+ All Categories

Home > Documents > In situ spectroscopic ellipsometry as a versatile tool to study … · 2020. 12. 11. · Al(CH 3) 3...

In situ spectroscopic ellipsometry as a versatile tool to study … · 2020. 12. 11. · Al(CH 3) 3...

Date post:	25-Jan-2021
Category:	Documents
Upload:	others
View:	1 times
Download:	0 times

Download Report this document

Share this document with a friend

Embed Size (px):

20

1 In situ spectroscopic ellipsometry as a versatile tool to study atomic layer deposition Erik Langereis Department of Applied Physics [email protected] http://www.phys.tue.nl/pmp Ellipsometry Workshop Enschede, 11 th February 2010 / Department of Applied Physics – Erik Langereis 1 / 38 Outline • Atomic layer deposition (ALD) - Basics of ALD - Materials deposited by ALD - Applications for ALD • In situ spectroscopic ellipsometry as tool to monitor ALD Monitoring the film thickness - ALD growth & growth per cycle - Self-limiting chemistry - Initial film growth & substrate dependence - Nanolaminates Parametrizing the dielectric function - Metallic films: Electrical properties & electron scattering - Ultrahigh-k dielectrics Film composition & microstructure Thin film materials: Al 2 O 3 Ta 2 O 5 Er 2 O 3 TiO 2 TiN TaN Ta 3 N 5 SrTiO 3 Pt Ru

Recommended

Ch.3 water, p h

Analysis of h Ch 3

InterchApter F - Zanichelli · 7 H 16 CH 3 (CH 2) 5 CH 3 9 –90.55 98.4 liquids at 20°C n-octane C 8 H 18 CH 3 (CH 2) 6 CH 3 18 –56.82 125.67 and 1 bar n-nonane C 9 H 20 CH 3

LIGHTWEIGHT COMPOSITES Epoxy - Matrix materials for faster ... · Presentation Agenda . 3 Introduction - Chemistry Epoxy resin Amine Epoxy polymer N H H N R N H H CH CH 2 O CH 2 CH

B&H Ch 3 Powerpoint

Alkynes. C n H 2n-2 C 2 H 2 H:C:::C:H H—C C—H sp => linear, 180 o acetylene ethyne C 3 H 4 CH 3 C CH methylacetylene propyne.

Inorganic arsenic in rice using ICP-QQQMS with and without ...Inorganic As (iAs) Methylated arsenic (DMA, Tetra) H C 3 As+ CH 3 CH 3 CH 2 C OH O O H 3 C C H 3 As H 3 C H 3 C O O H

Ch 3 - D. H. Holt 13.03 (1)

AQA A2 CHEMISTRY TOPIC 4.6 AROMATIC …...synthesis: CH 3 CH 3 CH 3 CH 3 3 3 Step 1 Step 2 Step 3 NO NO NH 2 2 2 SO H SO H (a) For each step below, name the type of reaction taking

DUNLAP H IG H S CH OOL Documents... · DUNLAP H IG H S CH OOL STUDENT HANDBOOK & COURSE OFFERINGS 2017-2018 . TABLE OF CONTENTS Program Planning 3 Study Habits 3 Semester Exams 3

SummenformelGruppenformelStrukturformelName CH 4 C 2 H 6 CH 3 C 3 H 8 CH 3 CH 2 CH 3 C 4 H 10 CH 3 (CH 2 ) 2 CH 3 C 5 H 12 CH 3 (CH 2 ) 3 CH 3 C 6 H 14.

Progress Report Zhou Jingjie 2013/10/16. The addition of DMP 2CH 3 OH + CO 2 （ CH 3 O ） 2 CO + H 2 O (CH 3 O) 2 C(CH 3 ) 2 +H 2 O→ 2CH 3 OH+ (CH 3 ) 2.

TEACHING TRANSPARENCY Aldehydes and Ketones 176€¦ · Aldehydes and Ketones 176 H O O HOIIC CH 3 vanillin IC H O benzaldehyde C O CH 2 IOH CH 3 CH 2 raspberry ketone ICHJCH C H

Omega 5 Frequently Asked Questions...0.10 0.20 0.30 0.40 0.50 0.60 0.70 0.80 1.5 2 2.5 min AU App ID 23738 HLC TMS TMS O OH CH 3 CH 3 H N H O O OH N H N N S N CH 3 CH 3 CH 3 OH O CH

École Saint-Charles - École Saint-Charles · = Hetp Chqrlie find the chick. Join the letters ch. h ch c h ch C c ch h h c h ch chc hch hh 3 Write. Chirp, chtrp, Chirp, chirp, teo

Tom Cheung, Bob Ruckle Siltech Corp Toronto, ON, Canada€¦ · OSi CH 3 Si CH 3 CH 3 b CH 3 (CH 2) 2 CH 3 OSi (CH 2) 3 CH 3 OSi CH 3 c Multifunctional: C 6 H 9 O ACR series: b=0

ALKANES C n H 2n+2. Alkanes or C n H 2n+2 C 3 H 8 H H H H–C–C–C–H H H H CH 3 CH 2 CH 3 Chemical Formula Structural Formula Condensed Structural Formula.

Water Injection: An Expanding Problem · Si O O O H C CH 3 H 3 C H 3 C Si Si CH 3 CH 3 Si O Si O Si O Si OH CH 3 CH 3 CH 3 CH 3 CH 3 CH 3 CH 3 CH 3 O O O O O O Si HO H 3 C CH 3 CH