13
CapaciTorr ® Pumps MK5 Series we support your innovation
Lainate, Italy - Avezzano, Italy - Bologna, Italy - Weil am Rhein, Germany - Nanjing, P.R. of China - Shanghai, P.R. of China -
Tokyo, Japan - Seoul, Korea - Jhubei City, Taiwan - Colorado Springs CO, USA - San Luis Obispo CA, USA - Watsonville CA,
USA - New Hartford NY, USA - Bethel CT, USA - Menlo Park CA, USA
The SAES Getters Group manufacturing companies are ISO9001 certified, the Asian and Italian companies are
ISO14001certified also. Full information about certifications for each company of the Group is available on the corporate
website at: www.saesgetters.com
© 2012 SAES Getters. Printed in Italy. All rights reserved. SAES® is a registered trademark of SAES Getters S.p.A., its subsidiaries and affiliates.SAES Getters reserves the right to change or modify product specifications at any time without notice.
SAES Getters S.p.A., Capital Stock Euro 12,220,000 f.p., Executive Office: Viale Italia, 77 - 20020 Lainate (Milan), ItalyRegistered with the Milan Court CompaniesRegister no. 00774910152
CapaciTorr® Pumps MK5 Series
SAES Getters Group
Cartridge
CapaciTorr cartridges are based on getter material St 172, which is configured in the form ofsintered porous disks. These sintered porous disks are arranged in the cartridge structure ina way to optimize speed and capacity performance. The C400-2 DSK cartridge also includes,in its structure, the pump heating element.
Pump BodyThe optional pump body is a simple double flanged nipple. If desired, the pump can bemounted nude inside the vacuum system to fully exploit its pumping speed. The pumpbody is leak tested to 1.5 x 10-10 scm3/s.
HeaterThe heater of CapaciTorr D2000, D1000, D200, D100 and D50 pumps consists of atantalum wire inside an alumina insulator. This heater assembly also includes the cartridgeand securing components, and additionally the thermocouple in the CapaciTorr D1000 andD2000 models. The heater of the CapaciTorr D400-2 pump consists of a tungsten wireinserted in a ceramic tabulation. This heater is part of the pump cartridge structure.
ThermocoupleThe thermocouple is a K-type electrically insulated within an alumina tube. Thethermocouple is available for the CapaciTorr D2000 and D1000 models.
FlangeThe support flange is a standard CF type. The pumps flange is leaked tested to 1.5 x10-10 scm3/s.
Electrical ConnectorThe special connector allows the connection of the pump to the power supply and controlunit. The connector is bakeable up to 400 °C.
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CapaciTorr Pumps MK5 Series_Layout 1 25/05/2012 15.03 Pagina 2
. CapaciTorr® Pumps – MK5 Series
SAES® Getters, the world leader in Gettering Technology, presents the CapaciTorr® NonEvaporable Getter (NEG) pumps family.These pumps are based on high porosity sintered materials for maximum performances(speed and capacity) and best mechanical characteristics.The series includes a new flange design which makes the overall pump assembly moresimple and compact, with foot print and reliability advantages over the previous series.CapaciTorr pumps find wide use in a variety of applications, alone or in combination withtraditional UHV pumps. They are particularly suitable to boost the vacuum performances ofgeneral purpose vacuum systems, thanks to their high pumping speed for hydrogen and otheractive gases.The special getter material configurations which consist of high porosity getter elements,provide improved performance over traditional NEG pumps, and in particular provide a highercapacity resulting in a longer life and in a greater available number of venting-reactivationcycles.The getter material used in the CapaciTorr pumps is St 172, a sintered material based on thewell known St 707 getter alloy.St 172 based CapaciTorr pumps are ideal for best performance in terms of speed, and theyare particularly well suited for high gas load application where it is necessary to increase thepump operating temperature to boost the material sorption capacity.Typical applications are in the field of particle accelerators, synchrotron radiation sources andrelated equipment, surface analysis systems and other R&D vacuum systems.In addition, CapaciTorr pumps are finding application in semiconductor manufacturingequipment as process pumps in processes such as sputtering, where they can takeadvantages of the fact that NEG materials do not pump noble gases. In these applications,often requiring high duty cycles from the vacuum pumps, CapaciTorr pumps can take profit oftheir capability to withstand multiple air exposures without excessive degradation of theirsorption performances.
CapaciTorr® Pumps
MK5 Series
General Features
£ High pumping speed for all active gases
£ High sorption capacity and increased lifetime
£ Constant pumping speed in HV and UHVpressure region
£ No low pressure limitation (down to 10-12 Torrregion)
£ Reversible pumping of hydrogen and itsisotopes
£ Possibility of operation at room temperatureafter activation, without power
£ Operation in the presence of high magneticfields
£ Oil free and vibration free in ultra high vacuum
£ Low weight
Applications
£ Improving ultimate vacuum in combination withion, diffusion, cryogenetic or turbomolecularpumps
£ Surface analysis systems
£ Particle accelerators, synchrotron radiationsources and related equipment
£ Process pumps for vacuum depositionchambers
£ Process pumps for vacuum devices
£ Portable vacuum instrumentation
£ Pumping, storing and releasing hydrogen isotopes
£ Plasma machines
£ Hydrogen traps
£ Impurities removal in rare gas filled devices
HIGHLIGHTS
Cartridge
Pump Body
Heater
Thermocouple
Flange
Electrical Connector
CapaciTorr Pumps MK5 Series_Layout 1 25/05/2012 15.02 Pagina 1
. CapaciTorr® Pumps – MK5 Series
SAES® Getters, the world leader in Gettering Technology, presents the CapaciTorr® NonEvaporable Getter (NEG) pumps family.These pumps are based on high porosity sintered materials for maximum performances(speed and capacity) and best mechanical characteristics.The series includes a new flange design which makes the overall pump assembly moresimple and compact, with foot print and reliability advantages over the previous series.CapaciTorr pumps find wide use in a variety of applications, alone or in combination withtraditional UHV pumps. They are particularly suitable to boost the vacuum performances ofgeneral purpose vacuum systems, thanks to their high pumping speed for hydrogen and otheractive gases.The special getter material configurations which consist of high porosity getter elements,provide improved performance over traditional NEG pumps, and in particular provide a highercapacity resulting in a longer life and in a greater available number of venting-reactivationcycles.The getter material used in the CapaciTorr pumps is St 172, a sintered material based on thewell known St 707 getter alloy.St 172 based CapaciTorr pumps are ideal for best performance in terms of speed, and theyare particularly well suited for high gas load application where it is necessary to increase thepump operating temperature to boost the material sorption capacity.Typical applications are in the field of particle accelerators, synchrotron radiation sources andrelated equipment, surface analysis systems and other R&D vacuum systems.In addition, CapaciTorr pumps are finding application in semiconductor manufacturingequipment as process pumps in processes such as sputtering, where they can takeadvantages of the fact that NEG materials do not pump noble gases. In these applications,often requiring high duty cycles from the vacuum pumps, CapaciTorr pumps can take profit oftheir capability to withstand multiple air exposures without excessive degradation of theirsorption performances.
CapaciTorr® Pumps
MK5 Series
General Features
£ High pumping speed for all active gases
£ High sorption capacity and increased lifetime
£ Constant pumping speed in HV and UHVpressure region
£ No low pressure limitation (down to 10-12 Torrregion)
£ Reversible pumping of hydrogen and itsisotopes
£ Possibility of operation at room temperatureafter activation, without power
£ Operation in the presence of high magneticfields
£ Oil free and vibration free in ultra high vacuum
£ Low weight
Applications
£ Improving ultimate vacuum in combination withion, diffusion, cryogenetic or turbomolecularpumps
£ Surface analysis systems
£ Particle accelerators, synchrotron radiationsources and related equipment
£ Process pumps for vacuum depositionchambers
£ Process pumps for vacuum devices
£ Portable vacuum instrumentation
£ Pumping, storing and releasing hydrogen isotopes
£ Plasma machines
£ Hydrogen traps
£ Impurities removal in rare gas filled devices
HIGHLIGHTS
Cartridge
Pump Body
Heater
Thermocouple
Flange
Electrical Connector
CapaciTorr Pumps MK5 Series_Layout 1 25/05/2012 15.02 Pagina 1
Lainate, Italy - Avezzano, Italy - Bologna, Italy - Weil am Rhein, Germany - Nanjing, P.R. of China - Shanghai, P.R. of China -
Tokyo, Japan - Seoul, Korea - Jhubei City, Taiwan - Colorado Springs CO, USA - San Luis Obispo CA, USA - Watsonville CA,
USA - New Hartford NY, USA - Bethel CT, USA - Menlo Park CA, USA
The SAES Getters Group manufacturing companies are ISO9001 certified, the Asian and Italian companies are
ISO14001certified also. Full information about certifications for each company of the Group is available on the corporate
website at: www.saesgetters.com
© 2012 SAES Getters. Printed in Italy. All rights reserved. SAES® is a registered trademark of SAES Getters S.p.A., its subsidiaries and affiliates.SAES Getters reserves the right to change or modify product specifications at any time without notice.
SAES Getters S.p.A., Capital Stock Euro 12,220,000 f.p., Executive Office: Viale Italia, 77 - 20020 Lainate (Milan), ItalyRegistered with the Milan Court CompaniesRegister no. 00774910152
CapaciTorr® Pumps MK5 Series
SAES Getters Group
Cartridge
CapaciTorr cartridges are based on getter material St 172, which is configured in the form ofsintered porous disks. These sintered porous disks are arranged in the cartridge structure ina way to optimize speed and capacity performance. The C400-2 DSK cartridge also includes,in its structure, the pump heating element.
Pump BodyThe optional pump body is a simple double flanged nipple. If desired, the pump can bemounted nude inside the vacuum system to fully exploit its pumping speed. The pumpbody is leak tested to 1.5 x 10-10 scm3/s.
HeaterThe heater of CapaciTorr D2000, D1000, D200, D100 and D50 pumps consists of atantalum wire inside an alumina insulator. This heater assembly also includes the cartridgeand securing components, and additionally the thermocouple in the CapaciTorr D1000 andD2000 models. The heater of the CapaciTorr D400-2 pump consists of a tungsten wireinserted in a ceramic tabulation. This heater is part of the pump cartridge structure.
ThermocoupleThe thermocouple is a K-type electrically insulated within an alumina tube. Thethermocouple is available for the CapaciTorr D2000 and D1000 models.
FlangeThe support flange is a standard CF type. The pumps flange is leaked tested to 1.5 x10-10 scm3/s.
Electrical ConnectorThe special connector allows the connection of the pump to the power supply and controlunit. The connector is bakeable up to 400 °C.
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CapaciTorr Pumps MK5 Series_Layout 1 25/05/2012 15.03 Pagina 2
Lainate, Italy - Avezzano, Italy - Bologna, Italy - Weil am Rhein, Germany - Nanjing, P.R. of China - Shanghai, P.R. of China -
Tokyo, Japan - Seoul, Korea - Jhubei City, Taiwan - Colorado Springs CO, USA - San Luis Obispo CA, USA - Watsonville CA,
USA - New Hartford NY, USA - Bethel CT, USA - Menlo Park CA, USA
The SAES Getters Group manufacturing companies are ISO9001 certified, the Asian and Italian companies are
ISO14001certified also. Full information about certifications for each company of the Group is available on the corporate
website at: www.saesgetters.com
© 2012 SAES Getters. Printed in Italy. All rights reserved. SAES® is a registered trademark of SAES Getters S.p.A., its subsidiaries and affiliates.SAES Getters reserves the right to change or modify product specifications at any time without notice.
SAES Getters S.p.A., Capital Stock Euro 12,220,000 f.p., Executive Office: Viale Italia, 77 - 20020 Lainate (Milan), ItalyRegistered with the Milan Court CompaniesRegister no. 00774910152
CapaciTorr® Pumps MK5 Series
SAES Getters Group
Cartridge
CapaciTorr cartridges are based on getter material St 172, which is configured in the form ofsintered porous disks. These sintered porous disks are arranged in the cartridge structure ina way to optimize speed and capacity performance. The C400-2 DSK cartridge also includes,in its structure, the pump heating element.
Pump BodyThe optional pump body is a simple double flanged nipple. If desired, the pump can bemounted nude inside the vacuum system to fully exploit its pumping speed. The pumpbody is leak tested to 1.5 x 10-10 scm3/s.
HeaterThe heater of CapaciTorr D2000, D1000, D200, D100 and D50 pumps consists of atantalum wire inside an alumina insulator. This heater assembly also includes the cartridgeand securing components, and additionally the thermocouple in the CapaciTorr D1000 andD2000 models. The heater of the CapaciTorr D400-2 pump consists of a tungsten wireinserted in a ceramic tabulation. This heater is part of the pump cartridge structure.
ThermocoupleThe thermocouple is a K-type electrically insulated within an alumina tube. Thethermocouple is available for the CapaciTorr D2000 and D1000 models.
FlangeThe support flange is a standard CF type. The pumps flange is leaked tested to 1.5 x10-10 scm3/s.
Electrical ConnectorThe special connector allows the connection of the pump to the power supply and controlunit. The connector is bakeable up to 400 °C.
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CapaciTorr Pumps MK5 Series_Layout 1 25/05/2012 15.03 Pagina 2
CapaciTorr®
D 50, D 100,D 200
General Features
£ High pumping speed for all activegases
£ High sorption capacity and increasedlifetime
£ Costant pumping speed in HV, UHVand XHV
£ Reversible pumping of hydrogen andits isotopes
£ Possibility of operation at roomtemperature after activation, withoutpower
£ Operation in the presence of highmagnetic fields
£ Oil free and vibration free in ultrahigh vacuum
£ Low weight
Applications
£ Improving ultimate vacuum incombination with ion, diffusion,cryogenetic or turbomolecular pumps
£ Surface analysis systems
£ Particle accelerators, synchrotronradiation sources and relatedequipment
£ Process pumps for vacuum devicesand deposition chambers
£ Portable vacuum instrumentation
£ Pumping, storing and releasinghydrogen isotopes
£ Impurities removal in rare gas filled devices
The CapaciTorr® D 50, D 100 and D 200 are three miniature pumps that complement theCapaciTorr family line providing large performance in an extremely compact volume. In spite of their minimal chamber intrusion (less than 100, 200 and 300 cc respectively) andsmall weight (~300 - 400 g) they feature impressive pumping speed for H2 and the otheractive gases present in UHV or XHV systems like H2O, O2, CO2, CO and N2. This result is achieved through the adoption of a novel special pump design and the use ofthe high performance SAES® St 172 sintered porous getter disks.All pumps come on a standard CF 35 flange and have a built-in heater that directlyconnects to the flange power feed-through (bakeable up to 400 °C). A suitable connectorprovides an easy and fast connection to the pump power supply for the activationpurposes. Only minimal power consumption (30, 45 and 60 W for ~1 hour, respectively) is requiredduring the activation. No power is necessary during normal UHV-XHV operation at roomtemperature. Like other NEG (Non Evaporable Getter) pumps they are vibration free andcan operate in presence of high magnetic fields.These pumps are therefore the perfect choice in applications where space and weightconstraints, absence of vibration and minimal electromagnetic interference must becoupled to excellent pumping performances and UHV - XHV standards.
HIGHLIGHTS
w e s u p p o r t y o u r i n n o v a t i o n
Ordering InformationProduct Product description CodeCapaciTorr D 50 Pump CapaciTorr D 50 5H0166CapaciTorr D 100 Pump CapaciTorr D 100 5H0163CapaciTorr D 200 Pump CapaciTorr D 200 5H0168
Power Supply and CablesProduct Product description Code
D 50 Power Supply CapaciTorr CF 35 D 50 Power Supply 3B0384D 100 Power Supply CapaciTorr CF 35 D 100 Power Supply 3B0385D 200 Power Supply CapaciTorr CF 35 D 200 Power Supply 3B0402
Output Cable Cable supply output CF35 D50/D100/D200 3MT 3B0386Input Cable Cable Mains input CF35 3MT 3B0338
Dimensions in mm
Capacitorr Pumps Scheda D50_100_200_Layout 1 25/05/2012 13.50 Pagina 1
CapaciTorr®
D 50, D 100, D 200
The SAES Getters Groupmanufacturing companies areISO9001 certified, the Asianand Italian companies are alsoISO14001 certified. Fullinformation about ourcertifications for eachcompany of the Group isavailable on our website at:www.saesgetters.com
SAES Getters Group
www.saesgetters.com
© 2012 SAES Getters. Printed in Italy. All rights reserved. SAES® is a registeredtrademark of SAES Getters S.p.A., its subsidiaries and affiliates.
SAES Getters reserves the right to change or modify product specifications at any time without notice.
D.VS.110.1
Typical Pump Characteristics CapaciTorr D 50
CapaciTorr D 100
CapaciTorr D 200
Alloy Type St 172 St 172 St 172
Alloy Composition ZrVFe ZrVFe ZrVFe
Getter Mass (g) 7.8 13.5 28
Getter Surface (cm2) 66 114 238
Pumping Speed (l/s)H2 55 100 200
CO 30 60 140
Sorption Capacity (Torrll)
H2 78 135 280
CO at 25 °C 0.1 0.2 0.56
CO total 70 120 252
Note: Pumping speed data refer to the initial values of the pump. CO capacity based on speed below 8 l/s (D 50) and10 l/s (D 100 and D 200) in nudeconfiguration.
Note:The voltage and current vs temperature data, displayed in the graph, have been achievedin nude configuration (NEG Cartridge completely immersed in the chamber).
0,1
1
10
100
1000
0,0001 0,001 0,01 0,1 1
CapaciTorr®D50, D100 and D200
sorption test (according to ASTM F798-97)
Sorbed Quantity (Torr · l )
Pu
mp
ing
Sp
ee
d (
l/s)
CapaciTorr D50 CapaciTorr D100 CapaciTorr D200
Sorption Temperature: 25°C
Activation:60' @ 7.5 V - 30W (D50)
9 V - 45 W (D100)
12 V - 60W (D200)
Sorption pressure: 3E-6 Torr
CO
H2
0
2
4
6
8
10
12
14
16
0
2
4
6
8
10
12
0 100 200 300 400 500 600 700
CapaciTorr D100
CapaciTorr D200
CapaciTorr D50
Heating parameters
Vo
lta
ge
(V
)
Temperature (°C)
Current (A)Voltage (V)
Cu
rre
nt
(A)
Capacitorr Pumps Scheda D50_100_200_Layout 1 25/05/2012 13.50 Pagina 2
CapaciTorr®
D 400-2
General Features
£ High pumping speed for all activegases
£ High sorption capacity and increasedlifetime
£ Costant pumping speed in HV, UHVand XHV
£ Reversible pumping of hydrogen andits isotopes
£ Possibility of operation at roomtemperature after activation, withoutpower
£ Operation in the presence of highmagnetic fields
£ Oil free and vibration free in ultrahigh vacuum
£ Low weight
Applications
£ Improving ultimate vacuum incombination with ion, diffusion,cryogenetic or turbomolecular pumps
£ Surface analysis systems
£ Particle accelerators, synchrotronradiation sources and relatedequipment
£ Process pumps for vacuum devicesand deposition chambers
£ Portable vacuum instrumentation
£ Pumping, storing and releasinghydrogen isotopes
£ Impurities removal in rare gas filled devices
The CapaciTorr® D 400-2 pump uses the high performing St 172 (Zr-V-Fe) material in theform of disks to achieve high pumping performances in a very compact configuration. It isideal when maximum pumping speed is needed in a small package. The getter cartridgehas a built-in heater that directly connects to the flange power feedthrough. A bakeableconnector provides an easy and fast connection to the pump power supply for activationpurposes. The CapaciTorr D 400-2 pump offers its best performances when mounteddirectly in the vacuum system using the standard CF 35 flange. Alternatively the pump canbe mounted as an appendage using a custom-made pump body. The pumping speedcurves related to different mounting positions and the activation curves are shown in thefollowing page.
HIGHLIGHTS
w e s u p p o r t y o u r i n n o v a t i o n
Ordering Information
Product Product description Code
Base flange with Connector CapaciTorr CF 35 4H0402Base flange with Connector and Body CapaciTorr CF 35 J 4H0423
St 172 Cartridge with built-in Heater C 400-2 DSK 4H0419
Pump Body Body CapaciTorr CF 35 4H0401
Power supply and cablesProduct Product description CodeNEG Power Supply CapaciTorr CF 35 D 400/B 200 Power Supply 3B0389Input Cable Cable Mains Input CF 35 3Mt 3B0338Output Cable Cable Supply Output CF35 D 400/B 200 3Mt 3B0390
Dimensions in mm
Capacitorr Pumps Scheda D400_2_Layout 1 29/05/2012 11.35 Pagina 1
CapaciTorr®
D 400-2
The SAES Getters Groupmanufacturing companies areISO9001 certified, the Asianand Italian companies areISO14001certified also. Fullinformation about ourcertifications for eachcompany of the Group isavailable on our website at:www.saesgetters.com
SAES Getters Group
www.saesgetters.com
[email protected]© 2012 SAES Getters. Printed in Italy. All rights reserved. SAES® is a registeredtrademark of SAES Getters S.p.A., its subsidiaries and affiliates.
SAES Getters reserves the right to change or modify product specifications at any time without notice.
D.VS.111.2
Typical Pump Characteristics CapaciTorr D 400-2Alloy Type St 172Alloy Composition ZrVFeGetter Mass (g) 45Getter Surface (cm2) 380
Pumping Speed (l/s)H2 400CO 180
Sorption Capacity (Torrll)
H2 450CO at 25 °C 0.9CO total 400
Note: Pumping speed data refer to the initial values of the pump without the pump body.CO capacity based on speed below 20 l/s in nude configuration.
Note: The voltage and current vs temperature data, displayed in the graph, have been achievedin nude configuration (NEG Cartridge completely immersed in the chamber).
1
2
3
4
5
6
0
2
4
6
8
10
12
14
16
18
20
50 150 250 350 450 550
Heating parameters
Vo
lta
ge
(V
)
Cu
rre
nt
(A)
Temperature (°C)Current (A)Voltage (V)
1
10
100
1000
0 ,001 0 ,01 0 ,1 1 10
CapaciTorr® D400-2sorption test (according to ASTM F798-97)
Sorbed Quantity (Torr · l )
Pu
mp
ing
Sp
ee
d (
l/s
)
Sorption Temperature: 25°C
Activation:60' @ 15.75 V (85 W)
Sorption pressure: 3E-6 Torr
CO
H2
N2
with bodynude
Capacitorr Pumps Scheda D400_2_Layout 1 29/05/2012 11.35 Pagina 2
General Features
£ High pumping speed for all activegases
£ High sorption capacity and increasedlifetime
£ Costant pumping speed in HV, UHVand XHV
£ Reversible pumping of hydrogen andits isotopes
£ Possibility of operation at roomtemperature after activation, withoutpower
£ Operation in the presence of highmagnetic fields
£ Oil free and vibration free in ultrahigh vacuum
£ Low weight
Applications
£ Improving ultimate vacuum incombination with ion, diffusion,cryogenetic or turbomolecular pumps
£ Surface analysis systems
£ Particle accelerators, synchrotronradiation sources and relatedequipment
£ Process pumps for vacuum devicesand deposition chambers
£ Portable vacuum instrumentation
£ Pumping, storing and releasinghydrogen isotopes
£ Impurities removal in rare gas filled devices
The CapaciTorr® D 1000 pump uses highly porous St 172 sintered getter disks (Zr-V-Fealloy). The pump is able to reach 1000 l/s pumping speed for hydrogen in UHV conditions.The St 172 getter cartridge is mounted on a heater structure using a single heater element,and it is available on CF63 and CF100 flanges. The flanges (AISI 316 LN) are convenientlysupplied with a custom made bakeable electrical connector which combines power andthermocouple pins, for best integration and minimum footprint. St 172 material offerssuperior gas diffusivity characteristics and allows operation at room or intermediatetemperatures (200 °C) to increase the sorption capacity in presence of high gas loads. Thepump sorption speed is at its maximum when the pump is mounted directly in the vacuumsystem without a body. The pumping speed curves related to different mounting positionsand the activation curves are shown in the enclosed graphs.
HIGHLIGHTS
w e s u p p o r t y o u r i n n o v a t i o n
Ordering InformationProduct Product description CodeSt 172 Cartridge with built-in Heater CapaciTorr D 1000 4H0468CF63 base flange with Connector CapaciTorr base flange CF63 4H0467CF100 base flange with Connector CapaciTorr base flange CF100 4H0469
Pump Body CF63 Body CF63 4H0241Pump Body CF100 Body CF100 4H0224
CapaciTorr®
D 1000
Dimensions in mm
Capacitorr Pumps Scheda D1000_bis_Layout 1 29/05/2012 11.33 Pagina 1
CapaciTorr®
D 1000
The SAES Getters Groupmanufacturing companies areISO9001 certified, the Asianand Italian companies are alsoISO14001 certified. Fullinformation about ourcertifications for eachcompany of the Group isavailable on our website at:www.saesgetters.com
SAES Getters Group
www.saesgetters.com
© 2012 SAES Getters. Printed in Italy. All rights reserved. SAES® is a registeredtrademark of SAES Getters S.p.A., its subsidiaries and affiliates.
SAES Getters reserves the right to change or modify product specifications at any time without notice.
D.VS.112.1
Typical Pump Characteristics CapaciTorr D 1000Alloy Type St 172Alloy Composition ZrVFeGetter Mass (g) 136Getter Surface (cm2) 1140
Pumping Speed (l/s)H2 1000CO 600
Sorption Capacity (Torrll)
H2 1360CO at 25 °C 4CO total 1224
Note: Pumping speed data refer to the initial values of the pump without the pump body.CO capacity based on speed below 30 l/s in nude configuration.
Note:The voltage and current vs temperature data, displayed in the graph, have beenachieved in nude configuration (NEG Cartridge completely immersed in the chamber).
Power supply and cablesProduct Product description CodeNEG Power Supply NEG pump controller V1.1 3B0351NEG Power Supply RS 485 NEG pump controller V1.1 800P 3B0366Input Cable Cable Mains Input V1.1 2Mt 3B0336Output Cable Cable supply output with K-TC/3Mt-V1.1-HT 3B0420
0,1
1
10
100
1000
10000
0,01 0,1 1 10 100
CapaciTorr® D1000sorption test (according to ASTM F798-97)
Sorbed Quantity (Torr · l )
Pu
mp
ing
Sp
ee
d (
l/s
)
Sorption Temperature: 25°C
Activation:60' @ 50 V (210 W)
Sorption pressure: 3E-6 Torr CO
H2
N2
00,511,522,533,544,55
0
10
20
30
40
50
60
0 100 200 300 400 500 600 700
Heating parameters
Vo
lta
ge
(V
)
Cu
rre
nt
(A)
Temperature (°C)
Current (A)Voltage (V)
Capacitorr Pumps Scheda D1000_bis_Layout 1 29/05/2012 11.33 Pagina 2
General Features
£ High pumping speed for all activegases
£ High sorption capacity and increasedlifetime
£ Costant pumping speed in HV, UHVand XHV
£ Reversible pumping of hydrogen andits isotopes
£ Possibility of operation at roomtemperature after activation, withoutpower
£ Operation in the presence of highmagnetic fields
£ Oil free and vibration free in ultrahigh vacuum
£ Low weight
Applications
£ Improving ultimate vacuum incombination with ion, diffusion,cryogenetic or turbomolecular pumps
£ Surface analysis systems
£ Particle accelerators, synchrotronradiation sources and relatedequipment
£ Process pumps for vacuum devicesand deposition chambers
£ Portable vacuum instrumentation
£ Pumping, storing and releasinghydrogen isotopes
£ Impurities removal in rare gas filled devices
The CapaciTorr® D 2000 MK5 pump is the highest performing pump of the CapaciTorrseries. With the use of a special highly porous sintered Zr-V-Fe getter material, St 172, thepump is able to reach 2000 l/s pumping speed for hydrogen in UHV conditions. The St 172getter cartridge is mounted on a heater structure using a single heater element, and it isavailable on CF100 and CF150 flanges. The flanges (AISI 316 LN) are conveniently suppliedwith a custom made bakeable electrical connector which combines power andthermocouple pins, for best integration and minimum footprint. St 172 material offerssuperior gas diffusivity characteristics and allows operation at room or intermediatetemperatures (200 °C) to increase the sorption capacity in presence of high gas loads. Thepump sorption speed is at its maximum when the pump is mounted directly in the vacuumsystem without a body. The pumping speed curves related to different mounting positionsand the activation curves are shown in the enclosed graphs.
HIGHLIGHTS
w e s u p p o r t y o u r i n n o v a t i o n
Ordering Information
Product Product description Code
Base flange with Connector and Heater CapaciTorr CF100 MK5 4H0439Base flange with Connector and Heater CapaciTorr CF150 MK5 4H0438
Base flange with Connector, Heater and Body CapaciTorr CF100 MK5 J 4H0441
Base flange with Connector, Heater and Body CapaciTorr CF150 MK5 J 4H0442
St 172 Getter Cartridge C 2000 DSK 4H0418
CapaciTorr®
D 2000
Dimensions in mm
Capacitorr Pumps Scheda D2000_bis_Layout 1 29/05/2012 11.32 Pagina 1
CapaciTorr®
D 2000
The SAES Getters Groupmanufacturing companies areISO9001 certified, the Asianand Italian companies are alsoISO14001 certified. Fullinformation about ourcertifications for eachcompany of the Group isavailable on our website at:www.saesgetters.com
SAES Getters Group
www.saesgetters.com
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D.VS.113.1
Typical Pump Characteristics CapaciTorr D 2000Alloy Type St 172Alloy Composition ZrVFeGetter Mass (g) 225Getter Surface (cm2) 1900
Pumping Speed (l/s)H2 2000CO 1000
Sorption Capacity (Torrll)
H2 2250CO at 25 °C 5CO total 2000
Note: Pumping speed data refer to the initial values of the pump without the pump body.CO capacity based on speed below 50 l/s in nude configuration.
Note:The voltage and current vs temperature data, displayed in the graph, have beenachieved in nude configuration (NEG Cartridge completely immersed in the chamber).
Power supply and cablesProduct Product description Code
NEG Power Supply NEG pump controller V1.1 3B0351NEG Power Supply RS 485 NEG pump controller V1.1 800P 3B0366Input Cable Cable Mains Input V1.1 2Mt 3B0336Output Cable 3Mt lenght Cable supply outpu t V1.1-5 3Mt 3B0337Output Cable 5Mt lenght Cable supply output V1.1-5 5Mt 3B0361
1
10
100
1000
10000
0,001 0,01 0,1 1 10
CapaciTorr® D2000sorption test (according to ASTM F798-97)
Sorbed Quantity (Torr · l )
Pu
mp
ing
Sp
ee
d (
l/s
)
Sorption Temperature: 25°C
Activation:45' @ 110 V (495 W)
Sorption pressure: 3E-6 TorrCO
H2
N2
0
1
2
3
4
5
6
0
20
40
60
80
100
120
50 150 250 350 450
Heating parameters
Vo
lta
ge
(V
)
Cu
rre
nt
(A)
Temperature (°C)
Current (A)Voltage (V)
CF100 bodynude
Capacitorr Pumps Scheda D2000_bis_Layout 1 29/05/2012 11.32 Pagina 2
