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ETV-ICP-OES THE MOST ACCURATE

DETECTION LIMITSFOR HIGH PURITY CARBON

AND GRAPHITE

Electro Thermal Vaporization & Inductively Coupled Plasma OpticalEmissionSpectrometry

Thehigh-techapplicationsofgraphite(semiconductors,photovoltaics,nuclear…) often require strict control over impurities in the material.After setting the standard for supplying the highest purity graphitein the industry, Mersen now offers the most sophisticated methodfor measuring graphite purity. The ETV-ICP analytical methodhas been applied to develop a powerful, rapid and reliable tool foranalysing impurity content of solid samples with very low limits ofdetection.ETV-ICPhasproventobethereferenceforanalysinggraphiteandcanbeconsideredasstate-of-the-arttechnique.

Sampling, loading and heatingThegraphitesample(solidorpowder)isloadedintoahigh temperature graphite furnace. The sample isheatedupto2800°C.

ArgonFreongases

Graphite solid sample containing impurities

2800°C

F2

Analytes (fluorides)

..light

.

matrix

Fluorides (=analytes)

F2 + impurities fluorides

...

polychromator spectrometer

Electro Thermal VaporizationFreon gas and Argon carrier gas circulate in the furnace.Theprecursorgasdecomposes intoFluor (F2), that reactswithimpuritiescontained ingraphite to formfluorides (analytes),andextractsthemfromthegraphitematrix.

Inductively Coupled PlasmaThegascarryinganalytes(fluorideswithimpurities)isintroducedintoaplasmachamber.Moleculesareexcitedunderplasmaandemitlightwithdifferentwavelengthscharacteristicofeachatomofimpurity.

Optical Emission SpectrometryLightisthendecomposedbywavelengththroughapolychromator(prism-like)andanalysedbyaspectrometer.Light intensityatagivenwavelengthisdirectlyproportionaltotheconcentrationofanatomintheplasma.Thusexactcontentproportionofeachatomcanbecalculated.

How does it work?

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ETV-ICP OES

Data herein contained are provided for general information purpose only and are not binding. Mersen shall have no liability whatsoever with respect to information contained herein. Duplication, reproduction or translation of any information contained herein, in whole or in part, is strictly prohibited without prior written consent of Mersen. Our materials are in conformity with the RoHS-Directive (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment). Besides Mersen guarantees the application of the European Community REACH-Regulation (Registration, Evaluation, Authorization and Restriction of Chemical substances) to all its plants located in Europe.

Contamination-free introduction of samples without sample decomposition ordilution.Solidaswellasliquidsamplingispossible.Samplingandcalibrationofgraphitepossiblewithexistingstandardsandreferencesolutions,which isnot thecasewith theGDMSmethod (GlowDischargeMassSpectrometry).Very effective thanks to high transport efficiency of gases used. No spectralinterferencefromthematrix.Simpleandrapidacquisition:upto50samplesanalysedperdaywithautomaticloading.Suitableforroutineanalysis.Very low limits of detection for most elements of the periodic classification,1-50µg/kg=ppb(partsperbillion).Perfectly adapted to purified graphite, carbon/carbon composite and carboninsulationmaterials.Value-addedserviceforcustomers.

Advantages of the ETV-ICP analytical method

HHydrogen

RbRubinium

CsCesium

FrFrancium

PmPromethium

TcTechnetium

PdPalladium

PtPlatinum

IrIridium

OsOsmium

NpNeptunium

PuPlutonium

AmAmericium

CmCurium

BkBerkelium

TbTerbium

HoHolmium

ErErbium

TmThulium

YbYtterbium

LuLutetium

CfCalifornium

EsEinsteinium

FmFermium

MdMendelevium

NoNobelium

LrLawrencium

LiLithium

5

NaSodium

10

KPotassium

RaRadium

AcActinium

10

BaBarium

1

CaCalcium

1

BeBeryllium

1

MgMagnésium

0.1

SrStrondium

1

LaLanthanum

1

ScScandium

1

YYttrium

1

RfRutherfordium

DbDubium

HfHafnium

1

TiTitanium

2

ZrZirconium

1

TaTantalum

10

VVanadium

2

NbNobium

5

WTungsten

10

CrChromium

5

MoMolybdenum

FeIron

2

RuRuthenium

20

CoCobalt

2

NiNickel

5

CuCopper

2

ZnZinc

1

GaGallium

5

GeGermanium

50

AsArsenic

20

AlAluminium

10

BBoron

5

SiSilicon

50

PPhosphorus

20

SSulfur

30

SeSelenium

20

AgSilver

10

CdCadmium

5

InIndium

30

SnTin

10

SbAntimony

50

TeTellurium

20

AuGold

50

HgMercury

100

TlThallium

30

PbLead

10

BiBismuth

5Po

Polonium

RhRhodium

510

ReRhenium

5

MnManganese

1

ThThorium

5

CeCerium

5

UUranium

10

NdNeodymium

5

SmSamarium

5

EuEuropium

5

GdGadolinium

5

DyDysprosium

5

PaProtactinium

PrPraseodymium

10

CCarbon

NNitrogen

OOxygen

FFluorine

NeNeon

ClChlorine

ArArgon

BrBromine

KrKrypton

IIodine

XeXenon

AtAstatine

RnRadon

HeHelium

Detection Limits ug/Kg = ppb (Parts per Billion)Quantified with ETV-ICP OES

Not Quantified

Not Possible to Quantify

Quantified with ETV-ICP OESwith other parameters

White numbers de�ne - Units selected Elements for Polychrometer (35). All Blue & Green Elements detectable using Monochrometer (selectable)

ETV-ICP OES, Limits of DetectionETV-ICP-OES, Limits of detection

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Contact for EuropeMERSEN France Gennevilliers SAS41 rue Jean Jaurès - BP 148F-92231 GENNEVILLIERS CEDEXFRANCETel: +33 (0) 1 41 85 45 55Fax: +33 (0) 1 41 85 43 53E-mail: semicon@mersen.com

Contact for AsiaMERSEN Kunshan Co. Ltd.#29 South Taihu Road,Kunshan Development Zone,Kunshan, Jiangsu Province,215334, PR CHINATel.: +86 512 5763 9808Fax: +86 512 5763 9811

www.mersen.com

Contact in North AmericaMERSEN USA BN Corp.Bay City Branch,900 Harrison StreetBay City, MI 48708, USATel.: +1 989 894 29 11Fax: +1 989 895 77 40 H

T28

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A WORLD EXPERTin materials and solutionsfor high temperature processes

Main production sites

Industrial or commercial branch

St-Marys, USA

Holytown, Scotland UK

Gennevilliers, France

Chongqing, China

Global expert in materials and solutions for extreme environments as well as in the safety and reliability of electrical equipment Mersen designs innovative

solutions to address its clients specific

needs to enable them to optimize their manufacturing process in sectors such as energy, transportation, electronics, chemical, pharmaceutical and process industries.

ETV-ICP-OES THE MOST ACCURATE

DETECTION LIMITSFOR HIGH PURITY CARBON

AND GRAPHITE