CoventorWare Overview

Coventor, Inc.

2012

MEMS Means Multi-Physics

Sensing MechanicalElectrical Transduction

Actuation ElectricalMechanical Transduction

Hybrids: Actuation and Sensing ElectricalMechanicalElectrical Transduction

Accelerometers Microphones Micro mirrors Relays, switches

and varactors

Angular rate

(gyroscopes)

Resonators

(Quartz replacement & RF)

Micro mirrors

CoventorWare: Coventor’s MEMS

Multi-Physics Platform for 10+ Years

Sensing MechanicalElectrical Transduction

Actuation ElectricalMechanical Transduction

Hybrids: Actuation and Sensing ElectricalMechanicalElectrical Transduction

Accelerometers Microphones Micro mirrors Relays, switches

and varactors

Angular rate

(gyroscopes)

Resonators

(Quartz replacement & RF)

Micro mirrors

Multi-Physics Simulations

• Structural response

• Electrostatic fields

• Thermal sensitivity

• Gas damping

Application Example: Capacitive

Accelerometers

Performance Specs

• Sensitivity (C/a)

• Bandwidth

• Linearity

• Damping

• Shock response

• Stress and reliability

• Self-test capability

Mechanical solver:

Mode shapes & frequencies

Single-axis accelerometer

fabricated with IMEC’s monolithic

CMOS MEMS process

0 20 40 60 80 1000

0.05

0.1

0.15

0.2

0.25

Input g level

No

rma

lize

d

C

MEMS+ Simulation Result

CoventorWare Simulation Result

Electrostatics solver:

Differential capacitance vs. accel.

Stokes solver:

Gas damping of comb drives

Reynolds solver:

Gas damping of proof mass

More Application Examples

FBAR (Piezoelectric, Mechanical, Thermal-Elastic

Damping, Anchor Loss Damping)

RF Switch (Coupled Electro-Mechanics, Contact,

Gas Damping)

Pressure Sensor (Mechanics,

Piezo-Resistive Sensing)

Accelerometer (Coupled Electro-Mechanics,

Gas Damping)

Recent Successes

“Thank you for developing MEMS

tools that support our needs for

composite piezo materials”

– Harmeet Bhugra,

Managing Director,

MEMS Product Line

The first piezo MEMS

timing solution,

announced in 2011

TDCA, the first RF

MEMS varactor to

ship in cell phones,

Samsung phone

tear down, 2011

CoventorWare: Layout Results

DESIGNER ANALYZER

Materials & Process

Create 2D Layout

Build 3D Model

Automatically

Generate Mesh Simulate, Visualize, and Analyze

Process-Centric

Design Entry

Preprocessing and Mesh Generation

Optimized for MEMS Geometry

Hybrid FEM/BEM Suite

of Multi-Physics Field Solvers

BEM solver for electrostatic force due to bias voltage - uses surface mesh

RF switch

FEM/BEM Solution for Coupled

ElectroMechanics

"Pull-in" Result -- find last stable voltage

Pull-in Point

FEM solver for solid mechanics displacement - uses volume mesh

Repeat until

convergence

V

-

+

Benefits of Hybrid FEM/BEM

Solution

• No mesh required in “air” around moving parts

– Smaller mesh, faster solutions

– No need to morph mesh as part moves, especially challenging if gap

closes

• Fully captures 3D electrostatic fringing fields that others neglect,

critical for derived quantities such as

– Electrostatic force

– Pull-in / Lift-off voltage

– Electrostatic spring softening effect

CoventorWare 2012 Highlights

Full 64-bit support for solving BIG meshes • Layout, Solid Model Builder, Preprocessor (including meshing), all MEMS

solvers (MemMech, MemElectro, CoSolveEM, HarmonicEM, Stokes) and

Visualizer

Hex-dominant extrude meshing

New user interface: CoventorWare console • Unified access to all Designer functionality and MEMS solvers

• Co-exists with classic UI for easy migration

Python scripting console for Analyzer • Automatically generate scripts for MEMS analysis

• Set up and manage simulations, post-process results

MEMS solver enhancements

Full 64-bit Support:

Higher Throughput

• Simulate complex designs

more accurately with finer

meshes

• Full 64-bit support includes – Layout Editor

– Solid Modeler*

– Preprocessor & Meshing

– All MEMS Solvers**

– Visualizer

• Single installation includes

32-bit and 64-bit support – Automatically runs in 64-bit mode

on 64-bit OS

64-bit MemMech Test

DoF Max RAM

(GB)

100,485 0.3

547,029 3.0

2,669,733 25.0

64-bit MemElectro Test

Panels Max RAM

(GB)

282,509 1.2

1,110,452 4.1

4,402,784 15.6

* Solid Modeler is 64-bit on Windows only

** Excluding MemPZR, MemHenry

Hex-Dominant Mesher:

Higher Efficiency

Before: CW2010 quad paver • Too many elements, because it required

at least 2 mesh edges per model edge

• Some low-quality areas

After: CW2012 hex-dominant extrude • Fewer elements:

2587 hexes + 150 prisms versus 4959 hexes

• No low-quality areas

New Console:

Improved User Experience

All simulation management

functionality in one window

New cockpit for accessing all

Designer and MEMS Analyzer functionality

Double click on any

entity to open it

Right click to create

new designs and

simulations

Scripting: Automation and

Improved Ease of Use

Enables multi-dimensional parametric studies

and automation of simulations after design changes – Generates script for commonly used MEMS solvers

– Combine scripts to perform a sequence of analyses

– Script can wait for an analysis to complete or submit to Job Queue

– Full capabilities of Python language are available

Select results and right click to save a script

MEMS Solver Enhancements

MemMech • harmonic analysis now allows angular acceleration BC (for gyros),

may include electrostatic elements, and can display anchor loss energy

• New “general contact” option eliminates requirement to specify faces that

contact and detects contact on “suppressed” parts

CoSolveEM and HarmonicEM • New, tabbed solver setup UI provides access to MemElectro and MemMech

settings as well as CoSolveEM/HarmonicEM settings – “one stop shopping”

• All possible BCs are accessible during the setup sequence

HarmonicEM • Outputs current vs. frequency

DampingMM Stokes solver • Supports wedge symmetry for more efficient simulation of devices, such as

microphones and pressure sensors, that have axi-symmetric or angular

symmetry