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Method of etching with ammonia and fluorine chemistries

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New Developments in the Metal Finishing Field Compiled by Anselm Kuhn, Metal Finishing Information Services Ltd. Recently published patents Method of Etching with Ammonia and Fluorine Chemistries US. 2004211517 Annapragada, R.; Sadjadi, R. Gas-phase plasma etching. Delivery of Dissolved Ozone US. 2004211514 Torek, K.J.; Morgan, J.C., et al. Constant or pulsed supply of ozone in fluid medium. Formation of Functional Coating and Functional Coated Article US. 2004214015 Asai, M.; Uehara, H., et al. Organo-silicon species reacts with alipatic hydrocarbon on surface of plastics, glass, metal, and ceramic to create a hydrophobic surface, stain-repel- lent, or electroconductive layer. Substrate Binder US. 2004208993 Fongalland, D.C.; Gascoyne, J.M., et al. Porous substrate is formed from slurry, then impregnated with polymeric material or dispersion of silica and fluorinated polymer. Coating Precursor and Method for Coating a Substrate with a Refractory Layer US. 2004197482 Lamaze, A.P.; Barthelemy, C. Silicone resin, metal compounds, and organic solvent are applied to the surface and the solvent evapo- rated, leaving a hard refractory silicon containing layer after calci- nation, which is resistant to oxi- dizing environments, molten metal or molten salt attack. Methods and Apparatus for Making Integrated-Circuit Wiring from Copper, Silver, (Sold, and Other Metals Grant Manufacturing & Alloying, Inc, US. 2004206308 (Micron Tech Inc.) Ahn, K.Y.; Forbes, L. Copper requires presence of dif- fusion barrier, which is formed by PVD and/or CVD. Delivery of Dissolved Ozone U.S. 2004194883 Torek, K.J.; Morgan, J.C., et al. Fluid can be sprayed in an ozone- rich environment, or prior mixing of fluid and ozone may be used. Diamond Bectmde for Beclbrolysis US. 2004206624 Hosonuma, M.; Nara, M., et al. (Permelec Electrode Ltd.) A diamond electrode has a pro- longed ]ife by combining a conven- tional diamond electrode having a relatively short life with other components. A diamond electrode for electrolysis includes an elec- trode substrate, at least the sur- face of which comprises Magneli- phase titanium oxide, and conductive diamond supported as Let ETL introduce your company to Electrojet ®and Hydrojet TM Get at least a 50% productivity improvement... ETL guarantees it! Visit electroplatingtechnologies.com/get50 for more details. Circle 019 on reader informationcard or go to www.thru.to/webconnect Tin 4, Tin/Lead • Copper Zinc • Nickel Specializing in the following tin and tin~lead anodes and products D Shaped- 2"x4" & l"x3" 4° Ovals, 1.5" x 3 4- Mossy tin ¢* Tin shot & powder °:°Balls - 2", 7•8", ¾" & ½" o:oChunks- ¾", 1" & 1 5•8" 4-Bars- l"x3" & l"x4" o:*Stars- 10, 12 or 16 points To obtain product information, price quotations or locate a distributor near you, contact Greg Mcllvaine Cell: 215-651-4754 • Fax: 215-701-0807 Email: greg@grantmfg,com RO. Box 69 • 200-C Furnace Street" Birdsboro, PA. 19508 www.grantmfg.com Circle 025 on reader information card or go to www.thrn.to/webconnect nociJip Strip.pable Plating Mask Kit Clean, sharp, distinct stop off lines. Kit with I quart pot and 5 ]bs. of Thermo-Cote N-4 strippable coating. Cools fast to give you perfect mask. Non Contaminat ~ng. Peel off and remelt for reuse. Wrlte for details arid C 12 Cork Hill Road - RO. Box 365 • Franldin, NJ 07416 Tel: 973-209-6210 • Fax: 973-209-6435 Circle 048 on reader informationcard or go to www.thru.to/webconnect 66 www.metalfinishing.com
Transcript
Page 1: Method of etching with ammonia and fluorine chemistries

New Developments in the Metal Finishing Field Compiled by Anselm Kuhn, Metal Finishing Information Services Ltd.

Recently published patents

M e t h o d of E tch ing w i t h A m m o n i a and F luor ine

C h e m i s t r i e s

US. 2004211517 Annapragada, R.; Sadjadi, R. Gas-phase plasma etching.

Delivery of Dissolved Ozone US. 2004211514 Torek, K.J.; Morgan, J.C., et al. Constant or pulsed supply of ozone in fluid medium.

F o r m a t i o n of F u n c t i o n a l

C o a t i n g and F u n c t i o n a l C o a t e d A r t i c l e

US. 2004214015 Asai, M.; Uehara, H., et al. Organo-silicon species reacts with alipatic hydrocarbon on surface of plastics, glass, metal, and ceramic to create a hydrophobic surface, stain-repel- lent, or electroconductive layer.

Substrate Binder US. 2004208993 Fongalland, D.C.; Gascoyne, J.M., et al. Porous substrate is formed from slurry, then impregnated with polymeric material or dispersion of silica and fluorinated polymer.

C o a t i n g P r e c u r s o r and M e t h o d for C o a t i n g a S u b s t r a t e w i t h a R e f r a c t o r y Layer US. 2004197482 Lamaze, A.P.; Barthelemy, C. Silicone resin, metal compounds, and organic solvent are applied to the surface and the solvent evapo- rated, leaving a hard refractory silicon containing layer after calci- nation, which is resistant to oxi- dizing environments, molten metal or molten salt attack.

M e t h o d s and A p p a r a t u s for M a k i n g I n t e g r a t e d - C i r c u i t W i r i n g f r o m Copper , S i lver , (Sold, and O t h e r M e t a l s

Grant Manufacturing & Alloying, Inc,

US. 2004206308 (Micron Tech Inc.) Ahn, K.Y.; Forbes, L. Copper requires presence of dif- fusion barrier, which is formed by PVD and/or CVD.

Delivery of Dissolved Ozone U.S. 2004194883 Torek, K.J.; Morgan, J.C., et al. Fluid can be sprayed in an ozone- rich environment, or prior mixing of fluid and ozone may be used.

Diamond Bectmde for Beclbrolysis US. 2004206624 Hosonuma, M.; Nara, M., et al. (Permelec Electrode Ltd.) A diamond electrode has a pro- longed ]ife by combining a conven- tional diamond electrode having a relatively short life with other components. A diamond electrode for electrolysis includes an elec- trode substrate, at least the sur- face of which comprises Magneli- phase t i tanium oxide, and conductive diamond supported as

Let ETL introduce your company to Electrojet ® and Hydrojet TM

Get at least a 50% productivity improvement...

ETL guarantees it! Visit

electroplatingtechnologies.com/get50 for more details.

Circle 019 on reader information card or go to www.thru.to/webconnect

Tin 4, Tin/Lead • Copper Zinc • Nickel

Specializing in the following tin and tin~lead anodes and products

• D Shaped- 2"x4" & l"x3" 4° Ovals, 1.5" x 3 4- Mossy tin

¢* Tin shot & powder °:°Balls - 2", 7•8", ¾" & ½" o:o Chunks- ¾", 1" & 1 5•8"

4-Bars- l"x3" & l"x4" o:* Stars- 10, 12 or 16 points To obtain product information, price

quotations or locate a distributor near you, contact

Greg Mcllvaine Cell: 215-651-4754 • Fax: 215-701-0807

Email: greg@grantmfg,com RO. Box 69 • 200-C Furnace Street" Birdsboro, PA. 19508

www.grantmfg.com Circle 025 on reader information card

or go to www.thrn.to/webconnect

nociJip Strip.pable Plating Mask Kit

Clean, sharp, d ist inct stop of f lines. K i t w i th I quart pot and 5 ]bs. of Thermo-Cote N-4 strippable coating. Cools fast to give you perfect mask. Non Contaminat ~ng. Peel o f f and remelt for reuse. Wrlte for details arid

C 12 Cork Hill Road - RO. Box 365 • Franldin, NJ 07416

Tel: 973-209-6210 • Fax: 973-209-6435

Circle 048 on reader information card or go to www.thru.to/webconnect

66 www.metalfinishing.com

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