M-1
Vision Measuring Systems
Vision Measuring Systems
M
Quick Vision WLI
INDEX Vision Measuring SystemsQuick Scope SERIES 359 — CNC / Manual Vision Measuring System
M-2
Quick Image SERIES 361 — Non-contact 2-D Vision Measuring System
M-3
Quick Vision ELF Compact CNC Vision Measuring Systems
M-4
QV Apex SERIES 363 — CNC Vision Measuring System M-5
QV STREAM PLUS SERIES 363 — CNC Vision Measuring System
M-6
QV Hyper SERIES 363 — High accuracy CNC Vision Measuring System
M-7
QV HYBRID TYPE1, TYPE4 SERIES 365 — CNC Vision Measuring System equipped with a non-contact displacement sensor
M-8
Quick Vision WLI SERIES 363 — CNC Video Measuring System with White Light Interferometry
M-9
ULTRA QV SERIES 363 — Ultra-high Accuracy CNC Vision Measuring System
M-10
UMAP Vision System TYPE2 SERIES 364 — Micro Form Measuring System
M-11
QV ACCEL SERIES 363 — Large Format CNC Vision Measuring System
M-12
Quick Vision with Touch Trigger Probe M-13
Accessories for Quick Vision M-14
OPTI-FIX Kits — Modular clamping system for vision measuring systems
M-15,16, 17
Quick Guide to Precision Measuring Instruments M-18,19
QI-A2010C
QVH4 606
M-2
QS-L2010ZB
QS250Z
FEATURES: CNC model•Surface,contourandfiber-opticringlight
illumination options enables users to configuretheQSlightingtomeetavarietyofmeasurement needs.
•Powerful,Windows® based QSPAK software is easy to use and offers a wide spectrum of measuring and analysis capabilities.
•Functionsincludezoom,auto-focus,measurement playback, one-click edge detection, graphic display, 48 different macros and a pattern matching function for several common part features.
•Thestagecanbecontrolledbymouseorthrough the optional multi-function control box.
Quick ScopeSERIES 359 — CNC / Manual Vision Measuring System
FEATURES: Manual model•Excellentsurfaceobservationmodelfora
wide variety of workpieces.•0.1µmresolutionand150mmZ-axisrange.•Powerzoomenableseasyandfast
magnificationchange.•Fineilluminationcapabilityenableslighting
changestomatchworkpiecerequirements.•Thequickreleasesystemonthestage
enablesinstantswitchingbetweencoarsemovementandfinemovement.
•QuickNavigationfunctionenablestheusertorepeatmeasurementsquickly.
SPECIFICATIONSModel No. QS250ZRange X-axis 8” / 200mm
Y-axis 10” / 250mmZ-axis 4” / 100mm
Resolution 0.1µmScale type Linear encoderMeasuring accuracy (at 20°C)* XY:(2.5+6L/1000)µm,Z:(5+6L/1000)µmMagnification Objective 0.5X-3.5Xzoom
On monitor 20X - 137XImage detecting unit Color CCD cameraIllumination Surface:co-axiallight,fiber-opticringlight
Contour: stage lightStageglasssize 10.6 x 12.2” / 269 x 311mmMax. workpiece height 4.3” / 110mmMax. stage loading 22 lbs / 10kgDimensions (W x D x H), Mass 18.3 x 32 x 26” / 465 x 815 x 663mm, 167 lbs / 76kg
*Whenusing2.5Xobjectiveorthezoomlensin2.5Xmagnification(Magnificationonmonitor:105X),L=Measuringlength(mm)
Model No. QS-L2010ZB QS-L3017ZB QS-L4020ZBRange(X-axis/Y-axis/Z-axis) 8” x 4” x 6” / 200 x 100 x 150mm 12" x 6.7" x 6" / 300 x 170 x 150mm 15.7" x 8" X 6" / 400 x 200 x 150mmResolution 0.1µmScale type Linear encoderMeasuring accuracy (at 20°C and3.0xmagnification)
XY:(2.5+20L/1000)µmZ:(5+40L/1000)µm
Image detecting unit 1/2" 3 MP Color CMOS camera Illumination (Halogen) Surface:co-axiallight,fiber-opticringlightContour,stagelightStageglasssize 9.84 x 5.91"(250 x 150 mm) 14.57 x 9.45"(370 x 240 mm) 17.32 x 9.45"(440 x 240 mm)Max. workpiece height 6” / 150mmMax. stage loading 22 lbs / 10 kg 44 lbs / 20 kg 33 lbs / 15 kgDimensions (W x D x H) 25" x 30" x 28" / 624 x 769 x 722 mm 27" x 33" x 36" / 682 x 837 x 916 mm 30" x 33" x 37" / 757 x 837 x 930 mmMass (Main Unit) 158.7 lbs / 72 kg 308.6 lbs /140 kg 321.9 lbs / 146 kg
SPECIFICATIONS
QSLMagnification
Zoom Mag. 0.75x 0.98x 1.28x 1.5x 2.25x 3x 3.75x 5.25xOn monitor 30x 39x 51x 60x 89x 119x 149x 208xFOV (mm) 8.8 x 6.6 6.8 x 5.1 5.2x3.9 4.4x3.3 2.9x2.2 2.2x1.6 1.7x1.3 1.2x0.9
Zoom Lens Magnifications
QS 250Magnification
Zoom Mag. .5x .05x .85x 1.0x 1.5x 2.0x 2.5x 3.5xOn monitor 20x 25x 34x 39x 59x 78x 98x 137xFOV (mm) 8.8 x 6.6 6.8 x 5.1 5.2x3.9 4.4x3.3 2.9x2.2 2.2x1.6 1.7x1.3 1.2x0.9
M-3
Quick ImageSERIES 361 — Non-contact 2-D Vision Measuring System
Quick Image is a new concept in 2-D vision measuring instruments. It provides unique features for improving measurement efficiency.
QI-A2010C
FEATURES•Longfocaldepthandwidefieldofview•Telecentricopticalsystem•3Mega-pixelcolorCCDcamera•LargequadrantLEDringlight•Singleclickmeasurementexecution•Displaysmeasurementresultsonvideo
window•Orientationofpartisautomatically
detected.
SPECIFICATIONSModel QI-A1010C QI-B1010C QI-A2010C QI-B2010C QI-A2017C QI-B2017C QI-A3017C QI-B3017C QI-A4020C QI-B4020CRange X, Y-axis 4 x 4” / 100 x 100mm 8 x 4” / 200 x 100mm 8 x 7” / 200 x 170mm 12 x 7” / 300 x 170mm 16 x 8” / 400 x 200mm
Z-axis 4” / 100mm 4” / 100mm 4” / 100mm 4” / 100mm 4” / 100mm
Measuring mode High-resolution mode and Normal mode
Accuracy Within the screen QI-Amodels:±5µm(high-resolutionmode),±8µm(normalmode) QI-Bmodels:±2.7µm(high-resolutionmode),±4µm(normalmode)
E1XY ±(3.5+0.02L)µmL=measuringlength(mm)
Repeatability within the screen (±2s) QI-Amodels:±1µm(high-resolutionmode),±2µm(normalmode) QI-Bmodels:±0.7µm(high-resolutionmode),±1µm(normalmode)
CCD camera 3 Megapixel, 1/2 inch color CCD camera
Optical system Magnification* 0.2X 0.5X 0.2X 0.5X 0.2X 0.5X 0.2X 0.5X 0.2X 0.5X
Working distance 3.5” / 90mm
Depth of focus High-resolution mode: ±0.6mm (±0.6mm), Normal mode: ±11mm (±1.8mm) ( ): QI-B models
Illumination Contour 4 4 4 4 4
Surface 4 4 4 4 4
4-quadrant LED 4 4 4 4 4
Stageglasssize 6.7 x 6.7”/170 x 170mm 9.5 x 6.4”/242 x 140mm 10.2 x 9.1”/260 x 230mm 14.2 x 9.1”/360 x 230mm 17.3 x 9.1”/440 x 232mm
Max. stage loading 22 lbs / 10kg 44 lbs / 20kg 33 lbs / 15kg
Mass 154 lbs / 70kg 163 lbs / 74kg 308 lbs / 140kg 326 lbs / 148kg 340 lbs / 154kg
*Double telecentric system
Image-space telecentric lens
Object-space telecentric lens
Color camera
Workpiece to be measured
Double-telecentric optics enable highly efficient measurement with a wide field of viewBatchmeasurementwithawideviewfield1.259”x0.945”(32x24mm)realizedusinga0.2Xmagnificationmodelcansubstantiallyimprovemeasurementefficiency.Witha0.5Xmagnificationmodel,dimensionsof very small workpieces and stepped workpieces can be easily measured.
Actualimageacquiredwitha0.5Xmagnificationmodel
Actualimageacquiredwitha0.2Xmagnificationmodel
M-4
FEATURES•Controller-integrated compact size
design This series is appropriate for installation at a small site because of its light weight and space saving design.
Quick Vision ELFCompact CNC Vision Measuring Systems
•Small body packed full of functions This series offers various types of machines equipped with the PRL illuminator and power turret. Also, the laser auto-focus unit can be installed, as a factory option.
•The highest performance/cost ratio of the Quick Vision series
QV-ELF202PRO
Laser Auto Focus (LAF) Function*Mitutoyo offers models featuring the LAF system which enables high-speed focusing. *Available on the PRO model. (Factory installed option)
Touch SystemThe QV Touch system is available on all the QV ELF, QV Apex and QV Accel models as a factory option. All systems include probe, calibration articles and installed software.
Programmable Ring Light (PRL)Finecontrolofobliquityanddirectionprovidesilluminationoptimalformeasurement.Obliquitycanbearbitrarilysetintherangefrom30°to80°.Thistypeofilluminationiseffectiveforenhancingtheedgeofinclinedsurfacesorverysmallsteps.Illuminationcanbecontrolledindependentlyineverydirection,frontandback,rightandleft.Measurementwithedgeenhancementispossiblebyformingashadowbylightingfromonlyonedirection.
Workpiecesurface
Parabolic mirror
Toroidal mirror
Four-quadrant LED light
30° 60° 80°
1Xtubelensx2.5XobjectiveViewfield:2.5x1.88mm
2Xtubelensx2.5XobjectiveViewfield:1.25x0.94mm
6Xtubelensx2.5XobjectiveViewfield:0.41x0.31mm
Programmable Power Turret (PPT)Thethreetubelensselectionprovidesthreemagnificationlevelswiththesameobjectivelens.Replacementobjectivelensesallowawiderangeofmagnificationstosupportavarietyofmeasurements.
(Factory installed option)
SPECIFICATIONSName Quick Vision - ELF
ModelNo. QV-E202 QV-E202 (ISO 10360-7)
MeasuringRange
X-axis 9.84”/250mm
Y-Axis 7.87”/200mm
Z-Axis 7.87”/200mm
Resolution/scaleunit 0.1µm/reflective-typelinearencoder
CCDcamera B&W
IlluminationUnit(LED)
Surface WhiteLED
Contour WhiteLED
ProgrammableRingLight WhiteLED
Max.DriveSpeed(X/Y/Z-axis) 200mm/s
Measuringaccuracy*
E1X,E1Y (2+3L/1000)µmE1Z (3+5L/1000)µm
EU,MPE(ISO10360-7:2011) — 3.5+5.5L/1000,3.5+6.0L/1000**PF2D,MPE(ISO10360-7:2011) — 2.7µm
MagnificationChangeSystem ProgrammablePowerTurret(1x,2x,6x)
Stageglasssize 12.28x10.59”(312x269mm)
Maximumstageloading 33lbs.(15kg)
Dimensionsofmainunit(IncludingMachineStand) 33.35”x23.07”x60.16”(847x586x1528mm)
Massofmainunit(IncludingMachineStand) 595lbs.(270kg)
*Themeasuringaccuracydefinedunderthefollowingconditions:ProgrammablePowerTurret:2xPosition;ObjectiveLens:2.5x(HRorSL);L=Dimensionbetweentwoarbitrarypoints(mm)**Accuracy3.5+5.5L/1000for20±2°C;Accuracy3.5+6.0L/1000from18to23°C
M-5
QV ApexSERIES 363 — CNC Vision Measuring System
QV Apex302PRO
QV Apex606PRO
Optional Accessories: Refer to page M-14.
Image Multi-AutoFocusThe optimal focus can be selected for each surface texture and measuredfeature,realizinghighreproducibility and reliable edge detection.
Edge focus
Patternfocus
Surface focus
Optional Index table*Automaticmulti-planemeasurementispossiblewiththeoptionalindextable.RefertopageM-14formoredetails.*NotavailablewithQVACCELmodels
Programmable Ring Light (PRL)Finecontrolofobliquityanddirectionprovidesilluminationoptimalformeasurement.Obliquitycanbearbitrarilysetintherangefrom30°to80°.Thistypeofilluminationiseffectiveforenhancingtheedgeofinclinedsurfacesorverysmallsteps.Illuminationcanbecontrolledindependentlyineverydirection,frontandback,rightandleft.Measurementwithedgeenhancementispossiblebyformingashadowbylightingfromonlyonedirection.
Workpiecesurface
Parabolic mirror
Toroidal mirror
Four-quadrant LED light
30° 60° 80°
Name Quick Vision Apex
ModelNo.
QV Apex 302 PRO QV Apex 404 PRO QV Apex 606 PROQV Apex 302 (ISO10360-7)
QV Apex 404 (ISO10360-7)
QV Apex 606 (ISO10360-7)
QV Apex 302 (w/TAF) QV Apex 404 (w/TAF) QV Apex 606 (w/TAF)
MeasuringRange
X-axis 11.81”/300mm 15.75”/400mm 23.62”/600mmY-Axis 7.87”/200mm 15.75”/400mm 25.59”/650mmZ-Axis 7.87”/200mm 9.84”/250mm 9.84”/250mm
Resolution/scaleunit 0.1µm/reflective-typelinearencoderResolutionZscaleusingTrackingAutofocus (TAF) 0.3µm
CCDcamera B&W
IlluminationUnit(LED)
Surface WhiteLEDContour WhiteLED
ProgrammableRingLight WhiteLEDMax.DriveSpeed
X/YAxis 300mm/s 400mm/sZ-Axis 300mm/s 300mm/s
Measuringaccuracy*
E1X,E1Y (1.5+3L/1000)µmE1Z (1.5+4L/1000)µmE2XY (2+4L/1000)µm
EU,MPE(ISO10360-7:2011) 3+5.5L/1000,3+6L/1000**PF2D,MPE(ISO10360-7:2011) 2.3µm
MagnificationChangeSystem ProgrammablePowerTurret(1x,2x,6x)
Stageglasssize 15.71”x10.67”(399x271mm)
19.41”x10.67”(493x551mm)
27.44”x29.84”(697x758mm)
Maximumstageloading 44lbs.(20kg) 88lbs.(40kg) 110lbs.(50kg)
Dimensionsofmainunit 37.44”x33.82”x41.06”(951x859x1043mm)
55.39”x40.43”x54.37”(1407x1027x1381mm)
78.15”x51.54”x61.81”(1985x1309x1570mm)
Massofmainunit(IncludingMachineStand) 794lbs.(360kg) 1276lbs.(579kg) 3197lbs.(1450kg)
*Themeasuringaccuracydefinedunderthefollowingconditions:ProgrammablePowerTurret:2xPosition;ObjectiveLens:2.5x(HRorSL);L=Dimensionbetweentwoarbitrarypoints(mm)**Accuracy3.5+5.5L/1000for20±2°C,Accuracy3+6L/1000from18to23°C
SPECIFICATIONS
Tracking Auto Focus (TAF)TheTAFfeaturefocusescontinuously,adjustingtochan-gesintheheightoftheobjectbeingmeasured.Automatictrackingofsurfacewavesandwarpage(intheZaxisheightdirection)improvesmeasurementthroughput.Thefeaturealsocutsoutthehassleoffocusingduringmanualmeasurement,reducingtheworkburdenformeasuringsystemoperators.
Tracking Auto Focus (TAF)AFprinciple Objectivecoaxialautofocusing(knifeedgemethod)Suitableobjectives QV-HR1x QV-SL1x QV-HR2.5x QV-SL2.5x QV-5x
Trackingrange*2 6.3mm 6.3mm 1mm 1mm 0.25mm(±3.15mm) (±3.15mm) (±0.5mm) (±0.5mm) (±0.125mm)
Spotdiameter*3 5.2µm 8.0µm 2.1µm 3.1µm 1.5µmLasersource Semiconductorlaser(peakwavelength:690nm)Laserpower 0.9mWLasersafety Class2(JISC6802:2011,EN/IEC60825-1:2007)*2Variesaccordingtoworkpiecesurfacetextureandreflectance.*3Thesearedesignvalues.
Parfocal
Parfocal
Surface of workpiece
Automatic Z-axis tracking Objectives
M-6
Dichroicmirrors
Collimator lens array
High-density mounting of ultra-high intensity LED elements
LEDelements
Reflectionmirrors
Stage
Synthetic cyan
Mirror-2 Mirror-1
Dichroicmirrors
Collimator lens array
Blue LED
Green LED
Red LEDMoves & processesimages continuously
Camera
(Flash & Capture) (Flash & Capture) (Flash & Capture) (Flash & Capture)
Camera
Non-stop Vision MeasurementExtreme Improvement in Throughput*Conventionalvisionmeasuringsystemsendlesslyrepeatthecycleofstagedisplacement,stagestop,measurement,stagestartandstagedisplacementagain.Thismodeofoperationisafundamentallimitationonimprovingmeasurementthroughput.Incontrast,theQuickVisionStreamsystemusesaninnovativeimagecapturetechniquethatavoidstheneedtorepeatedlystopthestagesomeasurementcanbecontinuous,butmeasuringaccuracyisretained.Eliminatingthetimeneededtoaccelerate,decelerateandthenholdthestagemotionlesswhileameasurementismadeachievesanextremeimprovementinproductivity.
Measurement Throughput Comparison between QV STREAM and the Conventional SystemSTREAMPLUSseries:morethan5timesfaster*ComparisonofmeasurementthroughputusingaMitutoyosampleworkpiece
withthatofMitutoyoconventionalsystems
STREAM ModeThemeasurementmodeofanon-stopvisionmeasuringsystemisreferredtoastheSTREAMmode.
Newly Developed Stroboscopic Illumination SystemThedevelopmentofahigh-intensityLEDflashilluminatorhasmadenon-stopvisionmeasurementpossible.Attheprecisemomentthestagereachesameasurementpointtheilluminatorcreatesanextremelyshort,high-intensityflashthateffectivelyfreezesallmotion.Theilluminatorturnsonandoffsofastthatnoimagebluroccursandtheimageiscapturedinfullandaccuratedetail.Thisinnovativedesigntakesfulladvantageofhigh-density,high-intensityLEDarraysaidedbycollimatinglensesanddichroicmirrorstoproduceultrabright,directionalandefficientillumination.
QV STREAM PLUSSERIES 363 — CNC Vision Measuring System
QV STREAM PLUS 606
FEATURES
Name Quick Vision Stream Plus
ModelNo. QV Stream Plus 302 PRO QV Stream Plus 404 PRO QV Stream Plus 606 PROQV Stream Plus 302 (w/TAF) QV Stream Plus 404 (w/TAF) QV Stream Plus 606 (w/TAF)
MeasuringRange
X-axis 11.81”/300mm 15.75”/400mm 23.62”/600mm
Y-Axis 7.87”/200mm 15.75”/400mm 25.59”/650mm
Z-Axis 7.87”/200mm 9.84”/250mm 9.84”/250mm
Resolution/scaleunit 0.1µm/reflective-typelinearencoderResolutionZscaleusingTrackingAutofocus(TAF) 0.3µm
CCDcamera B&W,ProgressiveScanningCCD
IlluminationUnit(C:Continuous;S:Stroboscopic;PRL:ProgrammableRingLight)
Surface(C) Red,Green,Blue&White(LED)
Surface(S) Blue(LED)
Contour(C) Blue(LED)
Contour(S) Blue(LED)
PRL(C) Red,Green,Blue&White(LED)
PRL(S) Blue(LED)
Max.DriveSpeed X/Y/ZAxis 300mm/s
Measuringaccuracy*
E1X,E1Y (1.5+3L/1000)µm
E1Z (1.5+4L/1000)µm
E2XY (2+4L/1000)µm
MagnificationChangeSystem ProgrammablePowerTurret(1x,2x,6x)
Stageglasssize 15.71”x10.67”(399x271mm)
19.41”x10.67”(493x551mm)
27.44”x29.84”(697x758mm)
Maximumstageloading 44lbs.(20kg) 88lbs.(40kg) 110lbs.(50kg)
Dimensionsofmainunit 37.44”x33.82”x41.06”(951x859x1043mm)
55.39”x40.43”x54.37”(1407x1027x1381mm)
78.15”x51.54”x61.81”(1985x1309x1570mm)
Massofmainunit(IncludingMachineStand) 794lbs.(360kg) 1276lbs.(579kg) 3197lbs.(1450kg)
*Themeasuringaccuracydefinedunderthefollowingconditions:ProgrammablePowerTurret:2xPosition;ObjectiveLens:2.5x(HRorSL);L=Dimensionbetweentwoarbitrarypoints(mm)
SPECIFICATIONS
Tracking Auto Focus (TAF)TheTAFfeaturefocusescontinuously,adjustingtochan-gesintheheightoftheobjectbeingmeasured.Automatictrackingofsurfacewavesandwarpage(intheZaxisheightdirection)improvesmeasurementthroughput.Thefeaturealsocutsoutthehassleoffocusingduringmanualmeasurement,reducingtheworkburdenformeasuringsystemoperators.
Parfocal
Parfocal
Surface of workpiece
Automatic Z-axis tracking Objectives
Tracking Auto Focus (TAF)AFprinciple Objectivecoaxialautofocusing(knifeedgemethod)Suitableobjectives QV-HR1x QV-SL1x QV-HR2.5x QV-SL2.5x QV-5x
Trackingrange*2 6.3mm 6.3mm 1mm 1mm 0.25mm(±3.15mm) (±3.15mm) (±0.5mm) (±0.5mm) (±0.125mm)
Spotdiameter*3 5.2µm 8.0µm 2.1µm 3.1µm 1.5µmLasersource Semiconductorlaser(peakwavelength:690nm)Laserpower 0.9mWLasersafety Class2(JISC6802:2011,EN/IEC60825-1:2007)*2Variesaccordingtoworkpiecesurfacetextureandreflectance.*3Thesearedesignvalues.
M-7
SPECIFICATIONS
QV HyperSERIES 363 — High accuracy CNC Vision Measuring System
Hyper QV404PRO
Name Quick Vision HyperModel No. QV Hyper 302 PRO QV Hyper 404 PRO QV Hyper 606 PRO
QV Hyper 302 (ISO10360-7) QV Hyper 404 (ISO10360-7) QV Hyper 606 (ISO10360-7)
QV Hyper 302 (w/TAF) QV Hyper 404 (w/TAF) QV Hyper 606 (w/TAF)
MeasuringRange
X-axis 11.81”/300mm 15.75”/400mm 23.62”/600mm
Y-Axis 7.87”/200mm 15.75”/400mm 25.59”/650mm
Z-Axis 7.87”/200mm 9.84”/250mm 9.84”/250mm
Resolution/scaleunit 0.02µm/reflective-typelinearencoder
ResolutionZscaleusingTrackingAutofocus(TAF) 0.26µm
CCDcamera B&W
IlluminationUnit(LED)
Surface WhiteLED
Contour WhiteLED
ProgrammableRingLight WhiteLED
Max.DriveSpeed X/Y/Z-Axis 200mm/s
Measuringaccuracy*
E1X,E1Y (0.8+2L/1000)µmE1Z (1.5+2L/1000)µmE2XY (1.4+3L/1000)µm
EU,MPE(ISO10360-7:2011) 2.5+4L/1000,2.5+4.5L/1000**PF2D,MPE(ISO10360-7:2011) 1.7µm
MagnificationChangeSystem ProgrammablePowerTurret(1x,2x,6x)
Stageglasssize 15.71”x10.67”(399x271mm) 19.41”x10.67”(493x551mm) 27.44”x29.84”(697x758mm)
Maximumstageloading 44lbs.(20kg) 88lbs.(40kg) 110lbs.(50kg)
Dimensionsofmainunit 37.44”x33.82”x41.06”(951x859x1043mm)
55.39”x40.43”x54.37”(1407x1027x1381mm)
78.15”x51.54”x61.81”(1985x1309x1570mm)
Massofmainunit(IncludingMachineStand) 794lbs.(360kg) 1276lbs.(579kg) 3197lbs.(1450kg)
Image Multi-AutoFocusThe optimal focus can be selected for each surface texture and measuredfeature,realizinghighreproducibility and reliable edge detection.
Edge focus
Patternfocus
Surface focus
Programmable Ring Light (PRL)Finecontrolofobliquityanddirectionprovidesilluminationoptimalformeasurement.Obliquitycanbearbitrarilysetintherangefrom30°to80°.Thistypeofilluminationiseffectiveforenhancingtheedgeofinclinedsurfacesorverysmallsteps.Illuminationcanbecontrolledindependentlyineverydirection,frontandback,rightandleft.Measurementwithedgeenhancementispossiblebyformingashadowbylightingfromonlyonedirection.
Workpiecesurface
Parabolic mirror
Toroidal mirror
Four-quadrant LED light
30° 60° 80°
*Themeasuringaccuracydefinedunderthefollowingconditions:ProgrammablePowerTurret:2xPosition;ObjectiveLens:2.5x(HRorSL);L=Dimensionbetweentwoarbitrarypoints(mm)**Accuracy2.5+4L/1000for20±2°C,Accuracy2.5+4.5L/1000from18to23°C
M-8
CLASS 1 LASER PRODUCT
Quick Vision Hybrid 302 Quick Vision Hybrid 404 Quick Vision Hybrid 606
Apex / Hyper/ STREAM PLUS
QVH Apex 302 QV Hyper 302 QVH Apex 404 QV Hyper 404 QVH Apex 606 QV Hyper 606
QV Apex 302 (ISO10360-7)
QV Hyper 302 (ISO10360-7)
QVH Apex 404 (ISO10360-7)
QV Hyper 404 (ISO10360-7)
QVH Apex 606 (ISO10360-7)
QV Hyper 606 (ISO10360-7)
QVH STREAM 302 QVH STREAM 404 QVH STREAM 606
MeasuringRange(XxYxZ)
Vision 11.81”x7.87”x7.87”(300x200x200mm) 15.75”x15.75”x9.84”(400x400x250mm) 23.62”x25.59”x9.84”(600x650x250mm)Non-contactdisplacementsensor
TYPE1 7.09”x7.87”x7.87”(180×200×200mm) 11.02”x15.75”x9.84”(280×400×250mm) 18.90”x25.59”x9.84”(480×650×250mm)
TYPE4*1 6.92”x7.87”x7.87”(176×200×200mm) 10.87”x15.75”x9.84”(276×400×250mm) 18.74”x25.59”x9.84”(476×650×250mm)
Measuringaccuracy
(Vision)*2*3
E1X,E1Y (1.5+3L/1000)µm (0.8+2L/1000)µm (1.5+3L/1000)µm (0.8+2L/1000)µm (1.5+3L/1000)µm (0.8+2L/1000)µm
E1Z (1.5+4L/1000)µm (1.5+2L/1000)µm (1.5+4L/1000)µm (1.5+2L/1000)µm (1.5+4L/1000)µm (1.5+2L/1000)µm
E2XY (2.0+4L/1000)µm (1.4+3L/1000)µm (2.0+4L/1000)µm (1.4+3L/1000)µm (2.0+4L/1000)µm (1.4+3L/1000)µm(Displacementsensor)*2*3 E1Z (1.5+4L/1000)µm (1.5+2L/1000)µm (1.5+4L/1000)µm (1.5+2L/1000)µm (1.5+4L/1000)µm (1.5+2L/1000)µm
(ISO10360-7:2011)
EU,MPE
3+5.5L/1000*4
3+6.0L/1000*52.5+4L/1000*4
2.5+4.5L/1000*53+5.5L/1000*43+6.0L/1000*5
2.5+4L/1000*42.5+4.5L/1000*5
3+5.5L/1000*4
3+6.0L/1000*52.5+4L/1000*4
2.5+4.5L/1000*5
PF2D,MPE 2.3µm 1.7µm 2.3µm 1.7µm 2.3µm 1.7µm
ScaleResolution 0.1µm 0.02µm 0.1µm 0.02µm 0.1µm 0.02µm
Max.DriveSpeed X/Y/ZAxis 300mm/s 200mm/s 300mm/s 200mm/s 300mm/s 200mm/s
Stageglasssize 15.71”x10.67”(399x271mm) 19.41”x10.67”(493x551mm) 27.44”x29.84”(697x758mm)
Maximumstageloading 44lbs.(20kg) 88lbs.(40kg) 110lbs.(50kg)
Dimensionsofmainunit 37.44”x33.82”x41.06”(951x859x1043mm)
55.39”x40.43”x54.37”(1407x1027x1381mm)
78.15”x51.54”x61.81”(1985x1309x1570mm)
Massofmainunit(IncludingMachineStand) 794lbs.(360kg) 1276lbs.(579kg) 3197lbs.(1450kg)
ACCEL QVH ACCEL808 QVH ACCEL 1010 QVH ACCEL 1212 QVH ACCEL 1517
MeasuringRange(XxYxZ)
Vision 31.50x31.50x5.91”(800x800x150mm)
39.37x39.37x5.91”(1000x1000x150mm)
49.21x49.21x3.94”(1250x1250x100mm)
59.06X68.90X3.94”(1500x1750x100mm)
Non-contactdisplacementsensor
TYPE1 26.77x31.50x5.91”(680x800x150mm)
34.65x39.37x5.91”(880x1000x150mm)
44.49X49.21X3.94”(1130x1250x100mm)
54.33x68.90x3.94”(1380x1750x100mm)
Measuringaccuracy
(Vision)*2*3
E1X,E1Y (1.5+3L/1000)µm (2.2+3L/1000)µm
E1Z (1.5+4L/1000)µm (2.5+5L/1000)µm
E2XY (2.5+4L/1000)µm (3.5+4L/1000)µm(Displacementsensor)*2*3 E1Z (2.5+4L/1000)µm (3.5+5L/1000)µm
ScaleResolution 0.1µm
Max.DriveSpeed
X/YAxis 400mm/s 300mm/s
ZAxis 150mm/s 150mm/s
Stageglasssize 34.76”x37.72”(883x958mm)
46.69”x46.69”(1186x1186mm)
56.69”x56.69”(1440x1440mm)
67.48”x77.48”(1714x1968mm)
Maximumstageloading 22lbs.(10kg) 66lbs.(30kg)
Dimensionsofmainunit 58.07”x73.23”x62.13”(1475x1860x1578mm)
75.28”x84.29”x63.11”(1912x2141x1603mm)
85.28”x93.31”x61.18”(2166x2370x1554mm)
96.06”x114.09”x61.18”(2440x2898x1554mm)
Massofmainunit 4519lbs.(2050kg) 6504lbs.(2950kg) 7937lbs.(3600kg) 9921lbs.(4500kg)
Common Specifications QV Apex QV Hyper QV Accel QV Stream
CCDcamera Black&White Black&White;ProgressiveScanning
MagnificationChangeSystem ProgrammablePowerTurret(1x,2x,6x)
GuideMethod LinearMotionHardBearingIllumination(CatalogPageNumberReference) M-5 M-7 M-12 M-6
Photodiodea
Pinhole(front)
Holo-scale
Objective
Workpiecesurface
Pinhole(rear)
Photodiodeb
Laser source
QV HYBRID TYPE1, TYPE4SERIES 365 — CNC Vision Measuring System equipped with a non-contact displacement sensor
FEATURES: Hybrid Type1•Thefocusingpointmethodminimizesthedifferenceinthe
measuringfacereflectanceandrealizinghighmeasurementreproducibility.
•Thedoublepinholemethod(lessdirectivity)isemployedasthemeasurementprinciple.
VisionheadLaserhead
FEATURESThe Quick Vision Hybrid is an advanced machine which allows vision measurement with both a CCD camera and high-speed scanning by applying a vision measurement unit in parallel with a non-contact displacement sensor.
SPECIFICATIONSQVH4 606
Type 4 Displacement Sensor
•Enables detection of high inclination angles for both mirror and diffused Surfaces.
•The automatic lighting adjustment function allows for high accuracy measurements.
•Thickness measurement of thin and transparent objects suchasfilm.
FEATURES: Hybrid Type 4
Non-contact displacement sensor
Vision head
Safety precautions regarding laser autofocus system (factory-installed option)This product uses a low-power visible laser (690nm) for measurement. The laser is a CLASS 1 EN/IEC60825-1 (2007) device. A warning and explanation label, as shown above, is attached to the product as appropriate.
*1TYPE4isnotsupportedbyQVHSTREAM*2L=arbitrarymeasuringlength(mm)*3InspectedbyMitutoyostandard*4Accuracyfor20±2°C*5Accuracyfrom18to23°C
M-9
QV objective WLI objective
ProjectedimageusingtheQuickVision
measurementsensor
ProjectedimageusingtheWLI
measurementsensor
Applicationviewofnanohole
Applicationviewofsurfacetrace
depth
depth
diameter
width
QV-FORMPAK2Danalysis
Regionofinterestevaluation
3-dimensionaltopographicalresult,dataofmicro-circuit
QVWLI25xobjective
QVWLI10xobjective
QVWLI5xobjective
Quick Vision WLISERIES 363 — CNC Video Measuring System with White Light interferometry
QV Hyper WLI 302 QV Hyper WLI 404 QV Hyper WLI 606QV Hyper WLI 302
(ISO10360-7)QV Hyper WLI 404
(ISO10360-7)QV Hyper WLI 606
(ISO10360-7)
Measuringrange(X×Y×Z)
Visionmeasuringarea 11.81”x7.87”x7.48”(300×200×190mm)
15.75”x1575”x9.45”(400×400×240mm)
23.62”x25.59”x8.66”(600×650×220mm)
WLImeasuringarea*1 8.46”x7.87”x7.48”(215×200×190mm)
12.40”x15.75”x9.44”(315×400×240mm)
20.58”x25.59”x8.66”(515×650×220mm)
WLI optical head unit
Viewfield(H×V) 5Xlens:approx.0.64x0.48mm/10Xlens:approx.0.32×0.24mm/25Xlens:approx.0.13×0.10mm
Illumination Co-axialLight Halogen
Repeatability 2s ≤.08µm
Z-axisscanningrange*2 170µmVision optical head unitMagnificationchangesystem ProgrammablePowerTurret1X-2X-6X)
Imagedetectionmethod B&WCCDcamera
Illumination
Co-axialLight WhiteLED
TransmittedLight WhiteLED
Programmableringlight WhiteLED
Measuringaccuracy
E1X,E1Y (0.8+2L/1000)µmE1Z (1.5+2L/1000)µmE2XY (1.4+3L/1000)µm
EU,MPE(ISO10360-7:2011) 2.5+4L/1000
PF2D,MPE(ISO10360-7:2011) 1.7µmMain unitResolution 0.01µmMax.stageloading 33lbs.(15kg) 55lbs.(25kg) 77lbs.(35kg)Guidancesystem LinearMotionHardBearing
Dimensions(W×D×H) 33.82”x37.40”x63.23”(859×950×1606mm)
40.43”x55.39”x70.11”(1027×1407×1781mm)
51.54”x78.15”x70.55”(1309×1985×1792mm)
Mass(vibrationisolatorstandincluded) Approx.1080lbs.(490kg) Approx.2557lbs.(1160kg) Approx.2275lbs.(1031kg)
SPECIFICATIONS
*1:WLIheadmovable.rangeMeasurementof3DformswithWLIwillbewithinoneviewfield.*2:Instandardmode.Applicabletomax.200µmbymodifyingscanpitch.
•QVWLIalonecanmeasurecoordinatesand dimensions and assess micro-3D forms without contact.
•Thismachineisahighaccuracy,dual-headvision measuring system equipped with a white light interferometer.
•Thewhitelightinterferometerusesa high aspect ratio to accurately measure shapes.
•Thestandardvisionmeasuringfunctioncan continuously perform coordinate, dimension and 3D shape measuring without interruption.
•Thelargeworkstageaccuratelyhandleslarge-sizedworkpiecessuchasaPCB.
M-10
ULTRA QVSERIES 363 — Ultra-high Accuracy CNC Vision Measuring System
FEATURES•Minimizesstraightnesserrorsthroughthe
use of a precision air-bearing linear guide system.
•Utilizesa0.01µmresolutionglassscalemanufactured at an ultra-precision facility located eleven meters underground.
ULTRA QV404 PRO
•Minimizesaccuracyfluctuationagainstthermal change through the use of virtually zerothermalexpansionglassscales.
•Optimizesthemechanicalstructureofthemain unit in Finite Element Method analysis.
•Stabilizesthegeometricalaccuracy (i.e. straightness of each axis and
perpendicularity) to lessen thermal effects.
Model No.QUICK VISION ULTRA 404 PRO QUICK VISION ULTRA 404 PRO
w/ TAFQUICK VISION ULTRA 404 PRO
(ISO10360-7:2011)QUICK VISION ULTRA 404 PRO
w/ TAF (ISO10360-7:2011)Range XxYxZ 16”x16”x8”(400x400x200mm)
Magnificationchangesystem Programmablepowerturret(selectablefromamongmagnificationsof1X,2X,and6X)
Resolution/Scaleunit 0.01µm/LinearEncoder*4
ResolutionofZ-ScalewhenusingTAF – 0.25µmHigh-sensitivityCCDCamera B&W
Illumination(PRL:ProgrammableRingLight)
Surface HalogenContour HalogenPRL Halogen
Accuracy*1(20˚C±0.2˚C)
E1XY (0.25+L/1000)µmE1Z(50mmstroke)*2 (1.0+2L/1000)µmE1Z(Fullstroke) (1.5+2L/1000)µmE2XYplane (0.5+2L/1000)µmEU,MPE(ISO10360-7:2011) 1.3+3L/1000,1.3+3.5L/1000*5
PF2D,MPE(ISO10360-7:2011) 1.0µm
Accuracyassuranceenvironments*3
Temperaturerange 20±0.2˚CTemperaturevariation 0.5˚C/1HTemperaturegradient 1˚C/m
Repeatabilitywithinthevisualfield 3s=0.2µmRepeatabilityofauto-focus s=0.4µmStageglasssize 19.4”x21.7”(493x551mm)Max.stageloading 88lb(40kg)Dimensions(WxDxH) 46”x68”x75.2”(1172x1735x1910mm)Mass 4464lb(2025kg)Usedairpressure 0.4MPa*6
Suppliedairflowrate 150L/min*7
SPECIFICATIONS
TheUltraQuickVisionisequippedwithacrystallizedglassscalehavingaresolutionof0.01µmandlinearexpansioncoefficientof±0.02x10-6/K.ThisvirtuallyzerothermalexpansionmeanstheUltraQuickVisioncanminimizeaccuracyfluctuationresultingfromthermalchanges.Ultra-precisionmanufactureelevenmetersunderground
Standardglassscale
Ultra-highaccuracycrystallizedglassscalewithvirtuallyzerothermalexpansion
Ultrasonic micro probe, UMAPTheultrasonicmicroprobe(UMAP)hastheabilitytosensetheamplitudevariabilityinamicroareaandtheoptionalcontactpoints(15to300µmdiameter)offeralargerangeofhighaccuracymeasurementmeetingawidevarietyofspecifications.*Factoryorderedoption
Self-Suction Air PadIfanormalairpadisusedfortheYaxis,itisnecessarytoincreasethemassoftheworkstagetoobtainappropriaterigidity.ULTRAQV(QuickVision)employsaspecialairpadcalledaself-suctiontypethatfloatstheairpadwithcompressedairandalsogeneratesanabsorptionpowerwithavacuumzoneprovidedundernegativepressureatthecenterofthepad.ThisachievesgreaterY-axisrigidityandstageweightreductionconcurrently,thusenablingstablestagedrive.
Compressedair Compressedair
GuideplaneAirpad
Vacuumsuctionregion
Suction
ULTRAQVemployshigh-reliabilityballscrewsinthefloatingmechanism.Thisfloatingmechanismwillminimizetheerrorduetoaxialfluctuationthatadverselyaffectskineticperformancesuchasstraightnessandimprovethedrivingspeed.
Ball Screw Floating Mechanism
Servomotor
Floating Mechanism
Nut
Ball Screw
Guide Block
Pulse Generator
Tracking Auto Focus (TAF)TheTAFfeaturefocusescontinuously,adjustingtochan-gesintheheightoftheobjectbeingmeasured.Automatictrackingofsurfacewavesandwarpage(intheZaxisheightdirection)improvesmeasurementthroughput.Thefeaturealsocutsoutthehassleoffocusingduringmanualmeasurement,reducingtheworkburdenformeasuringsystemoperators.
Parfocal
Parfocal
Surface of workpiece
Automatic Z-axis tracking Objectives
M-11
Application example
HYPER UMAP Vision System 302 TYPE2
ULTRA UMAP Vision System 404 TYPE2
Contour measurement of a ø0.125 hole
Measuring form of micro gear teeth
UMAP Vision System TYPE2SERIES 364 — Micro Form Measuring System
UMAP101Stylus
UMAP103Stylus
2mm
ø30 µm
ø100 µm
ø30 µm
16m
m
ø300 µm
ø15 µm
ø300 µm
ø70 µm
10m
m
ø100 µm
0.2m
m
ø15 µm
UMAP110Stylus
UMAP130Stylus
UMAP107Stylus
5mm
ø70 µm
Detection signal after workpiece contact
AmplitudeStylus
Workpiece
Duration
Detection signal before workpiece contact
Amplitude Amplitude reductionStylus
Workpiece
Duration
Detection of surface principle
①�In this drawing, the stylus is vibrating with a micro amplitude. When it does not come into contact with the workpiece as shown, the vibration state is maintained.
②�As the stylus comes into contact with the workpiece surface the vibration amplitude decreases as the contact increases. When the decreasing amplitude falls below a certain level, a touch-trigger signal is generated.
•Ultrasonicmicroprobe,UMAP Theultrasonicmicroprobe(UMAP)hastheabilitytosensetheamplitudevariabilityina
microareaandtheoptionalcontactpoints(15to300µmdiameter)offeralargerangeofhighaccuracymeasurementmeetingawidevarietyofspecifications.
•Bothhigh-accuracysophisticatednon-contactandcontactmeasurementcapabilities with one machine
ThisunitincludestheUMAPandthenon-contacttypevisionhead.Untilnow,itwasdifficulttomeasureminuteareas,butitisnowpossibletodobothcontactandnon-contactmeasurementonasingleplatform.
①
②
SPECIFICATIONS TYPE2
Hyper UMAP302 ULTRA UMAP404
Measuringrange(commontovisionandUMAP)
X-axis×Y-axis 7.28x7.87”(185×200mm) 11.22x15.75”(285×400mm)
Z-axis6.89”(175mm):UMAP101/1037.07”(180mm):UMAP107/110
7.28”(185mm):UMAP130
Measuringaccuracy(Vision)
E1X,E1Y(0.8+2L /1000)µm (0.25+L /1000)µm
E1Z (1.5+2L /1000)µm
RepeatabilityUMAP101/103/107 s =0.1µm s =0.08µm
UMAP110/130 s =0.15µm s =0.12µm
Microprobe,UMAP
FEATURES
M-12
FEATURESMoving-bridge type structure Designed with primary focus on measurementefficiency,themachineadoptsa more rigid construction and drives the X and Y axes at 400mm/s (QV ACCEL808, ACCEL1010).
QV ACCELSERIES 363 — Large Format CNC Vision Measuring System
QV ACCEL1212PRO
QV ACCEL808PRO
The moving-bridge type structure also eliminates the need for a moving stage. Thisfacilitatesamoresimplifieddesignoftheworkpiecefixture,resultinginasignificantreductionintheman-hoursrequiredforfixturefabricationandinspection.
SPECIFICATIONSModel No. QV ACCEL808PRO QV ACCEL1010PRO QV ACCEL1212PRO QV ACCEL1517PRORange X-axis 32” / 800mm 40” / 1000mm 50” / 1250mm 60” / 1500mm
Y-axis 32” / 800mm 40” / 1000mm 50” / 1250mm 70” / 1750mmZ-axis 6” / 150mm 6” / 150mm 4” / 100mm 4” / 100mm
Resolution 0.1µmResolutionofZscalewhenusing TAF 0.3µm
High-sensitivity CCD camera B&WAccuracy* E1XY (1.5+3L/1000)µm (2.2+3L/1000)µm
E1Z (1.5+4L/1000)µm (2.5+5L/1000)µmE2XY (2.5+4L/1000)µm (3.5+4L/1000)µm
Max. drive speed X/Y-axis 400mm/s 300mm/sZ-axis 150mm/s 150mm/s
Illumination(PRL: Programmable Ring Light)
Surface LED, whiteContour LED, whitePRL LED, white (4 divisions)
Magnificationchangesystem Programmable power turret (1X, 2x, 6x)Stageglasssize 34.8” x 37.7”
883 x 958mm46.7” x 46.7”
1186 x 1186mm56.7” x 56.7”
1440 x 1440mm67.5” x 77.5”
1714 x 1968mmDimensions (W x D x H) 58 x 67.5 x 62”
1475x1716x1578mm75.3 x 82 x 63”
1912x2086x1603mm85.3 x 92 x 61”
2166x2340 x1554mm96 x 113 x 61”
2440 x 2868 x 1554mmMax stage loading 22 lbs / 10kg 66.1 lbs / 30kg 66.1 lbs / 30kg 66.1 lbs / 30kgMass 5666 lbs / 2570kg 6504 lbs / 2950kg 7937 lbs / 3600kg 9921 lbs / 4500kg
* Themeasuringaccuracyisdefinedatthefollowingconditions,Programmablepowerturret:1X,Objectivelens:2.5X(HRorSL), L=Dimensionbetweentwoarbitrarypoints(mm)
Image Multi-AutoFocusThe optimal focus can be selected for each surface texture and measuredfeature,realizinghighreproducibility and reliable edge detection.
Edge focus
Patternfocus
Surface focus
Programmable Ring Light (PRL)Finecontrolofobliquityanddirectionprovidesilluminationoptimalformeasurement.Obliquitycanbearbitrarilysetintherangefrom30°to80°.Thistypeofilluminationiseffectiveforenhancingtheedgeofinclinedsurfacesorverysmallsteps.Illuminationcanbecontrolledindependentlyineverydirection,backandforth,rightandleft.Measurementwithedgeenhancementispossiblebyformingashadowbylightingfromonlyonedirection.
Workpiecesurface
Parabolic mirror
Toroidal mirror
Four-quadrant LED light
30° 60° 80°
Tracking Auto Focus (TAF)TheTAFfeaturefocusescontinuously,adjustingtochangesintheheightoftheobjectbeingmeasured.Automatictrackingofsurfacewavesandwarpage(intheZaxisheightdirection)improvesmeasurementthroughput.Thefeaturealsocutsoutthehassleoffocusingduringmanualmeasurement,reducingtheworkburdenformeasuringsystemoperators.
Parfocal
Parfocal
Surface of workpiece
Automatic Z-axis tracking Objectives
Tracking Auto Focus (TAF)AFprinciple Objectivecoaxialautofocusing(knifeedgemethod)
Suitableobjectives QV-HR1x QV-SL1x QV-HR2.5x QV-SL2.5x QV-5x
Trackingrange*26.3mm 6.3mm 1mm 1mm 0.25mm
(±3.15mm) (±3.15mm) (±0.5mm) (±0.5mm) (±0.125mm)
Spotdiameter*3 5.2µm 8.0µm 2.1µm 3.1µm 1.5µm
Lasersource Semiconductorlaser(peakwavelength:690nm)
Laserpower 0.9mW
Lasersafety Class2(JISC6802:2011,EN/IEC60825-1:2007)*2Variesaccordingtoworkpiecesurfacetextureandreflectance.*3Thesearedesignvalues.
M-13
Non-contact and contact measurement with one machineQVtouchprobeunitenablesbothvisionmeasurementandtouchprobemeasurement.
3D workpiece measurementMeasuresthree-dimensionalworkpiecessuchasmoldedproducts,resinmoldedproducts,machinedproducts,andmore.
Module change rack availableEasilychangebetweenvisionandtouchprobemeasurementautomaticallywithamodulechangerack.
Specifications with Touch Probe Option
Masterball
Calibrationblock
Module change rack, MCR20
PH6
TP20
Quick Vision with Touch Trigger Probe
Safety precautions regarding laser autofocus system (factory-installed option)This product uses a low-power visible laser (690nm) for measurement. The laser is a CLASS 1 EN/IEC60825-1 (2007) device. A warning and explanation label, as shown above, is attached to the product as appropriate.
QV TP ELFQV TP Apex302Hyper QV TP302
QV TP Apex404Hyper QV TP404
QV TP Apex606Hyper QV TP606
Measuringrange*1(X×Y×Z)
Vision 250×200×200mm 300×200×200mm 400×400×250mm 600×650×250mmTouchProbe 184×200×200mm 234×200×200mm 334×400×250mm 534×650×250mm
Measuringaccuracy*2(Touchprobe) E1X, E1Y, E1Z (2.4+3L/1000)µm QVTPApex:(1.8+3L/1000)µm
HyperQVTP:(1.7+3L/1000)µm
QV TP ACCEL 808 QV TP ACCEL 1010 QV TP ACCEL 1212 QV TP ACCEL 1517
Measuringrange*1(X×Y×Z)
Vision 800×800×150mm 1000×1000×150mm 1250×1250×100mm 1500×1750×100mmTouchProbe 734×800×150mm 934×1000×150mm 1184×1250×100mm 1434×1750×100mm
Measuringaccuracy*2(Touchprobe) E1X, E1Y, E1Z (1.8+3L/1000)µm (3+4L/1000)µm (6+7L/1000)µm
*1:Whenamodulechangerack,amasterball,andacalibrationringaremounted,themeasurementrangesaresmallerthanthoseinthetable.OtherspecificationsarethesameasthoseofQVELF,QVApex,HyperQV,andQVACCEL. Pleasecontactoursalesofficeformoredetails.
*2:InspectedbyMitutoyostandard.L=lengthbetweentwoarbitrarypoints(mm)
Objective QV2.5X HRMeasurement principle Double pinhole methodLaser spot diameter 3µmRepeatability s =0.4µm
Laser Auto Focus* (Factory-installed option)The system can be equipped with a Laser Auto Focus unit that allows a stable, high-speed height measurement during high-speed travel. This unit provides stable measurement results with minimum dependence on surface inclination since the double pinhole method is adopted in the detection system.*Factory ordered option
Detector a
Pinhole
Objective
Detector b
Pinhole
Lens
Half mirror
Coaxial laser auto-focus
Example: Height of leads from a QFP package
M-14
Objectivemag.
Turretlensmag.
Monitormag.
ViewField
0.5X 1X 16X 12.54x9.402X 32X 6.27x4.706X 96X 2.09x1.56
1X 1X 32X 6.27x4.702X 64X 3.13x2.356X 192X 1.04x0.78
2.5X 1X 80X 2.50x1.882X 160X 1.25x0.946X 480X 0.41x0.31
5X 1X 160X 1.25x0.942X 320X 0.62x0.476X 960X 0.20x0.15
10X 1X 320X 0.62x0.472X 640X 0.31x0.236X 1920X 0.10x0.07
25X 1X 800X 0.25x0.182X 1600X 0.12x0.096X 4800X 0.04x0.03
Accessories for Quick Vision
QV-Index Head* Automaticmulti-planemeasurementispossiblewiththeoptionalindextable.
Max. workpiece diameter 5.51” / 140mmMax. workpiece mass 4.41 lbs / 2kgMin. rotation angle 0.1°Positioning accuracy ±0.5°Max. rotation speed 10rpm
Tracking Auto Focus (TAF)TheTAFfeaturefocusescontinuously,adjustingtochan-gesintheheightoftheobjectbeingmeasured.Automatictrackingofsurfacewavesandwarpage(intheZaxisheightdirection)improvesmeasurementthroughput.Thefeaturealsocutsoutthehassleoffocusingduringmanualmeasurement,reducingtheworkburdenformeasuringsystemoperators.
Parfocal
Parfocal
Surface of workpiece
Automatic Z-axis tracking Objectives
Tracking Auto Focus (TAF)AFprinciple Objectivecoaxialautofocusing(knifeedgemethod)Suitableobjectives QV-HR1x QV-SL1x QV-HR2.5x QV-SL2.5x QV-5x
Trackingrange*2 6.3mm 6.3mm 1mm 1mm 0.25mm(±3.15mm) (±3.15mm) (±0.5mm) (±0.5mm) (±0.125mm)
Spotdiameter*3 5.2µm 8.0µm 2.1µm 3.1µm 1.5µmLasersource Semiconductorlaser(peakwavelength:690nm)Laserpower 0.9mWLasersafety Class2(JISC6802:2011,EN/IEC60825-1:2007)*2Variesaccordingtoworkpiecesurfacetextureandreflectance.*3Thesearedesignvalues.
Capable of Supporting ISO10360-7 Guaranteed AccuracySomemodelsintheQuickVisionSeriessupporttheISO10360-7guaranteedaccuracyspecifications.ContactMitutoyofordetailsonapplicablemodels.Guaranteed accuracies•Lengthmeasurementerror EU,MPE
•Probingerror PF2D,MPE
LengthmeasurementerrorE
Objective † Objective Order No. Working
distanceQV-SL0.5X 02AKT199 30.5mmQV-HR1X 02AKT250 40.6mmQV-SL1X 02ALA150 52.5mmQV-HR2.5X 02AKT300 40.6mmQV-SL2.5X 02ALA170 60mmQV-5X 02ALA420 33.5mmQV-10XHR 02AKT650 20mmQV-25X 02ALG020 13mm
Themonitormagnificationandfieldofviewvaluesare for the PRO machine.QV-10X, QV-25X: Depending on a workpiece of illuminationmaybeinsufficientataturretlensmagnificationof2Xand6X.QV-25X: The PRL illumination is restricted in its usable position.
Calibration glass chartNo. 02AKN020 † A calibration chart is used to compensate forthepixelsizeoftheCCDchip,autofocusaccuracy and the optical axis offset at each magnificationofthevariablemagnificationunit (PPT).
Compensation chartNo. 02AKU400* A compensation chart is used to decrease optical distortion and errors caused by difference of the pattern & texture on the workpiece surface.
Multi-Function Control Box
Emergency-stopbutton
4-digitstatusLED
VariablespeedcontrolPFF (Points from Focus)MitutoyodevelopedopticaldatacollectionmethodthatstitchesimagestogetherwithhighresolutionZaxisdata.
Collect an image stack during vertical (Z)
motion of the camera
For each pixel, local contrast measure
is calculated
The Z coordinates of the contrast peak gives the location
of surface at that point
M-15
OPTI-FIX Kits
Themodularopti-fixclampingsystemhasbeendevelopedespeciallyforopticalcoordinatemeasuringsystems.
Opti-fixguaranteessafepartfixturingduringmeasurement.Thisfunctionalconfigurationalsomakesmultiplepartmeasurementsconsiderablyeasier.
Inordertoreduceerrantreflectionsoflightingsystemsandambientlighteffectstoaminimum,allimportantconstructionelementsareanodizedinflat-blackormatfinish.
Modular clamping system for vision measuring systems
Forthemountingofthebasicelementsontoastageglasstherearedifferentfasteningtypesavailable.
Theopti-fixsystemallowsforaquickandeasysolutionofvarioustasksusingonlyafewcomponents.Incaseofmeasuringmethodsusingreflectedaswellastransmittedlightformeasurementofcubic,rotationallysymmetricalandflatworkpieces,theuseofopti-fixisapracticalsolution.
Furthermore,thespringclipsandcenteringpinsareintegratedintothesystemtoallowfortactilemeasuring.Opti-fixofferstheuseralargenumberofconfigurationsforpartfixing,fromclampingtweezersforminiaturepartstoaprecisionviceforlargeparts.
(Fasteningbrackets,vacuumplatesormagneticholdersformountingtheclampingsystemonthemeasuringmachine,canbeorderedseparately.)
M-16
16 parts, for construction of a simple rail system with a length of 250 mm, for fixing parts with simple part geometry.
26 parts, for construction of a basic frame with the dimensions of 200 mm x 100 mm, for fixing parts with simple part geometry.
23 parts, for construction of a basic frame with the dimensions of 250 mm x 200 mm, for fixing parts that are rotationally symmetric with and without center holes.
OPTI-FIX KitsOpti-Set Start
K551056
K551057
K551058
Opti-Set Basic
Opti-Set Rotation
M-17
51 parts, for construction of a basic frame with the dimensions of 400 mm x 250 mm, for fixing parts with slightly more complex part geometry.
115 parts, for construction of a basic frame with the dimensions of 400 mm x 250 mm, and for fixing parts with complex part geometry. The fixing of parts with a rotational part geometry is also available.
18 parts, with locating and clamping elements, included adaptor plates for adaptation to the basic frame of the rail system.
OPTI-FIX KitsOpti-Set Advanced
K551059
K550298
Opti-Set Professional
Opti-Set Round
K551060
M-18
Vision Measuring MachinesQuick Guide to Precision Measuring Instruments
Detecting/measuring edges in the XY plane
Gray
scale 255
127
0
(1) (2) (3)Tool position
Tool
244 241 220 193 97 76 67 52 53 53243 242 220 195 94 73 66 54 53 55244 246 220 195 94 75 64 56 51 50
■Vision MeasurementVisionmeasuringmachinesmainlyprovidethefollowingprocessingcapabilities.
■ Edge detection
■ Auto focusingFocusing and Z measurement
■ Pattern recognitionAlignment, positioning, and checking the presence of a feature
Animageiscomprisedofaregulararrayofpixels,similartotheprocessthatproducesaprintedimagepictureonfineplottingpaperwitheachsquaresolid-filled.
■Gray ScaleAPCstoresanimageafterinternallyconvertingittonumericvalues.Anumericvalueisassignedtoeachpixelofanimage.Imagequalityvariesdependingonhowmanylevelsofgrayscalearedefinedbythenumericvalues.ThePCprovidestwotypesofgrayscale:two-levelandmulti-level.Thepixelsinanimageareusuallydisplayedasthe256-levelgrayscale.
Pixelsinanimagebrighterthanagivenlevelaredisplayedaswhiteandallotherpixelsaredisplayedasblack.
Eachpixelisdisplayedasoneof256levelsbetweenblackandwhite.Thisallowshigh-fidelityimagestobedisplayed.
■Difference in Image QualityDifferencebetween2-leveland256-levelgray-scaleimages
Sampleimagedisplayedin2-levelgrayscale Sampleimagedisplayedin256-levelgrayscale
■Variation in Image Depending on Threshold Level
Thesethreepicturesarethesameimagedisplayedas2-levelgrayscaleatdifferentslicelevels(thresholdlevels).Ina2-levelgray-scaleimage,differentimagesareprovidedasshownaboveduetoadifferenceinslicelevel.Therefore,the2-levelgrayscaleisnotusedforhigh-precisionvisionmeasurementsincenumericvalueswillchangedependingonthethresholdlevelthatisset.
■Dimensional MeasurementAnimageconsistsofpixels.Ifthenumberofpixelsinasectiontobemeasurediscountedandismultipliedbythesizeofapixel,thenthesectioncanbeconvertedtoanumericvalueinlength.Forexample,assumethatthetotalnumberofpixelsinthelateralsizeofasquareworkpieceis300pixelsasshowninthefigurebelow.Ifapixelsizeis10µmunderaspecificimagingmagnification,thetotallengthoftheworkpieceisgivenby10µmx300pixels=3000µm=3mm.
■Edge DetectionHowtoactuallydetectaworkpieceedgeinanimageisdescribedusingthefollowingmonochromepictureasanexample.Edgedetectionisperformedwithinagivendomain.Asymbolwhichvisuallydefinesthisdomainisreferredtoasatool.Multipletoolsareprovidedtosuitvariousworkpiecegeometriesormeasurementdata.
Theedgedetectionsystemscanswithinthetoolareaasshowninthefigureatleftanddetectstheboundarybetweenlightandshade.
Exampleofnumericvaluesassignedtopixelsonthetool
(1)Scanstartposition(2)Edgedetectionposition(3)Scanendposition
1
0
255
127
0
2-levelgray scale
White
Gray
Black
Multi-levelgray scale
White
Gray
Black
300 pixels 10µm
480
pixe
ls
CCD camera lens
Video signal
Amplifier
High-speed A/D converter Frame grabber
Display screen
PC
640 pixels
■Image Storage
M-19
■High-resolution Measurement
Toincreasetheaccuracyinedgedetection,sub-pixelimageprocessingisused.Anedgeisdetectedbydetermininganinterpolationcurvefromadjacentpixeldataasshownbelow.Asaresult,itallowsmeasurementwitharesolutionhigherthan1pixel.
■Measurement along Multiple Portions of an Image
LargefeaturesthatcannotbecontainedononescreenhavetobemeasuredbypreciselycontrollingthepositionoftheCCDsensorandstagesoastolocateeachreferencepointwithinindividualimages.Bythismeansthesystemcanmeasureevenalargecircle,asshownbelow,bydetectingtheedgewhilemovingthestageacrossvariouspartsoftheperiphery.
■Composite Coordinates of a Point
MeasuringmachinestagepositionM=(Mx,My,Mz)
Detectededgeposition(fromthecenterofvision)V=(Vx,Vy)
Actual coordinates are given by X = (Mx + Vx), Y = (My + Vy), and Z = Mz, respectively.
Sincemeasurementisperformedwhileindividualmeasuredpositionsarestored,thesystemcanmeasuredimensionsthatcannotbeincludedinonescreen.
■Principle of Auto FocusingThesystemcanperformXY-planemeasurement,butcannotperformheightmeasurementusingonlytheCCDcameraimage.ThesystemiscommonlyprovidedwiththeAutoFocus(AF)mechanismforheightmeasurement.ThefollowingexplainstheAFmechanismthatusesacommonimage,althoughsomesystemsmayuseanAFlaser.
TheAFsystemanalyzesanimagewhilemovingtheCCDupanddownintheZaxis.Intheanalysisofimagecontrast,animageinsharpfocuswillshowapeakcontrastandoneoutoffocuswillshowalowcontrast.Therefore,theheightatwhichtheimagecontrastpeaksisthejust-in-focusheight.
■Variation in Contrast Depending on the Focus ConditionEdgecontrastislowduetoout-of-focusedges.
Edgecontrastishighduetosharp,in-focusedges.
Gray
scale
Tool position Gray
scale
Tool position
When enlarged...
A position the system recognizes as an edge may be in error by up to one pixel width using normal image processing. This will prevent the execution of high-resolution measurement.
M
Mz
My
Mx
Vx
VyV
Machine coordinate system Vision coordinate system
CCD
Z coordinate
In-focus height
Contrast
High High
Low Low
Contrast in the scanning direction Contrast in the scanning direction
Gray
scale
Gray
scale
Tool position
Tool position
Image signal without sub-pixel processing
Image signal with sub-pixel processing
The image signal profile approaches an analog waveform like this.
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