Qiushi Huang, Zhenxiang Shen, Bin Ma, ZhongZhang, Kun Wang, Hongfei Jiao, Xiaoqiang Wang,
Zhanshan Wang
Key Laboratory of Advanced Micro-Structured Materials MOE Institute of Precision Optics and Engineering (IPOE)
Tongji University
Development of SFA optics and
focusing system
Institute of Precision Optics and Engineering (IPOE), Tongji University
ZL Lg
r
Primary Secondary
O
f
N
N+1θN
rN
t
RN
E= 0.5-10keV
- f=4.5m, ɸ=100-450mm
- N=176
Angular reso. =1 arcmin
…
…
SFA modules for eXTP
Institute of Precision Optics and Engineering (IPOE), Tongji University
ZL Lg
r
Primary Secondary
O
f
N
N+1θN
rN
t
RN
Development process for X-ray telescope
Optical design Hot Slumping glass Coating
Assembly
Prototype
measurement
Institute of Precision Optics and Engineering (IPOE), Tongji University
1st prototype in March, 2016
F=4m
Ø=170mm
5 shells
60 mirrors primary+secondary
Pt coating
0.3 mm thickness
National Astronomical Observatory of China
…
4m 13.5m source
Institute of Precision Optics and Engineering (IPOE), Tongji University
1st prototype in March, 2016
Co
un
ts
1D PSF
Pencil beam
measurement
HPD =~ 3’ x
y
1. Optical design 2. Slumping glass 3. Coatings 4. Assembly
Institute of Precision Optics and Engineering (IPOE), Tongji University
Institute of Precision Optics and Engineering (IPOE), Tongji University
Coating design for 1-10keV
Pt, C layers θ = 0.16~0.71deg
N=176
Ø =100mm~450mm
f=4.5m
Mirror length= 100mm
0 2 4 6 8 10 12 14 16 18 20
0
100
200
300
400
500
600
700
800
900
0': EA=601cm2@6keV
Eff
ective
are
a (
cm
2)
Energy (keV)
on axis
2'
4'
6'
8'
10'
8': EA=326cm2@6keV
With Block
Institute of Precision Optics and Engineering (IPOE), Tongji University
Focal spot off axis
Focal spot position shift with
off-axis incidence
Off axis
Spot deviation (mm)
HPD（6keV）
With block
0’ 0 17.68’’
4’ 5.2993 14.45”
8’ 10.6017 11.98”
10’ 13.2529 11.64”
Stray light
Incident beam reflected by only primary or secondary mirror:
0’ R=1
4’ R=1
4’ R=1
40x40mm
Detector size
8’ R=1
8’ R=1
Institute of Precision Optics and Engineering (IPOE), Tongji University
Institute of Precision Optics and Engineering (IPOE), Tongji University
1. Optical design 2. Slumping glass 3. Coatings 4. Assembly
Institute of Precision Optics and Engineering (IPOE), Tongji University
Slumping glass optics (SGO)
High accuracy metrology Low frequency
Low frequency
mid frequency
High frequency
Institute of Precision Optics and Engineering (IPOE), Tongji University
Improved mandrel
Measure and reduce surface
contamination
Improved slumping process
Rms=0.31-0.38 nm
Best mirror
HPD=49”
New slumping results
50X, Rms= 0.468nm
Institute of Precision Optics and Engineering (IPOE), Tongji University
Mirror quality-HPD (arcsec)
Num
ber
of
gla
sses
New slumping results
Improvement of
Free-standing
mirrors !
March 2016
January 2017
130”-240”
60”-110”
Institute of Precision Optics and Engineering (IPOE), Tongji University
Institute of Precision Optics and Engineering (IPOE), Tongji University
1. Optical design 2. Slumping glass 3. Coatings 4. Assembly
Institute of Precision Optics and Engineering (IPOE), Tongji University
Cylindrical Magnetron Sputtering Coater for eXTP
Deposition on slumping glass,
or deposition on cylindrical glass mandrel
Coating facility
Institute of Precision Optics and Engineering (IPOE), Tongji University
Grazing incidence X-ray measurement
0.0 0.5 1.0 1.5 2.0 2.51
10
100
1000
10000
100000S-1_GA_0.37d_mid_D263 substrate
Inte
nsity (
cp
s)
Theta (deg)
measured
fit
σ=0.35-0.5 nm
(unoptimized)
thickness uniformity < 8%
New thin film coatings
Institute of Precision Optics and Engineering (IPOE), Tongji University
RMS=0.37 nm RMS=0.32 nm
Roughness & stress measurement
-0.07 wave -0.21 wave
before after
f
s
s
s
prepostf
t
t
V
E
RR
2
)1
)(11
(6
1
-530~-560MPa
Roughness
Stress
1. Optical design 2. Slumping glass 3. Coatings 4. Assembly
Integration method
Assembly and Integration of telescope
The tilt spindle combined with dish wheel to grind the conic surface
Institute of Precision Optics and Engineering (IPOE), Tongji University
• Reconstruction of surface figure
of the telescope prototype • The ideal surface figure
Development of ray-tracing program
Institute of Precision Optics and Engineering (IPOE), Tongji University
The calculated HPD performance of each mirror using the ray-tracing
program with the measurement data.
Evaluation of the optics performance with metrology data
Institute of Precision Optics and Engineering (IPOE), Tongji University
Simulated focusing performance of the prototype is 162 arcsec.
Consistent with the measured result.
Evaluation of the prototype performance
Institute of Precision Optics and Engineering (IPOE), Tongji University
Average assembly error is ~99.6”, need to decrease to 40”.
Evaluation of assembly error
Institute of Precision Optics and Engineering (IPOE), Tongji University
Mirror quality-HPD (arcsec)
Num
ber
of gla
sses
Institute of Precision Optics and Engineering (IPOE), Tongji University
Current assembly
(100”)
Further optimized
assembly … (40”)
To achieve 1 arcmin …
Institute of Precision Optical Engineering
Conclusion
1st prototype HPD=~3’
Moving forward to 1 arcmin !
Current level ~2’
Thank you for your attention !
Institute of Precision Optics and Engineering (IPOE), Tongji University
