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OVONIC INOFIED MEMORY (OUM) A Seminar Report On OVONIC UNIFIED MEMORY (OUM) Submitted by Mr. Nishant K Patel (09EC082) Internal Guide: Asst. Prof. Jignesh Patoliya V.T.Patel Department of Electronics & Communication Engineering 09EC082 Page 1
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Page 1: A Seminar Report On · 2012-01-24 · OVONIC INOFIED MEMORY (OUM) CHAROTAR UNIVERSITY OF SCIENCE & TECHNOLOGY CERTIFICATE This is to certify that the Seminar entitled “OVONIC UNIFIED

OVONIC INOFIED MEMORY (OUM)

A Seminar Report

On

OVONIC UNIFIED MEMORY (OUM)

Submitted byMr. Nishant K Patel (09EC082)

Internal Guide:

Asst. Prof. Jignesh Patoliya

V.T.Patel Department of

Electronics & Communication Engineering

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OVONIC INOFIED MEMORY (OUM)

CHAROTAR UNIVERSITY OF SCIENCE & TECHNOLOGY

CERTIFICATE

This is to certify that the Seminar entitled “OVONIC UNIFIED MEMORY

(OUM)” is a bonafied report of the work carried out by Mr. Nishant Patel

(09EC082) under the guidance and supervision for the submission of 2nd semester to

Charotar Institute of Technology -Changa. , Gujarat.

To the best of my knowledge and belief, this work embodies the work of candidate

themselves, has duly been completed, fulfills the requirement of the ordinance

relating to the Bachelor degree of the university and is up to the standard in respect of

content, presentation and language for being referred to the examiner.

Guided By: Head of Dept.Asst. Prof. Jignesh Patoliya

Prof. Jaymin BhalaniELECTRONICS AND COMMUNICATION ENGINEERING

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OVONIC INOFIED MEMORY (OUM)

ACKNOWLEDGEMENT

At this stage of my seminar, I take this opportunity to express my heartiest

gratitude and thanks to my guide Asst. Prof. Jignesh Patoliya, for his valuable

guidance and encouragement during each stage of my work. I would especially thank

him, as they have helped me lot to present my seminar related work in a much better

way. He always listens to problems patiently and suggests the best possible solution

and especially thanks for his extensive comments on thesis write up.

Starting off, I am indebted to our Head of Department Prof. Jaymin Bhalani

who also helped me to present my seminar related work in a much better way, and

also as a Head of Department who gave me an opportunity to elect an appropriate

subject for my seminar. I would especially thank him, as he helps me while facing

problems and suggests the best possible solutions. He is very supportive and heartily

acknowledged for providing laboratory support.

Last but not the least; I would like to thank my seniors, friends, and

especially my parents for their support and acknowledgement.

Mr. Nishant Patel(09EC082)

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OVONIC INOFIED MEMORY (OUM)

ABSTRACT

Nowadays, digital memories are used in each and every fields of

day-to-day life. Semiconductors form the fundamental building blocks of the

modern electronic world providing the brains and the memory of products all

around us from washing machines to super computers. But now we are entering an

era of material limited scaling. Continuous scaling has required the introduction of

new materials.

Current memory technologies have a lot of limitations. The new

memory technologies have got all the good attributes for an ideal memory. Among

them Ovonic Unified Memory (OUM) is the most promising one. OUM is a type

of nonvolatile memory, which uses chalcogenide materials for storage of binary

data. The term “chalcogen” refers to the Group VI elements of the periodic table.

“Chalcogenide” refers to alloys containing at least one of these elements such as

the alloy of germanium, antimony, and tellurium, which is used as the storage

element in OUM. Electrical energy (heat) is used to convert the material between

crystalline (conductive) and amorphous (resistive) phases and the resistive

property of these phases is used to represent 0s and 1s.

To write data into the cell, the chalcogenide is heated past its melting

point and then rapidly cooled to make it amorphous. To make it crystalline, it is

heated to just below its melting point and held there for approximately 50ns,

giving the atoms time to position themselves in their crystal locations. Once

programmed, the memory state of the cell is determined by reading its resistance.

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INDEX

CHAPTER 1 INTRODUCTION…………………………………………………. 1

CHAPTER 2

2.1 REVIEW OF MEMORY BASICS…………………………... 2

2.2 MEMEORY DEVICE CHARACTERISTICS

2.2.1 COST………………………………………………… 3

2.2.2 ACCESS TIME AND ACCESS RATE…………….. 3

2.2.3 ACCESSS MODE RANDOM AND SERIAL……… 4

2.2.4 ALTERABILITY-ROM……………………………... 5

2.2.5 PERMANANCE OF STORAGE…………………… 6

2.2.6 CYCLE TIME AND DATA TRANSFER RATE……7

CHAPTER 3

3.1 EMERGING MEMORY TECHNOLOGY…………………… 8

3.2 FUNDAMENTALS IDEAS OF EMERGING MEMORIES… 8

CHAPTER 4

4.1 OVONIC UNIFIED MEMORY …………………………… 10

4.2 OUM ATTRIBUTES………………………………………….. 13

4.3 OUM ARCHITECTURE ……………………………………... 14

CHAPTER 5

5.1 BASIC DEVICE OPERATION...…………………………..... 15

5.2 TECHNOLOGY AND PERFORMANCE…………………… 16

5.3 I-V CHARACTERISTICS…….............................................. 16

5.4 R-I CHARACTERISTICS……….............................................. 17

CHAPTER 6

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6.1 INTEGRATION WITH CMOS………...................................... 19

6.2 CIRCUIT DEMONSTRATION………………………………. 23

CHAPTER 7 ADVANTAGES ………………....................................................... 28

CHAPTER 8

8.1 ABOUT CHALCOGENIDE ALLOY………………………….29

8.2 COMPARISION OF AMORPHOUS AND CRYSTALLINE

STATE......................................................................................... 30

CONCLUSION…………………………………………………………………… 31

REFERENCE…………………………………………………………………….. 32

CHAPTER 1

INTRODUCTION

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We are now living in a world driven by various electronic equipments.

Semiconductors form the fundamental building blocks of the modern electronic

world providing the brains and the memory of products all around us from

washing machines to super computers. Semi conductors consist of array of

transistors with each transistor being a simple switch between electrical 0 and 1.

Now often bundled together in there 10’s of millions they form highly complex,

intelligent, reliable semiconductor chips, which are small and cheap enough for

proliferation into products all around us.

Identification of new materials has been, and still is, the primary means

in the development of next generation semiconductors. For the past 30 years,

relentless scaling of CMOS IC technology to smaller dimensions has enabled the

continual introduction of complex microelectronics system functions. However,

this trend is not likely to continue indefinitely beyond the semiconductor

technology roadmap. As silicon technology approaches its material limit, and as

we reach the end of the roadmap, an understanding of emerging research devices

will be of foremost importance in the identification of new materials to address the

corresponding technological requirements.

If scaling is to continue to and below the 65nm node, alternatives to

CMOS designs will be needed to provide a path to device scaling beyond the end

of the roadmap. However, these emerging research technologies will be faced with

an uphill technology challenge. For digital applications, these challenges include

exponentially increasing the leakage current (gate, channel, and source/drain

junctions), short channel effects, etc. while for analogue or RF applications,

among the challenges are sustained linearity, low noise figure, power added

efficiency and transistor matching. One of the fundamental approaches to manage

this challenge is using new materials to build the next generation transistors.

CHAPTER 2

2.1 REVIEW OF MEMORY BASICS

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Every computer system contains a variety of devices to store the instructions

and data required for its operation. These storage devices plus the algorithms needed

to control or manage the stored information constitute the memory system of the

computer. In general, it is desirable that processors should have immediate and

interrupted access to memory, so the time required to transfer information between

the processor and memory should be such that the processor can operate at, close to,

its maximum speed. Unfortunately, memories that operate at speeds comparable to

processors speed are very costly. It is not feasible to employ a single memory using

just one type of technology. Instead the stored information is distributed in complex

fashion over a variety of different memory units with very different physical

characteristics.

The memory components of a computer can be subdivided into three main

groups:

1) Internal processor memory: this usually comprises of a small set of high speed

registers used as working registers for temporary storage of instructions and

data.

2) Main memory: this is a relatively large fast memory used for program and

data storage during computer operation. It is characterized by the fact that

location in the main memory can be directly accessed by the CPU instruction

set. The principal technologies used for main memory are semiconductor

integrated circuits and ferrite cores.

3) Secondary memory: this is generally much larger in capacity but also

much slower than main memory. It is used for storing system programs and

large data files and the likes which are not continually required by the CPU; it

also serves as an overflow memory when the capacity of the main memory

when the capacity of the main memory is exceeded. Information in secondary

storage is usually accessed directly via special programs that first

transfer the required information to main memory. Representative

technologies used for secondary memory are magnetic disks and tapes.

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The major objective in designing any memory is to provide adequate storage

capacity with an acceptable level of performance at a reasonable cost.

2.2 MEMORY DEVICE CHARACRERISTICS

The computer architect is faced with a bewildering variety of memory

devices to use. However; all memories are based on a relatively small number of

physical phenomena and employ relatively few organizational principles. The

characteristics and the underlying physical principles of some specific representative

technologies are also discussed.

2.2.1 Cost:

The cost of a memory unit is almost meaningfully measured by the purchase

or lease price to the user of the complete unit. The price should include not only the

cost of the information storage cells themselves but also the cost of the peripheral

equipment or access circuitry essential to the operation of the memory.

2.2.2 Access time and access rate:

The performance of a memory device is primarily determined by the rate at

which information can be read from or written into the memory. A convenient

performance measure is the average time required to read a fixed amount of

information from the memory. This is termed read access time. The write access time

is defined similarly; it is typically but not always equal to the read access time.

Access time depends on the physical characteristics of the storage medium, and also

on the type of access mechanism used. It is usually calculated from the time a read

request is received by the memory and to the time at which all the requested

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information has been made available at the memory output terminals. The access rate

of the memory is defined is the inverse of the access time.

Clearly low cost and high access rate are desirable memory characteristics;

unfortunately they appear to be largely compatible. Memory units with high access

rates are generally expensive, while low cost memory are relatively slow.

2.2.3 Access mode-random and serial:

An important property of a memory device is the order or sequence in which

information can be accessed. If locations may be accessed in any order and the access

time is independent of the location being accessed, the memory is termed as a random

access memory.

Ferrite core memory and semiconductor memory are usually of this type.

Memories where storage locations can be accessed only in a certain predetermined

sequence are called serial access memories. Magnetic tape units and magnetic bubble

memories employ serial access methods.

In a random access memory each storage location can be accessed

independently of the other locations. There is, in effect, a separate access mechanism,

or read-write, for every location. In serial memories, on the other hand, the access

mechanism is shared among different locations. It must be assigned to different

locations at different times. This is accomplished by moving the stored information;

he read write head or both. Many serial access memories operate by continually

moving the storage locations around a closed path or track. A particular location can

be accessed only when it passes the fixed read write head; thus the time required to

access a particular location depends on the relative location of the read/write head

when the access request is received.

Since every location has its own addressing mechanism, random access

memory tends to be more costly than the serial type. In serial type memory, however

the time required to bring the desired location into correspondence with a read/write

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head increases the effective access time, so access tends to be slower than the random

access. Thus the access mode employed contributes significantly to the inverse

relation between cost and access time.

Some memory devices such as magnetic disks and d rums contain large

number of independently rotating tracks. If each track has its own read-write head, the

track may be accessed randomly, although access within track in serial.

In such cases the access mode is sometimes called semi random or direct access. It

should be noted that the access

is a function of the memory technology used.

2.2.4 Alterability-ROMS:

The method used to write information into a memory may be irreversible, in

that once the information has been written, it cannot be altered while the memory is in

use,i.e.,online. Punching holes in cards in cards and printing on paper are examples of

essentially permanent storage techniques. Memories whose contents cannot be altered

online are called read only memories. A Rom is therefore a non alterable storage

device. ROMs are widely used for storing control programs such as micro programs.

ROMs whose contents can be changed are called programmable read only memories

(PROMs).

Memories in which reading or writing can be done with impunity online are

sometimes called read-write memories (RWMs) to contrast them with ROMs. All

memories used for temporary storage are RWMs.

2.2.5 Permanence of storage:

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The physical processes involved in storage are sometimes inherently

unstable, so that the stored information may be lost over a period of time unless

appropriate action is taken. There are important memory characteristics that can

destroy information:

1. Destructive read out

2. Dynamic volatility

3. Volatility

Ferrite core memories have the property that the method of reading the memory

alters, i.e., destroys, the stored information; this phenomenon is called destructive

read out (DRO). Memories in which reading does not affect the stored data are said to

have nondestructive readout (NRDO). In DRO memories, each read operation must

be followed by a write operation followed by a write operation that restores the

original state of the memory. This restoration is usually carried out by automatically

using a buffer register.

Certain memory devices have the property that a stored 1 tends to become a 0,

or vice versa, due to some physical decay processes. Over a period of time, a stored

charge tends to leak away, causing a loss of information unless the stored charge is

restored. This process of restoring is called refreshing. Memories which require

periodic refreshing are called dynamic memories, as opposed to static memories,

which require no refreshing. Most memories that using magnetic storage techniques

are static. Refreshing in dynamic memories can be carried out in the same way data is

restored in a DRO memory. The contents of every location are transferred

systematically to a buffer register and then returned, in suitably amplified form, to

their original locations.

Another physical process that can destroy the contents of a memory is the

failure of power supply. A memory is said to be volatile if the stored information can

be destroyed by a power failure. Most semiconductor memories are volatile, while

most magnetic memories are non volatile.

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2.2.6 Cycle time and data transfer rate:

The access time of a memory is defined as the time between the receipt of a

read request and the delivery of the requested information to its external output

terminals. In DRO and dynamic memories, it may not be possible to initiate another

memory access until a restore or refresh operation has been carried out. This means

that the minimum time that must elapse between the initiations of two different

accesses by the memory can be greater than the access time: this rather loosely

defined time is called the cycle time of the memory.

It is generally convenient to assume the cycle time as the time needed to

complete any read or write operation in the memory. Hence the maximum amount of

information that can be transferred to or from the memory every second is the

reciprocal of cycle time. This quantity is called the data transfer rate or band width.

CHAPTER 3

3.1 EMERGING MEMORY TECHNOLOGIES

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Many new memory technologies were introduced when it is understood that

semiconductor memory technology has to be replaced, or updated by its successor

since scaling with semiconductor memory reached its material limit. These

memory technologies are referred as ‘Next Generation Memories”. Next

Generation Memories satisfy all of the good attributes of memory. The most

important one among them is their ability to support expansion in three-

dimensional spaces. Intel, the biggest maker of computer processors, is also the

largest maker of flash-memory chips is trying to combine the processing features

and space requirements feature and several next generation memories are being

studied in this perspective. They include MRAM, FeRAM, Polymer Memory

Ovonic Unified Memory, ETOX-4BPC, NRAM etc. One or two of them will

become the mainstream.

3.2 FUNDAMENTAL IDEAS OF EMERGING

MEMORIES

The fundamental idea of all these technologies is the bistable nature possible for

of the selected material. FeRAM works on the basis of the bistable nature of the

centre atom of selected crystalline material. A voltage is applied upon the crystal,

which in turn polarizes the internal dipoles up or down. I.e. actually the difference

between these states is the difference in conductivity. Non –Linear FeRAM read

capacitor, i.e., the crystal unit placed in between two electrodes will remain in the

direction polarized (state) by the applied electric field until another field capable

of polarizing the crystal’s central atom to another state is applied.

In the case of Polymer memory data stored by changing the polarization

of the polymer between metal lines (electrodes). To activate this cell structure, a

voltage is applied between the top and bottom electrodes, modifying the organic

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material. Different voltage polarities are used to write and read the cells.

Application of an electric field to a cell lowers the polymer’s resistance, thus

increasing its ability to conduct current; the polymer maintains its state until a

field of opposite polarity is applied to raise its resistance back to its original level.

The different conductivity States represent bits of information.

In the case of NROM memory ONO stacks are used to store charges at

specific locations. This requires a charge pump for producing the charges required

for writing into the memory cell. Here charge is stored at the ON junctions.

Phase change memory also called Ovonic unified memory (OUM),

is based on rapid reversible phase change effect in materials under the influence of

electric current pulses. The OUM uses the reversible structural phase-change in

thin-film material (e.g., chalcogenide) as the data storage mechanism. The small

volume of active media acts as a programmable resistor between a high and low

resistance with > 40X dynamic range. Ones and zeros are represented by

crystalline versus amorphous phase states of active material. Phase states are

programmed by the application of a current pulse through a

MOSFET, which drives the memory cell into a high or low resistance state,

depending on current magnitude. Measuring resistance changes in the cell

performs the function of reading data. OUM cells can be programmed to

intermediate resistance values; e.g., for multistate data storage.

MRAMs are based on the magnetoresistive effects in magnetic materials

and structures that exhibit a resistance change when an external magnetic field is

applied. In the MRAM, data are stored by applying magnetic fields that cause

magnetic materials to be magnetized into one of two possible magnetic states.

Measuring resistance changes in the cell compared to a reference performs reading

data. Passing currents nearby or through the magnetic structure creates the

magnetic fields applied to each cell.

CHAPTER 4

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4.1 OVONIC UNIFIED MEMORY

Among the above-mentioned non-volatile Memories, Ovonic Unified

Memory is the most promising one. “Ovonic Unified Memory” is the registered

name for the non-volatile memory based on the material called chalcogenide.

The term “chalcogen” refers to the Group VI elements of the periodic

table. “Chalcogenide” refers to alloys containing at least one of these elements

such as the alloy of germanium, antimony, and tellurium discussed here. Energy

Conversion Devices, Inc. has used this particular alloy to develop a phase-change

memory technology used in commercially available rewriteable CD and DVD

disks. This phase change technology uses a thermally activated, rapid, reversible

change in the structure of the alloy to store data. Since the binary information is

represented by two different phases of the material it is inherently non-volatile,

requiring no energy to keep the material in either of its two stable structural states.

The two structural states of the chalcogenide alloy, as shown in Figure 1,

are an amorphous state and a polycrystalline state. Relative to the amorphous

state, the polycrystalline state shows a dramatic increase in free electron density,

similar to a metal. This difference in free electron density gives rise to a difference

in reflectivity and resistivity. In the case of the re-writeable CD and DVD disk

technology, a laser is used to heat the material to change states. Directing a low-

power laser at the material and detecting the difference in reflectivity between the

two phases read the state of the memory.

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FIGURE 1

Ovonyx, Inc., under license from Energy Conversion Devices, Inc., is

working with several commercial partners to develop a solid-state nonvolatile

memory technology using the chalcogenide phase change material. To implement

a memory the device is incorporated as a two terminal resistor element with

standard CMOS processing. Resistive heating is used to change the phase of the

chalcogenide material. Depending upon the temperature profile applied, the

material is either melted by taking it above the melting temperature (Tm) to form

the amorphous state, or crystallized by holding it at a lower temperature (Tx) for a

slightly longer period of time, as shown in Figure 2. The time needed to program

either state is = 400ns. Multiple resistance states between these two extremes have

been demonstrated, enabling multi-bit storage per memory cell. However, current

development activities are focused on single-bit applications. Once programmed,

the memory state of the cell is determined by reading its resistance.

Since the data in a chalcogenide memory element is stored as a structural

phase rather than an electrical charge or state, it is expected to be impervious to

ionizing radiation effects. This inherent radiation tolerance of the chalcogenide

material and demonstrated write speeds more than 1000 times faster than

commercially available nonvolatile memories make it attractive for space based

applications.

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FIGURE 2

A radiation hardened semiconductor technology incorporating

chalcogenide based memory elements will address both critical and enabling

space system needs, including standalone memory modules and embedded cores

for microprocessors and ASICs. Previously, BAE SYSTEMS and Ovonyx have

reported on the results of discrete memory elements fabricated in BAE

SYSTEMS’ Manassas, Virginia facility. These devices were manufactured using

standard semiconductor process equipment to sputter and etch the chalcogenide

material. While built in the same line used to fabricate radiation-hardened CMOS

products, these memory elements were not yet integrated with transistors. They

were discrete two-terminal programmable resistors, requiring approximately 0.6

mA to set the device into a low resistance state, and 1.3 mA to reset it to the high

resistance state. One billion (1E9) write cycles between these two states were

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demonstrated. Reading the state of the device is non-destructive and has no impact

on device wear out (unlimited read cycles).

4.2 OUM ATTRIBUTES

• Non volatile in nature

• High density ensures large storage of data within a small area

• Non destructive read:-ensures that the data is not corrupted during a read

cycle.

• Uses very low voltage and power from a single source.

• Write/erase cycles of 10e12 are demonstrated

• Poly crystalline

• This technology offers the potential of easy addition of non volatile memory to

a standard CMOS process.

• This is a highly scalable memory

• Low cost implementation is expected.

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4.3 OUM ARCHITECTURE

FIGURE 3 OUM ARCHITECTURE

A memory cell consists of a top electrode, a layer of the chalcogenide,

and a resistive heating element. The base of the heater is connected to a diode. As

with MRAM, reading the micrometer-sized cell is done by measuring its

resistance. But unlike MRAM the resistance change is very large-more than a

factor of 100. Thermal insulators are also attached to the memory structure in

order to avoid data lose due to destruction of material at high temperatures.

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To write data into the cell, the chalcogenide is heated past its melting point

and then rapidly cooled to make it amorphous. To make it crystalline, it is heated

to just below its melting point and held there for approximately 50ns, giving the

atoms time to position themselves in their crystal locations.

CHAPTER 5

5.1 BASIC DEVICE OPERATION

FIGURE 4 TEMPERATURE VS. TIME PLOT

The basic device operation can be explained from the temperature versus

time graph. During the amorphizing reset pulse, the temperature of the programmed

volume of phase change material exceeds the melting point which eliminates the poly

crystalline order in the material. When the reset pulse is terminated the device

quenches to freeze in the disordered structural state. The quench time is determined

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by the thermal environment of the device and the fall time of the pulse. The

crystallizing set pulse is of lower amplitude and of sufficient duration to maintain the

device temperature in the rapid crystallization range for a time sufficient for crystal

growth.

5.2 TECHNOLOGY AND PERFORMANCE

The figure below shows device resistance versus write pulse width. The reset

resistance saturates when the pulse width is long enough to achieve melting of the

phase change material. The set pulse adequately crystallizes the bit in 50 ns with a

RESET/SET resistance ratio of greater than 100.

FIGURE 5 RESISTANCE VS PULSE WIDTH PLOT

5.3 I-V CHARACTERISTICS

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FIGURE 6 I-V CHARECTERISTICS

The figure above shows I-V characteristics of the OUM device. At low voltages, the

device exhibits either a low resistance (~1k) or high resistance (>100k), depending on

its programmed state. This is the read region of operation. To program the device, a

pulse of sufficient voltage is applied to drive the device into a high conduction

“dynamic on state”. For a reset device, this requires a voltage greater than Vth.

Vth is the device design parameter and for current memory application is

chosen to be in the range of 0.5 to 0.9 V. to avoid read disturb, the device read region

as shown in the figure, is well below Vth and also below the reset regime.

The device is programmed while it is in the dynamic on state. The final programmed

state of the device is determined by the current amplitude and the pulse duration in

the dynamic on state. The reciprocal slope of the I-V curve in the dynamic on state is

the series device resistance.

5.4 R-I CHARACTERISTICS

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FIGURE 7 R-I CHARACTERISTICS

The above figure shows the device read resistance resulting from

application of the programming current pulse amplitude. Starting in the set condition,

moving from left to right, the device continues to remain in SET state as the

amplitude is increased. Further increase in the pulse amplitude begins to reset the

device with still further increase resetting the device to a standard amorphous

resistance. Beginning again with a device initially in the RESET state, low amplitude

pulses at voltages less than Vth do not set the device. Once Vth is surpassed, the

device switches to the dynamic on state and programmed resistance is dramatically

reduced as crystallization of the material is achieved. Further increase in

programming current further crystallizes the material, which drops the resistance to a

minimum value. As the programming pulse amplitude is increased further, resetting

again is exhibited as in the case above. Devices can be safely reset above the

saturation point for margin. Importantly, the right side of the curve exhibits direct

overwrite capability, where a particular resistance value can be obtained from a

programming pulse, irrespective of the prior state of the material. The slope of the

right side of the curve is the device design parameter and can be adjusted to enable a

multi- state memory cell.

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CHAPTER 6

6.1 INTEGRATION WITH CMOS

Under contract to the Space Vehicles Directorate of the Air Force Research

Laboratory (AFRL), BAE SYSTEMS and Ovonyx began the current program in

August of 2001 to integrate the chalcogenide-based memory element into a

radiation-hardened CMOS process. The initial goal of this effort was to develop the

processes necessary to connect the memory element to CMOS transistors and metal

wiring, without degrading the operation of either the memory elements or the

transistors. It also was desired to maximize the potential memory density of the

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technology by placing the memory element directly above the transistors and below

the first level of metal as shown in a simplified diagram in Figure.

FIGURE 8 INTEGRATION WITH CMOS

To accomplish this process integration task, it was necessary to design a

test chip with appropriate structures. This vehicle was called the Access Device

Test Chip (ADTC) since each memory cell requires an access device (transistor)

in addition to the chalcogenide memory element. Such a memory cell, comprised

of one access transistor and one chalcogenide resistor, is herein referred to as a

1T1R cell. The ADTC included 272 macros, each with 2 columns of 10 probe

pads. Of these, 163 macros were borrowed from existing BAE SYSTEMS’ test

structures and used to verify normal transistor operation. There were 109 new

macros designed to address the memory element features. These included sheet

resistance and contact resistance measurement structures, discrete memory

elements of various sizes and configurations, and two 16-bit 1T1R memory arrays.

Short loop (partial flow) experiments were processed using subsets of

the full ADTC mask set. These experiments were used to optimize the process

steps used to connect the bottom electrode of the memory element to underlying

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tungsten studs and to connect an additional tungsten stud level between Metal 1

and the top electrode of the memory element. A full flow experiment was then

processed to demonstrate integrated transistors and memory elements.

FIGURE 8 VI CHARACTERISTICS

Figure shows the I-V characteristic for a 1T1R memory cell successfully

fabricated using the ADTC vehicle. The voltage is applied to one of the two

terminals of the chalcogenide resistor, and the access transistor (biased on) is

between the other resistor terminal and ground. The high resistance amorphous

material shows very little current below a threshold voltage (VT) of 1.2V. In this

same region the low resistance polycrystalline material shows a significantly

higher current. The state of the memory cell is read using the difference in I-V

characteristics below VT. Above VT, both materials display identical I-V

characteristics, with a dynamic resistance (RDYNAMIC) of ˜1k. In itself, this

transition to a low resistance electrical state does not change the structural phase

of the material. However, it does allow for heating of the material to program it to

the low resistance state (1) or the high resistance state (0). Extrapolation of the

portion of the I-V curve that is above VT to the X-axis yields a point referred to as

a holding voltage (VH). The applied voltage must be reduced below VH to exit

the programming mode.

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FIGURE 9 RESISTANCE VS CURRENT PLOT

Figure shows the operation of a 1T1R memory, again with the access transistor

biased on. The plotted resistance values were measured below VT, while the

current used to program these resistances were measured above VT. Similar to the

previously demonstrated stand-alone memory elements, these devices require

approximately 0.6 mA to set to the low resistance state (RSET) and 1.2 mA to reset

to the high resistance state (RRESET). The circuit was verified to be electrically open

with the access transistor biased off.

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FIGURE 10 DRAIN CURRENT VS GATE VOLTAGE PLOT

Figure 6 shows the total dose (X-ray) response of N-channel transistors processed

through the chalcogenide memory flow. The small threshold voltage shift is

typical of BAE SYSTEMS’ standard radiation-hardened transistor processing. All

other measured parameters (drive current, threshold voltage, electrical channel

length, contact resistance, etc.) were also typical of product manufactured without

the memory element.

6.2 CIRCUIT DEMONSTRATION

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In order to test the behavior of chalcogenide cells as circuit elements, the

Chalcogenide Technology Characterization Vehicle (CTCV) was developed. The

CTCV contains a variety of memory arrays with different architecture, circuit, and

layout variations. Key goals in the design of the CTCV were: 1) to make the read

and write circuits robust with respect to potential variations in cell electrical

characteristics; 2) to test the effect of the memory cell layout on performance; and

3) to maximize the amount of useful data obtained that could later be used for

product design. The CTCV was sub-divided into four chiplets, each containing

variations of 1T1R cell memory arrays and various standalone sub circuits.

Standalone copies of the array sub circuits were included in each chiplet for

process monitoring and read/write current experiments.

FIGURE 11 CHIPSET

A diagram of one of the chiplets is shown in Figure 11. The arrays all

contain 64k 1T1R cells, arranged as 256 rows by 256 columns. This is large enough

to make meaningful analyses of parasitic capacitance effects, while still permitting

four variations of the array to be placed on each chiplet. The primary differences

between arrays consist of the type of sense amp (single-ended or differential) and

variations in the location and number of contacts in the memory cell.

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The data in the single-ended arrays is formatted as 4096 16-bit words

(64k bits), and in the differential arrays as 4096 8-bit words (32k bits). The 256

columns are divided into 16 groups of 16. One sense amplifier services each group,

and the 16 columns in each group are selected one at a time based on the four most

significant address bits. In simulations, stray capacitance was predicted to cause

excessive read settling time when more than 16 columns were connected to a sense

amp. Each column has its own write current river, which also performs the column

select function for write operations.

The single-ended sense amplifier reads the current drawn by a single cell

when a voltage is applied to it. The differential amplifier measures the currents in

two selected cells that have previously been written with complementary data, and

senses the difference in current between them. This cuts the available memory size

in half, but increases noise margin and sensitivity. In both the single-ended and

differential sense amplifiers, a voltage limiting circuit prevents the chalcogenide

element voltage from exceeding VT, so that the cell is not inadvertently re-

programmed.

On one chiplet, there are two arrays designed without sense amplifiers.

Instead, the selected column outputs are routed directly to the 16 I/O pins where

the data outputs would normally be connected. This enables direct analog

measurements to be made on a selected cell. A third array on this chiplet has both

the column select switches and the sense amplifiers deleted. Eight of the 256

columns are brought out to I/O pins. This enables further analog measurements to

be made, without an intervening column select transistor.

“Conservative” and “aggressive” layout versions of the chalcogenide

cell were made. The conservative cell is larger, and has four contacts to bring

current through to the bottom and top electrodes of the memory cell. The

aggressive cell contains only two contacts per electrode, reducing its size. The

pitch of the larger cell was used to establish row and column spacing in all arrays.

The aggressive cell could thus be easily substituted for the conservative cell. Short

wires were added to the smaller cell to map its connection points to those of the

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larger. This permitted testing both cells in one array layout without requiring

significant additional layout labor.

A final variation in the cell design involved contact spacing. The

contacts on the bottom electrode were moved to be either closer to or farther away

from the chalcogenide "pore." This allows assessment of the effect of contact

spacing on the thermal and electrical characteristics of the chalcogenide pore.

Process monitoring structures were included on each chiplet to aid in

calibration of memory array test data. These consist of a standalone replica of

each of the Write and Read (single-ended) circuits, a CMOS inverter, and a 1T1R

cell. The outputs of each of these circuits were brought out to permit measurement

of currents versus bias voltages.

Pins were provided on the CTCV for external bias voltage inputs to vary

the read and write current levels. The standalone copies of the read/write circuits

are provided with all key nodes brought out to pins. These replica circuits permit

the read and write currents to be programmed by varying the bias voltages. This

allows more in-depth characterization to be performed in advance of designing a

product. In an actual product, on-chip reference circuits would generate bias

voltages. In the write circuit, a PFET driver is connected to each column, and is

normally turned off by setting its gate bias to VDD. When a write is to occur, the

selected driver’s gate is switched to one of two external bias voltages for the

required write pulse time. The bias voltages can be calibrated to set the write drive

currents to the levels needed to reliably write a one or a zero. The data inputs

determine which bias voltage is applied to each write driver.

For the read circuit, several cell resistance-sensing schemes were

investigated during CTCV development. The adopted scheme applies a controlled

voltage to the cell to be read, and the resulting current is measured. Care is taken

not to exceed VT during a read cycle. The sense amplifier reflects the read current

into a programmable NFET load, thus generating a high (1) or low (0) output. The

gate bias of all sense amplifier loads can be varied in parallel to change the current

level at which the output voltage switches. The bias levels are calibrated via a

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standalone copy of the read circuit that has all key nodes brought out to pins. The

NFET load's output is buffered by a string of CMOS inverters to provide full

CMOS logic voltage swing, and then routed to the correct data output I/O pad

driver.

When a read circuit supplies a current to a selected cell, the cell's

corresponding column charges up toward the steady state read voltage. The

column voltage waveform is affected by the programmed resistance and internal

capacitances of each of the cells in the column, and thus is pattern dependent. The

combined charge from all of the column's cells during this charging process may

travel into the sense amplifier input, momentarily causing it to experience a

transient, which could prevent the accessed cells’ data from being read correctly.

To minimize this effect, each column is discharged after a write, and recharged

before a read.

Transistor parametric and discrete memory element test structures were

tested on the CTCV lot at the wafer level. These tests served two purposes. The

first goal was to confirm that the extra processing steps involved in inserting the

chalcogenide flow had no effect on the base CMOS technology. No statistical

differences in transistor parametric values were noted between these wafers and

standard 0.5µm RHCMOS product.

The second goal of wafer test was to measure the set, reset and dynamic

programming resistances (RSET, RRESET and RDYNAMIC), threshold and holding

voltages (VT and VH), and required programming currents (ISET and IRESET) of

stand-alone, two terminal chalcogenide memory elements. These values were used

to set the operating points of the write driver circuits and the bias point of the

sense amp.

To allow debug of the CTCV module test setup in parallel with the wafer

test effort, one wafer was selected and diced to remove the CTCV die. Five die of

one of the four chiplets, (chip 1) were sent ahead through the packaging process.

Chip 1 has four different array configurations, two 64 kbit, single ended sense

amp arrays and two 32 kbit, differential sense amp arrays. Two of the arrays were

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constructed with the conservative cell layout and two with the aggressive cell

layout. Functional test patterns used on these send-ahead devices included all

zeros, all ones, checkerboard and checkerboard bar. The results of this testing

showed that all circuit functional blocks (control circuits, addressing, data I/O,

write 0/1, and sense amp) performed as designed. All four of the array

configurations present on the chip showed functional memory elements, i.e.,

memory cells could be programmed to zero or one and subsequently read out. As

more packaged parts become available, more exhaustive test patterns will be

employed for full characterization.

The five send-ahead devices were also used for determining the optimum

bias points of the three externally adjustable parameters: write 0 drive current,

write 1 drive current, and the sense amp switching point. An Integrated

Measurements Systems XTS-Blazer tester was used to provide stimulus and

measure response curves. A wide range of load conditions was chosen based on

the measurements performed at wafer test.

A family of drive current vs. bias voltage curves was constructed for

both on-chip programming drive circuits across various values of RDYNAMIC. These

curves validate design simulations and demonstrate adequate operating range of

each of the circuits.

Likewise, a family of switching point curves was generated at various

RSET and RRESET values using the standalone sense amp built onto each die. These

curves were used to determine the optimal sense amp DC bias point for the test

chips and demonstrated the ability of the sense amp to distinguish the 0 and 1 state

within the range of chalcogenide resistance values measured at wafer test.

CHAPTER 7

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ADVANTAGES

• OUM uses a reversible structural phase change.

• Small active storage medium.

• Simple manufacturing process.

• Simple planar device structure.

• Low voltage single supply.

• Reduced assembly and test costs.

• Highly scalable- performance improves with scaling.

• Multistates are demonstrated.

• High temperature resistance.

• Easy integration with CMOS.

• It makes no effect on measured CMOS transistor parametric.

• Total dose response of the base technology is not affected.

CHAPTER 8

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8.1 ABOUT CHALCOGENIDE ALLOY

Chalcogenide or phase change alloys is a ternary system of Gallium, Antimony and

Tellurium. Chemically it is Ge2Sb2Te5.

FIGURE 12 TERNARY SYSTEM

Production Process: Powders for the phase change targets are produced by

state-of –the art alloying through melting of the raw material and subsequent milling.

This achieves the defined particle size distribution. Then powders are processed to

discs through Hot Isotactic Pressing

8.2 COMPARISON OF AMORPHOUS AND CRYSALLINE STATE

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Amorphous Crystalline

Short range atomic order Long range atomic orderLow free electron density High free electron densityHigh activation energy Low activation energyHigh resistivity Low resistivity

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CONCLUSION

Unlike conventional flash memory Ovonic unified memory can be

randomly addressed. OUM cell can be written 10 trillion times when compared

with conventional flash memory. The computers using OUM would not be

subjected to critical data loss when the system hangs up or when power is abruptly

lost as are present day computers using DRAM a/o SRAM. OUM requires fewer

steps in an IC manufacturing process resulting in reduced cycle times, fewer

defects, and greater manufacturing flexibility. These properties essentially make

OUM an ideal commercial memory. Current commercial technologies do not

satisfy the density, radiation tolerance, or endurance requirements for space

applications. OUM technology offers great potential for low power operation and

radiation tolerance, which assures its compatibility in space applications. OUM

has direct applications in all products presently using solid state memory,

including computers, cell phones, graphics-3D rendering, GPS, video

conferencing, multi-media, Internet networking and interfacing, digital TV,

telecom, PDA, digital voice recorders, modems, DVD, networking (ATM),

Ethernet, and pagers. OUM offers a way to realize full system-on-a-chip

capability through integrating unified memory, linear, and logic on the same

silicon chip.

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REFERENCE

1. www.intel.com

2. www.ovonyx.com

3. http://en.wikipedia.org/wiki/Ovonic_Unified_Memory

4. http://ovonyx.com/technology/technical-presentation.html

5. http://www.interfacebus.com/ovonics-unified-memory-oum-

ics.html

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