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The top documents tagged [deal griffin]
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deal griffin
THIN FILM DEPOSITION – Chapter 9 Introduction Many films, made of many different materials are deposited during a standard CMOS process. Requirements or.
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LITHOGRAPHY Lithography is arguably the single most important technology in IC manufacturing. The SIA ITRS is driven by the desire to continue scaling.
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ETCHING – Chapter 10 Etching of thin films and sometimes the silicon substrate are very common process steps. Usually selectivity, and directionality are.
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Chapter 11 BOL Processes
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1159759_634497452596835000
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