Diamond Detectors

Diamond Detectors Ltd



Diamond DetectorsIntroduction to DDLFacilities / InvestmentsMarkets / Applications Partnerships / ProjectsDDL Proprietary Contact Technology

22 April 2023 1Diamond Detectors Limited

Alex Brown Sales & Marketing









22 April 2023 Diamond Detectors Limited 3

June 2007, DDL Moves into new office, Poole, Dorset

2008, BAE systems acquires 50% share in DDL

Press release Thursday 3rd May 2007“Element Six Spins Out New Company to Develop Diamond Detectors…….

Introduction to DDL









Facilities / Investments


FacilitiesDiamond Lab

Laser LabChemistry Lab

Lithography and Assembly Clean rooms. (class 1000 & 10000)

Design Suite

ExpertiseMaterial Processing

Lapping & Polishing ProcessesLaser Dicing & Shaping

Metallization (e.g. Ti, Pt, Au, Al..)Neutron Scintillation Coating 6LiF

Lithography (sandwich,strips,pixels)Die Fabrication and Test

Die/Wire Bonding.Packaging

Characterisation.Electronics Development

“From Concept through Design & Prototype to Manufacture”




Manufactured DevicesConcept - Design







Laser cutting, dicing & sputtering system

Qua

zer L

aser

Dici

ng

Mag

netr

on S

putt

erin

g

Device Fabrication

Lapping, Polishing and Semi-automatic scaife

Opti

cal P

rofil

er N

T910

0

Sem

i Aut

omati

c Sca

ife

MetallisationSp

utter

ing

& E

-Bea

m

Evap

orati

on &

Mill

ing

Wire Bonding (Strip Detector)

Univ

ersa

l wed

ge b

onde

r (K

&S

4523

)

Dage

400

0 W

ire b

ond

pull

test

er

Alum

iniu

m &

Gol

d w

edge

and

ba

ll w

ire b

ondi

ng

ball

bond

ing

(K&

S 41

24)






Typical process specifications :-Polycrystalline standard polish Ra < 20nmPolycrystalline detector polish Ra < 12nm Polycrystalline Super polish Ra < 5nmSingle crystal detector polish Ra < 1nm

Characterisation






2009 updateLicensed CAT-5 site (Sr-90 37MBq)Alpha, Beta, Gamma and X-ray sourcesDicing technique permits two 100 micron plates from single crystalScaifing specialist improves single crystal polishing – polishing lines removedLaser Shaping, Dicing & Vacuum sputtering (including ion beam polishing) teething problems (equipment failures) resolvedNew Jigs & Fixtures

2010 plansQ1, automated ccd measurement capabilityYield improvement on 50 and 100 micron plates enables standard pricingBatch production of standard productsTeething issues with new equipment resolved – increases rate of development1 micron lithography tools under evaluation(or 120k budgeted for spray coater)Develop techniques to hold diamond during scaife

Manufacturing 2009 update / 2010 plans

2009 - under-resourced, equipment issues (largely addressed), yield issues, significant investments, increase in capabilities2010 – yield improvements, significant investments, standard products, increase in capabilities




Intrinsic single crystalIntrinsic Polycrystalline










High Tech Application of Diamond

Diamond Detectors focus includes... Diamond Wide Band Gap Detectors. (solid state

ionizing chamber) Diamond Sensors (Electro-chemical and Bio

applications)




HEPRadiation detectors employed in beam lines and other applications with synchrotrons, colliders and cyclotrons. Also used in satellite and stellar instrumentation

Applications for CVD Diamond

Neutron & α detection

Radiotherapy, particles and x-ray

Beam monitoring & diagnostics

Precision tracking (inner layer) LHC / SLHC

TOF

Energy resolution

Beam positioning

Heavy ion



DDL’s CVD Diamond detectors with CAEN electronic solutions:

A422ACharge Sensitive

Preamplifier

DT5724 4 Channel 14 bit 100 MS/s Digitizer

N1470 4 Channel

Programmable

NIM HV Power Supply

Electronic Instrumentation forDDL’s CVD Diamond Detector

DT5724Digitizer

A422APreamplifier

Out

USB 2.0

Trig/Gate

N1470HV

Power Supply

Waveform Digitizer

Running DPP Trapezoidal shapingSource 210Po

Diamonddetector

In In




MedicalExample Application of Example Application of EL SC CVD Diamond:EL SC CVD Diamond:

Before treatment of patient:

• Dummy run with detector• Detector placed in tissue equivalent material to assess beam profile• Detector must be moved several times to collect enough information - an array of detectors would be ideal

Treatment:• Patient typically receives 3 treatments, each from a different angle of entry

Intensity Modulated Intensity Modulated Radiation TherapyRadiation Therapy

Courtesy of Scanditronix

Focussed PhotonBeam Profile




Nuclear Applications

Applications for CVD Diamond

α / β in air

α spectroscopy

α / β contamination

Neutron

X-Ray

Solid State Ion Chamber

X-ray, Alpha, Beta, Gamma and Neutron radiation detectors for dose / spectroscopy applications in nuclear power and reprocessing plants




Oil & GasPolycrystalline & Single-Crystal Solid-State Ionizing ChambersDiamond with its wide band gap (5.47ev) and resilient properties makes it an ideal choice for applications working in hostile environments. As a wide band gap semi-conductor the material can operate at elevated temperature and in high pressure, high vibration environments

Solid State /Ionizing Chamber & Electrode / Electro-Chemical properties High temperature operation (>>300C, negligible dark current pA scale) Extremely low leakage or background currents. High electron and hole motilities (fast operation in counting modes) High break down. High thermal conductivity Radiation hard. Solar blind (response to deep UV, soft and hard x-rays, particles and

neutrons) Tissue equivalent dose measurement (low Z =6) Spectroscopic measurements (with single crystal) Chemical inertness. Wide electro-chemical window Bio-compatible (non-fouling) Mechanical hardness



Mike Bentley, York University , (Fair beamline Instrumentation)

Richard Hugtenburg, Swansea University, (Medical Dosimeters)

Prof. Peter Winlove, Exeter University, (Knowledge Transfer Program for diamond based bio/chemical sensors)

Japp Velthuis, Bristol University, (RD42 member) Case Studentship for GHz fast counting applications in Civil Nuclear and Particle Therapy

Darren Caruana, UCL, BDD electrodes for pollen identification and counting

Various industrial partners across the DDL markets


Projects









DDL Proprietary Contact Technology

Mechanical AdhesionSpecifically, the mechanical adhesion of the metal chosen as electrode on the diamond surface. A flatter smoother surface presents fewer adhesion points. When a metal is thermally evaporated on diamond it may not adhere and it could peel off after a short period of time with the consequent deterioration of the electrical signal measured and therefore a decrease in the lifetime of the device. Mechanical adhesion is a function of the diamond / contact interface.

Polarization EffectsPolarization phenomena occur when electric currents pass through diamond if the electrical contact is not able to extract and inject electrons fast enough. In this case, the neutrality of the crystal after the passage of ionizing nuclear radiations is not restored in the time interval between two consecutive events. As a result, charge accumulation occurs within the crystal and immobile carriers establish an electric field which acts in a direction opposite to the applied field produced by the external bias voltage V. The minimisation of polarization effects requires optimal injecting contacts.

Repeatable ResultsIf a device is to be commercially viable it should be consistent and stable in a variety of environmental conditions. Requires stable and resilient contacts.

Historically, there have been three main approaches to fabricate good electrical contacts on diamond:1. Damaging the diamond surface in order to disrupt the sp3 bonding.2. Using carbide forming metals like titanium or chromium to create a hybrid metal-diamond interface material .3. Doping of diamond during growth or using ion implantation.For example, to prepare good injecting contacts, several metals were used by Kozlov et al., for hole injection they used Ag, Au, Pt or C deposition, aluminium or boron implantation, for electron injection P, Li or C.

Diamond Detectors Limited (DDL) has patented an innovative metallization technique to maximize CVD diamond performance. Here we seek to highlight the issues and describe the solution.The development of CVD Diamond has made possible many new applications for detecting and sensing. However, manufacturing semiconductor devices in diamond present some interesting challenges due to diamond’s unique characteristics. Traditional or inadequate contact fabrication may result in poor mechanical adhesion, polarization effects and unrepeatable results.

Metallization (Electrical Contact Fabrication on CVD Diamond)

Galbiati et al. IEEE TNS VOL 56 N 4 AUGUST 2009 p1863




DDL Proprietary Contact TechnologyMetallization (Electrical Contact Fabrication on CVD Diamond)



22


DDLs solutionTo address the polarization issues mentioned above and to provide a method for forming an ohmic electrode that is also durable and stable for applications in diamond radiation detectors and diamond electronics, Diamond Detectors Ltd have developed and tested an innovative electrical contact using a very thin diamond like carbon layer. Diamond-like carbon (DLC) is a form of amorphous carbon between diamond and graphite, containing significant portion of sp3 bonded atoms in the matrix. DLC films can be grown when carbon is deposited under energetic (~10-100eV) bombardment, where the instantaneous local high temperature and pressure induce a proportion of carbon atoms to bond as diamond. The conditions for DLC deposition are obtained during a variety of methods, including CVD, laser ablation, magnetron sputtering, cathodic arc, and ion beam deposition.This innovative contact consists of a very thin (1-3 nm) diamond-like carbon film which is formed on a diamond substrate by means of Argon magnetron sputtering from a carbon target. The very thin DLC layer allows for the injection of both holes and electrons in the diamond substrate. Also, the DLC layer becomes a seed for the sputter deposition of high work function noble metals (Pt, Au) which allow metals to cohere to the diamond surface. As platinum and gold have a higher work function than diamond this permits electrons present at the diamond surface to be driven towards the noble metals via quantum mechanical tunnelling through the thin DLC layer acting as a quantum mechanical tunnelling junction.

DDL’s patented metallization technique provides a manufacturable, high adherence diamond / contact interface with minimal polarization effect while maximizing stability and contact resilience.

Metallization (Electrical Contact Fabrication on CVD Diamond)




23


Dark Current Characteristics




REFERENCES:

Bergonzo et al., Diamond and Related Materials, Volume 10, Issues 3-7, March-July (2001), 631-638

J.H. Kaneko et al. / Nuclear Instruments and Methods in Physics Research A 505 (2003) 187–190

Pomorski et al., Phys. Stat. Sol. (a) 202, No. 11 (2005)

Gianluca Verona-Rinati “Single crystal CVD diamond neutron detectors in a p-type/intrinsic/metal layered structure” , http://www-norhdia.gsi.de/talks/4th/G_Verona-Rinati.pdf

Galbiati et al. “Performance of Monocrystalline Diamond Radiation Detectors Fabricated Using TiW, Cr/Au and a Novel Ohmic DLC/Pt/Au Electrical Contact” IEEE TNS VOL 56 N 4 AUGUST 2009 p1863

Angelone et al.: “NEUTRON DETECTORS BASED UPON ARTIFICIAL SINGLE CRYSTAL DIAMOND” IEEE TRANSACTIONS ON NUCLEAR SCIENCE, VOL. 56, NO. 4, AUGUST 2009 pp.2275-2279

Almaviva et al.: “Thermal and fast neutron detection in chemical vapor depositionsingle-crystal diamond detectors” J. Appl. Phys. 103, 054501 2008

G.J. Schmid et al. “A neutron sensor based on single crystal CVD diamond”, Nuclear Instruments and Methods in Physics Research A 527 (2004) 554–561

M. Pillon, M. Angelone, A.V. Krasilnikov, Nucl. Instr. and Meth. Phys. Res. B 101 (1995) 473.




Thank you




Collaborating Opportunities ? Custom design and prototype manufacture.

Let us help you develop a resilient detector/sensor technology for your application using our design tools, facilities and experience in collaboration with your R&D team.

Prototype to Product (cost engineering, batch processing and test)




22 April 2023 27

Application Diamond Sensors Bio-and Chemical Sensing

Wide electrochemical windowExtremely low background current.Bio-Compatible (non-fouling)

Very stable surface (Chemically inert)

Varied surface terminations possible

Mechanically robust



22 April 2023 28

Application Diamond Sensors

•PH-Sensors

•Electro-chemical sensors (MEA, trace element analysis) (Mining, Automotive, Medical, Food, Water, Environmental, Emissions …..)

•Temperature-Sensors •Conductivity •Replacement of Mercury Electrodes (Mercury ban widens)

Next Generation (addressable MEA) under consideration

Date post:	08-Feb-2016
Category:	Documents
Upload:	mireya
View:	50 times
Download:	5 times

Diamond Detectors

Documents