Post on 21-Dec-2015
transcript
PolyMUMPS
George KweiMirela Cunjalo
Gary Lu
Overview
PolyMUMPS Technology Description
Our Designs, ideas and problems First-Half Second-Half
Questions
PolyMumps
Technology Processes Designed to be as General as Possible
3 polysilicon layers + 1 metal layerOxide – sacrificial layerHoles – removes PolysiliconAnchors – removes OxideDimples
First-Half [Stepper Motor]
Stepper Motor using Heatuators What are
Heatuators?
First-Half [Stepper Motor]
SolidWorks – Heatuator Array
First-Half [Stepper Motor]
Problem with existing design Placement of pads No dimples Remove staple More Heatuators required
First-Half [Stepper Motor]
New Adjustments
First-Half [Stepper Motor]
SolidWorks – Stepper Motor Animations
First-Half [Stepper Motor]
Variations in New Designs
Second-Half [Initial Design]
Switch via a Gear Train … Too ambitious!
Second-Half [Alternating Switch]
Simplifications
Second-Half [Alternating Switch]
SolidWorks – Alternating Switch Animation
Second-Half [Regulated Motor]
Basic Idea
Second-Half [Regulated Motor]
Problems to consider
High Tension of SpringNeed more HeatuatorsNeed longer Spring
Spacing of Teeth
Length of the bar
Second-Half [Regulated Motor]
Calculations: Spring/Tension
Compliance : C = L3 / (E * I) * (N/12 + 1/48)
L - length of the barsE - Young’s ModulusN - # of barsI - 2nd moment of the bars
Moment:
I = 1/12 * w * h3 w - width of the barsh - thickness.
Second-Half [Regulated Motor]
Calculations: Number of Heatuators
F = k * x * µx - distance the spring is stretchedK - spring constant (C-1) µ - coefficient of static friction between polySilicon and polySilicon (4.9 ± 1.0)
d = do*N + C / N * F
d - deflectiondo – no-load deflection for one heatuator
N - number of heatuatorsF - opposing force
Second-Half [Regulated Motor]
Solutions – variation 1 Pull-Ring
Second-Half [Regulated Motor]
Solutions – variation 2 Longer Spring
(Pull-Ring)
Second-Half [Regulated Motor]
SolidWorks – Pullring Animation
Second-Half [Regulated Motor]
Solutions – variation 3 Linear Stepper-Motor
Ratchet Motor
Ratchet Motor
Calculations: Flexture
a1
a2
d1d2
1
2
1
2
a
a
d
d
Ratchet Motor
SolidWorks – Animation
Conclusion
What we learned: use lots of instances for Cadence
make sure snap to grid is at 1.0 micron
make sure all geometries are uniform numbers
carefully go over design rules first, minimum distances, etc.
Fix all the errors on one design before proceeding to the next
Discuss designs with TAs before making them in Cadence
Designs should correspond to at least 3x the calculations, to make sure everything will work
Questions?
PolyMUMPS
Mirela CunjaloGeorge Kwei
Gary Lu