« 450mm transition: From a local initiativeto global collaboration »

Alain JarreChairman & CEO

SEMI European Advisory Board member

OSEO Excellence member

• Introduction – RECIF short profile

• From a local initiative in EU…

• …to a global collaboration

• Conclusion

Summary

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>30 years experience in semiconductor Business

Introduction – RECIF short profile

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Worldwide Locations

3 corporate entities = EU (HQ) - USA - TaiwanCorporate headcount = 65 persons

Introduction – RECIF short profile

USAFishkill

France - HQToulouse Taiwan

Hsinchu

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• Introduction – RECIF short profile

• From a local initiative in EU…

• …to a global collaboration

• Conclusion

Summary

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EEMI450 consortium founding members

Local initiative in EU

2010

2014

2011

2013

2012

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Distribution along a simplified value chain,of companies participating to an EU funded 450mm program (closed, running or pending)

Local initiative in EU

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=> Goal is to set-up a 450mm “N10” compliant equipme nt demo line at Imec

Local initiative in EU

Note: Does not represent SOI450 & SEA4KET 8

Imec placed at a central focal point…

Main location of partners participating to 450mm pilot line project

Local initiative in EU

Central strategy :

- support “More than Moore”

- support “More Moore”

- support a leading edge 450mm R&D and Innovation platform”Has to be complementary to the G450C initiative

Source: White paper – “Balanced strategy for Nanoelectronics in Europe” - May 18, 2012

Central position:

=> foster synergies

=> ease modules maturation

=> Helps keeping cost under control

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Local initiative in EU

1Collaborate

2Define the path

3Develop

RECIF strategy1- OEM

A) EFEMB) Sub modules

2- End users (sorters)

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Global dissemination road map (RECIF )

2012 2013 2014 2015Q2 Q3 Q4 - Q1 Q2 Q3 Q4 - -Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4

2016- Q1 Q2 Q3 Q4

EEMI450 inputs

Standalone EFEM

(Sorter)

User feedback@ Imec

Development

Assesment and pilot line support

Usage

User feedback@ Imec

Final EFEM

Prototypes installed @ Imec

E450-LMDAP (pending for approval)

Support of “N10” Advanced patterning

2017- Q1 Q2 Q3

Wafer Sorter

(Enhanced)

Assesment

data

Continuation in LMDAP

Local initiative in EU

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Status as today

EEMI450 project achievements retrofitted to 300mm

Local initiative in EU

Vibration management

Cleanliness

throughput

450mm best practices

300mm Improvement

2012 2013Q3 Q4 - Q1 Q2 Q3Q2

Link

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@ 40 nm = 3 x better Vs 2007@ 26 nm = best in class

Next key Milestones

• March 2014 => First product @ Imec

• March 2015 => Enhanced EFEM & Sorter @ Imec

Local initiative in EU

Compliant with time to market Vs first IDM pilot li nesRobotics arrives upstream in the value chain

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• Introduction – RECIF short profile

• From a local initiative in EU…

• …to a global collaboration

• Conclusion

Summary

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Industry road map

http://cordis.europa.eu/fp7/ict/nanoelectronics/documents/450mm-final-report.pdf

Source: Public report ref “SMART20120/062” - Dated 16th of February 2012 (Ordered by European Commission)

1st pilot line introduction

To a global collaboration

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Phasing Vs Industry road map

1st pilot line introduction

To a global collaboration

Presented Sept. 11th 2013

SEMI North east forum 16

2012 Status 2013 Status

Presented @ semicon’s Presented Sept. 11th 2013 / SEMI North east forum

To a global collaboration

=> Share an updated view on dynamic changes, for al igned strategy

3Q shift for IC maker pilot line

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• An SME can not afford being at multiple places at the same time

• The willingness to collaborate with multiple initiatives

can be achieved only by a “cross collaboration”

• “Cross collaboration” would enable to

- Go beyond the 60 process tools DTM (as defined by G450C)

- Exchange technical achievements based on bilateral

agreements with G450C

To a global collaboration

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•Need to address some open questions!

(notchless wafers standard, PWP budgets and time line , …)

•Need to exchange

To a global collaboration

= “World of EU based equipment vendors + Labs”

= “World of Users & early tools”

* European Equipment Demo Line @Imec

*

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Some of G450C “Demonstration Test Methods” (DTM) can be performed @ Imec- Results could be shared with G450C

- Some of G450C members are partnering also in EU initiativeNext step is cross collaborative

2013 2014 2015Q2 Q3 Q4 - -Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4

2016- Q1 Q2 Q3 Q4

Prototypes installed @ Imec

2017- Q1 Q2 Q3

Continuation in LMDAP

Q1 Q4

To a global collaboration

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• Need to Exchange / collaborate with G450C

• Open questions to be addressed down the road

• Extend beyond identified 60 process tools

• No focus on AMHS / Sorters at G450C

Proposals

� Technical assessment at Imec to be disseminated to G450C members ?

� Let’s define communication channels for such dissemination

ENABLE 450 / Bridge450 for EU?

Conclusion

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www.reciftech.com 22

Thank you!