Page 1
Regulator Flow Curves For
Bulk Gas Systems, Cylinder Gas Cabinets and Gas Distribution Systems Report # 30008300 Rev 5
August 28, 2017
Scope: This document is a reference guide to help customers determine an appropriate AP Tech pressure regulator model based on system flow requirements. It is an array of regulator flow curves for the most popular AP Tech pressure regulators used in bulk gas systems, cylinder gas cabinets and gas distribution systems. For information and specifications related to the specific model regulator, please refer to the catalog data sheet.
Advanced Pressure Technology 687 Technology Way Napa, CA 94558 Telephone: 707-259-0102
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Bulk Gas System Flow Curves Report # 30008300 Rev 5
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General Recommendations
Regulator Series Maximum Source Pressure psig (bar)
Maximum Outlet Pressure psig (bar)
Flow Coefficient, Cv
Recommended Maximum Flow (slpm nitrogen)
AP1010 (AZ1010, AK1010)
3,500 (241 bar)
100 (7 bar)
0.09 100
AP1010 HF (AZ1010 HF, AK1010 HF)
3,500 (241 bar)
100 (7 bar)
0.15 200
AP1101 (AZ1101, AK1101)
300 (21 bar)
10 (0.7 bar)
0.05 1
AP1101 HF (AZ1101 HF, AK1101 HF)
300 (21 bar)
10 (0.7 bar)
0.12 2.5
AP1210 (AZ1210, AK1210)
1,700 (117 bar)
100 (7 bar)
0.9 800
AP1210 HF (AZ1210 HF, AK1210 HF)
1,700 (117 bar)
100 (7 bar)
1.2 1,000
AP1210 FC (AZ1210 FC, AK1210 FC)
300 (21 bar)
100 (7 bar)
0.65 1,500
AP1310 (AZ1310, AK1310)
300 (21 bar)
100 (7 bar)
1.1 1,000
AP1402 TA (AZ1402 TA, AK1402TA)
300 (21 bar)
30 (2 bar)
0.45 6
AP1410T (AZ1410T, AK1410T)
2,300 (159 bar)
100 (7 bar)
0.45 400
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General Recommendations
AP1510 (AZ1510, AK1510)
3,500 (241 bar)
100 (7 bar)
0.09 100
AP1710 (AK1710)
3,500 (241 bar)
100 (7 bar)
0.05 100
AP1910 HF 3,500
(241 bar) 100
(7 bar) 0.17 400
AP9010 1,700
(117 bar) 100
(7 bar) 3.0 2,000
AP9030 1,700
(117 bar) 300
(21 bar) 3.0 2,000
AP9110 800
(55 bar) 100
(7 bar) 4.0 5,000
AZ9210 (AK9210)
300 (21 bar)
100 (7 bar)
1.6 2,000
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Mini Regulator Recommendations
Regulator Series Maximum Source Pressure
psig (MPa)
Maximum Outlet Pressure
psig (MPa)
Flow Coefficient, Cv
Recommended Maximum Flow (slpm nitrogen)
AK110 150 psig (1 MPa)
100 psig (.7 MPa)
0.04 10 slpm
AP210 150 psig (1 MPa)
100 psig (.7 MPa)
0.035 5 slpm
AP510 150 psig (1 MPa)
100 psig (.7 MPa)
0.06 15 slpm
AP510 HF 150 psig (1 MPa)
100 psig (.7 MPa)
0.10 50 slpm
SL5210 150 psig (1 MPa)
100 psig (.7 MPa)
0.07 30 slpm
SL5201A 150 psig (1 MPa)
10 psig (.07 MPa)
0.07 3 slpm
SL5210 HF 150 psig (1 MPa)
100 psig (.7 MPa)
0.15 130 slpm
SL5201A HF 150 psig (1 MPa)
10 psig (.07 MPa)
0.15 10 slpm
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General Notes 1. AZ and AK series regulators have the same flow performance as their AP counterpart (e.g. for an AK1010 regulator refer to the
AP1010 flow curves and for an AZ1210 regulator refer to the AP1210 flow curves). 2. The recommended maximum flow might not be achievable depending on the inlet pressure. Please refer to specific flow curve
conditions. 3. For applications where the inlet pressure is above 600 psig, use the 600 psig inlet pressure flow curve as the change in flow
performance due to higher inlet pressure will not significantly change the shape of the flow curve. 4. Most regulator series are available with higher outlet pressure ranges although the source pressure may be lowered for certain models.
Refer to the data sheet for the specific regulator or consult the factory to determine availability and specifications. 5. Some regulators have options that can affect the maximum source pressure, maximum outlet pressure, and recommended maximum
flow rate. 6. In general, it is recommended that the regulator that meets the flow conditions and has the smallest flow coefficient be selected.
Typically, this regulator would have better performance in other characteristics and cost less.
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AP1010 Flow Curve Index
Series Inlet Pressure psig (bar)
Outlet Pressures psig (bar)
Connection Size Flow Curve Number
AP1010 AZ1010 AK1010
600 (41 bar)
90, 50, 30 (6.2, 3.4, 2 bar)
1/4 inch AP1010-001
300 (21 bar)
90, 50, 30 (6.2, 3.4, 2 bar)
1/4 inch AP1010-002
150 (10.3 bar)
90, 50, 30 (6.2, 3.4, 2 bar)
1/4 inch AP1010-003
100 (6.9 bar)
75, 50, 30 (5.2, 3.4, 2 bar)
1/4 inch AP1010-004
50 (3.4 bar)
30 (2 bar)
1/4 inch AP1010-005
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AP1010S 2PW FV4 FV4Flow Curve at 600 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 50 100 150 200 250 300 350
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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AP1010S 2PW FV4 FV4Flow Curve at 300 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 50 100 150 200 250
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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AP1010S 2PW FV4 FV4Flow Curve at 150 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 20 40 60 80 100 120 140
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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AP1010S 2PW FV4 FV4Flow Curve at 100 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
0 10 20 30 40 50 60 70 80 90 100
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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AP1010S 2PW FV4 FV4Flow Curve at 50 psig Inlet Pressure
0
5
10
15
20
25
30
35
40
0 5 10 15 20 25 30 35 40 45
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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AP1010 HF Flow Curve Index
Series Inlet Pressure psig (bar)
Outlet Pressures psig (bar)
Connection Size Flow Curve Number
AP1010 HF AZ1010 HF AK1010 HF
600 (41 bar)
90, 50, 30 (6.2, 3.4, 2 bar)
1/4 inch AP1010HF-001
300 (21 bar)
90, 50, 30 (6.2, 3.4, 2 bar)
1/4 inch AP1010HF-002
150 (10.3 bar)
90, 50, 30 (6.2, 3.4, 2 bar)
1/4 inch AP1010HF-003
100 (6.9 bar)
75, 50, 30 (5.2, 3.4, 2 bar)
1/4 inch AP1010HF-004
50 (3.4 bar)
30 (2 bar)
1/4 inch AP1010HF-005
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AP1010S 2PW FV4 FV4 HFFlow Curve at 600 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 50 100 150 200 250 300 350 400
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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AP1010S 2PW FV4 FV4 HFFlow Curve at 300 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 50 100 150 200 250 300 350
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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AP1010S 2PW FV4 FV4 HFFlow Curve at 150 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 50 100 150 200 250
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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AP1010S 2PW FV4 FV4 HFFlow Curve at 100 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
0 50 100 150 200 250
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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AP1010S 2PW FV4 FV4 HFFlow Curve at 50 psig Inlet Pressure
0
5
10
15
20
25
30
35
0 10 20 30 40 50 60 70 80 90
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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AP1101 Flow Curve Index
Series Inlet Pressure psig (bar)
Outlet Pressures (in Hg)
Connection Size Flow Curve Number
AP1101 AZ1101
1.45 (0.1 bar)
9, 15, 21 1/4 inch AP1101_c
AP1101 HF 2
(0.14 bar) 10, 17 1/4 inch AP1101HF_a
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AP 1101S FV4 FV4 Inlet Pressure = 1.45 psig (.01 Mpa)
0
5
10
15
20
25
300 0.5 1 1.5 2 2.5 3 3.5
Flow Rate - SLPM
OU
TLE
T P
RE
SS
UR
E
(in.H
g V
acuu
m)
-760
-660
-560
-460
-360
-260
-160
-60
OU
TLE
T P
RE
SS
UR
E
(mm
Hg
Abs
olut
e)
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AP 1101S HF FV4 FV4 Inlet Pressure 2 psig (.01 Mpa)
0
5
10
15
20
25
300 1 2 3 4 5 6 7
Flow Rate - SLPM
OU
TLE
T P
RE
SS
UR
E
(in.H
g V
acuu
m)
0
100
200
300
400
500
600
700
OU
TLE
T P
RE
SS
UR
E
(mm
Hg
Abs
olut
e)
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AP1210 Flow Curve Index
Series Inlet Pressure psig (bar)
Outlet Pressures psig (bar)
Connection Size Flow Curve Number
AP1210 AZ1210 AK1210
600 (41 bar)
90, 50, 30 (6.2, 3.4, 2 bar)
1/2 inch AP1210-001
3/4 inch AP1210-002
300 (21 bar)
90, 50, 30 (6.2, 3.4, 2 bar)
1/2 inch AP1210-003
3/4 inch AP1210-004
150 (10.3 bar)
90, 50, 30 (6.2, 3.4, 2 bar)
1/2 inch AP1210-005
3/4 inch AP1210-006
100 (6.9 bar)
75, 50, 30 (5.2, 3.4, 2 bar)
1/2 inch AP1210-007
3/4 inch AP1210-008
50 (3.4 bar)
30 (2 bar)
1/2 inch AP1210-009
3/4 inch AP1210-010
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AP1210S 2PW FV8 FV8Flow Curve at 600 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 100 200 300 400 500 600 700 800 900 1000
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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Bulk Gas System Flow Curves Report # 30008300 Rev 5
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AP1210S 2PW FV12 FV12Flow Curve at 600 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 100 200 300 400 500 600 700 800 900 1000
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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AP1210S 2PW FV8 FV8Flow Curve at 300 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 100 200 300 400 500 600 700 800 900 1000
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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AP1210S 2PW FV12 FV12Flow Curve at 300 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 100 200 300 400 500 600 700 800 900 1000
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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AP1210S 2PW FV8 FV8Flow Curve at 150 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 100 200 300 400 500 600
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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Bulk Gas System Flow Curves Report # 30008300 Rev 5
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AP1210S 2PW FV12 FV12Flow Curve at 150 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 100 200 300 400 500 600
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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AP1210S 2PW FV8 FV8Flow Curve at 100 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
0 100 200 300 400 500 600
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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Bulk Gas System Flow Curves Report # 30008300 Rev 5
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AP1210S 2PW FV12 FV12Flow Curve at 100 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
0 100 200 300 400 500 600
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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AP1210S 2PW FV8 FV8Flow Curve at 50 psig Inlet Pressure
0
5
10
15
20
25
30
35
40
0 50 100 150 200 250 300 350
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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AP1210S 2PW FV12 FV12Flow Curve at 50 psig Inlet Pressure
0
5
10
15
20
25
30
35
40
0 50 100 150 200 250 300 350
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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AP1210 HF Flow Curve Index
Series Inlet Pressure psig (bar)
Outlet Pressures psig (bar)
Connection Size Flow Curve Number
AP1210 HF AZ1210 HF AK1210 HF
600 (41 bar)
90, 50, 30 (6.2, 3.4, 2 bar)
1/2 inch AP1210HF-001
3/4 inch AP1210HF-002
300 (21 bar)
90, 50, 30 (6.2, 3.4, 2 bar)
1/2 inch AP1210HF-003
3/4 inch AP1210HF-004
150 (10.3 bar)
90, 50, 30 (6.2, 3.4, 2 bar)
1/2 inch AP1210HF-005
3/4 inch AP1210HF-006
100 (6.9 bar)
75, 50, 30 (5.2, 3.4, 2 bar)
1/2 inch AP1210HF-007
3/4 inch AP1210HF-008
50 (3.4 bar)
30 (2 bar)
1/2 inch AP1210HF-009
3/4 inch AP1210HF-010
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AP1210S 2PW FV8 FV8 HFFlow Curve at 600 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 200 400 600 800 1000 1200
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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Bulk Gas System Flow Curves Report # 30008300 Rev 5
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AP1210S 2PW FV12 FV12 HFFlow Curve at 600 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 200 400 600 800 1000 1200
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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Bulk Gas System Flow Curves Report # 30008300 Rev 5
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AP1210S 2PW FV8 FV8 HFFlow Curve at 300 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 200 400 600 800 1000 1200
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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Bulk Gas System Flow Curves Report # 30008300 Rev 5
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AP1210S 2PW FV12 FV12 HFFlow Curve at 300 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 200 400 600 800 1000 1200
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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AP1210S 2PW FV8 FV8 HFFlow Curve at 150 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 200 400 600 800 1000 1200
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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Bulk Gas System Flow Curves Report # 30008300 Rev 5
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AP1210S 2PW FV12 FV12 HFFlow Curve at 150 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 200 400 600 800 1000 1200
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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AP1210S 2PW FV8 FV8 HFFlow Curve at 100 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
0 200 400 600 800 1000 1200
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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Bulk Gas System Flow Curves Report # 30008300 Rev 5
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AP1210S 2PW FV12 FV12 HFFlow Curve at 100 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
0 200 400 600 800 1000 1200
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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AP1210S 2PW FV8 FV8 HFFlow Curve at 50 psig Inlet Pressure
0
5
10
15
20
25
30
35
40
0 100 200 300 400 500 600
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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AP1210S 2PW FV12 FV12 HFFlow Curve at 50 psig Inlet Pressure
0
5
10
15
20
25
30
35
40
0 100 200 300 400 500 600
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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AP1210 FC Flow Curve Index
Series Inlet Pressure psig (bar)
Outlet Pressures psig (bar)
Connection Size Flow Curve Number
AP1210 FC AZ1210 FC AK1210 FC
150 (10.3 bar)
75, 50, 30 (5.2, 3.4, 2 bar)
1/2 inch AP1210FC-001
3/4 inch AP1210FC-002
100 (6.9 bar)
75, 50, 30 (5.2, 3.4, 2 bar)
1/2 inch AP1210FC-003
3/4 inch AP1210FC-004
50 (3.4 bar)
30 (2 bar)
1/2 inch AP1210FC-005
3/4 inch AP1210FC-006
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AP1210S 2PW FV8 FV8 FCFlow Curve at 150 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
0 200 400 600 800 1000 1200 1400 1600 1800 2000
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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AP1210S 2PW FV12 FV12 FCFlow Curve at 150 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
0 200 400 600 800 1000 1200 1400 1600 1800 2000
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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AP1210S 2PW FV8 FV8 FCFlow Curve at 100 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
0 200 400 600 800 1000 1200
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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Bulk Gas System Flow Curves Report # 30008300 Rev 5
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AP1210S 2PW FV12 FV12 FCFlow Curve at 100 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
0 200 400 600 800 1000 1200
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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AP1210S 2PW FV8 FV8 FCFlow Curve at 50 psig Inlet Pressure
0
5
10
15
20
25
30
35
40
0 100 200 300 400 500 600 700
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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Bulk Gas System Flow Curves Report # 30008300 Rev 5
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AP1210S 2PW FV12 FV12 FCFlow Curve at 50 psig Inlet Pressure
0
5
10
15
20
25
30
35
40
0 100 200 300 400 500 600 700
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
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AP1310 Flow Curve Index
Series Inlet Pressure, psig (bar)
Outlet Pressures, psig (bar)
Connection Size Flow Curve Number
AP1310 AZ1310 AK1310
150 (10.3 bar)
90, 50, 25 (6.2, 3.4, 1.7 bar)
1/2 inch AZ1310-01
100 (6.9 bar)
75, 50, 25 (5.2, 3.4, 1.7 bar)
1/2 inch AZ1310-02
75 (5.2 bar)
50, 25 (3.4, 1.7 bar)
1/2 inch AZ1310-03
50 (3.4 bar)
25 (1.7 bar)
1/2 inch AZ1310-04
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AZ1310 and AK1310 (1/2 inch connections)Flow Test at 150 psig (10.3 bar) Inlet Pressure
0
20
40
60
80
100
120
0 200 400 600 800 1000 1200
Flow Rate (slpm nitrogen)
Out
let P
ress
ue (p
sig)
0.00
1.38
2.76
4.14
5.52
6.90
8.28
Out
let P
ress
ure
(bar
)
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AZ1310 and AK1310 (1/2 inch connections)Flow Test at 100 psig (6.9 bar) Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 200 400 600 800 1000 1200
Flow Rate (slpm nitrogen)
Out
let P
ress
ue (p
sig)
0.00
0.69
1.38
2.07
2.76
3.45
4.14
4.83
5.52
6.21
6.90
Out
let P
ress
ure
(bar
)
Page 53
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 53 of 134
AZ1310 and AK1310 (1/2 inch connections)Flow Test at 75 psig (5.2 bar) Inlet Pressure
0
10
20
30
40
50
60
70
0 200 400 600 800 1000 1200
Flow Rate (slpm nitrogen)
Out
let P
ress
ue (p
sig)
0.00
0.69
1.38
2.07
2.76
3.45
4.14
4.83
Out
let P
ress
ure
(bar
)
Page 54
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 54 of 134
AZ1310 and AK1310 (1/2 inch connections)Flow Test at 50 psig (3.4 bar) Inlet Pressure
0
10
20
30
40
50
60
0 100 200 300 400 500 600 700 800
Flow Rate (slpm nitrogen)
Out
let P
ress
ue (p
sig)
0.00
0.69
1.38
2.07
2.76
3.45
4.14
Out
let P
ress
ure
(bar
)
Page 55
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 55 of 134
AP1402TA Flow Curve Index Series Inlet Pressure
psig (bar) Outlet Pressures
Connection Size Flow Curve Number
AP1402TA AK1402TA
0 0, 10, 18 in Hg (vac) 1/4 inch AP1402TA
2 (0.14 bar)
13. 5 in Hg (vac) 1/4 inch AP1402TA_a
10 (0.7 bar)
0 in Hg (vac) 1/4 inch AP1402TA_e
30 (2 bar)
10 psig 1/4 inch AP1402TA_c
Page 56
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 56 of 134
AP 1402 TSA 2PW FV4 FV40
5
10
15
20
25
300 1 2 3 4 5 6 7 8 9 10
Flow Rate (slpm Nitrogen)
Out
let P
ress
ure
(in. H
g V
acuu
m)
0
127
253
380
507
633
760
Out
let P
ress
ure
(mm
Hg
Abs
olut
e)
Inlet Pressure = 0 psig (760 mm Hg)
Page 57
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 57 of 134
AP 1402 TSA 2PW FV4 FV4 Inlet Pressure - 2psig
0
5
10
15
20
25
300 2 4 6 8 10 12 14
Flow Rate in SLPM of Nitrogen
OU
TLE
T P
RE
SS
UR
E
(in.H
g of
Vac
uum
)
(760)
(660)
(560)
(460)
(360)
(260)
(160)
(60)
OU
TLE
T P
RE
SS
UR
E
(mm
Hg
Abs
olut
e)
Page 58
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 58 of 134
AP 1402 TSA 2PW FV4 FV4 Inlet Pressure - 10 psig 0
5
10
15
20
25
300 5 10 15 20 25 30
Flow Rate in SLPM of Nitrogen
OU
TLE
T P
RE
SS
UR
E
(in.H
g of
Vac
uum
)
(760)
(660)
(560)
(460)
(360)
(260)
(160)
(60)
OU
TLE
T P
RE
SS
UR
E
(mm
Hg
Abs
olut
e)
Page 59
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 59 of 134
AP 1402 TSA 2PW FV4 FV4 Inlet Pressure - 30 psig (0.2 MPa)
0
2
4
6
8
10
12
14
16
18
20
0 10 20 30 40 50 60 70 80
Flow Rate, slpm nitrogen
Out
let P
ress
ure,
psi
g
0.00
0.02
0.04
0.06
0.08
0.10
0.12
Out
let P
ress
ure,
MPa
Page 60
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 60 of 134
AP1410T Flow Curve Index Series Inlet Pressure
psig (bar) Outlet Pressures
psig (bar) Connection Size Flow Curve Number
AP1410T AK1410T
600 (41 bar)
90, 50, 30 (6.2, 3.4, 2 bar)
1/4 inch AP1410T-001
1/2 inch AP1410T-002
300 (21 bar)
90, 50, 30 (6.2, 3.4, 2 bar)
1/4 inch AP1410T-003
1/2 inch AP1410T-004
100 (6.9 bar)
75, 50, 30 (5.2, 3.4, 2 bar)
1/4 inch AP1410T-005
1/2 inch AP1410T-006
50 (3.4 bar)
30 (2 bar)
1/4 inch AP1410T-007
1/2 inch AP1410T-008
Page 61
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 61 of 134
AP1410TS 2PW FV4 FV4Flow Curve at 600 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 100 200 300 400 500 600
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 62
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 62 of 134
AP1410TS 2PW FV8 FV8Flow Curve at 600 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 100 200 300 400 500 600
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 63
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 63 of 134
AP1410TS 2PW FV4 FV4Flow Curve at 300 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 100 200 300 400 500 600
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 64
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 64 of 134
AP1410TS 2PW FV8 FV8Flow Curve at 300 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 100 200 300 400 500 600
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 65
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 65 of 134
AP1410TS 2PW FV4 FV4Flow Curve at 100 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
0 100 200 300 400 500 600
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 66
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 66 of 134
AP1410TS 2PW FV8 FV8Flow Curve at 100 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
0 100 200 300 400 500 600
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 67
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 67 of 134
AP1410TS 2PW FV4 FV4Flow Curve at 50 psig Inlet Pressure
0
5
10
15
20
25
30
35
40
0 50 100 150 200 250
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 68
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 68 of 134
AP1410TS 2PW FV8 FV8Flow Curve at 50 psig Inlet Pressure
0
5
10
15
20
25
30
35
40
0 50 100 150 200 250
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 69
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 69 of 134
AP1510 Flow Curve Index
Series Inlet Pressure (psig)
Outlet Pressures (psig)
Connection Size Flow Curve Number
AP1510 AZ1510 AK1510
600 (41 bar)
90, 50, 30 (6.2, 3.4, 2 bar)
1/4 inch AP1510-001
300 (21 bar)
90, 50, 30 (6.2, 3.4, 2 bar)
1/4 inch AP1510-002
150 (10.3 bar)
90, 50, 30 (6.2, 3.4, 2 bar)
1/4 inch AP1510-003
100 (6.9 bar)
75, 50, 30 (5.2, 3.4, 2 bar)
1/4 inch AP1510-004
50 (3.4 bar)
30 (2 bar)
1/4 inch AP1510-005
Page 70
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 70 of 134
AP1510S 2PW FV4 FV4Flow Curve at 600 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 50 100 150 200 250 300 350
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 71
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 71 of 134
AP1510S 2PW FV4 FV4Flow Curve at 300 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 20 40 60 80 100 120 140 160 180
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 72
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 72 of 134
AP1510S 2PW FV4 FV4Flow Curve at 150 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 10 20 30 40 50 60 70 80
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 73
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 73 of 134
AP1510S 2PW FV4 FV4Flow Curve at 100 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
0 10 20 30 40 50 60 70
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 74
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 74 of 134
AP1510S 2PW FV4 FV4Flow Curve at 50 psig Inlet Pressure
0
5
10
15
20
25
30
35
40
0 5 10 15 20 25 30 35 40
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 75
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 75 of 134
AP1710 Flow Curve Index
Series Inlet Pressure psig (bar)
Outlet Pressures psig (bar)
Connection Size Flow Curve Number
AP1710 AZ1710 AK1710
> 200 (14 bar)
90, 70, 50, 30 (6.2, 4.8, 3.4, 2 bar)
1/4 inch AP1710-001
Page 76
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 76 of 134
Page 77
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 77 of 134
AP1910 HF Flow Curve Index Series Inlet Pressure
psig (bar) Outlet Pressures
psig (bar) Connection Size Flow Curve Number
AP1910 HF
600 (41 bar)
90, 50, 30 (6.2, 3.4, 2 bar)
1/4 inch AP1910HF-001
1/2 inch AP1910HF-002
300 (21 bar)
90, 50, 30 (6.2, 3.4, 2 bar)
1/4 inch AP1910HF-003
1/2 inch AP1910HF-004
100 (6.9 bar)
75, 50, 30 (5.2, 3.4, 2 bar)
1/4 inch AP1910HF-005
1/2 inch AP1910HF-006
Page 78
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 78 of 134
AP1910S 2PW FV4 FV4 HFFlow Curve at 600 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 50 100 150 200 250 300 350 400 450
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 79
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 79 of 134
AP1910S 2PW FV8 FV8 HFFlow Curve at 600 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 50 100 150 200 250 300 350 400 450
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 80
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 80 of 134
AP1910S 2PW FV4 FV4 HFFlow Curve at 300 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 50 100 150 200 250 300 350 400
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 81
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 81 of 134
AP1910S 2PW FV8 FV8 HFFlow Curve at 300 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 50 100 150 200 250 300 350 400
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 82
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 82 of 134
AP1910S 2PW FV4 FV4 HFFlow Curve at 100 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
0 50 100 150 200 250 300
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 83
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 83 of 134
AP1910S 2PW FV8 FV8 HFFlow Curve at 100 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
0 50 100 150 200 250
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 84
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 84 of 134
AP9000 Flow Curve Index Series Inlet Pressure
(psig) Outlet Pressures
(psig) Connection Size Flow Curve Number
AP9010
600 (41 bar)
90, 50, 30 (6.2, 3.4, 2 bar)
3/4 inch AP9010-001
1 inch AP9010-002
300 (21 bar)
90, 50, 30 (6.2, 3.4, 2 bar)
3/4 inch AP9010-003
1 inch AP9010-004
100 (6.9 bar)
75, 50, 30 (5.2, 3.4, 2 bar)
3/4 inch AP9010-005
1 inch AP9010-006
AP9030 600
(41 bar) 250
(17.2 bar)
3/4 inch AP9030-001
1 inch AP9030-002
AP9110
300 (21 bar)
90, 50, 30 (6.2, 3.4, 2 bar)
3/4 inch AP9110-001
1 inch AP9110-002
150 (10.3 bar)
90, 50, 30 (6.2, 3.4, 2 bar)
3/4 inch AP9110-003
1 inch AP9110-004
100 (6.9 bar)
75, 50, 30 (5.2, 3.4, 2 bar)
3/4 inch AP9110-005
1 inch AP9110-006
Page 85
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 85 of 134
AP9010S 2PW FV12 FV12Flow Curve at 600 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 200 400 600 800 1000 1200 1400 1600 1800 2000
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 86
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 86 of 134
AP9010S 2PW FV16 FV16Flow Curve at 600 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 200 400 600 800 1000 1200 1400 1600 1800 2000
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 87
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 87 of 134
AP9010S 2PW FV12 FV12Flow Curve at 300 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 200 400 600 800 1000 1200 1400 1600 1800 2000
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 88
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 88 of 134
AP9010S 2PW FV16 FV16Flow Curve at 300 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 200 400 600 800 1000 1200 1400 1600 1800 2000
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 89
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 89 of 134
AP9010S 2PW FV12 FV12Flow Curve at 100 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
0 200 400 600 800 1000 1200 1400 1600 1800 2000
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 90
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 90 of 134
AP9010S 2PW FV16 FV16Flow Curve at 100 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
0 200 400 600 800 1000 1200 1400 1600 1800 2000
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 91
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 91 of 134
AP9030S 2PW FV12 FV12Flow Curve at 600 psig Inlet Pressure
0
50
100
150
200
250
300
0 200 400 600 800 1000 1200 1400 1600 1800 2000
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 92
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 92 of 134
AP9030S 2PW FV16 FV16Flow Curve at 600 psig Inlet Pressure
0
50
100
150
200
250
300
0 200 400 600 800 1000 1200 1400 1600 1800 2000
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 93
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 93 of 134
AP9110S 2PW FV12 FV12Flow Curve at 300 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 500 1000 1500 2000 2500 3000 3500 4000 4500 5000
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 94
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 94 of 134
AP9110S 2PW FV16 FV16Flow Curve at 300 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 500 1000 1500 2000 2500 3000 3500 4000 4500 5000
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 95
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 95 of 134
AP9110S 2PW FV12 FV12Flow Curve at 150 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 500 1000 1500 2000 2500 3000 3500 4000 4500 5000
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 96
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 96 of 134
AP9110S 2PW FV16 FV16Flow Curve at 150 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
90
100
0 500 1000 1500 2000 2500 3000 3500 4000 4500 5000
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 97
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 97 of 134
AP9110S 2PW FV12 FV12Flow Curve at 100 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
0 500 1000 1500 2000 2500 3000 3500 4000
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 98
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 98 of 134
AP9110S 2PW FV16 FV16Flow Curve at 100 psig Inlet Pressure
0
10
20
30
40
50
60
70
80
0 500 1000 1500 2000 2500 3000 3500 4000 4500 5000
Flow Rate, slm nitrogen
Out
let P
ress
ure,
psi
g
Page 99
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 99 of 134
AZ9210 Flow Curve Index
Series Inlet Pressure psig (bar)
Outlet Pressures psig (bar)
Connection Size Flow Curve Number
AZ9210 AK9210
150 (10.3 bar)
90, 60, 40 (6.2, 4.1, 2.7 bar)
3/4 inch AZ9210-001
100 (6.9 bar)
90, 60, 40 (6.2, 4.1, 2.7 bar)
3/4 inch AZ9210-002
Page 100
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 100 of 134
Page 101
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 101 of 134
Page 102
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 102 of 134
AK110 Flow Curve Index
Series Inlet Pressure, psig (~MPa)
Outlet Pressures, psig (~MPa)
Connection Size Flow Curve Number
AK110
100 psig (.7 MPa)
75, 45, 30, 15 psig (.5, .3, .2, .1 MPa)
1/4 NPT AK110-001
75 psig (.5 MPa)
45, 30, 15 psig (.3, .2, .1 MPa)
1/4 NPT AK110-002
45 psig (.3 MPa)
30, 15 psig (.2, .1 MPa)
1/4 NPT AK110-003
30 psig (.2 MPa)
15, 10 psig (.1, .07 MPa)
1/4 NPT AK110-004
Page 103
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 103 of 134
Page 104
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 104 of 134
Page 105
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 105 of 134
Page 106
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 106 of 134
Page 107
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 107 of 134
AP210 Flow Curve Index
Series Inlet Pressure, psig (~MPa)
Outlet Pressures, psig (~MPa)
Connection Size Flow Curve Number
AP210
100 psig (.7 MPa)
75, 45, 30, 15 psig (.5, .3, .2, .1 MPa)
1/4 inch AP210-001
75 psig (.5 MPa)
45, 30, 15 psig (.3, .2, .1 MPa)
1/4 inch AP210-002
AP202
45 psig (.3 MPa)
30, 15 psig (.2, .1 MPa)
1/4 inch AP210-003
30 psig (.2 MPa)
15, 10 psig (.1, .07 MPa)
1/4 inch AP210-004
Page 108
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 108 of 134
Page 109
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 109 of 134
Page 110
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 110 of 134
Page 111
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 111 of 134
Page 112
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 112 of 134
AP500 Flow Curve Index
Series Inlet Pressure, psig (~MPa)
Outlet Pressures, psig (~MPa)
Connection Size Flow Curve Number
AP500
100 psig (.7 MPa)
75, 45, 30, 15 psig (.5, .3, .2, .1 MPa)
1/4 inch AP500-001
75 psig (.5 MPa)
45, 30, 15 psig (.3, .2, .1 MPa)
1/4 inch AP500-002
45 psig (.3 MPa)
30, 15 psig (.2, .1 MPa)
1/4 inch AP500-003
30 psig (.2 MPa)
15, 10 psig (.1, .07 MPa)
1/4 inch AP500-004
Page 113
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 113 of 134
Flow Curve Number AP500-001
AP510S (1/4 inch connections)Flow Curve at 100 psig (.69 MPa) Inlet Pressure
0
10
20
30
40
50
60
70
80
0 2 4 6 8 10 12 14 16 18 20
Flow Rate, slpm nitrogen
Out
let P
ress
ure,
psi
g
0.00
0.10
0.20
0.30
0.40
0.50
Out
let P
ress
ure,
MPa
Page 114
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 114 of 134
Flow Curve Number AP500-002
AP510S (1/4 inch connections)Flow Curve at 75 psig (.52 MPa) Inlet Pressure
0
5
10
15
20
25
30
35
40
45
50
0 2 4 6 8 10 12 14 16 18 20
Flow Rate, slpm nitrogen
Out
let P
ress
ure,
psi
g
0.00
0.05
0.10
0.15
0.20
0.25
0.30
Out
let P
ress
ure,
MPa
Page 115
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 115 of 134
Flow Curve Number AP500-003
AP502S (1/4 inch connections)Flow Curve at 45 psig (.31 MPa) Inlet Pressure
0
5
10
15
20
25
30
35
40
0 2 4 6 8 10 12 14 16 18 20
Flow Rate, slpm nitrogen
Out
let P
ress
ure,
psi
g
0.00
0.05
0.10
0.15
0.20
0.25
Out
let P
ress
ure,
MPa
Page 116
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 116 of 134
Flow Curve Number AP500-004
AP502S (1/4 inch connections)Flow Curve at 30 psig (.21 MPa) Inlet Pressure
0
5
10
15
20
25
0 2 4 6 8 10 12 14 16 18 20
Flow Rate, slpm nitrogen
Out
let P
ress
ure,
psi
g
0.00
0.02
0.04
0.06
0.08
0.10
0.12
0.14
0.16
Out
let P
ress
ure,
MPa
Page 117
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 117 of 134
AP500 HF Flow Curve Index
Series Inlet Pressure, psig (~MPa)
Outlet Pressures, psig (~MPa)
Connection Size Flow Curve Number
AP500 HF
100 psig (.7 MPa)
75, 45, 30, 15 psig (.5, .3, .2, .1 MPa)
1/4 inch AP500HF-001
75 psig (.5 MPa)
45, 30, 15 psig (.3, .2, .1 MPa)
1/4 inch AP500HF-002
45 psig (.3 MPa)
25, 15 psig (.17, .1 MPa)
1/4 inch AP500HF-003
30 psig (.2 MPa)
15 psig (.1 MPa)
1/4 inch AP500HF-004
Page 118
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 118 of 134
Flow Curve Number AP500HF-001
AP510S HF (1/4 inch connections)Flow Curve at 100 psig (.69 MPa) Inlet Pressure
0
10
20
30
40
50
60
70
80
0 20 40 60 80 100 120 140
Flow Rate, slpm nitrogen
Out
let P
ress
ure,
psi
g
0.00
0.10
0.20
0.30
0.40
0.50
Out
let P
ress
ure,
MPa
Page 119
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 119 of 134
Flow Curve Number AP500HF-002
AP510S HF (1/4 inch connections)Flow Curve at 75 psig (.52 MPa) Inlet Pressure
0
5
10
15
20
25
30
35
40
45
50
0 10 20 30 40 50 60 70 80 90 100
Flow Rate, slpm nitrogen
Out
let P
ress
ure,
psi
g
0.00
0.05
0.10
0.15
0.20
0.25
0.30
Out
let P
ress
ure,
MPa
Page 120
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 120 of 134
Flow Curve Number AP500HF-003
AP502S HF (1/4 inch connections)Flow Curve at 45 psig (.31 MPa) Inlet Pressure
0
5
10
15
20
25
30
35
40
0 10 20 30 40 50 60
Flow Rate, slpm nitrogen
Out
let P
ress
ure,
psi
g
0.00
0.05
0.10
0.15
0.20
0.25
Out
let P
ress
ure,
MPa
Page 121
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 121 of 134
Flow Curve Number AP500HF-004
AP502S HF (1/4 inch connections)Flow Curve at 30 psig (.21 MPa) Inlet Pressure
0
5
10
15
20
25
0 5 10 15 20 25 30 35 40
Flow Rate, slpm nitrogen
Out
let P
ress
ure,
psi
g
0.00
0.02
0.04
0.06
0.08
0.10
0.12
0.14
0.16
Out
let P
ress
ure,
MPa
Page 122
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 122 of 134
SL5200 Flow Curve Index
Series Inlet Pressure, psig (~MPa)
Outlet Pressures, psig (~MPa)
Connection Size Flow Curve Number
SL5200
100 psig (.7 MPa)
40, 15 psig (.28, .1 MPa)
1/4 inch SL5200-001
60 psig (.4 MPa)
30, 15 psig (.2, .1 MPa)
1/4 inch SL5200-002
30 psig (.2 MPa)
15, 10 psig (.1, .07 MPa)
1/4 inch SL5200-003
Page 123
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 123 of 134
Flow Curve Number SL5200-001
SL5210 (1/4 inch connections)Flow Curve at 100 psig (.69 MPa) Inlet Pressure
0
5
10
15
20
25
30
35
40
45
50
0 5 10 15 20 25 30 35 40 45 50
Flow Rate, slpm nitrogen
Out
let P
ress
ure,
psi
g
0.00
0.05
0.10
0.15
0.20
0.25
0.30
Out
let P
ress
ure,
MPa
Page 124
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 124 of 134
Flow Curve Number SL5200-002
SL5210 (1/4 inch connections)Flow Curve at 60 psig (.41 MPa) Inlet Pressure
0
5
10
15
20
25
30
35
40
0 5 10 15 20 25 30 35 40 45 50
Flow Rate, slpm nitrogen
Out
let P
ress
ure,
psi
g
0.00
0.05
0.10
0.15
0.20
0.25
Out
let P
ress
ure,
MPa
Page 125
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 125 of 134
Flow Curve Number SL5200-003
SL5202 (1/4 inch connections)Flow Curve at 30 psig (.21 MPa) Inlet Pressure
0
5
10
15
20
25
0 5 10 15 20 25 30
Flow Rate, slpm nitrogen
Out
let P
ress
ure,
psi
g
0.00
0.02
0.04
0.06
0.08
0.10
0.12
0.14
0.16
Out
let P
ress
ure,
MPa
Page 126
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 126 of 134
SL5201A Flow Curve Index
Series Inlet Pressure, psig (~MPa)
Outlet Pressures, mm Hg
Connection Size Flow Curve Number
SL5201A 2 psig
(.014 MPa) 500, 725 mm Hg 1/4 inch SL5201A-001
Page 127
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 127 of 134
Flow Curve Number SL5201A-001
SL5201SA (1/4 inch connections)Flow Curve at 2 psig (.014 MPa) Inlet Pressure
0
100
200
300
400
500
600
700
800
0 1 2 3 4 5 6
Flow Rate, slpm nitrogen
Out
let P
ress
ure,
mm
Hg
abso
lute
Page 128
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 128 of 134
SL5200 HF Flow Curve Index
Series Inlet Pressure, psig (~MPa)
Outlet Pressures, psig (~MPa)
Connection Size Flow Curve Number
SL5200 HF
100 psig (.7 MPa)
60, 30, 15 psig (.4, .2, .1 MPa)
1/4 inch SL5200HF-001
50 psig (.34 MPa)
30, 15 psig (.2, .1 MPa)
1/4 inch SL5200HF-002
30 psig (.2 MPa)
15, 10 psig (.1, .07 MPa)
1/4 inch SL5200HF-003
Page 129
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 129 of 134
Flow Curve Number SL5200HF-001
SL5210 HF (1/4 inch connections)Flow Curve at 100 psig (.69 MPa) Inlet Pressure
0
10
20
30
40
50
60
70
0 20 40 60 80 100 120 140
Flow Rate, slpm nitrogen
Out
let P
ress
ure,
psi
g
0.00
0.05
0.10
0.15
0.20
0.25
0.30
0.35
0.40
0.45
Out
let P
ress
ure,
MPa
Page 130
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 130 of 134
Flow Curve Number SL5200HF-002
SL5210 HF (1/4 inch connections)Flow Curve at 50 psig (.34 MPa) Inlet Pressure
0
5
10
15
20
25
30
35
0 10 20 30 40 50 60 70 80 90 100
Flow Rate, slpm nitrogen
Out
let P
ress
ure,
psi
g
0.00
0.05
0.10
0.15
0.20
Out
let P
ress
ure,
MPa
Page 131
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 131 of 134
Flow Curve Number SL5200HF-003
SL5202 HF (1/4 inch connections)Flow Curve at 30 psig (.21 MPa) Inlet Pressure
0
5
10
15
20
25
0 10 20 30 40 50 60 70 80 90 100
Flow Rate, slpm nitrogen
Out
let P
ress
ure,
psi
g
0.00
0.02
0.04
0.06
0.08
0.10
0.12
0.14
0.16
Out
let P
ress
ure,
MPa
Page 132
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 132 of 134
SL5201A HF Flow Curve Index Series Inlet Pressure,
psig (~MPa) Outlet Pressures,
mm Hg Connection Size Flow Curve Number
SL5201A HF
10 psig (.07 MPa)
500, 675 mm Hg 1/4 inch SL5201AHF-001
2 psig (.014 MPa)
500 mm Hg 1/4 inch SL5201AHF-002
Page 133
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 133 of 134
Flow Curve Number SL5201AHF-001
SL5201SA HF (1/4 inch connections)Flow Curve at 10 psig (.07 MPa) Inlet Pressure
0
100
200
300
400
500
600
700
800
0 2 4 6 8 10 12
Flow Rate, slpm nitrogen
Out
let P
ress
ure,
mm
Hg
abso
lute
Page 134
Bulk Gas System Flow Curves Report # 30008300 Rev 5
Page 134 of 134
Flow Curve Number SL5201AHF-002
SL5201SA HF (1/4 inch connections)Flow Curve at 2 psig (.014 MPa) Inlet Pressure
0
100
200
300
400
500
600
700
800
0 2 4 6 8 10 12
Flow Rate, slpm nitrogen
Out
let P
ress
ure,
mm
Hg
abso
lute
