CapaciTorr ® Z 100 General Features £ High pumping speed for all active gases £ High sorption capacity and increased lifetime £ Constant pumping speed in UHV and XHV £ Reversible pumping of hydrogen and its isotopes £ Operation at room temperature after activation, without power £ Operation in the presence of high magnetic fields £ Oil free and vibration free in ultra high vacuum £ Low weight Applications £ Improving ultimate vacuum in combination with ion, diffusion, cryogenic or turbomolecular pumps £ Surface analysis systems £ Particle accelerators, synchrotron radiation sources and related equipment £ Process pumps for vacuum devices and deposition chambers £ Portable vacuum instrumentation £ Pumping, storing and releasing hydrogen isotopes £ Impurities removal in rare gas filled devices The CapaciTorr® Z 100 is a compact Non Evaporable Getter (NEG) pump based on the new ZAO®1 getter alloy (Zr, V, Ti, Al) in the form of sintered getter disks. The pump features pumping speeds in excess of 150 l/s for hydrogen in UHV‐XHV conditions. The pump comes on a standard CF 35 flange. A built in heater, directly connected to the flange power feedthrough (bakeable up to 400 °C), allows for the pump activation (550°C for 1 hour). A suitable connector provides an easy and fast connection to the pump power supply for activation purposes. Only a minimal power consumption (45 W for 1 hour) is required during the activation. No power is required during normal operation in UHV‐XHV at room temperature. Like other NEG pumps, the CapaciTorr Z 100 is vibration free and can operate in presence of high magnetic fields. The CapaciTorr Z 100 is therefore the ideal solution for applications in which space and weight constrains, absence of vibrations and minimal electromagnetic interference must be coupled to excellent pumping performances and UHV/XHV standards. The ZAO1 material provides superior pumping speed with respect to standard getter material based on Zr, V and Fe and allows for operation at room or intermediate temperatures (200 °C) for increasing the pump sorption capacity in presence of high gas loads, like during the bake out process. The CapaciTorr Z 100 delivers its full pumping speed when mounted directly protruding inside the vacuum chamber without any body. HIGHLIGHTS o u p g r making innovation happen , together Leak check groove Serial number max O35 O70 20 45 Dimensions in mm
Transcript
CapaciTorr®
Z 100
General Features
£ High pumping speed for all active
gases
£ High sorption capacity and increased
lifetime
£ Constant pumping speed in UHV and
XHV
£ Reversible pumping of hydrogen and
its isotopes
£ Operation at room temperature after
activation, without power
£ Operation in the presence of high
magnetic fields
£ Oil free and vibration free in ultra
high vacuum
£ Low weight
Applications
£ Improving ultimate vacuum in
combination with ion, diffusion,
cryogenic or turbomolecular pumps
£ Surface analysis systems
£ Particle accelerators, synchrotron
radiation sources and related
equipment
£ Process pumps for vacuum devices and
deposition chambers
£ Portable vacuum instrumentation
£ Pumping, storing and releasing
hydrogen isotopes
£ Impurities removal in rare gas filled
devices
The CapaciTorr® Z 100 is a compact Non Evaporable Getter (NEG) pump based on
the new ZAO®1 getter alloy (Zr, V, Ti, Al) in the form of sintered getter disks. The
pump features pumping speeds in excess of 150 l/s for hydrogen in UHV‐XHV
conditions. The pump comes on a standard CF 35 flange. A built in heater, directly
connected to the flange power feedthrough (bakeable up to 400 °C), allows for the
pump activation (550°C for 1 hour). A suitable connector provides an easy and fast
connection to the pump power supply for activation purposes. Only a minimal
power consumption (45 W for 1 hour) is required during the activation. No power is
required during normal operation in UHV‐XHV at room temperature. Like other NEG
pumps, the CapaciTorr Z 100 is vibration free and can operate in presence of high
magnetic fields. The CapaciTorr Z 100 is therefore the ideal solution for applications
in which space and weight constrains, absence of vibrations and minimal
electromagnetic interference must be coupled to excellent pumping performances
and UHV/XHV standards. The ZAO1 material provides superior pumping speed with
respect to standard getter material based on Zr, V and Fe and allows for operation
at room or intermediate temperatures (200 °C) for increasing the pump sorption
capacity in presence of high gas loads, like during the bake out process.
The CapaciTorr Z 100 delivers its full pumping speed when mounted directly
protruding inside the vacuum chamber without any body.
HIGHLIGHTS
oupgr
making innovat ion happen, together
Leak check groove
Serial number
max O35
O70
20
45
Dimensions in mm
CapaciTorr Z100_Layout 1 07/11/2017 12:18 Pagina 1
CapaciTorr® Z 100
D.VS.162.0.17
1
10
100
1000
0,0001 0,001 0,01 0,1 1 10
CapaciTorr® Z 100 sorption test (according to ASTM F798-97)
SAES Group reserves the right to change or modify product specifications at any timewithout notice.
The SAES Group manufacturing
companies are ISO9001
certified and the Italian
companies are also ISO14001
certified. Full information
about our certifications for
each company of the Group
are available on our website at:
www.saesgroup.com
SAES Group
www.saesgroup.com
neg_technology@saes‐group.com
oupgr
H2O
O2
GasInitial pumping
speed (l/s)
Sorption capacity (Torr.l)
Single run1 Total2
H2 150 600 N/A3
H2O 100 2.4 >2000
O2 75 1.2 >1100
CO 65 0.2 >260
N2 40 0.15 >50
Getter alloy type ZAO®1
Alloy composition Zr V Ti Al
Getter mass (g) 30
Getter surface (cm2) 156
Capacity values with the getter at room temperature, corresponding to a drop of the pumping speed to 10% of its initial value.
Total capacity values for each single gas obtained after many reactivations (getter fully consumed). Capacity values for the various
gases are not additive (a getter fully reacted with one gas specie will not sorb another gas).
After the getter has reached its H2 capacity it can be “regenerated”. Through the regeneration process it is possible to extract the
hydrogen stored in the getter. After a full regeneration process, the pump can start pumping hydrogen again.
1
2
3
Ordering Information
Product Product description Code
CapaciTorr Pump CapaciTorr Z 100 5H0217
Power supply for single pump CapaciTorr CF 35 D 100 Power Supply 3B0385
Input Cable Cable Mains Input CF 35 3 MT 3B0338
Power supply output cable for single pumpCable Supply Output
CF 35 D50/D100/D200 3 MT3B0386
Multicontroller up to 4 pumps*
NEG POWER LP C1
NEG POWER LP C2
NEG POWER LP C3
NEG POWER LP C4
3B0521
3B0522
3B0523
3B0524
Multicontroller up to 2 pumps*NEG POWER SMALL LP C1
NEG POWER SMALL LP C2
3B0531
3B0532
Output cable for multicontrollerNEG POWER‐NEXTorr D100/D200
output cable ‐ 3 MT**3B0495
* The power supply includes the input cable
**Longer output cables are available on request
CapaciTorr Z100_Layout 1 07/11/2017 12:18 Pagina 2
CapaciTorr®Z 200
General Features
£ High pumping speed for all activegases
£ High sorption capacity and increasedlifetime
£ Constant pumping speed in UHV andXHV
£ Reversible pumping of hydrogen andits isotopes
£ Operation at room temperature afteractivation, without power
£ Operation in the presence of highmagnetic fields
£ Oil free and vibration free in ultrahigh vacuum
£ Low weight
Applications
£ Improving ultimate vacuum incombination with ion, diffusion,cryogenic or turbomolecular pumps
£ Surface analysis systems
£ Particle accelerators, synchrotronradiation sources and relatedequipment
£ Process pumps for vacuum devices anddeposition chambers
£ Portable vacuum instrumentation
£ Pumping, storing and releasinghydrogen isotopes
£ Impurities removal in rare gas filled devices
The CapaciTorr® Z 200 is a compact Non Evaporable Getter (NEG) pump basedon the new ZAO1 getter alloy (Zr, V, Ti, Al) in the form of sintered getter disks. The pump features pumping speeds in excess of 290 l/s for hydrogen inUHV‐XHV conditions. The pump comes on a standard CF 35 flange. A built in heater, directlyconnected to the flange power feedthrough (bakeable up to 400 °C), allows forthe pump activation (550°C for 1 hour). A suitable connector provides an easy and fast connection to the pump powersupply for activation purposes. Only a minimal power consumption (60 W for 1hour) is required during the activation. No power is required during normaloperation in UHV‐XHV at room temperature. Like other NEG pumps, theCapaciTorr Z 200 is vibration free and can operate in presence of high magneticfields. The CapaciTorr Z 200 is therefore the ideal solution for applications in whichspace and weight constrains, absence of vibrations and minimalelectromagnetic interference must be coupled toexcellent pumping performances and UHV/XHV standards.The ZAO1 material provides superior pumping speed with respect to standardgetter material based on Zr, V and Fe and allows for operation at room orintermediate temperatures (200 °C) for increasing the pump sorption capacityin presence of high gas loads, like during the bake out process. The CapaciTorr Z 200 delivers its full pumping speed when mounted directlyprotruding inside the vacuum chamber without any body.
HIGHLIGHTS
oupgr
making innovat ion happen, together
Leak check groove
SAES serial numberO70 max O35
1771
Dimensions in mm
Capacitorr Z 200_Layout 1 24/01/2018 10:55 Pagina 1
CapaciTorr® Z 200
D.VS.165.0.17
1
10
100
1000
0,0001 0,001 0,01 0,1 1 10
CapaciTorr® Z 200 sorption test (according to ASTM F798‐97)
Sorbed Quantity (Torr · l )
Activation : 550°C x 60'Sorption pressure: 3e‐6 torrSorption temperature : 25°C
The SAES Group manufacturingcompanies are ISO9001certified and the Italiancompanies are also ISO14001certified. Full informationabout our certifications foreach company of the Groupare available on our website at:www.saesgroup.com
H2O 195 4.4 >4200O2 150 2.2 >2100CO 125 0.38 >500N2 75 0.26 >95Getter alloy type ZAO®1Alloy composition Zr V Ti AlGetter mass (g) 58Getter surface (cm2) 300
Capacity values with the getter at room temperature, corresponding to a drop of the pumping speed to 10% of its initial value. Total capacity values for each single gas obtained after many reactivations (getter fully consumed). Capacity values for the variousgases are not additive (a getter fully reacted with one gas specie will not sorb another gas).After the getter has reached its H2 capacity it can be “regenerated”. Through the regeneration process it is possible to extract thehydrogen stored in the getter. After a full regeneration process, the pump can start pumping hydrogen again.
12
3
* The power supply includes the input cable** Longer output cables are available on request
Pum
ping
Spe
ed (l
/s)
Capacitorr Z 200_Layout 1 24/01/2018 10:55 Pagina 2
CapaciTorr®
Z 400
General Features
£ High pumping speed for all active
gases
£ High sorption capacity and increased
lifetime
£ Constant pumping speed in UHV and
XHV
£ Reversible pumping of hydrogen and
its isotopes
£ Operation at room temperature after
activation, without power
£ Operation in the presence of high
magnetic fields
£ Oil free and vibration free in ultra
high vacuum
£ Low weight
Applications
£ Improving ultimate vacuum in
combination with ion, diffusion,
cryogenic or turbomolecular pumps
£ Surface analysis systems
£ Particle accelerators, synchrotron
radiation sources and related
equipment
£ Process pumps for vacuum devices and
deposition chambers
£ Portable vacuum instrumentation
£ Pumping, storing and releasing
hydrogen isotopes
£ Impurities removal in rare gas filled
devices
The CapaciTorr® Z 400 is a compact Non Evaporable Getter (NEG) pump based on the
new ZAO®1 getter alloy (Zr, V, Ti, Al) in the form of sintered getter disks. The pump
features pumping speeds in excess of 500 l/s for hydrogen in UHV-XHV conditions. The
pump comes on a standard CF 35 flange. A built in heater, directly connected to the
flange power feedthrough (bakeable up to 400 °C), allows for the pump activation (550°C
for 1 hour). A suitable connector provides an easy and fast connection to the pump
power supply for activation purposes. Only a minimal power consumption (85 W for 1
hour) is required during the activation. No power is required during normal operation in
UHV-XHV at room temperature. Like other NEG pumps, the CapaciTorr Z 400 is vibration
free and can operate in presence of high magnetic fields. The CapaciTorr Z 400 is
therefore the ideal solution for applications in which space and weight constrains,
absence of vibrations and minimal electromagnetic interference must be coupled to
excellent pumping performances and UHV/XHV standards.
The ZAO1 material provides superior pumping speed with respect to standard getter
material based on Zr, V and Fe and allows for operation at room or intermediate
temperatures (200 °C) for increasing the pump sorption capacity in presence of high gas
loads, like during the bake out process.
The CapaciTorr Z 400 delivers its full pumping speed when mounted directly protruding
inside the vacuum chamber without any body.
HIGHLIGHTS
oupgr
making innovat ion happen, together
Dimensions in mm
Ø 70
42
13
2
18
8
Capacitorr Z 400_Layout 1 28/11/2017 10:54 Pagina 1
CapaciTorr® Z 400
D.VS.157.3.17
1
10
100
1000
0,0001 0,001 0,01 0,1 1 10
CapaciTorr® Z 400 sorption test (according to ASTM F798-97)
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