235
IPPJ-AM- 14
ENERGY DEPENDENCE OF SPUTTERING YIELDS
OF MONATOMIC SOLIDS
N. Matsunami, Y. Yamamura, Y. Itikawa, N. Itoh
Y. Kazumata, S. Miyagawa, K. Morita and R. Shimizu
Institute of Plasma Physics, Nagoya University
Chikusa-ku, Nagoya 464, Japan
June 1980
This document is prepared as a prep血t of compilation of atomic data for fusion
research sponsoredfully or partly bythe IPP/Nagoya University. This is intended for
future publication in a ]oumalor will be included in a data book after some evaluations
or rearrangements of its contents. This document should not be referredwithoutthe
agreement ofthc authors. Enquiries about copyright and reproduction should be ad･
dressed to Research lnfomlation Center,肝P/Nagoya University, Nagoya, Japan.
Energy Dependence of Sputtering Yields
★
of 拭onatomic Solids
N. Matsunamia, y. yamamurab′ y. =tikawal N.工tohat
y. KazumataCr s. Miyagawadl K･ Moritaa and R･ Shimizue
Institute of Plasma Physics, Nagoya University
Furo-cho. Chikusa-ku, Nagoya, Japan
●
★The work has been performed under the コOint research program
of data compilation at the Research =nformation center, Institute
of Plasma Physics.
a. Permanent address: Department of Crystalline Materials
Science, Faculty of Engineering, Nagoya University,●
Nagoya, Japan
b. Permanent address: Department of Applied Physics, Okayama
ロniversity of Science. okayama. Japan
c. Permanent address: Japan Atomic Energy Research =nstitute,
℡oka土mura, Japan
a. Permanent address: Government =ndustrial Research =nstitute,
Nagoya, Japan
e Permanent address: Department of Applied Physics, Faculty of
●
En91neer土ng. osakaロniversi七y. Osaka′ Japan.
-1-
工. 工n七roduc七土on
Experimental data of sputte-rinすOf Bdlid岳 by ion bombardment
have been accumulated for these three decades.l･) current needsr
for the sputtering data have accelerated the experimental measure-
ments of the sputtering yield particularly by light ions. For
better understanding of the phenomena2) and for the extensive use
of the sputtering data for the design Of the fusion reactors, we■
need comparison of the experimental data with empirical formula●
for varieties of combination of the incident ions and targets.
This paper present a compilation of the experimental data of
the energy dependence of the sputtering yield at the normal incidence
for all available combinations of the incident ions and target atoms.
●
For each combination, the data are fitted to the empirical equatidn
suggested by the present authors.3) The best fit values of two
empirical parameters in the empirical equation are tabulated. Best
fit values are also plotted as a function of M2/MAP Where Mland M21
are the atomic masses of the incident ions and the target atOlnS
respectively. 工t 土s sbown七hat七he value of these parameters for
a given value of M2./Ml falls within士30% of the average for most
cases. Thus using the average卓relation between the values of these
parameters for a given value of M2/Ml･ the approximate sputtering
yield of any combination as a function of energy is easily attainable.
==. Empirical Equation-
scaling Rule
A theoretical equation for the sputtering yield Y has been
derived by Sigmund.4) sigmund equation, which predicts that the
sputtering yield is proportional to the elastic stopping Power, is●
き ヽ▲
-t
し
known to account for the experimental data for heavy ion bombardments
over a wide energy ra-age. Ho如岳ver, it has been shown recently
ぎ_ T ∴主'1-. /'上{E'{_~y⊥し
_iふ-‥主i､-ll .ミ
7
-7一二-
that the straight line pertaining th畠plots of the enel･.冒Y dependence
-2-
of the sputtering yield approaches.to 2;erO at a finite incident
energy.5), 6)
This- result has been attributed to the threshold
effect in displacement of atoms at crystal surfaces and at latticel
points. According to the recently suggested modified Sigmund
equation′3) which七akes the七hreshold effec七土nto account.the
sputtering yield is given by=
y-牌sn(l一申1/2}(i,
S
where α is a factor depending on H2/Hl, Us is the sublimation energy7)lsn is the elastic stopping cross section in unit of eV cm2/ 1015atoms,
E is the energy and Eth is an energy factor relevant to the threshold
effect. =f the last factor is dropped in Eq (i), one gets the
Sigmund equation･ parametersはand Eth Were Chosen so that Eq (i)
was fitted to the experimental energy dependence of the sputtering
yield. The elastic stopping cross section Was obtained, using
an analytical approximation of the Lindhard-Scharff-Schiott relation
between the reduced elastic stopping Cross Section s and the reduced●
n
energy c(Appendix A). The stopping cross sectionSM is given byJL- JL' Jn
sn (evcm2/1015atoms) (2)S =Rs =n n
如aZIZ2 e2 Ml
where Zl and Z2 are atomic number of incident ions and target atoms,
0.
and a is the Thomas-Fermiin the unit of A and is given by
0･8853ao
(3)
using Bohr radius ao･
Examples of fitting of experimental data to Eq (i) are shown
in Figs., i and 2. Figure_ i is the result for the nickel targets and
Fig. 2 for self sputtering oft several metal targets. The deviation
of the experimental values from the best fi七curves is remarkable
-3-
for heavier incident ions and for heavier target atoms. This
deviation may be ascribed to (i) the subthres??1d e-ffects and (2)≡
the overestimation of the threshold energy because of the npn-
1エnear effect.9)
r
Ill. Compilation of the Data On the Energy Dependence of the
Sputtering yield
The energy dependence of the sputtering yield of all available
combinations of the incident ions and target atoms upto the end of
1978 have been compiled and stored in the computer. The compiled
combinations are shown in Table =, where* indicates the combinations
for wb土ch the numerical analysis was made and 冗 ind土ca七es those for
wh土ch 七he available data are 土nslユff土cien七 for 七he nuⅢer土cal
analysis.
Numerical values of the parameters α and Eth are Shown in
Table ==. =n the table we also show the numerical values of some
other important quatities･ The dependence of cL aS Well as Eth/Us●
(=∈) on &12/Ml is shown in Fig･ 3 and 4･ respectively･ The values
of the sublimation energy are listed in Appendix a. The solid
lines in these figures denote the averages, and the broken lines
show the 23O% deviation.
The plots of the energy dependence of the sputtering yields
of various combinations of the incident ions and the target atoms
are shown in Figs. '5 to208. The solid lines in these figures are
the best fit curves to the empirical equation. The broke-n lines
show the result calculated by putting average value-s of α andIミー
into Eq (i).1 The references for each experimenta工 points are
shown･ in the figures and a･11 the references are listed･ chronolo-
■
gically and alphabetically in eacl._ ･year at the lend. of the report.
LJ･1F<
≠
-4-
こ-=
≠ぎi号壬▲
i) FQr Current data compilation see for example H. H. Andersenl
?nd H･ L･ Bay,in sputtering by ron Bombardment (ed. R. Behrish)
Cbap. 4 (七o be publ土sbed)
2) For the review of the theoretical alspects, see P. Sigmund,
土bid Chap 1.
3) N. Matsunami et al., Radiation Effect Letters (to be published).
4) P. Sigmund, Phys. Rev. 184, 383 (1969) and 187, 768 (1969).
5) P. Behrish, G. Maderlechner and a. M. tJ. Shertger, Applied
Physics 18, 391 (1979.i).
6) J. Bohdansky, J. Roth and H.Ll. Bay, J. App1. Phys.
7) K. A. Gschneidner, Jr., Solid State Physics, eds. F. Seitz
and D. Turnbull, (Academic press, New York, 1964) Vo1. 16,
p. 275.
8) J. Lindhard, Ⅴ. Nielsen and A. Scharff, Mat. Fyz. Mead. Dan.
Vid. Selsk. 36′-No. 10 (1968).
9) W. 0. Hofer, Nuc1. =nst.and Methods,(tobe
published).
-5-
Table = =on-target combinations in the present data compilation
H D He LiN 0 Ne Ar Zn Kr Xe C芦Gd Hg Pb +
1 1 2 3 7 8 10 18 30 36 54 55 64 80 -82
Be 4
B 5
C 6
Al 13
S土 14
Ti 22
V 23
Cr 24
班n 25
Fe 26
co 27
Ni 28
Cu 29
zn 30
Ge 32
zr 40
Nb 41
Mo 42
Ru 44
Rb 45
pd
Ag
Cd
工n
Sn
Ef
Ta
W
Re
Os
工r
P七
Au
Pb
Th
ロ
46
47
48
49
50
72
73
74
75
76
77
78
79
82
90
92
☆
Ⅹ
Ⅹy**
★
☆
Ⅹ★
★
☆
*
☆
* * *
* *
*
* *
x* * *
* * *
Ⅹ
Ⅹ
*
★
*
☆ ★ ☆
Ⅹ
*
* * * *
☆ ★ ★
* * * *
★ ☆ ☆ ★
★ ☆ ★ ★
* * * *
* * * *
* *
☆ ☆ ★
★ ★ ☆
Ⅹ
☆ ☆
☆ ☆
* *
* *
★ ★
★ ★
★ ☆
* *
Ⅹ
x *
★ ☆
* *
* *
★ ★
* *
* *
☆ ☆
★ ★
★
☆ ★
★
*
*
☆ Ⅹ
Ⅹ Ⅹ
* * * * *
* *
* *
x* * *
★ ☆
☆ ★
* * *
* * *
★ ★
* *
Ⅹ Ⅹ
* *
☆ ☆
* * *
* *
☆ ☆
* *
* *
☆ ☆
☆ ★
* * *
Ⅹ
★
★
★
★ ★
★
☆
★
★
★
* *
Cu_+ Self-sputtering
Table ==･ The best fit values of･α and Eth tO Eq (i)･
Ce
Ⅹ =
P =
Y=
a =
aM2
zIZ2e2 Ml+M2
如aZIZ2e2Ml
M1 +M2
0.42αK
(M1 + M2)2
0･8853ao
(z12/3 + z22/3)i/2
(ev-1)
(ev cm2/1015a七oms)
Ml and M2: masses Of incident ions and target atcl･mS:=∃
Zl and Z2: atomic numbers of incident ions and target atoms
Us: sublimatiorl energy
α: a factor depending on M2/M1
-7-
Ce
Be He 1.389E13
Ne 9.382E-5
Ar 2.715E-5
Kr 5.988E16
Xe 2･360E-,6
C D 2.239E-3
He 9.196E-4
Ar 2.184E-5
Kr 5.O10E-6
Ⅹe 2.007E-6
Hg 8.189E-7
AI He 4.085E-4
Ne 4.489E-5
A1 2.895E-5
Ar 1.592E-5
Kr 4.177E-6
Ⅹe 1.775E-6
Hg 7.556E-7
Si He 3.740E-4
Ne 4.183E-5
Ar 1.497E-5
Kr 3.964E-6
Ⅹe 1.692E-6
Pb 6.810E-7
でi He 2.221E-4
Ne 2.944E-5
Ar 1.168E-5
Kr 3.450E-6
Ⅹe 1.556E-6
Hgも6.933E-7
V He 2.108E-4
Ne 2.840E-5
Ar 1.139E-5
Kr 3.409E-6
Ⅹe 1.548E-6
Hg 6.936E-7
Ⅹ
10.29
87.60
162.5
300.9
418.0
3.522
ll.50
220.7
425.0
600｡1
821.0
10.68
147.9
215.4
336.3
740.4
1109.
1583.
10.89
153.5
352.3
782.8
1178.ヽ
1725.
9.364
156.4
397.9
986.5
1568.
2343.
9.134
155.1
398.9
1002.
1604.
2410.
P
0.9835
2.682
3.620
5.346
●7.536
0.1092-
0.4505
6.768
1.936
1.485
12.44
0.9009
4.565
4.748
6.936
ll.85
15.･34
23.74
0.4875
2.835
3.987
6.912
ll.59
15.52
0.2605
2.725
3.933
6.948
10.37
13.84
0.2536
3.415
3.899
8.466
12.38
L9.,18
ノ
E七b
89.52
98.27
73.10
89.39
138.8
31.88
167.4
348.9
93.73
18.07
286.5
151.4
93.17
39.44
71.28
81.07
86.28
133.6
85.02
'90.95
64.20
92.71
159.3
2.435
56.38
61.79
57.15
86.89
118.6
106.2
90.93
79.57
44.73
79.38
83.06
16て0.2
-8-t~'11
M2/M1
2.251
0.4465
0.2256
o.1075
0.068:64
5.964
3.000
0.3007
0.1433
0.09148
0.05988
6.740
1.337
1.0
0.6754
0.3220
0.2055
0.1345
7.016
i-392
0.7031
0.3■352
0.2139
0. 1ー3ち6
ll.97'
2.373
1.199
0.5716
0.3648
0.2388
12.73
2.524
1.275
0.6079
0.3880
0.2540
α
0.769
▼~~j.
o.246
0.179
0.143
0.145
0.54-7
0.691
0.541
0.0804
0.0437
0.267
∈ y
26.5 0.8519
29.1 0/8536
21.6 0.6008
2L6｡4 O.3507i
tAI-41.1 0.2404
4.30 0.4919
22.6 0.7499
47.10.7109
12.6 o.4386
2.44 0.3071
38.7 0.2132
0.675 45.1
0.247 27.7
0.176 11.7
0.165 21.2
0.128 24.1
0.111 25.7
0.120 39.8
o.4500 I
0.9792
1.0
0.9625
0.7370
0.5656
0.4180
0.501 18.1 0.4367
0.207
0.127
0.0′988
0.110
0.10,1'
0･.324
0.203
0.115
0.0820
0.0770
0.0688
0.352
0.279
0.124
0.107
0.0979
0.101
19.4 0.9732
13.7 0.9696
19.7 0.7520
33.9 0.5806
o.52 0.4205
ll.5 0.2847
12.6 . 0.8343
ll.7 0.9918
17.8 0.9257
24.3 0.7834
21.7 0.6224
17.1 0.2702
14.9 0.8130
8.39 0.9854
14.9 0.9405
15.6 0.8056
30.1 0.6460
Cr:He
Ne
Ar
Rr
Xe
ヨg
Ce
1. 99▲9モト4
2.712E-5
1.093E-5
3..289E-6
i.498E-6
6.727E-7
Fe !王e 1.814E-4
N 4.053E-5
Ne 2.509E-5
Ar 1.025E-5
Ⅹr 3.134E-6
Ⅹe 1.440E-6
■ c.s 1.396E-6Hg 6.515E-7
Pb 6.162五-7
Co He 1.734E-4
Ne 2.430E-5
Ar 1.OOZE-5
Co 5.260E-6
Kr 3.098E-6
Ⅹe 1.433E-6
Hg 6.515E-7
ヴ土H 3.573E-4
D 3.514E-4
He 1.654E-4
0 3.139E-5
Ⅳe 2.322E-5
Ar 9.577E-6
Ni 4.832E-6
Kr 2.96.4E-6
Xe 1.371E-6
Hg 6.239E-7
Ⅹ
9.241
158.0
408.3
10∋1.
1655.
2493.
9.159
87.74
159.7
418.3
1073.
1739.
1771.
2638.
2707.
8.949
158.1
417.9
728.4
1084.
1768.
2696.
1.253
2.463
9.218
111.8
163.1
431.3
773.9
1120.
1827.
2787.
P
O,7059
6.･471
9.284
19.10
30.33
21.28
0.5800
5.994
4.504
9.133
17.23
27.00
37.56
29.28
38.45
0.5597
6.902
ll.64
5.886
15.47
22.70
34.β6
0.05155
0.1168
0.5689
1.670
5.311
12.69
10.43
17.53
24.35
36.43
Eth 朗2/M1
74.46 12.99
62.70 2.576
41.78 1.302
66.76 0.6205
84.17 0.3960
96.38 0.2592
α
0.749
0.402
0.223
0.192
0.loo
0.0838
67.71 13.95 0.654
407.7 3.987 o.706
35.85 2.767 0.291
52.56 1.398 0.2･26
81.77 0.6664 0.166
96.42.iO.4253 .0.160
348.9 0.4202 0.219
164.7 0.2784 0.115■
25.37 0.2695 0.147
89.25
81.92
65.54
41.87
86.61
82.71
146.8
82.13
58.71
54.52
82.86
39.09
53.94
52.65
75.63
93.92
115.4
-9-
14.72
2.920
1.475
1.0
0.7033
0./L488
O.2938
0.660
0.460
0.294
0.0852
0.150
0.135
0.136
5･8.24 0.437
29.15.0.504
14..67 0.655
3.670 ･0.159
2.909 0.346
1.470 0.312
1.0 0.143
0.7006 0.166
0.4471 0.141
0.2927 0.139
∈ T
18.1 0.2655
15.2 0.β057
10.1 0.9828
16.2 0.9451
?.0.4 0.8128
23.4 0.6539
15.6 0.2496
･93.9 0.6412
8.26 0.7800
12.1 0.9725
18.8 0.9599
22.2 0.8375
80.4 0.8333
37.9 0.6814
5.84 0.6690
20.1 0.2382
18.5 0.7601
14.8 0.9631
9.45 1.0
19.6 0.9696
18.7 0.8553
33.1 0.7021
18.4 0.06638
13.2 0.1283
12.2 0.2390
18.6 0.6732
8.77 0.7615
12.1 0.9638
ll.8 1.0
17.0 0.9690
21.1 0.8541
25.9 0.7006
Ce
Cu D 3.366E-4
He 1.589E-4
N 3.629E-5
Ne 2.269E-5
Ar 9.477(E-6
Cu 4.452E-6
Ⅹr 2.980E-6
Ⅹe 1.391E-6
Cs 1.350E-6
Hg 6｡375E-7
Pb 6.035E-7
Ge H-e 1.411モト4
Ne 2.073E-5
Ar 8.850E-6
¥.r 2. 862F,-6
Ⅹe 1.358E-6
Hcr 6.310E-7
Zr r!e 1.069E-4
Li 6.788E-5
Ne 1.648E-5
Ar 7.294E-6
Kr 2.477E-6
Ⅹe 1.211E-6
甘g 5.777E-7l
Nb D 2.163E-4
He 1.036E-4■
Li 6.585E-5
Ne 1.603E-5
Ar 7.118E-6
Kr 2.427E-6
Nb 1.984E-6
Ⅹe 1.190E-6
Cs 1.156E-6
Hg 51.690E-7
Ⅹ
2.338
8.775
85.88
157.9
423.0
820.5
1116.
1837.
1871.
2822.
2899.
8.302
153.8
421.1
1142.
1911.
2978.
7.823
19.38
152.0
431.5
1.230.
2120.
3390.
2.054
7.822
19.39
152.6
434.4
1243.
1461.
2148.
2192.
3444.
p
O.2694
0.8420
4.756
8.678
16.01
22..27
31.52
49.07
68.60
63.21
68.25
0.魯502
5.178
8.296
14.82
20.54
24.89
0.1647
0.6451
3.008
6.061
6.196
12.75
12.60
0.02584
0.2386
e.8341
2.896
7.456
10.75
10.39
25.50
22.39
12.41
苧th .M 2/Ml α
406.3･ 31.55 0.966
~49.10 15.87 0.804
22.06 4.537 b.464
37.07 3.148 0.460
33.93 1.591 0.317
44.46 1.0 0.227
56.50 O.7583 0.?.37
79.87 0.4840 0.224
186.1 0.4781 0.307
122.1 0.3168 0.188
111.3 0.3067 0.197
79.96
67.53
29.12
72.07
83.73
ilo.8
163.3
101.8
70.80
53.12
60.16
89.15
91.80
52.37
191.0
128.0
63.97
75.26
90.38
367.5
207.5
4.010
105.9
-10'-
19.13
3.597
1.817
0.8662
0.5529
0.3619
22.79
13.15
4.520
2.283
1.089
0.6947
0.4548
0.390
0.31コ.
0.182
0.120
0.0993
0.0772
0.317
0.502
0.298
0.212
0.0760
0.0906
0.0560
46.13 0.227
23.21 0.551
13.39 0.777
4.603 0.343
2.326 0.310
1.109 0.156
i.0 0.129
0.7076 0.214
0.6990 0.185
0.4632 0.0651
∈ y
115.0 o.1191
13.9 0.2230
6.2了 o.5920
1b.5 0.プ318
9.64 0.9480
12.6 1.O
16.1 0.9811
22.7 0二8791
52.9 0.8753
34｡7 0.7308
31.6 0.7185
20.6 0.1981
17.4..690?))
7.50 0.9159
18.6 0.9949
21.6 0.9171
28.6 0.7805
25.8 0.1611
16.1 0.2628
ll.2 0.5934
8.39 0.8472
9.50 0.9982
14.1 0.9676
14･5 0･859鞠
6.90 o.08307
25.2 0.1584
16.9 0.2587
8.43 0.5865
9.92 0.8411
ll.9 0.9973
48∴4 1.001
27.3 0.9707
0.53 o.9686
14.0 0.'g654
Ce
Mo H 2.119E-4
D 2._098E-4
He 1.006E-4
Ne 1.565E-5
Ar 6.980E-6
2(r 2..396E-6
Ⅹe 1.179E-6
Cs 1.146王ト6
Hg 5.659E-7
pb 5.374E-7
Ru Ne 1.490E-5
År
● KrXe
Rh He
Ne
Ar
Kr
Xe
Hg
Pd He
Ne
■…:Ⅹe
Hg
A9 H
D
6.696E-6
2.323E-6
i.152E-6
9.221E-5
1.454E-5
6.549E-6
2.281玉-6
1.133E-6
5.485E-7
8.973E-5
1.422王ト5
6.435E-6
2.256E-6
1.126E-6
5.468E-7
1.831E-4
1.815E-4
Ne 1.387E-5
Ar 6.292E-6
Kr 2.212E-6
Ag 1.443E-6
Ⅹe 1.106E-6
Hg 5.384E-7
K P
1.024 8.914E-3
2.024 0.01602
7.714 0.1457
151.3 3.848
432.8 5.～405
1247. 9.982
2163. 19.59
2208. 31.21
3481. 19.81
3587. 31.26
150.1 4.774
432.6 10.55
1259. 21.83
2201. 28.50
7.571
150.4
434.6
1270.
2225.
3610.
7.446
148.7
431.6
1269.
2234.
3638.
0.2683
6.251
13.88
24.30
31.30
41.58
0.6540
6.440
13.96
28.52
43.72
52.60
0.9851 0.1271
1.950 0.2666
149.4 13.09
434.6 24.67
1282. 60.33
1835. 89.25
2260. 94.51
3688. 140.
Eth
327
131.5
99.28
59.02
39.32
44.13
73.07
253.7
135.0
i35.i
72.74
58.70
86.21
91.43
90.57
75.52
68.49
76.39
80.13
96.42
75.61
41.67
41.77
49.03
63.04
78.25
M2/Ml α
95･18 o.142
47.64 0.129
23.97 0.307
4.754 0.413
2.402 0.203
1.145 0.130
0.7307 0.147
0.7218 0.230
0.4783 0.0926
0.4631 0.142
5.008
2.530
1.206
0.7698
25.71
5.099
2.576
1.228
0.7838
0.5130
26.58
5.272
2.663
1.270
0.8104
0.5304
268.3 107.0
44.60 53.56
45.34 5.345
23.39 2.700
84.88 1.287
89.07 1.0
95.93 0.8216
123.6 0.5378
-11･-
0.506
0.389
0.276
0.206
0.488
0.572
0.440
0.263
0.194
0.158
0.818
0.403
0.301
.0.209
0.182
0.135
0.912
∈ Y
47.9 C.04116
19.2 0.08055
14.5 0.1538
8.64 0.5744
5.76 0.8302
6.46 0.9954
10.7 0.9758
37.1 0.9739
19.8 0.8755
19.8 0.8653
10.9 0.5550
8.77 0.8121
12.9 0.9913
13.7 0.9831
15.7 0.1442
13.1 0.5483
ll.8 0.8058
13.2 0.9895
13.9 0.9853
16.7 0.8964
19.3 0.1398
10.7 0.5361
10.7 0.7938
12.5 0.9859
16.1 0.9890
20.0 0.9059
90.3 o.o3669
0.966 15.0 0.07197
0.619 15.3 0.5311
0.401 7.87 0.7889
0.333 28.6 0.9842
0.344 30.0 1.0
0.296 32.3 0.9904
o.269 41.6 o.9096
Sn Ar 5.982E-6 425.0
Sn 1.249E-6 2034
Hf Ne 8.665E-6
Ar 4.172,E-6
Ⅹr 1.608E-6
Ⅹe 8.578E-7
Hg 4.440E-7
Ta Ne 8.527E-6
Ar 4.112E-6
Ⅹr 1.589E-6
Ⅹe 8.488E-7
Hg 4.402E-7
W He 4.908E-5
Ne 8.395E-6
År 4.054E-6
Kr 1.571E-6
Ⅹe 8.408E-7
Cs 8.191E-7
Hg 4.369E-7
Re Ne 8.264E-6
Ar 3.996E-6
Ⅹr ユ.552E-6
Ⅹe 8.319E-7
Hg 4.330E-7
Os He 4.744E-5
Ne 8.144E-6
Ar 3.946E-6
Ⅹr 1.537エー6
Ⅹe 8.261E-7
132.4
408.7
1322.
2485.
4314.
132.1
408.4
1324.
2494.
4336.
6.100
131.5
407.3
1324.
2498.
2556.
4353.
ユ31.3
407.2
1326.
2507.
4375.
6.010
130.1
404.1
1321.
2503.
P
10.44
26.60
3.125
7.804
16,.92
30.57
22.56
2.457
5.801
17.35
22.93
19.56
0.05713
3.031
7.493
16.32
32.15
30.21
16.31
3.864
ll.18
24.96
33.ll
32.46
0.1555
3.839
12.ll
25.67
35.74
Eth
51.82
56.43
63.57
39.20
68.16
118.3
109.0
54.64
50.15
81.60
86.49
99.34
165.3
57.92
65.92
73.80
95.61
51.47
92.18
77.98
71.67
85.87
96.64
105.6
187.0
80.74
84.66
91.50
95.12
-･12-
M2/M1
2.971
1.0
8.844
4.468
2.130
1.359
0.8898
8.965
4.530
2.159
1.378
0.9021
45.93
9.109
4.602
2.194
1.400
1.383
0.9165
9.226
4.661
2.222
1.418
0.9283
47.51
9.424
4.761
2.270
1.449
α
0.182
0.0971
0.355
0.287
0.192
0.185
0.0786
0.359
0.274
0.253
0.177
0.0870
0.194
0.476
0.380
■0.255
0.266
0.244
0.0774
0.567
0.529
0.362
0.254
0.143
0.501
0.571
0.580
0.376
0.276
吉 y
16.6 0.7536
18.1 1.0
10.1 0.3651
6.21 0.5977
10.8 0.8697
18.8 0.9768
17.3 0.9966
6.75 0.3611
6.19 0.5926
10.1 0.8653
10.7 0.9747
12.30.997卸
19.0 0.08342
6.67 0.3565
7.59 0.5866
8.50 0.8603
ll.0･ 0.9722
5.93 0.9741
10.6 0.9981
9.64 0.3529
8.86 0.5818
10･6 0･8562th.Ill.9 0.9701
13.1 0.9986
23.0 0.08075
9.93 0.3469
10.4 0.5738
ll.3 0.8492
1､1.7 0.9664
=r He
Ne
Ar
Kr
Xe
Hg
Pt He
Ne
Ar
Xr
Xe
Hg
Ce
4.664ET5
8.O18E-6
3.889E-6
1.518E-6
8.169E-7
4.268E-7
4.588E-5
7.900E-6
3.837E-6
1.501E-6
8.093E-7
4.236E-7
Au H 9.300E-5
D 9.253E-5
He 4.513E-5
Ⅳ 1.169E-5
Ne 7.780E-6
Ar 3.783E-6
Kr 1.482E-6
Ⅹe 8.003E-7
Au 4.259f:-7
Hg 4.194E-7
IThNe 6･688E-6
Ar 3.300E-6
Ⅹr 1.325E-6
Ⅹe 7.292E-7
U Ne 6.517E-6
Ar 3.223E-6
Kr 1.299E16
Ⅹe 7.169E-7
Hg 3.844E-7
K P Eth M2/M1
6.003 0.07918 180.1 48.01l
130.1 4.323
404.7 12.39
1325. 22.01
2514. 42.31
4404. 46.20
5.969 0.2193
129.6 5.177
403.6 14.84
1325 32.93
2518 50.28
4420 67.79
64.22 9.523
57.87 4.812
74.44 2.294
92.65 1.464
88.30 0.9582
179.3
56.34
54.99
83.10
92.13
112.3
48.74
9.666
4.884
2.328
1.486
0.9726
o.7740 0小05583 372.8 195.4
1.539 0.1261
5.966 0.4742
66.25 4.327
129.6 7.831
404.3 26.05
1329. 76.97
2530. 126.0
4360. 221.0
4446. 134･.6
122.8 3.436
388.6 7.758
1309. 20.21
2540. 28.84
121.9 5.008
386.5 11.79
1307. 27.14
2543. 27.44
4572. 35.55
152.0 97.80
68.88 49.21
30.89 14.06
28.05 9.759
62.12 4.931
97.73 2.350
105.2 1.500
120.7 1.0
86.26 0.9820
82.55 11.50
53.79 5.809
78.22 2.769
83.14 1.767
70.40 11.79
63.84 5.958
75.83 2.840
122.3 1.813
69.28 1.187
-18-
α ∈
0-2エフ 26.1
0.546 9.31
0.503 8.39
0.273 10.8
0.276 13.4
0.172 12.8
･Y
0.07994
0.3440
0.5699
0.8457
0.9646
0.9995
0.513 30.6 0.07881
0.558 9.61 0.3399
0.513 9.38 0.5643
0.,347 14.2 0.8408
0.279 15.7 0.9618
0.214 19.2 0.9998
0.653 98.1 0.02026
0.741 40.0
0.719 18.1
0.591 8.13
0.547 7.38
0.583 16.3
0.524 25.7
0.451 27.7
0.459 31.8
0.274 22.7
0.04008
0.07809
0.2479
0.3372
0.5607
0.8375
0.9600
1.0
0.9999
0.395 13.9 0.2945
0.282 9.07 0.5012
0.218 13.2 0.7797
0.160 14.0 0.9231
0.530 13.0
0.394 11.8
0.268 14.0
0.139 22.6
0.100 12.8
0.2882
0.4922
0.7703
0.9165
0.9927
.i r. ,} ∵＼ .
Figure i. Energy depende.nee of the sputt'ering yiefids elf Ni.` tat-get岳▲
for H (Ⅹ)′ He (ロ). Ni (o_), Ar (A) and Xe (▽) ions. -The yi隼Lld and
energy are normalized by P･sn a･nd Ethr reSPeCtively･ Th色Tva加es
of P and Eth are given in Table ==. The dashed line is
the best fit curve.
Figure 2. Energy dependence of the self sputtering yields for
A1 (A). Cu (ロ), Nb (∇), Ag (Ⅹ) and Au (o). The yield and energy
are normalized by P･sn and Eth' reSPeCtively･ T.Lie dashed line is
the best fit curve.
Figure 3･ The α-parameter as a function of the mass ratio M2/Hl･
where M2 and Ml are the masses of target atoms and incidentFions,
respectively. The solid line is drawn by smoothing the averaged
values. Multiplying ttl_e averaged values by 1.3 and 0.7, broken
lines are drawn･ The dot-dashed line is the Sigmund curve for α.
Figure 4･ The･∈= Eth/Us parameter as a function of the mass ratio
M2/M1･ Where M2 and Ml are the masses of target atoms and incident
ions, respectively･ The solid line is drawn by smoothing the
averaged value･s･ Multiplying the averaged values by l･3 and 0.7,
broken lines are drawn.
-
14㌻7
Figure 5-208･ Sputtering yield.vs energy･ A･rBrC′‥ ･
indic年中.th.e早XPerimeptal vatuesI The solid line is the curve;-亨
L1- ヽL･ヽ
.bes曽書拭to the experimental data･ The dashed line showsl.1the
result …calculated by the empirical formula (Eq. (1)) with⊃七heil
averag>e; values ∩f一土he parameter ち and α ･ which areindicated
d[垂Ii-J%-I
by the solid curv色, in Figs. 3 and 4.′■~
The graphs年考e arranged fix:stin order of increasing atomic
ヰーi･j
number of the taz;.get (Z2) and, udder each Z2, in orde羊Of
increasing atomiel number of the'projectile(Zl) ･
-15-
ヽ
山1J
.⊂中J
LUi=:ヨ
tjJ
¢
..噂bLE
SE
I
C〉LJiii:
こi=
I
:室コE=
-16-
′Å=uS･d/A
こiiこ
LE?
a♂~ヽ
i:≡
山ヽー
B一■■-I
8きE】
>-
苛a妻晋遠
耳1-7I?-'-i-?-E>
t
t
くlロ
*#甲く
I)(
OX
o&㌔!
ロ
【コ
ヽ
山8さ
.⊂【=i
Lili=ヨ
山
Iも!8
毒a豊署名4 ロ > >く 0
ー一也一----_______t
l
l
l
｡/□
/
/ ロ
0
/
/
+ /
/
口□//vP
0
+T('1 □
+U ◇
△
▽
⊂)
⊂コ
○
/∫
亀//aO
,/亀〆/急o,/ A3/A i･′′◇_/A___ J -
/oI./-｡/,://臼i-/ /+
/A
Ta
W
Re
Os
lr
Pt
Au
Be △Fe +Mo+
C ▽Co ▽Ru ▽
Al o NiロRh □
Si ◇Cu o Pb o
Ti △Ge◇Ag□
V 十Zr △Sn ◇
Cr +Nb +Hf ▽
[
il
0日
【】
′
L1
;;･-.A.-T/g?専㌍
i'晋/_?請
1M2/Ml
10
-18-
■･一一■l■
~
凄_一-
-
Lr_-/%//+ンム
ームーー
~
I_oiT_fo-o;i:l･
Fig. 3
/
/
○
＼
十
Fig. 4
-19-
+
0
′′
HE->BE
Fig.5
-20-I
HE->BE
∩ RロSENBERG･hEHNER r196Z)
B FETZ･OECHSNER [1963)
NE->BE
/∩
′一~ヽ
巨要
⊂) (iトー■
g!!
l望⊂)
トー
⊂10~lヽ_._.∫
>-
5
10~つ
R ′′ノ′
∩/′/
I l
一一
-~ ~
- --
ヽヽ
ヽ
ヽ､
i)
ヽ
＼
＼
＼
ヽヽ
＼
＼
5 102 5 103
NE->8E
∩ LRECREⅠD,hEHNER t196i)
B FETE.OECHSNER (i963)
5 104
ENERGY(E〉)
Fig. 6
-21-
5 105 5 106
RR->BE
∩ LRECRE!D.hIEHNER (1961)
ら FETZ.OECHSNER r1963j
Fig. 7
一望2- -I喜喜
KR->BE
KR->BE
R ROSE;NBERG,HEHNER7 (L1962)
8 FETZ,OECHSNER (1963J
Fig. 8
ll
･_A
-231喜t三-
×E->BE
ーヽ
芦勇
⊂⊃
ト-｣
g!
(ノつ
∋=
〔⊃
ト
⊂工ヽ==J
>-
XE->BE
∩ ROSENBERG.HEHNER t1962)
B ETZ.OECHSNER (1963J
Fig. 9
-24-
_I:--:
＼ I..:,
HE->B
萱萱貞
⊂〕 5空=F
iiZ5
I望⊂⊃
トー
⊂10~1ヽ___′
>-5
5 102 5 103
HE->B
q MIYRG･qHR.qTD,MORIYR 【1978)
5 104
ENERGY(E〉)
Fig. 10
-25-
H->C
Z
⊂⊃ らト--I
iZI
(ノつ
∋二
〔⊃
ト
⊂10~1ヽ_._〟
～-
5
10~･35 102 5 103 5 1O4
ENERGY(E〉)
5ロHDRNS代Y.ROTH.STNHq [197S)
ROHロRNSKY.6qY.OTTヒN6ERGER [1978)
Fig. ll
-26-
5 10与 5 10S
D->C
巨垂貞
⊂⊃ 5トーー1
]
pwig
⊂〕
ト-
Ⅱ10~1ヽ_′
>-5
10~35 102 5 1ロ3 5 104
ENERG-Y(E〉)
D->C
∩ BOHDRNSr(Y.BqY.OTTENBERGER (19783
8 BORDERS.LRNGLEY.如ILSON r1978j
Fig. 12
-27-ち
5 10う 5 106
HE->C
重要
⊂⊃ 5トーーI
iZ!
∽
∑=
⊂⊃
ト一
江10-1ヽ_._-′
>-
ら
5 102 5 103 5 104
ENERGY〔E〉〕
HE->C
∩ ROSENBERG,h(EHNER t1962)
ら R8TH,BOHDRNSKY t1976)
C BロHロRNSKY.BqY.OTTEINBERGER (1978)
Fig. 13
-28- .･.
5 10弓 5 10弓
RR->C
巨室
⊂⊃
ト･･･｣
il
Iu'=
⊂〕
ト一
口=ヽ__ー
>-
I
RR->C
R LRECRETD.如EHNER (19Sl】
B BETZ.DOBROZヒMqKY.VTSHBCCK (1969)
Fig. 14
-29-
KR->C
Z
⊂⊃ 5ト･･-｣
g≡l
(ノつ
∑二
⊂⊃
トー
⊂工0-iヽ___.._∫
～-
ら
KR->C
R qLMEN.BFミUCE r1961R)
6 べOSENBURG,山EHNER (1962】
C BETZ,〇06ROZヒMqKY.VISHBCCK [196g)
Fig. 15
-30-
×E->C
5 193
-31-
5 1C]5 5 106
りE->RL.
i;ヨ
iコ
i
1 0I 3 ｣]⊥_⊥⊥｣｣山⊥⊥⊥ ｣ ⊥
5 102 5 1D3 5 1D4
ENERGY〔E〉j
hE->(]L
R 叩SE.NBERG,HEhNER (1962)
Fig. 17
-32-
＼
＼
＼
＼
＼
＼
ヽ､
＼
＼
＼
＼
＼
＼
＼
ヽ
＼
ヽ
5 1O･5 5 10S'
NE->RL
′■■~~ヽ
⊂〕トー｣
iZ5
二ヨ姻ヨニ
⊂〕
トーー
(工10ヽ__■.′
>-
ら
1〔〕~35 10S
5 102 5 103
NE->RL
∩ LRECRETロ.HEHNER (1961)
5 104
ENERGY〔E〉】
Fig. 18
-33--
5 10e'
RL->RL
室萱岳
⊂⊃ ら｢==≡｣
iZI
(∫)
ii■.▲■■-I
⊂⊃
トー
⊂1ロー1ヽ-.___∫
>-
ら
5 102 う 103
PIL->RL
R qLMEN.BfミUCE (上961日)
ら LlqYHRRE3.h〇LTE._R ( 1969)
5 104
ENERGY(E〉j
Fig. 19
-34-
･.
5 1〔〕5 5 iO6
qFト>RL.
5卜IJ
l≧∑ニ
⊂⊃
トー
⊂10-1ヽ_._._′
>-5
10~3
5 102 5 103 5 104
ENERGY〔E〉J
RR->RL
∩ YONTS.NORrlqNロ.HqRRTSON (19SO)
ら ERT.r〔】LOM6托.FqGロT (196iJ
C LRECRE!D.hEHNER ri961J
Fig. 20
-35-
5 10う 5 10S
KR->RL
萱萱岳
0 'J
トーー｣
iZ!
rJ7
∋=
⊂〕
トー
Ⅱ10~1ヽ_.__∫
>-cJ
5 1C)2 5 103 5 104
ENERGY〔E〉)
KR->RL
∩ ROSLNBERG.hE卜jNER (19S2)
Fig. 21
-36- ∴.
5 10う 5 10弓
×E->RL
XE->RL
∩ RロSENBERG,山EHNER (196ZJ
Fig. 22
-87-
HE一>SⅠ
HE->SI
R ROSE.NBERG.h己HNER (1962)
Fig. 23
-38-
NE->Sl
Z
⊂⊃ EJ
トー｣
iZ!
?∽∑=
⊂⊃
ト･
cr lC)-1ヽ___一l
>-
ら
iロ13
/
t I
･J 102_｣山｣
5 104
ENER〔､Y〔E〉)
5 103
NE->ST
∩ LRECRE!D.hEHNER (1961)
B qNCERSE_N.BqY (1975j
Fig. 24
-39-
5 10う
qF!->SI
iiii
⊂⊃ 5トー■
iiZ5
(/つ
∑=
⊂〕
トー
Ⅱ10~1ヽ 一
>-cJ
f, 102 5 iC)3 5 104
ENERGY〔E〉)
F;F:->ST
∩ IRECRETD.hEHNER (19Sl)
6 日r:HNEq.STU∩RT.RDSENBERG (1961)
C F.ヒRNISSE (1971)
rJ うOMl_ERF_IL CT r1972J
E RNじERSEN.BqY (1975)
F COBURN.hTNTヒRS,rHURNG (1977)
G KqNG.OKUTRNT.SHTMTZU (1979)
Fig. 25
-40-
I_ {
5 105
≡襲Ill.
義
一書
L_.…享聖書
表
書.a室芦≡
.二三葛l､二
軍喜冒
霊室声一
蛋壁
∈≦専三
flr!
表重
,L:
崇毒冒
il
5 10弓
KR->SI
5 103 5 104
ENERGY(E〉〕
KR->S7
Fig. 26
-41-
(,才I
5 105
∩ qLMEN.BFミUCE r1961B】
6 ROSENBERG,hEHNER r196ZJ
C EヒRNTSSE r1971】
口 RNロERSEN.日RY (1975J
5 1OS
XE->ST
∩ ROSE_NBERG,レjEHNER (196Z】
B EヒRNISSE_ r1971) ,
C RNCERSEN.BqY (1975)
Fig. 27
-42-
H->TI
--
- -I- -
/
/
/
ヽ
ヽ､
ヽ
ヽ
ヽ
ヽ
＼
＼
＼
＼
＼
声音
⊂〕
トーー1
iiZ5
1(刀
∑二
⊂⊃
:-I
i:ヽ_....._...′
>-
?
i
ぎ
L;
E
≡
蔓¥
E(j
i
蔓≡f!
蔓誓
書塞王
墓藁
5
ら
10~35 102 5 103
5 10i
ENERGY(E〉)
H->TI
R 60日DRNSKY.ROTHISINHq r1976)
F土g. 28
-43-
5 105
＼
＼
＼
HE->TⅠ ` .一考尺一~ 暮
cJ 102 5 103
hE->TT
∩ ROS巳NBERG.hEHNER (19S2)
6 ト10FER.5qY.rlqRTIN (1978)
5 104
ENERGY〔E〉j
Fig. 29
-44-
i ち,
5 10う 5 10弓
NE->TI
重要
〔⊃ 5ト･-I
iiZ!
l望⊂)
ト
⊂10-1ヽ__〟
>-
5
･J 102 5 103
NE->TI
∩ LRECREID.hEHNF.R (.1961)
5 104
ENERG･Y(EV)
Fig. 30
-45-
5 1ロう 5 10弓
qR->TI4iを
.
,･･･
･
･ ･.- ･
-‥
:--
5
r, lo空 5 103
qF(->TI
R LRF_CRETD.hEHNER (19Sl)
B STURFミT.HEHNER (19S2)
C H〇FER.L一己BLE r1976J
u HOFER.BqY.MqRTIN (1978)
5 104
ENERGY(EV)
Fig. 31
｢46一弘
巨
琶琵
琶碧
雲
重臣
萱LtL;
f琶邑岳忘
笑壷
～宅
ヨ
!1=i_･軍
き冨
E,.≡E;
昌署
ト
き1
lL▼声岳
U
■
i.1FT
l
∃
】
i
‡
ll
i
も琵
■･■
Fig. 32
-47-
KR->TI
∩ qOSEN6ERG,HEHNER (19S2)
×E->TI･
.
5 102 5 103
×E->TI
R ROSE_N6F_RG,hEHNER (上962)
5 101
ENERGY〔E〉〕
Fig. 33
｢48- ･i:皐l
..
5 1O5 5 106
HE->V
HE->〉
∩ ROSE.NBERG,hEHNER (1962)
ら GUSEVR,MqRTYNENKO r1976)
c sHITK0日Sr(7.M∩NN.代NEFF (1976)
D HOFER.日qY.MqRTIN 【1978J
Fig. 34
-49-
NEJ>V
5 102 5 103 5 iO4
ENEF(GY(EV)
Fig. 35
-50-i-:'＼
5 105
巨室
〔⊃ 5ざ一-∵;
iZI
(ノつ
∋=
⊂)
ト
⊂10~lヽ___-′
>-5
NE->〉
Pl qLMEN.BRUCE r1961R】
r) LREC'REID.山EHNER [1961)
1
】
覇1
】
】】1
】
､与
RR->〉
衰室
∈:〕
トーー｣
iiZ?
I (ノつ
∋=
⊂⊃
トー
〔工10ヽ_.J
>-
5
ら
5 102 5 103 5 104
ENERGY〔E〉)
RR->V
∩ RLMEN..BRUCE 【1961R)
ら LREC･REiD.HEHNER (1961J
C ShllTKOHSKⅠ.MqNN.代NEFF r1976)
ロ HOFER.Boy.MqRTIN 【1978)
Fig. 36
-51-
5 105 5 106
KR->〉
轟音
⊂⊃ らド-一三
i己!l
(I)
∋二
⊂⊃
ト
⊂10~1ヽ___Jl
>-
5
5 102 5 103
KR->V
∩ qLMEN.BFモUCE (1961R)
弓 ROSENBERG,hEHNER (1962)
5 104
ENERGY〔E〉〕
Fig. 37
-52--
■.
5 105 5 10S
×E->〉
Z
⊂〕ー
iZ5
I∽∋=
⊂)
トー
〔工10ヽ__........′
>-
5
ら
5 102 5 103
XE->V
∩ qLMEN.日RUCE (1961R)
ら ROSENBERG,HEHNER r196Z)
5 104
ENERGY(EV)
Fig. 38
-53-
5 105 5 10S
HG->〉
5 102 5 103 5 104
ENERGY〔E〉)
Fig. 39
-54-
5ト･･･-1
iiZI
(ノつ
∋=
⊂⊃
ト-
⊂10~lヽ___■
ゝ-
ら
りG->V
∩ hlEHNER r1957J
5 LRECRE7D.hEHNER [1961)
C HEHNER.ROSENBERG (1961)
HE->CR
HE->CR
∩ ROSENBERG.HEHNER t1962)
Fig. 40
-55-
巨
喜喜
喜匡喜
賀喜∈童
喜岳声嚢
軽
･･.≡萱巨童
璽i≡≡
∈蚕
室妻室
蓋
喜!.1･ >
ゴー..Li毒≡
壷L".
巨≡三
TLf
冒音喜
書至室
t7∋
萱匡冒
戻
(.:≡竃≡
喜≡
≦岳喜芸喜
巨室巨蓄≡
喜E≡
嚢匝
喜冒
冒喜
≡
NE･-.>CR
5
5
重要
〔:⊃
トーーニj
gヨ
し｢)
Tこ~ー
⊂⊃
トー
⊂亡10ヽ.._.__■
>-
NE->CR
∩ LREGRE7D.hEHNER (1961J
Fig. 41
-56-
RR->CR
Z
〔⊃ 5トー･｣
iZ5
l∽∋=
⊂⊃
ト
⊂10~Ⅰ2■芦Ei
>-
5
5 102 5 103
RR->CR
q STU∩RT.いEHNER r1960)
ら LREGRETD,HEHNER r19611
-
ヽ
5
ENER GY〔E〉)1
Fig. 42=
-
57- .竃
CR->CR
Bノ′
月//
5ト･-1
iZI
(/つ
∋=
〔⊃
ト-
Ⅱ10~1ヽ__′
>-5 /
//
/
B/
lrJ-
--
- - ~-
--
iコ
5 102 5 103
CR->CR
R qLMEN.8FモUCE (1961BJ
B りqY山RRD.hOLT巳R r196g)
5 10ヰ
ENERGY〔E〉j
Fig. 4金
一58- -.J
5 105
冒
KR->CR
KR->CR
∩ qLMEN.BRUCE (1961R】
a ROSENBERG,hEHNER r1962)
Fig. 44-
-59-∴享
XE->CR
Fig. 45∴
-60一 重J.iT二
≡
⊂⊃
トー一
iiZ!
U~〕
∋=
⊂〕
トー
⊂工10ヽ__._∫
>-
5
5
XE->CR
q ROSENBERG,hEHNER (1962)
■■
⊂=一
Fig. 46
-61-
HG->CR
R HEHNER (1957)
B HEHNER (1958)
C STURFミT.h[EHNER ど1960)
D LREGREID.HEHNER (1961)
E RSKEROV.SEト伯 r1969)
II
l
.
_ー
ーー
ー ー -ー
-
ー
K-R->MN
喜喜Ill
墓室琶
i
頭iii当
≡
亡
妻ii…
!i
!
i
!
l1
1
!
;I
j
l】l
≦;
】
頭
==コ
■■■
一一
J′
./
一;i
/
/
/∩
5 106
Il
-
iLlー-
5 10§5 104
ENERGY〔E〉)
Fig. 47
i
EJEiヨ
･---
･壬垂エー→一重i■≡
5 1035 102
上=--ヽ
衰肇
⊂⊃ 5卜･-■
iZ?
∽
∋=
⊂⊃
ト-
Ⅱ1ロー1ヽ___∫
>-
5
KR->MN
∩ ROSENBERG,hEHNER r19S2)
×E->一門N
■■■
1I
一■
ノ■
E=i
I5
ノ
/再
Z
⊂) 5トー･｣
iZ!
l望〔⊃
ト
⊂10~1†_ --I
ゝ-
5
//
/R
5 102
I I I ) JT[t II
5 104
ENERGY(EV)
Fig. 48
-63- ∴:.I.
/
//R/
/
/ q
/ R
｣__ =
_｣｣出ニ=5 103
XE->MN
∩ ROSEN8ERG,hEHNER (1962)
一一-
- - -■ -l-■ -
J⊥⊥u⊥___⊥_⊥⊥⊥⊥⊥⊥｣5 105 5 10日
HE->FE
●
HE->FE
R ROSENBERG,山EHNER (1962J
Fig. 49
-64一声シiL二
巨
i
Fl
巨ii
E喜【E トー
∃iZI
声望巨〔⊃1
u=
F ⊂⊂ヽ__.一′
>-
100
N->FE
5 102 5 103 5 104
ENERGY〔E〉j
N->FE
∩ BqDER.HⅠTTE60NE.SNeUSE (1960)
Fig.. 50
-65-
5 105 5 106
NE->FE
声音
⊂⊃ 5l･･--1
iZI
(ノつ
∋=
〔⊃
トー
⊂10一王ヽ__′
､ゝ-
ら
5 102 5 103
NE->FE
R qLMEN.BRUCE r1961R)
5 LRECREID.hEHNER (1961J
.5104
ENERGY〔EV)
Fig. 51
-6.6- :,Tt:.
5 105 5 10う
RR->FE
Z
⊂⊃ 5
卜ー
iiZ?
lu'E⊂〕
ト
⊂10~1し ノ
ラ-5
ら 102 5
ENERGY(EV)
qR->FE
∩ qLMEN.BRUCE (1961R)
B LREGREH】.トIEHNER (1961j
C PRTTERSON.TOMLTN r1962)
D KOS日代7N.RYSOV.SHKRRBRN (1969)
Fig. 52
-67-
KR->FE
重責
⊂) らトー･J
gヨ
Uつ
∑=
⊂⊃
トー
⊂10-1ヽ_ J
i=
5
ら 1ロ2 5 103 5 104
ENERGY(E〉j
KR->FE
∩ qLMEN.BRUCE fi961R)
B 【ミOS巳NBERG.山EHNER ( 1962)
C KOSHKIN.RYSOV.SHKqRBqN 【1969)
Fig. 53
-68-L:!
5 105
?
′~ヽ
Z
⊂⊃ ら
伝…⊂⊃トー
cE IO~iLTウ■■コ
>-
5
×E->FE
ら 102 5 103 5 104
ENERGY(EV)
XE->FE
∩ qLMEN.8RUCE f1961R)
B ROSEN8ERG,HEHNER (196Z)
C KOSHKIN.RYSOV.SHKRR8qN (196g)
F土g. 54
-69-
5 105 5 10S
CS->FE
≡
⊂⊃
トー
iZI
ZiE
∑二
⊂:⊃
ト一
口=
ヽ___∫
>-
CS->FE
∩ KOSHKTN.RYSOV.SHKqRBqN f1969)
F土9. 55
-70-.
宅弓
HG->FE
Fr
iiFI
≡
IE
′-ヽ
巨岩
←萎I
i
ヽ_.__.′
i
E>-
1
i
l
5 102 5 103
HG->FE
R =EHNER ('1957J
B NEHNER (1959J
C LREGRE7D.HEHNER (1961J
D HEHNER.ROSENBERG (1961)
E RSr(EROV.SENR I 1969J
F りOLMEN.qLMEN 【1969,I
G TSMqTL r19フOj
5 104
ENERGY(EV)
Fig. 56
-71-
5 10う 5 106
.HE->CO
ら｢→
iZS
Uつ
∋二
⊂⊃
ト
⊂10-1ヽ__ー
～-
5
5 102 5 103
HE->CO
ri ROSE.NBERG,山EHNER (1962)
5 104
ENERGY【E〉j
Fig. 57l
-72-;
5 10う
1
惑｢】
】】
l
】
J
NE->CO
Z
⊂)
｢==岩
iZI
l望〔⊃
ト
⊂亡10ヽ__′
>-
5
5
5 102 5 103
NE->Cロ
コ LREGRE一口.山EHNER (i961)
5
ENERGY〔E〉j
Fig. 58
-73-
RR->C^0
5己==記
iZ!
(/つ
三=
〔⊃
ト
⊂1ローlヽ_.__.′
>-
5
5 1ロ2 5 103
RR->CO
q PERT.C〇LOMBIE.FqGOT (1961)
5 LRECRETD.hEHNER (1961J
C STURFモT.HEHNER (1962)
5 104
ENERGY〔E〉)
Fig. 59
-74- :,:.;
】
li
】】
1::i
CO->CO
5 102 5 103 5 104
ENERGY(E〉)
Fig. 60
-75-1･･=.
5 105 5 10S
Z
⊂⊃ 5===｣
iZS
l望⊂⊃
トー
⊂10-iヽ__...′
>-
5
Cロー>CO
∩ qLMEN.BRUCE t1961B)
B FロNTELL.qRMⅠNEN r1969J
KR->CO
5 102 5 1ロコ
≡
⊂⊃ らI---1
iZ!⊇
(∫)
≡ニ
〔⊃i
ri岩
Ⅱ10~1___■′
ヽ__
ら
KR->CO
R qLrlEN.BRUCE (i961RJ
弓 ROSENBERG,kEHNER (i962)
r DRりLGREN.MCCLRNRHqN f 197ZJ
5 1ロ1 5 1Oう
ENERGY(E〉j
Fig. 61
-76一義㌔l
5 10S
×E->CO
5
ENERGY(E〉j
Fig. 62
-77-､~
5 102
Z
⊂⊃ bト･-｣
l≧⊂〕
ト
⊂10~lヽ
_∫
>-5
XE->CO
R ROSEN8ERG,いEHNER r1962)
l
HG->COき -
5
い-t 邑
-ヽ
≡
⊂) ら巨=-｣
iiZI
Ln
∑ニ
⊂⊃
トー
cr 10-Iヽ___一
>-
5
5 102 5 103
HC->CO
∩ HEHNER (1957】
5 LREGRETD.山EHNER (1961)
C =EHNER.ROS巳NBERG f1961J
D RSr(EROV.SENR r1969)
5
ENER
Fig. 63
GY(E〉)
-78-1-.こご
･H->NI
5 103 5 104
EN･ERGY(EV)
5 10弓 5 106
Z
⊂) 5F==E
iZI
l望⊂)
ト
⊂10~lヽ___■
>-
5
H->NI
∩ KEN〆NIG-HT,いEHNER r1964)
ら BO目口RNSlくY.BqY.ROTH r1977)
一
Fig. 64
⊥79一 癖
I
D->NⅠ
Z
⊂⊃ 5トー･｣
i3
KiE
芝=
〔⊃
トー
⊂10-iヽ____∫
>-
ら
ら 102 5 103
D->NT
∩ B0日DRNSKY.BRY.RロT卜, (1977)
5 104
ENERGY〔E〉j
Fig. 65
-80-･‥･
≡】
:,(?
5 105 5 106
ENERGY〔`E〉)
HE->NI
∩ ROSEN8ERG,山EHNER 【1962J
a FETZ.OECHSNER 〔1963j
C BOHDRNSKY.B∩Y,ROTH 【1977)
D B∩Y.BOHロRNSKY.HECHTし r1979)
Fig. 66
-81- ∴
0->NI･l
･
-I-∴.
--
---.15デー
′-~~ヽ
巨室
⊂⊃ 5[==≡
iZ?
(/つ
∑=
⊂〕
トー
⊂10~1ヽ_′
>-
5
5 102 5 103 5 10ヰ
ENERGY〔E〉〕
0->NI
∩ 巴RY.BOHDRNSr(Y.HECHTL (1979)
Fig. 67
-I.琴丁皇萎-
5 105 5 106
NE->七NII iI.Ll
!二＼
Fig. 68 書.7毒 二｢
-88丁峯呂
R'R->NI ●･.
RR->NI
∩ qLMEN.8RUCE r1961RJ
ら FERT.CLOMBIE.CHUONG r1961J
C LREGREIロ.HEHNER (1961)
D STU∩RT.HEHNER (1962J
E FETZ.OECHSNER (1963J
F BRY.BOHDRNS代Y.りECHTL 【1979)
Fig. 69
-841- --&-
Z
⊂⊃ らL==E
IB∑二
⊂〕
ト
⊂10~1ヽ_
J
>-
ら
Nエー>NⅠ
･Jlop 5 103 5 1ロ4
ENERGY(E〉)
Nト>NI
∩ qLMEN.BRUCE (1961B)
ら FONTELL.qRMTNEN f1969】
C HECHTL.BqY.BO目口RNS代Y f1978j
Fig. 70
-85-㌔三二
5 105 5 10S
室垂貞
⊂⊃ 5トー･･イ
iZ5
(ノつ
∋=.
⊂)
トー
⊂10~1ヽ..___.′
ゝ-
5
5 102 5 103 5 104
ENERGY〔E〉j
KR->NI
R qLMEN.6RUCE (1961R】
6 ROSENBERG,HEHNER (19623
C FETZJロECHSNER 【1963J
O [】RりLGREN.MCCLRNRりRN ( 1972J
E 5qY.BOHDRNSp(Y.HECHTL (1979J
Fig. 71
186- I:./'l
5 10eJ 5 10弓
-,,-5
′~~ヽ
Z
⊂⊃ 5ー
I;∑=
⊂)
ト-
cr 10-Iヽ___′
>-
5
4
5 102 5 103 5 10ヰ
ENERGY〔E〉)
XE->NI
R RLMEN.8RUCE r1961R)
B ROSENBERG.如EHNER r1962J
C FETE.OECHSNER r1963)
D BRY.BOHDRNSKY.tlECHTL f1979)
Fig. 72
-87一軍寅
5 105 5 10弓
ロー>C]
巨肇
⊂) 5トーー⊥l
iZ5
(′〕
ヨニ
⊂⊃
トー
〔工10~l-.′
>-
ら
c, lop c3 103 5
ENER
ロー>CU
q YロNTS.NORMqNC.HqRRTSON (196D)
Fig. 73'
GY〔E〉j
-8.S-'L':i
丘HE->C〕
Z
⊂) 5トー･･l
iZ?
?:-トー
⊂10~lヽ__■ー
>-
5
5 102 5 103 5 104
ENERGY(EV)
HE->C〕
∩ YONTS.NORMqND.HqRRISON r1960j
8 ROSENB亡RG,HEHNER (1962)
Fig. 74
-89-言i芸t
5 105 5 106
...._N->CU･j
-
∴.●1.;
'~｢r T ■~ -LT 7
A
5ト･--J
iZ5
Uつ
∑=
⊂⊃
ト一
口=10~lヽ__ ｣
>-
5
5 102 5 ‖〕3 5 104
ENERGY〔E〉)
N->CU
R 甲OL.FLUIT.代JSTE.M∩KER (1960)
B qLMEN.BRUCE r1961B)
Fig. 75
-90-'1-.'t,
5 105 5 iOS
NE- >､C.〕.手 写r一隻て; ~妄†一二二7･二:L,
~ー~~℡-PLuせ-エー-I
l一i_一号 i- 喜
Z
⊂〕トー･｣
iZI
l望⊂)
ト
〔工10ヽ__J
>-
5
5
10~35 102 5 103 5 104
ENERGY〔E〉)
NE->CU
∩ ROL.FLUIT.r(lSTヒMR†くER (1960)
a YONTS,NORMRND.HRRRISON (1960)
C RLMEN.日RUCE 【1961R)
D LREGRETD.HEHNER (1g61)l
E HEH.HER.S†URRT.ROSEN8'ERG r 1961 ∫
F 口UPP.SCHRRMRNN 【1966)
G HErJSENFELロ[1966)
I-.
'L
･1-
-I. Ir ･
.1
Fig. 76
-9ト
ー､ニ
5 105 5 106
声室
⊂⊃ ら;~~~~ど
iZ?
Uつ
∋=
⊂⊃
トー
Ⅱ10-iヽ_ J
>-
5
5 102 5 103
Fig. 77
5 104
ENERGY〔E〉j
I9芦
5 1ロう
RR->CU
∩ KEY山ELL (1955)
ら GUSEVR 【1960j
C ROL.FLLITT.代T_S†EMqKERロ YONTS.NORMFirND..りRRRTS7o
( 19-60J
N (1960)
E.. RLMEN･BRUCE r19:61R】
F FERT.C8LロMBr巨..FqGOT r196l`)
C LRECRETD.hEHNER (1961】
H PER8VIC.C臼~BIr (1961J
7 日EHNER.STU∩RT.ROSENBERG (19611
J SOUTHERN.HTL.LIS.ROBTNSON (1963)
K
L
:I:･き
RR
白u
HER.NRRRSIMりRM.REYNOLロS (1964)
PP.SCHRRMqNN (1966)
HE7JSENFELD (1966J
r(OSHKIN.RYSOV.S日代RRBRN ( 1.969J
O RKR◆ⅠSHI.MTYRHRRR,KqBEYR (1977)
CU->CUL
･. tL
-丁る--
Z
⊂⊃
トー｣
iZI
l望⊂)
ト
(工10ヽ___∫
ゝ-
5
5
5 102 5 103 5 104
ENER'GY〔EV)
Cリー>CU
R GUSEVR (1960J
ら IROL.FLUⅠ丁.KISTヒMqKER (1960)
C RLMEN.BRUCE r1961B)
D FロNTELL.qRM!NEN (1969J
E HqYHRRD.山OLTヒR (1969)
Fig. 78
-93一 隻･･
5 105 5 106
KR->C〕
重要
⊂) 5｢==瓦
iZ?
Uつ
∑二
〔⊃
ト
Ⅱ10~Ⅰヽ._.....■′
>-
5
5 102 5 103 5 10ヰ
ENERGY(E〉)
KR->CU
∩ lくEYレほL L (1955)
8 GUS巳VR (1960)
｢ YONTS.NORMqN口.りRRRISON r1960)
D RLMEN.BRUCE (1961RJ
E HEHNER,STU∩RT.ROSE.NBERG r1961)
F' ROSENBERG,hEHNER (1962)
G DUPP.SCHqRMqNN r1966)
H KOSHKIN.RYSO〉.SHKRRBqN 【1969)
-94-
5 105
Fig. 79
5 106
XE->CU
XE->CU
∩ GUSE〉R 【1960】
ら qLMEN.BRUCE r1961R)
C HEHNER.STU∩RT.ROSENBERG r1961)
D ROSENBERG,HEHNER (1962)
E STU∩RT.HEHNER (1962)
F D〕PP.SCHRRMqNN (1966J
G KOSHK7N.RYSOV.SHKRRBq卜J t1969)
Fig. 80
-95-
CS->C〕
CS->CJ
∩ qLMEN.6FミUCE (1961BJ
B KOSHKIN.RYSOV.SHKRRBqN f1969)
Fig. 81
-ー96-.
HG->C〕
Z
〔⊃ 5王=コ
iP
&u'⊂〕
トー
cE 10-1■■■i
>-5
HG->CU
∩ hlEHNER r1957)
B COL.FLUTT.r(TST巳MqKER (196O)
C RLMEN.BRUCE (1961B)
ロ LREGRETD.山EHNER (1961J
E hlEHNER,ROSENBERG (1961】
F qSKEROV.SENR r1969)
G ISMqTL 【19フロJ
Fig. 82
-97-p
PB->CU
巨套貞
⊂⊃ 5i--A
iZ?
(ノつ
∑=
⊂⊃
トー
⊂1ロー1ヽ___
′
>-
5
5 102 5 103 5 104
ENERGY(EV)
PB->CUI
∩ qLMEN.BRUCE (19618)
6 KOSHPくⅠN.RYSOV.SHKqRBqN r1969J
Fig. 83
-98-
5 105 5 106
H~E->GEt-
5_･-
巨室
〔⊃ 5l-･･･一I
iiZI
l望⊂)
H=
cr 1.0~1ヽ.J
>-5
5 102 5 103
HE->GE
∩ ROSENBERG,hlEHNER ( 1962)
5
ENER
Fig. 84
-99･-
GY〔EV)
NE->GE
5 103
NE->GE
∩ LRECRElロ.HEHNER [1961J
5 104
ENERGY〔E〉)
Fig. 85
-loo-
5 iO･5 5 10S
RR->GF_
Z
⊂〕 5トー｣
iZI
⊂)
ト
⊂10~1ヽ___.∫
)-
5
5 102 5 103 5 104
ENERGY(E〉)
RR->GE
∩ LRECRETD.山EHNER r1961J=1
8 SOMMERFELDT,MqS日代O〉R r1972)
Fig. 86
-･101-
5 105 5 106
KR->GE■
ヽ
･'･ ll
I
～.F･
ー9L
t~才一~~年!-'--
1t-･~~:巾†~ il､~～
Ml旨
轟音
⊂〕 らト･･-･｣
iZ5
Ln
∋二
⊂〕
ト
Ⅱ1ローiヽ__-∫
>-5
5 102 5 103
KR->GE
R ROSENBERG,HEHNER (1962)
5 STURRT.HEHNER r1962)
5 104
ENERGY(E〉)
Fig. 87
-102- ･一主
5 105 5 106
×E->GE
Z
⊂) 5トーーJ
i?
乾三⊂)
トー
⊂10~1ヽ__ J
>-5
5 102 5 103
XE->GE
∩ ROSEN【∋ERG-,山EHNER 【1962J
5 104
ENERGY(E〉)
Fig. 88
-103-､●
5 105 5 106
.HG->GE
≡
〔⊃ br,～
iZ!
(′つ
∑二
⊂⊃
ト
⊂10~1ヽ-..._.′
>-ら
ら 102
HG->GE
R 山EHNER (1957J
5 103 5 104
ENEF(GY(EV)
Fig/･ 89
-104-i:i･
5 105 5 10S
HE->ZR
Z
⊂⊃
ト･-1
i:■
l望⊂)
ト
ロ=10ヽ■__.′
>-
5
ら
5 102 5 103
HE->ZR
R FモOSEN6ERG.LIEHNER ( 1962)
5 10ヰ
ENERGY〔E〉j
Fig. 90
-105-
5 10rJ 5 106
LI->･ZR
Z
⊂) 5
卜==
iZ?
(J7
三二
⊂⊃
ト
Lr 10-1ヽ.__J′
>-
5
5 102 5 103
L ト>ZR
R MqRTYNEトIr(O ( 1963)
5 104
ENERGY(EV)
Fig.､91
-106-∴･
5 1O5 5 106
㌢喜
NE->ZR
5 103
NE->ZR
∩ LREG･RETD.HEHNER r196i)
5 104
ENERGY(E〉〕
Fig. 92
-107-ゝr-
5 10う 5 106
RR->ZrR
巨i
⊂⊃ ら=
iZ5
(′⊃
∑二
⊂〕
ト
⊂10~lヽ ′
>-
5
5 102 5 103
RR->ZR
q LRECRElロ,山EHNER (1961J
5 104
ENERGY〔E〉j
ヽI
Fig. 93
-108-●;･f
5 105 5 106
KR->ZR
(;-5 -
Z
⊂〕
ト･--1
iZI
>望⊂⊃
ト
ロ=10ヽ_...′
>-
5
5
5 102 5 103
KR->ZR
∩ qLMEN.BRUCE 【1961RJ
ら ROSENBERG.HEHNER (1962)
5 104
ENERGY(E〉)
Fig. 94
-109-
5 105 5 106
×E->ZR
ら｢==E
iZ?
∪つ
i=
⊂⊃
トー
Ⅱ10-1
･■
ラ-
ら
5 10:I 5 103
XE->ZR
q ROSENBERG.hEHNER r1962)
5 104
ENERGY(EV)
Fig. 95
-ilo-･･rL
5 105 5 10S
HG->ZR
｢~~~=ヽ
Z
P ら王==｣
iZ5
!p-''_g'⊂)トー
⊂10~lヽ__∫
>-5
5 102 5 103
HG->ZR
q =EHNER [1957)
ら LZLGREID.hEHNER fi961J
C RS代EROV.SENR r1969)
5 104
ENERGY(EV)
Fig. 96
-Ill-
5 105 5 106
H->NB
′~■■■■■~■■＼
巨室
⊂〕 5ト･･-■
g≡一
√∫)
三二
〔⊃
ト
(工=〕~l
～-
ら
5 1〔〕∠ 5 103
∩
q
I---､
⊥｣
105
⊥
55
ENER
H-->NE主
II SUM｢lERS.FRELMqN.DRLY (1371)
B ロLLERHERD.MqNN.r(NEFF. t137SJ
GY〔E〉j
Fig. 97
-112-､:
D->NB
′ヽ
巨室
⊂⊃
一
声誌∑=
⊂⊃
ト
⊂【:
ヽ___′
>-
lo一l
ら
5 102 5 103 5 104
ENERGY(EV)
D->NB
q SUMMERS.FREE.MqN.ロRLY f1971)
Fig. 98
-113･-'r
5 10cJ 5 10弓
HE->NB
i5ii
⊂)トー｣
iiZI
Uつ
∑=
⊂⊃
ト一
口⊂10ヽ____.′
>-
ら
ら
5 102 5 103 E=J 10i
ENERGY(EV)
HE->N6
R ROSEN6ERG.hEHNER (1962)
ら SUMMERS.FFほヒMqN.DRLY 【1971)
C GUSEVR,MqRTYNEN代O f1976)
Fig. 99
-114-:･
I.
5 1D5 5 10う
NE->NB
′~■~■ヽ
声音
⊂⊃トー･･･■
i,≡⊂⊃
トー
〔工ヽ__′
>-
loll
ら
NE->NB
q LRECRETD.如EHNER (1961)
8 STURRT.hEHNER (1962J
Fig. loo
-115-
q-R->-NB
らトー･1
＼.
置害
∋二
⊂〕
トー
⊂10~1ヽ____′
>-
ら
5 102 5 1｣3 5 104
ENERGY(EV)
RR->N6
q LRECREIC).山EHNER r1961J
5 STURRT.hEHNER 【1962J
じ KOSHY(TN.RYS〔)V.SHKRV6qN r1969J
O SMてTH,MEYER.しRYTON fi975j
Fig. 101
--116一三!!.
5 105
書ヒ.…l3
巨ゝ主
5 10弓
KR->NB
Z
⊂⊃ らトー
iZS
国璽
∋=
〔:)
トー
cr 10-1ヽ____∫
>-
5
5 102 5 103 5 104
ENERGY〔EV)
r(R->NB
q qLMEN.BRUCE t1961BJ
B ROSENBERG.HEHNER (1962J
C KOSHKTN.RYSOV.SHKqFほqN r1969J
Fig. 102
-117-
5 105 5 10S
NB->NB,
ら:≡:=コE
6!■
(′つ
∑二
⊂〕
トー
Ⅱ10~1ヽ■.___∫
>-
ら
5 ‖〕2 5 103 5 10i
ENERGY(EV)
NB->NB
q qLMEN.BRUCE r1961B)
6 SUM｢lERS.FREヒMqN.DRLY r1971)
Fig. 103
-118-,I
5 105 5 105
XE->NB
Z
⊂〕 5トー｣
i?
夢望⊂⊃
ト
仁1ローlヽ ′
>-ら
5 102 5 103 5 104
ENERGY(EV)
XE->N8
q ROSENBERG,hEHNER (1962J
6 KOSHKIN.RYSO〉.SHKRR6qN r1969j
Fig. 104
-119-
5 10う 弓 10弓
.CS->N･B
●●
5 10S5 101
ENERGY(EV)
5 1O5う 102 5 103
CLJ->N6
q KOSHKIN.Rl(Soy.SHKRRBqN (1969)
Fig. 105
-120一首-
HG->NB
Z
⊂⊃ 5王=コ
iZI
夢 望〔⊃
トー
⊂10-1ヽ___∫
ゝ-
ら
5 102 5 103
HG->NB
q =EHNER (1957J
B LZECFほ丁ロ.hEHNER (1961J
C RSrくEROV.SENR r1969J
5 104
ENERGY〔E〉)
Fig. 106
-121-
5 105 5 10S
一 H->M8
Z
⊂〕ト･-｣
iZI
U7
∑二
⊂)
ト
⊂亡10ヽ_.__ノ
ラ-
5
5
5 102 5 103 5 104
ENERGY('EV)
H->MO
R FTNFGELロ(1975)-
ら BOHDRNSKY.ROTH.SINHq r1976J
C BqY.RrJTH.BOHロRNSKY 〔1977)
ロ 0日TSUKq.YRMqロR,SOME r1978)
E SONE.OHTSUKR.qBE (1977J
Fig. 107
-122-
､
.
.5105 5 105
巨室
⊂⊃
トー-I
?a∋=
〔⊃
ト-
⊂亡10ヽ___ ∫
ゝ-
ら
ら
10~35 102 5 103
ロー>MO
∩ FTNFGELロ(1975j
6 6qY.RUTH,BOHDRNSKY f1977)
5 10ヰ
ENERGY(E〉j
Fig. 108
-123-
5 1ロ5 5 106
HEr.>MO
ら卜ー
iZI
U7
∑=
⊂⊃
ト
Ⅱ10-iヽ J
>-5
5 102 5 103 5 104
ENERGY(E〉j
HE->MO
∩ ROS巳NBERG.いEHNER ( 1962)
5 GUSEVR,MqRTYNENKO (1976)
C SHTTKOレJSKT.MqNN.KNEFF r1976)
D 6qY.可OTH.BORDRNSKY r1977)
Fig･･ 1P9
24-｢ !ヰt;i (.:. .t'..:て::i
5 105 5 10ち芦
NE->MO
巨当
⊂)トー｣
iZ5
1望⊂⊃
ト
ロ=10ヽ___∫
>-
I
5
5
10~3
NE->MO
∩ qLMEN.BFミUCE (1961R)
ら LRECRElロ.山EHNER (1961J
Fig. ilo
-125-･. ∴
RR->M･0
重要
⊂〕 5==≡]
iZI
(′つ
I
⊂⊃
トー
Ⅱ10一王ヽ.._.J
>-5
5 102
轡11
5 iO3 5 10i
ENERGY〔E〉)
Rrト>MO
q YONTS.NORMqNロ.りq【ミRTSON (1960)
6 qLMEN.BRUCE 【196iR)
ど LREGRETD.hEHNER r1961)
D T(DSijKIN.RYSOV.5日KqR6RN (上96gJ
E ShITKOHSlくT.M∩NN.代NEF･F (1976)
F' EMrlOTH.FRIED.6RqUN r1978J
Fig. lil -
-1L2'6一語ま量
5 1O5
KR->MO
5トーJ
iZ?
夢望⊂〕
トー
c=lO-Iヽー
>-5
5 102 5 103 5 104
ENERGY〔E〉j
KR->MO
R qLMEN.臼RUCE r1961R)
6' ROSE.NBERG.hEHNER ( 1962)
C KOSHK†N.RYSOV.SHKRR8qN r1969)
Fig. 112
-127-
5 1Oう 5 10S
5I-.- ｣
i?
Uつ
∑二
⊂〕
トー
Ⅱ10-1
～_
_｣
ラ-
5
XE->MO
∩ qLMEN.Br-tUCE. (1961R)
3 ROSENBERG,hEHNER (196Z)
C KOS日代†N.RYSOV.5日KqR6qN r1969)
Fig. 113
-128- こ-_.
CS->rlO
5 1035 102
′■■~~一＼
重要
⊂⊃
t11
iiZ5
夢望⊂⊃
u=
□=
ヽ__._∫
>-
5 105 5 1O55 104
ENERG.Y(E〉)
CS->MO
∩ KOSHKTN.RYSOV.S日代qRBqN 【1969j
Fig. 114
-129-
HG->MO
岳重責
⊂〕 5;===｣
iZI
Ln
∋二
⊂⊃
トー
⊂10-1ヽ__∫
>-EJ
う 102 5 103
HG->MO
∩ hlEHNER (19E)7)
8 日EHNER r1959)
C LZE_CRETD.山EHNER r1961J
D hlEHNER.ROSENBERG r1961J
F RSKERO〉.S巳NR (1969)
F りEPHORTH r1970J
し ISMq了し f1970)
5 104
ENERGY(EV)
Fig. 115
-
1-30-
5 105 5 10与
PB->MO
5 1ロZ 5 103 5 104
ENERGY(EV)
PB->MO
∩ KOSHKIN.RYSOV.SHKRRBqN r1969J
アユg.. 116
-131-
5 10う 5 10S
NE->R〕
ら卜･--1
iZI
(ノつ
三二
⊂⊃
ト
ロ:lo一lヽ_■_′
ラ-
5
5 102 5 103
NE->RU
∩ LRECREID.hEHNER (1961)
5 104
ENERGY(EV)
Fig. 117
r182- をキ争i,
5 10与 5 10与
RR->RU
Z
⊂〕
トー｣
i?
?望⊂〕
ト
ロ:10
ヽ__
-●
>-
cJ
(J
5 102 5 103
RR->RU
∩ LRECRE7ロ.hEHNER (19Sl)
5 1O4
ENERGY(E〉j
Fig. 118
-133-
5 10弓 5 10弓
KR->R〕
らトー･･-･1
iZ5
(∫)
三ニ
⊂⊃
ト
Ⅱ10-1ヽ.___.′
)･-
ら
5 102 5 103
KR->RU
R ROSEN6ERG､山EHNER (196Z)
rJ IOi
ENERGY(E〉j
Fig. 119･
-134一 諾至
XE->RU
重要
⊂〕トー
iZ5
?望⊂⊃
ト一
口=10ヽ_′
>-
⊂､【芦∃
ら
10~35 102 5 103
XE->RU
∩ ROSENBERG.hEHNER (1962J
5 10･''
ENERGY〔E〉j
Fig. 120
-135-･･
.5105 5 10弓
5 1ロ2 5 103
HE->RH
q ROSENBERG.hEト川ER (i962j
5 101L
ENERGY(E〉j
一子
Fig･ l121
-136- :.I.∴
5 10う
･享_二_i_ら
NE->RH
5 102 5 103
NE->RH
q LRECRETD.hEHNER (i961)
5 104
ENERGY〔E〉〕
Fig. 122
-137一 兵買葦
5 iO5 5 iOS
RR->RH■ +
i t lヽ
÷モ
5 102 う 103 5 104
ENERGY(E〉j
Fig. 123
⊥i舌畠- -一誓書童
5 105 5 10弓
Z
⊂⊃
‡一--二rj
i3
∽
∑:
⊂⊃
トー
(工10ヽ____′
>-
5
ら
FIR->RH
q LRECFほID.hEHNER [1961)
KR->RH
戸車
⊂⊃トー■
夢≧⊂)
n=
□=10ヽ__〟
>-
ら
ら
5 102 5 103
KR->RH
q RLMEN.BRUCE r1961R)
8 ROSEN6ERG.hEHNER (1962)
5 104
ENERGY(E〉)
Fig. 124i
-139-･-
5 105 5 10弓
×E->RH.
重要
〔⊃ 5:===｣
iZS
Uつ
∑=
⊂⊃
トー
cr101L'Eq
ラ-
ら
5 iO2 5 103
XE->R卜I
q ROSEN6ERG,山EHNER (1962)
5 104
ENERG-Y〔EV)
Fig.1125 モ
-140‥ ･…こミ
5 10う 5も 10う
HG->RH
′~~~ヽ
Z
⊂〕 5ト･-1
巳ヨ
き1;･⊂⊃
トー
⊂10~lヽ___′
>-
ら
5 102 5 103
HG->RH
q 山EH卜jER (1957J
B LRECRE=〕.hEHNER (1961j
C レほHNER.ROSEN8ERG (1961)
5 104
F.NEF(GY(EV)
Fig. 126
-14l-
5 10弓 5 106
HE-.>PD.
-.･.･
らトーIl
i:ヨ
ぴ)
∋=
⊂⊃
トー
⊂10-Iヽ_.__′
ラ-
ら
1J~2
ら
10-3
5 10弓5 5 1ロコ
hE->Pロ
R ROSEN6ERG.hEHNER r1962)
5 iOi
ENERGY(EV)
Fig. 127
十14-2一 書妄言EJどl 巨!
5 1ロ§
NE->PD
⊂⊃ 5トー･･J
iZ5
夢望⊂⊃
トー
⊂10~lヽ____′
>-ら
c, 102 5 103
NE->FD
∩ qLMEN.6RUCE (1961R)
6 LREC･RE7D.hEHNER r1961J
5 1O4
ENERGY〔E〉)
Fig. 12笥
-143-･
5 105 5･10§
I.I>･
qR->PD
≡
⊂) ら卜ー
iiZI
Jつ
∋=
⊂⊃
トー
cr lo一lヽ
1
>-
ら
5 102 5 103
qR->FD
Fl qLP.EN.BRUCE f19SIRJ
5 LRECRETD.hEHNER (1961)
5 10i
ENERGY(EV)
Fig.上2.9
-144--. ･
5 105 5 10弓
KR->PD
Fig. 130
-145一主星T,
KR->PD
∩ qLMEN.6RUCE (1961RJ
6 【ミOSENBERG.如EHNER ど196Z)
i
XE-_?PD
′ヽ
Z
⊂⊃ cJ
:===｣
iiZI
∽
∋=
⊂)
トー
Ⅱ10-1ヽ
→
>-
ら
弓 102 5 103
XE->PD
∩ qLMEN.6RUCE r1961R】
6 rモロSENBERG,山EHNER ( i962J
5 104
ENERGY〔E〉】
Fig. 131:
-146- ,::'...;
5 105 5 10う
HG,->PD
房室
⊂〕ト･-｣
iZI
声望⊂)
トー
ロ:10ヽ____′
>･-
5
ら
5 102 5 103
HG->Pロ
R レほHNER (1957J
6 LREGRETD,如EHトニER r1961J
C HEHhJER.ROSEN8ERG (1961J
5 104
ENERGY(EV)
Fig. 132
-147- ,u :
5 10う 5 105
H-?.RG
5 102 5 103 5 10i
ENERGY〔E〉)
う 10う 5 10与
声音
⊂⊃
トーー1
iZI
(′つ
∑=
⊂)
ト一
口=10ヽ..__..■ノ
>-
ら
ら
H->RG
q OIBRTRTN.L TNロNER,MOロRE r1958j
ら GRONLUND.MOORE (1960)
Fig. 133
-
▲f4･8-
r､: ∫rlh L=
ロー>RG･,--- 5'-i--
i肇
⊂) 5トー｣
iZI
l∽
∋=
⊂)
ト
⊂10~1ヽ∴-_′
>･-
5
=-F==
1一-■-~■---t--
_
5 1ロ2 5 103 5 104
ENERGY〔E〉)
ロー>RG
q OtBRTRTN.LINDNER.MOORE t1958)
ら GRONLJND.MOORE 〔1960)
F土g. 134
-149-:
5 10う 5 10与
HE-_.>RG
∩ q
q
轟音=
由 らトー
i?
(∫)
∋=
⊂⊃
ト
⊂10-1ヽ
･■
>-
ら
10~3
ドI
‡
′B'/
ら
B ー′
q
ら′一--′■■
_----一-~~--I-----I
5 103
HE->RG
q r(E_YHELL r19ら5j
5 RO5ENBERG.hEHNER r1962J
5 104
ENERGY〔E〉〕
Fig. 135
-150- i;主Lr
5 105 5 10S
NE->RG･･-1. 5
5 102 5 10.3 5 104
ENERGY(EV)
NE->RG
q KEYレほLL (1955)
ら qLMEN.6RUCE 【1961R)
C LREGREID.hEHNER.(1961J
D HEHNER.STU∩RT.ROSENBERG (1961)
Fig. 136
-15rl- .∫ ,
5 105L･
log
RrR -> RIB-+rl i5 ≡
L.A
Ttrllー T
･-.T｣【一---
･･
-=--==L-=1=p･岩r
-Lrr r-一←----1-I→丁-=rF二一→-･---･
･.T†
巨室
〔⊃ 5トーーI
iZ?
∽
三二
⊂)
ト一
江10~lヽ___ノ
>-ら
即ト>RG
q KEYhEL L 【1955J
B 【;USEVR (1960)
C RLMEN.8RUCE (1961R)
D PERT.COLOMB一己.F･qGOT (1つ61)
E L RECRETD.hEHNER (1961)
F PEROVTC.COB!C (1961?I
G hEHNER.ROS巳NBE.RG (1961)
!1 RqMER.NRFモRSTMりqM`REYNOLDS r1964)
! SPl!TH,MEYER.LRYTON r1975)
Fi9. 137
-152-! ･'
KR->RGF 7---5
ヽ■-
-lot
巨萱岳
⊂⊃ 5ー
iZI
(/つ
∋=
⊂〕
トー
⊂10-1ヽ_.__′
>-
5
5 102 5 103, 5 104
ENEF(GY(EV)
KR->RG
R KEYhELL 【1955)
B GUS巳〉R r1960J
C RLMEN.BRUCE t196iRJ
D HEHNER.STURrモT.ROSENBERG ( 1961J
E ROSENBERG,hEHNER (1962】
F DRりLGREN.MCCLRNRりqN r197ZJ
-153-Jl･
5 1OF'
Fig. 138
5 10弓
qG-モRG
iiiii
∠｣_
⊂⊃ 5トーl
岳!!
(ノつ
∋=
⊂⊃
トー
⊂10~lヽ_.....〟
>-
5
5 10Z 5 1ロコ
qG->RG
q GUSEVR (1960)
ら qLMEN.BRUCE (19616)
C トiqYトIRrミD.hOLTLR ( 1969)
ロ qNDERSEN.8qY f1973)
5 104
ENERGY〔E〉ト
Fig. 139
-154- ト:
5 10う 5 10う
×E->RG
i
ト一
iZ5
挺〔⊃
トー
〔工
ヽ■_′
>-
5 102 5 103 5 104
ENERGY〔E〉)
XE->RG
q GUS己VR f1960)
伝 qLMEN,BRUCE r1961R)
C HEHNER.STU∩RT.RロSEN6ERG (1961)
D ROSEN6ERG,hlEHNER f1962J
Fig. 14O
-155-･-･.i
5 10う 5 10弓
5 103
HG->RG
q ト】EHNER (19ら7J
6 qLrlEN.BRUCE (1961B)
C LZヒCFほID.hEHNER (1961J
ロ HEHNER.ROSENBERG (196L.)
E'. RS代EROV.5巳NR (1969J
F てSMqTL r1970)
5 10`
E.NERGY〔E〉j
Fig. 14Jl
r156- 畠{j.皇
5 1O5 5 10弓
NI〔->SN
巨室
⊂)｢=≡王
iZS
? u'=
⊂⊃
ト
〔工10ヽ-._.′
>-
5
ら
_.-------- R
---一一"---------I
∩ qqqR
5 103
NE->SN
∩ qLMEN.BRUCE r1961RJ
5 104
ENERGY(EV)
Fig. 142
-157-
5 10う
F]R->.SN
声音
⊂〕トーー｣
iZS
(′つ
∑=
⊂⊃
ト一
口=10ヽ____′
>-
5
5
5 102 5 103 5 104
ENERGY(EV)
RR->SN
∩ qLMEN.BRUCE r1961R)
ら PRTTヒRSON.TOMLTN (1962)
C HEHNER.STU∩RT.ROSENBERG (1962)
D KRUTENRNT.PRNZERR (1970)
Fig. 143
-158-
5 105
KR->SN
戸車
⊂)=
i?
? u'=
⊂⊃
ト-
(工10し
一一
>-
5
5
5 102
_J--I-一一--------
一--I-一一ー
- 1Il
一-一~qq q研q
■l●
J′
′ー-一ーR
( I ) I I IfJ( 1
5 103
KR->SN
∩ qLMEN.BRUCE r1961R)
⊥｣｣⊥⊥⊥_
5 104 5 10う
ENERGY〔E〉j
Fig. 144
-159-
Z
⊂〕 5【≡≡≡
iZI
(ノつ
∑二
⊂〕
トー
cr 10-Iヽ__ー
>-
5
5 102 5 103
SN->SN
∩ qLMEN.BRUCE (19616)
6 FONTLL L.qRMTNEN (1969)
5 104
ENERGY(E〉j
Fig. 145 ･-i
-160-∴･∴
5 10う 5 10う
×E->SN
亮室
⊂⊃ 5トーー1
i?
F
u'E
⊂〕
ト
⊂10~1ヽJ
>-5
10~2
5
10~3
I
rlrl=
一-■
__ --qI-qq哨
■=
一-
~
R
=-ニュ-ニ
ー=｣==-----i=
5 1ロ3
XE->SN
∩ qLMEN.BRUCE 〔196iR)
5 104
ENERGY(E〉)
Fig. 146
-16l-
5 10う 5 10弓
HE->卜IF
5 102 5 103 5 104
ENERGY(E〉〕
5 105 5 10弓
巨萱音
⊂⊃ E)≡=≡｣
iiZI
Uつ
∑=
⊂⊃
トー
⊂10~1ヽ.I_.J
>-ら
HE->HF
q ROSE_N6ERG.hEHNER (1962)
Fig. 147
-162-- ∴
NE->HF
5 102 5 103 5 104
ENERGY〔EV)
5 105 5 105
巨室
⊂⊃ ら王==｣
iZI
? u'=
⊂⊃
トー
⊂10~1
ヽ_
ノ
>-
5
NE->HF
q LRECRE一口.hEHNER (1961J
Fig. 148
-163-
RR->HF
衰室
⊂⊃ 5巨===]
iZ?
(/つ
∋二
⊂⊃
トー
⊂10ーlヽ___ ▲
>-5
5 102 5 103
RR->HF
q LRE_CRETD.hEHNER (1961j
5 104
ENERGY(EV)
Fig. 149
-164-
5 105 5 10弓
KR->HF
戸車
⊂⊃ らトーーI
iZ?
夢望⊂)
ト-
⊂10~1ヽ__′
>-5
5 102 5 103
KR->HF
q qLMEN.B-ミUCE r1961B)
ら ROSENBERG.HEHNER r1962)
5 104
ENERGY(EV)
Fig. 150
-165-
5 105 5 106
5トー†
iZS
(∫)
∋=
(⊃
ト-
⊂10~1ヽ ▲
>-CJ
XF_->tlF
q ROSENBERG.山Eト川ER (i962J
Fig. 151
-166-･･
HG->rlF
HG->HF
q 如EHNER r1957)
Fig. 152
-167-
HE->TR
■ー~丁二､
重責
⊂〕 らt-1I
i:ヨ
∽
∋=
こ:)
ト
cr iO-Iヽ■._...ノ
>-EJ
5 102 5 103
りE->TR
q ROSENBERG,如EHNER (1962J
5 1O4
ENERGY(EV)
Fig. 153
-168-･ :::
5 1O弓 5 10ら
NE->TR･･
.ら,
Z
〔⊃トー
iZ!
?望⊂⊃
q=
⊂ニ10tこ二二=ノ
>-
(J
ら
5 ‖〕2 5 103
NE->TR
q qLMEN.BRJCE r1961R)
B LRECRE!D.hEHNER (1961)
5 104
ENERGY〔E〉〕
Fig. 1与4
-169r ･三貴言亨
5 105 5 10S
RR-モTR
5トー･･･｣
iZ!
〔/つ
∋=
⊂⊃
ト
仁10~iヽ___∫
>-ら
5 102 5 103 5 104
ENERGY〔E〉)
RR->TR
q Y〇NTS.NORMqNN.HRRRTSON t196O)
6 qLMEN.6F:UCE (1961R)
C LRECREID.hEHNER (1961)
D 5TURRT.山EhNER (1962)
E'_ 山一TTMqqCK (1975)
1
'E I
Fig. 155
-170- :::'T:!r.
5 10う 5 10弓
KR->TR
らL-.～
iZI
哩⊂⊃
トー
⊂10~1ヽ___._′
>-
5
5 10nL 5 103
KR->TR
∩ qLMEN.E;RU〔E ri961RJ
B rミOSENBERG.hEHNER r1962)
5 104
ENERGY(E〉〕
Fig. 156
-17_ll- _主軸~ゝf
ri j
5 105 5 10S
×E->TR
重要
⊂〕 5;---｣
iZI
(/つ
∑二
⊂⊃
ト
⊂10~1ヽ
_一
>-CJ
5 102 5 103
XE->TR
q qLMEN.BRUCE (19SIRJ
ら ROSENBERG,山EHNER (1962)
5 iO4
ENERGY〔E〉■〕
Fig. 157
-1･172-･'.
I;
5 105 5 106
HG->TR
Z
⊂⊃ らトー｣
iZS
夢望⊂〕
B=
cr 10-iヽ_ー
ゝ-5
5 102 5
ENERGY〔E〉j
HG->TR
q MEYER,GUENTHERSCHULZヒ(193i)
B 如EHNER (1957)
C トIEHNER r19ら9)
D RLMEN.6RUCE (1961J
E HEHNER,ROSENBERG ( 1961)
F RSKEROV.SENR r1969)
G TSMqTL 【1970)
Fig. 158
-
1718-
llE->=
r･; lD2E:,
103 E=) iOi
ENERGY〔E〉j
5 105 5 105
≡
つ c)A-
Jl
iZl:
I)
Fニー｢
jii一
工=〕ーl
ら
巾F:>H
ナ1 【て･3SE.N6ERG,hEHNER.( 13弓2)
(:I rJLISEVR.MqRTYNENr(ロ ーi976)
Z了E_CLF.冗.〔J〇Mロ.R〇TH flつ77j
Fig. 159
T-174- ･:.I;三
NE->山
⊂〕
ト
Ⅱ10~1ヽ__..一l
>--
ら
5 102 5 103
NE->H
∩ qLMEN.BRUCE (1961R)
B LRECREID.hEHNER (i3Sl)
C STURFミT.hEHNER [1962)
5 104
ENERGY(E〉)
Fig. 160
-
175-
5 iO5 5 10S
ー
ーヽ
重要
t'=) らトーーJ
6ヨ
J｢
iiE!
･ニ)Lii
..I10-1
I__........′
ヽ>_-
C)
う 102 5 103 5 104
ENERGY(E〉j
ー1rト>H
与j qLMEN.P'†ミUCE (19SiR)
lJ LrlECREIロ.hEHNER (13613
5TURPIT.HEHNER riO62J
こ) 代OSト1KIN.RY5OV.SH代目R5qN r19S3J
t 5MTTH.rlEYF_R.LRYTCIN 【1つ75)
Fig. 161
-1･76- ･･二',:･T
5 105 5 10S
KR->山
Z
⊂〕
トー▲l
転⊂⊃
ト-
〔工10■
__′
>-
ら
EJ
5 102 5 103 5 10i
ENERGY【E〉〕
KR->H
∩ qLMEN.6RUCE (1961RJ
B ROSENBERG,HEHNER( 19S2)
C STRRT.HEHNER (1962)
D KOSHKTN.RYSOV.SHKqFく6RN r1969J
Fig･. 162
-177-㌍,与T
5 105 5 10う
×E->山
ら【===コ
iZ5
(′〕
∑=
⊂⊃
ト
⊂10~1ヽ
■
>-
ら
10~3L I I I I tII I
5 10i
ENERGY〔E〉j
5 102 5 103
XF.･･>H
〔 qL｢?EN.BRUCE t1961R)
6 rミOSEN6ERG.山EHNER r19S2)
C STU∩RT,HEHNER (1962J
D lく〇5日KIN.RYSOV.5日KR〉BRN f19S9)
Fig..163
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