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The top documents tagged [ion implantation tools]
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ion implantation tools
1.Introduction and application. 2.Ion implantation tools. 3.Dopant distribution. 4.Mask thickness and lateral distribution. 5.Effect of channeling. 6.Damage.
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Introduction and application. Ion implantation tools. Dopant distribution. Mask thickness and lateral distribution. Effect of channeling.
73 views