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1 Managed by UT-Battelle for the U.S. Department of Energy This presentation does not contain any proprietary or confidential information Zhenxian Liang, Fred Wang, Laura Marlino Organization: ORNL Email: [email protected] Phone: 865-946-1467 APEC 2012, Industry Session 2.3 February 8, 2012 Development of Packaging Technologies for Advanced Automotive Power Module
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Page 1: Development of Packaging Technologies for Advanced ...€¦ · This presentation does not contain any proprietary or confidential information Zhenxian Liang, Fred Wang, Laura Marlino

1 Managed by UT-Battelle for the U.S. Department of Energy

This presentation does not contain any

proprietary or confidential information

Zhenxian Liang, Fred Wang, Laura Marlino

Organization: ORNL

Email: [email protected]

Phone: 865-946-1467

APEC 2012, Industry Session 2.3 February 8, 2012

Development of Packaging Technologies for Advanced Automotive Power Module

Page 2: Development of Packaging Technologies for Advanced ...€¦ · This presentation does not contain any proprietary or confidential information Zhenxian Liang, Fred Wang, Laura Marlino

2 Managed by UT-Battelle for the U.S. Department of Energy

APEEM Components are Critical and Unique to Electric Drive Vehicles

Traction Drive Components (varies with vehicle architectures)

Battery charger – necessary for plug-in and all electric vehicles.

Bi directional boost converter – steps up the battery voltage to a higher level when the traction system requires a higher operating voltage than the battery can supply.

Inverter – converts direct current (DC) to alternating current (AC) to provide phased power for vehicle traction machines.

Electric motor – provides power for driving.

Power Management (varies within vehicle architectures)

DC-DC converter – steps down the high battery voltage to provide auxiliary power busses to operate accessories, lighting, air conditioning, brake assist, power steering, etc.

HV

Battery

(200–450 V DC)

Torque

to

Drive

Wheels

120 V AC

Battery

Charger

Bi-directional

Converter

Electric

Motor

Inverter

DC-DC

Converter

Accessory

Loads

Page 3: Development of Packaging Technologies for Advanced ...€¦ · This presentation does not contain any proprietary or confidential information Zhenxian Liang, Fred Wang, Laura Marlino

3 Managed by UT-Battelle for the U.S. Department of Energy

Challenges for Power Electronics In HEVs/PHEVs/BEVs

Performance (Electrical, Thermal)

Density (per volume/weight)

Cost ($/kW)

Reliability (Thermo-mechanical)

Current power electronics and electric machine technologies must advance to achieve lower cost, smaller and lighter footprints, and higher efficiency to meet marketplace demands.

http://www.motortrend.com/oftheyear/car/1201_2012_motor_trend_car_of_the_year_contenders_

and_finalists/photo_255.html

http://alternativefuels.about.com/od/2010hybridreviews/ig/2010-Toyota-Prius-photos.-

6Hz/2010-Prius-Gen2-Gen3-inverter.htm

Functions (Intelligence)

Page 4: Development of Packaging Technologies for Advanced ...€¦ · This presentation does not contain any proprietary or confidential information Zhenxian Liang, Fred Wang, Laura Marlino

4 Managed by UT-Battelle for the U.S. Department of Energy

Automotive Power Module Assembly

Power Semiconductors

Electrical Interconnection

Thermal Management

Mechanical Support

http://www.mitsubishielectric.com/news/2011/

0407.html

Infineon HybridPack1 Module

Mitsubishi TPM Module

Toyota Prius’III Module

Page 5: Development of Packaging Technologies for Advanced ...€¦ · This presentation does not contain any proprietary or confidential information Zhenxian Liang, Fred Wang, Laura Marlino

5 Managed by UT-Battelle for the U.S. Department of Energy

Automotive Power Module: Cost Estimation

IGBT die

FWD die Substrate

DBC Die attach

Top Connection

Base Plate Substrate

Attach

Encapsulate

I/O terminal, House

Manufacture Cost

Semiconductor Cost

Packaging Manufacture

Tree Structure for Power Module Cost Modeling

Power Module

Manufacture

Material &

Consumption:

Cleaner;

Utilities

Process:

Soldering I&II,

Cleaning Wire

bonding, gel

filling & Curing,

Assembling

House/ Frame

IGBT Die

FWD Die

DBC Substrate

Base Plate

Bolt/glue

Cover

Substrate Attach

Die Attach

Encapsualate

Wire Bond

Page 6: Development of Packaging Technologies for Advanced ...€¦ · This presentation does not contain any proprietary or confidential information Zhenxian Liang, Fred Wang, Laura Marlino

6 Managed by UT-Battelle for the U.S. Department of Energy

IGBT Die

Area_Cost

Delta T_

Reliability

Power Loss_

Efficiency

Semiconductor Characterization

Vce=V0+r*J=V0+r*(I/S)

Edswitching=u*J2+w*J

Thermal Characterization

Sja *

Reliability Characterization

B

fTj

ATjN )()(

Electrical Characterization

Lp, Rp

0 100 200 300 400 500 600 7000

50

100

150

200

250

300

Time(S)

Curr

ent(

A)

An Inverter Input Current Profile Under US06 Drive Cycle

Drive Cycle

IGBT Die

area

ORNL Power Module Evaluation

Program

Delta T

Automotive Power Module: Comprehensive Design

Page 7: Development of Packaging Technologies for Advanced ...€¦ · This presentation does not contain any proprietary or confidential information Zhenxian Liang, Fred Wang, Laura Marlino

7 Managed by UT-Battelle for the U.S. Department of Energy

Development of Power Module Packaging Technologies

High Temperature Robustness

High Electrical Efficiency

Cost Effective Manufacturability

Highly Efficient Cooling

HT Material Integrity

High-melting bonding; Inorganic

encapsulate;

Nano Electrical and Thermal materials

CTE Matching

CTE modified Materials;

Structure/buffer optimization

Structural Optimization

Optimized Electrical Interconnection;

Integrated cooling and advanced

mechanism

Processing Advance

Reflowing, Brazing /Sintering, Transient

liquid phase bonding, thermal press

bonding, deposition, etc.

Page 8: Development of Packaging Technologies for Advanced ...€¦ · This presentation does not contain any proprietary or confidential information Zhenxian Liang, Fred Wang, Laura Marlino

8 Managed by UT-Battelle for the U.S. Department of Energy

ToyotaPrius10_OneDie

ToyotaPrius10_TwoDie

InfineonHP1 NissanLeaf

Thermal Resitance (C/W) 0.43 0.22 0.27 0.31

Die area (10xcm2) 0.11 0.22 0.20 0.17

Specific Thermal resitance (Cm2.C/W)

0.47 0.49 0.54 0.52

0

0.1

0.2

0.3

0.4

0.5

0.6

Thermal Resistance

Comparison

Power Module: Thermal Characterization

1.0E-3

1.0E-2

1.0E-1

1.0E+0

1.0E+1

0 1 2 3 4 5 6

Th

erm

al T

ime

Co

ns

tan

t (S

)

Order Number

Prius_One_die

Prius_two_die

Infineon HP1

Page 9: Development of Packaging Technologies for Advanced ...€¦ · This presentation does not contain any proprietary or confidential information Zhenxian Liang, Fred Wang, Laura Marlino

9 Managed by UT-Battelle for the U.S. Department of Energy

0.44 mΩ

11.3 nH14.4 nH

Positive

7 mΩ19.6 nH

Negative

Neutral

7 mΩ19.6 nH

0.33 mΩ

0.17 mΩ0.18 mΩ

7.3 nH 6.5 nH

0.44 mΩ

11.3 nH14.4 nH

0.33 mΩ

0.17 mΩ0.18 mΩ

7.3 nH 6.5 nH

Power Module: Electrical Characterization

0

50

100

150

200

250

300

350

400

0 0.5 1 1.5 2 2.5

Ice (

A)

Vce (V)

IGBT I-V Curve

P-side S-side

0

100

200

300

400

500

0

50

100

150

200

250

0 200 400 600 800 1000 1200

Vo

ltag

e (

V)

Cu

rren

t (A

)

Time (nS)

Ice

Vce (S-Side)

Vce (P-Side)

IGBT Switching Curve

Page 10: Development of Packaging Technologies for Advanced ...€¦ · This presentation does not contain any proprietary or confidential information Zhenxian Liang, Fred Wang, Laura Marlino

10 Managed by UT-Battelle for the U.S. Department of Energy

Patent Pending: serial number 61/509312

ORNL Planar Bond Automotive Power Module

Power Semiconductors stage

Integrated Advanced

Cooler

Integrated Advanced Cooler

Integrated Planar Bond Power Module

Planar Bond Power Stage Electrical Connection

Page 11: Development of Packaging Technologies for Advanced ...€¦ · This presentation does not contain any proprietary or confidential information Zhenxian Liang, Fred Wang, Laura Marlino

11 Managed by UT-Battelle for the U.S. Department of Energy

Patent Pending: serial number 61/509312

Planar_Bond_All

Planar Bond Module Packaging: Manufacturability

Wire Bond Packaging

1 Substrate Preparation

3 Substrate Attach

2 Die Attach 4 Terminal Frame Attach

5 Wire Bond 6 Encapsulate 7 assembly

Page 12: Development of Packaging Technologies for Advanced ...€¦ · This presentation does not contain any proprietary or confidential information Zhenxian Liang, Fred Wang, Laura Marlino

12 Managed by UT-Battelle for the U.S. Department of Energy

Planar Bond Module: Electrical Performance Simulation

-400 -200 0 200 400 0

100

200

300

400

500

Time (ns)

Ice

(A

), V

ce

(V

), P

(W

/0.0

03

), E

mJ

/15

)

Ice Vce

Eoff

Poff

ToyotaPrius10 PlanarBondAll

Lp (nH) 50.3 12.8

Rp (0.1xmOhmic)

23.5 2.2

0

10

20

30

40

50

60

Electrical Parameters

Comparison

-600 -400 -200 0 200 400 600 0

50

100

150

200

250

300

350

400

450

500

Time (nS)

Vc

e(V

)

L:

45nH

30nH

20nH

15nH

10nH

5nH

Page 13: Development of Packaging Technologies for Advanced ...€¦ · This presentation does not contain any proprietary or confidential information Zhenxian Liang, Fred Wang, Laura Marlino

13 Managed by UT-Battelle for the U.S. Department of Energy

Inductance (nH) Experimental Value Calculated Value

Planar Bond_Lower IGBT 10.5 6.3

Wire Bond-Lower IGBT 31.9 23.5

0 100 200 300 400 500 600 0

20

40

60

80

100

120

140

160

180

Time(S)

Po

we

r L

os

s (

W)

Rp=0.22m, P=1.030W

Rp=2.35m, P=11.08W

Planar Bond Module: Electrical Experiments and Effects

10

15

20

25

0 20 40 60 80

Eo

ff (

mJ)

Parasitic Inductance (nH)

X

X

Lp=10.5nH, Eoff=15.6mJ

Lp=31.9nH, Eoff=17.2mJ

0

50

100

150

200

250

300

350

400

450

500

0

20

40

60

80

100

120

140

160

180

200

0 500 1000 1500 2000

Vo

ltag

e (

V)

Cu

rren

t (A

)

Time (nS)

Vce(WB)=156V

Vce(PB)=72V

Ice Vce

Page 14: Development of Packaging Technologies for Advanced ...€¦ · This presentation does not contain any proprietary or confidential information Zhenxian Liang, Fred Wang, Laura Marlino

14 Managed by UT-Battelle for the U.S. Department of Energy

Planar Bond Power Module: Thermal Performance Simulation

3-D Thermal Model of power

module with Cooler

IGBT, Diode Power loss;

Coolant flow rate;

Pressure Drop;

Coolant inlet temperature;

Single- or Double-sided cooling.

Page 15: Development of Packaging Technologies for Advanced ...€¦ · This presentation does not contain any proprietary or confidential information Zhenxian Liang, Fred Wang, Laura Marlino

15 Managed by UT-Battelle for the U.S. Department of Energy

)(

$ ,

aj

spjaAreaDie

TTP

S

kW

Planar Bond Module: Thermal Performance Measurement Comparison and Effects

NissanLeaf ToyotaPrius10 PlanarBondAll

Specific Thermal resitance (Cm2.C/W)

0.52 0.471 0.334

0

0.1

0.2

0.3

0.4

0.5

0.6

Thermal Resistance

Comparison

Cost= Die size (S) * $/unit area

Page 16: Development of Packaging Technologies for Advanced ...€¦ · This presentation does not contain any proprietary or confidential information Zhenxian Liang, Fred Wang, Laura Marlino

16 Managed by UT-Battelle for the U.S. Department of Energy

Si IGBT Characterization and Evaluation at 200˚C

fs=10kHz

fs=15kHz

fs=10kHz

fs=5kHz

Rthja=0.73K/W

Rthja=0.86K/W

Rthja=1.04K/W

Losses in one phase leg IGBT thermal runaway analysis

Hot plate

Nondestructive SOA Test Latch-up current test at 250˚C

Coolant temperature: 105˚C

Total loss curve

Power

dissipation line

20 40 60 80 100 120 140 160 180 200 0

20

40

60

80

100

120

140

Junction temperature

IGB

T P

ow

er

Lo

ss

Page 17: Development of Packaging Technologies for Advanced ...€¦ · This presentation does not contain any proprietary or confidential information Zhenxian Liang, Fred Wang, Laura Marlino

17 Managed by UT-Battelle for the U.S. Department of Energy

105˚C water/ethylene glycol

Layout Design

High Temperature Device Packaging Development

90˚C transmission oil

High temperature phase-leg

module prototype

Page 18: Development of Packaging Technologies for Advanced ...€¦ · This presentation does not contain any proprietary or confidential information Zhenxian Liang, Fred Wang, Laura Marlino

18 Managed by UT-Battelle for the U.S. Department of Energy

Ag Sintering Development for High Temperature packaging

Ag Bonded DBC Substrates

Bond Line View After Tear Down

Cross sectional View of Bond Line

Bond Strength vs. Topography

Page 19: Development of Packaging Technologies for Advanced ...€¦ · This presentation does not contain any proprietary or confidential information Zhenxian Liang, Fred Wang, Laura Marlino

19 Managed by UT-Battelle for the U.S. Department of Energy

Summary and Future Work

Developed power module packaging technologies, focusing on

improvements in performance, reliability and cost effectiveness

through structure optimization, material and processing

developments.

A planar power module prototype features low electric parasitics

and thermal resistance. Additionally, the package allows for ease

of fabrication and low manufacturing costs.

Further research into thermo-mechanical properties needed to

assure the reliability of power electronics in automotive harsh

environments.

Develop advanced structure/material/process schemes for high

temperature and high frequency operation of Si and wideband gap

(SiC, GaN) power devices to advance HEV and EV technologies.

Page 20: Development of Packaging Technologies for Advanced ...€¦ · This presentation does not contain any proprietary or confidential information Zhenxian Liang, Fred Wang, Laura Marlino

20 Managed by UT-Battelle for the U.S. Department of Energy

Acknowledgement

Thanks And Questions?

The automotive power electronics packaging work has been primarily supported by DOE under Vehicle Technologies Program. The authors would also like to thank their colleagues, Puqi Ning, Andrew A. Wereszczak, Randy Wiles, all with ORNL for the contribution to this presentation


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