+ All Categories
Home > Documents > ISSCC 2008 / SESSION 2 / IMAGE SENSORS & TECHNOLOGY / 2isl.stanford.edu/~abbas/papers/A 3M Pixel...

ISSCC 2008 / SESSION 2 / IMAGE SENSORS & TECHNOLOGY / 2isl.stanford.edu/~abbas/papers/A 3M Pixel...

Date post: 19-Jun-2020
Category:
Upload: others
View: 1 times
Download: 0 times
Share this document with a friend
3
48 2008 IEEE International Solid-State Circuits Conference ISSCC 2008 / SESSION 2 / IMAGE SENSORS & TECHNOLOGY / 2.3 2.3 A 3MPixel Multi-Aperture Image Sensor with 0.7μm Pixels in 0.11μm CMOS Keith Fife, Abbas El Gamal, H.-S. Philip Wong Stanford University, Stanford, CA Conventional image sensors have improved with technology scal- ing mainly by reducing pixel size to increase spatial resolution [1,2]. As resolution approaches the limits of existing optics, is there much to gain from further pixel scaling? In [3], we argue that further scaling can provide new imaging capabilities via a multi-aperture (MA) architecture, which consists of an array of small submicron pixel imagers (apertures), each with its own integrated optics. By focusing the integrated optics onto an image plane formed by an objective lens in a region above the MA imag- er, the apertures capture overlapping views of the scene. The cor- relation and redundancy between apertures, along with computa- tion, provide several new capabilities, including: (i) simultaneous capture of a 2D image at higher resolution than the aperture count and a 3D depth map without the need for active illumina- tion or calibration; (ii) simplification of the objective lens design; (iii) reduction of color crosstalk via per-aperture color filters; and (iv) increased tolerance to pixel defects. It is further shown that depth resolution continues to improve with pixel scaling beyond the typical spot-size of the optics. Designing scalable arrays of submicron pixels with acceptable imaging performance is chal- lenging however. In [3], we propose using a frame-transfer (FT) CCD aperture with CMOS readout architecture. In [4], we demonstrate a 16×16, 0.5μm pixel-pitch FT-CCD in 0.11μm CMOS technology with acceptable imaging performance. In this paper we describe the first complete MA-imager chip com- prising a 166×76 array of 16×16, 0.7μm pixel FT-CCD apertures, per-column ADCs, control logic and chip readout circuits fabricat- ed in 0.11μm CMOS technology 1 . Figure 2.3.1 shows a block dia- gram of the MA-imager. The aperture control buses, V<35:0> and H<15:0> are globally connected to the FT-CCDs. The RS signal and the decoded ROW bus are used to address the readout cir- cuits for each row of FT-CCDs. The MUX blocks contain column bias circuitry, inputs for external testing of the ADC and support for analog pixel readout through AOUT. The ADCs share an out- put bus that is decoded by COL and buffered for digital readout through DOUT<10:0>. Figure 2.3.2 shows a schematic of the FT-CCD, which consists of a pixel array free from metal layers, a light shielded frame buffer, a horizontal (H) CCD with floating diffusion (FD) and follower readout circuit. The CCDs are formed using P+ poly electrodes over N-type channel implants with P+ channel stops. The inputs to the channels at the top of the array are connected to V0 through an Nwell implant. The P+ channel stops extend beyond the Nwell region to make an effective contact to the substrate potential. The two sides of the H-CCD connect to VP, which is used for fill/spill operation, reset of the FD node, or as the source- follower drain supply. Charge is collected under every other elec- trode, which facilitates large potential barriers between pixels. An STI (Shallow Trench Isolation) region is used to create isola- tion between apertures and as the area for contacts to the non- silicided electrodes. The chip operation is divided into three phases: FLUSH, INTE- GRATE, and TRANSFER (see Fig. 2.3.3). Each frame consists of 2 interlaced fields. The capture of one field is performed at the same time as a previous field is being read out from the frame buffers. During FLUSH, the CCD pixel arrays are depleted of charge through V0 by sequencing V<17:1>. During integration, the pixel array electrodes are held at an intermediate voltage of 1V. At the end of integration, the accumulated charge packets in the CCD pixel arrays are transferred one row at a time to the frame buffers using ripple charge transfer. A 2V potential differ- ence between electrodes is used to achieve complete transfer between stages. Frame buffer readout is performed while a new INTEGRATION cycle takes place after a FLUSH cycle. The read- out sequence begins with a global reset of all FD nodes through an RT pulse. The reset voltages are then digitized by the per-col- umn ADCs one aperture row at a time and stored off chip. Next, one charge packet from each frame buffer is shifted to its H-CCD (see Fig. 2.3.3), which is performed by initially shifting one row of charge to the V35 electrode. One of the horizontal electrodes, e.g., H15, is then set to a high voltage, which causes a partial charge transfer. Next, V34 is brought to an intermediate voltage while V35 is slowly brought to a lower voltage. The charge is trans- ferred to H15 because the fringing field induced by H15 is larger than that induced by V34. This completes the transfer for the desired charge packet while all other charge is moved back under V34. The charge in the H-CCD is then ripple shifted to H0 and onto the FD node while pulsing TX high. The pixel values on the FD nodes are digitized one row at a time by the ADCs and stored off chip where digital CDS is performed. This sequence is repeat- ed until all stored pixel values for one field are read out. This readout approach eliminates the need to implement a row decoder for each of the frame buffer and H-CCD electrodes. Figure 2.3.4 shows the per-column ADC schematic and timing diagram. A single-slope architecture with off-chip ramp (via a 14b DAC) is used for flexible operation. Conversion begins by reset- ting the keeper. As the COLUMN voltage settles, SAMPLE is con- tinuously clocked while the bus signal C is cycled through gray code values corresponding to levels of the RAMP voltage. We exploit the fact that shot noise power increases with the signal to reduce conversion time by increasing the step size of the RAMP over the signal range. Once RAMP exceeds COLUMN, the code on C is latched into buffer A. The keeper stays latched until the beginning of the next conversion where buffer B is used to store C while buffer A is read out. Programmable column gain is achieved by varying the ramp voltage range from 200mV to 2V. The comparator consists of a diff-pair followed by a regenerative latch. The diff-pair transistors have a W/L ratio of 6 to keep them in weak inversion. With a 1μA bias current, the comparator is capable of 10b resolution at 200MSPS over a 200mV range. The regenerative portion of the comparator and the memory buffers are implemented with 1V transistors, while the diff-pair is imple- mented with 3V transistors, allowing for simple translation between power domains. A chip micrograph is shown in Fig. 2.3.5. The chip characteristics and image sensor performance are listed in Fig. 2.3.6. Figure 2.3.7 shows a sample image at full resolution captured with a fixed focus F/2.4 lens in a standard focal plane imaging configu- ration. Note that the images captured by the individual apertures demonstrate measurable detail. Acknowledgments: The authors thank C. H. Tseng, David Yen, C. Y. Ko, J. C. Liu, Ming Li, and S. G. Wuu from TSMC for fabrication. Keith is supported by a Hertz Foundation Fellowship. References: [1] M. Oda, T. Kaida, S. Izawa et al., “A 1/4.5in 3.1M Pixel FT-CCD with 1.56μm Pixel Size for Mobile Applications,” ISSCC Dig. Tech. Papers, pp. 346-347, Feb. 2005. [2] G. Agranov, R. Mauritzson, S. Barna, et al., “Super Small, Sub 2μm Pixels for Novel CMOS Image Sensors,” 2007 International Image Sensor Workshop, pp. 307-310, June 2007. [3] K. Fife, A. El Gamal and H.-S. P. Wong, “A 3D Multi-Aperture Image Sensor Architecture,” Proc. CICC, pp. 281-284, Sep. 2006. [4] K. Fife, A. El Gamal and H.-S. P. Wong, “A 0.5μm Pixel Frame-Transfer CCD Image Sensor in 110nm CMOS,” IEDM Tech. Dig., pp. 1003-1006, Dec. 2007. 978-1-4244-2011-7/08/$25.00 ©2008 IEEE 1 Local optics are not integrated on this chip. Please click on paper title to view Visual Supplement. Please click on paper title to view a Visual Supplement. Authorized licensed use limited to: Stanford University. Downloaded on March 02,2010 at 16:49:28 EST from IEEE Xplore. Restrictions apply.
Transcript
Page 1: ISSCC 2008 / SESSION 2 / IMAGE SENSORS & TECHNOLOGY / 2isl.stanford.edu/~abbas/papers/A 3M Pixel Multi...ISSCC 2008 / SESSION 2 / IMAGE SENSORS & TECHNOLOGY / 2.3 2.3 A 3MPixel Multi-Aperture

48 • 2008 IEEE International Solid-State Circuits Conference

ISSCC 2008 / SESSION 2 / IMAGE SENSORS & TECHNOLOGY / 2.3

2.3 A 3MPixel Multi-Aperture Image Sensor with 0.7µm Pixels in 0.11µm CMOS

Keith Fife, Abbas El Gamal, H.-S. Philip Wong

Stanford University, Stanford, CA

Conventional image sensors have improved with technology scal-ing mainly by reducing pixel size to increase spatial resolution[1,2]. As resolution approaches the limits of existing optics, isthere much to gain from further pixel scaling? In [3], we arguethat further scaling can provide new imaging capabilities via amulti-aperture (MA) architecture, which consists of an array ofsmall submicron pixel imagers (apertures), each with its ownintegrated optics. By focusing the integrated optics onto an imageplane formed by an objective lens in a region above the MA imag-er, the apertures capture overlapping views of the scene. The cor-relation and redundancy between apertures, along with computa-tion, provide several new capabilities, including: (i) simultaneouscapture of a 2D image at higher resolution than the aperturecount and a 3D depth map without the need for active illumina-tion or calibration; (ii) simplification of the objective lens design;(iii) reduction of color crosstalk via per-aperture color filters; and(iv) increased tolerance to pixel defects. It is further shown thatdepth resolution continues to improve with pixel scaling beyondthe typical spot-size of the optics. Designing scalable arrays ofsubmicron pixels with acceptable imaging performance is chal-lenging however. In [3], we propose using a frame-transfer (FT)CCD aperture with CMOS readout architecture. In [4], wedemonstrate a 16×16, 0.5μm pixel-pitch FT-CCD in 0.11μmCMOS technology with acceptable imaging performance.

In this paper we describe the first complete MA-imager chip com-prising a 166×76 array of 16×16, 0.7μm pixel FT-CCD apertures,per-column ADCs, control logic and chip readout circuits fabricat-ed in 0.11μm CMOS technology1. Figure 2.3.1 shows a block dia-gram of the MA-imager. The aperture control buses, V<35:0> andH<15:0> are globally connected to the FT-CCDs. The RS signaland the decoded ROW bus are used to address the readout cir-cuits for each row of FT-CCDs. The MUX blocks contain columnbias circuitry, inputs for external testing of the ADC and supportfor analog pixel readout through AOUT. The ADCs share an out-put bus that is decoded by COL and buffered for digital readoutthrough DOUT<10:0>.

Figure 2.3.2 shows a schematic of the FT-CCD, which consists ofa pixel array free from metal layers, a light shielded frame buffer,a horizontal (H) CCD with floating diffusion (FD) and followerreadout circuit. The CCDs are formed using P+ poly electrodesover N-type channel implants with P+ channel stops. The inputsto the channels at the top of the array are connected to V0through an Nwell implant. The P+ channel stops extend beyondthe Nwell region to make an effective contact to the substratepotential. The two sides of the H-CCD connect to VP, which isused for fill/spill operation, reset of the FD node, or as the source-follower drain supply. Charge is collected under every other elec-trode, which facilitates large potential barriers between pixels.An STI (Shallow Trench Isolation) region is used to create isola-tion between apertures and as the area for contacts to the non-silicided electrodes.

The chip operation is divided into three phases: FLUSH, INTE-GRATE, and TRANSFER (see Fig. 2.3.3). Each frame consists of2 interlaced fields. The capture of one field is performed at thesame time as a previous field is being read out from the framebuffers. During FLUSH, the CCD pixel arrays are depleted ofcharge through V0 by sequencing V<17:1>. During integration,the pixel array electrodes are held at an intermediate voltage of1V. At the end of integration, the accumulated charge packets in

the CCD pixel arrays are transferred one row at a time to theframe buffers using ripple charge transfer. A 2V potential differ-ence between electrodes is used to achieve complete transferbetween stages. Frame buffer readout is performed while a newINTEGRATION cycle takes place after a FLUSH cycle. The read-out sequence begins with a global reset of all FD nodes throughan RT pulse. The reset voltages are then digitized by the per-col-umn ADCs one aperture row at a time and stored off chip. Next,one charge packet from each frame buffer is shifted to its H-CCD(see Fig. 2.3.3), which is performed by initially shifting one row ofcharge to the V35 electrode. One of the horizontal electrodes, e.g.,H15, is then set to a high voltage, which causes a partial chargetransfer. Next, V34 is brought to an intermediate voltage whileV35 is slowly brought to a lower voltage. The charge is trans-ferred to H15 because the fringing field induced by H15 is largerthan that induced by V34. This completes the transfer for thedesired charge packet while all other charge is moved back underV34. The charge in the H-CCD is then ripple shifted to H0 andonto the FD node while pulsing TX high. The pixel values on theFD nodes are digitized one row at a time by the ADCs and storedoff chip where digital CDS is performed. This sequence is repeat-ed until all stored pixel values for one field are read out. Thisreadout approach eliminates the need to implement a rowdecoder for each of the frame buffer and H-CCD electrodes.

Figure 2.3.4 shows the per-column ADC schematic and timingdiagram. A single-slope architecture with off-chip ramp (via a 14bDAC) is used for flexible operation. Conversion begins by reset-ting the keeper. As the COLUMN voltage settles, SAMPLE is con-tinuously clocked while the bus signal C is cycled through graycode values corresponding to levels of the RAMP voltage. Weexploit the fact that shot noise power increases with the signal toreduce conversion time by increasing the step size of the RAMPover the signal range. Once RAMP exceeds COLUMN, the codeon C is latched into buffer A. The keeper stays latched until thebeginning of the next conversion where buffer B is used to storeC while buffer A is read out. Programmable column gain isachieved by varying the ramp voltage range from 200mV to 2V.The comparator consists of a diff-pair followed by a regenerativelatch. The diff-pair transistors have a W/L ratio of 6 to keep themin weak inversion. With a 1μA bias current, the comparator iscapable of 10b resolution at 200MSPS over a 200mV range. Theregenerative portion of the comparator and the memory buffersare implemented with 1V transistors, while the diff-pair is imple-mented with 3V transistors, allowing for simple translationbetween power domains.

A chip micrograph is shown in Fig. 2.3.5. The chip characteristicsand image sensor performance are listed in Fig. 2.3.6. Figure2.3.7 shows a sample image at full resolution captured with afixed focus F/2.4 lens in a standard focal plane imaging configu-ration. Note that the images captured by the individual aperturesdemonstrate measurable detail.

Acknowledgments:The authors thank C. H. Tseng, David Yen, C. Y. Ko, J. C. Liu, Ming Li, andS. G. Wuu from TSMC for fabrication. Keith is supported by a HertzFoundation Fellowship.

References:[1] M. Oda, T. Kaida, S. Izawa et al., “A 1/4.5in 3.1M Pixel FT-CCD with1.56μm Pixel Size for Mobile Applications,” ISSCC Dig. Tech. Papers, pp.346-347, Feb. 2005.[2] G. Agranov, R. Mauritzson, S. Barna, et al., “Super Small, Sub 2μmPixels for Novel CMOS Image Sensors,” 2007 International Image SensorWorkshop, pp. 307-310, June 2007.[3] K. Fife, A. El Gamal and H.-S. P. Wong, “A 3D Multi-Aperture ImageSensor Architecture,” Proc. CICC, pp. 281-284, Sep. 2006.[4] K. Fife, A. El Gamal and H.-S. P. Wong, “A 0.5μm Pixel Frame-TransferCCD Image Sensor in 110nm CMOS,” IEDM Tech. Dig., pp. 1003-1006,Dec. 2007.

978-1-4244-2011-7/08/$25.00 ©2008 IEEE

1Local optics are not integrated on this chip.

Please click on paper title to view Visual Supplement.

Please click on paper title to view a Visual Supplement.

Authorized licensed use limited to: Stanford University. Downloaded on March 02,2010 at 16:49:28 EST from IEEE Xplore. Restrictions apply.

Page 2: ISSCC 2008 / SESSION 2 / IMAGE SENSORS & TECHNOLOGY / 2isl.stanford.edu/~abbas/papers/A 3M Pixel Multi...ISSCC 2008 / SESSION 2 / IMAGE SENSORS & TECHNOLOGY / 2.3 2.3 A 3MPixel Multi-Aperture

49DIGEST OF TECHNICAL PAPERS •

Continued on Page 594

ISSCC 2008 / February 4, 2008 / 2:30 PM

Figure 2.3.1: Block diagram of MA image sensor chip.

Figure 2.3.3: Chip timing and charge transfer diagram.

Figure 2.3.5: Chip micrograph. Figure 2.3.6: Chip characteristics and imager performance at 7.5 fps.

Figure 2.3.4: Per-column ADC schematic and timing diagram.

10.45mWChip power

(0.46,-0.60)/(0.39,-0.57) LSBADC INL/DNL

254 μV rmsADC noise

43μV rmsADC FPN

10bADC resolution

15fpsMaximum Frame rate with CDS

57 dBDynamic range

35 dBPeak SNR

2 % rmsInter aperture PRNU

2 % rmsIntra aperture PRNU

4 % rmsInter aperture DSNU

35 % rmsIntra aperture DSNU

33 e-/sec (5.5 mV/sec)Dark current at room temperature

5 e- rms (1mV)Pixel read noise

20, 48, 65 %QE at 450, 550, 650 nm

930 e-/lux-sec (0.15V/lux-sec)Sensitivity at 550 nm

165 μV/e-Conversion gain

3500 e-Well capacity

0.7μm x 0.7μmPixel size

16 x 16 pixelsAperture format

166 x 76Aperture count

3.0 x 2.9mm2Chip Size

0.11μm 1P4M CMOS CISTechnology

2

Figure 2.3.2: FT-CCD schematic and device cross sections.

Please click on paper title to view Visual Supplement.

Please click on paper title to view a Visual Supplement.

Authorized licensed use limited to: Stanford University. Downloaded on March 02,2010 at 16:49:28 EST from IEEE Xplore. Restrictions apply.

Page 3: ISSCC 2008 / SESSION 2 / IMAGE SENSORS & TECHNOLOGY / 2isl.stanford.edu/~abbas/papers/A 3M Pixel Multi...ISSCC 2008 / SESSION 2 / IMAGE SENSORS & TECHNOLOGY / 2.3 2.3 A 3MPixel Multi-Aperture

594 • 2008 IEEE International Solid-State Circuits Conference 978-1-4244-2011-7/08/$25.00 ©2008 IEEE

ISSCC 2008 PAPER CONTINUATIONS

Figure 2.3.7: Sample image at full resolution (top) with detailed section (bottom).

Please click on paper title to view Visual Supplement.

Please click on paper title to view a Visual Supplement.

Authorized licensed use limited to: Stanford University. Downloaded on March 02,2010 at 16:49:28 EST from IEEE Xplore. Restrictions apply.


Recommended