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The top documents tagged [center of wafer]
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center of wafer
Microscale Device Fabrication: Electrochemical Deposition (EMD) of Metals By Mahmoud Hayat and Cerise McLaren.
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Lec 1
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Microscale Device Fabrication: Electrochemical Deposition (EMD) of Metals
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Yellow blobs are not of interest – these are test areas
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500um quartz wafer with nominal 200nm deep aluminum lines – these are aligned with the flat at left and have width of 38um and pitch of 40um with 2um gap.
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