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EQUIPMENT COATING SYSTEMS FOR OLED APPLICATIONS COATING SYSTEMS FOR OLED APPLICATIONS ADVANCED COATING EQUIPMENT
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Page 1: EQUIPMENT - VON ARDENNE - Thin-Film Technologies...organic and metal layer deposition on Generation 2.5 glass substrates. Our pilot coating equipment R2Flex300, which is in operation

WORLDWIDE SALES AND SERVICE VON ARDENNE GmbH (headquarters) I Am Hahnweg 8 I 01328 DRESDEN I GERMANYSales: +49 (0) 351 2637 189 I [email protected] Service: +49 (0) 351 2637 9400 I [email protected]

VON ARDENNE Vacuum Equipment (Shanghai) Co., Ltd. I +86 21 6173 0210 I +86 21 6173 0200 I [email protected]; [email protected]

VON ARDENNE Malaysia Sdn. Bhd. I +60 4408 0080 I +60 4403 7363 I [email protected]; [email protected]

VON ARDENNE Japan Co., Ltd. I Tokyo office I +81 3 6435 1700 I +81 3 6435 1699 I [email protected]; [email protected]

VON ARDENNE North America, Inc. I Ohio office I +1 419 386 2789 I +1 419 873 6661 I [email protected]; [email protected]

VON ARDENNE North America, Inc. I Arizona office I +1 480 726 5470 I +1 480 855 0947 I [email protected]; [email protected]

VON ARDENNE Vietnam Co., Ltd. I +60 124 23 7353 I [email protected]; [email protected]

VON ARDENNE develops and manufactures industrial equipment for vacuum coatings on materials such as glass, wafers, metal strip and polymer fi lms. These coatings give the surfaces new functional properties and can be between one nanometer and a few micrometers thin, depending on the application.

Our customers use these materials to make high-quality products such as architectural glass, displays for smartphones and touchscreens, solar modules and heat protection window fi lm for automotive glass.

We supply our customers with technologically sophisticated vacuum coating systems, extensive expertise and global service. The key components are developed and manufactured by VON ARDENNE itself.

Systems and components made by VON ARDENNE make a valuable contribution to protecting the environment. They are vital for manufacturing products which help to use less energy or to generate energy from renewable resources.

WHO WE ARE & WHAT WE DO

PRODUCTTOPICS

SALES CONTACTS

SERVICE CONTACTS

PRODUCTINDEX COMPONENTS

www.vonardenne.biz

Pictures: VON ARDENNE Corporate Archive, VON ARDENNE Family Archive, shutterstock.com. © All rights reserved. ENGLISH 03/2018

OLEDs on flexible substrate, processed in joint development with Fraunhofer FEP

EQ

UIP

ME

NT

CO

ATIN

G S

YSTE

MS

FOR

OLE

D A

PPLI

CAT

ION

S

COATING SYSTEMS FOR OLED APPLICATIONS

ADVANCED COATING EQUIPMENT

Page 2: EQUIPMENT - VON ARDENNE - Thin-Film Technologies...organic and metal layer deposition on Generation 2.5 glass substrates. Our pilot coating equipment R2Flex300, which is in operation

TECHNICAL DATASubject to change without notice due to technical improvement.

COATING SYSTEMS FOR

OLED APPLICATIONS

OLED300 R2R PILOT SYSTEM

Substrate width (metal or polymer web) 300 mm

Source setup ion beam pre-treatment

14 organic evaporators

1 DC-RF magnetron

2 metal evaporators

Substrate speed up to 1 m/min

Final vacuum ~10-7 mbar

OLED400 S2S INLINE EVAPORATION SYSTEM

Substrate size 400 mm x 500 mm (Gen 2.5 glass)

flexible and modular layout

Process options: ion beam pre-treatment

organic evaporators

magnetrons

metal/ionorganic evaporators

> configuration and number of sources

adapted to layer stack requirements

Substrate speed up to 2.5 m/min

Final vacuum ~10-7 mbar

Organic light-emitting diodes (OLEDs) are ultra-thin light sources that consist of thin layers of organic semiconductor materials and can generate light in almost any color. They are primarily used in mobile device displays and high-end TVs. As flexible light sources, they also open completely new possibilities for the automotive and the lighting industry.

In cooperation with industrial partners and research institutions, we are developing vacuum deposition equipment and scalable technologies for the production of OLEDs on rigid glass substrates and flexible substrates such as metal strip, polymer films and flexible glass.

This project was financially supported by the German Federal Ministry of Education and Research (FKZ 13N9025, 13N9721, 13N11053).

OLED400 SHEET-TO-SHEET INLINE EVAPORATION SYSTEM

TECHNOLOGY

— Pre-treatment by heating and ion beam

— Thermal evaporation of undoped and doped organic

layers

— Sputtering of contact or protection layers

— Thermal evaporation of metal/inorganic electrode layers

— Structured deposition by metal mask, in-vacuum mask

exchange between organics and electrode layers

OLED300 ROLL-TO-ROLL PILOT SYSTEM

APPLICATION

— Roll-to-roll pilot system for small-molecule OLED

deposition on flexible substrates

— Deposition of complex organic layer stacks by thermal

evaporation on flexible substrates for OLED or OSC

applications

TECHNOLOGY

— Pre-treatment by heating and ion beam

— Thermal evaporation of undoped and doped organic

layers

— Sputtering of contact or protection layers

— Thermal evaporation of metal electrode layers

EQUIPMENT

— Single-chamber batch type system

— Fully reverse winding system with interleaf winding

option and substrate edge control

— Process drum with deep cooling and heating option

— Inert handling option for coated substrate roll

— PLC control

— 100 % inert materials in vapor path

BENEFITS

Roll-to-roll processing generates:

— Lightweight and extremely thin light sources

— Reduced manufacturing cost due to high-throughput

manufacturing tools

— New product and design options due to flexible use of

OLEDs: Bendable substrates allow OLED light sources

to be adapted to curved surfaces in buildings or cars.

In addition, fully flexible OLEDs can be used for light

emitting roller blinds or curtains.

Our inline OLED evaporation system is designed for metal mask structured organic and metal layer deposition on Generation 2.5 glass substrates.

Our pilot coating equipment R2Flex300, which is in operation at Fraunhofer FEP, transfers the layer system technology developed by our partners on 300 mm wide flexible substrates by means of roll-to-roll coating.

It is our aim to produce highly efficient white OLEDs that are suitable for lighting purposes. We use VON ARDENNE linear organic evaporators as technological key components for the deposition of OLED materials.

+ APPLICATION

— Inline S2S pilot/initial production system for OLED/OPV

applications

— Deposition of complex organic layer stacks and/or metal

electrodes by thermal evaporation on Gen 2.5 glass

substrates (400 mm x 500 mm).

+

EQUIPMENT

— Multi-chamber in-line type system

— Two process paths for organics and electrode with

different masks

— Mask exchange under vacuum

— Inert handling option for substrates and evaporation

materials

— PLC control

— 100 % inert materials in vapor path

+

+

+

+

+

Page 3: EQUIPMENT - VON ARDENNE - Thin-Film Technologies...organic and metal layer deposition on Generation 2.5 glass substrates. Our pilot coating equipment R2Flex300, which is in operation

WORLDWIDE SALES AND SERVICE VON ARDENNE GmbH (headquarters) I Am Hahnweg 8 I 01328 DRESDEN I GERMANYSales: +49 (0) 351 2637 189 I [email protected] Service: +49 (0) 351 2637 9400 I [email protected]

VON ARDENNE Vacuum Equipment (Shanghai) Co., Ltd. I +86 21 6173 0210 I +86 21 6173 0200 I [email protected]; [email protected]

VON ARDENNE Malaysia Sdn. Bhd. I +60 4408 0080 I +60 4403 7363 I [email protected]; [email protected]

VON ARDENNE Japan Co., Ltd. I Tokyo office I +81 3 6435 1700 I +81 3 6435 1699 I [email protected]; [email protected]

VON ARDENNE North America, Inc. I Ohio office I +1 419 386 2789 I +1 419 873 6661 I [email protected]; [email protected]

VON ARDENNE North America, Inc. I Arizona office I +1 480 726 5470 I +1 480 855 0947 I [email protected]; [email protected]

VON ARDENNE Vietnam Co., Ltd. I +60 124 23 7353 I [email protected]; [email protected]

VON ARDENNE develops and manufactures industrial equipment for vacuum coatings on materials such as glass, wafers, metal strip and polymer fi lms. These coatings give the surfaces new functional properties and can be between one nanometer and a few micrometers thin, depending on the application.

Our customers use these materials to make high-quality products such as architectural glass, displays for smartphones and touchscreens, solar modules and heat protection window fi lm for automotive glass.

We supply our customers with technologically sophisticated vacuum coating systems, extensive expertise and global service. The key components are developed and manufactured by VON ARDENNE itself.

Systems and components made by VON ARDENNE make a valuable contribution to protecting the environment. They are vital for manufacturing products which help to use less energy or to generate energy from renewable resources.

WHO WE ARE & WHAT WE DO

PRODUCTTOPICS

SALES CONTACTS

SERVICE CONTACTS

PRODUCTINDEX COMPONENTS

www.vonardenne.biz

Pictures: VON ARDENNE Corporate Archive, VON ARDENNE Family Archive, shutterstock.com. © All rights reserved. ENGLISH 03/2018

OLEDs on flexible substrate, processed in joint development with Fraunhofer FEP

EQ

UIP

ME

NT

CO

ATIN

G S

YSTE

MS

FOR

OLE

D A

PPLI

CAT

ION

S

COATING SYSTEMS FOR OLED APPLICATIONS

ADVANCED COATING EQUIPMENT


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