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The top documents tagged [flux ratiosref]
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flux ratiosref
SiO 2 ETCH PROPERTY CONTROL USING PULSE POWER IN CAPACITIVELY COUPLED PLASMAS *
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SiO 2 ETCH PROPERTY CONTROL USING PULSE POWER IN CAPACITIVELY COUPLED PLASMAS * Sang-Heon Song a) and Mark J. Kushner b)
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