Gerard Roelofs

Head NanoLab

Intake & Access to NanoLab

Course program NanoLab cleanroom

Combines nanotechnology, microsystems and materials science research at the University of Twente

• Staff

– 525 people, 44 research groups

• Yearly turnover

– 55 M€ with 60% from external sources

• Mission

– excelling in its research field &

exploring new research themes

− educating researchers and designers

− offering state of the art infrastructures

− commercializing research results

− initiating and participating in fruitful international collaboration

MESA+ Institute for Nanotechnology

Science

Advanced Materials,

Bionanotechnology,

Applied NanoPhotonics,

Nanoelectronics, Fluidics,

Polymer Science, etc…

Education

Twente Graduate School

Bsc + Msc + PhD programmes at

University of Twente

Infrastructure

NanoLab and specialized labs

Open-access

for Research, Business,

Education

Knowledge &Technology Transfer

>50 Spin-offs

Industry Collaboration

Vouchers

Production Facility and Equipment Fund

About NanoLabNL

• Providing an open-access infrastructure for research and innovation in nanotechnology

• NanoMaterials, NanoFabrication, NanoFluidics, NanoElectronics, BioNano, NanoMedicine, ….

• National consortium at 4 locations:

• Eindhoven

• Groningen

• Twente

• Delft

A1+2

• MESA+ NanoLab Twente facilities:

– 2500 m2 building

– 1250 m2 cleanroom

– 150 m2 materials analysis lab

– 150 m2 research group labs

– 800 m2 VC-G surface

– 150 m2 BioNano lab

• 400 users, ~80 new/ year

Vibration-

speed-

amplitude

VC-C 12,5 um/s 1 um details; optical microscope, epitaxy

VC-D 6,3 um/s 0,3 um details; foto lithography, cell implantation app.

VC-E 3,15 um/s 0,1 um details; scanning probe scanning beam, optical benches

VC-F 1,56 um/s 30 nm details; scanning probe,scanning beam

VC-G 0,78 um/s 10 nm details; Nanotechnology

VC-curves Frequency 1-100 Hz

Cleanroom ?

Analysis ?

BioNanoLab ?

Group laboratory ?

Cleanroom

LaboratoriesLaboratories

Analyse

NanoLab Laboratories

Offices

Facility/

Technics

area

Laboratories

Cleanroom

Laboratories

Cleanroom

Vibration free

Cleanroom

Cleanroom ISO 7/ ISO 5• Number of particles with a

diameter of 0,1 µm per m3

Working

Walking

A human produces 10.000.000.000 particles = 1 m 2 per day (50 um thick)

100.000 500.000 1.000.000 2.500.000

5.000.000 10.000.000 15.000.000//30.000.000

MIS webpage

MIS website is your guide in the Cleanroom

• For selection of courses

• For safety information

• For status of equipment

• For cleanroom news

• For booking of equipment

• Who to contact of NL-Staff

http://www.utwente.nl/mesaplus/nanolab/cleanroom/

Inlog:Username: initialsPassword : initials

Janneke Hoedemaekers

Technical director

Gerard Roelofs

Head NanoLab

Sharron Koch

Secretary

Bert vd Akker

ICTAnita Kooij

Financial

HenkJan de Haan

Building

Rico Keim

EF TEM

Gerard Kip

XPS

Mark Smithers

HR SEM

Personal MESA+ NanoLab

Analyse & other support

Henk v Wolferen

Dual FIB

BioNanoLab

Eddy Ruiter

Metrology

Building

IteJan Hoolsema

LPCVD

Marion Nijhuis

Wetbenches

Furnaces

Hans Mertens

Sputtering,

Evaporating

Huib van Vossen

Lithography

Ton Jenneboer

Lithography

E-beam lith.

Peter Linders

Masks

PECVD

Rene Wolf

Plasma Etching

Personal MESA+ NanpLab

NL- Cleanroom Staff

Robert Wijn

Metrology

Ion implanting

Christiaan Bruinink

Quality Engineer

Meint de Boer

Technology advice

Roald Tiggelaar

Researcher

Micro/nanotechnology

Samantha Ooijman

Courses, wetbenches,

furnaces

• Tour NanoLab

Interview

• Are you PhD, master student, guest

• Who is your supervisor

• Description of your project

•

• Time Schedule

• Experience in NanoLab; with technologies?

• Which apparatus are needed?