Clean Room Introduction and safety course Welcome to Nanofabrication Laboratory at MC2.

Clean Room Introduction and safety courseClean Room Introduction and safety course

Welcome to Nanofabrication Laboratory at MC2


10:15 Introduction MC2 cleanroom facility Cleanroom design and layout

11.15 Administrative guidelines Cleanroom behaviour DVD-Cleanroom behaviour (15 min) Cleanroom access LIMS Process tools/driving license Working hours/lab buddy/ visitors

12:00 Lunch break

13:15 Work Environment and Safety gear Risks with chemicals (Kaija Matikainen) Categories of chemicals (acids, bases, solvents, photochemicals) Handling of chemical waste (Svante Pålsson)

14:15 Safety first Safety policy at MC2 and Chalmers DVD- Cleanroom safety (25 min) Alarm systems

15:30 Lab tour (Ulf Södervall)


MC2 Building

•Inauguration: Year 2000

•Measurements Lab- & Office Area: 18 000 m2

•Cleanroom operation starts: Year 2001

•Process Lab Area: 1 240 m2

•Cleanroom Class: 1 - 1 000

•Investment: 90 M€


The Aim of this course;

To inform about the regulations and rules regarding safety and work environment associated with work in the MC2 Nanofabrication laboratories.

Safety declaration

Safety regulations, procedures and

potential dangers

14:50 reak


The Aim of this course;

Anyone who violates the safety

regulations,

or in any way

Exposes himself/herself or others to

danger

Will be denied accesss to the

laboratory by the decision of the

executive management


Registration document & Questionnaire



Working in a Cleanroom environment

Sources of contamination

Cleanroom garments

Cleanroom behaviour

Training in the gowning procedure


MC2 NanoFabrication laboratory

Cleanrooms often found in processing industry

– electronics, pharmaceutical, biopharmaceutical, medical device industries, food and critical manufacturing environments (semiconductor, biology) and hospitals.

– The only way to control contamination is to control the total environment. Air flow rates and direction, pressurization Temperature Humidity and specialized filtration


MC2 NanoFabrication laboratory

A cleanroom is laboratory with acontrolled environment, where products are manufactured.

A room in which the concentration of airborne particles is controlled, and which is constructed and used in a manner to minimize the introduction, generation and retention of particles inside the room and in which the other relevant parameters e.g. temperature, humidity and pressure are controlled as neccessary (ISO 14644-1)

Typical office building contains ca 1 million particles/foot3.

The Federal standard 209E (ISO 14644) is a document that establishes standard classes of air cleanliness for airborne particulate levels in cleanrooms


Origin of contamination

Personal 35%Process equipment 25%Process 20%Chemicals 20%



Classification of particle sizes


The cleanroom garmentsFiltering function

– Low penetration for particles>0,3my.The garments should be worn properly sealed

Wear resistant– Strong material, wear, laundry resistant

ESD (Electro Static Discharge) safe– Conductive fibres in the hood, cleanroom

suit and boots including the soleComfort

– Breathing material and comfortable fitSize

– Choose the correct size. Too tight garments cause friction and increase particle generation. Too large garments may cause the ”air balloon effect” resulting in excessive release of particles


Contamination from personal– particles of >0,5 my diam. generated/minute from the human body

Action Ordinary clothes Clean room clothesSitting 500,000 15,000

Standing up 2,500,000 80,000

Walking slowly 5,000,000 150,000

Running 10,000,000 300,000



Cleanroom areas in the Nanofabrication laboratory– Processlab 1 (cleanroom- class 100/10)– Processlab 2: (”The training lab”- class 1,000)– MBE-lab (class 10,000)– Dicing and CMP room (class 100,000)– Chemical preparation room ( class 1,000) – Visitors corridor, (class 10,000)– air-locks and gowning rooms (class 100,000)

Other areas:– Media basement (below process lab 1)– Machine hall;Fans, pressurised air, central vacuum,CVC,Water purification– pump service and UHV preparation room– Media attic(above process lab 1, 2)– Scrubber room– Steamer room

House E: House gases, Nitrogen purifier, Neutralisation plant, waste tanks, Emergancy power facility

House G: Special gases


Plenum

Media basement

”Fan tower” HEPA filter

MC2 Cleanroom ventilation system, PL1


Technical Data; Process laboratory 1

360 000m3/h of air is circulated (c:a 500 HEPA)90% of the air is recirculated, 10% is evacuatedTemperature= 21 C +/- 1 CRelative humidity=43% +/- 5%Air Velocity= 0.4 m/sNoise level specification=53 dBVibration level=BBN-E


Cleanliness & Climate Control

Particles: – Class 10-100

Clothing:– Full body suits to limit particle

generation Ventilation:

– 520 000 m3/hour capacity Climate control:

– Humidity control within ± 3% RH,

– Temperature control within ± 1°C (± 0,1°C around e-beam column)


Vibration Minimization Cleanroom has

independent support from rest of building

Multiple layers of vibration insulated pillars

3 µm/sec (curve E) is met with good margins

Vibration sensitive equipment not in contact with cleanroom floor

Roughing pumps located on media level

Cleanroom functions and Media

Static electricity and ESDGeneral media

– House gases– Special gases– Drain– Ventilatiojn exhaust (solvent,

Acid, Toxic)– Electrical power– DI water– CDA, Vacuum, LN2




Entry and Exit to CleanroomOn and Off garment procedure


Cleanroom rulesTo consider before entering the Cleanroom

A proper personal hygiene is a condition for working in the cleanroom Persons suffering from a cold or eczema should not enter the cleanroom Cosmetics, rings and wristwatches have to be removed before entering

the gowning area Persons wearing glasses must clean those before entering the gowning

area Mobile phones are not allowed in the cleanroom areas Men with a beard have to use a beard cover Smokers should wait at least 10 minutes after smoking before entering the

cleanrrom Smokers and snuff users have to rinse their mouth before entering the

cleanroom


Cleanroom rulesTo consider in the cleanroom

All movements should be slow and well plannedAvoid crowding as this concentrates the contaminationDo not carry items close to your bodyDo not touch your face or garment with your clean glovesAvoid touching any clean surfaces; such as load locks, etcAvoid talking while near your component/productNo food (including chewing gum) or beverages are allowed

in the cleanroom. Only ”cleanroom compatible matters/materials” are allowed.

Garments that are wet or stained have substantially reduced filtering effect and have to be exchanged immediately


DVD- Cleanroom behaviour

Contamination and peopleHuman microenvironment

– Speed of movement– Carrying materials– Correct working behaviour


MC2 ; Administrative guidelines

Design dictated by

– Cleanliness– Vibration minimization– Safety– Support access

Professional lab staff of 14 engineers specialized in

– Lithography and Nano Processing

– Thin Film and Plasma Processing

– Thermal and Chemical Processing

and 6 technicians working with

– Service & Maintenance


Machine Park

>170 ToolsSilicon processing up

to 150mmExtensive III-V and

wide bandgap processing

Extensive nano-processing capabilities


Nanofabrication Laboratory


Nanofabrication laboratory organisation

Lab Manager; Peter Modh

Process specialists– Johan Andersson– Bengt Nilsson– Piotr Jedrasik– John Halonen– Karin Hedsten– Göran Alestig– Mahdad Sadeghi– Mats Hagberg– Henrik Frederiksen– Ulf Södervall– Martin Hollerz– Göran Pettersson_ Zonghe Lai

Service and Maintenance – Svante Pålsson– Göran Reivall– Lars-Åke Sidengren– Christer Andersson– Kaija Matikainen– Fredrik Johansson– Emmy Nilsson


Cleanroom introduction course– Compulsory for all cleanroom users– Over 600 participants so far– Safety – Rules & regulations– Proper cleanroom behavior

“Driving licence”-training– To use any equipment in the

cleanroom it is compulsory to have the relevant training before using it .

Ph D Processing course– For graduate students in

applicable programs– Theoretical background and

demonstrations of a wide variety of micro/nano processing techniques

– Course for Masters students


MC2 Equipment booking system LIMS- Laboratory Information Management System

http://labbokning.mc2.chalmers.se/




Log in!







Consider the following when you book equipment

Plan your process steps. Do not book more time than you need.

Make sure that your process step is finished by 18.00, unless you have a backup( see ”lab buddy” system)

Cancel booked time that you do not intend to use. In case somebody do not show up at the booked hour,

another user can take the time after 30 min.Apply a professional attitude to your work, and keep your

booked time strictly. Delays will cause irritation among the subsequent users.

Make sure that you have booked sufficient time for cleanup and resetting the equipment to original state.


Lab usage

Only authorized users may use the process equipment in the lab. You need a ”drivers licence” forALL tools (including microscopes, wet benches)

How to acquire an equipment drivers license??– The purpose of the drivers license is to make sure that

the user is able to handle the tool in a manner that is Safe for the user,Safe for the tool itself Safe for the process running at the tool.


The following outline should be applied for complex tools:– Find someone in your group who is already experienced with the tool,

and work with him/her until you are both satisfied with your basic handling of the tool.

– Once both you and your teacher agree that you are able to work independently with the tool, your teacher should contact the tool responsible and state that you are trained well enough for independent work. Please note that you are under no circumstances allowed to actually work with the tool without supervision without a license. Your teacher must be present at all times during training.

– The tool responsible person will give the training needed, and you will be granted the ”driving license”


Opening hours

Approved users have access to the process laboratories 24 hours a day, all year, with the exeption of certain holidays. When the lab is closed, an announcment is always displayed at

http://processlab.mc2.chalmers.se/information/information.html

BUT!

If you want to use the process laboratory late at night or at other times outside normal working hours (08.00-18.00) you need to use the back-up or lab buddy system

Also; new users will automatically only have access during office hours.


Back-up system; ”lab-buddy”

”if there is any risk of accidental personal injury occuring while working alone, then the worker must be assured quick access to help in case of an emergency”

When you use the ”lab-buddy” system it is required that Another approved user is present in the lab (or close by) to assist you in

the event of an accident/emergency Lab-buddies have close contact (not by mobile-telephone) for the system

to work efficiently The backup person must be an experienced lab user, familiar with the

process lab and its safety devices and alarm system.

(ArbetsMiljöLagen ,AML, 3 Chp ; 2§ paragraph)https://www.chalmers.se/insidan/SV/om-chalmers/arbetsmiljo/halsa-ohalsa-olycksfall/ensamarbete


User responsiblities;MC2 assumes that every user

Has read and understood the lab-safety manual Has attended the training course given by MC2 for new users Carefully follows the MC2 rules and regulations for cleanroom work Does not lend or copy keys or card-keys for the MC2 facility Follows the directives given from the MC2 staff Maintains a proper personal hygiene Acknowledges the established work and access hours Pays attention to the information updates issued by MC2 Acts in a professional manner Register his/her emailadress to the MC2 introduction course manager

Users with experience from smaller process laboratories may see the MC2 regulation framwork as complex and over-worked. However, both the size and cleanliness level of the facility calls for rigorous safety rules and cleanroom discipline. In the end, it is the user who benefits from a safe and functional working place


Lab staff responsibilities

The MC2 facility staff has the following functions and responsibilities

To give advice and suggestions regarding process issues Execute projects according to process plans Ensure that safety,cleanliness and equipment standards are maintained Perform service and maintenance Maintain booking systems and other administrative functions connected to the lab Train new users in cleanroom behaviour and dress code Inform users via email about changes related to the process lab

Please note that it is NOT within the responsibility of the lab group staff to

Clean the equipment after other users Execute process steps or tasks without approval from the project manager


Lab usage- Storage

Every user will be assigned a personal storage space with a corresponding storage box– Intended for temporary storage of work material such as tweezers,

”personal items”, cleanroom pens and notebooks, etc– Only ”harmless” materials may be stored in the personal storage

boxes– Personal storage boxes are personal. You should not borrow items

from a box that belongs to someone else.

– Materials with high probability of contamination or which may impose a safety risk, may under no circumstances be stored in the personal storage boxes.


Lab usage- Visitors Every user have the possibility to bring a visitor in the laboratory

only with the following restrictions

– Visitors corridor: You may bring visitors without special permission. Visitors muct be accompanied all the time and must be properly gowned (cleanroom coat and hair cover). No bags, mobil phones, coats are allowed

– Process lab 1 -requires special permission from the lab manager. All guests must be informed about safety rules and cleanroom behaviour

– Process lab 2. Normally not accessable for visitors. Guests must be accompanied all the time. Make sure that your guests are gowned properly and instruct them not to touch anything.

– MBE lab, CMP and chemical preparation room- Normally not accessable for visitors. You need permission from the lab staff if you want to bring visitors here..


Lab usage

It is the responsibility of the user to clean and reset the process equipment after use

A user can be banned from the cleanroom, or be ordered further cleanroom training, if persistent or serios errors in the work procedure are observed



Work environment risks(Kaija Matikainen)


The objective of this chemical safety training course is to identify potentially hazardous chemicals, and to establish safety routines for work in the lab.


Hazardous Chemicals at MC2 Nanofabrication Laboratories

AcidsBasesOxidizersSolvents


Potential hazards using liquid chemicals

1.Liquid chemicals requires a lot of handling in your work.

2. There are many liquid chemicals used throughout the lab, each with a different set of hazards and precautionary measures required for use.

3. Unconventional use of standard chemicals can present unexpected hazards not associated with normal use in the lab.


Material Safety Data Sheet, MSDS

Material identification – name, CAS #, formula.Physical data – chemistry (boiling point, solubility etc.).Hazardous ingredients – TLV (Threshold Limit Value).Fire and explosion data – AIT, LEL, UEL.Health hazard data – overexposure, first aid.Reactivity data – stability, incompabilities.Spill or leak procedures – what steps to take.Special precautions – handling and storage.Emergency phone contact


Risk analysis: Acids

Hydrofluoric acid, HF BOE/BHF, Buffered Oxide

Etch (HF/NH4F)

Sulphuric acid, H2SO4

Nitric acid, HNO3

Hydrochloric acid, HCl


Risk analysis: Nitric acid, HNO3

Nitrous gases are highly toxic – and you can’t smell them!

Nitric acid could form ignition at reaction with organic substances

(e.g. alcohols), and form highly toxic nitrous gases, especially when heated. Reaction could be explosive.

Nitric acid could form ignition at reaction with organic substances!


Risk analysis: HF and BOE

Exposure to diluted HF or BOE can produce harmful health effects that may not be immediately apparent.

Diluted HF or BOE penetrates the skin with no immediate pain. And then cause serious tissue and bone damage before pain begins. This attack could be inhibited by treatment with HF-Antidote Gel.

Immedately flush the exposed area with water at least one min. Flush well but briefly. It is critical to apply antidote as soon as possible. Carefully remove contaminated clothing at once, wipe dry and apply HF-Antidote Gel to exposed area gently and freely. Aggressively massage the gel into the skin (wearing gloves) and continue to reapply and massage until pain and/or redness disappear or until medical treatment is available. Seek medical attention as soon as possible for all burns regardless of how minor they may appear initially.


A.A.A. – Always Add Acid into the water rule

Do not add water to an acid solution; instead, gradually add the acid to the water.


Risk analysis: Bases

Ammonium hydroxide, NH4OH

Potassium hydroxide, KOH

Developers: AZ 351B(NaOH), MF312, MF319…

TMAH (Tetra Methyl Ammonium Hydroxide) could produce toxic nitrous gases!


Risk analysis: Oxidizers

Hydrogen peroxide, H2O2

Sodium persulfate, Na2S2O3

Ammonium peroxidesulfate, (NH4)2S2O8

Nitric acid, HNO3


Symptoms: Acids, Bases, and Oxidizers

After inhalation: Depending on the concentration of the chemical and length of time symptoms

may result in corrosive attack on the respiratory passages and lungs. Exposure may produce upper airway oedema, respiratory failure, pulmonary oedema (lung water) and inflammation (pnemonitis). A person may get better but then worse again from 30 hours up to 1 week later.

After skin contact: Contact with skin can cause redness, pain, blistering, or severe tissue burns.

After eye contact: Corrosive to eyes. Symptoms of redness, pain, blurred vision, and permanent

eye damage can occur. Possibly delayed (up to one week), possible blindness.


First aid measures: Acids, Bases and Oxidizers

After inhalation: Remove to fresh air. Keep warm and resting. Get medical attention

immediately. Report incident to safety responsible person.

After skin contact: Immediately flush with water for at least 15 minutes and rinse thoroughly.

Remove contaminated clothing. Get medical attention in case of symptoms. If skin contact results in severe tissue burns, have someone call 112 for prompt emergency transport while you continue flushing the affected area with water, or have someone to make arrangement for transport to nearest “akutintag”, emergency room unit.

After eye contact: Immediately flush thoroughly with water continuously for at least 15-30

minutes, forcibly hold eye open to ensure effective wash behind eyelids. Get medical attention immediately. Report incident to safety responsible person.


Risk analysis: Solvents

Cleaning solvents: Methanol, ethanol, IPA, acetone. Resists for optical and e-beam lithography. Resist removers: Shipley Microposit Remover 1165 (NMP),

MEK, DEK, and acetone. Developers: Toluene, xylene, MIBK, and XP SU-8. Resist thinners: Anisole, EC-solvent, cyclopentanone, and

chlorobenzene.


Risk analysis: Solvents There is no safe way of heating up flammables!

Because the vapours can travel a considerable distance, the source of ignition can be far away from the flammable container itself.

Always make sure that your work bench has 100% exhaustion when working with flammables, and that flammable containers should be restored back to the flammables cabinet immediately after use.


Symptoms: Solvents

After inhalation: Can cause irritation of eyes, nose and throat. Prolonged exposure

can cause headache, sickness (nausea), confusion, drowsiness, convulsion and coma.

After skin contact: Prolonged or repeated exposure may cause irritation, itching, skin

dryness or cracking characterised by redness and inflammation.

After eye contact: Vapours may cause severe irritation with redness, pain, tearing and

inflammation. Splashes may cause eye damage.


First aid measures: Solvents

After inhalation: Remove to fresh air. Report incident to safety responsible person. Get medical attention in case of symptoms.

After skin contact: Immediately wash with water and rinse thoroughly. Remove contaminated

clothing. Get medical attention in case of symptoms. Report incident to safety

responsible person.

After eye contact: Immediately flush thoroughly with water continously for at least 15-20 minutes,

with eyelids held wide open during flushing. Get immediate medical attention. Report incident to safety responsible person.


PPE, Personal Protective Equipment: Gloves

Put chemical protection gloves outside the disposable gloves before you start working with hazardous chemicals at the wet benches.

Inspect your chemical protection gloves carefully. If the gloves are discoloured or damaged, they should be disposed immediately.

Rinse the gloves carefully before disposing them.

When your work in the process wet bench has been completed, the chemical protection gloves should be rinsed and put back to their designated place, without touching any surface outside the process wet bench.

Gloves should always be rinsed with water before handling wash bottles or other laboratory fixtures.


PPE, Personal Protective Equipment: Eye protection

IT IS MANDATORY TO WEAR SAFETY GLASSES IN THE LABORATORY!

Use apron and face shield when mixing or using strong acids, bases or oxidizers.

Put on face shield when you are wet etching.

Use apron and safety glasses when dicing materials and at CMP (Chemical Mechanical Polishing) machines.


Safety routines at MC2 Processlabs

Do not leave your chemicals unattended. Clearly mark the content of your chemicals, your name, phone, and date plus time on a clean room note.

You are responsible for removing and disposing of your personal chemical containers when they are no longer in use.

Chemical containers, that are not clearly labelled, should be disposed immediately. Mark the container “ unknown content “ and contact the lab staff.

Put the cap back on each chemical bottle securely. Rinse and dry the outside of the bottle before returning it back to the storage.

Never mix chemicals without prior knowledge about the consequences! You are responsible for the security when handling chemicals at your wet

bench. Clean up your wet bench when you have finished your work.


The MC2 Process laboratory safety declaration

Remember, you are responsible for your own safety, and that for others around you.

MC2 provides you with information, recommendations, and necessary resources for you to be able to do your work safely. It is up to you to ensure that you take appropriate precautions for your safety and your fellow lab members.


70

CHEMICALS (Svante Pålsson)

Chemical supply to lab

Chemical waste from the lab.

71

CHEMICAL SUPPLY TO THE LAB.

Please, order standard chemical by e-mail, a day ahead [email protected]

Special chemicals have to be requested and granted by MC2.

72


Major stock in basement.

73


Minor stock for day use close to the lab.

74

CHEMICAL WASTE FROM THE LAB.

Waste has to be marked with adequate marking for disposal.

75


Diluted chemicals can be disposed down the drains. Acid drains in wet benches.

Neutralization in basement.

76


Solvent drain for acetone, and alcohol to tank.

Emergency drain to tank.

Tanks are emptied with a truck.

77


Place empty chemical bottles on the trolley.

Please rinse the bottles with water before disposing.

78


Material waste are disposed in special waste basket inside the lab.



Chalmers safety plan and organisation 4.6 MC2 safety policy 4.7 Alarms (gas, fire and process) 4.7.1 Evacuation of cleanroom 5.1 First aid 5.2 Safety gear 5.3 Fire extinguisher 5.4-5.5 Eye and body showers 5.6 Antidote gel In case of an emergency Chemical spill

“Safety First”


Wet bench training, 4.4-4.5

1 hour hands on demonstration in lab.


Chalmers safety organisation

President– a) information group– b) catastrophe organisation

MC2 Prefekt– a) Alarm levels

MC2 lab manager– a) work delegation– b) Education


http://www.adm.chalmers.se/Intern/Soseng/general.html



All activities within the MC2 Nanofabrication facility comply with the Swedish safety and work environmental laws and regulations


DVD- Safety in Cleanroom

Cleanroom hazards (fire, explosions, toxicity, physicalHazardous materials (flammable, reactive, corrosive,

poison/toxic)Hazardous materials (handling & storage)Dealing with emergencies (water based, foam, carbon

dioxide, powder)


Smoke detector/ alarmFire sensors and alarms

in wet bench units with solvents

Sprinkler system

ALARM SYSTEM


Fire alarm– acoustic signal and flashing red light

ACTION: Evacuation of laboratories

Gas alarm – acoustic signal and flashing red light

ACTION: Evacuation of laboratories

Process alarm– acoustic signal and flashing blue light

ACTION: Contact the lab staff

ALARMS


In case of emergency (fire,gas,etc)!

Manual Alarm– Push the knob to evacuationalarm; this also gives an

alarm to Rescue service

– Automatic alarm from fire,gas sensors

Rescue those who are in danger

Evacuate building

Call (00) 112 and inform about;– what has happened– if there are any people locked in– who is calling ( see last page in lab manual)


In case of evacuation alarm!

Put out fire using extinguisherONLY ”if it is possible without danger for your health) and you have the proper training

Use ”Fire choking cloth”

Evacuate from building via emergency exits. Local evacuation officers in house Do not use elevators at evacuation Close doors to minimize smoke spreading Point of assembly after evacuation from MC2

(“VASA square”), wait for further information Do not enter building again unless red alarm

lamps has stopped flashing

Meeting point after evacuation


Preventive actions;

what to know before entering laboratory!?

Look at evacuation plans (”close to exits”) and recognize evacuation exits

At least 2 escape ways from each position!



First aid kitEye and body showers


Fire extinguisher classes:A, B, C, D

Foam, S (Skumsläckare, A+B);for wood, paper, gases, liquids,

CO2 ,K (Kolsyresläckare; B)for gases, liquids and electrical equipmentrisk for choking

In case of Fire


Chemical Spill;

Isolate the area

Call the lab staff

If possible use absorbing material (is available in cupboard in Processlab )

If you spill chemicals onto yourself, use the emergency showers and let somebody else take care of the items above.

Nanomaterial hazards


Nanomaterials (4.2.8) Nanomaterials are applications with morphological features smaller than a one

tenth of a micrometer in at least one dimension. Despite the fact that there is no consensus upon the minimum or maximum size of nanomaterials, with some authors restricting their size to as low as 1 to ~30 nm, a logical definition would situate the nanoscale between microscale (0.1 micrometer) and atomic/molecular scale (about 0.2 nanometers).

The hazards associated with handling of novel nanomaterials are still under debate, but first of all those new materials are not yet proven to be non-hazardous. We require that our users keep updated on information about the potential risks with their material, and using the appropriate precautions during handling.

A good recommendation is to start reading the following 2 links; (http://membership.acs.org/c/ccs/nano.htm) and the European project Nanosafe (

http://www.nanosafe.org/)



You are strongly encouraged to recommend changes that make the cleanroom facility;safer, cleaner, easier to use, or less expensive to maintain!

When in the cleanroom, be aware of your knowledge limitations. It is extremely important that you ask someone for help if you are unsure about the operation of these facilities.


Laboratory tour; – Entering main cleanroom area; shoe protection/change,

hair protection– Entering procedure for the Processlab 2 and visitors

corridor(visitors gowning room),– Enter procedure for Processlab 1; handwash, new

garments (hood, overall, shoes, personal hanger), gloves– Processlab 1; equipment layout, ventilation circulation,

alarm system, emergency escape ways, eye and body showers, cloth/cushion for chemical spill

– Undress cleanroom garment procedure – Exit from clean room zone

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Clean Room Introduction and safety course Welcome to Nanofabrication Laboratory at MC2.

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