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520/580.495

Integrated Circuits, CMOS and MEMS

Andreas G. Andreou

Lecture notes adapted from handout notes for

Principles of Electronic Circuits

By Burns and Bond

MEMS on CMOS Figures from Gary Fedder at CMU

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Integrated Circuits (1958)

Jack Kilby Texas Instruments, Phase Shift Oscillator

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Planar Process (1962)

RTL Logic (Noyce and Hoerni)

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CMOS Fabrication History

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CMOS Fabrication (I)

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CMOS Fabrication (II)

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CMOS Process Cross Section

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PowerPC

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PowerPC Metal Layers

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CMOS on Insulator

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Multilevel Interconnects (2002)

IBM Technology

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MEMS on CMOS

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