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The top documents tagged [electron continuity]
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electron continuity
COMPUTATIONAL INVESTIGATION OF DUAL-FREQUENCY POWER TRANSFER IN CAPACITIVELY COUPLED PLASMAS* Yiting Zhang and Mark J. Kushner
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YY_MJK_ICOPS2009_01
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ELECTRON AND ION ENERGY DISTRIBUTIONS IN 2-FREQUENCY CAPACITIVELY COUPLED PLASMA TOOLS
60 views
SPACE AND PHASE RESOLVED MODELING OF ION ENERGY ANGULAR DISTRIBUTIONS FROM THE BULK PLASMA TO THE WAFER IN DUAL FREQUENCY CAPACITIVELY COUPLED PLASMAS*
216 views
SiO 2 ETCH PROPERTY CONTROL USING PULSE POWER IN CAPACITIVELY COUPLED PLASMAS * Sang-Heon Song a) and Mark J. Kushner b)
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AGENDA
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