Introduction to Introduction to Nanoelectronics and Nanoelectronics and FabricationFabrication

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NanoscienceNanoscience – – working small, thinking big

Nano:From the Greek nanos - meaning "dwarf”, this prefix is used in the metric system to mean 10-9 or 1/1,000,000,000.

What is Nanotechnology?

Nanotechnology is the creation of functional materials, devices, and systems through control of matter on the nanometer (1 to 100 nm) length scale and the exploitation of novel properties and phenomena developed at that scale.

A scientific and technical revolution has begun that is based upon the ability to systematically organize and manipulate matter on the nanometer length scale.

What is Nanoelectronics

Nanoelectronic device? A very small devices to ovecome limits on scalability

Examples: Single-Electron Transistors

controlled electron tunneling to amplify current Resonance Tunneling Device

quantum device use to control current

Nanoelectronic Fabrication

NanofabricationNanofabrication

Top-down Approach

Bottom-up Approach

Top-down techniques take a bulk material, machine it, modify it into the desired shape and product classic example is manufacturing of integrated circuits using a sequence of steps

sush as crystal growth, lithography, deposition, etching, CMP, ion implantation…

(Microelectronic/Nanoelectronics Fabrication Approach)(Microelectronic/Nanoelectronics Fabrication Approach)

Bottom-up techniques build something from basic materials assembling from the atoms/molecules up not completely proven in manufacturing yet

Examples: Self-assembly Sol-gel technology Deposition (old but is used to obtain nanotubes, nanowires, nanoscale

films…) Manipulators (AFM, STM,….)

Top-down vs Bottom-up

Top-down

From large items to smaller ones. The most common method are

electron beam lithography (EBL) and scanning probe lithography (SPL).

The approach involves molding or etching materials into smaller components.

Making IC?Starting with a thin sheet Si wafer, cleaned, coated, preferentially etched using highly focused optics in as many as 100 separate operations before the final IC is complete.

Bottom-up

A  general approach going from small items to bigger ones.

Building larger, more complex objects by integration of smaller building blocks or components.

• The sketch shows the essence of bottom-up manufacturing.

• Self-assembly from the gaseous phase.

• Two principle vapor-phase technologies that are useful and widely practiced: molecular beam epitaxy (MBE) and vapor-deposition (PVD, CVD).

Carbon Nanotube Transistor

Making Nanoelectronics for Displays

The technique could make it feasible to build televisions using bright and colorful light emitting diodes (LEDs) of the type used in the enormous screens at sports arenas. Because the printing method would make it easier to integrate the materials needed, the LEDs could be much smaller and more tightly packed than these large-format displays. And since the printing technique can make high-performance devices on flexible substrates, it could pave the way to roll-up LED displays. The ability to print onto a curved surface could also make it possible to mimic the compact structure of the human eye, which could lead to smaller night-vision equipment,

Summary

Nanoelectronics is not only about size but also phenomena, mechanism, etc.

Nanoelctronics is a wide open field with vast potential for breakthroughs coming from fundamental research.