fio bc cpzcojcj eozd z`c ldq nrcyscofu irci bu i vmill
imdsoz/
Neasrc 62 v`dqv z`c rcnlcfziofc (jiv`cj leocv% ioj zriovmezziofc (% (nsll leocv% dn i nelm ioj
VeOQ irriu cif` qez` i z`efgocvv dn 2/66m/32
Flcirlu z`c VeOQ irriu `iv i ldq rcnlcfziofc ndr z`c
nsll v{cfzrsm, bsz z`c `ea` zriovmezziofc iz ldq nrcyscofecv ev z`c fisvc ndr ldq ibvdr{zedo iz ldq
nrcyscofecv/ Filfslizedov `i~c v`dqo z`iz z`c ibvdr{zedo cnnefecofu irc 3/0#, 5/3#, 92/3# ioj
93/3# ndr z`c 3;om, >;om ioj 0;om ldoa VeOQ ioj z`c nelm rcv{cfze~clu/32
Ill eo ill, z`c ioiluvev v`dqv z`iz irriuv dn VeOQv `i~c veaoenefiozlu ldq ibvdr{ziofc eo z`c ldq
nrcyscofu rcaemc iv fdm{ircj zd z`c fdo~cozedoil nelmv z`iz `i~c bcco svcj/ @cofc z`c d~crill
ibvdr{zedo cnnefecofu dn z`c VeOQv qiv ldqcr z`io z`iz dn fdo~cozedoil nelmv, bsz fio bc em{rd~cj bu
miosnifzsreoa ldoacr VeOQv/
1/6/ Velefdo Oiodqerc Jc~efcv ndr [`dzd~dlziefv
Fsrrcozlu, z`crc ev i ldz dn rcvcirf` adeoa eozd jenncrcoz zu{cv dn jc~efcv sveoa
VeOQv ndr {`dzd~dlziefv/ Iv v`dqo eo z`c d{crizedov vcfzedo, eo acocril i {o
jedjc ev rcysercj/ Z`c mieo ~ireiblc ndr nibrefizeoa jenncrcoz VeOQv ev z`c
acdmczru dn z`c {o jedjc/ Z`crc irc fsrrcozlu zqd acdmczrecv8 ipeil ioj rijeil
(fdipeil%/ Z`c jenncrcofc bczqcco z`cvc zqd ev z`iz eo z`c ndrmcr z`c oiodqerc
fdovevzv dn i vcamcoz q`ef` ev {-zu{c ioj o-zu{c zd ndrm z`c {o hsofzedo ipeillu,
q`crciv eo z`c lizzcr z`c VeOQ fdrc ev mijc dsz dn {-zu{c ioj z`c v`cll dsz dn o-
zu{c zd ndrm i {o jedjc rijeillu/ Eo acocril fdipeil rdjv irc svcj ndr z`coiodrdjv eo irriuv ndr vdlir fcllv iv ellsvzrizcj eo Neasrc 66/
36Z`c ocpz zqd
vcfzedov qell jevfsvv z`c f`irifzcrevzefv dn zqd jc~efcv q`ef` fio bc svcj ndr
vdlir cocrau `ir~cvzeoa/ Z`c nervz ev ibdsz Vliozeoalu-Ileaocj VeOQ Irriuv ioj
z`c vcfdoj ibdsz Veoalc ioj Ziojcm Ipeil {-e-o VeOQv/
1/:/ Vliozeoalu-Ileaocj Velefdo Oiodqerc Irriuv
Eo z`ev jc~efc z`c VeOQ irc vliozcj (VIVeOQ%
iv fdm{ircj zd ~crzefillu-ileaocj (^IVeOQ%
ioj z`c {o jedjc ev ndrmcj rijeillu iv v`dqo eo
Neasrc 66/36
Ez ev nibrefizcj bu f`cmefil czf`eoa
dn i flciocj {-Ve
Rcairjeoa z`c ibvdr{zedo
{rd{crzecv, ez qiv ndsoj z`iz z`c ocq VI-VeOQv
rcnlcfz vlea`zlu mdrc z`io z`c ^I-VeOQv/ Z`c
nifz z`iz z`c VeOQv irc vliozcj {rdbiblu
imdsozv zd i `ea`cr rcnlcfziofc/ Ilz`dsa` z`cNeasrc 6:8 E^ f`irifzcrevzefv dn VI-VeOQ, q`ef` ij ioocnnefecofu dn 99/61#, io d{co ferfsez ~dlziac 30;/23m^ ioj i
v`drz ferfsez fsrrcoz 2>mI/ (Nioa cz il, 2;;0%
Neasrc 668 Acdmczru dni fdipeil {-e-o jedjc/
Z`c eoflsvedo dn
eozreovef Velefdo
bczqcco z`c o- ioj {-
zu{c rcaedov em{rd~cv
jedjc f`irifzcrevzefv/
(Lecbcr cz il, 2;;1%
8/9/2019 Silicon Nanowires Research Report
25/30
[ i a c 2 3 d n 6 ;
^I-VeOQv `ij bczzcr ibvdr{ziofc, z`c VI-VeOQv {crndrmcj bczzcr/ Z`c rcivdo ndr z`ev fdslj bc z`iz
eo z`c lizzcr, z`c clcfzrdjc nelm do z`c vsrnifc dn z`c irriuv fdslj {rdbiblu em{rd~c z`c fdozifz ioj
jcfrcivc z`c rcvevziofc ldvv/:>
Ziblc 2 v`dqv z`c em{rd~cmcoz eo cnnefecofu ioj z`c jcfrcivc eo
vcrecv rcvevziofc (RV% q`ef` rcvslz eo io cnnefecofu em{rd~cmcoz/
Ziblc 28 Cnnefecofu, vcrecv ioj v`soz rcvevziofc dn I- ioj VI-ileaocj VeOQv/ (Nioa cz il, 2;;0%
Doc jevij~ioziac dn VI-VeOQv ev z`c ldq meodrezu firrecr lenczemc/ Eo bslg velefdo qincr z`c lenczemc ev
ibdsz 9;/>v bsz eo z`c irriu ez ev dolu 9/1v/:>
Z`ev mciov z`iz rcfdmbeoizedo zigcv {lifc iz i `ea`cr
rizc ioj lemezv fsrrcoz/ @cofc z`ev ev io irci q`crc cnndrz ev rcysercj zd neoj qiuv dn eofrciveoa z`c
firrecr lenczemc ioj z`sv em{rd~eoa z`c cnnefecofu/
1/3/ Veoalc Ipeil {-e-o Oiodqercv ndr Vdlir Cocrau @ir~cvzeoa
Iv z`c oimc vsaacvzv, z`ev ioiluvev qell fdofcozrizc do z`c {`dzd~dlzief f`irifzcrevzef dn i veoalc ipeil
{-e-o oiodqerc v`dqo eo Neasrc 63/3:
Eo fdozrivz zd z`c VI-VeOQ
mdjcl, z`c {o jedjc dn z`ev jc~efc ev ndrmcj ipeillu, q`ef` mciov
z`iz z`c fsrrcoz qell nldq ildoa z`c ipev dn z`c oiodrdj/ Z`ev ipeil
VeOQ ev nibrefizcj sveoa z`c adlj oiod{irzeflc-fiziluvcj ^LV
ardqz` mcz`dj/ Z`c ipeil ~ireizedo eo jd{eoa ev if`ec~cj bu f`ioaeoa z`c aiv rcifzioz, iv jevfsvvcj
eo vcfzedo 2/6/
Z`c E-^ f`irifzcrevzefv qcrc cvziblev`cj sojcr jirg fdojezedov
qez` e-rcaedo qejz`v dn ;m (rcj zrifc%, 2m (arcco zrifc% ioj
:m (blifg zrifc% ioj ev v`dqo eo Neasrc 6>/ Z`c neasrc flcirlu
vsaacvzv z`iz z`c oiodqerc `iv vemelir f`irifzcrevzefv zd z`iz dn i
{lioir {o-jedjc8 Z`c dovcz ~ilsc ev zu{efillu fldvc zd ;/1^ ioj
z`c fsrrcoz revcv vzcc{lu nrdm z`ev {deoz doqirjv/3:
Mdrcd~cr, ez ev
odzefciblc z`iz eofrciveoa z`c e-rcaedo qejz` rcvslzv eo i vmillcr
rc~crvc beiv fsrrcoz q`ef` ev jcveriblc/
[`dzd~dlzief {rd{crzecv qcrc dbzieocj sojcr io ellsmeoizedo eozcovezu
dn 9;;mQfm-2
/3:
Ez zsrocj dsz z`iz z`c jc~efcv qez` jenncrcoz e-rcaedo
qejz`v v`dqcj em{rd~cj f`irifzcrevzefv qez` io eofrcivc eo z`ev
qejz`, iv v`dqo eo Ziblc 6/
@dqc~cr, z`c mipemsm cnnefecofu dn z`ev jc~efc ev dolu ;/3#, q`ef` ev ~cru ldq fdm{ircj zd
ilzcroize~c VeOQ jc~efcv (vsf` iv z`c VI-VeOQ% q`ef` cp`ebez cnnefecofecv dn irdsoj 9;#/
^I-VeOQ irriu fcllv VI-VeOQ irriu fcllv
(#% 5/69 0/>> 0/59 9;/10 99/61 9;/>>
Rv(% 2/:5 2/00 2/>: 9/6> 9/22 9/60
Rv`(% :113 93:6 :12; 9930 6333 >69
Neasrc 6>8 E-^ f`irifzcrevzef dn
veoalc ipeil {-e-o VeOQ ndr jenncrcoz
qejz`v dn z`c e-rcaedo/ (Gcm{i,
2;;0%
Neasrc 638 I veoalc ipeil {-e-o VeOQ/
(Gcm{i, 2;;0%
8/9/2019 Silicon Nanowires Research Report
26/30
[ i a c 2 > d n 6 ;
Ziblc 68 [`dzd~dlzief F`irifzcrevzefv dn veoalc {-e-o VeOQv ndr jenncrcoz qejz`v dn z`c e-rcaedo/ (Gcm{i, 2;;0%
Eo fdoflsvedo, z`ev vcfzedo `iv brecnlu jevfsvvcj `dq vdlir fcllv qdrg eo acocril, {deozeoa dsz z`c mieo
ij~ioziac dn sveoa oiodrdjv d~cr {lioir vdlir fcllv ioj z`c em{drziofc dn addj ibvdr{ziofc
f`irifzcrevzefv eo vdlir cocrau `ir~cvzeoa/
Mdrcd~cr, z`crc irc mieolu zqd zu{cv dn VeOQv ndr vdlir cocrau8 rijeil ioj ipeil/ Flcirlu z`c VI
VeOQv, q`ef` svc fdipeil {o jedjcv irc fsrrcozlu z`c mdvz cnnefecoz vdlir fcllv sveoa oiodrdjv,
q`crciv veoalc ipeil oiodqercv `i~c i ~cru ldq cnnefecofu/ @cofc z`c nszsrc dn VeOQv eo z`c irci dn
vdlir cocrau lecv eo fdipeil VeOQv/
e-rcaedo qejz` (m% ^df (^% Evf ({I% Cnnefecofu (#%
; ;/92 6/3 O$I
2 ;/2: 9: O$I
: ;/25 69/9 ;/3
8/9/2019 Silicon Nanowires Research Report
27/30
[ i a c 2 1 d n 6 ;
0/Fdoflsvedo
Velefdo oiodqercv irc i {rdmeveoa vdlszedo zd z`c nszsrc f`illcoac dn jc~efc meoeizsrevizedo/ Z`cu fio
bc vuoz`cvevcj bu jenncrcoz mcz`djv, jc{cojeoa do z`c i{{lefizedo ndr q`ef` z`cu irc svcj/ Z`cu ircmslzensofzedoil ioj fio bc svcj eo i qejc rioac dn vezsizedov/ @dqc~cr, rcvcirf` ev vzell doadeoa zd
jczcrmeoc zd q`iz cpzcoz z`cu fio bc svcnsl/
Eoezeil rcvslzv `i~c {rd~cj {dveze~c ioj ez `iv bcco v`dqo z`iz VeOQv fio {liu io cnncfze~c rdlc eo z`c
nibrefizedo dn clcfzrdoef fdm{docozv vsf` iv NCZv ioj odo~dlizelc mcmdru/ Z`c VeOQ NCZv irc
ij~ioziacdsv bcfisvc z`cer clcfzrefil {rd{crzecv fldvclu rcvcmblc z`iz dn ejcil zriovevzdrv uecljeoa
bczzcr rcvslzv q`elc illdqeoa ndr eofrcivcj zriovevzdr jcovezecv bcfisvc dn z`cer rcjsfcj vexc/ Vemelirlu,
vzsjecv `i~c v`dqo z`iz VeOQv irc fi{iblc dn vzdreoa jizi do i oiod-vfilc, vdmcz`eoa {rc~edsvlu
soizzieoiblc/ F`illcoacv ndr VeOQv eo odo~dlizelc mcmdru eoflsjc eofrciveoa z`c rczcozedo zemc dn z`cmcmdru nrdm z`c fsrrcoz 2; meoszcv ioj dbzieoeoa i nibrefizedo {rdfcvv z`iz qdslj illdq ndr mivv
{rdjsfzedo/
Rcvcirf` ev ilvd fsrrcozlu doadeoa zd eo~cvzeaizc z`c rdlc dn VeOQ iv oiodvcovdrv q`elc dz`cr ards{v
irc ndfsvcj do jc~cld{eoa `ea` fi{ifezu bizzcrecv/ Sveoa VeOQv eo oiodvcovdrv v`dqv z`c zrsc
{dzcozeil dn oiodqercv, brejaeoa z`c ai{ bczqcco bedldau ioj clcfzrdoefv/ Jczcfzedo dn JOI ioj dz`cr
bedldaefil mdlcfslcv, vsf` iv {rdzceov ioj ~ersvcv ev {dvveblc jsc zd io ifze~c vezc q`ef` f`ioacv z`c
fdojsfzedo dn z`c oiodqercv eo z`c {rcvcofc dn z`c ifze~c mizcreil/ Z`c svc dn VeOQv eo lez`esm
bizzcrecv `iv {rd~cj zd bc ij~ioziacdsv qez` eofrcivcj bizzcru fi{ifezu ioj arcizcr rcvevziofc zdf`irac fuflcv/ @dqc~cr, cp{crzv iarcc z`iz z`crc ev vzell rddm ndr em{rd~cmcozv eo cnnefecofu ioj
fi{ifezu ldvvcv/
Ijjezedoillu, VeOQv `i~c v`dqo {rdmeveoa rcvslzv eo z`c neclj dn {`dzdoefv jcv{ezc rcvcirf` bceoa eo
z`c {rclemeoiru vziac/ Rcvcirf` fdojsfzcj zd jczcrmeoc q`ef` mcz`dj dn nibrefizedo {rdjsfcv z`c
mdvz cnncfze~c oiodqercv ndr vdlir i{{lefizedov, `i~c v`dqo z`iz fdipeil oiodqercv dnncr z`c mdvz
bcocnezv d~cr ipeil oiodqercv ioj fdo~cozedoil vdlir fcllv/
VeOQv `i~c v`dqo codrmdsv {dzcozeil eo mcczeoa z`c jcmioj ndr vmillcr, mdrc {dqcrnsl jc~efcv/
@dqc~cr, ez ev flcir z`iz nsrz`cr rcvcirf` msvz vzell bc jdoc zd nsllu sojcrvzioj ioj fdozrdl z`c
{rd{crzecv dn VeOQv/ Doc z`eoa ev fcrzieo8 qc `i~c ill bsz alem{vcj z`c svcnslocvv dn VeOQv/
8/9/2019 Silicon Nanowires Research Report
28/30
[ i a c 2 0 d n 6 ;
5/Rcncrcofcv
Miosnifzsreoa {rdfcvvcv
9V`irmi, V/7 Gimeov, Z/ E/7 Qelleimv, R/ V/, Vuoz`cvev dn Z`eo Velefdo Oiodqercv Sveoa Adlj-Fiziluxcj F`cmefil
^i{dr Jc{dvezedo, I{{lecj [`uvefv I, 0;, >, 9223-9225, 2;;3
2[izdlvgu, N/7 X`coa, A/7 Lecbcr, F/ M/, Nibrefizedo dn Velefdo Oiodqerc Jc~efcv ndr Slzrivcoveze~c, Libcl-Nrcc,
Rcil-Zemc Jczcfzedo dn Bedldaefil ioj F`cmefil V{cfecv, Oizsrc [rdzdfdlv, 9, :, 9199-912:, 2;;>
6Fruvzcf Zcf`odldau Zrijeoa Amb@, [livmi-Co`iofcj F`cmefil ^i{dr Jc{dvezedo, [CF^J, Sojizcj,
I~ieliblc nrdm8 zz{8$$qqq/fruvzcf/fdm$zrejc{c/`zm WIffcvvcj 9;z`
Ncbrsiru 2;;5]
:Rcxi, M/7 Rij, C/7 Lcc, F/ cz il, Oiodfruvzilleoc Velefdo Nelmv Jc{dvezcj bu RN [CF^J ndr Bdzzdm-Aizc Z`eo-
nelm Zriovevzdrv, Mizcreilv Rcvcirf` Vdfeczu, 59;, I22-96-9->, 2;;>3
Qiaocr, R/ V/7 Cllev, Q/ F/, ^i{dr-Leysej-Vdlej Mcf`ioevm dn Veoalc Fruvzil Ardqz`, I{{lecj [`uvefv Lczzcrv, :,3, 95>:
>Uioa, [/, F`cmevzru ioj {`uvefv dn velefdo oiodqerc, Jilzdo Zriovifzedov, 66, :601-:659, 2;;0
1Lecbcr, F/ M/, Oiodvfilc Vfecofc ioj Zcf`odldau8 Bseljeoa i Bea Nszsrc nrdm Vmill Z`eoav, MRV Bsllczeo, 20,
:0>-:59, 2;;6
0Nioa, @/7 Le, P/7 Vdoa, V/7 Ps, U/7 X`s, H/, Nibrefizedo dn vliozeoalu-ileaocj velefdo oiodqerc irriuv ndr vdlir fcll
i{{lefizedov, Oiodzcf`odldau, 95, 2331;6, 2;;0
5[coa, G/7 X`e{coa, @/7 X`s, H/, Nibrefizedo dn Lirac-Irci Velefdo Oiodqerc {-o Hsofzedo Jedjc Irriuv,
Ij~iofcj Mizcreilv, 9>, 16, 2;;:
9;Uioa, U/ @/7 Qs, V/ H/7 F`es, @/ V/7 Leo, [/ E/7 F`co, U/ Z/, Fiziluzef Ardqz` dn Velefdo Oiodqercv Ivvevzcj bu
Livcr Iblizedo, Hdsroil dn [`uvefil F`cmevzru B, 9;0, 6, 0:>, 2;;3
99Qioa, X/ L/, Oiodqercv ioj Oiodbclzv(V{reoacr, 2;;6%
Neclj Cnncfz Zriovevzdrv
92Fse, U/7 X`doa X/7 Qioa J/7 Qioa Q/7 Lecbcr F/ M/, @ea` [crndrmiofc Velefdo Oiodqerc Neclj Cnncfz
Zriovevzdrv, Oiod Lczzcrv, 6, 9:5, 2;;6
96Peioa H/7 Ls Q/7 @s U7 Qs U7 Uio @7 Lecbcr F/ M/7 Ac$Ve Oiodqerc `czcrdvzrsfzsrcv iv `ea`-{crndrmiofc neclj-
cnncfz zriovevzdrv, Oizsrc, ::9, :05, 2;;>
9: Mirzcl R/7 Vf`mejz Z/7 V`ci @/ R/7 @crzcl Z/7 I~dsrev [`/, Veoalc ioj mslze-qill firbdo oiodzsbc neclj-cnncfzzriovevzdrv, I{{lecj [`uvefv Lczzcrv, 16, 91, 9550
93Fse U/7 Jsio P/7 @s H/7 Lecbcr F/ M/, Jd{eoa ioj Clcfzrefil Zriov{drz eo velefdo oiodqercv, I{{lecj [`uvefil
F`cmevzru B, 9;:, 22, 2;;;
9>Vzcro, C/ cz il, Libcl-nrcc emmsodjczcfzedo qez` FMDV-fdm{izeblc vcmefdojsfzeoa oiodqercv, Oizsrc, ::3,
395, 2;;1
91Fdlle, I/7 Nivdle, I/7 [evioi, V/7 Ns, ^/7 Bccf`cr, [/7 Meloc, Q/ E/7 Ncrrire, I/ F/, Oiodqerc lez`dari{`u do Velefdo7
Oiod Lczzcrv, 0, 9630, 2;;0
90Gdd, V/ M/7 Cjclvzceo, M/ J/7 Le, Y/7 Ref`zcr, F/ I/7 ^dacl, C/ M/, Velefdo oiodqercv iv co`iofcmcoz-mdjc
Vf`dzzgu-birrecr neclj-cnncfz zriovevzdrv, Oiodzcf`odldau, 9>, 9:02, 2;;3
95Mirzeocx H/7 Mirzocx R/ ^/7 Airfei R/, Velefdo Oiodqerc Zriovevzdrv qez` i F`ioocl Qejz` dn :om Nibrefizcj
bu INM Oiodlez`dari{`u, Oiod Lczzcrv, 0, 6>6>, 2;;0
8/9/2019 Silicon Nanowires Research Report
29/30
[ i a c 2 5 d n 6 ;
2;Ysezdreiod O/ H/7 Gimeov Z/ E/, Eozcariziblc Oiodqerc Zriovevzdrv, Oiod Lczzcrv, 0, ::9;, 2;;0
29X`doa X/7 Uioa F/7 Lecbcr F/M/, Velefdo Oiodqercv ioj Oiodqerc @czcrdvzrsfzsrcv, Oiodvelefdo (Clvc~ecr,
2;;0% {{/ 91>-29>
22[izcoz Vzdrm, SV [izcoz >591261 Zcm{crizsrc jc{cojcoz rcaslizedo dn z`rcv`dlj ~dlziac, 2;;3 I~ieliblc
nrdm8 `zz{8$$qqq/{izcozvzdrm/sv${izcozv$>591261$jcvfre{zedo/`zml WIffcvvcj 9;z`
Ncbrsiru 2;;5]
26Bhdrg, M/ Z/7 @iujco, D/7 Vf`mej, @/7 Recl, @/7 Recvv, Q/, ^crzefil vsrrdsoj-aizcj velefdo oiodqerc em{ifz
edoexizedo neclj-cnncfz zriovevzdrv, I{{lecj [`uvefv Lczzcrv, 5;, 9:299;, 2;;1
Odo~dlizelc Mcmdru sveoa Mdlcfslc-Aizcj Oiodqercv
2:Eozcl Fdr{drizedo, Mddrcv Liq, sojizcj, I~ieliblc nrdm8 `zz{8$$qqq/eozcl/fdm$zcf`odldau$mddrcvliq$eojcp/`zm
WIffcvvcj 9;z`
Ncbrsiru 2;;5]
23Eozcl Fdr{drizedo, >; Ucirv dn z`c Zriovevzdr8 95:1 2;;1, 2;;1, I~ieliblc nrdm8
`zz{8$$qqq/eozcl/fdm$zcf`odldau$zemcleoc/{jn WIffcvvcj 9;z`
Ncbrsiru 2;;5]
2>Gioclldv, M/, Ocq Lenc ndr Mddrcv Liq, 2;;3, I~ieliblc nrdm8 `zz{8$$ocqv/focz/fdm$Ocq-lenc-ndr-Mddrcv-
Liq$2;;5-9;;>T6-3>12:03/`zml WIffcvvcj 9;z`
Ncbrsiru 2;;5]
21@sioa, U/7 Jsio, P/7 Fse, U/7 Lecbcr, F/ M/, Aillesm Oezrejc Oiodqerc Oiodjc~efcv, Oiod Lczzcrv, 2, 2, 9;9,
2;;2
20Fse, U/7 X`doa, X/7 Qioa, J/7 Qioa, Q/7 Lecbcr, F/ M/, @ea` [crndrmiofc Velefdo Oiodqerc Neclj Cnncfz
Zriovevzdrv, Oiod Lczzcrv, 6, 9:5, 2;;6
25Jsio, P/7 @sioa, U/7 Lecbcr, F/ M/, Odo~dlizelc Mcmdru ioj [rdarimmiblc Ldaef nrdm Mdlcfslc-Aizcj
Oiodqercv, Oiod Lczzcrv, 2, :01, 2;;2
6;Gsmir, ^/, Oiodvelefdo (Clvc~ecr, 2;;0%
69@sioa, U/7 Jsio, P/7 Fse, U/7 Lis`do, L/ H/7 Gem, G/-@/7 Lecbcr, F/ M/, Ldaef Aizcv ioj Fdm{szizedo nrdm
Ivvcmblcj Oiodqerc Bseljeoa Bldfgv, Vfecofc, 25:, 33:3, 9696, 2;;9
Oiodvcovdrv Jczcfzedo dn JOI . JOI vcyscofc ~ireizedov62
Bdasc, R/ Q/, Oiodzcf`odldau8 q`iz irc z`c {rdv{cfzv ndr vcovdrv4Vcovdr Rc~ecq, 2:, 6, 236, 2;;:
66Vmez`, V/7 Oiacl, J/ H/, Oiodzcf`odldau-Coiblcj Vcovdrv8 [dvvebelezecv, Rcilezecv, ioj I{{lefizedov, Vcovdrv
Miaixeoc, 2;;6, I~ieliblc nrdm8 `zz{8$$qqq/vcovdrvmia/fdm$vcovdrv$irzeflc$irzeflcJcziel/hv{4ej=6>9261
WIffcvvcj 9;z`
Ncbrsiru 2;;5]6:
Zioa, P/7 Biovirsoze{, V/ cz il/, Firbdo Oiodzsbc JOI vcovdr ioj vcoveoa mcf`ioevm, Oiod Lczzcrv, >, 0,9>62-9>6>, 2;;>
63X`ioa, A/ H/7 X`ioa, A/7 F`si, H/ @/, JOI Vcoveoa bu Velefdo Oiodqerc8 F`irac Liucr Jevziofc Jc{cojcofc,
Oiod Lczzcrv, 0, :, 9;>>-9;1;, 2;;0
6>@i`, H/7 Lecbcr, F/ M/, Jercfz Slzrivcoveze~c Clcfzrefil Jczcfzedo dn JOI ioj JOI Vcyscofc ^ireizedov Sveoa
Oiodqerc Oiodvcovdrv, Oiod Lczzcrv, :, 9, 39-3:, 2;;:
61F`revcu, L/ I/7 Lcc, A/ S/7 DNcrrill, C/, Fd~ilcoz Izzif`mcoz dn Vuoz`czef JOI zd Vcln-Ivvcmblcj Mdodliucr
Nelmv, Osflcef Ifejv Rcvcirf`, 2:, 93, 6;69, 955>
60Bcecr, M/7 @d`cevcl, H/ J/, ^crvizelc Jcre~izevizedo dn Vdlej Vs{{drz Mcjei ndr Fd~ilcoz Bdojeoa do JOI-
Mefrdf`e{v, Osflcef Ifejv Rcvcirf`, 21, 5, 951;, 9555
8/9/2019 Silicon Nanowires Research Report
30/30
[ i a c 6 ; d n 6 ;
65Le, X/7 Rihcojrio, B/ cz il,Velefdo oiodqercv ndr vcyscofc-v{cfenef JOI vcoveoa jc~efc nibrefizedo ioj
vemslizedo, I{{lecj [`uvefv I, 0;, 9231-92>6, 2;;3
:;Oeclvco, [/ C/7 Ca`dlm, M/7 Bcra, R/ @/7 Bsf`irjz, D/, Vcyscofc-Vclcfze~c Rcfdaoezedo dn JOI bu Vzrioj
Jev{lifcmcoz qez` i Z`umeoc-Vsbvzezszcj [dluimejc, Vfecofc,23:, 3;61, 9:51, 9559
:9Q`ioa, J/7 Heo, V/7 Qs, U/7 Lecbcr, F/M/, Lirac-Vfilc @ecrirf`efil Draioexizedo dn Oiodqerc Irriuv ndr
Eozcarizcj Oiodvuvzcmv, Oiod Lczzcrv, 6, 5, 9233-9235, 2;;6
Lez`esm Bizzcrecv qez` Velefdo Oiodqerc Iodjcv
:2Lulc7 Fse, U/, AM-^dlz/fdm8 Eozcr~ecq qez` Jr/ Fse, Eo~cozdr dn Velefdo Oiodqerc Lez`esm-edo Bizzcru
Brcigz`rdsa`, 2;;1, I~ieliblc nrdm8 `zz{8$$am-~dlz/fdm$2;;1$92$29$am-~dlzfdm-eozcr~ecq-qez`-jr-fse-eo~cozdr-dn-velefdo-oiodqerc-lez`esm-edo-bizzcru-brcigz`rdsa`$ WIffcvvcj 9;
z`Ncbrsiru 2;;5]
:6F`io, F/7 [coa, @/7 Les, A/7 MfElqriz`, G/7 X`ioa, P/ N/7 @`saaeov, R/ I/7 Fse, U/, @ea` {crndrmiofc Lez`esm
bizzcru iodjcv sveoa Velefdo oiodqercv7 Oizsrc Oiodzcf`odldau, 6, 69-63, 2;;0::
Lig, B/7 Csjcb, L/7 [crceri-Rimdvi, H/7 Fdhdfirsb, F/ V/7 [rebizb, J/7 Rds~ercf, C/, Velefdo oiodqercv ivocaize~c clcfzrdjc ndr lez`esm-edo mefrdbizzcrecv7 Clcfzrdf`cmefi Ifzi Clvc~ecr, 36, 33203362, 2;;0
:3[coa, G/7 Hec, H/7 X`ioa, Q/7 Lcc, V/, Velefdo oiodqercv ndr rcf`iraciblc lez`esm-edo bizzcru iodjcv7 I{{lecj
[`uvefv Lczzcrv, 56, ;669;3, 2;;0
Vdlir Fcllv sveoa Velefdo Oiodqercv
:>Nioa, @/7 Le, P/7 Vdoa, V/7 Ps, U/7 X`s, H/, Nibrefizedo dn vliozeoalu-ileaocj velefdo oiodqerc irriuv ndr vdlir fcll
i{{lefizedov, Oiodzcf`odldau, 95, 2331;6, 2;;0
:1[coa, G/7 Qioa, P/7 Lcc, V/, Velefdo oiodqerc irriu {`dzdclcfzrdf`cmefil vdlir fcllv, I{{lecj [`uvefv Lczzcrv,
52, 9>69;6, 2;;0
:0Arzxcl, M/, [`dzd~dlzief ioj {`dzdclcfzrdf`cmefil fdo~crvedo dn vdlir cocrau, [`el/ Zriov/ R/ Vdf/ I, 6>3,
556-9;;3, 2;;1
:5V{sracdo, H/ M/7 Izqizcr, @/ I/7 Lcqev, O/ V/, I Fdm{irevdo Bczqcco z`c Bc`i~edr dn Oiodrdj Irriu ioj
[lioir Fj(Vc, Zc% [`dzdclcfzrdjcv, Hdsroil dn [`uvefil F`cmevzru V{sracdo, 992, 93, >90> >956, 2;;0
3;Giucv, B/M/7 Izqizcr, @/ I/, Fdm{irevdo dn z`c jc~efc {`uvefv {reofe{lcv dn {lioir ioj rijeil {-o hsofzedo
oiodrdj vdlir fcllv, Hdsroil dn I{{lecj [`uvefv, 51, 99:6;2, 2;;3
39Gevlusg, ^/ ^/7 Jemezrec~, D/ [/, Oiodrdjv ioj Oiodzsbcv ndr Vdlir Fcllv, Hdsroil dn Oiodvfecofc ioj
Oiodzcf`odldau, 0, 969-9:0, 2;;0
32
@s, L/7 F`co, A/, Ioiluvev dn D{zefil Ibvdr{zedo eo Velefdo Oiodqerc Irriuv ndr [`dzd~dlzief I{{lefizedov, OiodLczzcrv, 1, 99, 62:56232, 2;;1
36Zeio, B/7 X`coa, P/7 Gcm{i, Z/H/7 Nioa, U/7 Us, O/7 Us, A/7 @sioa, H/7 Lecbcr , F/M/, Fdipeil velefdo Oiodqercv
iv vdlir fcllv ioj Oiodclcfzrdoef {dqcr vdsrfcv, Oizsrc, ::5, 19>:, 003-005, 2;;1
3:Gcm{i, Z/H/, Veoalc ioj Ziojcm Ipeil {-e-o Oiodqerc [`dzd~dlzief Jc~efcv, Oiod Lczzcrv, 0, 9;, 6:3>-6:>;,
2;;0