38
Product Catalogue
Product Catalogue
Company 3
Rotary Pumps
Oil Diffusion
Pumps
4-12
13-15
Dry Compressing
Vacuum Pumps
Roots
Ion Pumps
Turbo Molecular
pumps
Valves and
Gauges
oil
16-20
20-27
28
29-31
32-36
37-38
Total Vacuum was established in Czech Republic in 2008.
We specialize in sourcing and distribution of top quality new and
professionally refurbished vacuum equipment. We are the premier
reseller of vacuum technology in Eastern Europe serving the world.
The Total Vacuum Europe distribution team have links to 4
international locations and have repair, Procurement and industrial
relations staff worldwide.
In Vacuum Products, we have strong relation with top brands such as
Leybold, Edwards, Pffiefer,…
Please contact us for details of our current stock or if your company
has a specific requirement, get in touch and we will strive to meet your
needs.
Website: www.total-vacuum.com
3
1) Edwards: 1-a) RV Series Two stage Rotary Pumps:
Edwards RV pumps have become the industry standard for scientific primary pumping
applications. RV pumps are uniquely capable of delivering high or low throughputs with high
ultimate vacuum. This, combined with ultra-low noise levels, makes them ideal for a wide range
of applications including GCMS and other small bench top type applications. Supplied with: 1
litre of Ultragrade 19 oil, inlet filter and 0-ring. Fomblin(r) must be purchased separately for
PFPE RV pumps.
Features & Benefits:
48 dBA and intrusive frequencies minimise
Dual mode. Suitable for high throughput and high vacuum applications.
Easy-to-use gas ballast.
Fast acting inlet valve for system protection.
High torque, dual voltage/dual frequency motor, electronic start relay
Models:
RV3
RV5
RV8
RV12
4
1) Edwards: 1-b) EM Series Two stage Rotary Pump:
The EM range of oil-sealed rotary pumps - renowned for their high ultimate vacuum, rapid
pumping speed, quiet operation and ability to handle vapour - have become the industry standard
for laboratory and light industrial applications.
Supplied with: Ultragrade 19 oil, NW25 0-ring and centering ring. Fomblin must be purchased
separately for PFPE Pumps.
Features & Benefits:
The pump is designed for reliable, long-term operation.
Thermal overload device prevents overheating (single phase only).
The drive is provided through a flexible coupling by a single- phase or three-phase (four pole)
motor.
The motors are totally enclosed and are cooled by the motor- cooling fan.
Pressure die cast oil box with integral oil seals prevents oil leaks
Models:
E1M18 One Stage
E2M18 Two Stage
E2M28 Two Stage
5
1) Edwards: 1-c) RV Atext Two stage Rotary Pumps:
ATEX RV pumps have an external ATEX classification of Ex II 2G IIC T4 or Ex II 2G IIB T4
and are suitable for use in potentially explosive atmospheres. Supplied with 1 litre of Ultragrade
19 oil, inlet filter and 0-ring.
Features & Benefits:
ATEX rated spot voltage motor.
Dual mode. Suitable for high throughput and high vacuum applications.
Fast acting inlet valve for system protection.
Efficient high pressure lubrication.
Oil-tight with printed gaskets, effective shaft seals
Models:
Atex RV3
Atex RV5
Atex RV8
Atex RV12
6
1) Edwards: 1-d) ATEX EM18 One & Two Stage Rotary Pumps:
ATEX EM18 pumps have an external ATEX classification of Ex II 2G IIC T4 or Ex II 2G IIB T4
and are suitable for use in potentially explosive atmospheres. Supplied with ultragrade 19 oil,
NW25 0-ring and centering ring.
Features & Benefits:
Approved to external ATEX standards Ex II 2G IIC T4 and Ex II 2G IIB T4, which enables use
in hazardous environments
Models:
E1M18 ATEX
E2M28 ATEX
7
2) Leybold: 2-a) Rotary Vane Vacuum Pumps TRIVAC B Range:
The TRIVAC B is part of the well-pro- yen TRIVAC concept. All pumps from the D 4 B to the D
25 B model are equipped either with single-phase or three-phase motors. D 40 - 65 B models are
equipped with three-phase motors. In the TRIVAC B, the pump unit and the motor are linked by
an elastic coupling. The TRIVAC B range is a modular system which divides into three groups:
TRIVAC 4/8 Series
TRIVAC 16/25 Series
TRIVAC 40/65 Series
Features & Benefits:
All basic models (single-phase and three-phase motor) are certified in accordance with
94/9/EG (ATEX) (Category 3 inside)
High water vapor tolerance
Continuous operation even at 1000 mbar
Built-in oil pump; pressure- lubricated sliding bearings
All controls as well as the oil sight glass are located on the front face
Either vertical or horizontal intake and exhaust ports
Exchangeable inner body
Anti-suckback valve controlled via the oil pressure
Free of yellow metals
Service-friendly
Ideal as backing pump for medium and high vacuum applications, because of low oil
backstreaming
Highly leaktight (4He-capable)
8
2) Leybold: 2-b) TRIVAC BCS, Two-Stage Rotary Vane Vacuum Pumps :
The TRIVAC BCS pumps are oil sealed vacuum pumps operating according to the rotary vane
principle. Oil which is injected into the pump chamber is used for sealing, lubrication and
cooling purposes. The motor is connected to the pumping section via an elastic coupling. In
addition, the TRIVAC BCS is ready for system integration
Features & Benefits:
Compact design
Low noise operation with hardly any vibrations - Built-in oil pump
Continuous operation even at 1000 mbar (750 Torr)
Pressure-lubricated sliding bearings
Anti-suckback valve controlled via the oil pressure, no backstreaming of oil, independent of
the operating mode, with or without gas ballast
Low backstreaming of oil within the pump
High pumping speed down to ultimate pressure
Either vertical or horizontal intake and exhaust ports
All controls as well as the oil sight glass are located on the face side
Low power consumption
Exchangeable inner section
Main flow oil filters may be fitted
Modular system - Service-friendly
Built-in temperature switch for temperature monitoring
Corrosion protected – the use of yellow metals has been avoided; only grey cast iron, surface
treated aluminium, steel and stainless steel is used
Double shaft seal 9
2) Leybold: 2-c) TRIVAC E, Two-Stage, Oil Sealed Rotary Vane Vacuum Pump:
The TRIVAC BCS pumps are oil sealed vacuum pumps operating according to the rotary vane
principle. Oil which is injected into the pump chamber is used for sealing, lubrication and
cooling purposes. The motor is connected to the pumping section via an elastic coupling. In
addition, the TRIVAC BCS is ready for system integration
Features & Benefits:
Highly reliable
Small and compact
Quiet operation
Environmentally compatible (low oil consumption, EMI compatible; IP 54 protection)
Process quality (low backstreaming of oil)
Motor for all standard supply voltages and frequencies
Safe and intelligent vacuum protection (hermetically sealed)
Free of yellow metals
Compliance with international standards (CE and CSA)
Suitable for continuous operation at 1000 mbar (750 Torr)
Low power consumption
Better individual performance given by 3 stage gas ballast device
High water vapor tolerance
Simplified customizing ability
10
2) Leybold: 2-d) Rotary Vane Vacuum Pumps SOGEVAC:
SOGEVAC pumps are oil sealed rotary vane pumps. Oil injected into the pump chamber for
sealing, lubrication and cooling of the pump is recycled from the pump's oil reservoir and
filtered, if required, before it is injected. The lubricant system is rated for continuous operation
at high intake pressures (max. 100 bar abs.)(pumping speeds ranging from 10 to 1200 m3 x h-i
(5.9 to 707 cfm))
Features & Benefits:
Continuous operation from atmos- pheric pressure to ultimate pressure
High pumping speed also at low pressures
Low noise level
Low vibrations
Integrated exhaust filter, better than 99.9% efficient
No oil loss owing to the integrated oil return line
Exhaust gas free of oil mists
Efficient air cooling (standard)
Water cooling (optional)
Low space requirement, easy to install
Rugged
Maintenance-friendly
For direct fitting to Roots pumps from SV 100 B up
Optimum size-to-performance ratio
High water vapor tolerance
Wide range of accessories available for adaptation to differing problems
11
3) PFIEFFER: 3-a) PentaLine Series Two stage Rotary Vane Pumps:
PentaLine rotary vane pumps that offer pumping speeds of up to 35 m3/h are the perfect solution
for applications in the low- and medium-vacuum ranges of down to 10-3 hPa. The PentaLine
pumps run extremely quiet and with a minimum of vibration. Some of the applications of
PentaLine pumps are in metallurgical processes, analytical environments, coating or R&D
applications.
3-b) DuoLine Series Two stage Rotary Vane Pumps:
DuoLine rotary vane pumps cover all applications in the low and medium vacuum range of up to
10-3 hPa. These pumps offer reliable operation even for such critical industrial applications as
drying processes, metallurgical processes or resin potting and casting systems - either as a
standalone pump or as a backing pump in PFIEFFER's roots pumping stations or turbo pumping
stations.
12
1) Edwards: 1-a) HT Series:
The HT high throughput series is the pinnacle of Edwards diffusion pump knowledge with
technology aimed specifically at industrial users. These pumps are designed to give a high
throughput (pressure multiplied by pumping speed) at 4 x 10 mbar
Features & Benefits:
Highest throughput of comparative sized pumps
Earliest crossover pressure of similar sized pumps
Excellent maximum backing line pressure and tolerance to gas surges
Comparative pumping speed to similar sized pumps
Integral cold cap for best performance and low backstreamin
Robust structure thanks to practice-tested design
No cooling water due to air cooling
No thermal overload thanks to integrated temperature sensor
Increased explosion protection as pressure surge resistance is up to 160 kPa
Models:
HT1O(ANSI1O/1S0320 inlet)
HT16B(ANSI16/1505000 inlet)
HT2OB (ANSI2O/150630 inlet)
13
2) Leybold: 2-a) Oil Diffusion Pumps DIP Series:
The DIP range of pumps was developed for operation in industrial systems. Excellent vacuum
performance data combined with the inherent ruggedness of this kind of pump, make Leybold
diffusion pumps a reliable component in high and medium vacuum applications. The diffusion
pumps from the DIP range are used in coating systems, vacuum melting and drying systems as
well as in vacuum furnaces in the area of metallurgy
Features & Benefits:
High pumping speeds in the fine and high vacuum ranges
Low attainable ultimate pressure
Integrated, water-cooled cold cap baffle guarantees low oil back- streaming rates into the
vacuum chamber
The heating cartridges are accessible from the outside via heating inserts which are built into
the boiler. This ensures a quick exchange of single heating cartridges (even when the pump is
hot)
A standard built-in thermostat acts as an thermal overload switch and ensures that the heating
cartridges can not overheat
All DIP pumps are delivered with their inside chamber cleaned in such a manner that it is free
of oil. The inside is evacuated. In the condition as delivered, the pumps may be also operated
with silicone oil
Models:
DIP 3 000, DIP 8 000, DIP 12 000, DIP 20000, DIP 30000, DIP 50 000
14
2) Leybold: 2-b) Leybojet630:
The water-cooled LEYBOJET 630 was developed especially with the medium vacuum in mind.
The principal areas of application of the LEYBOJET 630 are modern sputtering processes as
well as vacuum melting and drying plants.
Features & Benefits:
High and stable pumping speed well into medium vacuum range
Low ultimate pressure
Low oil backstreaming due to integrated water-cooled cold cap baffle
High fore vacuum tolerance
Each heating cartridge is protected by a separate circuit breaker
In maintaining the well proven heating system - heating insert with thermally conducting
panels and heating cartridges - the LEYBOJET 630 is now equipped with an additional
ejector nozzle for the purpose of obtaining a stable pumping speed well into the medium
vacuum range
15
1) Edwards: 1-a) CXS Series Chemical Dry Pump:
The CXS incorporates innovative screw design features with simplicity and reliability in mind, a
‘Plug and Pump’ philosophy has been adopted. Some of the important features are:
Continuous vacuum from atmosphere to 10-3 mba
Integral temperature control
Pumps corrosive vapours without deterioration
Excellent liquid and solids handling
1-b) CDX 1000 Dry Vacuum Pump:
The CDX1000 is a double ended mechanism for the chemical process, pharmaceutical and
petrochemical industries. Some Highlighted Features:
Continuous performance from atmospheric pressures to ultimate vacuum
Excellent temperature control
Large liquid slug capabilities
No effluent generated
Dry running mechanism
1-c) EDSeries - Dry Chemical Pumps:
EDP pumps are based on Edwards’ oil-free, non-contacting and reverse claw mechanism. Dry
pumps completely eliminate all problems of process contamination and creation of polluted
effluent, which are experienced with traditional wet vacuum pump technologies. This series
comes in different models like EDP80,EDP160, EDP250, EDP400
16
2) Leybold: 2-a) Diaphragm Vacuum Pumps DIVAC:
This range of vacuum pumps was developed especially for laboratory operations and as backing
pumps for (wide range) turbomolecular pumps.DIVAC L diaphragm pumps are suited for almost
all requirements in the che- mistry lab. They are basically corrosion and solvent resistant since
their parts in contact with the pumped medium are made of PTFE (Teflon), FFPM (Kalrez) and
PVDF (Solef).
Features & Benefits:
Dry compressing, oil-free
Water vapor tolerance
Low maintenance costs and long service intervals through the use of high-quality components
which are well-proven
Simple maintenance by staff of the customer
Low base vacuum of 8 mbar (6 Torr) for two-stage and 2 mbar (1.5 Torr) for three-stage
DIVAC
All parts of the pump head in contact with the gas are resistant against aggressive media
through the use of PTFE (Teflon), FFPM (Kalrez) and PVDF (Solef)
Low noise operation
Portable, compact, small footprint
Can be operated in any orientation
Overheat protection for the vacuum pump by means of a thermal fuse
Available in four pumping speed categories
17
2) Leybold: 2-b) Oil-free SCROLLVAC SC 5D to SC 60 D:
The scroll pump is now being used as an oil-free vacuum pump. Every scroll pump consists of
two Archimedes spirals engaging each other with an offset of 180°.act with the pumped medium
are made of PTFE (Teflon), FFPM (Kalrez) and PVDF (Solef).
Features & Benefits:
Absolutely oil-free
High effective pumping speed
Low ultimate pressure
Low noise level
Low vibration operation
Atmospheric inlet pressure allowable
Low weight
Air cooling
Low power consumption
Models:
SC 5D
SC 15D
SC 30D
SC 60 D
18
2) Leybold: 2-c) SCREWLINE Pumps series:
The Screw Vacuum Pumps SCREWLINE were developed in view of the special requirements of
industrial applications. Screw Vacuum Pumps are dry com- pressing backing pumps, the
operation of which is based on the screw princi- ple. The pumping chamber of the pump is
formed by two synchronised positive displacement rotors and the housing enclosing these.
Features & Benefits:
Utmost reliability
Protection of the pump through monitoring vital parameters by means of the SP-GUARD
Minimum downtimes owing to rapid cleaning of the pump chamber (in less than one hour)
Avoidance of deposits through low internal temperatures
Minimum operating costs
The only directly air cooled screw vacuum pump on the market. No need for cooling water
No seal gas needed for standard applications
No oil in the pump chamber. Thus no need for disposing of contami- nated oil
Gear oil change only every two years
Utmost flexibility
Direct adaptation of RUVAC pumps for increased pumping speed up to approximately 7000
m3/h
Multi-flange for all commonly used pipe connections
Flushing kit for constant cleaning of the pump chamber
Silencing hoods for a further reduction of noise emissions
19
2) Leybold: 2-d) DRYVAC Pumps (DV 450 to DVR 5000 C-i) :
DRYVAC is a new family of dry com- pressing screw vacuum pumps avail- able with different
features depending on the specific application. The DRYVAC family was developed in con-
sideration of the special requirements of the photovoltaic, display and pro- cess industries. All
DRYVAC variants are water cooled, very compact and easy to combine into systems, in parti-
cular with the well-proven Roots pumps of the RUVAC WH, WS and WA series.
2-e) CHEMROVAC Pumps (CHEMROVAC TRV 404 to 410):
The CHEMROVAC TRV pumps are 4-stage roots pumps. Each stage con- sists of two rotors
rotating in opposite directions inside a casing (pumping chamber) and having slight clearances
against the inside wall surface of the casing and also between the rotors. (The CHEMROVAC
TRV pumps are not designed to the European ATEX direc- tive (94/9/EC). They can therefore
not be installed in Europe into flame proof )
3) PFIEFFER:
3-a) PFIEFFER Dry Screw Pumps( HeptaDry Series):
HeptaDry pumps are optimally suited for their applications in connection with low and medium
vacuum. The pumping speeds that are offered by this series of products range from 100 to 600
m3/h. One special advantage consists of their single-piece, variable-pitch rotors.Can be used
ideally either as stand-alone pumps or in combination with our OktaLine Roots pumps.
20
1) Edwards: 1-a) EH Series:
The EH mechanical booster pumps feature the unique hydrokinetic drive, providing an efficient
power transmission . The EH mechanical booster pumps, based on the simple Roots principle,
remain the favorite pumps for applications where high pumping speeds over 3000 m3h-1 / 1776
ft3min-1 are required in the pressure region of 0.01 to 50 mbar / 0.0075 to 37.5 Torr.
Features & Benefits:
Pump down times cut by 50%, when compared with direct drive pumps
No bypass lines or pressure switches required
Universal voltage motors
Reduced capital and operating costs
Air cooled motors – with water cooled options
Quiet, minimum vibration
1-b) Stoke 6" Series :
Stokes 6" series mechanical boosters are available in sizes 1020- 6630 m3h-1 / 612-3900 ft3min -
1
Features & Benefits:
Rugged design for reliable and extended operation
Simple maintenance features incorporated in design
Vertical or horizontal gas flow
Options of direct drive motors or bare shaft machines
Options of by pass technology to reduce pump down time and process isolation seals
Dynamically balanced impellers
21
1) Edwards: 1-c) HVSeries Mechanical booster pumps:
These pumps are backed by Edwards Dry Pumps or Mechanical Booster pumps.This range of
high capacity mechanical booster pumps is designed to operate reliably for long periods with no
need for maintenance. The HV pumps can be fitted with an inverter to allow them to be started
at atmospheric pressure, at the same time as the dry pumps.
Features & Benefits:
Fitted with thermal snap-switch, to protect the pump from over temperature
Nitrogen purge inlet fitted as standard
Vertical flow, direct drive (horizontal optional)
Control with inverter, or interlock with a pressure switch input
Water cooled shaft seals and after cooler
22
2) Leybold: 2-a) RUVAC WA/WAU:
The series WA/WAU Roots vacuum pumps are provided with directly flange-mounted air-cooled
standard three-phase motors. The oiled radial sealing rings of the RUVAC WA/WAU for sealing
the shaft against the atmosphere are made of FPM (FKM) (fluor polymer).Pumps from these
series are supplied with a vertical pumping action as
standard.
Features & Benefits:
Two air-cooled lines WA/WAU, each with four pump sizes
Motors of efficiency class IE 2
Reliable and trouble-free
Sealing rings with their housing can be readily replaced
Shaft seals and elastomer seals made of FPM (FKM)/Viton
Easy to exchange with custom motors
Integrated pressure equalization line for protection against overloading at high pressures on
WAU models
Conversion from vertical to horizontal pumping action can be done from the side of the
customer
All WA(U) pumps comply as standard with ATEX Cat. 3i
Depending on requirements, motors from different ATEX categories can be fitted
Models:
WA/WAU 251, WA/WAU(H) 501, WA/WAU(H) 1001, WA/WAU(H) 2001
23
2) Leybold: 2-b) RUVAC WS/WSU:
The series WS/WSU Roots vacuum pumps are provided with Air-Cooled Canned Motors.
Features & Benefits:
Two air-cooled lines WS/WSU, each with four pump sizes
Highly leak-tight air-cooled pumps driven by a air-cooled canned motor
Lubricated with mineral oil (alternatively with LVO 400)
Over-temperature switch in the stator coil of the motor
All elastomer seals made of FPM (FKM)/Viton
A frequency converter can be used to operate the RUVAC WS 251 to 2001 pumps between
20 and 100 H
Models:
WS/WSU 251, WS/WSU(H) 501, WS/WSU(H) 1001, WS/WSU(H) 2001
24
2) Leybold: 2-c) RUVAC WH/WHU:
Both motors and oil reservoirs are water cooled thereby perfectly balanc ing the internal
temperature manage- ment of the pumps resulting in signifi- cantly lower oil temperatures and
thus a longer oil service life. At ultimate pressure, emissions are reduced by approximately 50%
and the motor coils can sustain higher loads while at the same time offering improved efficiency.
Features & Benefits:
Easy system integration
Optimum price-to-performance ratio; high pumping speed up to 9800 m3/h @ 70 Hz with
optional frequency converter
Integrated water cooling system for installation within closed systems
Parts in contact with the cooling water are made of stainless steel (corrosion-free)
Trouble-free operation with toxic or corrosive media owing to the hermetically sealed motor
No shaft seals towards atmosphere, therefore high reliability, long service intervals and no oil
leaks
Conversion from vertical to horizontal pumping action can be done from the side of the
customer (for WH 4400/7000)
Secure operation and faster pump down in short cycle operation with optional bypass-line
(does not apply to WH 700/702)
Motor protection PTC and PTO
25
2) Leybold: 2-d) RUVAC WSLF:
The pumps of these series are especially adapted Roots vacuum pumps from the RUVAC WS
series which are intended for operation with gas lasers. They are driven by a canned motor so
that a shaft seal for sealing against atmospheric pressure is not required. Air-cooled series with
nominal pumping speeds of 1000 m3 x h-1 (589 cfm) are available. The RUVAC WSLF series
with in- creased motor ratings is intended for operation in connection with frequency converters.
These pumps are available with nickel- plated or plasma-nitrated surface as standard. All pumps
of these series are supplied with a horizontal pumping action. Vertical pumping action is
available upon request.
Features & Benefits:
A gas mixture of helium, nitrogen and carbon monoxide is continuously circulated at a
reduced system pressure
High pumping speed from a small, quiet running pump
Operation with a frequency converter is possible
Nickel-plated pump chamber surfaces
Through an additional vacuum pump the bearing chambers may be evacuated to a pressure
lower than the pressure within the pumping chamber of the RUVAC
Water-cooled oil separating system
Integrated oil separating system for extended maintenance intervals
26
3) PFIEFFER: 3-a) Convection cooled Series (OktaLine®): :
Convection Cooled Roots Pumps offer pumping speeds ranging from 250 to 25,000 m3/h. They
can be safely employed for low and medium vacuum applications in the coating or
semiconductor industry, in research & development, metallurgy or in chemistry and process
technology.
3-b) Gas-circulation-cooled (OktaLine® G):
High pressure ranges and maximum differential pressures, in particular, are the ideal site of
operation for the OktaLine G series as-circulation-cooled Roots pumps. They are a special
version of usual Roots pumps. An OktaLine G pumping speed of 250-12,000 m3/h is achieved at
various power levels, ranging from 5.5 kW up to 12,000 kW rated power. The gas-circulation-
cooled Roots pumps can be operated without any backing pumps.As a single pump, they can be
used in the 130 to 1013 hPa range. The final pressure can be lowered to 20 or 30 hPa by
connecting two pumps in series.
3-c) OktaLine® ATEX:
Contact-less, wear-free cam shaft version
Robust structure thanks to practice-tested design
No cooling water due to air cooling
No thermal overload thanks to integrated temperature sensor
Increased explosion protection as pressure surge resistance is up to 160 kPa
27
1) Agilent Technologies(Varian): 1-a) Miniature Pump :
The Miniature Vaclon pump is a diode configuration and provides approximately 0.4 I/s of
nitrogen pumping speed. The 2 I/s model is a modified diode configuration to enhance starting at
low pressure. The 10 I/s pump is a diode configuration with high efficiency for residual gases
such as hydrogen.
1-b) Valcon Plus Series:
Vaclon Plus pumps are available with Diode, Noble Diode, and StarCell elements for various
nitrogen pumping speeds. Diode Vaclon Plus pumps are regularly used in general purpose ultra
high vacuum (UHV) systems for evacuating electron devices, and in sensitive electron
microscopes. Noble Diode Vaclon Plus pumps are used in UHV applications when a gas mixture
is being pumped at constant pressure making it ideal to obtain UHV pressures in particle
accelerators, synchrotron rings, and surface analysis applications.
2) Leybold:
2-a) Sputter Ion Pump:
The line of IZ pumps meets the demand for highly efficient vacuum pumps used in demanding
applications from the areas of research and development. Sputter ion pumps are diode type
pumps with an optimized pumping speed for noble gases. The IZ line allows direct pressure
measurements down to a pressure range of approx. 10-n mbar through the integrated pressure
readout of the operating unit IPC.
28
1) Edwards: 1-a) EXT & nEXT series:
Two basic technologies are used in these pumps: magnetic bearings and mechanical ceramic ball
bearings. Ceramic bearings, which are lubricated for life by either grease or oil, have replaced
conventional steel bearings. Magnetic bearings further increase reliability. Edwards' EXT and
nEXT turbomolecular pumps use a hybrid bearing arrangement with a permanent magnet upper
bearing and an oil lubricated ceramic lower bearing.
State-of-the-art rotor design enhances performance to deliver exceptional pumping speeds and
compression ratios
Compact design with high performance for efficient systemization
Compatible with Edwards TIC turbo and instrument controllers meaning you can add up to 3
vacuum gauges without the need of an additional gauge controller
RoHS compliant and CSA/UL approve
1-b) STP Magnetically Levitated Turbomolecular series:
The rotor is entirely suspended by magnetic bearings so all contact between the rotor and the
remainder of the pump is eliminated. As well as giving very low vibration, the elimination of
contact means no bearing wear and no requirement for consequent pump maintenance. STP
pumps can be a good choice for applications demanding high up-time, hydrocarbon-free
pumping, minimal maintenance, low vibration and it has Complete range from 300 to 4500 I s-i.
29
2) Leybold: 2-a) Turbovac/Turbovac MAG:
The turbomolecular pumps from Leybold generate a high and ultra-high vacuum. In connection
with a well rated backing pump, pressures below 10-10 mbar (0.75 x 10-10 Torr) can be attained.
Oerlikon Leybold Vacuum offers two product lines:
1. TURBOVAC line: Turbomolecular pumps with mechanical rotor suspension
2. TURBOVAC MAG line Turbomolecular pumps with magnetic rotor suspension
Each of the two product lines contains "classic" turbomolecular pumps as well as turbomolecular
pumps with a compound stage.
The TURBOVAC pumps are used in the pressure range from 10-1 mbar (0.75 x 10-1 Torr) to 10-10
mbar (0.75 x 10-10 Torr). Pumping speeds for air vary from 35 l x s-1 (inlet flange diameter = 40
mm (1.57 in.)) to 1,600 l x s-1 (inlet flange diameter = 250 mm (9.84 in.)). Through the compact
design, the most reliable ceramics ball bearings and the simplicity of operation, this line of
pumps is used in all high vacuum and ultra-high vacuum areas of application. In particular the
TURBOVAC pumps are very successfully operated in mass spectroscopy applications, gas and
liquid chromatographic analysis, CD, DVD and hard disk production, manu- facturing of large-
surface optical layers, and non-corrosive semiconductor fabrication processes.
Features & Benefits:
Oil-free pumps for the generation of clean high and ultra-high vacuum conditions
Highly performance in any orientation
Highly degree of operating reliability
Easy to operate
Compact design
30
3) PFIEFFER: 3-a) HiPace(r) Series(Turbopumps with hybrid bearing ) :
It is the combination of a ceramic ball bearing on the fore-vacuum side and a permanent
magnetic radial bearing on the high vacuum side. This bearing technology does not require
electromagnets and has a long service life with maintenance intervals of approximately 4 years.
The ball bearing and the operating fluid reservoir can be replaced on site within less than 30
minutes.
3-b) ATH-M Series (Turbopumps with 5-axis magnetic levitation):
Electro-magnetic bearings are also called "active magnetically levitated", because the rotor
position is continuously monitored and adjusted accordingly. This enables wear-free, low
vibration operation with an automatic out-of- balance compensation. Continuous rotor stability
is assured. These bearings are maintenance-free and require no lubrication. (Note: HiPace(r) 300
M , HiPace(r) 700 M and HiPace(r) 800 M are in this category)
4) Agilent Technologies(Varian):
Turbo V series: it comes in different models such as
Turbo-V 1001 Navigator
Turbo-V 2300 TwisTorr
Turbo-V 2K-G
Turbo-V 301 Navigator
Turbo-V 3K-G
Turbo-V 551 Navigator
Turbo-V 701 Navigator
Turbo-V 81 T
Turbo-V 81-M
31
1) Edwards: 1-a) APG 100 Active Pirani Vacuum Gauge:
Features include compact size for easy installation, a linear output, and a replaceable sensor
tube. The new gauges are compatible with all Edwards TIC instrument controllers and other
active gauge controllers and displays. They are also CSA, C/US approved as well as fully RoHS
compliant due to their lead-free construction.
1-b) APGX-H Active Linear Convection Gauges:
Edwards Linear Convection Vacuum Gauge has a wide measuring range from 1333 to 3 x
104mbar (1000 to 2.3 x 10-Torr). The use of convection technology ensures accuracy and
sensitivity are maintained to the top of the range. The gauge is compact and may be mounted in
any orientation, simplifying installation where space is limited. The gauge incorporates a set
point and two LEDs, which indicate set point and gauge status.
1-c) Model 600 Barocel(r):
The Model 600 Barocel transducer is an advanced design capacitance manometer which uses
advanced technology to improve zero stability after temperature excursions or pressure
overloads.
High accuracy of 0.15 of reading
High resolution of 0.01 full scale
Unaffected by overpressure. Repeats within 0.01 full scale after being exposed to 2.4 bar (35
psi)
True total pressure reading independent of gas composition
High level output of 0-10 volts d.c. full scale, linear with pressure
32
1) Edwards:
1-d) Model 655, 658 and 659 Barocel(r):
The sensing cell utilizes a unique diaphragm design, stitch welding process, and a new sensing
cavity geometry which provides enhanced resistance to particulate contamination.
Wide measuring range of four decades
High accuracy of 0.15% of reading
High resolution of better than 0.005% of FS
Internal temperature maintained at 45°C.
Improved zero stability of less than 0.002% FSI °C
1-e) BGV Manual Gate Valves:
The BGV basement gate valves are a range of stainless steel, bellows-sealed basement isolation
valves. The BGV valves are designed for an operating pressure range of 1 x 1 0 mbar to 1.2 bar
absolute (1 x lO7to 1.2 x 10Pa). The valves withstand 1.2 bar absolute in either direction and can
tolerate against a 1 bar differential pressure across the valve seal.
1-f) SIPVP Soft-Start Isolation Valves:
Soft-start, pneumatically operated, in-line valves with interchangeable orifices for the controlled
pump down of processes where turbulent flow can cause problems with particulate
contamination. Slave and master valve combination allows slow initial pumping to minimise
disturbance. Both slave and master valves require separate pneumatic connections.
33
2) Leybold: 2-a) CERAVAC Transmitters CTR 100 and CTR 101:
The CERAVAC Transmitter with its diaphragm made of pure aluminium oxide ceramics offers
excellent accuracy and reproducibility. Some highlighted Specs are:
Materials exposed to gases: Ceramic (A1203). stainless steel 316, Vacon 70
Excellent accuracy
Suited as a reference sensor for monitoring test instruments in accordance with DIN/ISO 9000
RS 232 C interface
2-b) THERMOVAC Transmitters TTR 91 / TTR 91 S / TTR 96 S:
THERMOVAC transmitters are active sensors (pressure to voltage converters) using thermal
conductivity according to Pirani. The value of the trigger point (TTR 91S, TTR 96 5) can be
switched easily on the analog output and be shown on the display of the operating unit.
Features & Benefits:
Rugged sensing cells made of stainless steel
Compact design
Stable measurements within a wide temperature range
Highly resistant to overpressures
Exchangeable sensing cells
Fast response
Available with integrated switching relay (TTR 91 S, TTR 96 S)
TTR 91 (Part No. 230 035) is GOST standard compliant
34
2) Leybold: 2-c) THERMOVAC Transmitter with Fieldbus Interface Profibus TTR 211
PB / TTR 216 PB:
The THERMOVAC transmitters have been developed especially for integration into vacuum
systems. Being active sensors (pressure to voltage converters) with a well-proven Pirani sensing
cell and new operating and processing electronics these units offer a measurement range which
spans 5 x 10-4 to 1000 mbar (3.75 x 10-4 to 750 Torr).
Features & Benefits:
Rugged Pirani sensing cells also for corrosive media
Logarithmic signal output (algorithm supplied)
High reproducibility
Easily exchangeable sensing cells
Switching threshold adjustable over a wide range (1 x 10-3 to 500 mbar (1 x 10-3 to 375
Torr)) and relay contact
LED indicator for operation and trigger active
Easily accessible monitoring connection to check the measurement signal and the trigger
setting (volt- meter)
High EMI compatibility through screened housing, FCC-68 connector and cables
Computer interface - Fieldbus: Profibus DP
CE mark
35
2) Leybold: 2-d) PENNINGVAC Transmitters PTR 225 / PTR 225 S / PTR 237 :
The PENNINGVAC transmitters have been developed especially for integration in
programmable control systems. As active sensors (pressure to voltage converters) - equipped
with a rugged cold cathode sensing cell and with matched operating and processing electronics -
these transmitters offer a wide measurement range of I x 10.9 to I x 10-2 mbar (0.75 x 10-9 to
0.75 x 10-2 Torr).
Features & Benefits:
Low tendency for contamination (also during argon operation) due to high voltage reduction
after ignition of the plasma and due to the titanium cathodes
Switching threshold adjustable over a wide range (1 x 10-9 to 1 x 10-2 mbar (0.75 x 10-9 to
0.75 x 10-2 Torr)) and with a load- bearing relay contact (PTR 225 S)
High EMI compatibility through screened housing, FCC-68 connector and cables
Logarithmic signal output (algorithm supplied)
High resistance against sputtering due to titanium cathode plate
2-e) IONIVAC Transmitter ITR Series (90 & 200s):
The ITR 90 is a optimized combination transmitter. The combination of a hot
cathode ionisation sensor according to Bayard-Alpert and a Pirani sensor permits
vacuum pressure measurements of non-ignitable gases and gas mixtures in the
pressure range from 5 x 10-10 to 1000 mbar. The ITR 200 S is an optimized dual
cathode combination transmitter on the basis of the well proven ITR 90. Vacuum
pressure measurements of non-ignitable gases and gas mixtures is in the pressure
range from 5 x 10-10 to 1000 mbar.
36
1) Diffusion Pump:
1-a) Dow Corning:
Dow Corning DC-700 Series Silicone Diffusion Pump Fluids are the best Choice for applications
requiring high vacuum with fast pumping of large volumes of gas. They offer longer service life
resulting in fewer oil changes, faster pumping and minimal back-streaming.
DC-702 General Purpose
DC-704 High Vacuum
DC-705 Ultra High Vacuum
1-b) Santovac 5:
polyphenyl ether diffusion pump fluid with extremely low pressure capable of attaining 10E1° torr
range. An excellent choice when silicone fluids must be avoided. A double distilled version 5P
Ultra is also available.
Santovac 5 Five ring polyphenyl ether
Santovac 5P Ultra Double distilled to reduce the light end fraction
1-c) Leybonol:
Mineral oils (LEYBONOL LVO 500 and LVO 510
Silicone oils (LEYBONOL LVO 520)
37
1) Mechanical Vacuum Pump:
1-a) Fomblin:
Fomblin YL-VAC is a totally inert vacuum pump oil used in high oxygen and/or corrosive
environments. Fomblin is ideally suited for the harsh conditions encountered in semiconductor
manufacturing operations. There are several viscosities of Fomblin YL-VAC available to meet
most vacuum pump manufacturers requirements.
Fomblin Y06/16 Viscosity 64 (cSt @ 20°C)
Fomblin Y14/16 Viscosity 148 (cSt (c) 20°C)
Fomblin Y16/6 Viscosity 168 (cSt (c) 20°C)
Fomblin Y25/6 Viscosity 276 (cSt (c) 20°C)
1-b) Dupont’s Krytox:
DuPont's Krytox vacuum pump fluid is slightly less expensive and is similar to the Fomblin PFPE
fluids. Krytox is also available in several viscosities.
Krvtox 1506 Viscosity 62 (cSt (c) 20°C)
Krytox 1514 Viscosity 142 (cSt @ 20°C)
Krytox 1525 Viscosity 261 (cSt @ 20°C)
38
