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User Manual MP 39E User Manual DC-Mike Actuators M-230 ... M-235 Series V 3.00 Technical Documentation & User Instructions This document is valid for the products: M-230.xx DC-Mike Actuators M-231.17 DC-Mike Actuator M-235.xx DC-Mike Actuators Release: 3.00 Release Date: 2001-10-17 © PI PI (Physik Instrumente) GmbH & Co. 76228 Karlsruhe, Germany FAX: (+49)721-4846-100 EMail:[email protected] www.pi.ws
Transcript
  • U s e r M a n u a l

    MP 39E User Manual

    DC-Mike Actuators

    M-230 ... M-235 Series

    V 3.00

    Technical Documentation&

    User Instructions

    This document is valid for the products:

    M-230.xx DC-Mike ActuatorsM-231.17 DC-Mike ActuatorM-235.xx DC-Mike Actuators

    Release: 3.00Release Date: 2001-10-17

    © PIPI (Physik Instrumente) GmbH & Co.76228 Karlsruhe, Germany FAX: (+49)721-4846-100

    EMail:[email protected] www.pi.ws

  • PIPI Linear Positioning Actuators Operating Manual MP 39E

    Release 3.00 [email protected] Page 1

    Table of Contents :

    0. Manufacturer Declarations.............................................................. 2

    0.1. Declaration of Conformity ................................................................... 2

    0.2. Quality and Warranty Clauses ............................................................ 2

    1. Introduction...................................................................................... 3

    2. Model Survey.................................................................................... 3

    3. M-230.10, M-230.25 DC-Mike Actuators.......................................... 3

    3.1. Electrical Interface............................................................................... 4

    3.1.1. Pin Assignment for DC-Motor Types ................................................. 4

    3.1.2. Pin Assignment for Stepper Motor Types .......................................... 5

    3.2. M-230 and DC-Motor Controllers ........................................................ 6

    3.2.1. C-842 Parameters............................................................................. 6

    3.2.2. C-844 Parameters............................................................................. 6

    3.2.3. Mercury Parameters.......................................................................... 7

    3.3. M-230 Technical Data .......................................................................... 7

    3.4. M-230 Dimensions............................................................................... 8

    4. M-231.17 High Resolution DC-Mike Actuator ............................ 9

    4.1. General ................................................................................................. 9

    4.2. M-231 Technical Data ........................................................................ 10

    4.3. Dimensions M-231.17 ........................................................................ 11

    5. M-235 Series : Heavy Duty DC-Mike Actuators ........................... 12

    5.1. Model Survey...................................................................................... 12

    5.2. Technical Data ................................................................................... 13

    5.3. M-235.52S Linear Stepper Actuator .................................................. 14

    5.4. M-235 Electrical Interfaces ................................................................ 15

    5.4.1. M-235.DG and M-235.DD Pin Assignment ................................... 15

    5.4.2. M-235.52S Pin Assignment ............................................................. 15

    5.5. Motion Controller Setup .................................................................... 16

    5.5.1. C-842 Parameters........................................................................... 16

    5.5.2. C-844 Parameters........................................................................... 16

    5.5.3. Mercury Parameters........................................................................ 17

    5.6. Dimensions ........................................................................................ 18

    5.6.1. M-235.5DG, M-535.5DD.................................................................. 18

    5.6.2. M-535.52S ...................................................................................... 19

  • PIPI Linear Positioning Actuators Operating Manual MP 39E

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    © Copyright 2001 by PI (Physik Instrumente) GmbH

    Release: 3.00

    File:MP39E300.doc, 917504 Bytes

    PDate: 17.10.01 15:59

    MDate: Wednesday, 17. October 2001, 15:59

    0. Manufacturer Declarations

    0.1. Declaration of Conformity

    The manufacturer,

    PIPI (Physik Instrumente) GmbHAuf der Roemerstrasse 176228 Karlsruhe

    declares, that the products described in the operating manual comply with thesespecifications:

    EMC: EN55022 (1991), Group1, Class B

    EN50082-1 (1992) / IEC 801-2:1991 (4 kV Contact Discharge)(8 kV Air Discharge)

    EN50082-1 (1992) / IEC 801-3: 1984 (3V/m)

    EN50082-1 (1992) / IEC 801-4: 1988 (1 kV power lines, 0.5 kV Signal lines)

    Safety: IEC 1010-1:1990+A1 / EN61010-1:1993 (Low voltage Directive)

    The product complies with the requirements of the EMC Directive 89/336/EEC and CEmarkings have been affixed on the devices.

    0.2. Quality and Warranty Clauses

    CertificationPI (Physik Instrumente) certifies that this product met its published specifications at thetime of shipment.

    WarrantyThis PI product is warranted against defects in materials and workmanship for a period ofone year from date of shipment. Duration and conditions of warranty for this product maybe superseded when the product is integrated into (becomes a part of) other PI products.During the warranty period, PI will, at its option, either repair or replace products whichprove to be defective.

    Limitation of WarrantyThe foregoing warranty shall not apply to defects resulting from improper or inadequatemaintenance by the buyer, buyer supplied products or interfacing, unauthorisedmodification or misuse, operation outside of the environmental specifications for theproduct or improper site preparation.

    The design and implementation of any circuit in this product is the sole responsibility of theBuyer. PI PI does not warrant the buyer's circuitry or PI products malfunction that resultfrom the buyer's circuitry. In addition, PIPI does not warrant any damage that occurs as aresult of the buyer's circuit or any defects that result from buyer-supplied products.

    No other warranty is expressed or implied. Physik Instrumente specifically disclaimsthe implied warranties of merchantability and fitness for a particular purpose.

  • PIPI Linear Positioning Actuators Operating Manual MP 39E

    Release 3.00 [email protected] Page 3

    1. IntroductionPI DC-Mike Actuators are linear motion and positioning elements in a compactpackage including motor, transmission gear, position sensor and travel limitsensors. A wide range of actuators and suitable motion controllers are available tofit any possible application.

    Linear Actuators: M-235.5DG (50 mm, ball revolving spindle), M-230.25, M-230.10, (25, 10 mm, non rotating

    spindle), M-231.17 (stroke 17 mm).

    2. Model SurveyM-230.10 DC-Mike Actuator, DC-motor/gearhead, 10 mm travelM-230.25 DC-Mike Actuator, DC-motor/gearhead, 25 mm travelM-230.10S DC-Mike Actuator, stepper motor, 10 mm travelM-230.25S DC-Mike Actuator, stepper motor, 25 mm travelM-231.17 DC-Mike Actuator, DC-motor/gearhead, 17 mm travelM-235.5DG DC-Mike Actuator, DC-motor/gearhead, 50 mm travelM-235.5DD DC-Mike Actuator, DC-motor direct, 17 mm travelM-235.52S DC-Mike Actuator, stepper motor, 50 mm travel

    3. M-230.10, M-230.25 DC-Mike ActuatorsM-230 DC-Mikes are compact, ultra-high resolution linear actuators provide linearmotion up to 25 mm with sub-micron resolution in a compact package. Theyconsist of a micrometer with non-rotating tip driven by a closed-loop DCmotor/gearhead combination with motor shaft mounted high resolution encoder(2048 counts/rev.) or stepper motor/gearhead drive.

    M-230.25 and M-230.10 DC-Mike Actuators

    M-230 actuators feature an extremely low stiction/friction construction allowing forminimum incremental motion of 50 nanometers at speeds up to 1.5 mm/sec.

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    M-230 actuators include integrated non contacting Hall-Effect limit switches andreference sensors. Note that the reference sensor needs to be approached fromthe same side in order to get the same reference position.

    Each actuator includes an integral 0.5 m cable with 15 pin D-sub connector and a3 m extension cable. The connector features integrated line drivers for cablelengths up to 10 meters between actuator and controller.

    3.1. Electrical Interface

    3.1.1. Pin Assignment for DC-Motor Types

    Connector FunctionDsub15(m)1 internal use

    9 Motor ( - ) (input)

    2 Motor (+) (input)

    10 Power-GND

    3 internal use

    11 internal use

    4 + 5 V (in)

    12 negative Limit (output)

    5 positive Limit (output)

    13 Reference signal (output)

    6 Limit GND

    14 Encoder: A(+) / ENCA (output)

    7 Encoder: A( - ) (output)

    15 Encoder: B (+) / ENCB (output)

    8 Encoder: B ( - ) (output)

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    3.1.2. Pin Assignment for Stepper Motor Types

    Connector : Dsub15(m)

    Pin # Function

    1 phase 1a 9 phase 1b

    2 phase 2a10 phase 2b

    3 n.c.11 n.c.

    4 n.c.12 n.c.

    5 n.c.13 n.c.

    6 input: + 5 V supply from controller14 output: Positive end limit signal

    7 GND15 output: Position reference signal

    8 output: Negative end limit signal

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    3.2. M-230 and DC-Motor Controllers

    M-230 Actuators can be uses with the motor controllers C-842 (PC-card), C-844(desktop device) and C-860 (Mercury Controller).

    This table lists recommended values for servo-filter setting, velocity andacceleration. Depending on the current motor load and friction, the given valuesmay be modified for optimal performance.

    3.2.1. C-842 Parameters

    These parameters can be used with WinMove software and related Windows orDOS libraries.

    C-842 Parameter SettingsStage Type:

    Parameter:

    M-230.10 M-230.25

    p- term DP120 (range 50 to 200) DP120 (range 50 to 200)

    i- term DI20 (range 0 to 60) DI20 (range 0 to 60)

    d- term DD450 (range 0 to 800) DD450 (range 0 to 800)

    i- Limit DL2000 DL2000

    vff- term DF0 (range 0 to 1,000) DF0 (range 0 to 1,000)

    Acceleration SA320 (range 20 to 1,600) SA320 (range 20 to 1,600)

    Velocity SV180000 (range 1 to240,000)

    SV180000 (range 1 to240,000)

    Transmission-Ratio

    219.7504 c/µm 219.7504 c/µm

    3.2.2. C-844 Parameters

    C-844 Parameter SettingsStage Type:

    Parameter

    M-230.10 M-230.25"

    p-i-d terms PID 120,20,450range p : 50 to 200range i : 0 to 60range d : 0 to 800

    PID 120,20,450range p : 50 to 200range i : 0 to 60range d : 0 to 800

    i- Limit LIM:IERR 2000 LIM:IERR 2000

    vff- term VFF0 (range 0 to 1,000) VFF0 (range 0 to 1,000)

    Acceleration ACC 1200000 (range 1,000to 4,000,000)

    ACC 1200000 (range 1,000to 4,000,000)

    Velocity MVEL 180000 (range 1 to240,000)

    MVEL 180000 (range 1 to240,000)

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    3.2.3. Mercury Parameters

    C-860 Parameter SettingsStage Type:

    Parameter:

    M-230.10 M-230.25

    p- term DP120 (range 50 to 200) DP120 (range 50 to 200)

    i- term DI20 (range 0 to 60) DI20 (range 0 to 60)

    d- term DD450 (range 0 to 800) DD450 (range 0 to 800)

    i- Limit DL2000 DL2000

    vff- term DF0 (range 0 to 1,000) DF0 (range 0 to 1,000)

    Acceleration SA1200000 (range 50,000 to4,000,000)

    SA1200000 (range 50,000to 4,000,000)

    Velocity SV180000 (range 1 to240,000)

    SV180000 (range 1 to240,000)

    3.3. M-230 Technical Data

    M-230.10, M-230.25 Transmission Ratio: 219.7504 counts/µm

    Distance of positive to negative reference points: 180 to 200 µm

    Accuracy of uni-directional reference detection with C-842 controllers: 0.5 µm

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    3.4. M-230 Dimensions

    same dimension for DC- and stepper driven actuators

    Flat tip (included) Round tip (icluded)

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    4. M-231.17 High Resolution DC-Mike Actuator

    Features:

    § Extra high resolution

    § Closed Loop DC-Motor operation

    § 17 mm Travel Range

    § µm Minimum Incremental Motion

    § Velocity to 2.5 mm/sec.

    § Integrated Hall-Effect Limit Sensors

    § Fits M-105 & F-110 Fiber Aligners

    Applications

    Photonics packaging, fiber alignment, quality control, test equipment, metrology.

    4.1. General

    M-231 is an ultra-high resolution linear actuator providing linear motion up to 17mm with sub-micron resolution in a compact package. It consists of a lead screwdriven by a closed-loop DC motor/gearhead combination with motor shaft mountedhigh resolution encoder (2048 counts/rev.).

    M-231 was especially designed to fit your existing manual translation stages (e.g.M-105) and F-110 piezoelectric fiber alignment systems as a direct replacementfor a manual micrometer.

    M-231 on F-110 Piezoelectric M-231, Mounted on M-105 XYZFiber-Alignment System Positioning Systems

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    M-231 actuators provide a cost effective solution for industrial and OEMenvironments. They feature a low stiction/friction construction allowing forminimum incremental motion of 100 nanometers at speeds up to 2.5 mm/sec.

    To protect your investment, M-231 actuators include integrated non contactingHall-Effect limit switches. Each actuator includes an integral 0.5 m cable with 15pin D-sub connector and a 3 m extension cable. The connector features integratedline drivers for cable lengths up to 10 meters between actuator and controller.

    4.2. M-231 Technical Data

    Transmission Ratio: 145.63555328 c/µm

    Design Resolution: 0.00686645518 µm/c

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    4.3. Dimensions M-231.17

    Cable length: 500mm, 15pin(m) DSub connector with integrated line drivers. Pinassignment see page 4.

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    5. M-235 Series : Heavy Duty DC-Mike Actuators

    The M-235 series actuators are high resolution linear positioning actuators providingmotion of 50 mm with sub-micron resolution in a compact package.

    It consists of a preloaded ultra-low friction, heavy duty ballscrew driven by a closed-loop DC motor or stepper motor drive. The DC-motor drive is available with gear-heador as powerful direct drive. All drives utilizes shaft mounted high resolution encoder(2048 counts/rev.).

    M-235 actuators provide a cost effective solution for high duty industrial and OEMenvironments. They feature an extremely low stiction/friction construction allowing forminimum incremental motion of 50 nanometers at speeds up to 3 mm/sec.

    M-235 actuators include integrated non contacting Hall-Effect limit switches. Eachactuator includes an integral 0.5 m cable with 15 pin D-sub connector and a 3 mextension cable. The connector features integrated line drivers for cable lengths up to 10meters between actuator and controller.

    A screw-in ball tip and flat tip are included.

    5.1. Model Survey

    M-235.5DG Linear Actuator with 50mm travel and DC-motorgear head drive, 3 Wattmotor

    M-235.5DD Linear Actuator with 50mm travel and DC-motordirect drive, 16 Wattmotor

    M-235.52S Linear Actuator with 50mm travel and steppermotor, 2-phase

    Features:

    § 50 mm travel range

    § 0.05 µm incremental motion

    § less than 0.5 µm backlash

    § 120 N push/pull load

    § 100 N lateral load limit

    § Preloaded low friction ball screwwith non-rotating tip

    § Velocity to 3 mm/s

    § Closed-Loop DC motor

    § Hall-Effect limit sensors

    § Reference sensor

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    5.2. Technical Data

    Transmission ratios:

    M-235.5DG 60.706764 counts / µm

    M-235.5DD 2.0 counts / µm

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    5.3. M-235.52S Linear Stepper Actuator

    This actuator is equipped with a 2-phase stepper motor that drives the ballrevolving spindle via a flexible coupling. In conjunction with the high resolution C-600 Stepper Controller up to 20,000 microsteps per spindle revolution can beperformed.

    See also C-600 Stepper Motor Controller, used for positioning and 3-D pathcontrol, MS-69E User manual.

    Stepper Motor

    Motor Type: .............................................4H4009-L03-B (unipolar design)

    Operating Mode:......................................bipolar

    Max. current per winding: ........................1.2 A (unipolar), 0.8 A (bipolar)

    Winding resistance: .................................3.3 Ohm

    Torque:....................................................21 Ncm

    M-235.52S Linear Stepper Actuator

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    5.4. M-235 Electrical Interfaces

    5.4.1. M-235.DG and M-235.DD Pin Assignment

    Connector FunctionD-sub15(m)

    1 internal use

    9 Motor ( - ) (input)2 Motor (+) (input)

    10 Power-GND3 internal use

    11 internal use4 + 5 V (input)

    12 negative Limit (output)5 positive Limit (output)

    13 Reference Sensor (output)

    6 Limit GND14 Encoder: A(+) / ENCA (output)

    7 Encoder: A( - ) (output)15 Encoder: B (+) / ENCB (output)

    8 Encoder: B ( - ) (output)

    5.4.2. M-235.52S Pin Assignment

    Connector type: D-sub15(m)

    Pin # Function

    1 phase 1a 9 phase 1b

    2 phase 2a10 phase 2b

    3 n.c.11 n.c.

    4 n.c.12 n.c.

    5 n.c.13 n.c.

    6 input: + 5 V supply from controller14 output: Positive end limit signal

    7 GND15 output: Position reference signal

    8 output: Negative end limit signal

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    5.5. Motion Controller Setup

    M-235.5DG Actuators can be uses with all DC-Motor controllers.

    Some restrictions limit the operation of the M-235.5DD actuator due to its motorpower of 16 Watt. This can be handled by the Mercury controller. With the C-844and the C-842 an external power amplifier is recommended and with the C-842card an external amplifier (see C-842.AP1) is needed.

    5.5.1. C-842 Parameters

    These parameters can be used with WinMove software and related Windows orDOS libraries.

    C-842 Parameter SettingsStage Type:

    Parameter:

    M-235.5DG M-235.5DD

    (requires C-842.AP1Amplifier Module)

    p- term DP320 (range 150 to 350)

    i- term DI30 (range 0 to 60)

    d- term DD500 (range 0 to 1,200)

    i- Limit DL2000

    vff- term DF0 (range 0 to 2,500)

    Acceleration SA240 (range 20 to 350)

    Velocity SV90000 (range 1 to100,000)

    5.5.2. C-844 Parameters

    C-844 Parameter SettingsStage Type:

    Parameter

    M-235.5DG M-235.5DD"

    p-i-d terms PID 320,30,500range p : 150 to 350range i : 0 to 60range d : 0 to 1,200

    i- Limit LIM:IERR 2000

    vff- term VFF0 (range 0 to 2,000)

    Acceleration ACC 600000 (range 1,000 to900,000)

    Velocity MVEL 90000 (range 1 to100,000)

  • PIPI Linear Positioning Actuators Operating Manual MP 39E

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    5.5.3. Mercury Parameters

    C-860 Parameter SettingsStage Type:

    Parameter:

    M-235.5DG M-235.5DD

    p- term DP320 (range 150 to 350) DP280 (range 150 to 350)

    i- term DI30 (range 0 to 60) DI15 (range 0 to 50)

    d- term DD500 (range 0 to 1,200) DD500 (range 0 to 800)

    i- Limit DL2000 DL2000

    vff- term DF0 (range 0 to 2,500) DF0 (range 0 to 2,000)

    Acceleration SA600000 (range 1000 to1,200,000)

    SA150000 (range 1,000 to200,000)

    Velocity SV90000 (range 1 to100,000)

    SV45000 (range 1 to50,000)

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    5.6. Dimensions

    All dimensions are given in mm

    5.6.1. M-235.5DG, M-535.5DD

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    5.6.2. M-535.52S


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