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The top documents tagged [resist shrinkage]
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resist shrinkage
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Nanoimprint lithography (NIL)
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Magazine fall01 investigation193nm
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Nanoimprint lithography (NIL) 1.UV-curable NIL. 2.Resists for UV-NIL. 3.Mold fabrication for thermal and UV-NIL. ECE 730: Fabrication in the nanoscale:
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Nanoimprint lithography (NIL)
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