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Page 1: Method of etching with ammonia and fluorine chemistries

New Developments in the Metal Finishing Field Compiled by Anselm Kuhn, Metal Finishing Information Services Ltd.

Recently published patents

M e t h o d of E tch ing w i t h A m m o n i a and F luor ine

C h e m i s t r i e s

US. 2004211517 Annapragada, R.; Sadjadi, R. Gas-phase plasma etching.

Delivery of Dissolved Ozone US. 2004211514 Torek, K.J.; Morgan, J.C., et al. Constant or pulsed supply of ozone in fluid medium.

F o r m a t i o n of F u n c t i o n a l

C o a t i n g and F u n c t i o n a l C o a t e d A r t i c l e

US. 2004214015 Asai, M.; Uehara, H., et al. Organo-silicon species reacts with alipatic hydrocarbon on surface of plastics, glass, metal, and ceramic to create a hydrophobic surface, stain-repel- lent, or electroconductive layer.

Substrate Binder US. 2004208993 Fongalland, D.C.; Gascoyne, J.M., et al. Porous substrate is formed from slurry, then impregnated with polymeric material or dispersion of silica and fluorinated polymer.

C o a t i n g P r e c u r s o r and M e t h o d for C o a t i n g a S u b s t r a t e w i t h a R e f r a c t o r y Layer US. 2004197482 Lamaze, A.P.; Barthelemy, C. Silicone resin, metal compounds, and organic solvent are applied to the surface and the solvent evapo- rated, leaving a hard refractory silicon containing layer after calci- nation, which is resistant to oxi- dizing environments, molten metal or molten salt attack.

M e t h o d s and A p p a r a t u s for M a k i n g I n t e g r a t e d - C i r c u i t W i r i n g f r o m Copper , S i lver , (Sold, and O t h e r M e t a l s

Grant Manufacturing & Alloying, Inc,

US. 2004206308 (Micron Tech Inc.) Ahn, K.Y.; Forbes, L. Copper requires presence of dif- fusion barrier, which is formed by PVD and/or CVD.

Delivery of Dissolved Ozone U.S. 2004194883 Torek, K.J.; Morgan, J.C., et al. Fluid can be sprayed in an ozone- rich environment, or prior mixing of fluid and ozone may be used.

Diamond Bectmde for Beclbrolysis US. 2004206624 Hosonuma, M.; Nara, M., et al. (Permelec Electrode Ltd.) A diamond electrode has a pro- longed ]ife by combining a conven- tional diamond electrode having a relatively short life with other components. A diamond electrode for electrolysis includes an elec- trode substrate, at least the sur- face of which comprises Magneli- phase t i tanium oxide, and conductive diamond supported as

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