Mega SD100, Model 115 Operations & Maintenance...

April 2014 322-00169-000 REV001

Mega SD100, Model 115Slurry Distribution System

Operations & Maintenance Manual

ii April 2014

EQUIPMENT REFERENCE NUMBERInformation contained in this manual relates to the equipment listed below. Any questions or comments directed to Mega Fluid Systems, Inc. regarding equipment should reference the model and serial numbers.

Mega SD100, Model 115 Slurry Distribution System, Part Number 202-00301-ABBG REV001

This manual contains unpublished confidential and proprietary information of Mega Fluid Systems, Inc. No part of this publication may be reproduced, stored in a retrieval system, or transmitted in any form or by any means electronic or mechanical, including photocopying and recording for any purpose other than the purchaser’s use without the written permission of Mega Fluid Systems, Inc.

Mega SD100, Model 115 Slurry Distribution SystemOperations & Maintenance Manual, Part Number 322-00169-000 REV001

REVISION HISTORYt

TRADEMARKS & WARRANTYThe following terms, used throughout this publication, are registered or unregistered trademarks of Mega Fluid Systems, Inc.: MegaPure™, MegaBlend™, MegaFlow™, MegAdapt™, MegaSafe™, MegAlert™, MegaView™, MegaLink™, and MegaTrend™

OTHER TRADEMARKSThe following are trademarks or registered trademarks of their respective companies or organizations:

CompactLogix™, SLC 505™, PanelView™, PanelView 550™, PanelView 600™, and PanelView 1000™ are trademarks of Allen-Bradley Company, Inc.

Microsoft Windows® is a registered trademark of the Microsoft Corporation. Adobe® Reader® is a registered trademark of Adobe Systems, Incorporated

WARRANTY AND WARRANTY PERIODSeller warrants that all products provided hereunder will be free from defects in material and workmanship under normal use and service. This warranty does not extend to any equipment which is misused, abused, improperly or inadequately maintained, or altered or modified without Seller’s express consent. This warranty does not extend to any defect which arises as a result of causes external to the product (such as power or air conditioning failure) which are not covered by warranty or which arise out of the installation or use of parts not authorized by Seller. Except as otherwise agreed by Seller in writing, this warranty does not extend to any custom products which have been produced to Buyer’s specification. The foregoing warranty shall extend for the following period:

Equipment — One (1) year parts & labor beginning at acceptance. Spare Parts/Repairs — Ninety (90) days from date of shipment. Consumable Products — Consumable products (filter elements, O-rings, etc.), are not covered under

warranty by Seller.

Note: An important part of the warranty provision is that the Customer completes a reasonable amount of preventive maintenance (PM). Mega Fluid Systems, Inc. provides a PM schedule within thisOperations & Maintenance Manual.

Revision History Date

322-00169-000 REV001 Original publication. April 2014

April 2014 iii

DISCLAIMERExcept as provided in Section 13.1 of the Terms and Conditions of Sale, seller makes no warranties, expressed or implied, with respect to the products sold hereunder and specifically disclaims the implied warranties of merchantability and fitness for particular purpose.

REMEDYIn the event any product fails to comply with the warranty set forth in Section 13.1 of the Terms and Conditions of Sale, Seller’s sole obligation and Buyer’s sole remedy, shall be for Seller, at its option, to repair or replace the defective product, exclusive of all shipping costs. Any such repair or replacement shall be at no charge to Buyer.

EXCLUSION OF CONSEQUENTIAL DAMAGESNotwithstanding anything to the contrary contained herein, seller shall not, under any circumstances, be liable to buyer for consequential, incidental, special or indirect damages arising out of or related to this agreement or the transactions contemplated hereunder, even if seller is apprised of the likelihood of such damages.

LIMITATION OF LIABILITYIn no event shall seller’s liability, whether based on an action or claim in contract tort (including, without limitation, negligence and, to the extent permitted by law, strict liability) or otherwise, to buyer arising out of or related to this agreement exceed the aggregate price of the products purchased by buyer hereunder as of the date such action or claim was filed.

Mega Fluid Systems, Inc.9398 SW Tualatin-Sherwood Rd.Tualatin, Oregon 97062 USA

Copyright ©2014 Mega Fluid Systems, Inc. All Rights Reserved

iv April 2014

April 2014 v

Contents

1. INTRODUCTION ................................................................................................................................1-1

About this Manual ............................................................................................................................................................1-2.

Overview of Contents ............................................................................................................................................1-2.

Printing a Hard Copy from Acrobat ................................................................................................................... 1-3

System Overview..............................................................................................................................................................1-4.

Feature Overview ....................................................................................................................................................1-4.

Mega SD100, Model 115 Components........................................................................................................................1-5.

System Cabinet .........................................................................................................................................................1-5.

Tanks ...........................................................................................................................................................................1-5.

Piping ...........................................................................................................................................................................1-5.

Pumps..........................................................................................................................................................................1-5.

2. SAFETY .................................................................................................................................................2-1

Messages & Symbols ........................................................................................................................................................2-2.

Safety Messages.........................................................................................................................................................2-2.

Safety Hazard Symbols ............................................................................................................................................2-3.

General Safety Information ............................................................................................................................................2-4.

Electrical Work Guidelines ............................................................................................................................................2-5.

Emergency Machine Off (EMO) Procedure................................................................................................................2-6.

Resetting an EMO Button .............................................................................................................................. 2-6

EMO Circuitry Description .................................................................................................................................. 2-7

Removing All Power........................................................................................................................................ 2-7

Lockout/Tagout.................................................................................................................................................................2-8.

Implementing Lockout/Tagout ..............................................................................................................................2-8.

Removing Lockout/Tagout.....................................................................................................................................2-8.

Material Safety Data Sheets (MSDS) ............................................................................................................................2-9.

Key Failure Points...........................................................................................................................................................2-10.

Chemical Exposure ................................................................................................................................................2-10.

Electrical Exposure ...............................................................................................................................................2-11

Spill Mitigation .................................................................................................................................................................2-12.

Safety Interlocks..............................................................................................................................................................2-13.

Manual Mode Warning ..................................................................................................................................................2-14.

Safety Components........................................................................................................................................................2-15.

3. INSTALLATION...................................................................................................................................3-1

Facility Requirements.......................................................................................................................................................3-2.

Installation Procedure......................................................................................................................................................3-3.

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Table of Contents Mega SD100, Model 115

System Location and Site Inspection ...................................................................................................................3-3.

System Inspection.....................................................................................................................................................3-3.

Mechanical Inspection ..................................................................................................................................... 3-3

Electrical Inspection......................................................................................................................................... 3-4

System Placement.....................................................................................................................................................3-4.

System Commissioning ...........................................................................................................................................3-5.

Mechanical Connections................................................................................................................................. 3-5

Electrical Connections .................................................................................................................................... 3-6

Pre-Startup Testing ..................................................................................................................................................3-6.

System Configuration ..............................................................................................................................................3-7.

DI Water Startup and Leak Testing.....................................................................................................................3-8.

System Testing ..........................................................................................................................................................3-9.

Alarm Test ......................................................................................................................................................... 3-9

Communications Test..................................................................................................................................... 3-9

Chemical Startup and Testing .............................................................................................................................3-10.

Automatic and Solenoid Valves...................................................................................................................................3-11.

Device Reference List....................................................................................................................................................3-12.

4. SEQUENCE OF OPERATION............................................................................................................4-1

Sequence of Operations Overview..............................................................................................................................4-2.

Buffer Tank Addition Operation .................................................................................................................. 4-2

Tank Mixer ........................................................................................................................................................ 4-2

Manual Flush ...................................................................................................................................................... 4-3

5. SYSTEM OPERATION ........................................................................................................................5-1

Touchscreen Overview...................................................................................................................................................5-2.

Touchscreen Graphics ............................................................................................................................................5-2.

Operating Procedures .....................................................................................................................................................5-5.

Password Permissions .............................................................................................................................................5-5.

Logging Into the System..........................................................................................................................................5-5.

Logging Out ...............................................................................................................................................................5-6.

Responding to Alarms.............................................................................................................................................5-6.

Overriding the Alarm..............................................................................................................................................5-8.

Activating an Alarm Bypass............................................................................................................................ 5-8

Deactivating an Alarm Bypass ....................................................................................................................... 5-8

Starting the System ................................................................................................................................................. 5-9

Shutting the System Down...................................................................................................................................5-10.

Setting the System into Automatic Operation................................................................................................5-10.

Setting the System into Manual Operation ......................................................................................................5-11.

Drum Transfer .......................................................................................................................................................5-13

Restarting After an EMO Shutdown or Unexpected Loss of Power .......................................................5-14

Mega SD100, Model 115 Table of Contents

April 2014 vii

Setting Timers and Setpoints...............................................................................................................................5-14.

Resetting Runtimes ................................................................................................................................................5-15.

6. ALARMS AND WARNINGS...............................................................................................................6-1

Software Interlocks ..........................................................................................................................................................6-2.

Critical Interlocks.....................................................................................................................................................6-2.

Process Interlocks....................................................................................................................................................6-2.

Warnings ....................................................................................................................................................................6-2.

Drum Panel Alarms..........................................................................................................................................................6-3.

7. MAINTENANCE ..................................................................................................................................7-1

Safety Precautions ............................................................................................................................................................7-3.

General System Maintenance.........................................................................................................................................7-4.

Removing and Isolating Components ..................................................................................................................7-4.

Removing and Isolating Electrical Components ................................................................................................7-5.

Compact Flash Card ............................................................................................................................................... 7-7

Flowmeters ................................................................................................................................................................7-7.

Pressure Reducing Gas Regulators .............................................................................................................. 7-8

Pressure Switches ....................................................................................................................................................7-8.

Gas Digital Pressure Switches....................................................................................................................... 7-8

Preventive Maintenance ................................................................................................................................................7-11.

Maintenance Schedule ...........................................................................................................................................7-11.

Preparation ......................................................................................................................................................7-11

Equipment ........................................................................................................................................................7-11

Weekly Preventive Maintenance Procedures ..........................................................................................................7-12.

Visual System Inspection.......................................................................................................................................7-12.

Verifying the Device Settings...............................................................................................................................7-13.

Adjusting the Humidifier Settings .......................................................................................................................7-14.

Monthly Preventive Maintenance Procedures .........................................................................................................7-16.

Checking Pump Operation...................................................................................................................................7-16.

Checking Leak Detectors.....................................................................................................................................7-16.

Liquid and Level Sensor Maintenance ..............................................................................................................7-19

Adjusting Sensitivity of Line Liquid Sensors .............................................................................................7-20

Calibrating the Tank Level Proximity Sensors ........................................................................................7-21

Adjusting the Ultrasonic Level Transmitter ...........................................................................................7-24

Quarterly Preventive Maintenance Procedures ......................................................................................................7-25.

Testing Alarms ........................................................................................................................................................7-25.

Valves and Pressure Gauges ...............................................................................................................................7-26

Electrical Solenoid Valves (EV)....................................................................................................................7-26

Automatic Valves (AV) .................................................................................................................................7-27

Check Valves (CV).........................................................................................................................................7-27

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Table of Contents Mega SD100, Model 115

Manual Valve (MV) ........................................................................................................................................7-28

Pressure Relief Valve .....................................................................................................................................7-28

Gas Line Maintenance ...................................................................................................................................7-29

Semi-Annual Preventive Maintenance Procedures .................................................................................................7-32.

Fittings.......................................................................................................................................................................7-32.

Checking the Fittings .....................................................................................................................................7-32

Replacing Fittings ............................................................................................................................................7-33

Rebuilding Pumps ...................................................................................................................................................7-34.

Isolating and Removing Pumps....................................................................................................................7-34

Annual Preventive Maintenance Procedures............................................................................................................7-36.

Lithium Battery .......................................................................................................................................................7-36.

Replacing the Lithium Battery .....................................................................................................................7-36

Disposing the Lithium Battery.....................................................................................................................7-37

EMO Testing ..........................................................................................................................................................7-38

Completing Preventive Maintenance Procedures ...................................................................................................7-39.

Cabinet Cleaning ....................................................................................................................................................7-39.

Maintenance Forms........................................................................................................................................................7-40.

Work Order Form ...............................................................................................................................................7-41

Preventive Maintenance Form ...........................................................................................................................7-42

Device Settings Record Sheet ............................................................................................................................7-45

System Data Value Record Sheet ......................................................................................................................7-48

8. SCHEMATICS.......................................................................................................................................8-1

Legend.........................................................................................................................................................................8-3.

Mega SD100, Model 115 P&ID Schematic..........................................................................................................8-5.

Mega SD100, Model 115 Electrical Schematic...................................................................................................8-6.

Mega SD100, Model 115 Facilities Schematic ....................................................................................................8-9.

9. PARTS LIST ..........................................................................................................................................9-1

GLOSSARY ....................................................................................................................... GLOSSARY-1

INDEX ....................................................................................................................................... INDEX-1

April 2014 1-1

Chapter 1: Introduction

This chapter contains the following information:

About this Manual .........................................................................................1-2

Overview of Contents .............................................................................1-2

Printing a Hard Copy from Acrobat .........................................................1-3

System Overview..........................................................................................1-4

Feature Overview ...................................................................................1-4

Mega SD100, Model 115 Components .........................................................1-5

System Cabinet ......................................................................................1-5

Tanks .....................................................................................................1-5

Piping .....................................................................................................1-5

Pumps ....................................................................................................1-5

1-2 April 2014

Introduction Mega SD100, Model 115

About this Manual

This manual presents installation, operation, and maintenance information for the Mega SD100 Slurry Distribution System, Model 115. For information not contained in this manual, contact Mega Fluid Systems, Inc. Customer Service.

Overview of Contents

Chapter Description

Introduction Describes the manual’s content and conventions. Contains helpful hints for using this manual. Provides a brief overview of the Mega SD100, Model 115’s function.

Safety Contains important safety precautions and warnings. Explains conventions for usage of notice, caution, warning, and danger messages employed throughout the manual.

Installation Provides information necessary for installing the Mega SD100, Model 115.

Sequence of Operations Describes the functional operations of the system.

Operating Procedures Includes step-by-step procedures for operating the Mega SD100, Model 115.

User Interface Provides an alphabetical listing and description of each touchscreen operator interface screen.

Alarms and Warnings Contains a list and description of all hardware and software alarms and warnings incorporated into the design of the Mega SD100, Model 115. Provides a list of possible causes for each alarm and suggests corrective actions.

Maintenance Outlines Mega Fluid Systems, Inc. recommended preventive and corrective maintenance program for the Mega SD100, Model 115. Contains troubleshooting, calibration, and adjustment procedures.

Schematics Provides Mega SD100, Model 115 facility requirements, fluid flow, electrical, and mechanical schematics.

Parts Lists Contains recommended spare parts and consumables lists.

Glossary Provides definitions for terms, abbreviations, and acronyms which might be unfamiliar.

Mega SD100, Model 115 Introduction

April 2014 1-3

Printing a Hard Copy from Acrobat

Mega Fluid Systems, Inc. manuals print to 8.5” x 11”, however, 11” x 17” schematics are also included. To print a hard copy of the manual with all pages printing to the correct size, perform the following steps.

1. In Acrobat, select File > Print. The Print dialog opens.

Figure 1-1. Print Dialog

2. Select the Choose Paper Source by PDF page size checkbox.

3. Click the OK button to print a hard copy of the manual.

Note: If your printer does not print to 11” x 17” size paper, your manual will print to 8.5” x 11” only.

1-4 April 2014


System Overview

The Mega SD100 Slurry Distribution System, Model 115 distributes colloidal and fumed slurry to medium and large polisher lines. The system consists of a blend station to provide a continuous supply of slurry to multiple polishers.

Feature Overview

The Mega SD100, Model 115 includes the following features:

• 265 liter natural polypropylene buffer tank

• White polypropylene compliant cabinets

• Dual diaphragm raw slurry drum transfer pump

• Automated DI flush/N2 purge

• MegaJet nozzle circulation mixing

• Humidified N2 supply for tank blanket

• Monitored cabinet exhaust

Mega SD100, Model 115 Introduction

April 2014 1-5

Mega SD100, Model 115 Components

System Cabinet

The cabinet is made of a polypropylene wrapped steel frame with polypropylene panels. The doors have blue tinted PVC windows to provide visual access to the instrumentation readouts and equipment behind the doors. The panels and doors provide easy access to critical areas, and the plumbing design allows defective parts to be easily removed and replaced. The cabinet floor slopes to the drain to improve leak detection and promote drainage. Secondary containment protects against unwanted chemical release.

Tanks

Tank size is defined by system requirements and constructed of material compatible with the chemicals being used. Slurry system drums and tanks are supplied with humidified nitrogen from the SBD tool associated with this SD100 system. The humidified nitrogen equalizes tank pressure and minimizes slurry hardening.

Piping

A variety of pipes are used in the Mega SD100, Model 115 system. Nitrogen (N2) and clean dry air (CDA) are sent through stainless steel tubing until they arrive at the cabinet’s chemical section, where they are routed through PFA tubing. Chemicals flow through 1⁄2”, 3⁄4”, and 1" Teflon™ tubing or piping. PVC double-containment (provided by others) is used on all chemical lines exterior to the cabinet to minimize the possibility of leaks.

Pumps

The ARO diaphragm pump offers high volume delivery even at low air pressure, and a broad range of material compatibility options are available. ARO pumps feature a stall-resistant design and modular air motor / fluid sections.

1-6 April 2014


April 2014 2-1

Chapter 2: Safety


Messages & Symbols ...................................................................................2-2

Safety Messages ....................................................................................2-2

Safety Hazard Symbols ..........................................................................2-3

General Safety Information ...........................................................................2-4

Electrical Work Guidelines ............................................................................2-5

Emergency Machine Off (EMO) Procedure ...................................................2-6

Resetting an EMO Button .................................................................2-6

EMO Circuitry Description ......................................................................2-7

Removing All Power .........................................................................2-7

Lockout/Tagout .............................................................................................2-8

Implementing Lockout/Tagout.................................................................2-8

Removing Lockout/Tagout ......................................................................2-8

Material Safety Data Sheets (MSDS) ............................................................2-9

Key Failure Points.......................................................................................2-10

Chemical Exposure...............................................................................2-10

Electrical Exposure ...............................................................................2-11

Spill Mitigation ............................................................................................2-12

Safety Interlocks .........................................................................................2-13

Manual Mode Warning ................................................................................2-14

Safety Components ....................................................................................2-15

2-2 April 2014

Safety Mega SD100, Model 115

Messages & Symbols

Safety hazards are those situations that might harm or severely injure a person or equipment through the normal operation of the Mega SD100 Slurry Distribution System, Model 115. These safety hazards are present due to the electrical, mechanical, or chemical operating characteristics of the system.

Safety Messages

Some operations in this manual may be dangerous to the operator and/or the facilities. This manual contains DANGER, WARNING, CAUTION, or NOTICE messages. Compliance with these hazard messages prevents unnecessary risks while working. The following is an example of the four hazard level messages used in the manual.

DANGERDANGER MESSAGE!

Indicates an imminently hazardous situation which, if not avoided, WILL result in death or serious injury.

WARNINGWARNING MESSAGE!

Indicates a potentially hazardous situation which, if not avoided, COULD result in death or serious injury.

CAUTIONCAUTION MESSAGE!

Indicates a potentially hazardous situation which, if not avoided, may result in minor or moderate injuries, such as minor cuts, abrasions, slipping, tripping, noise, and vibrations. CAUTION

may also be used to alert against unsafe practices.

NOTICENOTICE MESSAGE!

Indicates a statement of company policy directly or indirectly related to the safety of personnel or protection of property. NOTICE often highlights specific actions or steps that must be followed to avoid damage to the equipment or

its ability to function.

Mega SD100, Model 115 Safety

April 2014 2-3

Safety Hazard Symbols

The hazard symbols used in this manual, their descriptions, and proper precautions are listed in Table 2-1.

Table 2-1. Safety Hazard Symbol Descriptions

Symbol Description

Chemical hazard A skull and cross bones graphic within a triangle indicates chemical hazards (e.g., chemicals dispensing from the system).

Wear the proper Personal Protective Equipment (PPE) to avoid injury. Refer to site MSDS for chemical specific information.

Electrical hazard — Type 3 A downward lightning arrow graphic within a triangle indicates electrical hazards.

Electrical hazards may require using the lockout/tagout procedure (refer to Implementing Lockout/Tagout (page 2-8).

Noise hazard A headphone graphic within a triangle indicates sound and noise hazards.

Hearing protection is required. Wear the proper PPE to avoid personal injury.

Mechanical hazard A hand pinched between two circles within a triangle indicates mechanical hazards (e.g., equipment that could pinch or entangle hands and fingers).

Mechanical hazards may require using the lockout/tagout procedure.

Protective equipment required A human form within a triangle indicates personal protective equipment is required (e.g., when working with chemicals).

Wear the appropriate PPE to avoid personal injury.

Heavy Object Hazard A human form lifting an object indicates heavy object hazards (e.g., equipment may tip over or requires mechanical assistance to lift or move).

Use appropriate mechanical aids.

2-4 April 2014


General Safety Information

A user must have proper system and safety training before operating any Mega Fluid Systems, Inc. equipment. The following list describes several precautions required to safely operate the system.

• Maintain compliance with all local, state, and federal regulations, ordinances, laws, etc., that require handling all processing solutions, chemicals, and acids, as well as all wastes produced by this system.

• All personnel must have proper training in related safety procedures.

• Do not allow unauthorized or untrained personnel in the area of the system.

• Personal Protective Equipment (PPE) is required. Wear the appropriate PPE to avoid personal injury. Follow requirements listed in the MSDS for the appropriate chemical. Follow all site specific rules for PPE.

• Treat all chemical exposures as potentially serious. Neutralize and irrigate the exposed area and seek first aid immediately as outlined in the MSDS.

• Treat all chemical spills or leaks as hazardous and clean up immediately.

• Use extreme caution when working with electrical equipment. Always assume high voltage exists; use lockout and tagout procedures during maintenance.


April 2014 2-5

Electrical Work Guidelines

Electrical work on Mega Fluid Systems, Inc. equipment is classified by type as defined in the SEMI S2-0200 Safety Guidelines for Semiconductor Manufacturing Equipment. All electrical hazard tasks of Type 3 or higher are identified in this manual. A brief description of each electrical hazard type is provided below for reference.

Type 1 — Equipment is fully de-energized. Lockout and tagout procedures should be used.

Type 2 — Equipment is energized. Energized circuits are covered or insulated.

Type 3 — Equipment is energized. Energized circuits are exposed and inadvertent contact with uninsulated energized parts is possible. Potential exposures are no greater than 30 volts RMS, 42.2 volts peak, 60 volts dc, or 240 volt-amps in dry locations.

Type 4 — Equipment is energized. Energized circuits are exposed and inadvertent contact with uninsulated energized parts is possible. Potential exposures are greater than 30 volts RMS, 42.2 volts peak, 60 volts dc, or 240 volt-amps in dry locations. Potential exposures to radio frequency (rf) currents, whether induced or via contact, exceed the limits set in S2-0200 Safety Guidelines for Semiconductor Manufacturing Equipment, Appendix 5, Table A5-1.

2-6 April 2014


Emergency Machine Off (EMO) Procedure

The Emergency Machine Off (EMO) button (as shown in Figure 2-1) is a mechanism used for immediately shutting down the system. Pressing the EMO button interrupts system power and stops all functions of the system.

To shut down the system:

1. Locate the Emergency Machine Off (EMO) button on the system.

2. Press this button to immediately interrupt system power.

Figure 2-1. Emergency Machine Off (EMO) Button

Resetting an EMO Button

To reset an EMO button, pull it out until it pops back to its original position. For instructions on restoring power to the system after an EMO shutdown, see Restarting After an EMO Shutdown or Unexpected Loss of Power (page 5-14).

CAUTIONEMO BUTTON MUST BE ACCESSIBLE!

Never disable or cover an EMO button. This can prevent the system from being stopped in the event of an emergency.

- OR -


April 2014 2-7

EMO Circuitry Description

If the EMO button is pressed, all electrical power DOWNSTREAM from the EMO switch is shut off. Refer to the Schematics (page 8-1) for power routing details.

Removing All Power

To remove all power, toggle the AC Disconnect Switches to the Off position.

Figure 2-2. AC Disconnect Switch Location

CAUTIONELECTRICAL HAZARD!

Pressing the EMO button is not a safe alternative to the prescribed lockout/tagout procedure.

AC Disconnect switch

2-8 April 2014


Lockout/Tagout

The lockout/tagout procedure is required to prevent the unexpected energization of the system.

Implementing Lockout/Tagout

1. Bleed off the pressure or flush all lines carrying hazardous chemicals before locking the valve in the required position and/or blanking the line.

2. Turn off or return all operating controls to the neutral mode.

3. Relieve, disconnect, restrain, or otherwise render safe residual or stored energy such as capacitors, gas, steam, water pressure, air, and hydraulic.

4. Place the AC Disconnect switch in the Off position.

5. Place and lock a padlock on the disconnect switch.

6. Attach a lockout tag to the switch which indicates the system is locked out for service purposes and identifies those employees authorized to remove the lock and tag.

7. Test the valve or switch to ensure the control cannot be moved to the activated position.

8. Ensure all energy sources have been de-energized on dual or multi-energy source operations prior to beginning work.

9. Retest the controls of the individual machine or equipment to verify the operation is positively off.

Removing Lockout/Tagout

1. Inspect the machine or equipment to ensure all components, including safeguards, are in place and personnel are in the clear before reactivation.

2. Remove the padlock and notify the affected employee(s) when work is complete and the machine or equipment is ready to be reactivated.

WARNINGLOCK OUT/TAG OUT SYSTEM!

To ensure the safety of personnel, the system should be locked and tagged out before maintenance procedures are performed.


April 2014 2-9

Material Safety Data Sheets (MSDS)

Material Safety Data Sheets (MSDS) contain important information about the toxicity, corrosiveness, and flammability of hazardous materials.Therefore, it is highly recommended that data sheets specific to the chemicals used in the system be acquired from the chemical manufacturer and placed in a visible location in the vicinity of the system.

2-10 April 2014


Key Failure Points

Chemical Exposure

The following procedures (but not limited to) may place the operator at risk of chemical exposure:

• Changing out an empty supply drum or tote.

• Sampling system chemistry.

• Flushing the system.

• Checking for leaks.

• Performing a particle count.

• Transporting chemicals to the system.

• Filling the pipes with air.

• Clean flushing the drums/totes and pipes.

• Changing pumps, valves, filters, pressure switches, etc.

• Handling PPE after use.

CAUTIONCHEMICAL HAZARD!

Performing maintenance on the key failure points may expose the operator to hazardous chemicals. Wear proper PPE. Refer

to MSDS for site-specific chemical information.


April 2014 2-11

Electrical Exposure

The following procedures (but not limited to) may place the operator at risk of electrical exposure:

• Testing system communications.

• Testing the interlock systems (if present).

• Testing the chemical demand signal.

WARNINGELECTRICAL HAZARD — TYPE 3!

Performing maintenance on the key failure points may expose the operator to electrical hazards. Use caution when performing procedures that may involve contact with electrical components.

Use lockout/tagout procedures when appropriate.

2-12 April 2014


Spill Mitigation

The Mega SD100 Slurry Distribution System, Model 115 is designed to minimize the possibility of an unwanted chemical release. The cabinet is designed to contain 110% of the total piping volume plus the total contents of the largest reservoir. If the cabinet is breached, there is a possibility of a chemical spill. In the event of an unwanted chemical release, use the following steps as a guideline.

1. Treat all chemical spills as hazardous.

2. Notify the proper site authority.

3. Follow all site specific rules for chemical spills.

4. Follow all information contained in the MSDS.

5. If possible, contain the spill with absorbent barriers.

6. If possible, neutralize the spill according to MSDS information.

DANGERCHEMICAL HAZARD!

Treat all chemical spills as extremely hazardous. Notify the proper site authority of any chemical spill. Refer to the

applicable MSDS for special protection information and spill procedures/disposal requirements.


April 2014 2-13

Safety Interlocks

Safety interlocks are incorporated into the design of the system to ensure user safety.

Alarms can be bypassed, if required, from the Tool Maintenance screen. If the system is in bypass mode, no alarms will be generated by the system. It is recommended that alarms be bypassed only on an “as needed” basis. Return the system to normal operating mode as soon as possible.

WARNINGCHEMICAL AND ELECTRICAL HAZARDS!

Placing the system in bypass mode enables the user to access enclosed portions of the system while the system is running.

This increases the chance of personnel coming into contact with hazardous electricity and chemicals.

Use extreme caution when running the system in bypass mode. Return the system to normal operating mode as soon as

possible.

CAUTIONLOUD NOISE HAZARD!

Hearing protection may be required when pumps are on and any pump access panel is open.

WARNINGCHEMICAL AND ELECTRICAL HAZARDS!

When maintenance procedures are complete, replace the bolts and secure the door to prevent the door from being uninten-

tionally or accidentally opened. Opening the doors may expose the operator to chemical or electrical hazards.

2-14 April 2014


Manual Mode Warning

In Manual mode, the user assumes control of the system. It is possible to open a combination of valves that could create an unsafe condition or cause damage to the system. Only technicians and service personnel familiar with the equipment should attempt to operate the system in Manual mode.

CAUTIONUSE CAUTION IN MANUAL MODE!

Placing the system in Manual mode allows combinations of valves to be opened or closed that may be outside the scope of the equipment design. The user assumes all responsibility for

running the system in Manual mode.


April 2014 2-15

Safety Components

The Mega SD100 Slurry Distribution System, Model 115 includes several components that help ensure safe operation.

• The flow and pressure equipment have regulators and pressure switches that activate an alarm if the flow and pressure do not meet preset requirements. These regulators and alarms protect the equipment and users from unsafe pressure or flow levels.

• Sensors detect fill liquid or air in the tubing, faulty pumps, and low to high pressure levels. When a problem is detected by these sensors, an alarm or warning is activated and the system is shut down if the problem is critical.

• Pressure switches monitor low and high pressure settings. An alarm is activated if readings fall below the low setpoint or exceed the high setpoint.

• Each station has hand sprayers used to clean out the cabinet or components with DI water.

• Differential Pressure Switch sensors monitor cabinet pressure (exhaust).

2-16 April 2014


April 2014 3-1

Chapter 3: Installation


Facility Requirements ...................................................................................3-2

Installation Procedure ...................................................................................3-3

System Location and Site Inspection ......................................................3-3

System Inspection ..................................................................................3-3

Mechanical Inspection ......................................................................3-3

Electrical Inspection .........................................................................3-4

System Placement..................................................................................3-4

System Commissioning ..........................................................................3-5

Mechanical Connections...................................................................3-5

Electrical Connections ......................................................................3-6

Pre-Startup Testing ................................................................................3-6

System Configuration .............................................................................3-7

DI Water Startup and Leak Testing.........................................................3-8

System Testing.......................................................................................3-9

Alarm Test ........................................................................................3-9

Communications Test .......................................................................3-9

Chemical Startup and Testing...............................................................3-10

Automatic and Solenoid Valves ..................................................................3-11

Device Reference List.................................................................................3-12

3-2 April 2014

Installation Mega SD100, Model 115

Facility Requirements

All air, gas, electrical, and fluid connections must be established before the system is initially started. Facility connections requirements are listed in the schematics and summarized in the following table.

Service Average Capacity Maximum Capacity Size Connection

DI Water Supply 35 PSIG, 0 LPM 35 PSIG, 20 LPM 1/2" Teflon Flaretek

Main CDA Supply 90 PSIG, 21.53 SCFM 90 PSIG, 25.1 SCFM 1/2" SS Tube Fitting

Process Drain (Process Cabinet)

Process Specific 35 PSIG, 22 LPM 1" FNPT Coupling

Process Drain (Tank Cabinet)

Process Specific 35 PSIG, 22 LPM 1" FNPT Coupling

Cabinet Drain (Process Cabinet)

Gravity Gravity 2" FNPT Coupling

Cabinet Drain (Tank Cabinet)

Gravity Gravity 2" FNPT Coupling

Power 120 VACSingle Phase

60 Hz, 10 Amps

120 VACSingle Phase

60 Hz, 15 Amps

3/4" FNPT (15A, 1800W service)

Communication N/A N/A ---- (2) Dry Contact Multi-conductor Cables Supplied w/ Kit

Mega SD100, Model 115 Installation

April 2014 3-3

Installation Procedure

The following installation procedure is provided in order to ensure the safe and proper installation and commissioning of Mega Fluid Systems, Inc. systems.

System Location and Site Inspection

The following items must be verified in order to ensure the work area is safe and clean prior to any work being done by the field installation crew.

• Work area is clean and free of any chemical spills or contamination.

• Work area is clear of all obstacles, equipment, or hazardous conditions which might prevent safe access to the system.

• Work area has power outlets and can accommodate the systems required for installation.

System Inspection

The following items must be verified in order to ensure that no gross damage occurred to the system during shipment to the work site and that the system is sound and ready for use in a production environment.

Mechanical Inspection

Verify the following mechanical functions of the system before use:

• Cabinet is clean, including the top.

• No scratches or cracks are present in cabinet.

• No broken welds on frame, internal or external.

• No unprotected frame or metal exposed. Check under cabinet.

• Panels, doors, hinges, and hood are not broken or damaged.

• Back panels are attached and no bolts are broken.

• Welds on standouts, mounting blocks, and pump stands are not broken or damaged.

• Feet are properly aligned and able to adjust height.

• Plenum louver is easy to move.

• Flare fittings are tight.

• Swagelok fittings are tight and checked with No Go gap gauge.

• Piping is labeled with correct label and flow direction.

• Valves are correctly tagged.

3-4 April 2014


• Regulators are correctly tagged.

• Gauges are correctly tagged.

• Interlock, chemical warning, and caution stickers are on all doors.

Electrical Inspection

Verify the following electrical functions of the system before use:

• DIN rails are mounted squarely and securely.

• EV blocks on back panel are mounted securely.

• Terminal blocks are mounted securely.

• Wire troughs are mounted squarely and securely.

• Wire terminals are tight.

• Connectors are labeled and secured with heat shrink tubing.

• Sensors are mounted and secured.

• All groups of cables/wires leaving wire trough are wrapped with spiral wrap.

• The system is wired correctly, as per the Mega SD100, Model 115 Electrical Schematic (page 8-6).

System Placement

The typical system placement procedure ensures equipment is properly set up for normal operation.

1. Set system in place according to site layout.

2. Adjust leveling legs so the cabinet base is approximately six inches (but no more than eight inches) from the floor. Adjust leveling legs, as necessary, to level the cabinet.

3. If required, install seismic mounts on the cabinet legs. Refer to the local building codes for seismic mount requirements.

4. Repeat the placement procedure for each system component.

CAUTIONHEAVY OBJECT HAZARD!

Installing or removing the system requires mechanical assistance. Use proper equipment in order to minimize the risk

of personnel injury.


April 2014 3-5

System Commissioning

The typical system commissioning procedure includes verifying that proper mechanical and electrical connections are made to the system, and no cracks, misalignment, or stress is placed on the interconnecting plumbing.

Mechanical Connections

1. Connect cabinet and process drain to facilities drain. See Facility Requirements (page 3-2) for the connection type.

2. Connect CDA and N2 supplies to the correct inlet valves. See Facility Requirements (page 3-2) for the connection type.

3. Connect DI water supply and return lines to the correct bulkheads. See Facility Requirements (page 3-2) for the connection type.

4. Route double-containment to the correct bulkheads.

5. Connect slurry lines to the correct internal plumbing. See Facility Requirements (page 3-2) for the connection type.

6. Ensure the exhaust duct is composed of flame retardant polypropylene or better rated chemical-resistant material, if necessary.

7. Connect exhaust, or ensure facility installation is correct. Ensure exhaust is handled and treated according to applicable safety and pollution regulations according the MSDS.

8. Verify exhaust flow using the differential pressure switch on the front of the system.

9. Connect ¼" stainless steel (SS) lines from the exhaust manifold to the differential pressure switch.

WARNINGCHEMICAL HAZARD!

The exhaust effluent may contain chemical (vapor or liquid). It should be handled and treated accordingly for compliance to

safety and pollution control regulations.

3-6 April 2014


Electrical Connections

1. Connect the facility electrical supply to the AC disconnect. See the Mega SD100, Model 115 Electrical Schematic (page 8-6).

2. Ensure all communications wiring is in place and connections have been terminated.

3. Ensure signal interconnects and communication wires have been pulled to all external equipment associated with the system.

Pre-Startup Testing

The typical safety testing is done before DI water is introduced to the system. This procedure requires the system to be powered up.

1. Ensure the homogenizer is filled completely with liquid before starting the system.

2. Start the system.

3. Test all EMO switches.

4. Test other equipment safety features.

5. Ensure the correct PLC input LED on the system illuminates when the sensor is tested. See the Mega SD100, Model 115 Electrical Schematic (page 8-6).

6. Check screens for correct display changes.

7. Ensure drains work properly by testing with DI water.

8. Test all leak detectors and liquid sensors. Calibrate liquid sensors, if necessary.

CAUTIONENSURE POWER IS OFF BEFORE WORK!

Turn facilities power off before connecting electrical lines to the system. Use Lockout/Tagout Procedures.

CAUTIONELECTRICAL HAZARD — TYPE 3!

Live circuits may be exposed and accidental contact is possible. Use extreme caution in order to avoid electrical shock.


April 2014 3-7

System Configuration

The typical system configuration procedure verifies the functionality of system components. This procedure requires the system to be powered up.

1. Check all manual valves, needle valves, and ball valves for ease of operation.

2. Set all manual valves, needle valves, and ball valves to proper alignment (open or closed). See Device Reference List (page 3-12).

3. Ensure all check valves are correctly aligned.

4. Close all cabinet doors while configuring gas line components.

5. Set regulators, relief valves, and flow regulators to correct settings. Record all device settings. See Device Reference List (page 3-12).

6. Ensure the homogenizer is filled completely with liquid.

7. Turn the system On, if not already.

8. Place the unit in manual mode and access the Buffer Tank Overview screen.


Live circuits may be exposed and accidental contact is possible. Use extreme caution to avoid electrical shock.

DANGERPRESSURE HAZARD!

Open the door to the gas compartment only. Leave all other cabinet doors closed to protect yourself from potential hazards.

3-8 April 2014


9. Toggle each valve in the order displayed on the Mega SD100, Model 115 P&ID Schematic (page 8-5). For each valve, ensure:

• The correct valve opens, indicated by the pop-out indicator.

• The correct solenoid is activated, indicated by the light on the solenoid. The solenoid is identified on the Mega SD100, Model 115 Electrical Schematic (page 8-6).

• The proper output is activated. See the Mega SD100, Model 115 P&ID Schematic (page 8-5), or ensure pressure switches are at correct settings.

• Ensure the correct PLC input LED illuminates when the sensor is tested. Refer to the Mega SD100, Model 115 Electrical Schematic (page 8-6).

• Record all device settings.

• Check the touchscreens for correct display changes.

10. Record all pump and filter specifications.

DI Water Startup and Leak Testing

The typical DI water startup and leak testing is performed before the chemical startup. This procedure requires the system to be powered up.

1. Ensure the homogenizer is filled completely with liquid before starting the system.

2. Provide clean DI water in source containers (totes/drums).

3. Ensure the system is On.

4. In manual mode, fill system with DI water.

5. Check the entire system for leaks. Fix any leaks that may occur.

6. Set and record all timers, runtime setpoints, and alarm setpoints.

7. Set the system recipe(s).

8. Calibrate the flowmeters. Record the K-factor for each flowmeter.

9. Calibrate the analytical devices. Record the settings.

10. Run the system in automatic mode, simulating a POU consumption.




April 2014 3-9

11. Return the system to normal automatic operation and observe the system for a period that represents a complete cycle of functions.

System Testing

The typical system testing is performed before the chemical startup. This procedure requires the system to be powered up.

Alarm Test

1. Ensure alarm activation displays on the Alarm Overview screen. Silence Alarms button in the Alarm Overview screen must be pressed to silence the audible annunciator.

2. Test all critical alarms. With the system running, trigger the alarms and ensure the system stops pumping chemical.

3. Test all process alarms. When the system is running, trigger the alarms and verify the portion of the system associated with the alarm stops. Some alarms may require a brief setup to simulate certain portions of a process.

4. Test all warnings. When the system is running, trigger the alarms and ensure the alarm sounds but does not shut down any part of the system.

Communications Test

1. Ensure no communication or other system alarms interfere with the communication test.

2. Initiate a chemical demand or other communication parameter and ensure the systems interact in accordance with the signal being sent. The system receiving the signal should respond by performing a function or returning a status signal to the host system.

3. Return systems to normal automatic operation and observe the communications for a period that represents a complete cycle of functions.

4. Perform this test for each component connected to the Mega SD100, Model 115.



3-10 April 2014


Chemical Startup and Testing

The typical chemical startup and testing is performed to complete the installation procedure. This procedure requires the system to be powered up.

1. Drain the DI water from the system. Purge the system with N2, as required. However, ensure the homogenizer is filled completely with liquid before starting the system.

2. Connect the source chemical(s).

3. Run the system in automatic mode with chemical(s). Monitor the system closely for leaks.

4. Flush the chemical(s) to the drain. Continue flushing and particle count testing until system specifications are met.

5. Qualify the system through system readings or qualified laboratory analysis. Record all results, including blend ratio, volumes, and analytical specifications.

6. Perform a final system checkout and qualification.



CAUTIONUSE PROPER PPE WHEN HANDLING CHEMICAL!

Potentially hazardous chemicals may be present in the system during the Chemical Startup and Testing. Wear proper PPE to

avoid injury.


April 2014 3-11

Automatic and Solenoid Valves

The following is a complete list of automatic valves (AVs) and their associated solenoid valves (EVs) for the Mega SD100, Model 115.

Table 3-1. Mega SD100, Model 115 Automatic and Solenoid Valves

P&ID Location

AV Designation

EV Designation

Description Comments

Pg. 9 N/A 3SV-1 N/A

Pg. 9 N/A 3SV-2 N/A

Pg. 9 N/A 3SV-3 N/A

Pg. 9 N/A 3SV-4 N/A

Pg. 9 S01A-X 3SV-5 Pump S02A-X Inlet Isolation EV located in SBD35 Model 107

Pg. 9 S01B-X 3SV-6 Pump S02B-X Inlet Isolation EV located in SBD35 Model 107

Pg. 9 S02-X 3SV-7 Buffer Tank Inlet Isolation EV located in SBD35 Model 107

Pg. 9 S03-X 3SV-8 Drum Return Isolation EV located in SBD35 Model 107

Pg. 9 S07A-X 3SV-9 Pump S02A-X Exit Isolation EV located in SBD35 Model 107

Pg. 9 S07B-X 3SV-10 Pump S02B-X Exit Isolation EV located in SBD35 Model 107

Pg. 9 D06A-X 3SV-11 Pump S02A-X to Drain EV located in SBD35 Model 107

Pg. 9 D06B-X 3SV-12 Pump S02B-X to Drain EV located in SBD35 Model 107

Pg. 9 G01-X 3SV-13 CDA Supply to Pump S01-X EV located in SBD35 Model 107

Pg. 9 N/A 3SV-14 N/A

Pg. 9 G02A-X 3SV-15 CDA Supply to Pump S02A-X EV located in SBD35 Model 107

Pg. 9 G02B-X 3SV-16 CDA Supply to Pump S02B-X EV located in SBD35 Model 107

3-12 April 2014


Device Reference List

The following is a complete device reference list for the Mega SD100, Model 115.

Table 3-2. Mega SD100, Model 115 Device Reference List

P&ID Location

Type Number State Description Comment

1C6 AV D06A-X NC Pneumatic Valve, 2-way, Pump S02A-X to Drain

1C5 AV D06B-X NC Pneumatic Valve, 2-way, Pump S02B-X to Drain

1C13 AV G01-X NO/NC Pneumatic Valve, 3-way, CDA Supply to Pump S01-X

NO to atmosphere

1C7 AV G02A-X NO/NC Pneumatic Valve, 3-way, CDA Supply to Pump S02A-X

NO to atmosphere

1B6 AV G02B-X NO/NC Pneumatic Valve, 3-way, CDA Supply to Pump S02B-X

NO to atmosphere

1B8 AV S01A-X NC Pneumatic Valve, 2-way, Pump S02A-X Inlet Isolation

1B8 AV S01B-X NC Pneumatic Valve, 2-way, Pump S02B-X Inlet Isolation

1E11 AV S02-X NC Pneumatic Valve, 2-way, Tank 01-X Slurry Inlet Isolation

1E12 AV S03-X NC Pneumatic Valve, 2-way, Drum #1 Return Isolation

1D7 AV S07A-X NC Pneumatic Valve, 2-way, Pump S02A-X Exit Isolation

1D5 AV S07B-X NC Pneumatic Valve, 2-way, Pump S02B-X Exit Isolation

1D8 LSH S04-X ----- Level Sensor, Tank, High

1D8 LSHH S05-X ----- Level Sensor, Tank, High High

1C8 LSL S03-X ----- Level Sensor, Tank, Low

1D9 LT S06-X ----- Level Sensor, Tank, Ultrasonic

1D9 MC S01-X Field Set Mixer, Tank 01-X

1B10 MV D01-X Closed Manual Valve, 2-way, Tank 01-X Gravity Drain Isolation

1F4 MV D02-X Closed Manual Valve, 2-way, Drum Diptube Sink Gravity Drain Isolation

1C11 MV D06-X Closed Manual Valve, 2-way, Pump S01-X to Drain

1G15 MV G01-X Closed Ball Valve, 2-way, CDA Supply to Pump S01-X Isolation

1F15 MV G02-X Closed Ball Valve, 2-way, CDA Supply to Pump S02A-X Isolation


April 2014 3-13

1F15 MV G03-X Closed Ball Valve, 2-way, CDA Supply to Pump S02B-X Isolation

1C12 MV S01-X Closed Manual Valve, 2-way, Pump S01-X Exit Isolation

1G6 MV S07-X Closed Manual Valve, 2-way, Slurry Loop Supply Isolation

1G9 MV W01-X Closed Manual Valve, 2-way, DI Water Supply Isolation

1F9 MV W02-X Closed Manual Valve, 2-way, Tank 01-X DI Water Inlet Isolation

1F9 MV W03-X Field Set Needle Valve, 2-way, Handsprayer DI Water Inlet

1G9 MV W04-X ----- Handsprayer, DI Water

1G5 MV W05-X Closed Manual Valve, 2-way, Multi-turn, Drum Diptube Sink DI Water Inlet Isolation

1G14 PCV G01-X 45 PSIG Regulator, CDA To Pump S01-X

1F14 PCV G02-X 45 PSIG Regulator, CDA To Pump S02A-X

1F14 PCV G03-X 45 PSIG Regulator, CDA To Pump S02B-X

1G14 PS G01-X 40/50 PSIG Pressure Indicating Switch, Low/High, CDA to Pump S01-X

1F14 PS G02-X 40/50 PSIG Pressure Indicating Switch, Low/High, CDA to Pump S02A-X

1F14 PS G03-X 40/50 PSIG Pressure Indicating Switch, Low/High, CDA to Pump S02B-X

1D12 PS S01-X 5/60 PSIG Pressure Indicating Switch, Low/High, Pump S01-X Discharge

1E6 PS S02-X 5/60 PSIG Pressure Indicating Switch, Low/High, Pump S02A-X/S02B-X Discharge

1G13 PSV G01-X 70 PSIG Relief Valve, CDA to Pump S01-X

1F13 PSV G02-X 70 PSIG Relief Valve, CDA to Pump S02A-X

1F13 PSV G03-X 70 PSIG Relief Valve, CDA to Pump S02B-X

1B12 Pump S01-X ----- Pump, Diaphragm, Slurry Drum

1C7 Pump S02A-X ----- Pump, Diaphragm, Primary Slurry Discharge

1B5 Pump S02B-X ----- Pump, Diaphragm, Secondary Slurry Discharge

1B13 YS S01-X ----- Sensor, Presence, Drum Slurry Supply

1B10 YS S02-X ----- Sensor, Presence, Tank 01-X Empty

1A13 YSS X01-X ----- Leak Detector, Process Cabinet (High)

Table 3-2. Mega SD100, Model 115 Device Reference List (continued)

P&ID Location

Type Number State Description Comment

3-14 April 2014


April 2014 4-1

Chapter 4: Sequence of Operation


Sequence of Operations Overview................................................................4-2

Buffer Tank Addition Operation ........................................................4-2

Tank Mixer .......................................................................................4-2

Manual Flush....................................................................................4-3

4-2 April 2014

Sequence of Operation Mega SD100, Model 115

Sequence of Operations Overview

The Mega SD100 Slurry Distribution System, Model 115 (buffer tank) is a single-station system that provides a stable, homogeneous dispersion of slurry to the Slurry Blending and Distribution System using a tank mixer.

A mechanical mixer present in the buffer tank provides additional mixing assistance to ensure that the slurry does not settle out in the tank.

Buffer Tank Addition Operation

Starting with an empty tank, the 265L Mega SD100, Model 115 buffer tank will fill with slurry (from the drum/tote) until the tank high level sensor is actuated.

The Mega SD100, Model 115 then moves into "Global" recirculation, circulating raw slurry out of the buffer tank, through the Slurry Blending and Distribution System, and then back to the Mega SD100, Model 115 buffer tank in a continuous fashion through redundant positive displacement pumps.

During the initial global recirculation (after an empty tank fill), the drum/tote continues to add slurry to the Mega SD100, Model 115 buffer tank until the tank high level sensor is actuated.

After the Mega SD100, Model 115 starts its initial global recirculation, the system circulates for 30 seconds before sending the Slurry Available signal, at which time slurry is supplied to the Slurry Blending and Distribution System.

Once the Mega SD100, Model 115 has been circulating and supplying slurry to the Slurry Blending and Distribution System, the Mega SD100, Model 115 buffer tank contents are consumed by the Slurry Blending and Distribution System. Any time the Mega SD100, Model 115 buffer tank falls below the Slurry Fill Level, slurry is added until the Slurry Full Level has been reached.

This sequence of falling below the Slurry Fill Level and refilling above the Slurry Full Level repeats indefinitely until operator or alarm intervention (flush purge, critical/process alarm, etc.).

Tank Mixer

If the Mega SD100, Model 115 buffer tank mixer is toggled online (through the Mixer Control option of the Tool Maintenance Screen, or by pressing the mixer on the Buffer Tank Overview Screen, the mixer automatically turns on any time the Mega SD100, Model 115 buffer tank is circulating and the tank level is above the user-configurable Mixer Start Level (Process Setpoints Screen).

The mixer turns off if the tank level falls below the Mixer Start Level.

Mega SD100, Model 115 Sequence of Operation

April 2014 4-3

Manual Flush

The system, as well as circulation pumps, can also be manually flushed during service periods. The tank is first drained of residual slurry. Next, DI water is added to the tank to a prescribed level, and the flush liquid is circulated through the loop for a defined duration. The flush liquid is then pumped to drain, and gravity drains empty any residual liquid.

4-4 April 2014

Sequence of Operation Mega SD100, Model 115

April 2014 5-1

Chapter 5: System Operation


Touchscreen Overview .................................................................................5-2

Touchscreen Graphics............................................................................5-2

Operating Procedures...................................................................................5-5

Password Permissions ...........................................................................5-5

Logging Into the System .........................................................................5-5

Logging Out ............................................................................................5-6

Responding to Alarms ............................................................................5-6

Overriding the Alarm...............................................................................5-8

Activating an Alarm Bypass ..............................................................5-8

Deactivating an Alarm Bypass ..........................................................5-8

Starting the System ................................................................................5-9

Shutting the System Down....................................................................5-10

Setting the System into Automatic Operation........................................5-10

Setting the System into Manual Operation............................................5-11

Drum Transfer ......................................................................................5-13

Restarting After an EMO Shutdown or Unexpected Loss of Power .......5-14

Setting Timers and Setpoints................................................................5-14

Resetting Runtimes ..............................................................................5-15

5-2 April 2014

System Operation Mega SD100, Model 115

Touchscreen Overview

The User Interface for the SD100 Model 115 is located on the SBD35 Model 107 system. Refer to the Mega SBD35 Slurry Blend and Dispense, Model 107 manual for User Interface details.

The Mega SD100, Model 115 includes a 15” touchscreen for controlling all system operations.

Touchscreen Graphics

Figure 5-1 is an example of a touchscreen. The Overview screens display the various mechanics for each module and/or component of the system. In Manual mode, or if the system is under certain operating conditions (e.g., an active alarm, Manual mode), various touch buttons or graphics on the screen can directly modify operations in the system. Table 5-1 defines fields and touch buttons. Table 5-2 contains pipes and component color definitions.

Mega SD100, Model 115 System Operation

April 2014 5-3

Figure 5-1. Touchscreen Graphics Example

Table 5-1. Display Field Definitions

Fields Description

Press buttons on screens to open tool functions or other windows.

Some graphic icons become buttons if modifi-cations are possible (e.g., system is in manual mode, the active process allows changes).

Displays the current tool status (e.g., Slurry Addition, Initial Recirc, etc.).

Pump. Press the icon to change status (in manual mode).

5-4 April 2014


Liquid sensor. Red represents the sensor is in alarm status. The sensor is reading abnormal activity. Green represents normal activity.

ABPR valve. Activation depends on the configu-ration of the valve. Press to change the status (in manual mode).

Two-way and three-way valves. Red represents a closed port, green represents an open port (the valve pictures has two closed ports). Touch to change status (in manual mode).

Table 5-2. Display Color Definitions

Object Color Description

Pipes Dark Gray No flow

Blue DI water

Green Slurry

Yellow N2 & CDA

Valves Green An open valve path

Red A closed valve path

Text on screen Black Describes a label or current status of the system

Blue Station is in Local Qualified state

Green Station is delivering to the Global Loop

Red Alarm warning message

Alarm Blue A warning alarm

Yellow A process alarm

Red A critical alarm

Pumps Green The pump is running

Blue The pump is online or in standby but is not running

Red The pump is faulting

Gray The pump is offline

Liquid Sensor Red Sensor is in alarm status

Green Normal activity

Table 5-1. Display Field Definitions (continued)

Fields Description

Two-way Three-way


April 2014 5-5

Operating Procedures

The instructions in this section are primarily for operators monitoring the Mega SD100, Model 115. The procedures for responding to alarms and troubleshooting are included in this section. Some operators may not have the permission level to complete all of the procedures.

Password Permissions

The user password authorizes the user to view and/or edit various controls in the tool. The HMI interface is set up with the following three levels of permissions:

• Default - enables an operator to view all screens in the tool.

• Mega - enables an operator to view and edit the controls required to run the tool.

• Admin - enables the user access to all screens and their functions, particularly to modify critical controls in the tool (e.g., Tool Maintenance screen, PV Parameters popup, etc.). A password change is required.

Password-protecting screens restrict changing tool functions to personnel who are trained to understand and operate the tool in a safe manner. Use Login from the Main menu to re-enter passwords and to set the amount of time a password is valid.

Logging Into the System

1. Touch Login on the Menu bar located at the top of the screen.

Figure 5-2. Menu Bar - Login

2. In the Log On dialog, press the User Name field to enter a login name.

5-6 April 2014


Figure 5-3. Log On and Keyboard Screens

3. Use the on-screen keypad to enter a name, and then press the return key. Your login name appears as the system user.

4. Press Password to enter the corresponding login password.

5. Use the on-screen keypad to enter a password, and then press Enter.

6. Press OK to exit the Log On dialog.

Logging Out

Press the Logout button on the Menu bar to log out of the system.

Responding to Alarms

Alarms are activated when a system interlock is tripped. Also see the Alarms and Warnings (page 6-1) chapter. There are three levels of alarms:

• Critical alarms are activated by urgent situations that require immediate attention and threaten the performance of the system. A critical alarm sounds the sonalert and shuts down the system. A chemical system shutdown (CSS) critical alarm stops the distri-bution pumping.

• Process alarms are activated by situations that require immediate attention, but do not threaten the performance of the system. A sonalert is sounded and the sequence of actions are paused.

• Warning alarms are activated by situations that do not threaten the performance of the system. These situations do not require immediate attention, but must be fixed before the situation escalates into a situation that could threaten the performance of the system. A warning alarm sounds the sonalert.


April 2014 5-7

Perform the following steps if an alarm is activated.

1. To silence the alarm, press the Silence button on the Menu bar.

2. Press the Alarms button on the Menu bar. The Alarm Overview Screen displays.

Figure 5-4. Menu Bar - Alarms

3. In the Alarm Overview screen, press the scroll bar to move through the alarm list. Acknowledge the alarm(s) by pressing (Ack All) Silence Alarms (Figure 5-5).

Figure 5-5. Alarm Overview Screen

4. Read the alarm message and correct the problem. If the problem still exists, the alarm remains active and is written back to the list.

5. Once the problem has been corrected, press the Reset Inactive Alarms button and all inactive alarms will be removed from the list.

5-8 April 2014


Overriding the Alarm

The alarm override disables all alarms. Use the alarm override to perform certain maintenance functions that would normally trigger an interlock, such as rinsing spilled chemical in the cabinet to the drain. Use caution with the alarm override; it overrides all system alarms. For example, if the override is activated to bypass a faulty sensor, a concurrent leak or pressure alarm is also overridden.

Activating an Alarm Bypass

1. Press the Maintenance button to display the Tool Maintenance screen.

2. Press the Enabled/Disabled toggle button Disabled.

3. Press the Previous button to return to the previous screen.

Deactivating an Alarm Bypass

1. Press the Maintenance button to display the Tool Maintenance screen.

2. Press the Enabled/Disabled toggle button Enabled.

3. Press the Previous button to return to the previous screen.

CAUTIONMONITOR SYSTEM IN ALARM OVERRIDE MODE!

Alarms do not function in alarm override mode. Potential hazards may be created. Use caution.


Alarm override may cause conditions that expose the operator to chemicals. Wear proper protective clothing and eye shields.

Refer to the site MSDS for chemical-specific information.


April 2014 5-9

Starting the System

Generally, the system is initially set up and powered on by an operator or engineer with an administrative password level. A restart is required after a power outage. Refer to the Restarting After an EMO Shutdown or Unexpected Loss of Power (page 5-14) section before restarting the system.

1. Toggle the AC disconnect switch to the On position.

2. Ensure that the EMO button is disengaged (pulled out).

3. Press the green Start button.

The unit begins the startup procedure. The programmable logic controller (PLC) initializes and begins its first scan. When the setup is complete, the Home screen is displayed on the touchscreen.

Figure 5-6. Home Screen

5-10 April 2014


If the unit fails to start, check the following items:

• AC disconnect is in the On position.

• EMO button is disengaged (pulled out).

• Power is supplied to the unit (the green Start button has been pressed).

Shutting the System Down

After the initial start up, the system should remain continually powered on. Shutdown immediately halts any chemical and slurry dispensing in the related system. All valves and systems are returned to a fail safe mode.

To shut down the system, toggle the AC disconnect switch to the Off position.

Setting the System into Automatic Operation

The following procedure places the system into automatic operation. Refer to the User Interface chapter in the Mega SBD35 Slurry Blend and Dispense, Model 107 manual for detailed screen definitions.

1. From the Home (Main) screen, press Maint Overview to display the Tool Maintenance screen.

2. Ensure the pumps are ready for operation, and then toggle each pump online by pressing the applicable pump switch to Online mode.

3. Press the Mixer Control button to turn on the Tank Mixer.

4. Press the Control Mode button to toggle the buffer station to Auto operation (Figure 5-7).

NOTICEFLUSH AND PURGE MAY BE REQUIRED!

If the tool is shut down for an extended period of time, complete a full flush and purge.


April 2014 5-11

Figure 5-7. Toggling the Pumps and Mixer Online

Setting the System into Manual Operation

Placing the system in manual mode de-energizes all solenoid valves. This sets all valves in their normal (safe) state when manual mode is activated. During manual mode, you can manually toggle the valves open or closed by pressing the valve graphic on the Buffer Tank Overview screen.

Follow the Mega SD100, Model 115 P&ID Schematic (page 8-5) to determine which valves require activating to run the desired function(s). To reduce the possibility of pressure building up in the system piping:

If... start...

opening valves downstream and move in the upstream direction.

closing valves upstream and move downstream.

Toggle pumps and mixer online

5-12 April 2014


In manual mode, combinations of valves can accidentally be opened or closed that are outside the scope of the equipment design. The operator assumes all responsibility for running the system in manual mode.

1. Press Login and enter the maintenance user name and password. See Logging Into the System (page 5-5).

2. Press Buffer Tank Maintenance from the Home (Main) screen to open the Tool Maintenance screen.

3. In the Tool Maintenance screen:

a. Press the Auto/Manual Control Mode button to toggle the station to Manual operation.

b. Press the Previous button to return to the Previous screen.

4. Select the Buffer Tank Overview screen to directly edit valves in the display.

a. Touch the valve graphic to energize or de-energize the selected valve; a green valve is open, and a red valve is closed.

b. Press Clear Valves to return all valves to their normal state.

5. To set the unit into automatic operation from the manual mode, follow the steps in the Setting the System into Automatic Operation (page 5-10) section.

CAUTIONMONITOR SYSTEM IN MANUAL MODE!

Some alarms may not function in manual mode. Potential hazards may be created. Use caution.

NOTICEMANUAL MODE PLACES VALVES IN FAIL SAFE POSITION!

Setting the tool to Manual mode, places all valves in the fail safe position.


April 2014 5-13

Drum Transfer

Slurry drums are tumbled by the drum tumbler (in another room) for 4 hours. An alarm is issued when the slurry drum has completed the required tumbling to indicate the drum is ready for transfer. Perform the following steps to set the slurry to transfer or recirculate appropriately.

1. When the Drum Tumbler has stopped, or the timer has completed, turn off the Drum Tumbler, retrieve the drum, and transfer it to the Mega SD100, Model 115 according to site instructions.

2. Connect the drum to the buffer tank.

3. Press the Drum Control button on the Buffer Tank Overview screen; the Drum Control Screen dialog will appear.

Figure 5-8. Drum Control Screen

4. Select the control method before placing the drum online.

5. Press the Push to Start button to initiate the selection.

Control Method Description

Transfer Drum to Buffer Now Transfers the contents of the drum to the Buffer Tank without recirculation.

Recirculate Drum then Transfer

Transfers the contents of the drum to the Buffer Tank after the recirculation time is completed. If the Online Recirc Before Feed timer is insufficient, press the Drum Setpoints and Timers button to access the Internal Drum Configuration dialog and change the timer setpoint.

Recirculate Drum No Transfer

Recirculates the contents of the drum until stopped or the contents are transferred to the Buffer Tank.

5-14 April 2014


Restarting After an EMO Shutdown or Unexpected Loss of Power

If the system shuts down while running an operation, it does not continue where it left off after the restart.

1. Ensure that the EMO button is disengaged (pulled out).

2. Press the green Start button.

The unit begins the startup procedure. The programmable logic controller (PLC) initializes and begins its first scan. When the setup is complete, the Home screen is displayed on the touchscreen.

Setting Timers and Setpoints

Many of the system activities are set to run for a specific amount of time. System timers and setpoints are set from the Internal Drum Configuration dialog. Timer and setpoint values should only be changed with permission.

1. Press Login to log in with the appropriate Maintenance credentials (if not logged in already).

2. Press the Maint Overview button to access the Tool Maintenance screen.

3. Press the Slurry Drums button. The Internal Drum Configuration dialog displays. See Figure 5-9.

NOTICEOBTAIN PERMISSION BEFORE CHANGING TIMERS AND

SETPOINTS!

Timer and setpoint values should not be altered without proper permission. Erroneous values may have detrimental effects on the

system.


April 2014 5-15

Figure 5-9. Internal Drum Configuration Dialog

4. Change the Current timer value:

a. Press the Current timer value field.

b. Use the on-screen keypad to enter a new value.

c. Press Enter on the keypad.

5. Press Download (and confirm) to update and save the changed timer value in the system.

6. Close the dialog to return to the Tool Maintenance screen.

Resetting Runtimes

The runtime setpoints can be reset from the Internal Drum Configuration screen. The accumulated runtime for each component lists the total hours of operation for the component, typically pumps, and the total number of events for the counters. When the runtime reaches the setpoint, an alarm is generated to indicate that maintenance is required. After the appropriate maintenance is completed, the runtime must be reset.

1. Acknowledge the maintenance required warning alarm from the Alarm Overview screen.

2. Complete the required maintenance by following the procedures in the Maintenance (page 7-1) chapter.

3. Press Login to log in with the appropriate Maintenance credentials (if not logged in already).

4. Press the Maint Overview button to access the Tool Maintenance screen.

5-16 April 2014


5. Press the Slurry Drums icon to access the Internal Drum Configuration dialog.

Figure 5-10. Internal Drum Configuration Screen

6. Press the Reset Acc (Reset Accumulator) buttons for the specific runtimes to be reset.

7. Press Download (and confirm) to update and save the changed timer value in the system.

8. Close the dialog to return to the Tool Maintenance screen.

Reset Accumulator

April 2014 6-1

Chapter 6: Alarms and Warnings


Software Interlocks .......................................................................................6-2

Critical Interlocks ....................................................................................6-2

Process Interlocks ..................................................................................6-2

Warnings ................................................................................................6-2

Drum Panel Alarms.......................................................................................6-3

6-2 April 2014

Alarms and Warnings Mega SD100, Model 115

Software Interlocks

A software interlock is a computer-controlled lock/alarm under which a device may or may not be allowed to operate. Software interlocks are incorporated in order to ensure the safety of the operator and to protect the product being processed. The interlocks trigger an alarm condition. The alarms have three states: active, acknowledged, and reset.

An active alarm indicates the interlock is currently tripped, but has not been acknowledged. The audible annunciator is sounded when active alarms exist. When an operator presses the acknowledge key, the audible annunciator is turned off and the alarm is lowered to the acknowledged state. When the operator presses the reset key, the alarm is reset. If the condition which caused the interlock has not been corrected, the alarm is reactivated. The alarm, active time, and acknowledged time is viewed from the Alarm History screen. The Mega SD100, Model 115 includes three types of alarms: critical, process, and warnings, which are defined in this chapter.

Software interlocks can be configured to any type (critical, process, or warning). When an alarm is triggered, the type of alarm will be differentiated by color; critical is red, process is yellow, and warning is blue.

Critical Interlocks

Critical interlocks are activated by situations that require immediate attention and threaten the performance of the system. Critical interlocks signal a shutdown of the system and prevent a potentially dangerous situation to the operator and system. A critical alarm is a condition that prevents the system from continuing the blend and dispense operations. A critical alarm can place a single station or the entire Mega SD100, Model 115 system into a stopped state.

Process Interlocks

Process interlocks are activated by those situations that need immediate attention and could threaten the performance of the system. While process interlocks do not shut down the system, the problem could escalate into a potentially dangerous situation to the operator and system if not addressed promptly. Process interlocks activate the filter bypass, so distribution will continue but without filtration.

Warnings

Warnings are activated by those situations that do not need immediate attention, but could escalate into a more serious problem if ignored.

Mega SD100, Model 115 Alarms and Warnings

April 2014 6-3

Drum Panel Alarms

The following table lists all Drum Panel Alarms, and provides a list of possible causes with suggested actions to be taken in order to correct the condition. Alarms are listed in alphabetical order.

Table 6-1. Drum Panel Alarms

Alarm Possible Cause Required Action

(PSL-G02-C) Buffer Pump S02A-C CDA Low Pressure

Faulty pump. Replace pump.

Regulator incorrectly set. Check regulator setting.

Pressure switch incorrectly set. Check pressure switch setting.

Pressure switch faulty. Replace pressure switch.

(PSH-G02-C) Buffer Pump S02A-C CDA High Pressure

Pump flow path blocked. Ensure valve’s flow paths are open.




(PSL-G03-C) Buffer Pump S02B-C CDA Low Pressure





(PSH-G03-C) Buffer Pump S02B-C CDA High Pressure





(PSH-S06-A) Buffer Station High Output Pressure





6-4 April 2014


(PSL-S06-A) Buffer Station Low Output Pressure





Buffer Tank Drum Pump S01A Maintenance Required

Pump runtime has reached pump timer setpoint.

Service pump.

Reset timer.

Timer not reset after last maintenance. Verify last maintenance performed.

(YS-S02-C) Buffer Tank Empty

Buffer tank is empty. Replace with full tank.

Empty sensor YS-S02-C adjusted incorrectly.

Adjust empty sensor YS-S02-C.

Empty sensor YS-S02-C faulty. Replace empty sensor YS-S02-C.

(LSH-S05) Buffer Tank Level Hi

Buffer tank at high level. Check tank level.

Sensor incorrectly placed. Check placement.

Sensor incorrectly set. Calibrate level sensor.

Sensor faulty. Replace level sensor.

(LT-S06-A) Buffer Tank Level Hi

Buffer tank at high level. Check tank level.




(LSL-B52) Buffer Tank Level Low

Buffer tank at low level. Check tank level.




Table 6-1. Drum Panel Alarms (continued)



April 2014 6-5

(LT-S06-A) Buffer Tank Level Low

Buffer tank at low level. Check tank level.




(LSM-S04) Buffer Tank Level Mid, Prepare The Drum Shaker

Buffer tank at mid level. Start the slurry drum shaker process to ensure slurry has plenty of time to mix.

Buffer Tank Not Enabled Excess Time

Buffer tank control mode is set to manual.

Set buffer tank control mode to automatic.

Buffer Tank Paused

Station has been paused. Resume operation of station.

Buffer Tank Sensor Failure. Check or Calibrate Tank Level Sensors

One or more of the tank level sensors is not functioning properly.

Adjust or replace sensors as necessary.

Buffer Tank Stopped

Station has been stopped. Resume operation of station.

(YS-S01) Drum is Empty

Drum is empty. Replace with full drum.

Empty sensor YS-S01 adjusted incorrectly.

Adjust empty sensor YS-S01.

Empty sensor YS-S01 faulty. Replace empty sensor YS-S01.

Drum is Offline

Drum is currently offline. In the Blend Overview screen, select to go Online

Drum Cabinet Leak Detected

Leak detected in Drum Cabinet. Look for leak and repair as necessary.

(PSL-G01-C) Drum Pump S01-C CDA Low Pressure



6-6 April 2014






(PSH-G01-C) Drum Pump S01-C CDA High Pressure





Drum Transfer To Buffer Max Time Exceeded

Transfer pump or auto valves are not functioning properly, or the manual valves are not set properly.

Check the function of the transfer pump and auto valves, as well as manual valve states.

Drum Tumbler Has Stopped

Drum Tumbler stopped. Restart the Drum Tumbler

Drum Tumbler Timer Done

The Tumbler Timer in the SBD35 Model 107 has completed.

Shut down the tumbler, retrieve the drum, and connect it to the SBD35 Model 107 drum panel for transfer to the buffer tank.

(PSL-S01-C) Pump S01-C Low Output Pressure





Pump S02A-C Low Output Pressure








April 2014 6-7

Pump S02B-C Low Output Pressure





Pump S01-C Offline

Pump has been placed offline. Place pump back online.

Pump S01-C has faulted. Remedy pump fault and place pump online.

Pump S02A-C Offline


Pump S02A-C has faulted. Remedy pump fault and place pump online.

Pump S02B-C Offline


Pump S02B-C has faulted. Remedy pump fault and place pump online.

Slurry Supply Pump S02-A Maintenance Required


Service pump.

Reset timer.


Slurry Supply Pump S02-B Maintenance Required


Service pump.

Reset timer.




6-8 April 2014


April 2014 7-1

Chapter 7: Maintenance

The procedures in this chapter are used during general preventative maintenance procedures but also apply when troubleshooting component problems. Read and follow the Safety Precautions (page 7-3) section before attempting any preventative maintenance or troubleshooting procedures.

Safety Precautions........................................................................................7-3

General System Maintenance .......................................................................7-4

Removing and Isolating Components .....................................................7-4

Removing and Isolating Electrical Components ......................................7-5

Compact Flash Card...............................................................................7-7

Flowmeters .............................................................................................7-7

Pressure Reducing Gas Regulators..................................................7-8

Pressure Switches ..................................................................................7-8

Gas Digital Pressure Switches .........................................................7-8

Preventive Maintenance .............................................................................7-11

Maintenance Schedule .........................................................................7-11

Preparation.....................................................................................7-11

Equipment ......................................................................................7-11

Weekly Preventive Maintenance Procedures ..............................................7-12

Visual System Inspection......................................................................7-12

Verifying the Device Settings ................................................................7-13

Adjusting the Humidifier Settings ..........................................................7-14

Monthly Preventive Maintenance Procedures .............................................7-16

Checking Pump Operation....................................................................7-16

Checking Leak Detectors......................................................................7-16

Liquid and Level Sensor Maintenance ..................................................7-19

Adjusting Sensitivity of Line Liquid Sensors....................................7-20

Calibrating the Tank Level Proximity Sensors ................................7-21

Adjusting the Ultrasonic Level Transmitter......................................7-24

Quarterly Preventive Maintenance Procedures ...........................................7-25

Testing Alarms......................................................................................7-25

Valves and Pressure Gauges ...............................................................7-26

Electrical Solenoid Valves (EV) ......................................................7-26

Automatic Valves (AV)....................................................................7-27

Check Valves (CV) .........................................................................7-27

Manual Valve (MV) .........................................................................7-28

7-2 April 2014

Maintenance Mega SD100, Model 115

Pressure Relief Valve .....................................................................7-28

Gas Line Maintenance....................................................................7-29

Semi-Annual Preventive Maintenance Procedures .....................................7-32

Fittings..................................................................................................7-32

Checking the Fittings ......................................................................7-32

Replacing Fittings ...........................................................................7-33

Rebuilding Pumps ................................................................................7-34

Isolating and Removing Pumps ......................................................7-34

Annual Preventive Maintenance Procedures ..............................................7-36

Lithium Battery .....................................................................................7-36

Replacing the Lithium Battery .........................................................7-36

Disposing the Lithium Battery .........................................................7-37

EMO Testing.........................................................................................7-38

Completing Preventive Maintenance Procedures........................................7-39

Cabinet Cleaning ..................................................................................7-39

Maintenance Forms ....................................................................................7-40

Work Order Form..................................................................................7-41

Preventive Maintenance Form ..............................................................7-42

Device Settings Record Sheet ..............................................................7-45

System Data Value Record Sheet ........................................................7-48

Mega SD100, Model 115 Maintenance

April 2014 7-3

Safety Precautions

Review all of the following safety messages before performing any maintenance procedures. Compliance to safety warnings prevent unnecessary risks to operators and equipment.


The exhaust effluent may contain chemical (vapor or liquid). It should be handled and treated accordingly for compliance to

safety and pollution control regulations. Supplemental exhaust may be required for maintenance tasks.

ELECTRICAL HAZARD — TYPE 3!

Risk of exposure to hazardous electrical current. Use extreme caution while performing preventive maintenance procedures in

order to avoid accidental contact with energized parts.

NOTICEUSE PROPER LIGHTING!

Use portable lighting (lighting level of minimum 30 foot-candles) when completing service.


Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or

coveralls as recommended in the MSDS during preventive maintenance procedures. Refer to the site MSDS for chemical-

specific information.

CAUTIONLOUD NOISE HAZARD!

Use hearing protection when pumps are on and any pump access panel is open.

7-4 April 2014


General System Maintenance

All routine maintenance is performed from the front of the system. The rear system panels are not intended to be removed for maintenance.

Removing and Isolating Components

Use this procedure as a guideline for removing a component from the system for maintenance or replacement.

• Read all safety notices before beginning any procedures.

• Always wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS.

• Use lockout/tagout devices, as required.

• Isolate and relieve potential energy before opening lines or attempting electrical maintenance.

• Follow site specific requirements and procedures.

1. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Refer to the MSDS and site regulations.

Equipment Required • MSDS for all system chemistry.

• Acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS.

• Chemical absorbent pads and wipes, and other safety equipment as recommended on the MSDS.

• Appropriate chemical waste container as recommended on MSDS.

• Auxiliary lighting.

• Appropriate tool set.

• Replacement components.

NOTICESSHUT DOWN POWER FOR ELECTRICAL MAINTENANCE!

Always shut off power before performing electrical procedures.


April 2014 7-5

2. Place the system into manual operating mode.

3. Preferably, shut down power to the system. It may be necessary to shut down electrical power after relieving pressure in the lines if automatic valves must be toggled.

4. Lockout/tagout the A/C disconnect switch.

5. Close the component isolation valves.

6. Toggle or open valves to release pressure in the line.

7. Lock out the isolation valves.

8. Remove the component.

9. Repair or replace the component.

10. Use a hand sprayer to clean or remove any chemical in the cabinet interior.

11. Remove lockout/tagout devices and open isolation valves.

12. Restore system power.

13. Perform necessary tests in Manual mode to ensure procedure was executed correctly.

14. Return system to Auto mode.

Removing and Isolating Electrical Components

Use this procedure as a guideline for removing and isolating electrical components.

• Read all safety notices before beginning any procedures.

• Always wear protective gear as recommended on the MSDS.

• Use lockout/tagout devices, as required.

• Isolate and relieve potential energy before opening lines or attempting electrical maintenance.

• Follow site specific requirements and procedures.

CAUTIONPRESSURE HAZARD!

Relieve pressure in lines before loosening fittings.

7-6 April 2014


1. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS.

2. Lockout/tagout the A/C disconnect switch.

3. Complete the replacement.

4. Remove lockout/tagout device.

5. Start up the system.






• Appropriate tool set.

• Replacement components.


Disconnect power and lockout/tagout to remove electrical hazard before performing any electrical procedures.

NOTICEOBTAIN APPROPRIATE APPROVAL!

Electrical procedures require the system to be shut down. Obtain appropriate approval and notify affected personnel before proceeding.


April 2014 7-7

Compact Flash Card

The PLC is supplied with an Allen-Bradley Industrial Compact Flash card. The Compact Flash contains a copy of the current program. In the event of corrupt memory, the system program automatically loads from the Compact Flash and resumes operation.

Program changes are not automatically sent and uploaded to the Compact Flash card. A Controls Engineer must download any changes to the Compact Flash. The downloading must occur when the PLC is in program mode.

Flowmeters

Flowmeters are used for regulating the chemical addition (replenish step) into the recipe. Typically flowmeters are of the paddle wheel type. The paddle has an earth magnet on each wheel, and a millivolt pulse is generated as it passes the electrical pickoff. The computer counts the pulses and converts them to a SCCM flow rate. The calibration of the meter is a correction factor based on water, rather than the actual fluid density.

The flow rate per minute is part of the accuracy of the flowmeter. If the flow regulator LPM flow is changed, the flowmeter must be recalibrated and adjusted with a correction factor. Another factor that affects the accuracy of flowmeters is the incoming fluids inlet pressure. The flowmeter is affected if the incoming pressure or LPM flow rate is changed.

Malfunction indications include:

• No output, the paddle is sticking or the signal is lost. The return meter on a flowmeter has a tendency for the paddle to fall apart and show up in the strainer. The paddle wheel shaft is affected by the pH of the slurry and denigrates (made of stainless steel). Some meters have a plastic shaft.

• If the regulated flow is too high, the meter miscounts.

• If air bubbles are in the flow stream, the meter miscounts.

• If the pressure fluctuates, the meter miscounts.

Periodic maintenance includes regularly scheduled recalibration. If the device does not repeat, remove and clean the internal parts of the meter, reinstall and check the repeat-ability again. Replace the O-rings during regular servicing. The dual O-ring is added to safeguard against leaks. Do not use grease; lubricate with water before inserting into the holder. Be careful to note the orientation and direction of the flow arrow on the meter head.

Inspect the paddle wheel movement around the shaft. It should move smoothly and not be sticky. Some meters have a metal shaft that presents problems with selected slurry pH values that destroy the shaft (primarily the global loop return meter). To maintain the chemical meter, remove, clean and check the repeatability.

Note: Program mode shuts down the entire system.

7-8 April 2014


Pressure Reducing Gas Regulators

Reducing regulators control the incoming pressure to an exact pressure no matter what happens to the incoming pressure. The regulator design is based on a diaphragm and needle through a hole principle. As the regulator knob is adjusted, the tapered needle going through the hole gets larger. The diaphragm moves to compensate for any changes in incoming CDA/N2 pressure. The attached gauge has an accuracy of +/-5%. The flow is manually adjusted.

Figure 7-1. Regulator Example

Indications of a premature regulator failure are an inability to maintain a stable pressure value, fluctuating pressure value, the regulator creeps (up or down), or the gauge needle sticks, and then jumps up or down. When a regulator fails it remains in the open position, or may stop regulating and then open. If an external leak is developed, the downstream pressure is bled off to the atmosphere.

Pressure Switches

Gas Digital Pressure Switches

Use the Electrical schematic and/or the Device Reference List (page 3-12) for reference when adjusting a digital pressure switch to determine if it is designated as a high or low switch; and to obtain the correct pressure setting for the switch.


April 2014 7-9

Figure 7-2. Adsens Switch Display

• If one setting is used for a switch (e.g., only high or only low), then Output #1 is correct.

• If both outputs are used (e.g., a high and a low), then Output #1 is low and Output #2 is high.

Setting the Low Pressure Only Switch

1. Press and hold the SET button for 3 seconds to open the setting options.

a. Change the Units to PSI. Press Set.

b. Change the Output #1 to N/O. Press Set.

c. Output #2 can be either N/C or N/O. Press Set.

d. Response Time is 2.5 mS. Press Set.

e. Auto/Manual is Manual. Press Set. Returns to the Display mode.

2. From the Display mode, press Set once.

a. P1 option to On point. Set to 2 PSI above the pressure switch setpoint. Press Set.

b. P2 option to Off point. Set the pressure switch setpoint. Press Set.

c. Press and hold Set without changing other options until the menu returns to the Display mode.

Setting the High Pressure Only Switch

1. Press and hold the Set button for 3 seconds to open the setting options.


7-10 April 2014





e. Auto/Manual is Manual. Press Set. Returns to the Display mode.


a. N1 option to On point setting. Set to 2 PSI below the pressure switch setpoint. Press Set.

b. N2 option to Off point setting. Set the pressure switch setpoint. Press Set.

c. Press and hold Set without changing other options until the menu returns to the Display mode.

Setting the High and Low Pressure Switch

Use the following instructions for setting the high and low settings for one switch.

1. Press and hold the SET button for 3 seconds to open the setting options.





e. Set the Auto/Manual option to Manual (if required). Pressing Set returns to the Display mode.


a. P1 option (low setpoints) to On point. Set the pressure switch setpoint. Press Set.

b. P2 option to Off point. Set the pressure switch setpoint. Press Set.

c. N1 option (high setpoints) to Off point. Set the pressure switch setpoint. Press Set.

d. N2 option to On point. Set the pressure switch setpoint. Press Set.

e. Press and hold Set without changing other options until the menu returns to the Display mode.


April 2014 7-11

Preventive Maintenance

Effective Preventive Maintenance (PM) maintains the system in optimal working order and ensures that the warranty extends to the equipment. This section provides a recommended PM schedule and includes weekly, monthly, quarterly, semiannual, and annual PM procedures. Retain copies of the completed preventive maintenance schedule to provide a history of the maintenance performed.

Maintenance Schedule

Prior scheduling of Preventive maintenance activities helps prevent unexpected downtime and disrupting the distribution system. Follow site specific procedures for notifying affected personnel before performing preventive maintenance. Typical site requirements include:

• obtaining a work order

• notifying the appropriate personnel, and

• applicable safety monitoring stations.

Preparation

Prior to starting preventive maintenance, review all appropriate procedures. Ensure all equipment is available, work permits are approved, and all affected personnel have been notified. Before replacing any components, ensure the components are on hand. Review all site requirements and procedures, including spill procedures, buddy systems, and PPE. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Review site MSDS for each chemical used in the system.

Equipment

Gather all required equipment before performing maintenance procedures. The recommended equipment is listed each preventive maintenance section in this chapter.

7-12 April 2014


Weekly Preventive Maintenance Procedures

Perform the following preventive maintenance procedures as part of the weekly maintenance schedule (Table 7-2, on page 42).

Visual System Inspection

A thorough visual inspection verifies the system is operating correctly and alerts the operator to potential maintenance required. Maintenance issues identified during the visual inspection should be reported and either corrected, or scheduled, at the earliest possible maintenance. Complete an informal inspection daily.

A complete visual inspection requires opening the s; follow all chemical and electrical hazard precautions. Follow all site-specific policies during the procedure.

Use the following list as a guideline for a visual inspection, however, this list may not be all-inclusive.


2. General system area.

a. Check area for leaks or spills. Correct according to site procedures.

b. Check area for hazardous conditions. Correct according to site procedures.

3. System exterior.

a. Ensure doors and electrical cabinet are closed.

b. Ensure system is on.

c. Check double containment lines for evidence of leaks. Repair leaks, as necessary.







April 2014 7-13

d. Ensure system exhaust is operating within the exhaust setpoints. Exhaust setpoints are field set and are located on the exhaust pressure switch in the corner of the gas compartment.

4. System operation.

a. Ensure system is in normal operating mode (automatic or manual).

b. Check alarm status. Acknowledge all alarms.

c. Review alarm and maintenance log.

5. Chemical section of system.

a. Check cabinet floor and system piping for leaks and spills. Correct according to site procedures.

b. Check chemical inlets and outlets on cabinet and drums for leaks or loose fittings. Correct according to site procedures.

c. Check system components for corrosion or chemical residue. Correct according to site procedures.

6. Electrical section of system.

a. Check system power.

b. Ensure data highway connections are solidly connected.

c. Check wiring compartment for corrosion, burns, or irregular odor. Correct according to site procedures.

d. Check for loose wire connections. Correct according to site procedures.

Verifying the Device Settings

Obtain the latest device settings list for the system (Device Reference List (page 3-12)). Investigate deviations in the device settings before resetting values.

Inspecting the device settings requires opening the system and taking the proper precautions to avoid chemical and electrical hazards.




• Device Settings Record Sheet

• Flow Schematics or P&ID

7-14 April 2014



2. Locate each device on the Device Settings List, and compare the actual setting with the recorded setting. Use the P&ID to aid in locating each device. See Mega SD100, Model 115 P&ID Schematic (page 8-5).

3. Record all deviations from the previously recorded settings on the Device Settings Record Sheet (page 7-45).

4. Consult with the Process Engineer to verify that deviations require correction.

5. Correct deviations, as required.

Adjusting the Humidifier Settings

An humidifier is essential to prevent slurry from drying on the sides of the tanks. An humidifier is functioning properly if drops of water are seen standing on the inside of the device and smaller water droplets are on the tubing going downstream from the device.

Malfunction can occur for several reasons:

• if the air pressure is too high or too low to create the mist

• the mist pad is clogged and the pad does not work correctly

• the drain is clogged

• if the water pressure is too high or low to create the proper mist, or if the water pressure is too high, the water sheets down the walls and no mist is created, subsequently, the mixture goes down the drain.

Inspecting the humidifier requires opening the system while observing the proper precautions to avoid chemical hazards. Record any adjustments to the humidifier on the Preventive Maintenance Form (page 7-42).


Note: A drain may require a P-trap so fumes do not backflow into the device from the house drain.





April 2014 7-15

2. Visually verify the humidifier is operating correctly. The water droplets should accumulate on the humidifier walls. There should be a minimal flow of water through the humidifier drain.

3. If the humidifier requires adjustments:

• record the original settings in the weekly section of the Preventive Maintenance Form (page 7-42), and

• adjust the humidifier CDA/N2 and DI water pressure. CDA/N2 pressure should always be greater than water pressure.

4. To measure the DI water flow rate, shut off the CDA/N2 supply and measure the volume of water draining from the humidifier drain line. The flow rate should be approximately 15 ml/min.

5. Record any adjustments to the humidifier on the Preventive Maintenance Form (page 7-42).

7-16 April 2014


Monthly Preventive Maintenance Procedures

Perform the following preventive maintenance procedures as part of the monthly maintenance schedule (Table 7-2, on page 42).

Checking Pump Operation

Pumps are configured in redundant sets to reduce possible downtime from pump failure. The redundant pump feature allows for maintenance of one pump without disruption of system operation. Redundant pumps perform automatic switch overs in the event of pump failure.

Pumps can malfunction due to poor maintenance (i.e., missing preventive maintenance based on runtime). Lack of maintenance can cause internal parts to fail. Other reasons for failure include running dry for long periods of time, dead heading, ingesting foreign objects, dried slurry particles, poor rebuilding techniques, or bad CDA/N2.

Ensure each pump operates correctly by running each pump and recording the operating pressure and flow rate (if available). Record the pump runtime from the Timer Configu-ration screen. Ensure the pump switchover function operates correctly for each redundant set of pumps. Ensure each pump is correctly set online or offline.

Checking the pump operation requires opening the system and taking proper precautions to avoid chemical and electrical hazards.

Refer to Isolating and Removing Pumps (page 7-34) for pump maintenance procedures.

Checking Leak Detectors

Leak detectors are a 24 VDC, teflon-coated, paperless sensor. They are wired in a fail-safe configuration. The leak detector should be correctly placed in the mounting bracket. Malfunction can occur due to bad wiring or it can stick. On the puck-style leak detector, a leak is indicated if the red LED is displayed. The bit LED goes out if there is a leak because the voltage drops, therefore, a spark is not created if the system chemical is flammable.


April 2014 7-17

Figure 7-3. Type of Leak Detector

Checking leak detectors requires taking the proper precautions to avoid chemical and electrical hazards.

Equipment Required • MSDSs for all system chemistry.





• Electrical schematics.

Puck-style leak detector

Float-style leak detector

7-18 April 2014



2. The leak detector LED should be green, indicating no leak. The corresponding input LED on the PLC should also be lit.

3. Spray a small amount of water on the leak detector with the hand sprayer. The LED should change to red, indicating a leak. The corresponding input LED on the PLC should turn off.

• If the sensor does not change, test the wiring with another leak detector.

• If the replacement sensor functions, the first sensor was faulty.

• If the replacement sensor does not function, check leak detector wiring.

4. Replace the leak detector or repair the wiring, if required.


Leak detectors are placed at the most likely spot to sense leaks. Chemical may be present. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such

as a lab coat, apron, or coveralls as recommended in the MSDS. Refer to the site MSDS for chemical-specific

information.


The exhaust effluent may contain chemical (vapor or liquid). Handle and treat to comply with safety and pollution control

regulations. Supplemental exhaust may be required for maintenance tasks.


April 2014 7-19

Liquid and Level Sensor Maintenance

The proper operation of liquid and level sensors is essential to the operation of the system. These sensors trigger process transitions in the sequence of operation and indicate alarm conditions. Liquid (e.g., Turck) sensors and level sensors (e.g., Omron) use an infrared signal through tubing to determine if air is present. Omron sensors, generally used on tanks, convert physical and mechanical action to an electrical signal.

• Malfunction can occur due to being moved out of position, lack of adjustment (proper adjustment is important for repeatability and to prevent false signaling), liquid getting inside (the cap over the adjustment hole is missing and the sensor fails), and if the face of the device is dirty it can miss the signal.

• Faulty sensors can lead to improper system operation, interruption of distribution, and catastrophic system failure. The sensors can deteriorate over time due to exposure to liquids, chemicals, and chemical fumes.

Calibrating the sensor locations to align with the sensitivity of an alarm is more critical to optimizing its performance than the LED reading on the part.

Figure 7-4. Liquid and Level Sensors

Take proper precautions to avoid chemical and electrical hazards when verifying sensor operation (opening s).

Note: Liquid sensors are not level detectors and function differently. These are not the same parts. Do not switch.

Liquid Line SensorBlend Tank

Level Sensor




• Electrical schematics.

7-20 April 2014


Adjusting Sensitivity of Line Liquid Sensors

This procedure describes how to calibrate the liquid sensors.

Adjusting the sensor requires opening the system and proper precautions be taken to avoid chemical and electrical hazards.


2. Activate the alarm override.


4. Attach the liquid sensor to the piping in its designated location and make the electrical connections.



• Nonconducting screwdriver or other device for adjusting liquid and level sensors.




coveralls as recommended in the MSDS. Refer to the site MSDS for chemical-specific information.





April 2014 7-21

5. Remove the protective cap on top of sensor to access the sensitivity screw.

6. Use one of the following methods to force the sensor to indicate air:

• Move the sensor to a pipe containing no liquid, or

• Use the Overview screen(s) to drain the pipe past the level of the liquid sensor.

7. Carefully rotate the sensitivity adjustment counterclockwise (low sensitivity) until the LED is green (air).

8. Rotate the sensitivity adjustment clockwise (high sensitivity) and stop immediately after the LED turns red (liquid).

9. Turn the sensor slightly counterclockwise until the LED is green (air).

10. Replace the protective cap on the sensor.

Calibrating the Tank Level Proximity Sensors

This procedure describes how to calibrate the proximity sensors.

Calibrating the sensor requires taking proper precautions to avoid chemical and electrical hazards.

NOTICEDO NOT LOSE THE PROTECTIVE CAP!

The protective cap on the sensitivity adjustment protects the component from liquid, chemical, and vapor damage.

CAUTIONEQUIPMENT DAMAGE!

Replace the sensitivity screw cap immediately after calibration. The cap protects the sensor from liquid, chemical, and vapor

damage.



• Nonconducting screwdriver or other device for adjusting liquid and level sensors.


7-22 April 2014




3. Attach the liquid sensor to the mount 1⁄16” to 1⁄8” from the tank or pipe and make electrical connections. Use a device to correctly space the sensor from the target (e.g., a company ID badge width is typically sufficient).

4. Remove the protective cap on top of sensor to access the sensitivity screw.

5. Use a nonconducting screwdriver to adjust the sensitivity screw. Conductive screwdrivers, acting as a second dielectric, can cause faulty triggers.

6. Use one of the following methods to trigger the sensor to indicate no liquid:

• Mark the original location of the sensor to verify correct placement later. Move the sensor above the liquid level. Ensure the sensor is exactly the same distance from the tank as it will be in its final location, or



coveralls as recommended in the MSDS. Refer to the site MSDS for chemical-specific information.




NOTICEDO NOT LOSE THE PROTECTIVE CAP!

The protective cap on the sensitivity adjustment protects the component from liquid, chemical, and vapor damage.


April 2014 7-23

• Drain the tank until the liquid level is below the level of the sensor using the Abort function.

7. Turn the sensitivity screw clockwise until the sensor turns on (light illuminates).

8. Use one of the following methods to trigger the sensor to indicate liquid:

• Move the sensor below the liquid level. Ensure the sensor is exactly the same distance from the tank as it will be in its final location. Mark the original location of the sensor to ensure correct placement later, or

• Fill the tank until it is above the level of the sensor by blending and/or transferring a batch or using the Overview screen(s).

9. Turn the sensitivity screw counterclockwise until the sensor turns off (light turns off). Note the number of revolutions between the on and off locations.

• If the number of revolutions is more than 1 1⁄2, the sensor has stable output and no calibration is necessary. Skip to Step 13.

10. If the number of revolutions is less than 1 1⁄2, calibration is required:

a. Increase the distance between the target and sensing face to allow 1 1⁄2 revolutions between on and off.

b. Repeat the calibration procedure until the number of revolutions is greater than 1 1⁄2.

11. Turn the sensitivity screw clockwise half of the revolutions between the on and off positions.

12. Replace the protective cap and move the sensor to its original location.

13. Repeat the Calibrating the Tank Level Proximity Sensors (page 7-21) procedure to ensure the sensor is accurate. If necessary, repeat the calibration procedure. If the sensor is not accurate after three (3) calibrations, test the sensor, and replace if necessary.

NOTICEOBTAIN APPROVAL BEFORE ALTERING THE TANK LEVEL!

Consult with a supervisor before manually adjusting the tank level.

7-24 April 2014


Adjusting the Ultrasonic Level Transmitter

The ultrasonic level transmitter provides non-contact level measurement up to 18 feet (5.4 meters), and is ideally suited for challenging corrosive, slurry, or waste liquids. The transmitter is typically used for atmospheric bulk storage, day tank, and waste sump applications located within a classified hazardous area.

Figure 7-5. Ultrasonic Level Transmitter

These procedures describes how to change the display units.

The ultrasonic level transmitter is preset to measure in inches. Follow these steps to change the unit to display centimeters.

1. Remove power to the transmitter and wait 10 seconds.

2. Press [▲] and [Set] simultaneously while powering up the transmitter. The transmitter now reads in centimeters.

To change the transmitter to display inches:

1. Remove power to the transmitter and wait 10 seconds.

2. Press [▼] and [Set] simultaneously while powering up the transmitter. The transmitter now reads in inches.

Inspect these items to correct a lost transmitter signal.

• Beam cone interference, such as the side wall, ladders, seams, rungs, or pipes within the transmitter’s beam cone.

• The unit is free from interference from the installation fitting or flange.

• 12-36 VDC sufficient power with a minimum supply of 25 mA is applied to the unit.

• MAXR or MINR function programming. For best results, set the MAXR function as the distance from the bottom of the tank to the bottom of the transmitter. Set the MINR distance above the highest level in the tank. Do not set MINR to less than 6 inches.

• Verify that the transmitter is not installed at an angle. Even a five degree offset can greatly reduce the signal return strength.


April 2014 7-25

Quarterly Preventive Maintenance Procedures

Perform the following preventive maintenance procedures as part of the quarterly maintenance schedule (Table 7-2, on page 42).

Testing Alarms

Alarms in the system indicate critical errors, process problems and information. The proper functioning of all critical alarms helps ensure the safe operation of the system.

Testing the alarms requires opening the system and taking proper safety precautions to avoid chemical and electrical hazards. See the Alarms and Warnings (page 6-1) chapter for a listing of all alarms. Trigger alarms using the actions described in the Possible Reason column.

.

NOTICENOTIFY ALL APPROPRIATE PERSONNEL AND OBTAIN APPROVAL

BEFORE TESTING ALARMS!

Triggering critical alarms may alert fab security and safety personnel, and possibly cause an evacuation. Notify affected personnel and obtain all

required approval before testing alarms.


The exhaust effluent may contain chemical (vapor or liquid). Handle and treat to meet compliance with safety and pollution control regulations. Supplemental exhaust may be required for

maintenance tasks.

7-26 April 2014


Valves and Pressure Gauges

Numerous types of valves are used to control the flow of chemical, DI water, slurry, CDA/N2 throughout the system. The valves include:

• automatic• manual• diverter• check• needle• ball• relief• pressure relief valve• flow indicator control valve, and • electric solenoid.

Automatic valves control process flow. Solenoid valves control the flow of CDA/N2 to the automatic valves. Manual valves, ball valves, and needle valves are used for isolation and shutoff. Diverter valves are used for samples and slipstreams. Check valves protect supply lines from contamination. Relief valves protect gas lines from over-pressurization.

Electrical Solenoid Valves (EV)

The electrical solenoid valves are not activated when the computer bit LED is Off and the associated valve LED is Off. Both LEDs are illuminated with the computer commands the EV and AV to activate. EVs include a button for manual activation.

Figure 7-6. Electrical Solenoid Valves

Top label corresponds to top valve.

Bottom label corresponds to bottom valve.


April 2014 7-27

Malfunction occurs due to air leaking around the seals, chattering, weak local LED brightness, liquid from the exhaust, or the EV activates but does not fully shut off the associated AV. Refer to the Mega SD100, Model 115 Electrical Schematic (page 8-6). to match EV to AV devices.

Automatic Valves (AV)

Automatic valves operate by sending a 24 volt signal to the selected EV. The EV solenoid opens and the CDA/N2 flows to the selected AV. The AV valves are controlled by incoming CDA/N2 pressure, regulators, relieve valves, EVs, and air lines. Malfunction occurs if there are air line leaks, air line connector leaks, the air pressure is too low to hold the AV open, internal diaphragm leaks occur, or the return spring has lost its tension.

Figure 7-7. Automatic Valves

To troubleshoot the electrical or pneumatic command, put the AV in computer Manual mode to confirm correct output card and EV operation, and then check the air line for leaks with the local pressure gauge online, or move the air line to a different valve to confirm the valve is operating correctly when other factors are running normally.

Check Valves (CV)

Liquid check valves operate with a disk or ball system and are used to ensure that fluid is flowing in the correct direction.

Figure 7-8. Check Valve

Check valves are placed where back streaming could cause cross contamination of chemicals, slurry, CDA/N2, or water. The directional arrow is stamped in ink on the label so carefully observe the direction to prevent installing a valve backwards.

7-28 April 2014


Manual Valve (MV)

Manual valves operate by hand.

Figure 7-9. Manual Valve

Pressure Relief Valve

Pressure relieve valves are located on the gas lines to protect devices on the line. Test this device as part of the Annual Preventive Maintenance (Table 7-2, on page 42). The test is completed by increasing the inlet pressure with the regulator until the pressure is just above the bypass value. The seat retracts against the spring and gas escapes. Over time the seat material may stick and must be exercised to remain functional (refer to Adjusting the Relief Valves (page 7-30).

Figure 7-10. Pressure Relief Valve Examples

A failing pressure relief valve results in complete failure of downstream devices, injury may occur, and the devices must be replaced.

Locking screw maintains settings

Adjustable spring

Fully contained o-ring sealAdjusting screw sets cracking pressure

When system pressure overcomes spring force, poppet opens. As pressure continues to rise, variable orifice between poppet and body increases, allowing greater flow.

Seal prevents leakage. Sealing efficiency increase with increased pressure up to cracking pressure. Metal-to-metal poppet stop supports spring load, prevents sticking.


April 2014 7-29

Gas Line Maintenance

All components on each gas line should be checked for proper operation to prevent high gas pressure hazards and low pressure operation failures. Gas line maintenance includes checking the operation of the regulators, pressure switches, relief valves, and flow regulators.

Checking the gas line components requires opening the gas cabinet doors. All other doors must remain closed. Checking the gas line components may expose the operator to pressure hazards. Placing the system in Manual mode disrupts distribution.

Checking the Gas Line Components


2. Open the gas cabinet door. Ensure all other cabinet doors remain closed. Open doors may expose the operator to potential hazards.

3. If the line is equipped with a low-pressure switch, check the low-pressure switch before checking the high pressure switch or other components:

a. Decrease the regulator pressure until it is less than the low-pressure switch setting.

b. It may be necessary to vent the line to reach the low-pressure switch setting. Vent the line by operating a valve in Manual mode, running a pump, or opening a vent line valve to drain.

c. Ensure the low pressure alarm is activated at the correct line pressure. The alarm may be equipped with up to a 10 second delay. Provide adequate time for the alarm to activate.




• Device Reference List (page 3-12)

• 4 mm Allen wrench.


Open the door to the gas compartment only. Leave all other cabinet doors closed to protect from potential hazards.

7-30 April 2014


d. If the alarm is not activated at the correct pressure, adjust or replace the pressure switch.

4. If the line is equipped with a high-pressure switch:

a. Increase the regulator pressure until it is greater than the high-pressure switch setting.

b. Ensure the high-pressure alarm is activated at the correct line pressure. The alarm may be equipped with up to a ten second delay. Provide adequate time for the alarm to activate.

c. If the alarm is not activated at the correct pressure, adjust or replace the pressure switch.

Adjusting the Relief Valves

The relief valve is a device used in the CDA/N2 compartment to prevent high pressure buildup in the air lines. The relief valve will crack and relieve the air line when pressure exceeds the setpoint for the device. Also see Valves and Pressure Gauges (page 7-26).


2. Open the gas cabinet door. Ensure all other cabinet doors remain closed. Open doors may expose the operator to potential hazards.

3. Remove the allen lock nut with a 4 mm allen wrench.

4. Set the regulator pressure 1–2 psi below the relief valve setpoint.


Open the door to the gas compartment only. Leave all other cabinet doors closed to protect the operator from potential

hazards.Release line pressure before replacing components.

NOTICEDO NOT COMPLETELY REMOVE ADJUSTMENT NUT!

Avoid removing the adjustment nut from valve body as it is difficult to replace.


April 2014 7-31

5. Tighten the adjustment nut to increase pressure; loosen the adjustment nut to decrease pressure. Do not remove the adjustment nut from the valve body, it is difficult to replace. The nut is correctly adjusted when the relief valve begins leaking air 1–2 psi below the relief valve setpoint. Remove the allen wrench from the adjustment nut to verify the flow of gas.

6. Install the locking allen nut.

7. Set the pressure regulator to the desired relief pressure.

8. Test with the CDA/N2 pressure at the desired setting.

9. Repeat the procedure until the desired setting is achieved.

10. Increase the regulator pressure until it is 1–2 psi below the relief valve setting. The relief valve should begin to release gas.

11. Increase the regulator pressure until it is at the relief valve setting. The relief valve should be at full release. It the relief valve is activated at the correct pressure, adjust or replace the relief valve.

12. Return all components to their original device settings on the device list.

13. Repair or replace pressure switches, as required.

14. Repair or replace relief valves, as required (refer to Adjusting the Relief Valves (page 7-30).

7-32 April 2014


Semi-Annual Preventive Maintenance Procedures

Perform the following preventive maintenance procedures as part of the semi-annual maintenance schedule (Table 7-2, on page 42).

Fittings

Flare and threaded fittings can loosen due to system vibrations. Teflon fittings should be hand-tightened to prevent the development of leaks. Stainless steel fittings should be checked with a NO-GO gap gauge. Record the location of any fittings that require tightening.

Inspecting the fittings requires opening the s. Take the proper precautions to avoid chemical and electrical hazards. Place the system in Manual mode and open all drain fittings to relieve all pressure from the chemical lines before replacing fittings.

Checking the Fittings







• Flow schematics.

WARNINGELECTRICAL HAZARD — TYPE 3!

Risk of exposure to hazardous electrical current. Use extreme caution when performing preventive maintenance procedures to

avoid accidental contact with energized parts.


April 2014 7-33

2. Ensure all fittings are tight. Loose plastic fittings should be hand tightened. Stainless steel fittings should be checked with a NO-GO gap gauge. Overtightening the fittings may strip the threads. If the fitting leaks after it is tightened, replace it.

3. Place the system in Automatic operation and check for leaks.

Replacing Fittings



3. Flush and purge the pipes in the area of the repair.

4. Vent the line pressure by opening valves to the drain or exhaust.

5. Close the closest isolation valves in order to isolate the fitting.

6. Lockout/tagout the isolation valves.

7. Remove the leaking fitting and the necessary plumbing.

8. Replace the leaking fitting and install removed plumbing.

9. Remove the lockout/tagout devices.

10. Open the isolation valves.

11. In Manual mode, fill the repaired area with liquid (or gas) and check for leaks.

• If the fitting leaks, ensure the fitting is tight.

• If the fitting still leaks, return to Step 3.

12. Flush and purge the pipes in the area of the repair.

CAUTIONPRESSURE HAZARD!

Relieve pressure in lines before loosening and replacing fittings.

NOTICEAVOID OVERTIGHTENING FITTINGS!

Overtightening fittings may strip the fitting threads. Fittings should be hand tightened.

7-34 April 2014


Rebuilding Pumps

Refer to the specific pump manufacturer literature for rebuilding pumps. Follow procedure steps for isolation and removing pumps before rebuilding any pump.

Isolating and Removing Pumps

Use this procedure to safely isolate and remove pumps from the system.

Some pump adjustments do not require disabling the system. However, in most cases, repairs require removing the system from operation and preparing it for repair in a safe manner. If the system must be powered down for repair, follow the company electrical lockout/tagout procedures.


2. Remove the applicable pump from service.

3. Close and lockout/tagout the pump inlet and outlet isolation valves.

4. Open the pump drain valve, and then open the pump flush/purge access valve for a vent and allow pump to gravity drain.

5. Connect a hose between the pump flush/purge access valve and the CDA/N2 access port valve. Open valves to purge the isolated pump with CDA/N2 for one minute.

6. Close the pump flush/purge access valve and CDA/N2 access port valve. Disconnect hose between valves.

WARNINGSOBTAIN PRIOR APPROVAL!

If pump removal affects distribution, obtain the appropriate approval before proceeding. Notify all affected personnel.


Removing pumps may expose the user to hazardous chemicals. Wear acid-resistant gloves, chemical safety goggles and full-

face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Use extreme caution when removing pumps. Refer to the site MSDS for chemical-

specific information.


April 2014 7-35

7. Connect a hose between the pump flush/purge access valve and the DI water flush access valve. Open valves to flush the isolated pump with DI water for one minute.

8. Close the pump flush/purge access valve and DI water flush access valve. Disconnect the hose between valves.

9. Connect a hose between the pump flush/purge access valve and the CDA/N2 access port valve. Open valves to purge the isolated pump with CDA/N2 for one minute.

10. Close the pump flush/purge access valve and the CDA/N2 access port valve. Disconnect the hose between the valves.

11. Remove the pump from the system for repair or replacement.

12. Decontaminate the pump according to site specific procedures.

13. Rebuild or repair the pump, as necessary.

14. Replace the pump. Close the pump drain valve.

15. Use the hand sprayer to clean or remove any chemical still visible in the cabinet interior.

16. Remove the lockout/tagout devices. Open the pump inlet and outlet isolation valves.

17. The pump is now available for service.

7-36 April 2014


Annual Preventive Maintenance Procedures

Perform the following preventive maintenance procedures as part of the annual maintenance schedule (Table 7-2, on page 42).

Lithium Battery

The PLC uses a replaceable lithium battery for backup RAM power. This battery provides backup for approximately two (2) years. The BATT LED on the front of the processor illuminates when the battery voltage has fallen below the threshold level, and the PLC Battery Low alarm is activated. The battery can be either replaced as part of the Annual Preventive Maintenance (Table 7-2, on page 42), or when the battery alarm is activated.

Figure 7-11. Lithium Battery

Replacing the battery requires the system to be completely powered down. A capacitor on the processor card maintains the program in RAM for approximately 20 minutes. If the procedure exceeds this limit, the program may be lost from RAM.

Replacing the Lithium Battery

1. Remove power from the PLC power supply.

Equipment Required • Acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS.

• Replacement battery

• Battery disposal equipment.

WARNINGCHEMICAL AND FIRE HAZARD!

Read Guidelines for Handling Lithium Batteries for information regarding handling and disposing of lithium batteries.


April 2014 7-37

a. Obtain authorization to shut the system down.

b. Toggle the A/C disconnect switch to Off.

c. Lockout/tagout the A/C disconnect switch.

2. Remove and replace the battery.

3. Dispose of the battery (refer to Disposing the Lithium Battery (page 7-37)).

4. When all maintenance procedures are complete, restore power to the PLC power supply.

a. Remove the lockout/tagout devices.

b. Toggle the A/C disconnect switch to On.

c. Start up the system.

5. If the system does not start up correctly, repeat procedures to ensure connections are routed correctly.

Disposing the Lithium Battery

The PLC provided on the Mega SD100, Model 115 is supplied with a lithium battery that must be replaced it becomes depleted. Carefully inspect the depleted battery casing for damage and/or signs of electrolyte leakage.

NOTICEREMOVE POWER FROM THE SYSTEM!

Do not remove the processor from the PLC chassis until all power is removed from the PLC power supply.

WARNINGFIRE HAZARD!

Do not incinerate or dispose batteries in general trash collection. They may explode or rupture.

Check state and local regulations dealing with the disposal of lithium or nickel cadmium batteries. You are legally responsible

for the hazards created by improper battery disposal.

7-38 April 2014


EMO Testing

The EMO provides the operator with a means to shut down the system in emergency situations. Activating the EMO shuts the system down and disrupts distribution.

Figure 7-12. Emergency Machine Off (EMO) Button


2. Press the EMO button. Ensure the system completely powers down.

3. Restart the system.



- OR -


April 2014 7-39

Completing Preventive Maintenance Procedures

Perform the following preventive maintenance procedures as part of the Completing Preventive Maintenance schedule (Table 7-2, on page 42).

Cabinet Cleaning

Clean the cabinet after all other PM procedures are completed. Cabinet cleanliness is necessary for accurate visual inspections.

Cleaning the cabinet requires opening the system and taking proper precautions to avoid chemical and electrical hazards. Follow all site-specific procedures during the cabinet cleaning.


2. Rinse all chemical residue from the cabinet interior using the hand sprayers or wipes saturated in 10% IPA solution.

3. Thoroughly dry the cabinet interior.

4. Wipe the cabinet exterior clean.

5. Dispose of all wipes according to site requirements and MSDS recommendations.

NOTICECLEAN THE CABINET LAST!

Cleaning the front of the cabinet and the system should be completed after all other PM procedures are done to avoid repeating the procedure.






• DI water or 10% IPA solution.

7-40 April 2014


Maintenance Forms

The following is a list of the forms included in this section:

• Work Order Form

• Preventive Maintenance Form

• Device Settings Record Sheet

• System Data Value Record Sheet


April 2014 7-41

Work Order Form

The following example can be used for notifying and scheduling system service.

Table 7-1. Work Order Form Example

Work Order #: System ID:

Location: Serial Number:

Technician: Chemical:

Start Date: End Date:

Frequency (circle one): Weekly/Monthly/Quarterly/Semiannual/Annual

7-42 April 2014


Preventive Maintenance Form

The preventive maintenance form is a comprehensive list which includes all recommended preventive maintenance items. The list is divided into weekly, monthly, quarterly, semiannual, and annual sections. As each item in the list is completed, record any values or comments in the Comments column. Record any values or comments in the Comments column. Initial each item in the list as it is completed. When the preventive maintenance is complete, follow the instructions for returning the equipment to Automatic operation. Obtain the appropriate signatures, as required, by site-specific policies and procedures.

Table 7-2. Preventive Maintenance List

Preventive Maintenance Task Comments Initials

Weekly

1. Complete the Visual System Inspection procedure. Record all issues.

2. Check all system Device Settings. Refer to the Device Reference List. Investigate and record any deviations from normal settings.

3. Verify proper Humidifier operation. Adjust as necessary. Record any adjustments made.

a. Mega SD100, Model 115 Humidifier CDA/N2 psi.

b. Mega SD100, Model 115 Humidifier DI water psi.

4. Record system Data values on the System Data Value Record Sheet.

5. Go to Completing Preventive Maintenance in this form to complete weekly preventive maintenance steps.

Monthly

6. Complete pump maintenance.

a. Pump S01-A operating pressure.

b. Pump S01-C operating pressure.

c. Pump S02A-C operating pressure

d. Pump S02B-C operating pressure.

e. Pump S02-A operating pressure.

f. Pump S02-B operating pressure.

g. Pump S01-A runtime

h. Pump S01-C runtime

i. Pump S02A-C runtime.

j. Pump S02B-C runtime.

k. Pump S02-A runtime.

l. Pump S02-B runtime.

m. If required, repair, replace, or schedule pump maintenance.


April 2014 7-43

7. Check the leak detectors for proper operation. Adjust sensors as needed.

8. Verify tank weight. If the tank scale requires calibration, refer to the HIPS Series Platform Scales Operation and Installation Manual.

9. Verify liquid and level sensors operating properly. Adjust or replace as necessary.

10.Go to Completing Preventive Maintenance in this form to complete monthly preventive maintenance steps.

Quarterly

11.Verify operation of all critical alarms.

12.Check operation of regulators, pressure switches, relief valves, and flow regulators.

13.Go to Completing Preventive Maintenance in this form to complete quarterly preventive maintenance steps.

Semiannual

14.Tighten all system fittings (refer to Fittings (page 7-32).

a. Record loose fittings.

b. Repair or replace leaking fittings or schedule maintenance. Record fittings repaired or replaced.

15.Rebuild sump pump. Reset pump runtime after rebuild. Record the serial number, date, and parts replaced.

16.Go to Completing Preventive Maintenance in this form to complete semi-annual preventive maintenance steps.

Annual

17.Replace lithium battery. Refer to Lithium Battery (page 7-36).

18.Verify operation of EMO. Refer to EMO Testing (page 7-38).

19.Go to Completing Preventive Maintenance in this form to complete annual preventive maintenance steps.

15-Months

20.Replace pump impeller (Manufacturer recommended).

a. Pump S01-A.

b. Pump S01-C.

c. Pump S02A-C.

d. Pump S02B-C.

e. Pump S02-A

f. Pump S02-B

Table 7-2. Preventive Maintenance List (continued)


7-44 April 2014


Completing Preventive Maintenance

21.Clean front of cabinet and s. Use DI water or 10% IPA solution only. Refer to Cabinet Cleaning (page 7-39).

22.Close the cabinet doors and electrical hood.

23.Cancel the alarm bypass if activated.

24.Ensure the system is ready for Automatic operation.

25.Return the system to Automatic operation.

Preventive Maintenance Sign-off

Personnel Signature Date

Technician 1:

Technician 2:

Supervisor:

Table 7-2. Preventive Maintenance List (continued)



April 2014 7-45

Device Settings Record Sheet

Table 7-3.

Work Order #:

System: Serial Number:



Table 7-4. Mega SD100, Model 115 Device Reference List

P&ID Location

Type Number State Description Initials

1C6 AV D06A-X NC Pneumatic Valve, 2-way, Pump S02A-X to Drain

1C5 AV D06B-X NC Pneumatic Valve, 2-way, Pump S02B-X to Drain

1C13 AV G01-X NO/NC Pneumatic Valve, 3-way, CDA Supply to Pump S01-X

1C7 AV G02A-X NO/NC Pneumatic Valve, 3-way, CDA Supply to Pump S02A-X

1B6 AV G02B-X NO/NC Pneumatic Valve, 3-way, CDA Supply to Pump S02B-X

1B8 AV S01A-X NC Pneumatic Valve, 2-way, Pump S02A-X Inlet Isolation

1B8 AV S01B-X NC Pneumatic Valve, 2-way, Pump S02B-X Inlet Isolation

1E11 AV S02-X NC Pneumatic Valve, 2-way, Tank 01-X Slurry Inlet Isolation

1E12 AV S03-X NC Pneumatic Valve, 2-way, Drum #1 Return Isolation

1D7 AV S07A-X NC Pneumatic Valve, 2-way, Pump S02A-X Exit Isolation

1D5 AV S07B-X NC Pneumatic Valve, 2-way, Pump S02B-X Exit Isolation

1D8 LSH S04-X ----- Level Sensor, Tank, High

1D8 LSHH S05-X ----- Level Sensor, Tank, High High

1C8 LSL S03-X ----- Level Sensor, Tank, Low

1D9 LT S06-X ----- Level Sensor, Tank, Ultrasonic

1D9 MC S01-X Field Set Mixer, Tank 01-X

1B10 MV D01-X Closed Manual Valve, 2-way, Tank 01-X Gravity Drain Isolation

1F4 MV D02-X Closed Manual Valve, 2-way, Drum Diptube Sink Gravity Drain Isolation

1C11 MV D06-X Closed Manual Valve, 2-way, Pump S01-X to Drain

7-46 April 2014


1G15 MV G01-X Closed Ball Valve, 2-way, CDA Supply to Pump S01-X Isolation

1F15 MV G02-X Closed Ball Valve, 2-way, CDA Supply to Pump S02A-X Isolation

1F15 MV G03-X Closed Ball Valve, 2-way, CDA Supply to Pump S02B-X Isolation

1C12 MV S01-X Closed Manual Valve, 2-way, Pump S01-X Exit Isolation

1G6 MV S07-X Closed Manual Valve, 2-way, Slurry Loop Supply Isolation

1G9 MV W01-X Closed Manual Valve, 2-way, DI Water Supply Isolation

1F9 MV W02-X Closed Manual Valve, 2-way, Tank 01-X DI Water Inlet Isolation

1F9 MV W03-X Field Set Needle Valve, 2-way, Handsprayer DI Water Inlet

1G9 MV W04-X ----- Handsprayer, DI Water

1G5 MV W05-X Closed Manual Valve, 2-way, Multi-turn, Drum Diptube Sink DI Water Inlet Isolation

1G14 PCV G01-X 45 PSIG Regulator, CDA To Pump S01-X

1F14 PCV G02-X 45 PSIG Regulator, CDA To Pump S02A-X

1F14 PCV G03-X 45 PSIG Regulator, CDA To Pump S02B-X

1G14 PS G01-X 40/50 PSIG

Pressure Indicating Switch, Low/High, CDA to Pump S01-X

1F14 PS G02-X 40/50 PSIG

Pressure Indicating Switch, Low/High, CDA to Pump S02A-X

1F14 PS G03-X 40/50 PSIG

Pressure Indicating Switch, Low/High, CDA to Pump S02B-X

1D12 PS S01-X 5/60 PSIG

Pressure Indicating Switch, Low/High, Pump S01-X Discharge

1E6 PS S02-X 5/60 PSIG

Pressure Indicating Switch, Low/High, Pump S02A-X/S02B-X Discharge

1G13 PSV G01-X 70 PSIG Relief Valve, CDA to Pump S01-X

1F13 PSV G02-X 70 PSIG Relief Valve, CDA to Pump S02A-X

1F13 PSV G03-X 70 PSIG Relief Valve, CDA to Pump S02B-X

1B12 Pump S01-X ----- Pump, Diaphragm, Slurry Drum

1C7 Pump S02A-X ----- Pump, Diaphragm, Primary Slurry Discharge

1B5 Pump S02B-X ----- Pump, Diaphragm, Secondary Slurry Discharge


P&ID Location



April 2014 7-47

1B13 YS S01-X ----- Sensor, Presence, Drum Slurry Supply

1B10 YS S02-X ----- Sensor, Presence, Tank 01-X Empty

1A13 YSS X01-X ----- Leak Detector, Process Cabinet (High)


P&ID Location


7-48 April 2014


System Data Value Record Sheet

Work Order #:

System: Serial Number:



Date/Time Tank Volume

Tank Temp

Dist Filter Press

Supply pH

SGU Supply Flow

Supply Press

Return Press

Mid-Loop Press

April 2014 8-1

Chapter 8: Schematics


Legend ...................................................................................................8-3

Mega SD100, Model 115 P&ID Schematic..............................................8-5

Mega SD100, Model 115 Electrical Schematic .......................................8-6

Mega SD100, Model 115 Facilities Schematic ........................................8-9

8-2 April 2014

Schematics Mega SD100, Model 115

Mega SD100, Model 115 Schematics

April 2014 8-3

Legend


8-4 April 2014


April 2014 8-5

Mega SD100, Model 115 P&ID Schematic

GRAVITYDRAIN

PRESSURIZEDDRAIN

DRUM#1

55 GAL

VB

265L

TANK-01-X

3/4" TF

MIXER MCS01-X

1/2" TF

AVS01A-X

AVS07A-X

02

PUMPS02A-X

AVD06A-X

AVS01B-X

PUMPS02B-X

03CDA

1/2" TF

1" TF

01

PUMPS01-X

MVD01-X

PSS01-X

S01-X

PIPSL

3/8" TF

AVG02B-X

CDA

AVD06B-X

AVS07B-X

SBDSUPPLY

SBDRETURN

3/4" TF

3/4" TF

3/4" TF

3/4" TF

MVW01-X

1/2" TF

1/2" SS

CDASUPPLY

013/8" TF

G02-X

PSHPSL

3/8" TF

3/8" TF

PI

PCVG01-X

PI

PCVG02-X

PSVG02-X

PSVG03-X

G01-X

PSHPSL

PSVG01-X

G03-X

PSHPSL

02 PUMPS02A-X

03 PUMPS02B-X

PI

PCVG03-X

3/4" TF

HUMID N2FROM SBD

DI WATERSUPPLY

MVW02-X

MVW04-X

MVW03-X

3/8" TF

1/2" TF

PSS02-X

S02-X

PIPSL

YSSX01-X

PROCESS CABINETLEAK (H)

PUMPS01-X

CDA

S01

LI

1/2" TF

MVD06-X

1" TF

MVS01-X

AVS03-X

AVS02-X

PI

PIG01-X

PI

PIG02-X

PI

PIG03-X

HUMID N2FROM SBD

HUMID N2FROM SBD

3/8" TF

1/2" TF

3/8" TF

MVD02-X

1/2" TF

MVW05-X

MVS07-X

DRUMSINK

OF

REF

DWG NO

ENGINEER

SIZE

TITLE

REV

FILE SHEET

DATE

3 2 15 4678910111213141516

E

D

C

B

A

F

G

H

3 2 15 4678910111213141516

E

D

C

B

A

F

G

H

REV ECO DRAWN BY DATE

004 100227 NGR 3/13/14

UNLESS OTHERWISE SPECIFIED:ALL DIMS IN MM [INCHES].DO NOT SCALE DRAWING.

P&ID,SD100, MODEL 115W/ BUFFER TANK

N. ROURKE 10/15/13

216-00388-0001 1004

--

B

3/13/2014 10:05:52 AM

NOTES: UNLESS OTHERWISE SPECIFIED

KEYED NOTES:

DESCRIPTION

VALVE & PT POSITION SWAPPED

004

216-00388-000 005-0 P&ID, SD100, MODEL 115


8-6 April 2014

Mega SD100, Model 115 Electrical Schematic

5L3

AC DISCONNECT

6T3

3L2 4T2

1L1 2T1

M1A1 A2

L1

L2

L3

T1

T2

T3

CB011B1A

8AL1

N

GND

POWER1Ø 3 WIRE120VAC15AMP

MIXERMOTOR

CONTROLLER

A1000,BLK14AWG

A0000,WHT14AWG

G001,GRN/YEL14AWG

A1001,BLK14AWG

A1002,BLK

A0002,WHT

-4, VIO

101,BLU

RED

BLK

BRN

ORG

YEL

GRN

BLU

VIO

GRY

WHT

TAN

PNK

SHLD

TOSBD35

ELECTRICALCABINET

OMRON E2K-C25ME2120-25378-000LIQUID LEVEL SENSORN.C.

LSH S05-XA

LSH S05-X

BUFFER TANK LEVEL HIGH

OMRON E2K-C25ME1120-25391-000LIQUID LEVEL SENSORN.O.

LSM S04-XA

LSM S04-X

BUFFER TANK LEVEL MID

OMRON E2K-C25ME1120-25391-000LIQUID LEVEL SENSORN.O.

LSL S03-XA

LSL S03-X

BUFFER TANK LEVEL LOW

102,WHT

-4 ,RED

-5 ,BLK

103,WHT

-4 ,RED

-5 ,BLK

104,WHT

-4 ,RED

-5 ,BLK

N/C

CONTINUEDON SHEET 2

G002,GRN/YEL14AWG

TO CDASTAINLESSTUBING

123

123

BRNBLKBLU BLK

WHTRED

123

123

BRNBLKBLU BLK

WHTRED

123

123

BRNBLKBLU BLK

WHTRED

LSH S05-XB

120-25481-000

LSH S04-XB

120-25481-000

N/C

N/C

INTERCONNECTCABLE #1

LSL S03-XB

120-25481-000

A1003,BRN

A0003,BLU

G004,GRNG003,GRN

A1004,BLK

A0004,WHT

G005,GRN

MIXERMOTOR

-4

101

L1

N

GND

-4

-4

-4

-4

-5

-5

-5

-5

102

103

104

120-25481-000


KEYED NOTES:

CABLE INCLUDED INSHIP-WITH KIT290-36367-000

DESCRIPTION

-ADDED P/N FOR MIXER POWERCABLE-CORRECTED WIRE COLOR ONMIXER POWER CABLE

OF

REF

DWG NO

ENGINEER

SIZE

TITLE

REV

FILE SHEET

DATE

3 2 15 4678910111213141516

E

D

C

B

A

F

G

H

3 2 15 4678910111213141516

E

D

C

B

A

F

G

H


004 CP38002 DAB 1/27/14

UNLESS OTHERWISE SPECIFIED:ALL DIMS IN MM [INCHES].DO NOT SCALE DRAWING.

SCHEMATIC, ELECTRICALSD100 MODEL 115

----

D. BECK 10/15/13

217-00532-0001 3004

--

B

2/24/2014 10:09:51 AM

1

1

004

004


April 2014 8-7

PRESCENCE SENSOR

TURCK BC10-QF385-22006-000

N.O.

YS S02-XA

YS S02-X

BUFFER TANK EMPTY

PRESCENCE SENSOR

TURCK BC10-QF385-22006-000

N.O.

YS S01-XA

YS S01-X

BUFFER DRUM EMPTY

MEGA RS-1000120-25386-000LEAK DETECTOR

YSS X01-XA

YSS X01-X

BUFFER TANK CABINET LEAK

SMC120-38469-000PRESSURE TRANSDUCERN.O./N.C. & 4-20mA

ISE80-N02L-S

PS S02-XA

PS S02-X

PUMP S06A/B PRESSURE LOW

105,WHT

-4,RED

-5,BLK

106,WHT

-4,RED

-5,BLK

107,WHT

-4,RED

-5,BLK

108,WHT

-4 ,RED

-5 ,BLK

FROMSHEET 1

BLU

VIO

GRY

WHT

123

123

BRNBLKBLU BLK

WHTRED

123

123

BRNBLKBLU BLK

WHTRED

123

123

4 4

REDWHTYEL GRN

WHTRED

SHLD BLK

123

123

4 4

BRNBLKWHT GRN

WHTRED

BLU BLK

YS S02-XB

120-25481-000

YS S01-XB

120-25481-000

CONTINUEDON SHEET 2

YSY X01-XB

120-25482-000

PS S02-XB

120-25482-000

-4

-4

-4

-4

-5

-5

-5

-5

105

106

107

108


KEYED NOTES:

OF

DWG NOSIZE

TITLE

REV

SHEET

3 2 15 4678910111213141516

E

D

C

B

A

F

G

H

3 2 15 4678910111213141516

E

D

C

B

A

F

G

H


004 CP38002 DAB 1/27/14


----

217-00532-0002 3004B

DESCRIPTION


8-8 April 2014

ULTRASONIC X-MITTER

LU20-5001-IS120-32499-000

4-20 mA

LT-S01

LT-S01

TANK LEVEL INDICATION

116,BLK

-4,RED

SHLD120-25483-000

ADSENS AP20P-02-F2-QD-A107-30252-000PRESSURE TRANSDUCERN.O.

PS G01-X

PS G01-X

CDA TO PUMP S01-X HI/LOW


PS G02-X

PS G02-X

CDA TO PUMP S02A-X HI/LOW


PS G03-X

PS G03-X

CDA TO PUMP S02B-X HI/LOW

SMC120-38469-000PRESSURE TRANSDUCERN.O./N.C. & 4-20mA

ISE80-N02L-S

PS S01-XA

PS S01-X

PUMP S01-X PRESSURE LOW

110,WHT

-4,BRN

-5,BLU

115,WHT

-4 ,RED

-5 ,BLK

INTERCONNECTCABLE #2

BRN

ORG

YEL

GRN

BLU

SHLD

123

123

4 4

BRNBLKWHT GRN

WHTRED

BLU BLK

PS G01-X

CONTINUEDON SHEET 2

109

110

-4

-5

109,BLK

111

112

-4

-5

112,WHT

-4,BRN

-5,BLU

111,BLK

113

114

-4

-5

114,WHT

-4,BRN

-5,BLU

113,BLK

VIO

GRY

WHT

N/C

N/C

N/C

N/C

RED

BLK

TAN

PNK

PS G02-X

PS G03-X

PS S01-XB

120-25482-000

115

-4

-5

116

-4


KEYED NOTES:

CABLE INCLUDED INSHIP-WITH KIT290-36367-000

OF

DWG NOSIZE

TITLE

REV

SHEET

3 2 15 4678910111213141516

E

D

C

B

A

F

G

H

3 2 15 4678910111213141516

E

D

C

B

A

F

G

H


004 CP38002 DAB 1/27/14


----

217-00532-0003 3004B

DESCRIPTION

1

1


April 2014 8-9

Mega SD100, Model 115 Facilities Schematic


8-10 April 2014

April 2014 9-1

Chapter 9: Parts List

Table 9-1. Mega SD100, Model 115 Spare Parts

Part Number Part Description Ref Des Qty

120-31698-000 DIODE, 1N4004 1

121-30827-000 DISCONNECT, ENCLOSED, AC, 30A, RoHS 1

107-30672-000 DISPLAY, PRESS SNSR, POS, 0-1MPA, 2NPN, 1/8" NPT

3

122-00528-000 PRESSURE SWITCH/TRANSDUCER ASSY, SMC ISE80 WITH GAUGE PROTECTOR

2

120-38469-000 PRESSURE SWITCH/TRANSDUCER, 0-145psi, 1/4NPT, SMC ISE80

1

309-22015-000 PUMP, 1/2", ARO, PP, U-CUP SANTOPRENE DIAPH, BALL CHECK

3

102-30258-000 RGLTR, PRESS, 1/4", 0-100PSIG, THICK DIAPH 3

120-25386-000 SENSOR, LEAK DETECT, PFA ENCAP, PAPERLESS

1

385-22006-000 SENSOR, LEVEL, CAP, N/O, NPN, 10VDC, PP, TURCK

2

120-25378-000 SNSR, CAPACITIVE, NPN, NC, 2M CABLE 1

120-25391-000 SNSR, CAPACITIVE, NPN, NO, 2M CABLE 1

120-25440-000 STRN RLF,BHD,1/2FNPT,PA,GRY,SKINTOP 3

120-25438-000 STRN RLF,BHD,3/8FNPT,PA,GRY,SKINTOP 2

120-38141-1108 UL489 CIRCUIT BREAKER, DIN MOUNT, C CURVE, 1 POLE, 8 AMP

1

370-22019-000 VALVE, AOV, DIAPH, PV-10, 3/8"FLR, 3-WAY, NC X NO X COM, PFA W/PVDF NUTS, Cv: 0.62

1

370-01000-000 VALVE, DIAPH, PNEU, 2-WAY, 1/2" ORF, 1/2" FLR, PV-20

2

370-01420-000 VALVE, MANUAL, DIAPH, MULTI-TURN, 1/2" OR, 1/2" PORTS, PFA NUTS, 2.5CV

3

370-01320-000 VALVE, MANUAL, MV-20, 3/4" FLR,PTFE 3

370-01628-000 VALVE, PNEUMATIC, PV20, NC, 3/4" FLARE (1" ORIFICE)

6

370-25136-000 VLV, MAN, BALL, 3/4 SKT/THRD, CPVC 1

370-25118-000 VLV, MAN, NEEDLE, 3/8 FLR, PFA 2

9-2 April 2014

Parts List Mega SD100, Model 115

101-25024-000 VLV, MAN, BALL, 3/8 COMP, SST 3

101-25027-000 VLV, PRESS RELIEF, 50-150 PSI, 1/4, SST 3

120-32499-000 XMTR, ULTRASONIC LEVEL SENSOR, 2 WIRE, NPT, ECHOTOUCH

1

Table 9-1. Mega SD100, Model 115 Spare Parts (continued)

Part Number Part Description Ref Des Qty

April 2014 Glossary - 1

Glossary

A-B — Allen-Bradley Company, Inc.

ABPR — Automatic Back Pressure Regulator. The ABPR system regulates the slurry pressure in

the global loop. An alternate method of controller back pressure is to hold the BPR valve at a

constant setting while modulating a set of variable speed supply pumps.

Acid — Acid Compound that reacts with metal to evolve hydrogen, reacts with a base to form salt,

dissociates in water to yield H2 ions, and has a pH of less than 7.

Al203 — Aluminum Oxide (Alumina). Also known as corundum and emery and used as an

abrasive.

Alkali — Chemical substance that is soluble in water, neutralizes acids, and forms salts with them.

An alkali has a pH of more than 7.

Amorphous — Lacking a crystalline structure; literally without shape. Having a random atomic

arrangement without a three dimensional structure.

Analog — System or device that represents data variation by a measurable physical quality.

Active — Describes a device that is online and currently dispensing.

Aspirated Drain — System where suction facilitates thorough and rapid draining.

Atomize — To reduce to fine particles or spray.

ATRS — Auto-Titration/Replenishment System.

Automode — A station that can operate automatically.

AV — Automatic Valve.

Base — Compound that reacts with acids to form salts and has a pH of more than 7.

BCDS — Bulk Chemical Distribution System.

Blend Tank — Tank or station where different slurry or chemical components are combined and

mixed in specific ratios.

BPR — Back Pressure Regulator.

Glossary - 2 April 2014

Glossary Mega SD100, Model 115

BV — Ball Valve.

BPV — Back Pressure Valve.

CDA — Clean Dry Air.

CDU — Chemical Dispense Unit. Refers to the Mega Tote/Drum assembly that supplies slurry to

the polishers.

Centipoise — Unit of measurement for viscosity (also see Poise).

CompactLogix — A PLC that controls equipment operation.

ControlNet — Communication protocol for sending and receiving data from the corresponding

Megaflow systems (from PLC to PLC).

CPU — Central Processing Unit.

CSS — Chemical Safety Shutdown. A function that remotely shuts down all system operations in

an emergency.

CV — Check Valve.

Data Highway Plus — Allen-Bradley communication protocol.

Day Tank — Tank to which blended chemicals are transferred prior to dispensation to the global

loop.

Deionized — Substance from which all atoms or groups of atoms that have acquired an electrical

charge have been removed.

Density — Measure of a quantity such as mass or electric charge per unit volume.

DeviceNet — Communication Protocol for collecting inputs from the field and sending outputs to

the field (PLC to I/O).

DH+ — Data Highway Plus (Data Highway Plus for definition).

D.I. (or DI) — Deionized.

Digital — Processing, operating on, storing, transmitting, representing, or displaying data in the

form of numerical digits, as in a digital computer.

Distribution Tank — Tank from which chemical is dispensed directly to a point of use system or to

multiple systems via a global loop.

Mega SD100, Model 115 Glossary


EMO — Emergency Machine Off. A function when activated, immediately shuts all control power

to output devices. Does not disconnect main power.

Ethernet — System for exchanging messages between computers on a local area network using

coaxial, fiber optic, or twisted-pair cables.

EV — Solenoid Electrical Valve part identification code.

Fab — Wafer fabrication facility.

Force — Software function that allows the programmer to energize or de-energize an input or

output independent of the program logic.

FRPP — Fire Resistant Polypropylene.

Global Loop — Distribution loop used to supply chemical or slurry to point of use systems.

GPM — Gallons per Minute.

GUI — Graphical User Interface.

HC — High Capacity.

Heterogeneous — Composed of parts of different kinds.

Homogeneous — Composed of parts of the same kind. This term is properly applied to a

chemical element and compounds but not to mixtures or solutions.

Hydrometer — Instrument for measuring the specific gravity of liquids.

Hygrometer — Instruments for measuring relative humidity.

I/O — Hardware or software that controls the passage of information into and out of a computer or

computer component.

IPA — Isopropanol Alcohol.

IPW — Industrial Process Water.

KTx Card — Allen-Bradley communication interface card.

Ladder Logic — A PLC program written in a format resembling an electrical ladder diagram.

LAN — Local Area Network. Network of personal computers and peripheral devices linked by

cable and able to share resources.



LPM — Liters Per Minute.

l/m — Liters per Minute.

Loop — Piping system that returns to the point of dispensation.

MOS — Metallic Oxide Semiconductor.

MSDS — Material Safety Data Sheet.

MTBF — Mean Time Between Failure.

MV — Manual Valve.

N2 — Nitrogen.

NPP — Natural Polypropylene.

NPT — National Pipe Thread.

OFA — Oil Free Air.

ORP — Oxidation Reduction Potential.

Offline — Indicates the device is not running automatically and available for manual control (e.g.,

valves).

PanelView — Refers to Allen-Bradley PanelView operator terminals (PanelView 550, 600, 1000,

etc.). PanelView operator terminals provide machine control and monitoring functions for most

Mega Fluid Systems, Inc. equipment.

Pause — Describes the operational mode that temporarily stops the system blend and distribution

process. Pause can be initiated automatically or manually through the touchscreen.

PFA — Perfluoroalkoxy.

pH — The acidity or alkalinity of a solution. Equal to the log of the reciprocal of the hydrogen ion

concentration measured in gram moles/liter. In practical terms the pH scale extends from 0 -14.

PID — Proportional Integral Derivative. A PID controller corrects the error between a measured

process variable and a desired setpoint by calculating and then outputting a corrective action that

can adjust the process accordingly.

The PID controller calculation (algorithm) involves three separate parameters; the Proportional,

the Integral and Derivative values. The Proportional value determines the reaction to the current

Mega SD100, Model 115 Glossary


error, the Integral determines the reaction based on the sum of recent errors and the Derivative

determines the reaction to the rate at which the error has been changing. The weighted sum of

these three actions is used to adjust the process via a control element such as the position of a

control valve.

PLC — Programmable Logic Controller. Electronic device that controls machines and processes.

It uses a programmable memory to store instructions and execute specific functions that include

On/Off control, timing, counting, sequencing, arithmetic, and data handling.

PPE — Personal Protective Equipment.

Point of Use — Any wafer fabrication system that draws chemical from the global loop.

Poise — Unit of measurement for viscosity. Water = 0.01 poise.

POU — Point of Use.

Primary — Describes the main slurry/dispense station. The primary station contains a power

disconnect, main controller and a PanelView Plus touchscreen.

PSI — Pounds per Square Inch.

PT — Pressure Transmitter.

PTFE — Polytetraflourethelene.

Pycnometer — Vessel used to measure the specific gravity of liquids or solids.

Recipe — User-defined series of steps which specifies the type (either slurry, chemical 1,

chemical 2, or DI water/UPW) and amount (measured either by weight or volume) of chemical to

be added to the blend/mix tank.

Repeatability — The ability of an instrument to give the same output or reading under repeated,

identical conditions.

RIO — Remote I/O (also see I/O).

RV — Relief Valve.

scfm — Standard Cubic Feet per Minute.

Secondary — Describes the redundant slurry/dispense station.

Setpoint — An operational boundary or specific limit (can be either high or low) which the system

is not to exceed.



SF — Stabilized Filtration.

SG — Specific Gravity.

SGU — Specific Gravity Units.

SLC — Small Logic Controller. Trademark of Allen-Bradley Company, Inc.

Slurry — Liquid mixture of water and an insoluble solid material.

SMS — Slurry Metrology System.

Specific Gravity — Ratio of the density of a substance to the density of water at specified

conditions.

SQL — Structured Query Language. Computer language for specifying database inquiries.

SS — Stainless Steel.

Stabilized Filtration — Constant flow through the filtration loop to maximize filter effectiveness.

Standby — Describes a station or device that is started but not currently dispensing or blending.

TIP — Tool Interface Panel

Trending — Collection of system operations data for performance analysis and record-keeping

purposes.

Tare — Deduction from the gross weight to allow for receptacle/packaging.

Tool — Any device, storage container, work station, or process machine used in a clean room.

UPW — Ultra-Pure Water.

Viscosity — Property of a fluid caused by molecular attraction that causes it to resist flow or

movement in response to external force applied to it. Viscosity is affected by temperature.

VMB — Valve Manifold Box.

XMTR — Transmitter.

April 2014 Index - 1

IndexAABPR 10-1

acid 10-1

acknowledge alarm 5-6

Active 10-1

Al203 10-1

alarm

color definitions 5-4

alarm override 5-14

alarm override activation 5-8

alarms

override 5-14

responding to 5-6

testing 7-25

alkali 10-1

amorphous 10-1

analog 10-1

aspirated drain 10-1

atomize 10-1

atomizer

adjusting 7-14

definition 7-14

malfunction 7-14

setting adjustment 7-14

ATRS 10-1

automatic mode 5-10

automatic valve 7-27

Automode 10-1

AV 10-1

Bbase 10-1

battery

lithium 7-36

disposal 7-37

replacement procedure 7-36

BCDS 10-1

blend tank 10-1

BPR 10-1

BPV 10-2

button definitions 5-3

BV 10-2

bypassing alarm 5-8

Ccabinet 1-5

cleaning procedure 7-39

cabinet cleaning 7-39

caution messages

explained 2-2

CDA 10-2

CDU 10-2

centipoise 10-2

check valve 7-27

chemical

exposure 2-4

handling 2-4

leaks 2-4

spills 2-4

chemical hazard messages explained 2-3

chemicals

spill mitigation 2-12

cleaning

cabinet 7-39

color alarm definitions 5-4

color pipe definitions 5-4

color pump definitions 5-4

color sensor definitions 5-4

color text definitions 5-4

color valve definitions 5-4

Compact 7-7

compact flash card 7-7

CompactLogix 10-2

component

isolation and removal 7-4

component troubleshooting 7-12

components

electrical

replacement 7-5

ControlNet 10-2

CPU 10-2

CSS 10-2

CV 10-2

DD.I. 10-2

danger messages

explained 2-2

data highway plus 10-2

data value

system

record sheet 7-48

day tank 10-2

deionized 10-2

density 10-2

device settings

record sheet 7-45

DeviceNet 10-2

DH+ 10-2

DI 10-2

differential pressure gauge 7-26

digital 10-2

Index Mega SD100, Model 115


distribution tank 10-2

drum panel alarms 6-3

Eelectrical

safety

type 1 hazard defined 2-5




work guidelines 2-5

electrical component

isolation and removal 7-5

electrical components

replacement 7-5

electrical components, removing 7-5

electrical equipment

safety when working with 2-4

electrical hazard messages explained 2-3

electrical solenoid valve 7-26

emergency machine off

verification procedure 7-38

emergency machine off (EMO) procedure 2-6

EMO 10-3

circuitry description 2-7

resetting an EMO button 2-6

verification procedure 7-38

EMO procedure 2-6

equipment

features 1-5

equipment features 1-5

cabinet 1-5

piping 1-5

pumps 1-5

tanks 1-5

ethernet 10-3

EV 10-3

Ffab 10-3

facility requirements 3-2

fittings

inspection 7-32

replacement 7-33

force 10-3

FRPP 10-3

Ggas line

preventive maintenance procedure 7-32

gas lines

component check 7-29

global loop 10-3

GPM 10-3

graphic display definitions 5-3

GUI 10-3

HHC 10-3

heavy object hazard messages explained 2-3

heterogeneous 10-3

homogeneous 10-3

how to

alarm

deactivate the 5-9

override the 5-8

alarms, test the 7-25

atomizer, adjust the 7-14

automatic, set to 5-10

battery, replace the 7-36, 7-37

cabinet, clean the 7-39

chemical startup and test 3-10

components, remove 7-4

DI water & leak test the system 3-8

electrical components, remove 7-5

EMO, test the 7-38

fittings, check the 7-32

fittings, replace the 7-33

gas line, check components of the 7-29

install the system 3-3

leak detector, check the 7-16

line proximity sensor, calibrate the 7-21

liquid sensor, adjust the 7-20

login 5-5

logout 5-6

manual, set to 5-11

place the system 3-4

pre-startup test the system 3-6

pump, check the 7-16

pump, isolate and remove a 7-34

relief valves, adjust the 7-30

restart 5-14

runtimes, resetting 5-15

system

turn off the tool

turn off the 5-10

system, configure 3-7

system, start 5-10

timers, set the 5-14

tool, start 5-10

turn off alarm 5-6

hydrometer 10-3

hygrometer 10-3

II/O 10-3



initial system startup 5-9

installation 3-1

procedure 3-3

chemical startup and testing 3-10

DI water startup and leak testing 3-8

pre-startup testing 3-6

system commissioning 3-5

system configuration 3-7

system inspection 3-3

system location and site inspection 3-3

system placement 3-4

system testing 3-9

interlocks

software

critical 6-2

process 6-2

warnings 6-2

IPA 10-3

IPW 10-3

Kkey failure points 2-10

KTx card 10-3

Ll/m 10-4

ladder logic 10-3

LAN 10-3

leak detector

check 7-16

line proximity sensor

calibration 7-21

liquid sensor

adjusting sensitivity 7-20

lithium battery 7-36

disposal 7-37

replacement procedure 7-36

lockout/tagout 2-8

log out

how to 5-6

Login

how to 5-5

loop 10-4

LPM 10-4

Mmaintenance

preparation 7-11

procedures

setting timers 5-14

semiannual 7-36

manual mode 5-11

manual mode warning 2-14

manual valve 7-28

material safety data sheets 2-9

mechanical hazard messages explained 2-3

MOS 10-4

MSDS 2-9, 10-4

MTBF 10-4

MV 10-4

NN2 10-4

notice messages

explained 2-2

NP 10-4

NPT 10-4

OOFA 10-4

Offline 10-4

overriding alarms 5-14

overriding an alarm 5-8

overview

equipment features 1-5


system 1-4

PP trap 7-14

PanelView 10-4

password 5-5

Pause 10-4

personal protective equipment 10-4, 10-5

PFA 10-4

pH 10-4

pipe


piping 1-5

PLC 10-5

point of use 10-5

poise 10-5

POU 10-5

pressure reducing regulator 7-8

pressure relief valve 7-28

pressure switch 7-8

preventative maintenance 7-11

Preventive 7-11

preventive maintenance

list 7-42

semiannual 7-36

Primary 10-5

procedures

operating



automatic operation 5-10

manual operation 5-11

responding to alarms 5-6

restarting after EMO shutdown 5-14

shutdown 5-10

startup 5-9

resetting runtimes 5-15

protective clothing required messages explained 2-3

proximity sensor

calibration 7-21

calibration procedure 7-21

PSI 10-5, 10-6

PTFE 10-5

pump


isolation and removal procedure 7-34

pump 1

operation check 7-16

pumps 1-5

pycnometer 10-5

Rrecipe 10-5

regulator 7-8

pressure reducing 7-8

relief valve

adjustment 7-30

removing all power 2-7

repeatability 10-5

replacement

electrical components 7-5

resetting an EMO button 2-6

resetting runtimes 5-15

RIO 10-5

runtimes

resetting 5-15

RV 10-5

Ssafety

caution messages explained 2-2

chemical exposures 2-4

chemical handling 2-4

chemical hazard messages explained 2-3

chemical spills 2-4

danger messages explained 2-2

danger, warning, caution & notice messages 2-2

electrical





work guidelines 2-5

electrical hazard messages explained 2-3

general 2-4

heavy object hazard messages explained 2-3

interlocks 2-13

key failure points 2-10

material safety data sheets 2-9

mechanical hazard messages explained 2-3

messages 2-2

MSDS 2-9

notice messages explained 2-2

protective clothing required messages explained 2-3

required safety precautions 2-4

safety hazards explained 2-2


warning messages 2-2

warning messages explained 2-2

working with electrical equipment 2-4

safety information

lockout/tagout 2-8

safety components 2-15

safety interlocks 2-13

scfm 10-5

Schematics 8-1

screens

navigation 5-2

Secondary 10-5

semiannual preventive maintenance

procedures 7-36

sensor


proximity

calibration 7-21

calibration procedure 7-21

setpoint 10-5

setting timers 5-14

SF 10-6

SG 10-6

SGU 10-6

shut down system 5-10

shutdown procedure 5-10

SLC 10-6

slurry 10-6

SMS 10-6

specific gravity 10-6


SQL 10-6

SS 10-6

stabilized filtration 10-6

Standby 10-6

start automatic mode 5-10

start manual mode 5-11

starting the system 5-10

startup procedure 5-9



stopping an alarm 5-8

system data value

record sheet 7-48

system overview 1-4


Ttanks 1-5

tare 10-6

text


timers

setting timers 5-14

TIP 10-6

tool 10-6

trending 10-6

troubleshooting

gas line 7-29

turn off alarm 5-6

turn system off 5-10

turn system on 5-9

UUPW 10-6

Vvalve


valve icon 5-3

valves 7-26

automatic 7-26

ball 7-26

check 7-26

electrical solenoid 7-26

flow indicator 7-26

manual 7-26

pressure relief 7-28

relief

adjustment 7-30

valves diverter 7-26

VersaView

screen hierarchy 5-2

VersaView 1550M

overview 5-2

viscosity 10-6

VMB 10-6

Wwarning

manual mode 2-14

warning messages

explained 2-2

work order form 7-41



Date post:	26-Mar-2018
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Mega SD100, Model 115 Operations & Maintenance...

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