QualyTest™ HLT 2xx - A & J Vacuum Services, Inc. 2xx Maintenance instructions...6 BG 805 457 BE /...

Maintenance Instructions

BG 805 457 BE / C (0204) HLT 2xx 1

QualyTest™HLT 2xx

VACUUM

VACUUM

2 BG 805 457 BE / C (0204) HLT 2xx

Table of contents Page

1 Important information............................................................................................... 4

1.1 Validity......................................................................................................................... 4

1.2 Content of these maintenance instructions ................................................................. 4

1.3 Safety information ....................................................................................................... 4

1.4 General information .................................................................................................... 5

1.5 List of documents........................................................................................................ 5

2 Design and functional description .......................................................................... 6

2.1 System overview ......................................................................................................... 62.1.1 Block diagram ............................................................................................................. 72.1.2 Power inlet and ground connection............................................................................. 8

2.2 Pump system .............................................................................................................. 92.2.1 Roughing pump......................................................................................................... 102.2.2 TMH 071 turbopump TC 600 drive electronics ......................................................... 112.2.3 Vacuum measurement.............................................................................................. 122.2.4 Valve block................................................................................................................ 13

2.3 Sniffer line LP 5xx ..................................................................................................... 14

2.4 Analytical system ...................................................................................................... 152.4.1 Detection system....................................................................................................... 152.4.2 Mass spectrometer supply MSV ............................................................................... 162.4.3 Electrometer pre-amplifier EVV................................................................................. 17

2.5 Electronics................................................................................................................. 182.5.1 MC 68 Control board................................................................................................. 182.5.2 I/O board ................................................................................................................... 192.5.3 Wiring board.............................................................................................................. 202.5.4 Fuses ........................................................................................................................ 21

3 HLT 2xx Maintenance and Service ........................................................................ 22

3.1 Maintenance and service schedule........................................................................... 22

3.2 Maintenance kits ....................................................................................................... 25

4 Maintenance Work .................................................................................................. 27

4.1 General ..................................................................................................................... 27

4.2 UNO 005A................................................................................................................. 284.2.1 Check oil level and replenish .................................................................................... 284.2.2 UNO 005A, oil change .............................................................................................. 28

4.3 Oil mist filter .............................................................................................................. 304.3.1 Check the oil mist filter, drain it and clean the oil pan ............................................... 304.3.2 Replace filter to oil mist filter ..................................................................................... 30

4.4 MVP 035 ................................................................................................................... 324.4.1 MVP 035, replace the diaphragm.............................................................................. 32

4.5 Scroll pump ............................................................................................................... 334.5.1 Varian Triscroll TS600............................................................................................... 33

BG 805 457 BE / C (0204) HLT 2xx 3

Page

4.6 TMH 071 ................................................................................................................... 344.6.1 Replace the lubricant reservoir ................................................................................. 344.6.2 TMH 071, exchange for bearing change................................................................... 35

4.7 Valve block ............................................................................................................... 364.7.1 Clean or replace the screwed fitting with filter on the vent connection ..................... 364.7.2 Clean the Pirani measuring elements P1 and/or P2 ................................................. 374.7.3 Clean the valve block, replace the seals and revise the valves ................................ 37

4.8 Ventilator 1................................................................................................................ 374.8.1 Clean / replace the filter mat..................................................................................... 37

4.9 LP 5xx....................................................................................................................... 374.9.1 Replace capillary filter............................................................................................... 374.9.2 Replace the sinter filter ............................................................................................. 37

4.10 Checking the Maintenance Work.............................................................................. 384.10.1 Weekly Maintenance Work....................................................................................... 384.10.2 Quarterly Maintenance Work .................................................................................... 384.10.3 Semiannual Maintenance Work................................................................................ 384.10.4 Annual Maintenance Work........................................................................................ 394.10.5 Biannual Maintenance Work..................................................................................... 39

Contamination Declaration................................................................................................. 40

4 BG 805 457 BE / C (0204) HLT 2xx

1 IMPORTANT INFORMATIONMaintenance on the HLT 2xx may only be performed by persons who have beenauthorized by PFEIFFER VACUUM for this purpose.

Authorized persons:Repair level I1) CustomerRepair level II1) Customer with technical education or PFEIFFER VACUUM

Service EngineerRepair level III1) Customer with PFEIFFER VACUUM Service training2) or

PFEIFFER VACUUM Service Engineer1) → see maintenance schedule (page 22 - 23)2) → PFEIFFER VACUUM offers courses to rapair level II and III.

1.1 ValidityThis document applies to products with part numbers:

Type Part number Voltage Roughing pump

HLT 260, QualyTestTM BG Z08 000 230 V~ UNO 005A



HLT 260, QualyTestTM BG Z08 050 230 V~ UNO 005A; without RC

HLT 260, QualyTestTM BG Z08 060 120 V~ UNO 005A; without RC

HLT 265, QualyTestTM Select BG Z08 020 100 – 230 V~ extern

HLT 270, QualyTestTM Dry BG Z08 010 230 V~ MVP 035



HLT 275, QualyTestTM Dry+ BG Z08 015 230 V~ Scroll pump

HLT 275, QualyTestTM Dry+ BG Z08 016 100 - 120 V~ Scroll pump

The part number can be taken from the product name plate.

The described functions, illustrations and data are given with the understanding that they aresubject to change without notice.

1.2 Content of these maintenance instructionsThe present maintenance instructions describe the periodic maintenance to be performed onthe HLT 2xx.

For information on the operation of the equipment, a description of the equipment and thetechnical specifications please refer to the separate user’s guide.

1.3 Safety informationBasic safety information

• When handling process gases please follow the applicable regulations and protectivemeasures.

• Although helium is an inert gas it can cause asphyxiation in high concentrations.

BG 805 457 BE / C (0204) HLT 2xx 5

• The test object and the gas fittings must be able to withstand the applied pressuregradient.

• Products returned to PFEIFFER VACUUM for service or repair should, if possible, befree of harmful substances (e.g. radioactive, toxic, caustic or microbiological). Otherwise,the type of contamination must be declared.(A copy of the "Declaration of Contamination" can be found on page 39. Additional formscan be obtained from your nearest PFEIFFER VACUUM service center.)

• The line filter, the power supply unit, the wiring board and the roughing pump have partsthat are on voltages higher than 50 V. For this reason the power plug must always bedisconnected before the HLT 2xx is opened for service work.

Explanations of pictograms

NOTE:Information on correct handling or use.

CAUTION:Information on preventing extensive equipment and environmental damage.

DANGER:Information on preventing bodily injury or extensive property damage.

Vacuum area:Always wear clean, lint-free gloves and use clean tools when working in this area.

1.4 General information• Electrical components (circuit boards, EPROMs, electrical connections) are sensitive to

electrostatic discharge and appropriate precautions must be taken. In particular thecircuit boards and EPROMs must be stored in antistatic packing material.

• Failure to take appropriate precautions can void the warranty.

• PFEIFFER VACUUM declines any liability and the warranty becomes null and void if theproduct is modified or operated with accessories that are not listed in the correspondingproduct documentation.

1.5 List of documents

BG 805 263 BE User’s guide HLT 2xxBG 805 457 BE Maintenance instructions HLT 2xxPK 800 152 BN User’s guide UNO 005APJ 11400 User’s guide MVP 035PM 800 504 BN User’s guide TMH 071BG 805 268 BD User’s guide LP 5xx6999-04-250 User’s guide, Scroll pump Triscroll TS600

6 BG 805 457 BE / C (0204) HLT 2xx

2 DESIGN AND FUNCTIONAL DESCRIPTIONThe HLT 2xx is a microprocessor controlled leak detector that is equipped with the mostadvanced electronic and electromechanical components. All processes within the instrumentare controlled automatically.

2.1 System overview

RC 260

UNO 005Aor / oderMVP 035Test leak

TestleckV4V5

V2

V1

TMH 071

Ventilator 1Lüfter 1

Test portTestanschluss

Ventilator 2Lüfter 2

Oil mist filter (only HLT 260)Ölnebelfilter (nur HLT 260)

Valve blockVentilblock

Mass spectrometerMassenspektrometer

I/O Board

MC 68

MSV

EVV Wiring boardVerdrahtungsebene

Fig. 2 HLT 2xx

BG 805 457 BE / C (0204) HLT 2xx 7

2.1.1 Block diagram

Fig. 3 HLT 2xx Block diagram

8 BG 805 457 BE / C (0204) HLT 2xx

2.1.2 Power inlet and ground connection(on the wiring board)

Fig. 4 Power inlet and ground connection

BG 805 457 BE / C (0204) HLT 2xx 9

2.2 Pump systemThe pump system consists of a roughing pump, a turbo pump, a helium detector and a valveblock that established most connections between the helium detector and the test port. Thelayout of the pump system is schematically shown in Fig. 5.

P2Pressure test connectionDruck Testanschluss

V3

P1Pressure fore vacuum

Druck Vorvakuum

Helium-Sensor

Turbo pumpTurbopumpe

Backing pumpVorvakuumpumpe

Test leakTestleck

Vent or LP connectionBelüftungs oder LP Anschluss

Backing pump optionalVorvakuumpumpe optional

V4

V6

V2V1

V5

Test portTestanschluss

Fig. 5 Pump system HLT 2xx

The test object can be connected to the test port with a KF 25 flange. Valves V1, V2, V3 andV4 establish the vacuum connection between the test object and the helium detector in sucha way that no operating state is created that is detrimental to the helium detector.

For calibrating the HLT 2xx a calibrated leak can be connected via valve V5.

Valve V6 is normally used for venting so that the test object can be removed from the testport after the test has been completed. However, it can also be used as a sniffer probeconnection.

10 BG 805 457 BE / C (0204) HLT 2xx

2.2.1 Roughing pump

a) HLT 260: UNO 005A (→ Fig. 6)

Single-stage, oil-immersed rotary vane vacuum pump with a nominal volume flow rate of4 m3/h at 50 Hz and 5 m3/h at 60 Hz.

Oil fillerÖleinlass

Oil drainÖlablass

Oil level sight glasÖlstandsschauglas

Gas ballast valveGasballastventil

Fig. 6 UNO 005A

b) HLT 270: MVP 035 (→ Fig. 7)

Two-stage diaphragm vacuum pump for absolutely oil-free pumping of gases with a volumeflow rate of 1.3 m3/h at 50 Hz and 1.5 m3/h at 60 Hz.

Fig. 7 MVP 035

BG 805 457 BE / C (0204) HLT 2xx 11

c) HLT 265: External roughing pump

An external roughing pump can be connected to the HLT 265 via the KF 16 flange. If objectswith a large volume need to be tested an additional roughing pump to the HLT 260 andHLT 270 can also be connected to the flange.

d) HLT 275: External scroll pump

Oil-free, 2-stage scroll pump with a nominal volume flow rate of 25 m3/h at 50 Hz and30 m3/h at 60 Hz,

2.2.2 TMH 071 turbopump TC 600 drive electronics

RS485

REMOTE

HEAT / TMSVENT

FOREPUMPFAN

TC 600

to the sensorzum Sensor

to the valve blockzum Ventilblock

Fig. 8 TMH 071 with TC 600

12 BG 805 457 BE / C (0204) HLT 2xx

2.2.3 Vacuum measurement

Pirani measuring elements P1 and P2

P1 measures the fore vacuum pressure in the turbomolecular pump.

P2 measures the pressure on the test port.

Pirani measuring elementsPirani-Messelemente

HolderHalter

P2

P1

to the valve blockzum Ventilblock

Fig. 9 Vacuum measurement

BG 805 457 BE / C (0204) HLT 2xx 13

2.2.4 Valve block

V4

TestportTestanschluss

V2

V1

V3

V6

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Testleck

Srewing flange (ordering No. PM 043 687) to optionally fore vacuum pumpEinschraubflansch (Bestell Nr. PM 043 687) zur optionalen Vorvakuumpumpe

P1P2

V4

V6

V3

V2

V1

V5

Fig.10 Valve block

Solenoid valves V1 to V6.

Depending on their function the valves have different nominal diameters and opening forces.V2 and V6 are concepted for 0.0 to 1.1 bar (open against atmosphere).V1, V3, V4, V5 are conceted for 0.0 to 0.5 bar.

All valves open electromagnetically and close by spring force. They are controlled with24 V=.

The tightness of the valves toward the atmospheric side is < 10-9 mbar l/s. The tightness atthe valve piston is normally < 10-6 mbar l/s, but can be impaired by contamination withoutaffecting normal operation of the HLT 2xx.

14 BG 805 457 BE / C (0204) HLT 2xx

2.3 Sniffer line LP 5xx(→ User’s guide BG 805 268 BN)

(218) (120 / 385)(3 m / 5 m / 10 m)

Sniffer lineSchnüffelsonde

HandleHandgriff

Sniffer tipSchnüffelspitze

Capillary filterstandard: plasticoption: metal

KapillarfilterStandard: KunststoffOption: Metall

(120)

TP 385 Tip 385 mm stiff BG 449 216 -T

(385)

Sinter filterSinterfilter

TP 312 Tip 120 mm stiff BG 449 215 -TTP 312 Spitze 120 mm steif BG 449 215 -T TP 385 Spitze 385 mm steif BG 449 216 -T


TF 385 Tip 385 mm flexible BG 449 218 -T

(385)

TF 312 Tip 120 mm flexible BG 449 217 -T

(120)TF 385 Spitze 385 mm flex BG 449 218 -TTF 312 Spitze 120 mm flex BG 449 217 -T



Fig. 2–11 Sniffer line with sniffer probe

Type Ordering No. Sniffer line length Sniffer probe TP 312

LP 503 BG 449 207 -T 3 meters 120 mm stiff / BG 449 215 -T



Other sniffer probes (optional)

Type Length/Characteristic Ordering No.

TF 312 120 mm / flexible BG 449 217 -T

TP 385 385 mm / stiff BG 449 216 -T

TF 385 385 mm / flexible BG 449 218 -T

Spare parts sets for LP 5xx: BN 845 979 -T (5 x sinter filter)BN 846 392 -T (5 x capillary filter assembly)

Option: BG 449 140 -T (Capillary filter: metallic version for rough duty)

BG 805 457 BE / C (0204) HLT 2xx 15

2.4 Analytical system2.4.1 Detection system

The detection system essential comprises the ion source, the magnetic separation system,and the ion collector.

The ion source ionizes neutral gas particles from which it generates an ion beam. Thepositively charged ions are accelerated out of the ion source and subsequently enter themagnetic field. There they are deflected into a circular path, the radius of which depends onthe mass/charge ratio of the ions. Only the helium ions fulfill the separation conditions andreach the ion collector where they can be measured by the electrometer amplifier.

M > 4

M < 4

M = 4

1 2 3 4

5

6

7

8

9

10

11

Legende:1 Katode 12 Anode3 Katode 24 Verstärker5 Ionenfänger6 Abschirmung zu Ionenfänger7 Suppressor8 Magnetfeld9 Zwischenblende10 Extraktorblende11 Abschirmring

Legend:1 Cathode 12 Anode3 Cathode 24 Amplifier5 Ion collector6 Ion collector screen7 Suppressor8 Magnetic field9 Intermediate orifice10 Extractor orifice11 Screening ring

Fig. 12a Principle of detection systemMagnetic systemMagnetsystem

Mass spectrometer housingMassenspektrometergehäuse

Pre-amplifier unit EVVVorverstärkereinheit EVV

Connetion flangeAnschlussflansch

Connection Ion soureAnschluss Ionenquelle

Fig. 12b Design of detection system

16 BG 805 457 BE / C (0204) HLT 2xx

2.4.2 Mass spectrometer supply MSV

This module produces all voltages and currents required for operating the massspectrometer:– Anode heating voltage– Cathode heating voltage– Anode potential– Suppressor potential

Faults in the mass spectrometer are detected and signaled to the MC 68. The massspectrometer supply is monitored in MC 68.

XP1 XP2

K2 K1Anode preheatingAnode vorheizenA

Cathode errorKatode Fehler

e-

Cathode potentialKatodenpotential

IKP ISP +15V

-15V+24Vn.c.IAP

Suppressor potentialSuppressor Potential

Anode potentialAnodenpotential

Anode on/ein

Emission on/einF3=T1A

F1=T2A F4=M0,032AF2=T3,15A

Fig. 13 Mass spectrometer supply MSV

BG 805 457 BE / C (0204) HLT 2xx 17

2.4.3 Electrometer pre-amplifier EVV

The electrometer pre-amplifier converts the current flowing from the ion collector of the massspectrometer into a voltage signal. It has four amplification stages. The MC 68 control boardselects the required amplification stage and processes the analog output signal. Thedetection limit in the most sensitive range is approximately 1x10-15 A.

Fig. 14 Ion collector pre-amplifier unit

NOTE:The ion collector pre-amplifier unit (→ Fig. 14) cannot be opened and repaired. Thecomplete unit has to be replaced in the event of a fault.

18 BG 805 457 BE / C (0204) HLT 2xx

2.5 Electronics2.5.1 MC 68 Control board

XP3J2 J1

XP7_MC68 XP6_MC68

DIP switch S1DIP-Schalter S1 1=PROCESSOR RESET 2=GLOBAL RESET 3=UNITS / SUPER GLOBAL RESET 4=not evaluated wird nicht ausgewertet

Flash PROML H

LithiumAccumulator

Jumper XJ1

DIP switch S2DIP-Schalter S2 1=PERMANENT "Burn in" 2= 3= 4=

not evaluatedwird nicht ausgeführt

Fig. 15 MC 68, components side

BG 805 457 BE / C (0204) HLT 2xx 19

2.5.2 I/O board

J2J1

XP5_IO

XP1_IO XP2_IO

F2=T0,8AF1=T0,8A

F3=T0,315A

Fig. 16 I/O board

20 BG 805 457 BE / C (0204) HLT 2xx

2.5.3 Wiring board

XS2_MSV

XS1_MSV

XS2_I/O

XS6_MSV XS7_MC68

XS1_I/OXP

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F1=Gas fuse 350V Gasableiter 350V

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BG 805 457 BE / C (0204) HLT 2xx 27

4 MAINTENANCE WORK

4.1 GeneralCAUTION:Maintenance on the HLT 2xx may only be performed by persons who havebeen authorized by PFEIFFER VACUUM for this purpose.

Authorized persons:Repair level I1) CustomerRepair level II1) Customer with technical education or PFEIFFER VACUUM

Service EngineerRepair level III1) Customer with PFEIFFER VACUUM Service training2) or

PFEIFFER VACUUM Service Engineer1) → see maintenance schedule (page 22 - 23)2) → PFEIFFER VACUUM offers courses to rapair level II and III.

CAUTION:The safety instructions in Chapter 1.3 are to be conscientiously followed whenevermaintenance work is performed.

CAUTION:The power supply and the roughing pump have components that are on voltageshigher than 50 V. For this reason the power plug must always be disconnectedbefore the HLT 2xx is opened for service work.

Vacuum area:Always wear clean, lint-free gloves and use clean tools when working in this area.

28 BG 805 457 BE / C (0204) HLT 2xx

4.2 UNO 005A(valid for HLT 260)

4.2.1 Check oil level and replenish(weekly)

Required material: Mineral oil, 1 l, from maintenance kit, Ordering No. PT 110 010 -T

Procedure:

• Turn off the power switch.

• Detach the power plug.

• Remove operating unit RC 260.

• With socket wrench unfasten the latch on the right and left-hand side.

• Lift the hood perpendicularly upward.

• Detach the ground cable.

• Visually check the oil level and possible oil discoloration in the UNO 005 A by peekingthrough ventilator (2).

• If the oil level is below the minimal marker remove the oil filler cap with a screwdriver(→ Fig. 6), fill oil up to the max. marker and turn the screw in again.

• Replace the oil if it is discolored (→ Chapter 4.2.2).

• Reconnect the ground cable.

• Reinstall the hood and close the latches on the left and right-hand side with the socketwrench.

• Reinstall operating unit RC 260.

• Put the HLT 2xx back into service according to the user’s guide.

4.2.2 UNO 005A, oil change(annually)

Required material: Mineral oil, 1 l, from maintenance kit, Ordering No. PT 110 010 -T

Procedure:





• Detach the ground cable


• With a screwdriver remove the oil filler cap (→ Fig. 6).

• Position an oil collection vessel and direct the oil drain tube (→ Fig. 6) into the vessel.

• With a open-end wrench size 13 and a hexagon-socket-screw key size 5 unfasten thedrain screw on the drain tube (→ Fig. 6) and drain the oil.

BG 805 457 BE / C (0204) HLT 2xx 29

• Lightly turn in the oil filler cap. Insert the power plug and allow the pump to run 5 to 10 sec.so that the remaining oil drains.


• With a open-end wrench size 13 and a hexagon-socket-screw key size 5 reinstall the drainscrew on the drain tube.

• Remove the oil filler cap again and fill 0.33 l of fresh oil through a funnel.

• Reinstall the oil filler cap.





• Dispose of the waste oil in accordance with local regulations.

30 BG 805 457 BE / C (0204) HLT 2xx

4.3 Oil mist filter(valid for HLT 260)

4.3.1 Check the oil mist filter, drain it and clean the oil pan(weekly)

Procedure:







• Visually check the transparent plastic cylinder (→ Fig. 20).

• If oil is located in the plastic cylinder, manually unscrew the plastic cylinder by turning itcounterclockwise and dispose of the collected oil in accordance with local regulations.

• Reinstall the plastic cylinder.

• Clean the oil pan with a cloth wet with alcohol.





4.3.2 Replace filter to oil mist filter(semiannually)

Required material: Mineral oil P3, 1 l, from maintenance kit, Ordering No. PT 110 010 -T

Procedure:






• Detach the ground cable.

• Manually unscrew the plastic cylinder by turning it counterclockwise and dispose of thecollected oil in accordance with local regulations.

• First wipe the filter retaining screw with a dry piece of cloth, then unfasten it by hand, andremove it together with the filter.

• Put the replacement filter on the retaining screw and reinstall the retaining screw togetherwith the filter.

BG 805 457 BE / C (0204) HLT 2xx 31

Plastic cylinderKunststoffzylinder

Filter

Filter retaining screwFilterhalteschraube

Fig. 20 Replacing the filter of the oil mist filter

• Reinstall the plastic cylinder.





32 BG 805 457 BE / C (0204) HLT 2xx

4.4 MVP 035(valid for HLT 270)

4.4.1 MVP 035, replace the diaphragm(semiannually)

Required material: Wearing parts set, from maintenance kit, Ordering No. PT 110 011 -T

Procedure:







• Unfasten the two hoses (fore vacuum and exhaust line) on the diaphragm pump.

• With a Phillips screwdriver No. 2 unfasten 6 screws each on the head covers andsimultaneously tilt down the two head covers toward the front, together with theconnection lines.

• Remove two sealing rings each on the head covers.

• Also remove the intermediate plates

• Remove two valve plates each on the intermediate plates.

• Carefully turn the HLT 270 forward on its side.

Fig. 21a lift diaphragm Fig. 21b unscrew diaphragm

CAUTION:When removing the molded diaphragm make sure that the compensating washersdo not get lost.

• With your thumb press in the molded diaphragm in such a way that you can grip it on theopposite side with the other fingers. (→ Fig. 21a).

• Unscrew the molded diaphragm from the pump housing by turning it counterclockwise(→ Fig. 21b).

BG 805 457 BE / C (0204) HLT 2xx 33

• Clean contaminated parts and sealing surfaces with alcohol.

• Fit each new molded diaphragm with the same number of compensating washers as theold one.

• Screw in the new molded diaphragms.

• Carefully set the HLT 270 upright.

• Set the intermediate plates on the molded diaphragm and install the valve plates.

• Insert the sealing rings on the head covers and place both head covers together in thecorrect position on the intermediate plate.

• With a Phillips screwdriver No. 2 screw in and tighten 6 screws on each head cover.

• If an external roughing pump is used, reestablish the KF 16 connection to the externalroughing pump.





4.5 Scroll pump(valid for HLT 275)

4.5.1 Varian Triscroll TS600

Maintenace work according to Varian operating instructions

34 BG 805 457 BE / C (0204) HLT 2xx

4.6 TMH 071(valid for HLT 260, HLT 265, HLT 270, HLT 275)

4.6.1 Replace the lubricant reservoir(semiannually)

Required material: Replacement lubricant reservoir from maintenance kitOrdering No. PT 110 010 -Tor PT 110 011 -T

The system for lubricating the ball bearing is factory filled with TL 011. The lubricant needs tobe changed at least once per year (under extremely heavy loads or unclean processes morefrequently).

The complete lubricant reservoir must always be changed.

Procedure:

• In MANUAL MODE switch off the TMH 071 and wait until the rotational speed is <50 Hz.

• Vent the HLT 2xx by opening the valves V3 and V6.



CAUTION:To prevent damage on the TMH 071 the HLT 2xx may not be moved for 4 minutesafter it has been switched off.

• If an external roughing pump is used, detach the KF16 connection to the external roughingpump.

• Carefully set the HLT 2xx on its back or on ist right side in front view.

Connection external fore vacuum pumpAnschluss externe Vorvakuumpumpe

Cap to operating media reservoirVerschlussdeckel zu Betriebsmittelspeicher

Ventilator filterLüfterfilter

Covering panel to ion sourceAbdeckblech zu Ionenquelle

Fig. 22 Bottom of HLT 2xx

BG 805 457 BE / C (0204) HLT 2xx 35

• With a hexagonal socket wrench size 19 (or, if your unit is equipped with a new TMH 071,with PFEIFFER tool PVM40498) unscrew the cap (→ Fig. 22) on the bottom.

• Remove the lubricant reservoir (→ Fig. 22) with two screw drivers and dispose of it inaccordance with local regulations.

• Insert a new lubricant reservoir (according to PM 800 504 BN) and reinstall the cap screw.

• Set the HLT 2xx upright again.

• If an external roughing pump is used, reestablish the KF 16 connection to the externalroughing pump.


4.6.2 TMH 071, exchange for bearing change(biannually)

Required material: Exchange TMH 071, Ordering No. PM P02 810 #A

CAUTIONThis work must be carried out by PFEIFFER VACUUM or a service engineer whohas been trained by PFEIFFER VACUUM.

36 BG 805 457 BE / C (0204) HLT 2xx

4.7 Valve block(valid for HLT 260, HLT 265, HLT 270, HLT 275)

4.7.1 Clean or replace the screwed fitting with filter on the vent connection(semiannually)

Required material: Replacement lubricant reservoir from maintenance kitOrdering No. PT 110 010 -Tor PT 110 011 -T

Procedure:







Venting filterBelüftungsfilter

Fig. 23

• With a fork wrench size 12 unfasten the hose coupling on the valve block and pull thehose off the nipple (→ Fig. 23).

• With a hexagon pipe socket wrench size 17 remove the screwed fitting with filter.

• Install the replacement screwed fitting together with the filter on the valve block.

• Mount the hose on the nipple and tighten the hose coupling.

• Connect the ground cable.




BG 805 457 BE / C (0204) HLT 2xx 37

4.7.2 Clean the Pirani measuring elements P1 and/or P2(semiannually)


4.7.3 Clean the valve block, replace the seals and revise the valves(annually)

Required material: Seal kit, Ordering No. PT 110 030 -TSpare parts kit to valve block, Ordering No. PT 110 040 -T


4.8 Ventilator 14.8.1 Clean / replace the filter mat

(weekly / quarterly)

see User’s guide HLT 2xx BG 805 263 BE

4.9 LP 5xx4.9.1 Replace capillary filter

(weekly)

see User’s guide LP 5xx, BG 805 268 BE

4.9.2 Replace the sinter filter(quarterly)

see User’s guide LP 5xx, BG 805 268 BE

38 BG 805 457 BE / C (0204) HLT 2xx

4.10 Checking the Maintenance WorkThe following sections suggest how to check that periodic maintenance work has beencarried out.

CAUTION:In case of neglect of the maintenance work restrictions or refusal of warranty claimsmight apply.

4.10.1 Weekly Maintenance Work

Assembly Work to be performed → Section O.K.UNO 005A Check oil level and replenish 4.2.1Oil mist filter Replace filter to oil mist filter 4.3.1Ventilator 1 Clean the filter mat BG 805 263 BELP 5xx Replace the capillary filter BG 805 268 BE

The above work has been carried out by: .....................................................................................................................

Date: ..................................................... Signature: ......................................................................................

4.10.2 Quarterly Maintenance Work

Assembly Work to be performed → Section O.K.Ventilator 1 Replace the filter mat BG 805 263 BELP 5xx Replace the sinter filter BG 805 268 BESound absorber Replace sound absorber cartridge B 8199 999 XD


Date: ..................................................... Signature: ......................................................................................

4.10.3 Semiannual Maintenance Work

Assembly Work to be performed → Section O.K.Oil mist filter Replace the filter 4.3.2MVP 035 Replace the diaphragm 4.4.1TMH 071 Replace the lubricant reservoir 4.6.1Valve block Clean or replace the screwed fitting with filter 4.7.1

Clean the measuring elements P1 and/or P2 4.7.2


Date: ..................................................... Signature: ......................................................................................

BG 805 457 BE / C (0204) HLT 2xx 39

4.10.4 Annual Maintenance Work

Assembly Work to be performed → Section O.K.UNO 005A Oil change 4.2.2Valve block Clean the valve block, replace the seals and

revise the valves4.7.3

The above work has been carried out by: ....................................................................................................................

Date: ..................................................... Signature: .....................................................................................

4.10.5 Biannual Maintenance Work

Assembly Work to be performed → Section O.K.

TMH 071 Exchange for bearing change 4.6.2

The above work has been carried out by: ....................................................................................................................

Date: ..................................................... Signature: .....................................................................................

40 BG 805 457 BE / C (0204) HLT 2xx

CONTAMINATION DECLARATION

Legally binding declaration: I/we hereby declare that the information on this form is complete and accurate and that I/we will assume any further costs that may arise. The contaminated product will be dispatched in accordance with the applicable regulations.

Organization/company

Address Post code, place

Phone Fax

Email

Name

Date and legally binding signature Company stamp

1) or not containing any amount of hazardous residues that exceed the permissible ex- posure limits

� Process related contamination of product: toxic no q 1) yes q

caustic no q 1) yes q

biological hazard no q yes q 2)

explosive no q yes q 2)

radioactive no q yes q 2)

other harmful substances no q 1) yes q

The service, repair, and/or disposal of vacuum equipment and components will only be carried out if a correctly completed declaration has been submitted. Non-completion will result in delay.This declaration may only be completed (in block letters) and signed by authorized and qualified staff.

Copies:Original for addressee - 1 copy for accompanying documents - 1 copy for file of sender

��Harmful substances, gases and/or by-products Please list all substances, gases, and by-products which the product may have come into contact with:

Trade/product name Chemical name(or symbol)

Precautions associatedwith substance

Action if human contact

Description of product Type Article Number Serial Number

Reason for return

� Operating fluid(s) used (Must be drained before shipping.)

The product is free of any sub-stances which are damaging tohealth yes q

This form can be downloaded from our website.

2) Products thus contaminated will not be ac- cepted without written evidence of decontami- nation!

BG 805 457 BE / C (0204) HLT 2xx 41

Pfeiffer Vacuum GmbHBerliner Strasse 43D–35614 AsslarDeutschlandTel +49-(0) 6441-802-0Fax +49-(0) [email protected]://www.pfeiffer-vacuum.de

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QualyTest™ HLT 2xx - A & J Vacuum Services, Inc. 2xx Maintenance instructions...6 BG 805 457 BE /...

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