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Background Statement for SEMI Draft Document 5153 New Standard: DATA DEFINITION SPECIFICATION FOR A HORIZONTAL COMMUNICATION BETWEEN EQUIPMENT FOR PHOTOVOLTAIC FABRICATION SYSTEM Note: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this document. Note: Recipients of this document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided. What is the problem being solved? The SEMI standard “PV35 - Specification for horizontal communication between equipment for photovoltaic fabrication system” describes the general behavior of equipment interfaces between adjacent PV equipment. It does not describe the physical interface and the specific data to be transmitted via such an interface. This document proposes a new standard that defines, how such a data interface can be described using XML. This description is not specific for crystalline or thin film equipment; it should become standard for both equipment types. What is the history of this issue and ballot? This is the first proposal of this new specification. Whom will this affect? How? Why? This change will not conflict with existing standards or with existing implementations. New implementations should follow the definitions of this standard. Is this a change to an existing solution, or, is it a new activity? This is a new activity. Revision Control
Transcript
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Background Statement for SEMI Draft Document 5153New Standard: DATA DEFINITION SPECIFICATION FOR A HORIZONTAL COMMUNICATION BETWEEN EQUIPMENT FOR PHOTOVOLTAIC FABRICATION SYSTEMNote: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this document.Note: Recipients of this document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.

What is the problem being solved?

The SEMI standard “PV35 - Specification for horizontal communication between equipment for photovoltaic fabrication system” describes the general behavior of equipment interfaces between adjacent PV equipment. It does not describe the physical interface and the specific data to be transmitted via such an interface.

This document proposes a new standard that defines, how such a data interface can be described using XML. This description is not specific for crystalline or thin film equipment; it should become standard for both equipment types.

What is the history of this issue and ballot?

This is the first proposal of this new specification.

Whom will this affect? How? Why?

This change will not conflict with existing standards or with existing implementations. New implementations should follow the definitions of this standard.

Is this a change to an existing solution, or, is it a new activity?

This is a new activity.

Revision ControlThis revision control records activity within the task force as well as formal submit and resubmit dates and results per SEMI. Entries have been made by the task force.

Date Version Name Edits

07/29/2013 0.1 Eberhard Teichmann First draft for review by PVEIS TF08/12/2013 0.2 Friedemann Fincke First reviewed edition (first 8 chapters)09/25/2013 0.30 Carsten Born 2nd reviewed edition10/15/2013 0.35 Carsten Born 3rd reviewed edition11/11/2013 0.40 Carsten Born and PV-EIS Team Document reworked based on TF-team input12/03/2013 05 Carsten Born/ E. Teichmann Headings corrected

Review and Adjudication InformationTask Force Review Committee Adjudication

Group: PV-EIS TF Europe PV Automation CommitteeDate: June 5, 2014 June 5, 2014Time & Time zone: TBD TBDLocation: Intersolar Europe Intersolar EuropeCity, State/Country: Munich, Germany Munich, GermanyLeader(s): Carsten Born (VITRONIC) Eberhard Teichmann (PEER Group)Standards Staff: Yann Guillou (SEMI Europe)

yguillou @semi.org Yann Guillou (SEMI Europe)yguillou @semi.org

This meeting’s details are subject to change, and additional review sessions may be scheduled if necessary. Contact Standards staff for confirmation. Telephone and web information will be distributed to interested parties as the meeting date approaches. If

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you will not be able to attend these meetings in person but would like to participate by telephone/web, please contact Standards staff.

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

Page 1 Doc. jn l SEMI

Semiconductor Equipment and Materials International3081 Zanker RoadSan Jose, CA 95134-2127Phone: 408.943.6900, Fax: 408.943.7943

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SEMI DRAFT DOCUMENT 5153NEW STANDARD: DATA DEFINITION SPECIFICATION FOR A HORIZONTAL COMMUNICATION BETWEEN EQUIPMENT FOR PHOTOVOLTAIC FABRICATION SYSTEM 1 Purpose........................................................................................................................................................... 2

2 Scope............................................................................................................................................................... 2

3 Limitations....................................................................................................................................................... 2

4 Referenced Standards and Documents............................................................................................................. 2

4.1 SEMI Standards and Safety Guidelines..............................................................................................................2

4.2 Other Standards................................................................................................................................................2

5 Terminology..................................................................................................................................................... 2

5.1 Acronyms and Abbreviations.............................................................................................................................2

6 Definition of data being transferred between two consecutive PV tools............................................................3

6.1 Concept of the Data Model................................................................................................................................3

7 Representation of the Interface Specification...................................................................................................3

8.1 Structural Elements...........................................................................................................................................48.1.1 Interface....................................................................................................................................................48.1.2 Structure....................................................................................................................................................58.1.3 List.............................................................................................................................................................6

8.2 Data Elements...................................................................................................................................................98.2.1 Signed Integer............................................................................................................................................98.2.2 Unsigned Integer.....................................................................................................................................128.2.3 Float.........................................................................................................................................................148.2.4 Double.....................................................................................................................................................158.2.5 Bool.........................................................................................................................................................168.2.6 Binary.......................................................................................................................................................178.2.7 Fixed String..............................................................................................................................................188.2.8 Variable String.........................................................................................................................................208.2.9 Timestamp...............................................................................................................................................22......................................................................................................................................................................... 22

9 Network Byte Order....................................................................................................................................... 22

10 Structure of a XML Interface description file.................................................................................................22

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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Semiconductor Equipment and Materials International3081 Zanker RoadSan Jose, CA 95134-2127Phone: 408.943.6900, Fax: 408.943.7943

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1 Purpose1.1 The purpose of this specification is to define a standard description of data, to be exchanged on an interface for horizontal communication between adjacent PV equipment.

1.2 XML and XML schemas are common and widely used techniques to describe data structures. This proposal uses these methods to describe data structures for crystalline and thin film equipment

2 Scope2.1 This standard applies to data exchanged between all PV equipment which provides a standardized description of interfaces for horizontal communications

2.2 This standard is compliant with the definition from SEMI PV35.

NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.

3 Limitations3.1 This specification addresses the description of data structures only. It does not describe the physical interface to transmit these data structures.

4 Referenced Standards and Documents4.1 SEMI Standards and Safety Guidelines

SEMI PV2 — Guide for PV Equipment Communication Interfaces (PVECI)

SEMI PV35 — Specification for Horizontal Communication Between Equipment for Photovoltaic Fabrication System

4.2 Other Standards

Extensible Markup Language (XML) 1.0 (Fifth Edition) – W3C 26th November 2008; http://www.w3.org/TR/2008/REC-xml-20081126/

XML Schema Part 1: Structures Second Edition – W3C Recommendation 28th October 2004; http://www.w3.org/TR/2004/REC-xmlschema-1-20041028/

IEEE Standard for Floating-Point Arithmetic – IEEE 754-2008 – 29th August 2008;http://ieeexplore.ieee.org/servlet/opac?punumber=4610933

ASCII format for Network Interchange – ANSI X3.4-1968; http://tools.ietf.org/html/rfc20

8-bit single-byte coded graphic character sets - Part 1: Latin alphabet No. 1 – ISO/IEC 8859-1:1998http://www.iso.org/iso/catalogue_detail.htm?csnumber=28245

Universal Coded Character Set (UCS) – ISO/IEC 10646:2012http://www.iso.org/iso/home/store/catalogue_tc/catalogue_detail.htm?csnumber=56921

NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

4.3 The data description for a horizontal communication interface, defined by this specification is contained in the Complementary Files “SEMIxxx_DataDefinition_HC_files.zip”. These Complementary Files are an official part of and accompany this specification, which is available at the SEMI website: http://dom.semi.org/web/wstandards.nsf/schema

5 Terminology5.1 Definitions

5.1.1 attribute — a parameter of a xml node.

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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5.1.2 commands — data that gives an order to the opposite communication end point.

5.1.3 data element node — a xml node describing a data element on the interface.

5.1.4 design time attribute — a descriptive attribute of an interface data node, which is needed at design time, but not transmitted during run time.

5.1.5 equipment — the combination of hardware and software required to perform an operation or activity (e.g., processing, transporting, storing), including all direct auxiliary support or peripheral equipment.

5.1.6 handshake data — data that is needed to synchronize the interaction between two tools.

5.1.7 horizontal communication — inter-equipment communication along or against the physical flow of a material in process.

5.1.8 material data — material related data that is traveling from tool to tool synchronous with the material flow.

5.1.9 run time attribute — the actual data transmitted during run time that is described by the interface data node.

5.1.10 status data — data that reflects the status of a tool, which can be accessed from the opposite communication end point.

5.1.11 structural element node — a xml node describing the hierarchical structure of data elements on the interface.

5.1.12 UID — Unique Identifier. An attribute associated with a node, which is unique over the whole xml file.

5.1.13 XML — Extensible Markup Language is a markup language that defines a set of rules for encoding documents in a text format that is both human-readable and machine-readable.

5.1.14 XML Schema — a xml schema defines the rules (grammar) how the xml file has to be structured to fulfill the given purpose. It can be used to check the validity of a XML file. There are different formats for the schema file available. In the related information section of this document the same definition is given in form of a DTD file (Document Type Definition).

6 Definition of data being transferred between two consecutive PV tools6.1 Concept of the Data Model

6.1.1 The base concept is to standardize the basic data elements and describe the rules how to build data blocks used for transportation of data between one tool and another. There are different kinds of data categories in focus:

6.1.1.1 Handshake Data, Material Data, Status Data and Commands.

6.1.1.2 This document gives no instructions on how to transport the data using a specific media. This has to be defined in media specific sub-standard documents.

6.1.1.3 Nevertheless the definition of data elements is done keeping an eye on the technical needs of the most common industrial media used today. It should offer a convenient definition that makes it easy to implement the data model on different media.

7 Representation of the Interface Specification7.1 Since the interface can be configured to meet the needs of a specific implementation, it has to be documented in a correct and profound manner. This avoids misinterpreting of the exchanged data between involved communication partners.

7.2 To describe the data to be exchange, XML is one of the most convenient ways to do so. Advantages of using XML as language are:

It can be easily checked for syntactical correctness using a free defined syntax description.

It is structured in a convenient way for describing data organization into blocks.

It, to some point, stays human readable.

There are numberless free tools for editing, reading and writing XML structures.

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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8 Basic Data Element Types and their representation within this standard document8.1 The basic data element types defined within this chapter are building blocks which shall be used to describe the data provided through the interface. All of them have a name and attributes describing it in detail.

Table 1 Name of Element TypeName of attribute 1 Data type of attribute 1 Description of attribute 1Name of attribute 2 Data type of attribute 2 Description of attribute 2… … …Name of attribute n Data type of attribute n Description of attribute n

Table 2 Color Key of AttributesAttribute Design time attribute (not to be transmitted through the

interface during runtime)Attribute Runtime attribute to be transmitted through the interface

(not important at design time)Attribute Used at design time and media-dependent on runtime

(transmission through the interface at runtime if media demands it)

8.2 “Design Time Attributes” – The interface description consists of information describing the data that has to be transmitted. This meta-data gives the information what is transmitted (a byte, a integer, a string) and what the purpose of this element is (Name of the element, descriptive text). Beyond that it defines how the data has to be encoded during the transmission and gives information about the maximum amount of data that may be transmitted during a single communication cycle.

8.2.1 Both communication partners need to have this information to configure their system for data exchange, but this meta-data itself does not have to be transmitted over the interface during run time.

8.2.2 Because of that all attributes fulfilling this purpose are called “Design Time Attributes”.

8.3 “Run Time Attributes” – Element nodes included in an interface description describe data bites that have to be transmitted during runtime. This document defines what data is created by the different element types. All attributes used for this purpose are called “Run Time Attributes”.

8.3.1 Some elements defined later on do not carry data itself. Instead they are used to group information and thereby give the data some inner structure (complex data elements, arrays etc.).

8.3.2 These structural elements are defined to have a unique ID. This ID has to be part of the interface description, so both sides know the same ID for the same element. On some types of transmission media it may be favorable to transmit these IDs together with the runtime data e.g. to create additional resynchronization points on a streaming media.

8.3.3 For that purpose these attributes are not clearly associated to the “Design Time” or “Run Time” class of attributes. It has to be defined in media specific sub-standard documents if the IDs have to be transmitted on this media.

8.4 Structural Elements

8.4.1 There are two basic element types used for building the data structures communicated:

Data element nodes — defining the data carrying through the interface.

Structural element nodes — organizing the data into a hierarchical order and enabling the receiver to identify the data that is coming in.

8.4.2 In this chapter the structural elements are defined.

8.4.3 Interface

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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8.4.3.1 Description

8.4.3.1.1 The interface element is the root node of every interface specification. It is a simple container that holds the interface specification built from any amount of other elements.

8.4.3.1.2 Every structural element has an ID that is unique for the defined interface. That makes it possible to distinguish defined structures from each other on the receiver side.

8.4.3.1.3 As the UID uses an 8 bit unsigned integer value, a maximum of 256 different structural elements can be defined for a single interface.

8.4.3.2 Definition

InterfaceName Text A name that identifies this data structure uniquely across all type

definitionsUID UInt8 An 8 bit unsigned integer identifying this data structure uniquely

across all type definitions.Because XML requires identifiers to be of string type the letters ‘id’ are added as a prefix to the integer value.

Description Text A short description of the purpose of this structureVersion Text The version string (version number) of this interface specification.DataElements List An ordered list of data- and/or structural elements that are contained

within this structure

8.4.3.3 XML schema

8.4.3.4 Example

8.4.4 Structure

8.4.4.1 Description

8.4.4.1.1 The structure element is a simple container that can hold any amount of other elements.

8.4.4.1.2 Every structural element has an ID that is unique for the defined interface. That makes it possible to distinguish defined structures from each other on the receiver side.

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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<Interface UID="id1" Name="MyInterface" Version="V1.1.0" Description="Example of a simple Interface"

><!— Ordered list of included structural elements and/or data elements --><Int16 Name="Parameter1" Description="A number"/><Float Name="Parameter2" Description="A decimal number"/><!-- End of ordered list -->

</Interface>

<xsd:element name="Interface" type="InterfaceType"/><xsd:complexType name="InterfaceType"> <xsd:sequence minOccurs="0" maxOccurs="unbounded"> <xsd:choice> <xsd:element name="Struct" type="StructType"/> <xsd:element name="List" type="ListType"/> <xsd:element name="StringF" type="StringFType"/> <xsd:element name="StringV" type="StringVType"/> <xsd:element name="Binary" type="BinaryType"/> <xsd:element name="Bool" type="BoolType"/> <xsd:element name="Int8" type="Int8Type"/> <xsd:element name="Int16" type="Int16Type"/> <xsd:element name="Int32" type="Int32Type"/> <xsd:element name="UInt8" type="UInt8Type"/> <xsd:element name="UInt16" type="UInt16Type"/> <xsd:element name="UInt32" type="UInt32Type"/> <xsd:element name="Float" type="FloatType"/> <xsd:element name="Double" type="DoubleType"/> <xsd:element name="Timestamp" type="TimestampType"/> </xsd:choice> </xsd:sequence> <xsd:attribute name="Name" type="xsd:string" use="required"/> <xsd:attribute name="UID" type="xsd:ID" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> <xsd:attribute name="Version" type="xsd:string" use="required"/></xsd:complexType>

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8.4.4.1.3 As the UID uses an 8 bit unsigned integer value, a maximum of 256 different structural elements can be defined for a single interface.

8.4.4.2 Definition

StructureName Text A name that identifies this data structure uniquely across all type

definitionsUID UInt8 An 8 bit unsigned integer identifying this data structure uniquely

across all type definitions.Because XML requires identifiers to be of string type the letters ‘id’ are added as a prefix to the integer value.

Description Text A short description of the purpose of this structureDataElements List An ordered list of data- and/or structural elements that are contained

within this structure

8.4.4.3 XML schema

8.4.4.4 Example

8.4.5 List

8.4.5.1 Description

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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<Struct UID="id2" Name="aStruct" Description="Example of a structure"

><!— Ordered list of included structural elements and/or data elements --><Int16 Name="Parameter1" Description="A number"/><Float Name="Parameter2" Description="A decimal number"/><UInt8 Name="Parameter3" Description="A limited number" Bottom="120" Top="150"/><!-- End of ordered list -->

</Struct>

<xsd:element name="Struct" type="StructType"/><xsd:complexType name="StructType"> <xsd:sequence minOccurs="0" maxOccurs="unbounded"> <xsd:choice> <xsd:element name="Struct" type="StructType"/> <xsd:element name="List" type="ListType"/> <xsd:element name="StringF" type="StringFType"/> <xsd:element name="StringV" type="StringVType"/> <xsd:element name="Binary" type="BinaryType"/> <xsd:element name="Bool" type="BoolType"/> <xsd:element name="Int8" type="Int8Type"/> <xsd:element name="Int16" type="Int16Type"/> <xsd:element name="Int32" type="Int32Type"/> <xsd:element name="UInt8" type="UInt8Type"/> <xsd:element name="UInt16" type="UInt16Type"/> <xsd:element name="UInt32" type="UInt32Type"/> <xsd:element name="Float" type="FloatType"/> <xsd:element name="Double" type="DoubleType"/> <xsd:element name="Timestamp" type="TimestampType"/> </xsd:choice> </xsd:sequence> <xsd:attribute name="Name" type="xsd:string" use="required"/> <xsd:attribute name="UID" type="xsd:ID" use="required"/> <xsd:attribute name="Description" type="xsd:string"/></xsd:complexType>

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8.4.5.1.1 Same as the structure element, the list element is a container that can hold any amount of other elements. The difference is that the whole ordered list of elements is repeated n times during runtime, where n may be a fixed or dynamically changed number. From the programmers point of view this can be interpreted as a dynamical one dimensional array of complex data.

8.4.5.1.2 Every structural element has an ID that is unique for the defined interface. That makes it possible to distinguish defined arrays from each other on the receiver side.

8.4.5.1.3 As the UID uses an 8 bit unsigned integer value, a maximum of 256 different structural elements can be defined for a single interface.

8.4.5.2 Definition

ListName Text A name that identifies this array uniquely across all type definitionsUID UInt8 An 8 bit unsigned integer identifying this array uniquely across all

type definitions.Because XML requires identifiers to be of string type the letters ‘id’ are added as a prefix to the integer value.

Description Text A short description of the purpose of this listMinElements UInt8 The minimum number of times, the contained list of data elements

has to be repeated. May be 0 if the included data is optional. Maximum number is 255.If less than the given number of data is transmitted during runtime, this will cause a data consistency error event.If this value is not given it gets set to 1.

MaxElements UInt8 The maximum number of times, the contained list of data elements may be repeated. Maximum number is 255.If more than the given number of data is transmitted during runtime, this will cause a data consistency error event.

Current Elements UInt8 If MinElements is unequal to MaxElements the size of the array may dynamically change during runtime. In this case an 8 bit unsigned integer holding the number of currently transmitted element lists has to be transmitted before the first data element.

DataElements List An ordered list of data- and/or structural elements that are contained within this array

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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8.4.5.3 XML schema

8.4.5.4 Example

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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<xsd:element name="List" type="ListType"/><xsd:complexType name="ListType"> <xsd:sequence minOccurs="0" maxOccurs="unbounded"> <xsd:choice> <xsd:element name="Struct" type="StructType"/> <xsd:element name="List" type="ListType"/> <xsd:element name="StringF" type="StringFType"/> <xsd:element name="StringV" type="StringVType"/> <xsd:element name="Binary" type="BinaryType"/> <xsd:element name="Bool" type="BoolType"/> <xsd:element name="Int8" type="Int8Type"/> <xsd:element name="Int16" type="Int16Type"/> <xsd:element name="Int32" type="Int32Type"/> <xsd:element name="UInt8" type="UInt8Type"/> <xsd:element name="UInt16" type="UInt16Type"/> <xsd:element name="UInt32" type="UInt32Type"/> <xsd:element name="Float" type="FloatType"/> <xsd:element name="Double" type="DoubleType"/> <xsd:element name="Timestamp" type="TimestampType"/> </xsd:choice> </xsd:sequence> <xsd:attribute name="Name" type="xsd:string" use="required"/> <xsd:attribute name="UID" type="xsd:ID" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> <xsd:attribute name="MinElements" type="xsd:unsignedByte" default="1"/> <xsd:attribute name="MaxElements" type="xsd:unsignedByte" use="required"/></xsd:complexType>

<List UID="id15" Name="aList" Description="Example of an optional list" MinElements="0" MaxElements="2"

><!-- Ordered list of included structural and/or data elements --><Int16 Name="Parameter1" Description="A number"/><Float Name="Parameter2" Description="A decimal number"/><UInt8 Name="Parameter3" Description="A limited number" Bottom="120" Top="150"/><!-- End of ordered list -->

</List>

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8.5 Data Elements

8.5.1 This chapter defines the elements describing the data that has to be transmitted over the interface.

8.5.2 The interfaces in focus of this document often have to carry data like command codes or process parameters with a limited valid range. The interface description therefor should be capable of include such information as the valid range of a parameter or a list of valid command codes.

8.5.3 If this information is available, as a positive side effect some simple data validation checks may be done directly at the interface level. The following definitions include the information which checks to do.

8.5.3.1 data consistency error – If a data element has a limited validity and the received data is not within the valid range, the interface software shall trigger an data consistency error event. If and how this error event is handled by the application software is not part of this standard.

8.5.4 Signed Integer

8.5.4.1 Description

8.5.4.1.1 A data element used for transmission of signed integer numbers. There are 3 integer sizes available (8, 16, 32 bit). Whenever possible the smallest integer type fitting the needs should be chosen.

8.5.4.1.2 If there is no explicit specification given by the used transmission media, a signed integer value has to be transmitted using the two's complement representation.

8.5.4.2 Definition

Int8, Int16, Int32Name Text A name that identifies this data element across all type

definitionsDescription Text A short description of the purpose of this data elementBottom Int8, Int16

or Int32Lower limit of this value.The receiver checks the received value against this limit. If the received value is smaller than the given value a data consistency error event is tripped.If this attribute is not given there is no lower limit defined and this check is not done by the receiver.

Top Int8, Int16 or Int32

Upper limit of this value.The receiver checks the received value against this limit. If the received value is bigger than the given value a data consistency error event is tripped.If this attribute is not given there is no upper limit defined and this check is not done by the receiver.

Enumeration Text If an enumeration node is included, the received value will be checked against the given list of valid values (e.g. command codes).If the received value is not part of the list a data consistency error event is tripped.If such a list is not given, this check is not done by the receiver.

Value Int8, Int16 or Int32

A single valid value. List element of the Enumeration.

Description Text Short description of this value (e.g. Function of the command code).

Value Int8, Int16 or Int32

Value of the Integer transmitted during runtime (signed 8, 16 or 32 bit)

1: The use of the Bottom, Top and Enumerated attributes may result in an interface definition that is not capable of accepting any values, e.g. if all enumerated values are out of the range specified by bottom and top or the top value is smaller than the bottom

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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value. These are design time errors. As there are simply three independent checks for the three attributes, which may reject the received value, it creates no logical inconsistency on the program level of the interface software.

2: Interface definitions may be checked for such inconsistent definitions on the import of the XML file. But it has to be accepted, if some enumerated values are out of the defined range, as this may have been done with purpose (see example below).

8.5.4.3 XML schema

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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<xsd:element name="Int16" type="Int16Type"/><xsd:complexType name="Int16Type"> <xsd:sequence minOccurs="0"> <xsd:element name="Enumeration" type="Int16Enum"/> </xsd:sequence> <xsd:attribute name="Name" type="xsd:string" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> <xsd:attribute name="Bottom" type="xsd:short"/> <xsd:attribute name="Top" type="xsd:short"/></xsd:complexType><xsd:complexType name="Int16Enum"> <xsd:sequence maxOccurs="unbounded"> <xsd:element name="ValidData"> <xsd:complexType> <xsd:attribute name="Value" type="xsd:short" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> </xsd:complexType> </xsd:element> </xsd:sequence></xsd:complexType >

<xsd:element name="Int8" type="Int8Type"/><xsd:complexType name="Int8Type"> <xsd:sequence minOccurs="0"> <xsd:element name="Enumeration" type="Int8Enum"/> </xsd:sequence> <xsd:attribute name="Name" type="xsd:string" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> <xsd:attribute name="Bottom" type="xsd:byte"/> <xsd:attribute name="Top" type="xsd:byte"/></xsd:complexType><xsd:complexType name="Int8Enum"> <xsd:sequence maxOccurs="unbounded"> <xsd:element name="ValidData"> <xsd:complexType> <xsd:attribute name="Value" type="xsd:byte" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> </xsd:complexType> </xsd:element> </xsd:sequence></xsd:complexType >

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8.5.4.4 Example

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<Int16 Name="MyParameter" Description="A simple number"

/>

<Int8 Name="MyCommand" Description="A Command only accepting valid codes" Bottom="-1" Top="50">

<Enumeration> <ValidData Value="-1" Description="Idle"/> <ValidData Value="10" Description="Start"/> <ValidData Value="20" Description="Stop"/> <ValidData Value="30" Description="Suspend"/> </Enumeration></Int8>

<Int8 Name="MyCommandSet" Description="A Command definition with a selectable command set" Bottom="20" Top="25">

<Enumeration> <ValidData Value="10" Description="Mode1 Idle"/> <ValidData Value="11" Description="Mode1 Start"/> <ValidData Value="12" Description="Mode1 Stop"/> <ValidData Value="13" Description="Mode1 Suspend"/> <ValidData Value="20" Description="Mode2 Idle"/> <ValidData Value="21" Description="Mode2 Start"/> <ValidData Value="22" Description="Mode2 Stop"/> <ValidData Value="23" Description="Mode2 Calibrate"/> <ValidData Value="24" Description="Mode2 Suspend"/> </Enumeration></Int8>

<xsd:element name="Int32" type="Int32Type"/><xsd:complexType name="Int32Type"> <xsd:sequence minOccurs="0"> <xsd:element name="Enumeration" type="Int32Enum"/> </xsd:sequence> <xsd:attribute name="Name" type="xsd:string" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> <xsd:attribute name="Bottom" type="xsd:int"/> <xsd:attribute name="Top" type="xsd:int"/></xsd:complexType><xsd:complexType name="Int32Enum"> <xsd:sequence maxOccurs="unbounded"> <xsd:element name="ValidData"> <xsd:complexType> <xsd:attribute name="Value" type="xsd:int" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> </xsd:complexType> </xsd:element> </xsd:sequence></xsd:complexType >

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8.5.5 Unsigned Integer

8.5.5.1 Description

8.5.5.1.1 A data element used for transmission of signed integer numbers. There are 3 integer sizes available (8, 16, 32 bit). Whenever possible the smallest integer type fitting the needs should be chosen.

8.5.5.2 Definition

UInt8, UInt16, UInt32Name Text A name that identifies this data element across all type definitions.Description Text A short description of the purpose of this data element.Bottom UInt8,

UInt16 or UInt32

Lower limit of this value.The receiver checks the received value against this limit. If the received value is smaller than the given value a data consistency error event is tripped.If this attribute is not given there is no lower limit defined and this check is not done by the receiver.

Top UInt8, UInt16 or UInt32

Upper limit of this value.The receiver checks the received value against this limit. If the received value is bigger than the given value a data consistency error event is tripped.If this attribute is not given there is no upper limit defined and this check is not done by the receiver.

Enumeration If an enumeration node is included, the received value will be checked against the given list of valid values (e.g. command codes).If the received value is not part of the list a data consistency error event is tripped.If such a list is not given, this check is not done by the receiver.

Value UInt8, UInt16 or UInt32

A single valid value. List element of the Enumeration.

Description Text Short description of this value (e.g. Function of the command code).

Value UInt8, UInt16 or UInt32

Value of the Integer transmitted during runtime (signed 8, 16 or 32 bit).

3: The use of the Bottom, Top and Enumerated attributes may result in an interface definition that is not capable of accepting any values, if all enumerated values are out of the range specified by bottom and top or the top value is smaller than the bottom value. These are design time errors. As there are simply three independent checks for the three attributes, which may reject the received value, it creates no logical inconsistency on the program level of the interface software.

4: Interface definitions may be checked for such inconsistent definitions on the import of the XML file. But it has to be accepted, if some enumerated values are out of the defined range, as this may have been done with purpose (see example in ¶ 8.5.4.4 ).

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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8.5.5.3 XML schema

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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<xsd:element name="UInt16" type="UInt16Type"/><xsd:complexType name="UInt16Type"> <xsd:sequence minOccurs="0"> <xsd:element name="Enumeration" type="UInt16Enum"/> </xsd:sequence> <xsd:attribute name="Name" type="xsd:string" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> <xsd:attribute name="Bottom" type="xsd:unsignedShort"/> <xsd:attribute name="Top" type="xsd:unsignedShort"/></xsd:complexType><xsd:complexType name="UInt16Enum"> <xsd:sequence maxOccurs="unbounded"> <xsd:element name="ValidData"> <xsd:complexType> <xsd:attribute name="Value" type="xsd:unsignedShort" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> </xsd:complexType> </xsd:element> </xsd:sequence></xsd:complexType >

<xsd:element name="UInt8" type="UInt8Type"/><xsd:complexType name="UInt8Type"> <xsd:sequence minOccurs="0"> <xsd:element name="Enumeration" type="UInt8Enum"/> </xsd:sequence> <xsd:attribute name="Name" type="xsd:string" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> <xsd:attribute name="Bottom" type="xsd:unsignedByte"/> <xsd:attribute name="Top" type="xsd:unsignedByte"/></xsd:complexType><xsd:complexType name="UInt8Enum"> <xsd:sequence maxOccurs="unbounded"> <xsd:element name="ValidData"> <xsd:complexType> <xsd:attribute name="Value" type="xsd:unsignedByte" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> </xsd:complexType> </xsd:element> </xsd:sequence></xsd:complexType >

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8.5.5.4 Example

8.5.6 Float

8.5.6.1 Description

8.5.6.1.1 A data element used for transmission of 32bit floating point numbers. If there is no explicit specification given by the used transmission media, a float value has to be transmitted using the representation defined by IEEE754.

8.5.6.2 Definition

FloatName Text A name that identifies this data element across all type definitionsDescription Text A short description of the purpose of this data elementBottom Float Lower limit of this value.

The receiver checks the received value against this limit. If the received value is smaller than the given value a data consistency error event is tripped.If this attribute is not given there is no lower limit defined and this check is not done by the receiver.

Top Float Upper limit of this value.The receiver checks the received value against this limit. If the received value is bigger than the given value a data consistency error event is tripped.If this attribute is not given there is no upper limit defined and this check is not done by the receiver.

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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<UInt8 Name="MyNumber" Description="unsigned value"

/><UInt16

Name="MyParameter" Description="A parameter with a valid range between 1200 and 1500" Bottom="1200" Top="1500"

/>

<xsd:element name="UInt32" type="UInt32Type"/><xsd:complexType name="UInt32Type"> <xsd:sequence minOccurs="0"> <xsd:element name="Enumeration" type="UInt32Enum"/> </xsd:sequence> <xsd:attribute name="Name" type="xsd:string" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> <xsd:attribute name="Bottom" type="xsd:unsignedInt"/> <xsd:attribute name="Top" type="xsd:unsignedInt"/></xsd:complexType><xsd:complexType name="UInt32Enum"> <xsd:sequence maxOccurs="unbounded"> <xsd:element name="ValidData"> <xsd:complexType> <xsd:attribute name="Value" type="xsd:unsignedInt" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> </xsd:complexType> </xsd:element> </xsd:sequence></xsd:complexType >

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Value Float Value of the float transmitted during runtime (32 bit)

5: The use of the Bottom, Top attributes may result in an interface definition that is not capable of accepting any values, if the top value is smaller than the bottom value. This is a design time error. As there are simply two independent checks for the two attributes, which may reject the received value, it creates no logical inconsistency on the program level of the interface software.

6: Interface definitions may be checked for such inconsistent definitions on the import of the XML file.

8.5.6.3 XML schema

8.5.6.4 Example

8.5.7 Double

8.5.7.1 Description

8.5.7.1.1 A data element used for transmission of 64bit floating point numbers. If there is no explicit specification given by the used transmission media, a float value has to be transmitted using the representation defined by IEEE754.

8.5.7.2 Definition

DoubleName Text A name that identifies this data element across all type definitionsDescription Text A short description of the purpose of this data elementBottom Double Lower limit of this value.

The receiver checks the received value against this limit. If the received value is smaller than the given value a data consistency error event is tripped.If this attribute is not given there is no lower limit defined and this check is not done by the receiver.

Top Double Upper limit of this value.The receiver checks the received value against this limit. If the received value is bigger than the given value a data consistency error event is tripped.If this attribute is not given there is no upper limit defined and this check is not done by the receiver.

Value Double Value of the float transmitted during runtime (64 bit)

7: The use of the Bottom, Top attributes may result in an interface definition that is not capable of accepting any values, if the top value is smaller than the bottom value. This is a design time error. As there are simply two independent checks for the two attributes, which may reject the received value, it creates no logical inconsistency on the program level of the interface software.

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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<xsd:element name="Float" type="FloatType"/><xsd:complexType name="FloatType"> <xsd:attribute name="Name" type="xsd:string" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> <xsd:attribute name="Bottom" type="xsd:float"/> <xsd:attribute name="Top" type="xsd:float"/></xsd:complexType>

<FloatName="MyParameter" Description="A decimal number"

/>

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8: Interface definitions may be checked for such inconsistent definitions on the import of the XML file.

8.5.7.3 XML schema

8.5.7.4 Example

8.5.8 Bool

8.5.8.1 Description

8.5.8.1.1 A data element used for transmission of the logical state of true or false.

8.5.8.1.2 The representation of a boolean value may vary depending on the selected media. If there is no explicit specification given by the used transmission media, one of the following representations has to be used.

Table 3 Representations

Data type False Value True Value

Bit 0 1

Int8 0 Any other value

String false true

8.5.8.1.3 What representation has to be used on a specific media has to be defined in the subordinate standard documents.

8.5.8.2 Definition

BoolName Text A name that identifies this data element across all type definitionsDescription Text A short description of the purpose of this data elementValue Bool Value of the boolean transmitted during runtime

8.5.8.3 XML schema

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<xsd:element name="Double" type="DoubleType"/><xsd:complexType name="DoubleType"> <xsd:attribute name="Name" type="xsd:string" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> <xsd:attribute name="Bottom" type="xsd:double"/> <xsd:attribute name="Top" type="xsd:double"/></xsd:complexType>

<DoubleName="MyParameter" Description="A decimal number with a limited valid range" Bottom="50.5"Top="123.45"

/>

<xsd:element name="Bool" type="BoolType"/><xsd:complexType name="BoolType"> <xsd:attribute name="Name" type="xsd:string" use="required"/> <xsd:attribute name="Description" type="xsd:string"/></xsd:complexType>

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8.5.8.4 Example

8.5.9 Binary

8.5.9.1 Description

8.5.9.1.1 A data element used for transmission of binary data. As the data is binary, this document does not include information of the encoding.

8.5.9.1.2 If the content of the binary data is defined in a subordinate document, there has to be given some information regarding the network byte order too.

8.5.9.2 Definition

BinaryName Text A name that identifies this data element across all type definitionsDescription Text A short description of the purpose of this data elementMaxByteLength UInt16 The maximum length of the binary data block in bytes as a 16 bit

unsigned integer value. If the received number of bytes is larger than the given value a data consistency error event is tripped.

FixedLength Bool If set to true the binary data block is not allowed to vary in size during runtime. It always has to use the number of bytes defined by MaxByteLength. If the received number of bytes is different from the given value a data consistency error event is tripped.

CurrentByteLength UInt16 If FixedLength is set to false, the length of the transmitted binary data block has to be given as a 16 bit unsigned integer value. This value is transmitted first, before the binary data block transmission.

Data Byte Array Binary data block transmitted during runtime.

8.5.9.3 XML schema

8.5.9.4 Example

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<BoolName="MySwitch" Description="On-Off Signal"

/>

<xsd:element name="Binary" type="BinaryType"/><xsd:complexType name="BinaryType"> <xsd:attribute name="Name" type="xsd:string" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> <xsd:attribute name="MaxByteLength" type="xsd:unsignedShort" use="required"/> <xsd:attribute name="FixedLength" type="xsd:boolean" use="required"/></xsd:complexType>

<BinaryName="MyData" Description="JPG Image" MaxByteLength="65535"FixedLength="false"

/>

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8.5.10 Fixed String

8.5.10.1 Description

8.5.10.1.1 A data element used for transmission of text of fixed length.

8.5.10.1.2 No matter if 7 or 8 bits are used for encoding there is always one byte per character transmitted.

8.5.10.1.3 If the string to be transmitted is shorter than the defined string length it has to be filled up with spaces (20 hex) to the full length. The receiver has to cut off spaces present at the end of the string (trim right) before handing over the data to the application.

8.5.10.1.4 Because of this, strings intentionally ending with a space cannot be transmitted, as the space will get lost during reception. If this is not acceptable, the variable string length type may be used instead of the fixed length type.

8.5.10.2 Definition

StringFName Text A name that identifies this data element across all type definitionsDescription Text A short description of the purpose of this data elementByteLength UInt16 The length of the string data in bytes as 16 bit unsigned integer value.Encoding ASCII or

ISOMay be set to ASCII (7 bit/char) or ISO/IEC 8859-1 (8 bit/char)

Enumeration If an enumeration node is included, the received value will be checked against the given list of valid values (e.g. command codes).If the received value is not part of the list a data consistency error event is tripped.If such a list is not given, this check is not done by the receiver.

Value Text A single valid string value. List element of the Enumeration.

Description Text Short description of this value (e.g. Function of the command code).

Data String Data String data transmitted during runtime

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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8.5.10.3 XML schema

8.5.10.4 Example

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<xsd:element name="StringF" type="StringFType"/><xsd:complexType name="StringFType"> <xsd:sequence minOccurs="0"> <xsd:element name="Enumeration" type="StringEnum"/> </xsd:sequence> <xsd:attribute name="Name" type="xsd:string" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> <xsd:attribute name="ByteLength" type="xsd:unsignedShort" use="required"/> <xsd:attribute name="Encoding" use="required"> <xsd:simpleType> <xsd:restriction base="xsd:string"> <xsd:enumeration value="ASCII"/> <xsd:enumeration value="ISO"/> </xsd:restriction> </xsd:simpleType> </xsd:attribute></xsd:complexType><xsd:complexType name="StringEnum" > <xsd:sequence maxOccurs="unbounded"> <xsd:element name="ValidData"> <xsd:complexType> <xsd:attribute name="Value" type="xsd:string" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> </xsd:complexType> </xsd:element> </xsd:sequence></xsd:complexType >

<StringF Name="SomeText" Description="A ASCII string of fixed length" ByteLength="64"Encoding="ASCII"

/>

<StringF Name="MyCommand" Description="A command string only accepting valid codes" ByteLength="3"Encoding="ASCII">

<Enumeration> <ValidData Value="NOP" Description="Idle"/> <ValidData Value="STA" Description="Start"/> <ValidData Value="STP" Description="Stop"/> <ValidData Value="SLP" Description="Suspend"/> </Enumeration></StringF>

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8.5.11 Variable String

8.5.11.1 Description

8.5.11.1.1 A data element used for transmission of text of variable length.

8.5.11.1.2 A minimum of 8 bit per character is transmitted even if only 7 bits are used for encoding. UTF-8 uses a variable number of bytes for character encoding and because of that the number of characters fitting into the given number of bytes (MaxByteLength) may vary too. Because of that together with a variable string the number of included characters is transmitted, not the byte length.

8.5.11.1.3 As the byte order is clearly defined below (Chapter 9 ), there is no need to add a Byte Order Mark (BOM) to the UTF-8 string.

8.5.11.2 Definition

StringVName Text A name that identifies this data element across all type definitionsDescription Text A short description of the purpose of this data elementMaxByteLength UInt16 The maximum length of the string data in bytes as a 16 bit unsigned

integer value.Encoding ASCII,

ISO or UTF8

May be set to ASCII (7 bit/char) or ISO/IEC 8859-1 (8 bit/char) or ISO/IEC 10646 - UTF8 (8-24 bit/char).

Enumeration If an enumeration node is included, the received value will be checked against the given list of valid values (e.g. command codes).If the received value is not part of the list a data consistency error event is tripped.If such a list is not given, this check is not done by the receiver.

Value Text A single valid value. List element of the Enumeration.Description Text Short description of this value (e.g. Function of the

command code).CurrentCharLength UInt16 The length of the transmitted string data (amount of characters) has to

be given as a 16 bit unsigned integer value. This value is transmitted first before the string transmission. Using UTF8 the char length of the string may differ from the byte length.

Data String Data String data transmitted during runtime

8.5.11.3 XML schema

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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<xsd:element name="StringV" type="StringVType"/><xsd:complexType name="StringVType"> <xsd:sequence minOccurs="0"> <xsd:element name="Enumeration" type="StringEnum"/> </xsd:sequence> <xsd:attribute name="Name" type="xsd:string" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> <xsd:attribute name="MaxByteLength" type="xsd:unsignedShort" use="required"/> <xsd:attribute name="Encoding" use="required"> <xsd:simpleType> <xsd:restriction base="xsd:string"> <xsd:enumeration value="ASCII"/> <xsd:enumeration value="ISO"/> <xsd:enumeration value="UTF8"/> </xsd:restriction> </xsd:simpleType> </xsd:attribute></xsd:complexType><xsd:complexType name="StringEnum" > <xsd:sequence maxOccurs="unbounded"> <xsd:element name="ValidData"> <xsd:complexType> <xsd:attribute name="Value" type="xsd:string" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> </xsd:complexType> </xsd:element>

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8.5.11.4 Example

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

Page 22 Doc. jn l SEMI

<StringV Name="SomeText" Description="A ISO string of variable length" MaxByteLength="32"Encoding="ISO"

/>

<xsd:element name="StringV" type="StringVType"/><xsd:complexType name="StringVType"> <xsd:sequence minOccurs="0"> <xsd:element name="Enumeration" type="StringEnum"/> </xsd:sequence> <xsd:attribute name="Name" type="xsd:string" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> <xsd:attribute name="MaxByteLength" type="xsd:unsignedShort" use="required"/> <xsd:attribute name="Encoding" use="required"> <xsd:simpleType> <xsd:restriction base="xsd:string"> <xsd:enumeration value="ASCII"/> <xsd:enumeration value="ISO"/> <xsd:enumeration value="UTF8"/> </xsd:restriction> </xsd:simpleType> </xsd:attribute></xsd:complexType><xsd:complexType name="StringEnum" > <xsd:sequence maxOccurs="unbounded"> <xsd:element name="ValidData"> <xsd:complexType> <xsd:attribute name="Value" type="xsd:string" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> </xsd:complexType> </xsd:element>

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8.5.12 Timestamp

8.5.12.1 Description

8.5.12.1.1 A Unix (POSIX) time stamp is a simple Int32 counter counting the seconds starting from 1. January 1970 00:00 GMT. To increase the resolution without altering the default format of the Unix time stamp an additional Int16 value holds the milliseconds.

8.5.12.1.2 Therefor the 1st of January 2014 00:00:00.357 would be encoded as

TimestampSeconds = 1388530800

TimestampMilliseconds = 357

8.5.12.2 Definition

TimestampName Text A name that identifies this data element across all type definitionsDescription Text A short description of the purpose of this data elementTimestampSeconds Int32 Unix time stamp (seconds since 1. January 1970 00:00 GMT)TimestampMilliseconds Int16 Milliseconds since the last full second given by TimestampSeconds

8.5.12.3 XML schema

8.5.12.4 Example

9 Network Byte Order9.1 If there is no explicit specification for the network byte order given by the used transmission media a little endian byte order has to be used. This means the low byte of a multi byte data type has to be transmitted first. Respectively while sending a data block, the byte with the lowest address has to be transmitted first.

10 Structure of a XML Interface description file10.1 The basic structure of an interface description file is given in the example below.

The file shall use a standard xml header and the encoding has to be UTF-8.

A DOCTYPE definition may be present referencing the PV35.dtd released together with this standard.

The root node of the interface definition has to be of the <Interface> type.

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

Page 23 Doc. jn l SEMI

<xsd:element name="Timestamp" type="TimestampType"/><xsd:complexType name="TimestampType"> <xsd:attribute name="Name" type="xsd:string" use="required"/> <xsd:attribute name="Description" type="xsd:string"/></xsd:complexType><Timestamp

Name="StartTime"Description="A point in time encoded as a float value"

/>

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The namespace shall be set to "urn:semi-org:xsd.PV35-1.V[Current Version].InterfaceDescription".

A reference to the PV35.xsd scheme released together with this standard may be present.

9: 7 Bit ASCII is a subset of UTF-8. Therefore a file encoded in 7 bit ASCII is although a valid UTF-8 document.

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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<?xml version="1.0" encoding="utf-8" standalone="no"?><!DOCTYPE Interface SYSTEM "PV35.dtd"><Interface

UID="id1" Name="Name of the interface" Version="Version string of the interface" Description="Purpose of the interface" xsi:SchemaLocation="PV35.xsd" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"xmlns="urn:semi-org:xsd.PV35-1.V1.00.InterfaceDescription"

><!--begin_: Interface definition -->

<!--end_: Interface definition --></Interface>

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APPENDIX 1 THE XSD SCHEMA FILE DEFINED BY THIS STANDARDNOTICE: The material in this Appendix is an official part of SEMI doc. 5153 and was approved by full letter ballot procedures on [A&R approval date].

A1-1 The XSD Schema File Defined by this Standard

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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<xsd:schema xmlns:xsd="http://www.w3.org/2001/XMLSchema" xmlns:PV35="urn:semi-org:xsd. PV35-1.V1.00.InterfaceDescription" targetNamespace="urn:semi-org:xsd. PV35-1.V1.00.InterfaceDescription" elementFormDefault="qualified" version="0.35"><!--NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any particular application. The determination of the suitability of the standard is solely the responsibility of the user. Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant literature, respecting any materials or equipment mentioned herein. These standards are subject to change without notice.By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and the risk of infringement of such rights are entirely their own responsibility.--> <xsd:annotation> <xs:appinfo>Interface description</xs:appinfo> <xsd:documentation xml:lang="EN"> Interface description language PV35/5153 </xsd:documentation> </xsd:annotation>

<xsd:element name="Interface" type="InterfaceType"/>

<xsd:complexType name="InterfaceType"> <xsd:sequence minOccurs="0" maxOccurs="unbound"> <xsd:choice> <xsd:element name="Struct" type="StructType"/> <xsd:element name="List" type="ListType"/> <xsd:element name="StringF" type="StringFType"/> <xsd:element name="StringV" type="StringVType"/> <xsd:element name="Binary" type="BinaryType"/> <xsd:element name="Bool" type="BoolType"/> <xsd:element name="Int8" type="Int8Type"/> <xsd:element name="Int16" type="Int16Type"/> <xsd:element name="Int32" type="Int32Type"/> <xsd:element name="UInt8" type="UInt8Type"/> <xsd:element name="UInt16" type="UInt16Type"/> <xsd:element name="UInt32" type="UInt32Type"/> <xsd:element name="Float" type="FloatType"/> <xsd:element name="Double" type="DoubleType"/> <xsd:element name="Timestamp" type="TimestampType"/> </xsd:choice> </xsd:sequence> <xsd:attribute name="Name" type="xsd:string" use="required"/> <xsd:attribute name="UID" type="xsd:ID" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> <xsd:attribute name="Version" type="xsd:string" use="required"/> </xsd:complexType>

<xsd:complexType name="StructType"> <xsd:sequence minOccurs="0" maxOccurs="unbound"> <xsd:choice> <xsd:element name="Struct" type="StructType"/> <xsd:element name="List" type="ListType"/> <xsd:element name="StringF" type="StringFType"/> <xsd:element name="StringV" type="StringVType"/> <xsd:element name="Binary" type="BinaryType"/>

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This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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<xsd:element name="Bool" type="BoolType"/> <xsd:element name="Int8" type="Int8Type"/> <xsd:element name="Int16" type="Int16Type"/> <xsd:element name="Int32" type="Int32Type"/> <xsd:element name="UInt8" type="UInt8Type"/> <xsd:element name="UInt16" type="UInt16Type"/> <xsd:element name="UInt32" type="UInt32Type"/> <xsd:element name="Float" type="FloatType"/> <xsd:element name="Double" type="DoubleType"/> <xsd:complexType name="Int32Type"> <xsd:sequence minOccurs="0"> <xsd:element name="Enumeration" type="Int32Enum"/> </xsd:sequence> <xsd:attribute name="Name" type="xsd:string" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> <xsd:attribute name="Bottom" type="xsd:int"/> <xsd:attribute name="Top" type="xsd:int"/> </xsd:complexType> <xsd:complexType name="Int32Enum"> <xsd:sequence maxOccurs="unbounded"> <xsd:element name="ValidData"> <xsd:complexType> <xsd:attribute name="Value" type="xsd:int" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> </xsd:complexType> </xsd:element> </xsd:sequence> </xsd:complexType >

<xsd:complexType name="UInt8Type"> <xsd:sequence minOccurs="0"> <xsd:element name="Enumeration" type="UInt8Enum"/> </xsd:sequence> <xsd:attribute name="Name" type="xsd:string" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> <xsd:attribute name="Bottom" type="xsd:unsignedByte"/> <xsd:attribute name="Top" type="xsd:unsignedByte"/> </xsd:complexType> <xsd:complexType name="UInt8Enum"> <xsd:sequence maxOccurs="unbounded"> <xsd:element name="ValidData"> <xsd:complexType> <xsd:attribute name="Value" type="xsd:unsignedByte" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> </xsd:complexType> </xsd:element> </xsd:sequence> </xsd:complexType >

<xsd:complexType name="UInt8Type"> <xsd:sequence minOccurs="0"> <xsd:element name="Enumeration" type="UInt8Enum"/> </xsd:sequence> <xsd:attribute name="Name" type="xsd:string" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> <xsd:attribute name="Bottom" type="xsd:unsignedByte"/> <xsd:attribute name="Top" type="xsd:unsignedByte"/> </xsd:complexType> <xsd:complexType name="UInt8Enum"> <xsd:sequence maxOccurs="unbounded"> <xsd:element name="ValidData"> <xsd:complexType>

<xsd:attribute name="Value" type="xsd:unsignedByte" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> </xsd:complexType>

</xsd:element </xsd:sequence </xsd:complexType

<xsd:complexType <xsd:sequence <xsd:element </xsd:sequence <xsd:attribute <xsd:attribute <xsd:attribute <xsd:attribute </xsd:complexType <xsd:complexType <xsd:sequence <xsd:element <xsd:complexType <xsd:attribute <xsd:attribute </xsd:complexType </xsd:element </xsd:sequence </xsd:complexType

<xsd:complexType <xsd:sequence <xsd:element </xsd:sequence <xsd:attribute <xsd:attribute <xsd:attribute <xsd:attribute </xsd:complexType <xsd:sequence <xsd:element <xsd:complexType <xsd:attribute <xsd:attribute </xsd:complexType

</xsd:element </xsd:sequence </xsd:complexType

<xsd:complexType <xsd:attribute <xsd:attribute <xsd:attribute <xsd:attribute </xsd:complexType

<xsd:complexType <xsd:attribute <xsd:attribute <xsd:attribute <xsd:attribute </xsd:complexType

<xsd:complexType <xsd:attribute <xsd:attribute </xsd:complexType

<xsd:complexType <xsd:attribute <xsd:attribute <xsd:attribute <xsd:attribute </xsd:complexType </xsd:sequence

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This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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<xsd:simpleType> <xsd:restriction base="xsd:string"> <xsd:enumeration value="ASCII"/> <xsd:enumeration value="ISO"/> </xsd:restriction> </xsd:simpleType> </xsd:attribute> </xsd:complexType>

<xsd:complexType name="StringVType"> <xsd:sequence minOccurs="0"> <xsd:element name="Enumeration" type="StringEnum"/> </xsd:sequence> <xsd:attribute name="Name" type="xsd:string" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> <xsd:attribute name="MaxByteLength" type="xsd:unsignedShort" use="required"/> <xsd:attribute name="Encoding" use="required"> <xsd:simpleType> <xsd:restriction base="xsd:string"> <xsd:enumeration value="ASCII"/> <xsd:enumeration value="ISO"/> <xsd:enumeration value="UTF8"/> </xsd:restriction> </xsd:simpleType> </xsd:attribute> </xsd:complexType>

<xsd:complexType name="StringEnum" > <xsd:sequence maxOccurs="unbounded"> <xsd:element name="ValidData"> <xsd:complexType> <xsd:attribute name="Value" type="xsd:string" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> </xsd:complexType> </xsd:element> </xsd:sequence> </xsd:complexType > <xsd:complexType name="TimestampType"> <xsd:attribute name="Name" type="xsd:string" use="required"/> <xsd:attribute name="Description" type="xsd:string"/> </xsd:complexType>

</xsd:schema>

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RELATED INFORMATION 1 THE DOCUMENT TYPE DEFINITION (DTD) DEFINED BY THIS STANDARDNOTICE: This Related Information is not an official part of SEMI doc. 5153 and was derived from the work of the global PV Automation Technical Committee. This Related Information was approved for publication by full letter ballot procedures on [A&R approval date].

<?xml version="1.0" encoding="utf-8"?><!ELEMENT Interface (Struct*, List*, Int8*, Int16*, Int32*, UInt8*, UInt16*, UInt32*, Bool*, Float*, Double*, Binary*, StringF*, StringV*, Timestamp*)*><!ATTLIST Interface

UID ID #REQUIREDName CDATA #REQUIREDDescription CDATA #IMPLIEDVersion CDATA #REQUIREDxsi:SchemaLocation CDATA #IMPLIEDxmlns:xsi CDATA #IMPLIED xmlns CDATA #IMPLIED

><!ELEMENT Struct (Struct*, List*, Int8*, Int16*, Int32*, UInt8*, UInt16*, UInt32*, Bool*, Float*, Double*, Binary*, StringF*, StringV*, Timestamp*)*><!ATTLIST Struct

UID ID #REQUIREDName CDATA #REQUIREDDescription CDATA #IMPLIED

><!ELEMENT List (Struct*, List*, Int8*, Int16*, Int32*, UInt8*, UInt16*, UInt32*, Bool*, Float*, Double*, Binary*, StringF*, StringV*, Timestamp*)*><!ATTLIST List

UID ID #REQUIREDName CDATA #REQUIREDDescription CDATA #IMPLIEDMinElements CDATA "1"MaxElements CDATA #REQUIRED

><!ELEMENT Enumeration (ValidData*)><!ELEMENT ValidData EMPTY><!ATTLIST ValidData

Value CDATA #REQUIREDDescription CDATA #IMPLIED

><!ELEMENT Int8 (Enumeration?)><!ATTLIST Int8

Name CDATA #REQUIREDDescription CDATA #IMPLIEDBottom CDATA #IMPLIEDTop CDATA #IMPLIED

><!ELEMENT Int16 (Enumeration?)><!ATTLIST Int16

Name CDATA #REQUIREDDescription CDATA #IMPLIEDBottom CDATA #IMPLIEDTop CDATA #IMPLIED

><!ELEMENT Int32 (Enumeration?)><!ATTLIST Int32

Name CDATA #REQUIREDDescription CDATA #IMPLIEDBottom CDATA #IMPLIEDTop CDATA #IMPLIED

><!ELEMENT UInt8 (Enumeration?)><!ATTLIST UInt8

Name CDATA #REQUIREDDescription CDATA #IMPLIEDBottom CDATA #IMPLIEDTop CDATA #IMPLIED

>

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

Page 28 Doc. jn l SEMI

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This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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<!ELEMENT UInt16 (Enumeration?)><!ATTLIST UInt16

Name CDATA #REQUIREDDescription CDATA #IMPLIEDBottom CDATA #IMPLIEDTop CDATA #IMPLIED

>

<!ELEMENT UInt32 (Enumeration?)><!ATTLIST UInt32

Name CDATA #REQUIREDDescription CDATA #IMPLIEDBottom CDATA #IMPLIEDTop CDATA #IMPLIED

>

<!ELEMENT Float EMPTY><!ATTLIST Float

Name CDATA #REQUIREDDescription CDATA #IMPLIEDBottom CDATA #IMPLIEDTop CDATA #IMPLIED

>

<!ELEMENT Double EMPTY><!ATTLIST Double

Name CDATA #REQUIREDDescription CDATA #IMPLIEDBottom CDATA #IMPLIEDTop CDATA #IMPLIED

>

<!ELEMENT Bool EMPTY><!ATTLIST Bool

Name CDATA #REQUIREDDescription CDATA #IMPLIED

>

<!ELEMENT Binary EMPTY><!ATTLIST Binary

Name CDATA #REQUIREDDescription CDATA #IMPLIEDMaxByteLength CDATA #REQUIREDFixedLength (true|false) "true"

>

<!ELEMENT StringF (Enumeration?)><!ATTLIST Binary

Name CDATA #REQUIREDDescription CDATA #IMPLIEDByteLength CDATA #IMPLIEDEncoding CDATA (ASCII|ISO) "ASCII"

>

<!ELEMENT StringV (Enumeration?)><!ATTLIST Binary

Name CDATA #REQUIREDDescription CDATA #IMPLIEDMaxByteLength CDATA #IMPLIEDEncoding CDATA (ASCII|ISO|UTF8) "ASCII"

>

<!ELEMENT Timestamp EMPTY><!ATTLIST Timestamp

Name CDATA #REQUIREDDescription CDATA #IMPLIED

>

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RELATED INFORMATION 2 EXAMPLE OF AN INTERFACE - BASIC INTERFACE AS DEFINED BY PV35NOTICE: This Related Information is not an official part of SEMI doc. 5153 and was derived from the work of the global PV Automation Technical Committee. This Related Information was approved for publication by full letter ballot procedures on [A&R approval date].

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

Page 30 Doc. jn l SEMI

<?xml version="1.0" encoding="utf-8" standalone="no"?><!DOCTYPE Interface SYSTEM "PV35.dtd"><Interface

UID="id1" Name="PV35_Basic" Version="0.35" Description="Mimimal Interface based on PV35" xsi:SchemaLocation="PV35.xsd" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"xmlns="urn:semi-org:xsd. PV35-1.V1.00.InterfaceDescription "

><!--begin_: General Data Handshake --> <Struct UID="id10" Name="GeneralDataHS" Description="Bidirectional Handshake for GD"> <Binary

Name="GDHSTX" Description="GD Handshake Sender Part" MaxByteLength="1" FixedLength="true"/>

<Binary Name="GDHSRX" Description="GD Handshake Receiver Part" MaxByteLength="1" FixedLength="true"/>

</Struct><!--end_: General Data Handshake -->

<!--begin_: Material Data Handshake --> <List

UID="id20" Name="MaterialDataHS" Description="Handshake for MD" MinElements="0" MaxElements="1">

<List UID="id21" Name="MDBodyHS" Description="Handshake for MD" MinElements="1" MaxElements="1"><!-- Max Elements = Number of Tracks -->

<Binary Name="MDHSMode" Description="MD Handshake Mode Resolution Part" MaxByteLength="1" FixedLength="true"/>

<Binary Name="MDHSHandoff" Description="MD Handshake Material Handoff Part" MaxByteLength="1" FixedLength="true"/>

<UInt8 Name="MDLinkID" Description="Link to Data Block"/> </List> </List><!--end_: Material Data Handshake -->

<!--begin_: General Data--> <List

UID="id50" Name="GeneralData" Description="Bidirectional Command transmission"MinElements="0" MaxElements="1">

<Struct UID="id51" Name="GeneralDataBody" Description="Data Block"> <List UID="id52" Name="CommandRequestBody" Description="Command Block"

MinElements="0" MaxElements="1"> <Binary Name="CSNOCount" Description="Command sequence number"

MaxByteLength="2" FixedLength="true"/> <Binary Name="STDID" Description="ID of standard defining GD"

MaxByteLength="1" FixedLength="true"/> <Binary Name="RSV" Description="Reserved byte may be used by sub-standard"

MaxByteLength="1" FixedLength="true"/> <UInt8 Name="GDIDCC" Description="Command category code"/> <UInt8 Name="GDIDGC" Description="Command Code"/> <UInt16 Name="GDLength" Description="Byte length of GD block"/> <Struct UID="id53" Name="Command Data" Description="Parameters of Command"> <!--begin_: Command Specific Parameters--> <!--end_: Command Specific Parameters--> </Struct> </List>

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<List UID="id54" Name="CommandResponseBody" Description="Command Block" MinElements="0" MaxElements="1">

<Binary Name="CSNOCount" Description="Command sequence number (Link to command)" MaxByteLength="2" FixedLength="true"/>

<Binary Name="STDID" Description="ID of standard defining GD" MaxByteLength="1" FixedLength="true"/>

<Binary Name="RSV" Description="Reserved byte may be used by sub-standard" MaxByteLength="1" FixedLength="true"/>

<UInt8 Name="GDIDCC" Description="Command category code"/> <UInt8 Name="GDIDGC" Description="Response code"/> <UInt16 Name="GDLength" Description="Byte length of GD block"/> <Struct UID="id55" Name="Response Data" Description="Parameters of Response"> <!--begin_: Response Specific Parameters--> <!--end_: Response Specific Parameters--> </Struct> </List>

</Struct> </List><!--end_: General Data-->

<!--begin_: Material Data--> <List UID="id100" Name="MaterialData" Description="Bidirectional Data transmission"

MinElements="0" MaxElements="1"> <Binary Name="STDID" Description="ID of standard defining MD"

MaxByteLength="1" FixedLength="true"/> <Binary Name="RSV" Description="Reserved byte may be used by sub-standard (MD Link ID)"

MaxByteLength="1" FixedLength="true"/> <UInt8 Name="MDType" Description="Type of material ID"/> <UInt16 Name="MDLength" Description="Byte Length of MD Data Block"/> <List UID="id101" Name="MaterialDataBody" Description="Data Block"

MinElements="0" MaxElements="1"> <!--begin_: Additional Material Data--> <!--end_: Additional Material Data--> </List> </List><!--end_: Material Data--></Interface>

NOTICE: Semiconductor Equipment and Materials International (SEMI) makes no warranties or representations as to the suitability of the Standards and Safety Guidelines set forth herein for any particular application. The determination of the suitability of the Standard or Safety Guideline is solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature, respecting any materials or equipment mentioned herein. Standards and Safety Guidelines are subject to change without notice.

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