Post on 03-Jan-2016
transcript
NATIONAL NANOFABRICATION CENTRE
CLEANROOM ADMINISTRATIVE COMMITTEE MEETING
TUMS Murthy27 Mar 2012
TUMS Murthy Cleanroom Admin Committee Meeting31 Jan 2012
Agenda
Infrastructure installation and commissioning Utilities Fab Equipment
Operations Operation procedures and protocols User Training Preventive and Breakdown Maintenance ;
Planning for Consumables, spares etc Manpower
TUMS Murthy Cleanroom Admin Committee Meeting31 Jan 2012
Utilities
All the utilities have been installed and commissioned
Following utilities did not meet the specifications and need modification Dry exhaust and dry scrubber BMS
Systems that have not been tested Wet Scrubber Humidifier Sprinklers
TUMS Murthy Cleanroom Admin Committee Meeting31 Jan 2012
Utilities contd.
Utilities that need upgrading or enhancement Heat and smoke detector system. System
to be upgraded to an addressable system Biometric access for staircase to Mezzanine
floor Walkie-talkies for communication among
fab and utilities staff Utilities under installation
Borewell water treatment plant
TUMS Murthy Cleanroom Admin Committee Meeting31 Jan 2012
Nanofab Tools
Litho All tools installed and commissioned
E-line vibration isolation to be installed Plasma processing
All tools installed and commissioned Wet procesing
3 out of 6 benches have been installed Replacement for broken Quartz baths received.
Waiting for installation engineer from Felcon to arrive to complete installation
TUMS Murthy Cleanroom Admin Committee Meeting31 Jan 2012
Nanofab Tools
Films One sputter tool working Waiting replacement spares and Tecport
Engineer’s schedule for commissioning one more sputtering system and Ebeam evap system
Furnaces LPCVD 3 tubes working Problems with other tubes and the wet
scrubber to be resolved
TUMS Murthy Cleanroom Admin Committee Meeting31 Jan 2012
Operations
Operation procedures and protocols Safety related Equipment operation procedures
User Training Training schedules under preparation
Utilities maintenance the key to operations Most critical systems out of manufacturer
warranty AMC with various manufacturers or with Ellipsiz
TUMS Murthy Cleanroom Admin Committee Meeting31 Jan 2012
Operations contd.
Manpower recruitment and training is a priority For second shift staffing For Nano Fab Equipment and process
maintenance Fine tuning, enhancement and preventive
maintenance of utilities Preliminary quote obtained for Employee
Medical and Accident Group Insurance
TUMS Murthy Cleanroom Admin Committee Meeting31 Jan 2012
Other Issues
Electrical Distribution continues to be a worry with several unexplained incidents Latest is the burnt contactors in the
Capacitance Bank for power factor correction
Root cause of earlier incidents of MCB tripping (ref : POU 610 scrubber ) and Noise from UPS could not be found
TUMS Murthy Cleanroom Admin Committee Meeting31 Jan 2012
Capacitance Bank damage
Insulation
Burnt