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© 2016, Amkor Technology, Inc. 1 - Arcedera.pdfThe Packaging Challenge – Stimulus Delivery MEMS...

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1 © 2016, Amkor Technology, Inc.
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  • 1© 2016, Amkor Technology, Inc.

  • 2© 2016, Amkor Technology, Inc.

    Standardization of Packaging for the Internet of ThingsAdrian Arcedera l VP of MEMS and Sensor Products

  • 3© 2016, Amkor Technology, Inc.

    About Amkor TechnologyAmkor Technology, Inc. is one of the world's largest and most accomplished providers of state-of-the-art packaging design, assembly and test services. Founded in 1968, Amkor is a strategic partner to leading semiconductor companies and electronics OEMs. Our operational base encompasses over 5.8M ft2 of volume production, development, sales and support services in Asia, Europe and the US. Our solutions enable our customers to focus on semiconductor design and wafer fabrication while utilizing Amkor as their turnkey provider and, where required, their packaging technology innovator.

  • 4© 2016, Amkor Technology, Inc.

    The Internet of Things

    Semiconductors

    Services

    Hardware

    Software

    60%

    16%

    12%

    12%

    Value SegmentationIC Insights ($96B) 2018

    $57.6B

    $15.4B

    $11.5B

    $11.5B

  • 5© 2016, Amkor Technology, Inc.

    The Building Blocks of the “Internet of Things”

    Internetof

    Things

  • 6© 2016, Amkor Technology, Inc.

    General IoT Packaging Requirements Low cost Low power RF requirements (shielding) Scalable to high volume

    manufacturing Small package size

    – Discrete solution – Integrated solution

    Stimulus delivery

  • 7© 2016, Amkor Technology, Inc.

    Current Discrete Packaging for IoT

    Connectivity Memory Power ManagementMicroprocessor &

    MicrocontrollerMEMS & Sensor

    SOIC/TSSOP *

    QFN/TQFP *

    Laminate CSP *

    WLCSP *Note: *Limited Compatibility

  • 8© 2016, Amkor Technology, Inc.

    What makes MEMS and SensorPackaging Different?

  • 9© 2016, Amkor Technology, Inc.

    Growth and Adoption of Automotive MEMS SensorsThe role of government regulations in the MEMS market

    1970’s 1980’s 1990’s 2000’s 2010’s 2020’s

    Fuel Economy Improvements

    Airbags

    Tire Pressure Monitoring

    Electronic Stability Control

    Pedestrian/ Collision

    Avoidance?

  • 10© 2016, Amkor Technology, Inc.

    Rapid Growth in Consumer MEMS

  • 11© 2016, Amkor Technology, Inc.

    The Packaging Challenge – Stimulus DeliveryMEMS are NOT ICs!

    Source: Yole 2014 MEMS Industry Report

    MEMS – Micro Electro Mechanical Systems are tiny structures created in the silicon designed to respond to various stimuli from the “real world”

    Bell Labs, US 1947 22 nm Technology Sandia’s, Micromachine (MEMS)

    No standard process (CMOS, BiCMOS…) No p-n junction for MEMS And as a consequence, NO ROADMAP

    Courtesy Sandia National Laboratories SUMMiT™ Technologies www.mems.sandia.gov

  • 12© 2016, Amkor Technology, Inc.

    MEMS and Sensor Packaging Requirements

    Acc

    el/G

    yro

    Mag

    netic

    Mic

    roph

    one

    Tem

    pera

    ture

    /H

    umid

    ity

    Pres

    sure

    /A

    ltim

    eter

    Gas

    Ges

    ture

    IR RF/

    BA

    W/S

    aw/

    Osc

    illat

    or

    Bio

    /Med

    WaferHandling

    Capped Wafer Handling Stealth Dicing

    StimulusDelivery

    Package Port Hole (Top) Package Port Hole (Bottom)

    Die AttachOptions

    Low Modulus DA Thermal DA Low CTE Substrates Multi Die-Stacked Multi Die-SBS FlipStack® Multi Sensor

    Interconnect Options

    Wirebond Au Stud Bump Flip Chip TSV* Copper Pillar + COW

    *TSV, TGV is at foundry level.

  • 13© 2016, Amkor Technology, Inc.

    MEMS and Sensor Packaging Requirements

    Acc

    el/G

    yro

    Mag

    netic

    Mic

    roph

    one

    Tem

    pera

    ture

    /H

    umid

    ity

    Pres

    sure

    /A

    ltim

    eter

    Gas

    Ges

    ture

    IR RF/

    BA

    W/S

    aw/

    Osc

    illat

    or

    Bio

    /Med

    PackageProtection

    Overmolded Leadframe Overmolded Laminate Lidded Package Lidded + Molded Package Bio-compatible Lid Exposed Die Non-Ferromagnetic Port Hole Filter EMI Shielding

    Cavity Fill/Die Coat

    Black Die Coating Clear Die Mold Gel Fill

  • 14© 2016, Amkor Technology, Inc.

    PackagingInter-connection

    MEMS Capping/Interconnect TrendMEMS Wafer Capping

    TBD

    Through Silicon Vias Overmolded CSP

    MEM

    S D

    evic

    e

    *TSV, TGV is at foundry level.

    3D Functional Cap Through Glass Vias

    Chip on Chip

    Thin Film Capping(RnD Stage)

    Pre-Mold/Cavity

    Overmolded CSP/MLF®

    Cavity Packaging

    Glass Cap

    Silicon Cap

    Hermetic PackagingBare Die

    WLCSP

    Cavity CSP

  • 15© 2016, Amkor Technology, Inc.

    MEMS Packaging ComplexityOvermolded or cavity package?

    Wirebond or flip-chip?

    Die attach material?

    EMI shielding?

    Laminate or leadframe?

    Wire type, loop radiusand gauge?

    Molded-in stress?

    Leaded or not? Encapsulation?

    Stacked die or side-by-side?

    How/what to test?

  • 16© 2016, Amkor Technology, Inc.

    Materials Help Manage Die Stress

    From material datasheets From simulation results

    0

    500

    1000

    1500

    2000

    2500

    Epoxy - C Film Epoxy - NC Silicone1 Silicone2

    Mod

    ulus

    -M

    Pa

    Die Attach Adhesives

    0

    0.001

    0.002

    0.003

    0.004

    0.005

    0.006

    0.007

    FR5 Ceramic FR5-1 FR5-2

    S1 P

    rinci

    pal S

    tres

    s -M

    Pa

    Substrate Thickness/Material

    Thin

    Thick

  • 18© 2016, Amkor Technology, Inc.

    Packaging Technologies and Material Sets are the Performance Differentiator

    0

    2

    4

    6

    8

    10

    12

    1 2 3 4 5 6 7 8 9 10 11V

    ertic

    al H

    eigh

    t

    Series1

    Series2

    Series3

  • 19© 2016, Amkor Technology, Inc.

    MEMS/Sensor Package Standardization

  • 20© 2016, Amkor Technology, Inc.

    Standard Platforms Enable Faster Developmentfor MEMS/Sensor Discrete Packaging

  • 21© 2016, Amkor Technology, Inc.

    Overmolded ExposedDie SurfaceCavity

    Package

    SOIC

    QFN

    LaminateLGA/FPBGA

    Evolution Towards Standardizationfor MEMS/Sensor Packaging

  • 22© 2016, Amkor Technology, Inc.

    Die Top StressHigh

    Low

    Pack

    age

    Cos

    t

    High

    Low

    Overmolded Exposed Die Pre-Mold & Cavity

    Ceramic Package

    Cost vs. Performance Comparison

  • 23© 2016, Amkor Technology, Inc.

    Market Acceptance

    Overmolded ExposedDie SurfaceCavity

    Package

    SOIC Widely accepted in the automotive market Cavity package used in automotive pressure sensors

    QFN Smaller footprint than SOIC, well suited for consumer market Available “wettable flank” enables more automotive applications

    LaminateLGA/FPBGA

    Small size and design flexibility make it favorable for sensor fusion and IoT applications for the consumer market

    Laminate + cavity package provides very good flexibility Gaining traction in automotive markets

  • 24© 2016, Amkor Technology, Inc.

    Today’s Sensor Clusters

    http://i-micronews.com/component/hikashop/product/camera-module-industry-report.html?Itemid=0http://i-micronews.com/component/hikashop/product/camera-module-industry-report.html?Itemid=0

  • 25© 2016, Amkor Technology, Inc.

    PackagingInter-connection

    Sensor Fusion Trend

    MEMS Wafer Capping

    Overmolded CSP

    Through Silicon Vias

    WLCSP

    MEM

    S Se

    nsor

    s

    *TSV, TGV is at foundry level.

    3DFunctional Cap

    Chip on Chip

    Capped, Uncapped Sensors

    Flip Chip, Stacked

    Wirebond, Side by Side, Stacked Cavity Packaging

    Overmolded CSP

    Cavity CSP

  • 26© 2016, Amkor Technology, Inc.

    Adding IoT Blocks to MEMS/Sensor Package

    Bluetooth RadioLGA Package

    Pkg Size ~ 3mm sq

    Connectivity MEMS/Sensor

    Inertial SensorLGA Package

    Pkg Size ~ 3.5 mm sq

    8-bit Microcontroller

    LGA Package

    Pkg Size ~ 5 mm sq

    Microcontroller LGA PackagePkg Size ~ 6 mm sq

    IOT Package

  • 27© 2016, Amkor Technology, Inc.

    Adding IoT Blocks to MEMS/Sensor Package

    Cavity Package Hybrid Cavity Package

    MLF®/QFN

    LaminateLGA/FPBGA

  • 28© 2016, Amkor Technology, Inc.

    Discrete vs. Integrated IoT Solutions

    Integrated Discrete Prospects Smaller body size, smaller motherboard space Packaging cost reduction Less complex SMT process Less inventory (for IoT blocks)

    Prospects Widely available, existing assembly and test

    infrastructure Flexible sources of IoT blocks/components Known good IoT block/component binning

    Potential Concerns Known good IoT block/components MEMS/Sensor die stress management Compounded yield, multi test and sensor

    trimming

    Potential Concerns Larger motherboard space Limited package size reduction

  • 29© 2016, Amkor Technology, Inc.

    In Summary Integration is happening at the front-end to complete the building blocks

    of IoT The discrete packaging solutions are available today, but Integration

    and the IoT module assembly is needed to push IoT into more applications

    MEMS/Sensor device packaging standardization can be applied to IoTmodule assembly to offer a single package solution without sacrificing performance

    Standard IoT platforms = faster development – Faster introduction of new products – IoT monetization

  • 30© 2016, Amkor Technology, Inc.

    What will you integrate?

    Connectivity + Memory + Microprocessor/Microcontrollers

    PowerManagement

    + MEMS/Sensors =

    =IoT

  • 31© 2016, Amkor Technology, Inc.

    Next Steps to Standard Packaging and Test… “Standard package platforms will help speed up

    integration and monetize IoT” What will you integrate? Standard Packaging

    for IoT– What are the priority MEMS / Sensor devices?– Will it be MEMS + Connectivity or MEMS +

    Microcontroller + Connectivity? Etc.– Standard Pre-mold Package Outlines?– Special features needed - Antenna? Shielding?

    Tester and Handler Development– How can we minimize Test time and reduce the

    number of insertion?

  • 32© 2016, Amkor Technology, Inc.

    Thank You

  • 33© 2016, Amkor Technology, Inc.

    Contact Amkor for Further InformationSan Jose Sales Office25 Metro DriveSuite 700San Jose, CA 95110 USA

    Tel: 408.496.0303Email: [email protected]

    Corporate Headquarters2045 East Innovation CircleTempe, AZ 85284 USA

    Tel: 480.821.5000Email: [email protected]

  • 34© 2016, Amkor Technology, Inc.

    Q & A

    Slide Number 1Standardization of Packaging �for the Internet of ThingsAbout Amkor TechnologyThe Internet of ThingsThe Building Blocks of the “Internet of Things”General IoT Packaging RequirementsCurrent Discrete Packaging for IoTWhat makes MEMS and Sensor�Packaging Different?Growth and Adoption of Automotive MEMS SensorsRapid Growth in Consumer MEMSThe Packaging Challenge – Stimulus DeliveryMEMS and Sensor Packaging RequirementsMEMS and Sensor Packaging RequirementsMEMS Capping/Interconnect TrendMEMS Packaging ComplexityMaterials Help Manage Die Stress Low Stress Die Attach MaterialPackaging Technologies and Material Sets �are the Performance DifferentiatorMEMS/Sensor Package StandardizationStandard Platforms Enable Faster Development�for MEMS/Sensor Discrete PackagingEvolution Towards Standardization�for MEMS/Sensor PackagingCost vs. Performance ComparisonMarket AcceptanceToday’s Sensor ClustersSensor Fusion TrendAdding IoT Blocks to MEMS/Sensor PackageAdding IoT Blocks to MEMS/Sensor PackageDiscrete vs. Integrated IoT SolutionsIn SummaryWhat will you integrate? Next Steps to Standard Packaging and Test…Thank YouContact Amkor for Further InformationQ & A


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