122
FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST 2015 ANNUAL REPORT
F R A U N H O F E R I N S T I T U T E F O R S U R F A C E E N G I N E E R I N G A N D T H I N F I L M S I S T
2015ANNUAL REPORT
COVER Fighting head lice with plasma: a plasma comb developed
by the Application Center for Plasma and Photonics of the Fraunhofer IST.
2015ANNUAL REPORT
F R A U N H O F E R I S T
Ladies and gentlemen,
the year 2015 was a very successful year for the Fraunhofer Institute for Surface Engineering
and Thin Films IST in many ways – especially it was the 25th anniversary year of the insitute. We
provide you with a selection of the most important events and latest research developments of
the Fraunhofer IST in the annual report at hand.
We woud like to take this opportunity to express our thanks to all people whose hard work
and commitment made our success possible in the first place: above all the employees of the
Fraunhofer IST, our partners from research and development, our customers from industry, our
sponsors, colleagues and friends. Thank you for a trusting cooperation.
Dear reader, we wish you a great joy in reading our annual report and are looking forward to
your ideas for cooperation in future..
1 On the left: deputy
director Prof. Wolfgang
Diehl. On the right: director
Prof. Dr. Günter Bräuer.
1
Prof. Dr. Günter Bräuer Prof. Wolfgang Diehl
FOREWORD
3
CONTENTS � Foreword 3
� 25TH anniversary 2015 6
� Prizes and awards 8
� From the board of trustees 12
� Outstanding collaboration 14
� Institute profile 16
� The institute in figures 18
� Your contact person 20
� The scope of research and services 24
� Analysis and quality assurance 26
� Special equipment 28
� Sustainable solutions with surface and thin film engineering 30
� Mechanical engineering, tools and automotive technology 33
� Washer sensor systems – universal and individual 34
� Thin film sensor system for the deep-drawing process 36
� Pretreatment of high-performance plastics 38
� Magnetic layers with gas flow sputtering 40
� Aerospace 43
� Environment-friendly metallization of CFRP 44
� Energy and electronics 47
� Palladium gas separation membranes for hydrogen separation 48
� New, non-invasive resistance measurement for battery foil 50
� Applied cold plasma spraying 52
� Optics 55
� EOSS® platform – demonstration of long-term stable distribution 56
� Life Science and ecology 59
� Fighting head lice with plasma 60
� Germ-free ultrapure water with diamond electrodes 62
� Combination of embossing and coating at atmospheric pressure 64
� Services and competencies 67
� Focused ion beam – the view beneath the surface 72
� Simulation of layer morphology and layer stoichio-metry 74
� Simulation of an HWCVD process for silicon depositi-on 76
� Industrialization of highly ionized processes 78
4
F R A U N H O F E R I S T
� Names, dates, events 2015 81
� Trade fairs, exhibitions, conferences 82
� Events, colloquia, workshops 86
� The Fraunhofer IST in networks 89
� The Fraunhofer-Gesellschaft at a glance 91
� Fraunhofer Group Light & Surfaces 92
� Supporting and training young scientists at the Fraunhofer IST 94
� The network of competence Industrial Plasma surface technology e. V. – INPLAS 96
� Publications 98
� Memberships 98
� Board memberships 99
� International guests 103
� Publications 103
� Lectures, posters 108
� Dissertations 115
� Diploma thesis 115
� Master’s thesis 115
� Bachelor’s thesis 116
� Patent applications 117
� Appendix 118
� Editorial notes 120
5
25TH ANNIVERSARY 2015It began in Hamburg on January 1, 1990. Early on, the
Fraunhofer Society recognized the need to set up an institute
that would focus on applied research in the field of surface
engineering and thin films. Following the corresponding
decision of the Senate in April 1989 the Fraunhofer IST was
established.
In Hamburg a small group of researchers led by Dr Heinz
Dimigen was ready to take on the challenges of the future.
The group had emerged from the Philips research lab (PFH)
and already brought with it extensive expertise in the field
of thin films and their production. In 1990, the year of its
foundation, the Fraunhofer IST had a staff of fifteen and a
budget of € 0.53 million (converted). Twenty-five years later, in
the anniversary year 2015, the institute had a staff of around
130 employees and around 80 scientific assistants. With a
research budget of about € 13 million, they work on diverse
research assignments at sites in Braunschweig and Göttingen
with a total laboratory and office space of 5500 m2. For this, a
pool of more than 40 industrial installations is provided.
The twenty-fifth birthday of the Fraunhofer IST was celebrated
with an open day and a summer festival. A detailed chronicle
documents the development of the institute and makes refe-
rence to the numerous outstanding research results. The most
important of these include diamond-like carbon (or DLC) with
its hydrophobic variant SICON®, the polycrystalline diamond
layers DiaChem® and DiaCer®, transparent conductors and
ice-free glazing, structured surface functionalization (plasma
printing) with atmospheric-pressure plasmas, various types of
thin-film sensors, the antenna of the Sentinel satellites, as well
as the precision filters from the Enhanced Optical Sputtering
System EOSS®. The Application Center for Plasma and
Photonics in Göttingen, which was officially opened in 2012,
ideally complements the mother institution’s expertize. The
interaction of “cold plasmas” with organic surfaces such as
the human skin will remain one of our most exciting research
areas for the near future. PlasmaDerm® is an innovative
therapy with which chronic wounds or skin diseases of the
most diverse etiology can be treated safely and painlessly.
In November 2015, the Göttinger IST research group and
CINOGY GmbH, who manufacture and distribute the devices,
1 2
6
F R A U N H O F E R I S T
were awarded the Chamber of Commerce’s technology trans-
fer prize. The Braunschweiger Zeitung ran an article on the
presentation with the title “A Revolution in Wound Healing”.
In summer 2015, the same team had already received the
Fraunhofer prize Human-Centered Technology. The prize was
awarded at the Fraunhofer annual conference in Wiesbaden,
which was attended by the Federal President. The fact that
employees of our institute were awarded this important prize
twice in a row makes us very proud.
The area of atmospheric pressure plasma offers a great
opportunity for developing markets in medicine technology,
biochemical engineering, the food industry, and agriculture.
The Fraunhofer IST, with its current strategic focus and its
partnerships, is oriented towards these future trends and plans
an even closer alliance with representatives from the areas of
medicine and biology.
I hope you will enjoy reading more about the activities and
developments that were important for us in our anniversary
year.
Your Günter Bräuer
3
1-3 The site and the
Fraunhofer IST building in
Braunschweig in (1) 1990,
(2) 1994 and (3) 2010.
7
THREE PRIZES FOR PLASMADERM®
Skin disorders are a common problem in this part of the world. Atopic dermatit is , psor ias is and chronic
venous leg ulcers – typical ly caused by diabetes or var icose veins – can cause pat ients years of suffer ing.
Working in col laborat ion with the company CINOGY GmbH and the Department of Dermatology, Venereo-
logy and Al lergology at the Univers i ty Medical Center Gött ingen, the Fraunhofer Inst i tute for Surface
Engineer ing and Thin F i lms IST has successful ly developed a new medical technology solut ion for treat ing
wounds and skin disorders known as “PlasmaDerm®”. P lasma promotes wound heal ing when i t i s genera-
ted direct ly on the sk in.
“All you feel is a slight tingling sensation,” says Prof. Wolf-
gang Viöl from Fraunhofer IST, moving a device approximately
the size and shape of a pocket flashlight in small circles over
the back of his hand. Holding the device just over the skin,
a faint purple mist can just barely be seen at the device’s tip.
That’s plasma, he explains – an ionized gas.
PlasmaDerm® – which was developed by a team consisting of
medical professionals, biologists, physicists and engineers – is a
novel solution. For the first time, the device generates a non-
thermal or “cold” plasma directly on the skin at atmospheric
pressure. The patented method involves placing the electrode
of the device close to the skin, with the skin itself acting as
the second electrode. A high voltage is then applied across the
gap, and the resulting electric fields convert the area between
the electrode and the skin into non-thermal plasma.
PlasmaDerm® is safe and painless
Since cold plasma has not been used on human beings before,
the top priority of the Fraunhofer IST was to evaluate the
safety of the solution. “We carried out a risk-benefit analysis
to evaluate all the chemical and physical parameters and
concluded that there is no reason to be concerned about
using plasma on people,” says Dr. Andreas Helmke, describing
how Fraunhofer IST went about the process.
A clinical study conducted by Prof. Steffen Emmert at the
Department of Dermatology, Venereology and Allergology at
the University Medical Center Göttingen revealed an antiseptic
effect and improved wound healing. But Prof. Emmert explains
that the greatest benefit of the application is the fact that
“non-thermal plasma actually combines the mechanisms of
different therapies. UV, ozone and electrotherapy are already
available, but plasma achieves a better effect in a shorter pe-
riod of time.” Plasma reduces the bacteria count on the skin’s
surface, while the electric field simultaneously boosts the skin’s
microcirculation by allowing more oxygen to be delivered.
These are both decisive factors in improving wound healing.
To enable the new method to be applied more flexibly, the
researchers needed to develop a portable device. To do
this, the Fraunhofer IST worked together with the company
CINOGY GmbH. “We had to develop a device that was small
but capable of generating high voltages. The result is only
about the size of a laptop and can be plugged into a normal
socket between 100 and 230 V,” says Dr. Dirk Wandke,
managing director of CINOGY, describing how they tackled
the project’s biggest challenge. PlasmaDerm® is now available
all over Europe.
21
PRIZES AND AWARDS
8
F R A U N H O F E R I S T
1 Winners of the
Fraunhofer Prize in the
Human-Centered Technology
category (left to right): Dr.
Andreas Helmke, Dr. Dirk
Wandke (CINOGY GmbH),
Prof. Dr. Wolfgang Viöl and
Prof. Dr. Steffen Emmert
(University Medical Center
Göttingen).
2 The awarded technology
PlasmaDerm® in action.
3 Winners of the techno-
logy transfer prize of the
Chamber of Industry and
Commerce of Braunschweig
(left to right): Dr. Dirk Wand-
ke (CINOGY GmbH), Prof.
Dr. Wolfgang Viöl and Dr.
Andreas Helmke.
For Prof. Viöl, PlasmaDerm® has inspired a vision. But the
researcher has an even more ambitious vision. “I anticipate
that in the future, a child who falls off a skateboard could be
treated at home. Parents could care for the wound using a
small PlasmaDerm stick instead of iodine. And I could even
imagine the device itself being able to measure what’s wrong
with somebody’s skin and then adjust the dose accordingly
and start the physical treatment.”
The prizes
Prof. Wolfgang Viöl, Dr. Andreas Helmke, Prof. Steffen Emmert
and Dr. Dirk Wandke jointly accepted a Fraunhofer Prize in the
Human-Centered Technology category for their development
of PlasmaDerm.
Furthermore Prof. Viöl and Prof Emmert were awarded the
Family Klee Foundation’s Innovation Prize 2015 for their
“innovative therapeutic approaches in dermatology using
non-thermal atmospheric pressure plasma.”
Under the title “PlasmaDerm for Wound Treatment – from the
Conception to the Medicinal Product” the team was given
credit for their efforts in knowledge transfer. In November
2015, Prof. Wolfgang Viöl, Dr. Andreas Helmke and Dr. Dirk
Wandke were awarded Braunschweig’s Chamber of Industry
and Commerce’s Technology Prize, endowed with € 10,000.
3
9
FURTHER PRIZES AND AWARDSGreen Photonics young talent award
On June 22, 2015, Dr. Christoph Gerhard, a scientist
from Göttingen who works at the Application Center for
Plasma and Photonics of the Fraunhofer Institute for Surface
Engineering and Thin Films IST, was awarded third place in
the Fraunhofer‘s Green Photonics young talent award for his
dissertation on laser microstructuring.
This is already the third time that the Fraunhofer innovation
cluster Green Photonics awards dissertations on sustainable
usage of light. These dissertations are not only of excep-
tional scientific quality, they also show a high degree of
relevant applications. Christoph Gerhard’s doctoral thesis on
“Atmospheric-pressure plasma-assisted laser ablation of opti-
cal glass” fulfills these requirements. He investigated two new
processes for laser microstructuring optical glasses, also called
laser plasma hybrid processes. In both cases laser treatment is
combined with plasma treatment. “Physical plasma brings a
new element to microstructuring. This opens up a whole new
area of interactions during laser structuring,” says Gerhard.
Awards at the AEPSE
Prof. Dr. Günter Bräuer, director of the Fraunhofer Institute
for Thin Films and Surface Engineering IST, was awarded the
Appreciation Award at the Asian-European International Con-
ference on Plasma Surface Engineering AEPSE. The committee
thus paid tribute to his long-standing commitment, especially
in organizing the conference. At the same event, Dr. Ralf
Bandorf, group manager at the Fraunhofer IST, received the
Young Scientist Award for his work and developments on
the high power impulse magnetron sputtering (HIPIMS). The
AEPSE’s Young Scientist Award is endowed to promising
young scientists for their excellent academic achievements and
research work.
Honorary Member of the Romanian Association
Prof. Wolfgang Diehl received the title of Honorary Member
of the Romanian Association from the Romanian Materials
Science Crystal Growth Society. The honorary membership
pays tribute to his years of outstanding and remarkable
international activities in promoting the materials science.
1
10
F R A U N H O F E R I S T
Hermann Blenk research award
Dr. Tatiana Hentrich, manager of the business unit “Me-
chanical engineering, tools, and automotive technology”
was awarded the Hermann Blenk research prize. The prize
giving event took place on November 16, 2015, within the
framework of the 6th Research Day created by Niedersachsen
Aviation (NFL.) The research prize is endowed with € 5000 and
is awarded annually by Niedersachsen Aviation to future ori-
ented and outstanding student research projects and theses’
from the area of aerospace and related key technologies.
Hentrich developed an innovative alloy for airplane turbines
within the framework of her doctoral thesis at the TU Braun-
schweig. The alloy is heat resistant up to temperatures of
750 °C and therefore surpasses the heat resistance of all other
materials on the market by 100 °C. This can signally boost the
efficiency of turbines, which can, among other things, lead to
reduced fuel consumption.
2
1 Prof. Dr. Wolfgang Viöl
(left) and Dr. Christoph
Gerhard, winner of the
Fraunhofer‘s Green Photonics
young talent award, making
adjustments to an installa-
tion for laser plasma hybrid
technology.
2 The jury and winners of
the Hermann Blenk research
award and the Karl Doetsch
young talent award.
11
Chairman
Dr. Philipp Lichtenauer
Plasmawerk Hamburg GmbH
Vice-chairman
Prof. Dr. Hans Oechsner
IFOS – Institute for Surface and Thin
Film Analysis GmbH at the Technical
University of Kaiserslautern
Prof. Dr. Hans Ferkel
thyssenkrupp Steel Europe AG
Dr. Reinar Grün
Plasma Technik Grün GmbH
Prof. Dr.-Ing. Dr. h. c.
Jürgen Hesselbach
President of the Technical
University of Braunschweig
Dr. Sebastian Huster
Ministry of Science and Culture of
Lower Saxony
Nicole Kraheck
Federal Ministry of Education
and Research
Prof. Dr.-Ing. Jürgen Leohold
Volkswagen AG
Dr.-Ing. Anton Pawlakowitsch
Alzenau-Albstadt
Michael Stomberg
EagleBurgmann Germany
GmbH & Co. KG
BOARD OF TRUSTEESFROM THE BOARD OF TRUSTEES
Dr. Christoph Treutler
Robert Bosch GmbH
Dr. Gerrit van der Kolk
IonBond Netherlands BV
Dr. Ernst-Rudolf Weidlich
GRT GmbH & Co. KG
12
F R A U N H O F E R I S T
FROM THE BOARD OF TRUSTEESIn the history of surface engineering, an early topic is the
vacuum coating of metal strip with the aid of electron beam
evaporation. The first ”air-to-air“ installation went into
operation in 1962, followed by a dozen or so installations of
this kind before 1970.
Following the euphoria of the 1960s, things quietened down
somewhat in the vacuum coating of steel strip. Evidently the
time or, better expressed, the processes were not yet ripe for
the challenge of producing usable coatings in the micrometer
range at strip speeds around 100 m / min, continuously and
for days at a time. In contrast, hot-dip coating and electrolytic
deposition reached a high level of development.
Even today we are still faced with major challenges in
producing high-quality surface on steel. In 2000 Thyssen
Krupp Stahl AG bundled together its activities in surface
engineering to form the Dortmunder OberflächenCenter
(DOC). During the founding of the DOC, the Fraunhofer
institutes IWS Dresden and IST Braunschweig sent scientists in
to tackle questions arising from steel strip coating, not only for
the local industry but also for the thyssenkrupp Steel Europe.
These scientists worked closely together with the employees
of thyssenkrupp Steel Europe. This model is still unique.
Meanwhile Fraunhofer has established a professional work
group in Dortmund.
Here the Dortmund-based Fraunhofer employees profit on
the one hand from their proximity to their customers in this
steel region while on the other hand also having an essential
benefit from the close interaction with the mother institutes.
In the meantime, one employee of the Institute for Surface
Engineering of the Technical University of Braunschweig has
also joined the group. He is working with application-oriented
research in the field of diffusion treatment and surface
modification using high-density plasmas.
thyssenkrupp Steel Europe is observing the activities of the
Braunschweig researchers with great interest, not only at the
mother institute but also in Dortmund. This applies in parti-
cular to development work in the field of high-rate coating
processes, such as hollow-cathode gas-flow sputtering.
I wish us even more joint successes in the future and look
forward to continued collaboration.
Prof. Dr. Hans Ferkel
thyssenkrupp Steel Europe AG
13
OUTSTANDING COLLABORATIONThe Volkswagen Group with its headquarters in Wolfsburg
is one of the leading automobile manufacturers in the world
and the largest automobile manufacturer in Europe. Twelve
marques in seven European countries belong to the group:
Volkswagen Pkw, Audi, SEAT, ŠKODA, Bentley, Bugatti,
Lamborghini, Porsche, Ducati, Volkswagen Commercial
Vehicles, Scania and MAN. As of May 2015 the group was
operating 119 production plants in 20 countries in Europe and
11 countries in the Americas, Asia and Africa. Every working
day all around the globe 592,586 employees produce nearly
41,000 vehicles, are performing services related to vehicles or
are working in other business fields (source: volkswagen.com).
The Volkswagen foundry in Kassel is the largest light-metal
die-casting foundry in Europe and in 2015 produced 7.0 milli-
on die-cast parts (gearbox housings, engine blocks, structural
components) with 60,800 tonnes of aluminum and 5300 ton-
nes of magnesium being cast. Currently the Foundry & Machi-
ning business unit has 1230 employees in the following areas:
smelting plant, aluminum die-casting, magnesium die-casting,
tooling, machining, casting development, technology.
1 2
The use of thin-film sensor systems in pressure die-casting
is absolutely new for the automotive industry. The Casting
Technical Development department in collaboration with the
Fraunhofer IST has set itself the challenge of developing a
sensorized layer system which can withstand the aluminum
pressure die-casting process while simultaneously measuring
the temperature directly at the mold core. In this context,
thanks are also due to the G. A. Röders company of Soltau for
their extremely cooperative approach within this project.
The locally and temporally resolved process monitoring
offered by the thin-film sensor system creates a higher level
of reproducibility in the die-casting process and also allows
the detection of faults in process control. Here we should also
mention the smallness of the sensor system – the entire layer
thickness of the sensor systems is in the 11 µm range – which
means minimal disturbance of the process. These aspects
boost the product quality of the customer-relevant compo-
nents. In addition, there is an improvement in the quality of si-
mulation tools and future products can be precalculated more
accurately. The integration of the thin-film sensor system and
14
F R A U N H O F E R I S T
1 Mold core with two tem-
perature sensor structures
with contacts outside the
pressure die-casting area.
2 Mold core with com-
plete multifunctional layer
system which is simultane-
ously thermoresistive and
wear-resistant.
3 Dr. Andreas Gebauer-
Teichmann, Head of Develop-
ment Volkswagen Foundry
Kassel.
3
also the measurement results lead to a growing understanding
of the process, which in the future will offer the possibility of
entering upon optimization operations with greater flexibility.
The use of thin-film sensor systems and the advantages
they bring with them makes it possible to incorporate more
light-alloy die-cast products in motor vehicles. Ultimately
this means lower fuel consumption and reduced emissions.
These advantages are the fruit of a very good collaboration
between the Fraunhofer IST and Volkswagen AG for which I
would like to give thanks here. This longstanding, efficient and
trusting cooperation is also a guarantee for success in further
development work.
Dr. Andreas Gebauer-Teichmann
Head of Development Volkswagen Foundry Kassel.
15
As an innovative R&D partner the Fraunhofer Institute for Sur-
face Engineering and Thin Films IST offers complete solutions
in surface engineering which are developed in cooperation
with customers from industry and research. The IST’s “pro-
duct” is the surface, optimized by modification, patterning,
and/or coating for applications in the business units:
� Mechanical engineering, tools and automotive technology
� Aerospace
� Energy and electronics
� Optics
� Life Science and ecology
The principle technology units at the IST are atmospheric
pressure processes with the main focus on electrochemical
processes and atmospheric pressure plasmas processes, low
pressure plasma processes with the main focus on magnetron
sputtering and highly ionized plasmas and PECVD as well as
INSTITUTE PROFILEchemical vapor deposition with the main focus on hot-wire
CVD. The center of tribological coatings focusses on the fric-
tion reduction, wear and corrosion protection. The Application
Center for Plasma and Photonics deals with mobile plasma
sources and laser plasma hybrid processes.
The IST’s expertise lies in the ability to control all of the
above-mentioned processes and their combination with a
great variety of thin films. Extensive experience with thin-film
deposition and film applications is complemented by excellent
capabilities in surface analysis using the very latest equipment
and in simulating vacuum-based processes.
Choosing the optimum combination of process and coating
for a particular task is one of the major strengths of the
Fraunhofer IST.
Besides fundamental research activities in cooperation with
universities and research centers, about 130 employees are
developing tailored surfaces and processes together with
16
F R A U N H O F E R I S T
service providers, equipment manufacturers, and coating users
from diverse industries. For an efficient technology transfer
the IST offers a broad range of services, from development of
prototypes and economical product scenarios to upscaling and
even implementation of the technology at the customer.
At the site in Braunschweig the institue has an office and
laboratory area of more than 4000 square meters for the 109
tenured employees. In addition the new building of the Appli-
cation Center for Plasma and Photonics provides 1500 square
meters of office and laboratory area on three storeys for the
18 tenured employees in Göttingen. The service offers of the
Fraunhofer IST are supplemented by the competencies of other
institutes from the Fraunhofer Group “Light & Surfaces” as
well as by the Institute for Surface Technology of the Technical
University of Braunschweig which ist also managed by the IST
director Prof. Dr. Günter Bräuer. Many projects are supported by
funding through the state (Land) Niedersachsen (Lower Saxony)
the federal government, the European Union, and other
institutions.
17
Talent management
In 2015, the period under review, the Fraunhofer Institute for
Surface Engineering and Thin Films IST had 135 employees.
Around 50 % are scientific personnel, doctoral candidates
and engineers. Research activities were supported by technical
and commercial staff as well as a large number of graduands
and student assistants. Training opportunities in the vocational
fields of galvanics, physics and information technology were
taken up by five employees in all.
Number of employees.
20142011 2012 2013
120
140
100
80
60
40
20
02015
Employees
THE INSTITUTE IN FIGURESOperating budget
In the period under review the operating budget has remained
virtually constant compared to the previous year and resulted
in a total operating budget of € 12.4 million. It consists of
personal costs of € 8.3 million and material-related costs of
€ 4.1 million. The personal costs contribute 67 % to the total
operating budget.
Personnel and material costs.
€ m
illio
n
10
12
8
6
4
2
020142011 2012 2013 2015
Personnel Costs Material Costs
18
F R A U N H O F E R I S T
Earning structure
The relative increase of the Fraunhofer Institute for Surface En-
gineering and Thin Films IST was 43.5 % in the period under
review. This excellent value can be explained by revenues from
industry amounting up € 5.4 million. Additional € 3.9 million
were realized through public sector (inclusive EU revenue) and
other revenues. In total, the institute achieve external revenue
amounting up € 9.3 million.
Earning structure.
€ m
illio
n
10
12
8
6
4
2
020142011 2012 2013 2015
Basic funding Internal programs
Revenues from public sector Revenues from industry
Investments
All in all the Fraunhofer IST dispensed on normal investment
some € 500,000. € 150,000 could be invested through
external project funds. € 350,000 can be attributed to normal
investments. This means for the Fraunhofer IST an overall
budget (B + I) totaling € 12.9 million.
Investments.
20142011 2012 2013
€ m
illio
n
2.5
3.0
2.0
1.5
1.0
0.5
20150
Strategic investments Normal
Special allocations Project investments
19
Institute management and administration
Director
Prof. Dr. Günter Bräuer1
Phone: +49 531 2155-500
Deputy director
Prof. Wolfgang Diehl2
Extension: 515
Administration
Ulrike Holzhauer3
Extension: 220
Marketing and Communications
Dr. Simone Kondruweit4
Extension: 535
YOUR CONTACT PERSONBusiness units
Mechanical engineering, tools and automotive
technology
Dr. Tatiana Hentrich5
Extension: 518
Aerospace
Dr. Andreas Dietz6
Extension: 646
Energy and electronics
Dr. Stephan Ulrich7
Extension: 618
Optics
Dr. Michael Vergöhl9
Extension: 640
Life science and ecology
Dr. Jochen Borris8
Extension: 666
1 2
3 4
6
87
5
20
21
Heads of department and group managers
Low pressure plasma processes
Dr. Michael Vergöhl9
Extension: 640
Optical coating systems | Process engineering | Materials engineering
� Magnetron sputtering
Large area electronics | Transparent and conductive coatings | Asset
and process development | New semiconductor for photovoltaic and
microelectronics
� Highly ionized plasmas and PECVD
Dr.-Ing. Ralf Bandorf10
Extension: 602
Multifunctional coatings with sensors | High Power Impulse Magnetron
Sputtering (HPIMS) | Micro tribology | Electrical coatings | Hollow
cathode processes (HKV, GFS) | Plasma-enhanced CVD (PECVD)
� Simulation
Dr. Andreas Pflug11
Extension: 629
Simulation of plants, processes and coating layer properties | Model
based interpretation of coating processes
Chemical vapor deposition
Dr. Lothar Schäfer12
Extension: 520
Tools and components | Diamond electrodes for electrochemical water
treatment | Diamond coated ceramics DiaCer®
Dr. Markus Höfer13
Senior Scientist
Extension: 620
� Atomic layer deposition
Product-related system construction | Coating and process development
| Highly compliant coatings of 3D structures
� Photocatalysis
Air, water and selfcleaning | Product evaluation and efficiency
determination | Test engineering
� Hot-wire CVD
Dr. Volker Sittinger14
Extension: 512
Diamond coatings and silicon-based coatings | Tool and component
coatings for extreme wear resistance | Electrochemistry | Electrical
applications for semiconductors, barriers | Antireflective
12 139
1411
10
Atmospheric pressure processes
Dr. Michael Thomas15
Extension: 525
Prof. Dr. Claus-Peter Klages16
Extension: 510
� Electrochemical processes
Composites | Light metal coatings | Process development | Plastics
metallization | Electrochemical processes
� Layer by layer
Biofunctional coatings | Polyelectrolyte coatings | Quantitativ analysis of
reactive surfaces
� Atmospheric pressure plasma processes
Dr.-Ing. Marko Eichler17
Extension: 636
Biofunctional surfaces | Microplasmas | Low-temperature bonding |
Surface functionalization and coating | Plasma printing
Center for tribological coatings
Dr.-Ing. Jochen Brand18
Extension: 600
System analysis and system optimization | Tribotesting | Device conceptions
� Application technology
Prototypes and small volume production | Plasma diffusion | Cleaning
technology | Mechanical engineering and automotive technology
� Micro and sensor technology
Dr.-Ing. Saskia Biehl19
Extension: 604
Thin film sensors | Microstructuring 2D and 3D | Adaptronic systems
� New tribological coatings
Dr.-Ing. Martin Keunecke20
Extension: 652
Carbon-based coatings (DLC) | Hard and superhard coatings | Wetting
behavior | Tool coating (forming, cutting, chipping) | PVD and PACVD
processes
� Dortmunder surface technology center (DOC)
Dipl.-Ing. Hanno Paschke21
Phone: +49 231 844 5453
Duplex treatment through plasma nitriding and PACVD technology |
Boracic hard coatings |Tool coating | Coatings for hot forming | Coatings
for industrial knifes| Fuel cells
191815
212017
16
22
23
Application center for plasma und photonics
Prof. Dr. Wolfgang Viöl22
Phone +49 551 3705 218
Dr. Bernd Schieche23
Innovation manager
Phone +49 551 3705 219
Plasma sources conception, plasma high voltage generator, plasma
toolbuilding | Plasma diagnostic and surface analytic | Plasma treatment
of natural products | Plasma particle coating and cold plasma spraying,
plasma polymerization | Plasma medicine, atmospheric pressure plasma-
based air purification, disinfection and pest control | Laser plasma hybrid
technology for micro structures and surface modification | Laser technique
for material treatment and characterization | Acoustic, optical plasma
supported sensors
Analysis and Quality Assurance
Dr. Kirsten Schiffmann24
Extension: 577
Chemical microscopy and surface analysis | Microscopy and crystal
structure | Test engineering | Costumer specific test engineering | Order
investigation
22 23
24
THE SCOPE OF RESEARCH AND SERVICESPretreatment –
We clean surfaces
Successful coating processes imply a proper surface pretreat-
ment. Therefore we offer:
� Effective aqueous surface cleaning including drying
� Special glass cleaning
� Plasma pretreatment and Plasma cleaning
� Plasma activation and Plasma functionalization
� Wet-chemical etching pretreatment
� Particle beam
Modification and Coating –
We develop processes and coating systems
Thin films and specifically modified surfaces are the core busi-
ness of the Fraunhofer IST. The institute utilizes a wide range
of coating technologies and surface treatments, ranging from
plasma coating and treatment in vacuum and at atmospheric
pressure over hot-filament CVD processes to electroplating
and laser technology. Our services are:
� Surface modification
� Development of coatings and layer systems
� Process technology (including process diagnostics, modeling and control)
� Simulation of optical layer systems
� Development of system components
� Process development
� Toolbuilding and plant engineering
24
F R A U N H O F E R I S T
Testing and Charac terization –
We ensure quality
A fast and reliable analysis and quality control is the
prerequisite for a successful coating development. We offer
our customers:
� Chemical, micromorphological, and structural characterization
� Mechanical and tribological characterization
� Optical and electrical characterization
� Test methods and product specific quality control methods
� Rapid and confidential failure analysis
� Testing of corrosion resistance
Application –
We transfer research results in the production level
To guarantee an efficient technology transfer we offer a wide
range of know how:
� Cost-of-ownership calculations, development of economical production scenarios
� Prototype development, pilot production and sample coating procedures
� Equipment concepts and integration into manufacturing lines
� Consulting and training
� Research and development during production
25
ANALYSIS AND QUALITY ASSURANCEChemical and structural analysis
� Energy-dispersive X-ray spectroscopy (EDX)
� Electron microprobe (WDX, EPMA)
� Secondary ion mass spectrometry (SIMS)
� X-ray photoelectron spectroscopy (XPS)
� Glow discharge optical emission spectroscopy (GDOES)
� X-ray fluorescence analysis (RFA / XRF)
� X-ray diffractometer (XRD, XRR)
Microscopy
� Scanning electron microscope (SEM)
� SEM with focussed ion beam (FIB)
� Confocal laser microscope (CLM)
� Scanning tunnel and atomic force microscope (STM, AFM)
� FTIR microscope
� A variety of optical microscopes
Mechanical tests
� Micro and nano indentation (hardness, Young’s modulus)
� Rockwell and scratch test (film adhesion)
� Cross-cutting test, butt-joint test (film adhesion)
� A variety of methods for the measurement of film thickness
� A number of profilometers
Measurement of optical properties
� IR-UV-visible spectrometry
� Ellipsometry
� Colorimetry
� Angular-resolved scattered light measurement (ARS)
� FTIR spectrometry
� Raman spectrometry
Measurement of friction, wear and corrosion
� Pin on disk tester
� Ball-cratering test (Calo)
� Wazau high-load tribometer (in air, in oil)
� CETR high-temperature tribometer (in air, in oil)
� Plint roller tribometer (in air, in oil)
� Taber abraser test, abrasion test, sand trickling test, Bayer test
� Microtribology (Hysitron)
� Impact and fatigue tester (Zwick Pulsator)
� Salt spray test, environmental tests
26
F R A U N H O F E R I S T
Specialized measurement stations and methods
� Characterization of solar cells
� Measuring station for photocatalytic activity
� Contact angle measurement (surface energy)
� Measuring systems for electrical and magnetic coating properties (e. g. Hall, Seebeck, conductivity)
� Test systems for electrochemical wastewater treatment
� Measuring stations for the characterization of piezoresistive and thermoresistive sensor behavior
� Biochip reader for fluorescence analysis
� Layer mapping system (0,6 x 0,6 m2) for reflection, trans-mission, Haze and Raman measurement
� In-situ bondenergy measurement
� Magnetic characterization (vibration magnetrometer VMS)
� Electrochemical measurement stations (CV measurement)
� Wet chemical rapid tests: colorimetrical determination of Ion and molecule concentrations
� Weathering tests: cyclical simulation of UV and rain exposition
Plasma diagnostics
� Absorption spectroscopy
� Photoacoustic diagnostics
� Laser induced fluorescence LIF
� High-speed imaging
� Optical emission spectroscopy OES
� Retarding Field Energy Analyzer RFEA
� Fiber thermometry
� Electrical performance test
� Numerical modeling
27
� a-C:H:Me, a-C:H, hard coating production plant (up to 3 m3 volume)
� Coating facilities incorporating magnetron and RF diode sputtering
� Sputter plant for high-precise optical coatings
� In-line coating facility for large-surface optical functional coatings (up to 60 × 100 cm2)
� Industrial scale HIPIMS technology
� Plants for plasma diffusion
� Coating systems for hollow cathode processes
� Coating plant for thermal and plasma atomic layer deposition (ALD) (2D and 3D)
� Hot-filament-CVD units for crystalline diamond coatings (up to 50 × 100 cm2) and for internal coatings
� Hot-filament-CVD unit for silicon-based coatings (batch process and run-through process up to 50 x 60 cm2)
� Plasma-activated CVD (PACVD) units, combined with plasma nitriding
� Atmospheric pressure plasma systems for coating and functionalization of large areas (up to 40 cm widths)
� Microplasma plants for selective functionalization of surfaces (up to Ø = 20 cm)
� Bond aligner with an integrated plasma tool for wafer pretreatment in the clean room
� Roll-to-roll set-up for area-selective functionalization of surfaces up to 10 m / min
� Machine for internal coating of bags or bottles
� Laser for 2D and 3D microstructuring
� Automated system for deposition of polyelectrolyte
� 2 mask aligner for photolithographic structuring
� Laboratory for microstructuring (40 m2 clean room)
� System for electroplating metallization of waveguides
SPECIAL EQUIPMENT
28
F R A U N H O F E R I S T
� 15-stage cleaning unit for surface cleaning on aqueous basis
� Clean room – large area coating (25 m2)
� Clean room – sensor technology (35 m2)
� Laser structuring laboratory (17 m2)
� Mobile atmospheric pressure plasma sources
� Nanosecond dye laser (Nd: YAG-Laser)
� CO2-laser and Excimer-Laser
� EUV spectrography
� Semiconductor laser
� Picosecond laser
29
SUSTAINABLE SOLUTIONS WITH SURFACE AND THIN FILM ENGINEERINGSustainabi l i ty i s current ly perhaps the most important socia l guiding pr inc ip le of the age. Not only in the
European Union but a lso in Germany susta inable development processes are in f i rst p lace on the agenda.
In the f ie ld of surface and thin f i lm engineer ing the Fraunhofer IST has for a number of years now been
developing solut ions for susta inable products and susta inable industr ia l product ion.
Material efficiency
� With an additive galvanic metallization process, metals are applied to selected areas.
� Working materials with new properties are being found by combining different materials.or layer and basic body.
Production efficiency
� Optimized hard-material and nanostructured coating sys-tems for forming or cutting tools increase service lives and make more economically efficient manufacturing possible.
� Faster to the goal: simulation means ever shorter deve-lopment times. For example, highly efficient production chains are made possible by model-based design and implementation of coating processes.
� Modules with sensorized thin-film systems are built into deep-drawing systems and driving machines to ensure efficient forming and machining of components.
� Hard carbon-based coatings not only stop materials such as powders from adhering to tools but also prevent deposits on or fouling of surfaces in, for example, heat exchangers or exhaust systems.
� The application of nano particles as a source material at plasma spraying makes it possible to produce metal coatings on heat sensitive surfaces.
A large number of research subjects at the Fraunhofer IST are
oriented by urgent future-related topics and by social trends,
such as the implementation of an alternative energy supply,
alternatives for scarce materials and raw materials, or mobility
in the 21st century. The very thinnest high-performance
coatings are in addition the basis for a variety of further
products and high-tech applications which are viable for the
future, especially when it is a matter of saving material and
energy Some examples from our research into sustainable
industrial products and processes:
Innovative materials
� At the Fraunhofer IST intensive research has been in progress on replacing indium tin (ITO) with alternative materials such as ones based on ZnO and SnO2 and TiO2.
� Low damage separations of indium free materials for high efficient LEDs are being developed.
� At the Fraunhofer IST alternative materials for the high-refractive-index tantalum oxide coatings used in optical industries are being developed.
� New materials like canal materials for TFIs and p-conductive materials are being developed for transparent contact films (TFTs).
� At the Fraunhofer IST a REACH-compliant plastic metalliza-tion is used as an alternative to chrome (VI).
30
F R A U N H O F E R I S T
Energy efficiency
� Lower energy consumption due to the erosion protection of aero-engines: very hard multilayer coatings of ceramic and metal prevent excessive fuel consumption and falling efficiency levels.
� Broader and improved range of applications for lightweight components by means of wear-resistant, friction-reducing coatings which also protect against corrosion.
Clean environment
� With the diamond electrodes developed at the Fraunhofer IST water can be conditioned electrochemically – adapted to the infrastructure on the spot and without the use of chemicals.
� Photocatalytic coatings make self-disinfecting surfaces possible and the degradation of pollutants from the air.
� The functionalization of surfaces in plasma enables adhesive to be dispensed with when, for example, bonding materials. Plasma pretreatment is also suitable as a replace-ment for primers and as a way of improving the adhesion of paint systems.
Mobility in the future
� Low-friction and extremely wear-resistant coatings reduce the fuel consumption of car engines and extend both maintenance intervals and service life.
� New corrosion coatings on metallic bipolar plates make possible the economic production of powerful fuel cells for the automotive industry.
� Robust thin-film sensor systems in highly stressed parts of components increase reliability and safety in many fields of application, such as, electromobility.
� Functional coatings for components of lithium ion batteries raise the efficiency and the durability of these storages for electro mobile applications.
31
MECHANICAL ENGINEERING, TOOLS AND AUTOMOTIVE TECHNOLOGY
The “Mechanical engineering, tools and automotive
technology“ business unit is primarily concerned with de-
veloping coating systems for friction reduction and also
for wear and corrosion protection and optimizing these
for particular applications. This covers the entire process,
from pretreatment, coating and process development
–including analysis and simulation – to application.
Pretreatment includes not only cleaning but in particular
also adjusting surface topographies by abrasive blasting
or plasma processes as well as a diffusion treatment, if
necessary. Examples of applications in the components
field are:
� DLC and hard coatings for motor and drive components
� Surfaces for batteries and fuel cells in mobile applications
� Non-stick and antifouling coatings
� Surface optimization and corrosion protection of hybrid components
� Metallization and functionalization of plastics
� Highly corrosion-resistant carbon coating systems for sealing applications
Another important activity is the design of coating
processes by simulating real 3D components.
In the mechanical engineering and tools field these areas
of application stand in the foreground:
� Coatings for pressure die-casting molds
� Tool coatings for plastic molding (pultrusion, injection molding)
� Plasma diffusion treatment and coating of forging and press-hardening tools
In addition, sensorized surfaces are developed for and
successfully used in the most varied safety-related areas
of application, such as:
� Sensorized washers for continuous force monitoring
� Pressure and temperature thin film sensor systems for highly stressed tools
� Thin-film strain gauges
� Magnetic functional layers
In addition to coating service providers our customers
primarily include companies in the automotive sector,
toolmakers, tool users and also coating users in all fields
of mechanical engineering.
sensor structures it captures local load distribution both
statically and dynamically. In addition, a meander structure
of chromium ensures optimal temperature sensing within the
thin film system.
Advantages
Compared with standard commercial washer systems the
sensorized washer system presents a number of advantages:
� Static and dynamic acquisition of measurement data over a long period in the form of »condition monitoring«
� Retightening of threaded joints only when needed – in other words, when a drop in the preload force is detected by the sensorized washer system
� Improvement in maintenance conditions since there is no need to check threaded joints with a torque wrench
� Safety and measuring system for threaded joints
� Universal application
� Temperature-compensated measurement of forces
� Production in sizes from M3 to M64
� Individual designs according to customer requirements
� Minimum thickness of the base body 0.5 mm
� Wired as well as wireless data transfer
Structure of the thin-film sensor system
The requirements made of this innovative washer sensor differ
from customer to customer. The system, which was developed
at the Fraunhofer IST, can be customized to individual needs.
Here, customer-specific measurement points are deposited
from a layer of chromium 200 nm thick onto the base layer of
DiaForce® (d = 6 µm). The measuring system is completed by
the following layers:
� an electrically isolating intermediate layer of SICON®; d = 1 µm,
� conductors and temperature sensor made of a chromium layer 200 nm thick, and
� a final isolating and wear-protection coating of SICON®; d = 3 µm.
Data transfer via Bluetooth
This new, very durable measurement and safety system uses
for data transfer a Bluetooth low-energy system which permits
contactless data transfer directly from the washer to a mobile
device (tablet) at a distance currently up to 40 m away. It
can be straightforwardly installed in threaded joints in a wide
variety of applications, such as building surveillance or in wind
power and production installations, and with its multiple
WASHER SENSOR SYSTEMS – UNIVERSAL AND INDIVIDUALThin f i lm-based sensor systems offer the ideal condit ions for appl icat ion-or iented solut ions and innova-
t ions in industr ia l product ion processes. For many years now the Fraunhofer IST has been a leader in the
f ie ld of thin f i lm sensor systems and has a broad cross- industry expert ise in sensor technology, coat ing
development and micro structur ing. Late ly a new kind of washer sensor based on the piezores ist ive thin
f i lm DiaForce® has been developed.
11 2
34
CONTACTDr. Saskia Biehl
Phone +49 531 2155-604
Eike Meyer-Kornblum, M. Sc.
Phone +49 531 2155-764
1 Sensorized washer with
Bluetooth low-energy data
transmission.
2 Washer sensor in a
threaded joint on a flange
cover.
3 Different stages in the
production of the washer
sensor system.
3
Technical data for the washer sensor system with Blue-
tooth low-energy data transmission
� Calibrated load range 0 – 10 kN
� Temperature range 0 – 50 °C
� Data acquisition rate < 20 Hz
� Operating time (20 Hz) 24 h
� Stand-by with active radio link 900 h
� Range < 40 m
� Accuracy ~ 1 % of final value
� USB charger adapter available
Outlook
There is a very wide range of applications for this sensor sys-
tem. Geometries, the layered structure and measurement data
transmission are specially adapted for each individual case. To
be best prepared for future applications, the Fraunhofer IST is
working on both the modification of structuring and coating
processes as well as on the further development of wireless
data transmission. The aim is to develop sensor systems which
can also be used outdoors. If these systems are to be able to
transmit data for long periods even under difficult conditions,
such as weathering influences, they must be built more
robustly.
35
1 23 45
6
6. Metal base body5. DiaForce® (6 µm)4. Electrode structure Cr (0.2 µm)3. Insulating and wear-protection layer (1 µm)2. Temperature meander structure (0.2 µm)1. Insulating and wear-protection layer (3 µm)
Test procedure
The performance of the sensorized tool with the multifunc-
tional thin film system was investigated in a deep-drawing
machine at the Fraunhofer Institute for Machine Tools and
Forming Technology IWU. An example of measurement results
from the forming process is shown in the diagram to the
right. During the deep-drawing process there is a considerable
drop in resistance due to the compressive load applied to the
piezoresistive thin film sensor system by the aluminum sheet
being formed. With this process, local heating of the surface
amounts to only 1 K. The maximum permitted load during the
sheet-metal deep-drawing process can therefore be derived
directly from precharacterization and is 430 MPa.
Advantages of multifunctional thin film sensors
The multifunctional thin film systems developed at the
Fraunhofer IST offer a number of advantages over convention-
al measurement systems. For instance:
� Optimization of simulation
� Optimization and monitoring of production processes
Manufacturing process
The multifunctional thin film system developed at the
Fraunhofer IST consists of the following five layers, which are
deposited one by one on the surface of the die:
� a piezoresistive sensor layer (DiaForce®) 6 µm thick
� individual force measurement areas consisting of chromium electrode structures produced by the lift-off process; d = 200 nm
� an insulating and wear-protection interlayer 1 µm thick made of SICON®
� chromium meander structures for local temperature measurement made by photolithography; d = 200 nm
� a further insulating and wear-protection layer 3 µm thick made of SiCON®
Figure 1 shows a schematic diagram of the structure of this
layer system while the die with the complete thin film sensor
system can be seen in Figure 2. The second illustration also
reveals the complexity of the sensor structure: the contacts
are arranged on the outer unloaded sloping surface while the
measuring points are on the top face or inside the second
curve of the die.
THIN FILM SENSOR SYSTEM FOR THE DEEP-DRAWING PROCESSThe fourth industr ia l revolut ion – Industry 4.0 – can only succeed when not only the data process ing is set
va lue on but a lso the sensor technology which is responsible for the measurement data. In recent years
industry has increas ingly fe l t the need for a sensor system which is used direct ly on component surfaces
in contact with the workpiece so as to be able to capture measurement data local ly even dur ing the pro-
cess. A mult ifunct ional th in f i lm system is therefore being developed at the Fraunhofer IST for the local
measurement of pressure and temperature distr ibut ion over the surface of deep-drawing dies. I t i s a
mult i layer system with which not only is local measurement of force or pressure on surfaces with complex
shapes poss ib le but a lso local temperature measurement at d ifferent parts of the component. The system
also has a high wear res istance.
11 2
36
� Improvement of the understanding of operating conditions
� Optimization of maintenance intervals
� Reduction in the reject rate
The project
The results described were obtained within the SensoFut
project (Sensorized Future – Sensing of temperature and
pressure in harsh environments), on which the Fraunhofer IST
worked together with the Fraunhofer Institute for Machine
Tools and Forming Technology IWU and Sirris, the Belgian
research association. SensoFut is funded in the 13th Cornet
Call (Collective Research Networking) by the Federal Ministry
of Economics and Technology (BMWI) and the German
Federation of Industrial Research Associations (AiF) and ran
from 1.1.2014 to 30.6.2015.
Example of measurement results from
a deep-drawing process.
0.3
0.4
0.5
0.6
0.7
0.8
0.9
1.0
Rx /
R0 [1
]
2.0 2.5 3.0 3.5 4.0 4.5 5.0Time [s]
40
35
30
25
20
15
10
Tem
pera
ture
[° C
]
CONTACTDr. Saskia Biehl
Phone +49 531 2155-604
1 Schematic of the multi-
functional coating systems.
2 Deep-drawing die with
complete sensor system.
M E C H A N I C A L E N G I N E E R I N G , T O O L S A N D A U T O M O T I V E T E C H N O L O G Y
37
applications of atmospheric-pressure plasmas, such as, for
example, corona treatment, dielectric barrier discharges (DBD)
or a treatment with a plasma jet. This makes the surface better
wettable and in many cases also leads to an improvement in
the adhesion of the adhesives.
Surface functionalization
At the Fraunhofer IST atmospheric-pressure plasma processes
and the corresponding installations are being developed which
offer the possibility of functionalizing plastic surfaces under
a controlled atmosphere. It is possible with the equipment
available to give surfaces selective chemical functionalizations.
This might be, for example, groups containing nitrogen
generated by plasma treatment in nitrogen / hydrogen mixtures
or ammonia. However the creation of functionalizations on
the basis of coatings with carboxylate or epoxy groups is even
possible by using suitable precursors such as maleic anhydride
or glycidyl methacrylate.
State of the art
Despite enormous advances in the development of adhesives
and in surface pretreatment, many plastics continue to be
considered very poorly bondable since durable connections
can only be secured with a limited number of adhesives.
In many cases these adhesives have to be modified, with
the consequence that requirements relating to mechanical,
thermal, and / or processing properties are not longer satisfied.
In recent years it has been possible to considerably expand
the range of usable plastics and adhesives by means of
suitable pretreatment methods. While chemical methods
such as pickling or etching are now only rarely used due to
poor environmental compatibility and questions of occupa-
tional physiology, in many companies physical or chemical
pretreatment processes are in service. Here plastic surfaces
are cleaned, roughened or activated by flame treatment, the
use of low-pressure plasmas and in particular the inexpensive
PRETREATMENT OF HIGH- PERFORMANCE PLASTICSNew plast ics deploy their excel lent mater ia l propert ies under high thermal and chemical stresses and are
therefore used increas ingly in the most var ied f ie lds of machine and plant construct ion. One chal lenge
here is the high-strength bonding of components. Atmospher ic-pressure plasma pretreatment for high-
strength plast ics has been opt imized at the Fraunhofer IST.
1 2
38
The »KovaPlas« project
The aim of this AiF project was to optimize existing
atmospheric-pressure plasma processes such that low-energy
plastics would due to pretreatment adhere much better to
adhesives. With the use of polyurethane and epoxy adhesives
in particular, high-strength covalent and durable bonds can
thus be obtained in the area of substrate strength between
the adhesive and the surface of the bonded component. Here
the greatest number possible of chemically reactive groups
adhering firmly to the surface was created and bonded with
amine-curing adhesives. The figure below shows tensile shear
tests with various treated plastics.
Adhesion results for different plastics.
PVDFPP1-K PUR1-K PUR
POM2-K Epoxid
PC1-K PUR
Tens
ile s
hear
str
engt
h [M
Pa]
Without pretreatment Air plasma
N2/H2 plasma N2/H2 plasma (N2 atmosphere)
CONTACTDr. Marko Eichler
Phone +49 531 2155-636
1 Plasma jet for
pretreatment.
2 Glove box with plasma
jet for oxygen-free nitrogen
functionalization.
M E C H A N I C A L E N G I N E E R I N G , T O O L S A N D A U T O M O T I V E T E C H N O L O G Y
39
Gas flow sputtering of rare-earth magnetic layers
Any sputtering method can generally be used for the reliable
production of smooth and compact layers. However, magne-
tron sputtering, which is in widespread use, is only feasible to
a very limited extent especially for magnetic materials, since
these materials disable the functional principle of the mag-
netron. Hollow-cathode gas flow sputtering, however, is very
suitable for the deposition of magnetic materials. As a high-
rate sputtering process with no magnetic field, this means that
layer thicknesses even up to several tens of micrometers can
be produced economically.
The scanning electron micrograph in Figure 1 shows a typical
structure for a hard magnetic layer deposited by gas flow sput-
tering. A rare-earth magnetic layer 10 µm thick is sputtered
onto a thin, adhesion-promoting and texturizing starting layer.
It is topped by a thin layer of chromium which protects against
corrosion and wear. It can be seen from Figure 2 that although
Hard magnetic layers on technical surfaces
One application example is a precision angle sensor for which
a magnetic layer is sputtered directly onto a commercial roller
bearing. High demands are made of the magnetic and struc-
tural properties of coatings of this kind on technical surfaces,
not least because their information is to be read off from a
certain distance away. On the one hand, the magnetic layers
must have not only a high remanence – in other words, a high
residual magnetism – but also a layer thickness in the one- to
two-digit micrometer range. On the other hand, they must
have a high coercive field strength – that is, a high resistance to
unintended pole reversal – to prevent information from being
disturbed or overwritten by external fields in a harsh environ-
ment. At the same time they should be smooth, have little
residual stress and be corrosion-resistant. Rare-earth magnetic
materials, such as samarium-cobalt, are particularly suitable
for these requirements since they have an exceptionally high
energy product and can even be used at higher temperatures.
MAGNETIC LAYERS WITH GAS FLOW SPUTTERINGMagnet ic layers have long been establ ished as re l iable and highly accurate information carr iers , for exam-
ple, in hard dr ives or on swipe cards. But even for mechanical and electromechanical e lements, magnet ic
layers offer a great potent ia l for measur ing the posit ion, speed or angle of moving parts in operat ion.
They can also be used for coding workpiece information or as an e lement in miniatur ized dr ives. For some
t ime now soft and hard magnet ic layers for different appl icat ions have been developed at the
Fraunhofer IST.
11 22 µm 10 µm
40
the surface has characteristic structures it is otherwise smooth
and free of flaws. The associated hysteresis curve is shown in
Figure 3. With a remanence greater than 0.6 T and a coercive
field strength above 500 kA / m these layers have excellent
hard magnetic properties.
Outlook
Magnetic layers have already been successfully deposited on
metal alloys, semiconductors and ceramics. The range both
of substrate materials used and of magnetic alloys available is
being continuously expanded. In addition, different approach-
es to scaling up the coating are currently being investigated
in order to make economically attractive production processes
possible.
Hard-magnetic hysteresis of a gas-flow-sputtered rare-earth
magnetic layer 10 μm thick.
Pola
rizat
ion
J [T
]
Field H [kA/m]
0.8
0.4
0
-0.4
-0.8
-800 800400-400 0
CONTACTDr. Kai Ortner
Phone +49 531 2155-637
1 Typical layered structure
(SEM micrograph) with ad-
hesion-promoting layer (bot-
tom), magnetic functional
layer (middle), and wear and
corrosion protection layer
(top).
2 SEM view of the surface
showing low roughness and
defect density.
M E C H A N I C A L E N G I N E E R I N G , T O O L S A N D A U T O M O T I V E T E C H N O L O G Y
41
In this business unit, coating technologies are developed
for the aerospace sector. The focus is on functionalizing
lightweight materials such as carbon fiber reinforced
plastics (CFRP) or light metals. In addition, coating sys-
tems are developed for optical applications, in particular
for special precision filters for space missions.
Currently the Fraunhofer IST is working on the following
projects:
� Electroplated metallization of CFRP components
� Development of new environment-friendly CFRP metallization methods
� Metallization of titanium components
AEROSPACE
� Wear-protection coatings for engines in jet aircraft
� Bearing sensor systems for condition monitoring in aircraft
� Development of surfaces for molds free from release agents
� Electroplated coatings of magnesium in aerospace applications
� Development of coating processes for precision lenses such as filters
Customers include companies from the aerospace sector
as well as their suppliers.
ENVIRONMENT-FRIENDLY METALLIZATION OF CFRP
Conventional pretreatment
So far there is no alternative to using the chromium sulfuric
acid in the electrolytic metallization of many plastics. With the
help of the etching agent the surface of the plastic is artificially
roughened and holes and cavities thereby created. These
holes are then also metallized. The mechanical interlocking
of the plastic and the metal coating results in good adhesion
(pushbutton effect).
Lasers make small holes
In a joint project with the Fraunhofer Institute for Laser Tech-
nology ILT in Aachen, the Fraunhofer IST has developed an
innovative, environment-friendly process for pretreating CFRP
which does not use hexavalent chromium compounds.
In this method a laser beam burns a large number of small
holes into the surface. The spacing and size of the holes re-
semble the bites produced during chemical etching. The next
Metallization of CFRP
The metallization procedure for the Sentinel mission was
developed and implemented by the Fraunhofer IST in collab-
oration with Airbus Defence and Space. In addition, the CFRP
antennas for the Mascot mission of the German Aerospace
Center (DLR) were metallized at the Fraunhofer IST.
Although this procedure was developed to readiness for series
production and is currently being used again it does have one
serious drawback: pretreatment of the CFRP material involves
the use of, among other things, chromium sulfuric acid
containing hexavalent chromium which is acutely toxic and
carcinogenic. According to the EU’s REACH regulation (where
REACH is an acronym for the registration, evaluation, au-
thorisation and restriction of chemicals) the use of substances
containing hexavalent chromium will be severely restricted in
future, possibly put under prohibition.
Carbon f iber re inforced plast ic (CFRP) is a composite mater ia l made of carbon f ibers and a polymer matr ix ,
in many cases epoxy res in. This h igh-performance mater ia l i s mainly used in the aerospace sector. In
addit ion to a low specif ic weight, CFRP has outstanding mechanical propert ies such as high mechanical
st iffness, which means that this mater ia l i s f requent ly used as a subst i tute for heavier metal mater ia ls .
However, for some appl icat ions CFRP components have to be coated. For the ESA’s Sent inel 1 miss ion,
waveguide antennas made of CFRP were e lectrolyt ica l ly metal l ized at the Fraunhofer IST in order to give
them adequate e lectr ica l and thermal conduct iv i ty .
1 2 20 µm
20 µm
44
steps are similar to those of the conventional metallization
of plastic: palladium activation, electroless metallization and
further electrolytic coating for reinforcement. Even direct
metallization is possible. In addition to the usual flat speci-
mens, complex three-dimensional parts were also adherently
metallized.
Potential applications
Alongside the laser pretreatment and metallization of CFRP
components it has also been possible to coat other polymers
by this method. However, the high cost and complexity of this
method means that it will initially be restricted to expensive
workpieces.
CONTACTDr. Andreas Dietz
Phone +49 531 2155-646
1 CFRP surface after laser
pretreatment.
2 Cross-section of a CFRP
surface after laser pretreat-
ment and metallization.
3 3D CFRP component
after laser pretreatment
followed by metallization.
3
A E R O S P A C E
45
ENERGY AND ELECTRONICSIn the “Energy and electronics“ business unit the
work of the institute concentrates on the following
developments:
� Functional coatings or coating systems and coating processes for architectural glass (low-E coatings, active or passive heat and sun protection, switchable electrochromic glazing)
� Transparent conductive coating systems (TCOs) for architectural and automotive glazing, for solar cells, displays and invisible heating elements and also for solar thermal energy
� p- and n-type TCOs as materials for transparent and flexible electronics
� Semiconductor layers for thin film and silicon-based photovoltaics and also characterization methods for thin-film solar cells
� Electrical contact and insulating layers, as well as barrier layers
� (Local) plasma treatment of surfaces for wafer bonding, structured metallization and metallization of temperature-sensitive and complexly shaped substrates
� Stable anodes and cathodes for lithium-ion batteries
� Electrolytic coatings for high-temperature fuel cells (SOFC) and gas separation membranes for hydrogen production
� Corrosion-protection and thermal-barrier coatings for high-temperature applications, such as in gas turbines
Our customers include companies in the glass, photovol-
taics and automotive industries, in semiconductors and
microelectronics, in the information and communications
sectors, in the energy and construction industries,
and also plant manufacturers and contract coating
companies.
H2
H2
H2
Natural gas and steam
Catalyzer
Residual gas
PALLADIUM GAS SEPARATION MEMBRANES FOR HYDROGEN SEPARATION
Hydrogen may be produced via steam reforming of natural
gas. Here steam is added to natural gas and this mixture
passed over catalyst particles. In an endothermic reaction at
operating temperatures of approximately 600 °C, hydrogen
molecules and carbon oxides are produced. When this gas
mixture meets a palladium surface, the hydrogen permeates
through the metal and can be extracted on the other side for
further processing.
Gas-separation membrane tubes
Under the trade name ITM our partner Plansee SE produces
by powder metallurgy thin tubes made of an Fe-Cr alloy.
With a porosity of approximately 40 vol.-% they are highly
gas-permeable and form the substrate material for the thin
Principle of hydrogen separation
In some elements, such as palladium, vanadium, nickel or
iron and in alloys such as Ag-Pd, Ni-Zr, hydrogen is highly
soluble and has high diffusivity at elevated temperatures. If
the metallic membrane structure is sufficiently dense and
thus only permeable to hydrogen atoms, a system of this kind
can be used for separating H2 from a gas mixture. To avoid
corrosion, membrane structures made of noble elements such
as palladium are preferably used. Given the high cost of pure
palladium and due to the fact that the hydrogen flow rate
is inversely proportional to the thickness of the membrane,
only very thin Pd membranes about 10 µm thick are used,
which are deposited on a relatively thick (about 1 mm) porous
substrate.
The demand for clean and green energy has meant a continuous increase in the consumption of hydrogen
in recent years. An economical ly eff ic ient production of small and medium quantit ies of hydrogen can be
achieved with the help of thin pal ladium membranes appl ied to porous pipe surfaces. The Pd membranes are
selectively permeable to hydrogen, thus al lowing eff ic ient separation of hydrogen from a gas mixture. Under
a cooperation agreement, the Fraunhofer IST is working together with the Plansee SE and Linde AG compa-
nies in this f ield.
1 2
48
H2
H2
H2
H2
H2
H2
H H
H H
CO2
COCH4
H2O
Reformed natural gas
Pd membrane on porous substrate
Extracted hydrogen
1 Gas-separation mem-
brane tubes with a PVD
palladium surface.
2 Schematic representation
of steam reforming and
hydrogen separation with a
single tube.
3 Schematic representa-
tion of hydrogen diffusion
through the Pd membrane.
CONTACTDr. Kai Ortner
Phone +49 531 2155-637
Pd membranes which the Fraunhofer IST applies by means of
a PVD process. In addition, between the ITM tubes and the
Pd membrane there is a porous ceramic diffusion barrier of
zirconium oxide (ZrO2), stabilized with yttrium oxide (Y2O3).
This membrane prevents Pd diffusion into the Fe-Cr substrate,
thus ensuring the long-term stability of the coating. The
leakage rate of the Pd membrane essentially determines the
performance of the system and should be as low as possible.
However, the thin Pd coatings have nodular defects. This
reduces the impermeability of the membrane so that not only
H2 but also other molecules can diffuse through it. To prevent
this, these flaws were sealed over by a second electroplated
layer of palladium.
3
E N E R G Y A N D E L E C T R O N I C S
49
NEW, NON-INVASIVE RESISTANCE MEASUREMENT FOR BATTERY FOIL
carrier magnet, the micro particles form oblong particle chains
that are in contact with said magnet. Through this, a three
dimensional form with antenna-like flexible structures emerg-
es. When the testing tube is placed on the electrode surface,
the structure reforms and adapts to the topography. Due to
the high particle relocatability, form closure can be achieved
without any mechanical load on the object. With the help of a
suitable sensor for the height positioning of the testing tube,
the contact force on the test object can be controlled and
regulated with a z-axis control.In total, on the whole loss-free
electron transport from the measured object into the probe
structure and the measuring device (e. g. a micro ohmmeter)
is ensured. This is a major requirement in order to gain reliable
measurement results.
Resistance measurement system e-CON
When it comes to measure the electric resistance of objects
with a coarse surface, like LIB electrodes, it is often not
possible to establish a loss-free contact. Usually, measuring
tips and pins are used for this purpose. However, these cause
‘parasitic’ voltage drops in the contact zone as well as being
invasive. Both can significantly distort the measurement result
and affect the reproducibility of the measurements.
With the aim to realize non-destructive and stable low-resis-
tance measurement contacts, a contact probe was developed
at the Application Center for Plasma and Photonics of the
Fraunhofer IST. Here, magnetized micro particles with an ex-
cellent conductive coating are used. Under the influence of a
The enhancement of electr ic energy storing is of vital societal importance, s ince the increasing use of
regenerative energy sources and decentral ized energy production (for example solar systems on rooftops)
requires improved storage systems. Lithium-ion batteries (L IB) are a promising technology for this purpose.
LIBs are increasingly being used in the f ields of mobile appl ications as wel l as in the automotive-sector. In
this context, the Application Center for Plasma and Photonics of the Fraunhofer IST is working on an im-
provement of said batteries. Special metal foi ls as carr ier material for LIB electrode layers are being devel-
oped. The start ing point of the related project “Batteriefol ie mit Kohlenstoff-Kontaktschicht KoKon” (bat-
tery foi l with a carbon contact layer) is to minimize electr ic resistances in electrodes. This is achieved
through plasma-generated functional layers. In addit ion to the production of battery foi ls, a rel iable deter-
mination of the electr ical propert ies of the manufactured foi ls and battery electrodes is an important aim of
the project. To accomplish this, a new measurement system is being developed within the framework of this
project: e-CON.
1 32 40 µm
50
1-3 Contacting and
measurement probe for de-
termining electric resistances
in battery electrodes. (1)
particle-based measurement
probe, (2) enlargement of
the particle chains, (3) labo-
ratory measurement station.
4 Aluminum current collec-
tor foil with carbon contact
layer.
CONTACTNils Mainusch
Phone +49 551 3705-333
Outlook
The present results reveal that using battery foil leads to an
increased performance of lithium-ion cells. In the further
course of the project, the production of foil and cells as well
as battery tests in an industry-oriented technical center will
be continued. The e-CON laboratory instrument is currently
being transferred to a compact, semi-automatic measurement
system.
The project
The R&D project ‘Batteriefolie mit Kohlenstoff-Kontaktschicht
KoKon’ (battery foil with a carbon contact layer) is a coopera-
tion of the Application Center for Plasma and Photonics of the
Fraunhofer IST and the Fraunhofer Institute for Silicon Tech-
nology ISIT. The industrial board consists of eleven enterprises.
The Application Center’s project part is Funded by the German
AiF Arbeitsgemeinschaft industrieller Forschungsvereinigungen
‘Otto von Guericke’ e. V. with € 215,750 (€ 117,600 in 2015).
4
E N E R G Y A N D E L E C T R O N I C S
51
APPLIED COLD PLASMA SPRAYING
The advantages
Compared to conventional coating processes such as Galvano
technology, plasma cold spraying shows a number of advan-
tages. Wet-chemical processes and environmentally unfriendly
binding agents or solvents can be left out during the coating
processes. Possible coating materials range from various
metals like copper, aluminum, tin and titan to refractory
metals such as wolfram, to name but a few. Furthermore,
plastic coatings can be generated with PTFE or Polyethylene
as basis material. The real strong point of the process is in the
wide range of possible substrates: from very smooth surfaces
like glass, and thermal sensitive materials such as paper, wood
or textiles, up to complex three-dimensional materials made of
synthetics or metal.
The technology
Cold plasma spraying enables the efficient production of layers
based on different metals, metal alloys and thermoplastics.
The technology was developed in connection with thermal
plasma spraying, where particles are melted or fused with
the help of plasma, and sprayed on to a substrate. The
huge advantage of cold plasma spraying lies in the use of
comparatively small particles – the micro particles used are
not bigger than 20 μm, or they have a high aspect ratio of
thickness to width, which supports the fusing. Therefore, the
whole melting process can be executed in considerably lower
temperatures, allowing the coating of temperature sensitive
materials such as plastics, thin glasses, paper or textiles.
As wel l as direct contact with human skin, indirect contact to others v ia doorknobs can lead to a trans-
miss ion of diseases. In part icular in hospita ls and with the dangers of mult i res istant germs (MRSA) in
mind, avoiding such sources of infect ion is extremely important. Because of their ant ibacter ia l propert ies
copper doorknobs are considered a good solut ion. The disadvantage is that they are expensive and, there-
fore, are frequent ly stolen. At the Appl icat ion Center for P lasma and Photonics at the Fraunhofer IST, a
method for coat ing common metal or p last ic doorknobs with an ant ibacter ia l copper layer has been de-
veloped cal led cold plasma spraying. This method al lows the deposit ion of a copper coat ing of 100 μm –
the minimal layer thickness to ensure a permanent ant ibacter ia l effect in everyday use.
21
52
1 LED-contacting via
flexible conductor tracks on a
textile fabric.
.
2 Anti-bacterial doorknob
with a copper coating.
CONTACTNils Mainusch
Phone +49 551 3705-333
Prof. Dr. Wolfgang Viöl
Phone +49 551 3705-218
Application examples
Due to the versatility of the process, its operational purposes
are numerous. As well as the antibacterial coated doorknobs
mentioned above, typical applications are mostly found in the
fields of electronics. Here, thin copper conductor tracks can be
deposited onto polymers, which can be used as smart phone
antennae after a subsequent laser structuring. A further step
can even allow the seamless integration of flexible conductor
tracks on textile fabrics without damaging a single fiber.
Other application examples are:
� Conductor tracks
� Anti-static coatings
� Coatings to shield electro-magnetic interference radiation
� Heat conductive layers
� Friction coefficient reduction
� Anti-microbial functional layers
� Coatings as bonding agents
� Anti-adhesive layers
� Barrier layers
� Optical coatings
E N E R G Y A N D E L E C T R O N I C S
53
OPTICSIn its “Optics“ business unit the Fraunhofer IST is active
with a variety of thin-film technologies in developing
new solutions for new industrial applications. These
include:
� The development and manufacture of coatings for optical components
� Systems for the deposition of high-grade optical coatings on flat and curved lenses
� The EOSS® production platform for manufacturing optical filters and laser components
� The development of new materials for intelligent coatings, such as electrically switchable filters
� Highly durable broadband anti-reflective coatings on sapphire and glass
� Micro-structured optical filter coatings for imaging applications
� Optical coatings on plastic surfaces
� Use of simulation in designing and optimizing coating processes and installations in low-pressure systems
� Development of innovative transparent conductive coatings for lighting technology and oxide electronics
In the field optical metrology the Fraunhofer IST focuses
on the following topics:
� In-situ monitoring of coating processes with MOCCA®
� Mapping system for measurement of ellipsometry, reflection, transmission, flare and Raman spectroscopy on 60 x 60 cm2
� Defect analysis of optical layers by means of FIB REM and confocal optical microscopy
� Testing the wear and corrosion resistance of optical surfaces and coatings
Clients of this business unit include companies in the
optical industry, the automotive industry, aerospace,
manufacturers of displays and data storage media as well
as plant manufacturers and contract coating companies.
deposited in different coating runs. The black curve shows
the initial distribution. After ten weeks the red distribution
emerged. Then the sputter compartment was opened, cleaned
and a number of components replaced at the same time.
Following a short period of running-in, the violet distribution
was measured, which corresponds almost exactly to the initial
distribution.
Example: production of optical filters
Long-term stability was evident not only in the creation of
individual layers but also in the production of filters. The plate-
to-plate distribution is also always relevant here. The second
graph shows the homogeneity of the layers after ten weeks
of operation with a fully populated batch with ten substrates
– nine carriers and one monitoring system. In the graph the
normalized position of the band edge is plotted on the y axis
while the distribution on the longitudinal and transverse axes
was measured relative to the movement. The shape of the
curves shows clearly that the distribution is excellent even
with a full batch with ten substrates each with a diameter of
200 mm.
EOSS® coating concept
In the production of optical coatings the Fraunhofer IST relies
on using magnetron sputtering technology. With the EOSS®
platform an approach has been selected in which a batch of
ten substrates each with a diameter of 200 mm is arranged on
a turntable which rotates continuously at a fast speed. Using
cylindrical magnetron sources rather than planar magnetrons
yields decisive advantages, since the layer thickness distribu-
tion is extremely stable in the long term. The advantage is
obvious: readjustments, batch planning or other measures are
no longer necessary. In the case of the sputtering cathodes,
sub-stoichiometric oxides among other things are used as
targets. Previous research showed that this leads to improved
values for the layer thickness distribution and that conditio-
ning can be simplified significantly. Current measurements at
the Fraunhofer IST show that absorption is even improved in
the case of Ta2O5 as a high-index material.
The graph shows the results of a long-term investigation of
layer thickness distribution. During the course of our work
more than 70 layers of μm thickness (here SiO2) have been
EOSS® PLATFORM – DEMONSTRATION OF LONG-TERM STABLE DISTRIBUTIONWith the development and construction of the innovative coating platform EOSS® the Fraunhofer IST has created
new possibilities for depositing highly sophisticated optical coatings. Not only are coatings with an extremely
low level of defects possible but also highly complex layer designs with several hundreds of layers and this with
an extreme accuracy and uniformity of coating. The Fraunhofer IST's EOSS® system platform saw further
development in 2015 as well. Industrial users make high demands of the system's stability in production. Un-
varying implementation of specifications requires a stable distribution of layer thickness. With the EOSS® it
could be demonstrated that the concept of rotating cathodes and optimized sputtering targets is well suited for
delivering outstanding homogeneity in optical filter coatings even over very long periods of weeks and months.
1 2
56
1 The EOSS® coating plat-
form at the Fraunhofer IST.
2 The optical broadband
monitoring system MOCCA+®
from the outside.
3 View of the monitor
plate, a component of the
MOCCA+® monitoring system.
CONTACTDr. Michael Vergöhl
Phone +49 531 2155-640
The examples illustrate how with EOSS® technology new and
extremely sophisticated optical coatings can be manufactured
on the industrial scale with a high level of process reliability.
Layer thickness distribution of SiO2 layers after various
process steps
100.5
99.5
100.0
99.0
101.0
Rela
tive
to c
ente
r [%
]
Position [mm]0 50 100-50-100
initialafter 10 weeks
after cleaningafter run-in
Homogeneity of layers (fully loaded) after ten weeks of
operation.
Rela
tive
to m
ediu
m w
avel
engt
h [%
]
100.2
100.1
99.8
99.9
100.0
99.7
100.3
0 5 10-5-10Position [°]
3
O P T I C S
57
LIFE SCIENCE AND ECOLOGYIn the “Life science“ field the Fraunhofer IST develops
coatings, processes and equipment for a range of
application fields:
Medicine and hygiene
� Healing support for wounds and infectious skin diseases
� Antiseptic therapy
� Dentistry
� Hand hygiene
� Sterilization of surfaces and disinfection
� Treatment against lice and mites
Medical technology
� Microfluidics
� Biosensors
� Lab-on-a-chip
� Internal coating of tubes, bottles and bags
� Functionalization of the surfaces of disposable articles
� Implants
Cell culture technology and microbiology
� Control of cell adhesion and differentiation
� Control of protein adsorption
� Coupling of antibodies
� Cell transfection and transporation
Agricultural and foodstuffs technology
� Pest control
� Disinfection of seeds and food
� Disinfection of packaging
In the “Ecology“ field the Fraunhofer IST focuses on the
following topics:
� Water disinfection and wastewater treatment by means of diamond electrodes
� Photocatalytic air and water purification systems
� Self-cleaning and antifouling
� Standardized test procedures for the neutral evalua-tion of photocatalytic properties of products
In addition to users in the fields mentioned, our custom-
ers also include manufacturers of equipment for surface
modification and coating as well as contract coating
companies at home and abroad.
The technology
An easy-to-apply solution, away from chemical agents and
unreliable household remedies, could be offered by a plasma
innovation developed at the HAWK University for Applied
Sciences and Arts and the Application Center for Plasma and
Photonics of the Fraunhofer IST.
The “Plasma Lice Comb”, as it is called, is based on the
principle of a dielectric barrier discharge (DBD). The ambient
air between two electrodes, which in this case are the teeth
of the comb, is ionized by a short high voltage pulse and
therefore transferred to the plasma state. In this state, diverse
plasma chemical and plasma physical effects contribute to
the killing of head lice. Cold atmospheric pressure plasma is
applied to the human skin and efficiently kills off the parasites.
The treatment is completely pain-free for the patient.
Kill head lice, pain- and chemical-free
At the moment there are two conventional treatment
methods: chemical anti lice agents that contain biocides, and
the manual treatment with a standard lice comb. However,
both methods have their weaknesses. The standard method
with the lice comb without plasma means combing every
single strand of hair with a fine comb. The procedure is
protracted and unpleasant, especially for children with thick
hair. Furthermore, it is the more inefficient method: the lice
can be removed, but not the tiny nits, which will soon cause a
new outbreak.
During the chemical treatment with lotions, powders, or
sprays on the scalp, the lice, nits and eggs are penetrated
with the substances and therefore killed, but people are more
and more skeptical concerning the use of chemical products.
Children and families should not be exposed to the chemical
stimuli and substances. It has also been scientifically proven
that lice and nits can become resistant.
Every day, hundreds of people are infected with head l ice. Just l ike a cold, anyone can catch them; they
spread rapidly, especia l ly in schools and kindergartens. Their main targets are chi ldren aged 3 to 10. Head
l ice cause an uncomfortable i tching and can only be removed with some diff iculty. Therefore, an innova-
t ive plasma l ice comb has been developed at the HAWK Univers i ty for Appl ied Sc iences and Art , a c lose
partner of the Appl icat ion Center for P lasma and Photonics of the Fraunhofer IST. This comb is now being
f inal ized at the appl icat ion center to f ind a remedy for the widespread problem.
FIGHTING HEAD LICE WITH PLASMA
1 2
60
The treatment
During the treatment the plasma tool is pulled through the
strands of hair for a few minutes, just like a normal brush.
The lice are killed during this short treatment, which can
be repeated on following days if needed. Patients suffering
from pre-existing conditions, such as asthma or allergies, can
avoid the possible trigger contact with chemical substances.
In general, the avoidance of chemical agents and aggressive
substances is supported by parents and pediatricians. Some of
whom are already testing the comb. The reduction of chemical
agents in pest control also means less chemical residues and
packing material which pollute the environment.
Outlook
The prototype, which has already been presented at world
biggest medicine fair MEDICA, has attracted a lot of public
interest. At present, the aim is to use a cooperation to present
the patented technology to the market as a low volume
production in the cosmetics sector. By modifying the form of,
or space between, the comb teeth, it could in future also be
used on pets.
The project
The plasma comb was originally developed within a project
funded by the German Federal Ministry for Economic Affairs
and Energy (BMWI) by the Faculty of Natural Sciences and
Technology of the University of Applied Sciences and Arts
Hildesheim/Holzminden/Goettingen.
1 Plasma discharge in the
comb’s teeth.
2 Laboratory prototype of
the plasma comb..
3-5 Plasma comb
operating principle.
CONTACTRoland Damm
Phone +49 551 3705-383
Prof. Dr. Wolfgang Viöl
Phone +49 551 3705-218
3 4 5
61
Procedure and project results
The development work was carried out in an industrial ultra-
pure-water ring-main system set up by MTJ Medizintechnik &
Service GmbH in which the pipe circuit measured 200 m
and had a total volume of 240 l (see Figures 1 and 2). The
electrochemical ozone generator was equipped with four
diamond electrodes with dimension of 2.5 x 5 cm2 (Figure 3).
The diamond electrodes came from CONDIAS GmbH, a spin-
off company of the Fraunhofer IST.
To enable multifactorial optimization of the operating con-
ditions of the ozone generator and the electrode system the
design of experiments was applied. Under optimized process
conditions, O3 concentrations above 100 µg / l were achieved
throughout the total pipe system in less than 10 minutes (see
opposite graphic). With ozone concentrations like this the
relevant bacterial strains are killed within a brief period of con-
tact. When the ozone generator is switched off the ozone still
dissolved in the water decomposes completely and even after
Using diamond to kill germs and remove biofilms
In many respects diamond is a very special material. Even its
electrochemical properties are extraordinary, as can be seen
from its extremely high anodic overpotential of approx. 2.8 V.
If a diamond-coated electrode pair is immersed in water and
a voltage applied, OH radicals and other strong oxidants such
as ozone (O3), which is a highly potent disinfectant even at
the lowest concentrations, form on the anode surface directly
from the water molecules and without the use of additives.
On the basis of this principle, an electrochemical ozone
generator has been developed and optimized with respect to
killing germs (sanitization) in a real ultrapure-water circulation
system. Furthermore, in a first field test it was possible to
recondition successfully an ultrapure-water installation heavily
burdened with biofilms. Attempts to do this with state of the
art methods failed repeatedly.
1
Demineral ized, u l t rapure water is an essent ia l raw mater ia l for many industr ia l products, whether in the
medical and pharmaceut ica l industry, in semiconductor manufacture or in the product ion of foodstuffs .
However, systems for producing and del iver ing ultrapure water are frequent ly colonized over t ime by
germs and biof i lms. This lowers water qual i ty and leads to unstable product ion processes or losses in
product qual i ty . The problem can be remedied by t ime-consuming and cost ly c leaning processes us ing
chemicals or apply ing high temperatures. One environmental ly f r iendly and cost-effect ive a l ternat ive in
the sanit izat ion of ultrapure water systems is the cold sanit izat ion process opt imized at the Fraunhofer
IST which uses boron-doped diamond f i lms. I t i s based on an electrochemical process and requires no
addit ional chemicals or increased temperatures. The work, f inancia l ly supported by the Deutsche Bundes-
st if tung Umwelt DBU (German Federal Environmental Foundat ion) i s helping our c l ient, the Dessau com-
pany MTJ Mediz intechnik & Serv ice GmbH, to create a new innovat ive product with an important unique
sel l ing point.
GERM-FREE ULTRAPURE WATER WITH DIAMOND ELECTRODES
2
62
a relatively short time can no longer be detected. The time
constant of ozone decomposition depends on temperature
and the components installed in the system. After a few hours
the sanitized ultrapure-water circuit was again operational
and, without any rinsing processes, free of residues.
Advantages as compared with state of the art
procedures
� Environmentally-friendly and resource-efficient
� No added chemicals
� No residues and no waste to be disposed of
� Minimal energy consumption (typically 10 Wh per treatment)
� Minimal downtime of the ultrapure-water systems to be sanitized
� Fully automatic operation allows pre-emptive use during night hours to prevent biofilm formation
� Compact, easily retrofittable system with low operating costs.
Electrochemical generation of ozone and decomposition
after the ozone generator is switched off; total current: 4 A;
cell voltage: 10 – 12 V, temperature: 20 °C.
t [min]15-5 300 5 10 2520
[O3] max
200
160
120
80
40
0Ozo
ne c
once
ntra
tion
[µg/
l]
1 Ultrapure-water test
facility: tanks and measure-
ment equipment.
2 Ultrapure-water test
facility: closed circuit water
pipe, length 200 m.
3 Preassembled diamond
electrode stack for installa-
tion in the ozone generator.
CONTACTDr. Markus Höfer
Phone +49 531 2155-620
3
L I F E S C I E N C E A N D E C O L O G Y
63
In the case of the plastic film, the equivalent of the waxy
layer given to the lotus leaf by its special structuring is a
hydrophobic layer. It is applied by dielectric barrier discharge
at atmospheric pressure and is so thin that the contours of
the underlying structure are preserved during coating. With
hydrophobic coatings of this kind, contact angles of 120 °
are achieved on smooth substrates. Due to the optimal com-
bination of the microtextured surface and the hydrophobic
coating, superhydrophobic surfaces with contact angles
greater than 150 ° are obtained. In this way not only is wetting
with water successfully prevented but also with culture media
(see Fig. 3).
Surface treatment
The molding of a defined microstructure onto inexpensive
plastic sheeting is carried out using an embossing mask in the
form of an engraved metal foil 130 μm thick which is created
by high-resolution stylus or laser engraving with defined
defined spacing and height parameters (see Fig. 1). By varying
the parameters of pressure and temperature the embossing
process is set so that the mask structure is entirely transferred
to the plastic film without damaging it. In previous attempts
the texturing was obtained by depositing weakly bound SiOx
particles with atmospheric pressure plasma. In contrast to sur-
face topographies created by applying an intermediate layer
the texturing obtained by embossing the surface of the plastic
film (see Fig. 2) has significantly greater mechanical stability.
1
Biof i lms often form where proteins adsorb on surfaces. To prevent this , a new combinat ion process for
plast ic sheet ing is under development at the Fraunhofer IST which stops the surface being wetted with
solut ions containing protein. Here the surface topography of plast ic f i lms is modif ied a long the l ines of
the lotus leaf by the addit ion of microtextur ing transferred by specia l masks. These inexpensive micro-
structured masks are fabr icated in col laborat ion with GRT GmbH & Co KG. In a subsequent step at the
Fraunhofer IST a hydrophobic coat ing is deposited by an atmospher ic-pressure plasma process.
COMBINATION OF EMBOSSING AND COATING AT ATMOSPHERIC PRESSURE
2 15 µm
64
Applications
The wetting of plastic surfaces is of crucial importance in a
number of fields of application. For example, surfaces with
different wetting behaviors are required in medical technology,
depending on the application. By giving a suitable structure
to the plastic substrate, superhydrophobic or superhydrophilic
surface properties can be applied, depending on the coating.
Outlook
One topic for the future is the combination of plastic em-
bossing and atmospheric-pressure plasma processes to create
not only flat but also three-dimensional substrates. For this
the structuring process will need to be adapted accordingly.
It is planned to make these 3D objects from silicone, plastic
or epoxy resins by special casting or embossing processes.
The complex shapes required here must be provided with the
corresponding structures. In a subsequent step the shaped
components can then be coated. Coating 3D substrates by
means of atmospheric-pressure plasmas has already been
successfully demonstrated at the Fraunhofer IST.
1 Embossing mask for
plastic films: metal foil with
defined structuring in the
area between the spots.
2 LSM image of em-
bossed polypropylene film:
transfer of a stylus-engraved
structure.
3 Wetting behavior of
embossed and then fully
coated polypropylene film;
the area around the spots is
superhydrophobic.
CONTACTRowena Duckstein
Phone +49 531 2155-619
3
L I F E S C I E N C E A N D E C O L O G Y
65
8 I 9
In pursuing the business units that were showcased in the previous chapters the
Fraunhofer IST utilizes a wide spectrum of competencies. The focus is on these
technologies:
� Physical vapor deposition
� Chemical vapor deposition
� Plasma diffusion
� Atmospheric pressure plasma processes
� Electrochemical processes
� Laser technology
In addition the Fraunhofer IST provides recognized competencies for a variety of
coating systems. The institute offers a broad spectrum of cross-sectional services:
Surface pretreatment, thin film development, surface modification, process technology
(including process diagnostics, modeling and control), surface analysis and thin film
characterization, training, application-oriented film design and modeling, simulation,
system design, device and equipment manufacturing and technoloy transfer.
SERVICES AND COMPETENCIES
Physical Vapor Deposition (PVD)
� Magnetron sputtering
� Highly ionized pulsed plasma processes like HIPIMS, MPP
� Hollow cathode processes
Chemical Vapor Deposition (CVD)
� Hot-wire-CVD
� Atomic layer deposition (ALD)
� Plasma-enhanced CVD (PECVD)
Plasma diffusion
� Nitriding / Carbonitriding
� Oxidizing
� Boriding
1 2
COMPETENCE LOW PRESSURE PROCESSES
68
Atmospheric pressure plasma
� Micro plasma
� Low temperature bonding
� Plasma medicine
� Plasma particle coating and cold plasma spraying
� Oxidation and reduction of metals
� Plasma printing
� Plasma surface modification of natural products
Electrochemistry
� Multi component systems for electroplating
� Non-aqueous electroplating
� Electrochemical processes
Laser technology
� Laser plasma hybrid processes
� Laser induced fluorescence
Layer by layer processes
� Polyelectrolyte coatings
� Biofunctional coatings
3
1 Linear gas flow sputtering
source in operation.
2 Coating of ceramic face seals
with diamond by hot-wire acti-
vated chemical vapor deposition.
3 Improved stem cell growth
on the surfaces of plasma-coated
bags.
COMPETENCE ATMOSPHERIC PRESSURE PROCESSES
S E R V I C E S A N D C O M P E T E N C I E S
69
� Insulation coatings
� Piezoelectric coatings
� Plastics metallization
Micro and nano technology
� Thin film sensor technology
� Micro technology
� Nano composites
� Control of coating adhesion
� Structured surface coating and activation
Biofunctionalization
� Antibacterial coatings
� Adhesion and anti adhesion coatings
� Chemical reactive surfaces
Photocatalysis
� Air and water purification systems
� Photocatalytically active coatings with antimicrobial effectiveness
Friction reduction and wear protection
� Amorphous carbon coatings (DLC)
� Diamond coatings
� Hard coatings
� Nitride / Cubic boron nitride (cBN
� Metal coatings
� Plasma diffusion / DUPLEX processes
� Dry lubricants
� Erosion protection
� Corrosion protection
� Anti-adhesion and antifouling coatings
� Diffusion barriers
Electrical and optical coatings
� Precision optics
� Transparent conductive coatings
� Diamond electrodes
� Silicon-based coatings for photovoltaics and micro electronics
� Semiconductors (oxide, silicon-based, diamond)
1 2
COMPETENCE COATINGS SYSTEMS
70
3
1 Coated ball valve: reduction in
input power.
2 Strain gauges half bridge on
an automotive con-rod bearing.
3 Pipe flow geometry for com-
parative benchmarking of PIC/MC
flow simulation.
FURTHER COMPETENCIES
Pretreatment and functionalization
� Wetchemical cleaning
� Functionalizing of interfacial layers
� Surface structuring
� Plasma activation
Simulation
� Simulation of plants, processes and coating layer properties
� Model based interpretation of coating processes
Analytics and quality assurance
� Chemical analysis
� Crystal structure analysis
� Microscopy
� Analysis of chemical reactive surfaces
� Optical and electrical characterization
� Plasma diagnostics
� Tribological tests
� Mechanical tests
� Standardized photocatalytically measurement technology including test systems and devices
S E R V I C E S A N D C O M P E T E N C I E S
71
Possible applications
Figure 1 shows an example of the local cross-section prepara-
tion of an optical multiple layer coating system consisting of
alternating SiO2 and Ta2O5 layers with an embedded defect.
The FIB cut shows the source of the defect and localizes its
specific site in the layer system. In this case the defect is a
particle with a diameter of approximately 2 µm which landed
on the surface during the coating process and which was
overcoated. The chemical composition of the particle can be
determined with the aid of energy-dispersive x-ray spectros-
copy (EDX) and the source of the defects thus being easily
identified and removed.
A further method of application is the production of so-called
TEM lamellas. These are thin slices which have been vertically
cut out of the surface. With the help of a micro manipulator
they are lifted from the samples and thinned until they are
partially transparent for the electron beam. Subsequently,
applying the scanning transmission electron microscopy mode
(STEM) on this lamella allows to image parts of the internal
structure of the material with highest resolution (1 – 2 nm)
as well as to conduct a chemical EDX analyses with a local
resolution of just 10 nm.
How the FIB works
The FIB process is especially suited for the analysis of isolated
defects, microscopic areas of corrosion, small cracks or
artificial microstructures at and below the surface. Since often
it enables to determine their cause it is the ideal instrument
for failure analysis, but it can also be used in diverse stages of
development of materials or coatings.
In order to start the analysis the scanning electron microscope
(SEM) is first used to identify the location of a possible flaw.
Subsequently, on the target surface that is to be cut a thin
protective layer is deposited with the help of ion or electron
beam deposition. This is done in order to protect the original
surface in the following process of ion bombardment. In
the next step, the surface is cut vertically with the help of a
finely focused ion beam and under visual control in the SEM.
The material on one side of the vertical cut is removed and
therefore it provides an oblique view of the cut surface which
allows a sub-surface analysis. The advantage of FIB is that the
section plane can be positioned with sub-micrometer accuracy
so that the cross-section of even the smallest structures can be
shown.
1 2
Since the beginning of 2015 the Fraunhofer IST has extended i ts analyt ica l fac i l i t ies by a state of the art
scanning electron microscope with a Focused Ion Beam (F IB) . This instrument enables surfaces to be cut
vert ica l ly on a micro scale with the help of an ion beam and therefore provides new ways to look beneath
the surface of mater ia ls .
FOCUSED ION BEAM – THE VIEW BENEATH THE SURFACE
5 µm 2.5 µm
Silicon
Tantalum Oxygen
72
3
1 FIB cross-section of a
TaOx / SiOx-multilayer with an
embedded particle.
2 SEM image and EDX
mapping (Si, Ta, O) of the
embedded particle shown in
Fig 1.
3 STEM image of a
low-emissivity coating system
consisting of glass, 45nm
SiN, 45 nm ZnO, 12 nm Ag,
5nm TiO2, 45 nm ZnO. Colum-
nar growth and the crystalline
structure of the ZnO and Ag
coatings are clearly visible.
Finally, successive FIB images can be used to create a 3D
tomography of the structure of a material.
Further applications
There are various applications for SEM FIB. The predominating
ones are:
� Analysis of point defects such as growth defects, particle inclusions, corrosions, cracks or pores.
� Preparation of cross-sections of “difficult” materials such as polymers, glass, diamond, carbide, leather, textiles, wood, paper and porous materials.
� Examinations of particularly thin single or multiple coatings in the nanometer range using STEM and EDX such as transparent conductive coatings (TCOs), optical filters, low-emissivity, anti-reflective and ALD coatings
� Analysis of nanostructured coatings such as materials with nanoparticles, microcapsules, nanocontainers, or nanocomposites
� Analysis of microstructured surfaces in, for example, thin-film sensors, microsystems, microfluidic or microelectronic components.
CONTACTDr. Kirsten Ingolf Schiffmann
Phone +49 531 2155-577
20 nm
S E R V I C E S A N D C O M P E T E N C I E S
73
2 sccm. Growth layer simulations (kMC) were also carried out
over a wide range of flow rates. The layer stoichiometry was
then determined and in addition layers made experimentally
were investigated by Rutherford backscattering spectometry
(RBS). The graph shows that there is good agreement between
the results of all three methods.
Simulation expertise at the Fraunhofer IST
The parallelized simulation environment developed at the
Fraunhofer IST has been optimized for thermal evaporation,
magnetron sputtering and CVD processes in the low-pressure
range. It enables the description of process kinetics in realistic
3D reactor geometries. Connecting up to additional simulation
methods for layer growth means that intrinsic coating
properties such as density, structure and optical properties can
be predicted.
Further reading
[Lucas2010] S. Lucas, P. Moskovkin, Thin Solid Films 513
(2010) 5355-5361.
Layer morphology
In order to compare the simulated and the experimental TiO2
layer morphologies, the layer thickness profile in the system as
well as the angle and energy distributions of particles arriving
at different places on the substrate were first determined at
the Fraunhofer IST. These angular distributions were passed
on to the »NASCAM« software [Lucas2010] to be used as
an input variable in modeling layer growth by the kinetic
Monte Carlo method (kMC). In addition, a cross-section of the
experimental layers was analyzed with the aid of a scanning
electron microscope (SEM). Figure 2 shows that the simulation
corresponds well with the experiment and that layer
morphology on the substrate may vary depending on position.
Layer stoichiometry
In order to compare the layer stoichiometries of the simulation
and the experiment – that is, the relative quantities of titanium
and oxygen atoms – flow simulations (DSMC) were carried out
for selected O2 flow rates (2, 4, 6 and 8 sccm). Figure 3 shows
the resulting partial pressure distribution for a flow rate of
1
To successful ly model p lasma coat ing processes, processes must be considered on different scales of
magnitude. In addit ion to the movements of the part ic les in the coat ing reactor, mater ia l growth at the
molecular level i s a lso important. The CORNET project »Computer-Aided Process Ref inement for Inte l l igent
Coat ings« (or CAPRICe) combines f low and plasma s imulat ions with layer growth models . Here the detai led
growth condit ions on the substrate are used as an input var iable for subsequent s imulat ion of layer
growth. Predict ing layer propert ies such as morphology and stoichiometry is poss ib le with this concept of
the »virtual coat ing system«.
SIMULATION OF LAYER MORPHOLOGY AND LAYER STOICHIOMETRY
2
200 nm
200 nm
74
3
1 Simulated layer thickness
distribution in the sputtering
reactor.
2 Comparison of REM
images and simulated TiO2
layer morphology (NASCAM
software, University of
Namur, [Lucas2010]).
3 Oxygen partial pressure
distribution in the reactor at
a flow rate of 2 sccm.Comparison of simulated and experimentally determined
layer stoichiometries.
Stoi
chio
met
ry x
in T
iOx
0.0
0.5
1.0
1.5
2.0
O/Ti incident flow
kMC simulations RBS analysisDSMC simulations
0.1 1 10 100 1000 CONTACTThomas Melzig, M.Sc.
Phone +49 531 2155 644
Dr. Andreas Pflug
Phone +49 531 2155 629
0.0005 Pa 0.02 Pa 0.5 Pa
S E R V I C E S A N D C O M P E T E N C I E S
75
movement of all gas particles, their sorting into ‘cells’, and the
static treatment of particle collision within the same cell take
place one after the other in short time cycles. In this way the
Boltzmann transport equation is effectively solved by statistical
methods.
The geometry of a coating chamber is represented in the form
of meshed wall panels. In a movement step collisions between
particles and walls are considered, the particles can be
reflected or enter into chemical reactions with the material of
the wall. With the DSMC method no 3D meshing of the total
volume is thus required, only the walls need to be available in
a 2D-meshed form. This considerably simplifies in particular
the description of the thin heating wires, whose diameter is
less than 1 mm. Otherwise, a 3D meshing of a volume of the
order of magnitude of 1 m3 while still taking into account
details in the submillimeter range would be almost impossible.
Example: Silicon deposition on a steel substrate
Silicon deposition by HWCVD is simulated in the example of
the in-line HWCVD unit at the Fraunhofer IST (see Figure 1).
Modeling the HWCVD process
Unlike other low-pressure coating processes there is no plasma
discharge in the HWCVD process but instead current-heated
tungsten wires are used to initiate the precursor decompo-
sition reactions required for the coating. In order to deposit
silicon on the substrate which is to be treated, silane (SiH4), for
example, is let into the reactor and at temperatures of about
2000 °C decomposed at the wires into silicon and hydrogen.
Modeling these processes calls for mapping of the gas flow
and particle yield at the wires and walls. In the case of silicon
layers with SiH4 and NH3 as process gases, deposition typically
takes place in the pressure range of 1 to 10 Pa. The modeling
processes which are based on continuum flow dynamics
are inaccurate at such low pressures. For this reason the
particle-based Direct Simulation Monte Carlo (DSMC) method
is used at the Fraunhofer IST to describe the HWCVD process.
The Direct Simulation Monte Carlo method (DSMC)
In the DSMC simulation method individual representative
gas molecules in the form of particles are considered. The
1 2
Hot-wire chemical vapor deposit ion (HWCVD) is a promis ing a l ternat ive to plasma-based deposit ion pro-
cesses for creat ing high-qual i ty and defect-free coat ings on large surfaces. At the Fraunhofer IST, th is
method is used in part icular for the product ion of diamond- and s i l icon-based layers. With a s imulat ion
model the f i lm thickness distr ibut ion and gas y ie ld can be predicted in good agreement with exper iment
and thus HWCVD processes can be opt imized with respect to layer thickness homogeneity and gas
ut i l izat ion.
SIMULATION OF AN HWCVD PROCESS FOR SILICON DEPOSITION
76
3
1 In-line HWCVD facility
at the Fraunhofer IST for de-
positing coatings containing
silicon.
2 Model of an HWCVD
chamber showing the Si-gas
concentration (0 - 3.5%) in
cross section.
3 Comparison of a photo-
graph and a simulation of a
coated metal plate showing
the layer thickness profile
and the resulting reflection
color.
A coating chamber in this system consists of a gas distributor,
a wire array between the gas distributor and the substrate,
and the steel substrate itself, measuring 800 x665 mm2. The
flow of SiH4 used in the experiments is 90 sccm or 150 sccm
while the process pressure is set at 1 or 2 Pa. In the model the
wire temperature is 2100 °C – at this temperature there is a
full decomposition of the silane. Despite the greatly simplified
reaction model, there is good agreement between experiment
and simulation (see Figure 3 and the graph below). Further
details can be found in [Pflug2015].
Further reading
[Pflug2015] A. Pflug et al.: Modeling of gas flow and deposi-
tion profile in HWCVD processes, Thin Solid Films 595 (2015)
266-271.
Process parameters, simulated gas utilization and
deposition rate compared with the experiment.
Dep
ositi
on r
ate
in c
ente
r [n
m/s
]
1.0
1.5
2.0
5.5Experiment
% Gas utilization
DSMC simulation
92%
84%
p=1 Pa
86%
76%
p=2 Pa
90 100 110 120 130 140 150
SiH4 flow [sccm]CONTACTDr. Andreas Pflug
Phone +49 531 2155 629
S E R V I C E S A N D C O M P E T E N C I E S
77
a considerable part of the film-forming material is present
as ions, allowing coatings to be produced with improved
properties in comparison to conventional coating methods.
Examples include:
� Higher coating density
� Higher coating hardness
� Coatings with growth in a preferred direction/orientation
� Optical coatings with a higher refractive index
� Generally coatings with a greater stability with respect to aging and conditioning
Stable sensor coatings for pressure measurement
Studies of classic nickel-chromium alloys as used for pressure
sensors in automotive applications have shown that under
suitable process conditions changes in sensor properties under
(pre-) ageing can be reduced or prevented. The deposited
HIPIMS coatings were observed to have retained almost the
same strain sensitivity (gauge factor) even after heat treat-
ment, depending on the alloy composition and the degree
of ionization. In contrast, the gauge factor of conventionally
deposited layers changes significantly during annealing.
Application-oriented industrial development
For more than ten years the Fraunhofer IST has been involved
in developing HIPIMS technology for industrial use. As one
result a global network headed by the IST was established – a
COST action with partners all over the world. Over the years
the annual international HIPIMS conference has become the
main event for exchange of latest advancements in research
and development, both from industry and academia.
The focus of the Fraunhofer IST’s research is on applica-
tion-oriented development of equipment, components,
and processes. The Institute has a comprehensive range of
industrial HIPIMS generators, a variety of methods for plasma
diagnostics, and effective feedback systems for reactive
processes, as well as various industrial size development
and production facilities through which customer-specific
questions can be managed. The IST therefore works closely
with various companies in the fields of coating components,
generators, process diagnostics, plant construction, and
coating development.
The following examples from research provide a first overview
of industrial applications of HIPIMS technology. With HIPIMS
1 2
Since the seminal paper of V. Kouznetsov et a l . in 1999, highly ionized magnetron sputter ing processes
– such as HIP IMS (high power impulse magnetron sputter ing) or HPPMS (high power pulsed magnetron
sputter ing) – have been a subject of sc ient if ic study and in recent years paved their way into industr ia l
product ion. The Fraunhofer IST is one of the world’s leading inst i tut ions in the industr ia l or iented
development of HIP IMS processes.
INDUSTRIALIZATION OF HIGHLY IONIZED PROCESSES
3
78
4
1 Thin-film strain gauges
on a bearing ring.
2-3 Improvement of alu-
minum adhesion to PMMA
by optimization of an HIPIMS
process.
4 ITO layer on curved glass
after a heat treatment and
bending process at 650 °C.
Firmly bonded plastic metallization
Plasma technology is used in various applications for the
metallization of plastics. Here, for example, metallized EMC
shields are used. Achieving a satisfactory bonding of the
coating calls in some cases for a chromium mordant as well as
the use of primers and possibly also bonding agent layers. Very
high costs arise from the different processes required under
both atmospheric and vacuum conditions. HIPIMS enables
a firmly bonded metallization without additional processes,
either as a starting layer for further strengthening or as a thin
functional film.
Hard coatings
Various hard coatings are already available today as HIPIMS
coatings. The major advantages of HIPIMS technology are
that, for example, hard CrN coatings with hardnesses of
3000 HV can be produced without additional heating of the
installation to 250 – 300 °C and without a bias voltage. Due to
the efficient use of the reactive gas, with nitrides for example,
the same or even higher deposition rates can be achieved with
HIPIMS while retaining or even improving coating properties.
Transparent conductive coatings
In the field of transparent conductive coatings it was shown
that harder ITO coatings with greater long-term stability can
be produced by HIPIMS which are suitable, among other
things, for use as passive ice-free glazing in automotive appli-
cations. In addition, reactive HIPIMS ITO coatings potentially
allow the creation of high-conductivity coatings, even without
additional substrate heating, for example, in temperature-sen-
sitive processes.
CONTACTDr. Ralf Bandorf
Phone +49 531 2155-602
S E R V I C E S A N D C O M P E T E N C I E S
79
In 2015 the Fraunhofer IST once again appeared on various platforms. An overview of
the most important events and activities of 2015 follws:
� Trade fairs, exhibitions, conferences
� Events, colloquia, workshops
NAMES, DATES, EVENTS 2015
becoming central interfaces in highly complex production
installations and environments. At the Hannover Messe the
Fraunhofer IST presented the results of current research and
development in this area. The Fraunhofer IST’s Application
Center for Plasma and Photonics was represented for the first
time at the joint Fraunhofer surface technology booth. Here
the scientists presented, among other things, an innovative
combined method of creating coatings with micro- and
nano-particles. With the so-called cold-plasma spraying
process, three-dimensional objects made of temperature-
sensitive materials such as plastic, thin glass, foil and paper
can be coated rapidly and with structurization.
SVC TechCon 2015
Santa Clara, CA, USA, April 25 – 30, 2015. As part of this
year’s conference of the Society of Vacuum Coaters (SVC) the
Fraunhofer IST presented the very latest results of research in
the field of sensorized and optical functional coatings. The
focus was on the different applications of HIPIMS technology
(high power impulse magnetron sputtering), and on anti-
reflective layers on three-dimensional substrates. In addition,
the Fraunhofer IST participated in the program with numerous
presentations and tutorials.
LIGNA 2015
Hannover, May 11 – 15, 2015. Sharing a joint booth with the
Fraunhofer Institute for Wood Research, Wilhelm Klauditz
Institute WKI at LIGNA, the Fraunhofer IST’s Application
Center for Plasma and Photonics presented the latest research
results and activities in the field of the surface modification of
wood and wooden surfaces by means of plasma technology.
TRADE FAIRS, EXHIBITIONS, CONFERENCESSPIE Photonics West
San Francisco, CA, USA, February 7 – 12, 2015. In 2015 the
Fraunhofer IST and DTF Technology GmbH participated jointly
at the SPIE Photonics West event in San Francisco. Here the
scientists presented, among other things, the innovative
sputtering platform EOSS® with which up to ten optical filters
can be created simultaneously with the highest precision and
uniformity. Various filters produced by the new sputtering
system were exhibited as well.
W3+ FAIR
Wetzlar, March 25 – 26, 2015. Laser and plasma – by combin-
ing these technologies for surface optimization and treatment
it is possible to process a large number of materials very
accurately and homogeneously over relatively large areas with
high productivity and at lower cost. With this combination
of the two technologies even optical components can be
microstructured precisely and efficiently. In keeping with the
motto “New applications of non-thermal atmospheric pressure
plasmas in optics manufacturing” the Fraunhofer IST’s
Application Center for Plasma and Photonics presented at the
W3+ FAIR a number of examples of specific applications of
laser-plasma hybrid technology – a focus of research – as well as
a plasma source.
Hannover Messe 2015
Hannover, April 13 – 17, 2015. The production of machinery,
equipment or components is increasingly influenced by criteria
such as efficiency, safety, flexibility and resource conservation.
Thin functionalized or sensorized coatings could provide
further impulse in this area. High-tech surfaces are increasingly
1 2
82
6th International Conference on High Power Impulse
Magnetron Sputtering (HIPIMS)
Braunschweig, June 10 – 11, 2015. Plasma surface technology
creates outstanding products in almost all areas of daily life
and industry. An important role is also played by high power
impulse magnetron sputtering (HIPIMS for short), an inno-
vative technique in plasma surface technology, in the devel-
opment of which the Fraunhofer IST is significantly involved.
Each year the Fraunhofer IST organizes the international
conference on high power impulse magnetron sputtering
together with the Sheffield Hallam University and the INPLAS
e. V. competence network. The conference is held alternately
at two different locations. This year, scientists and represen-
tatives from industry from more than 25 countries met in
Braunschweig. The very latest results from the field of HIPIMS
technology were presented in numerous lectures.
LASER World of Photonics 2015
Munich, June 22 – 25, 2015. Tiny microstructures barely
visible to the naked eye play an ever greater role in our
everyday lives. Especially in the futuristic field of photonics,
micro- structured components made of glass are of enormous
importance. However, the laser processing of glass compo-
nents is very energy intensive and time consuming. At LASER
World of Photonics 2015, the Fraunhofer IST’s Application
Center for Plasma and Photonics presented a plasma source
for the laser-plasma hybrid process, as it is called. This new
kind of process combines two technologies – laser technology
and the atmospheric pressure plasma process – and makes
more efficient, higher-quality and even more cost-effective
production and processing activities possible.
3
1-2 Prof. Dr. Reimund
Neugebauer, President of
the Fraunhofer-Gesellschaft,
views various Fraunhofer IST
exhibits at the 2015
Hannover Messe.
3 Attendees at the HIPIMS
conference in front of Con-
ference Center (Stadthalle) in
Braunschweig.
N A M E S , D A T E S , E V E N T S 2 0 1 5
83
TRADE FAIRS, EXHIBITIONS, CONFERENCES
1 2
IdeenExpo 2015
Hannover, July 4 – 7, 2015. How can lightning be “tamed” and
how do you set about it? How does a laser work, and what
kind of things can you do with it? At this year’s IdeenExpo
the Fraunhofer IST’s Application Center for Plasma and
Photonics answered these and a lot more other questions
about plasma, lasers and so on. At the booth, held jointly with
HAWK, the University of Applied Sciences and Arts, all visitors
were cordially invited to immerse themselves in the world of
physical plasmas. After a quiz on the topic of “Engraving with
laser technology” they were also able to have small items
individually engraved.
IAA International Motor Show 2015
Frankfurt am Main, September 15 – 19, 2015. During the
various manufacturing processes in automobile production,
ranging from the plastic injection molding of various interior
parts to forming processes for body parts, the parts being
processed are sometimes exposed to high temperatures and
subjected to enormous forces. In sheet-metal forming, for
example, this can lead to cracking and creasing, and thus to
parts being rejected. Sensor systems are being developed at
the Fraunhofer IST which can measure forces and tempera-
tures even during the manufacturing processes itself and thus
prevent such defects. This forms an important component in
achieving dependable, resource-efficient, and low-cost pro-
duction. On a joint Fraunhofer booth at the IAA in Frankfurt,
the Fraunhofer IST, as a member of the autoMOBILproduktion
Fraunhofer Alliance, presented these multi-sensor coating
systems.
Biotechnica 2015
Hannover, October 6 – 8, 2015. At the joint Fraunhofer
booth, the Fraunhofer IST and the Application Center for
Plasma and Photonics presented the latest findings from
research in the field of the life sciences. In this field very
high demands are often made of the most varied surfaces.
Examples include sterility, tailored surface properties such
as hydrophobia and hydrophilia, or the presence of reactive
groups for subsequent coupling reactions. For a number of
years now, atmospheric-pressure plasma processes have been
very successfully developed at the Fraunhofer IST by which
even complex, three-dimensional products can be provided
with the desired functions in an environment-friendly way,
inexpensively and in a matter of seconds. At Biotechnica 2015
the scientists presented among other things a plasma-treated
cell culture bag, fluidic separators, and a door handle with an
anti-microbial coating.
Technik zum Anfassen 2015
Witzenhausen, October 11, 2015. The Fraunhofer IST’s
Application Center for Plasma and Photonics took part in the
career-starters’ fair “Technik zum Anfassen” in Witzenhausen
with a presentation on the topic “Medical applications of cold
plasma” given by Prof. Wolfgang Viöl, vice president of HAWK
and head of the application center. The aim of the fair was
to demonstrate scientific phenomena to children and young
people in an interesting and entertaining way.
International Astronautical Congress IAC 2015
Jerusalem, Israel, October 12 – 16, 2015. On a joint booth
shared with the Space Fraunhofer Alliance at the 66th Interna-
tional Astronautical Congress in Jerusalem, the Fraunhofer IST
presented the latest results and activities in the aerospace
84
3
1 At IdeenExpo the
principle of the LED watch
is explained to Stephan
Weil, Minister President of
Lower Saxony, and Prof. Dr.
Christiane Dienel, President
of HAWK.
2 The Fraunhofer IST
presents sensorized washers
at IAA 2015.
3 The Atmospheric
Pressure Processes depart-
ment’s exhibit at MEDICA
2015: a plastic bag coated in-
ternally by a plasma process.
field. Among the exhibits were electrolytically metallized
antennas made of carbon fiber reinforced plastic which
can be used even in the extreme temperature fluctuations
encountered in space.
MEDICA 2015
Düsseldorf, November 16 – 19, 2015. On a joint Fraunhofer
booth, the Fraunhofer IST was represented at MEDICA, the
world’s largest and leading international medical trade fair, for
the first time. The scientists presented their latest results and
developments in the field of plasma medicine. Also for the
first time, the Fraunhofer IST’s Application Center for Plasma
and Photonics, located in Göttingen, exhibited a functional
sample of a plasma comb with which head lice can be killed
efficiently without using chemicals. Another presentation was
the innovative PlasmaDerm®, a handheld device for treating
wounds and skin diseases. The Atmospheric Pressure Processes
department of the Fraunhofer IST in Braunschweig showcased
current developments in the field of cell culture technology.
WaferBond 2015
Braunschweig, December 8 – 9, 2015. In collaboration with the
INPLAS e. V. competence network and the Institute of Surface
Engineering of the Technical University of Braunschweig, the
Fraunhofer IST organized WaferBond 2015 in Braunschweig.
As part of the conference, the very latest findings from the
broad field of wafer-bonding technology were presented,
ranging from direct bonding, to glass frit bonding, and weld
bonding.
N A M E S , D A T E S , E V E N T S 2 0 1 5
85
campus, where the Fraunhofer WKI is also located, lay in
darkness – symbolizing resource conservation and environmental
protection. Not only public bodies, institutions and companies,
but also private persons were invited to participate in the
“Lights-off” event.
Cells meets Surface 3
Braunschweig, May, 6 –7, 2015. For a long time no attention
was paid to the interactions between cells and surfaces.
However, it is precisely by these interactions that cells or cell
cultivation can be positively or negatively influenced – depend-
ing on the physical or chemical modification of the surface.
For this reason the Fraunhofer IST, together with the INPLAS
e. V. network, Braunschweig City Hospital, the Professional
Association of German Transfusion Doctors, the Helmholtz
Center for Infection Research HZI and others, organized a
workshop on the subject “Cells Meet Surface 3.” The latest
research findings and developments in this field were present-
ed in several papers.
Workshop: “Micro-production of material hybrids - from
manufacturing to application”
Clausthal-Zellerfeld, June 17 – 18, 2015. The Zentrum für
Mikroproduktion e. V., of which the Fraunhofer IST was one of
the founders, celebrated its tenth birthday this year. To mark
the occasion the association hosted a workshop on the topic
“Micro-production of material hybrids – from manufacturing
to application.” In his keynote address, Prof. Dr. Stephanus
Büttgenbach, long-standing spokesman of the board, looked
back on the past ten years. In addition, speakers from industry
presented the current results of research and development.
EVENTS, COLLOQUIA, WORKSHOPS2nd Science Night in Göttingen
Göttingen, January 17, 2015. As part of the second Göttingen
Science Night the Fraunhofer IST’s Application Center for
Plasma and Photonics, together with the Faculty of Sciences of
HAWK University, invited young and old to the Von-Ossietzky-
Straße between 5.00 pm and midnight. Visitors were shown
the latest findings from research and applications in the field
of laser and plasma technology – from the lice comb to the
plasma vacuum cleaner. Insights into and outlooks in among
other things the fields of plasma medicine, wood materials,
plasma technology in construction or laser material processing
were supplemented by a series of interesting lectures.
OTTI seminar “Sputtering – the key to innovative thin-
film products”
Braunschweig, January 25 – 26, 2015. Under the technical
direction of institute director Prof. Dr. Günter Bräuer a seminar
entitled »Sputtering – the key to innovative thin-film products«
was held at the Fraunhofer IST in collaboration with OTTI. The
seminar focused among other things on areas of industrial
application for creating coatings by sputtering, milestones
in 40 years of magnetron sputtering, simulation of plasma
processes, deposition of coatings with highly ionized plasmas,
new trends in the further development of sputtering processes
and technology, and examples of modern coating installations
in industry..
»Lights-Off« at the Fraunhofer IST
Braunschweig, March 28, 2015. This year the Fraunhofer IST
collaborated in Earth Hour 2015 with other Fraunhofer institutes
and on Saturday, March 28, switched off the building lights for
an hour. From 8.30 to 9.30 pm the Fraunhofer Braunschweig
1 2
86
3
1-2 The Fraunhofer IST
before and during Earth
Hour 2015 – for one hour the
word was “lights-off”.
3 Prof. Yang, Vice-Presi-
dent of Feng Chia University
(FCU) in Taiwan presents
Prof. Wolfgang Diehl his
document of appointment as
Distinguished Professor.
Open House at the Fraunhofer IST
How do researchers create lightning in the laboratory and
what do they do with plasma? And how can thin films help
to save energy? The Fraunhofer IST and the Fraunhofer WKI
invited all interested individuals from Braunschweig and the
surrounding area to come by on July 18 to find the answers
to these, and other, fascinating questions in the fields of thin
film and surface technology and wood research. Around 700
visitors from Braunschweig and region took the opportunity
to take a look behind the scenes of Europe’s biggest research
society.
The aspects shown by the Fraunhofer IST, which also
celebrated its 25th birthday on this open day, ranged from the
gilding of one-cent coins, colorful wear-resistant coatings on
bottle-openers, plastic cars which drive by means of plasma, to
the demonstration of the new handheld PlasmaDerm® device
for treating skin diseases. Guests could also watch how water
can be cleaned with diamond.
Professorship in Taiwan
The Feng Chia University (FCU) in Taiwan has appointed Prof.
Wolfgang Diehl, Deputy Director of the Fraunhofer Institute
for Surface Engineering and Thin Films IST, as Distinguished
Professor in the Department of Science of the Faculty of
Material Sciences and Engineering. In a ceremony held on
September 18, 2015, Prof. Yang, Vice-President of the FCU,
presented Prof. Diehl with his document of appointment. The
university thereby paid tribute to years of successful scientific
collaboration. Following his appointments at the Tshwane
University of Technology (TUT) in Pretoria, South Africa, and
Sheffield Hallam University, United Kingdom, this is now the
third professorship for Prof. Diehl.
N A M E S , D A T E S , E V E N T S 2 0 1 5
87
With its research and development activities the Fraunhofer Institute for Surface
Engineering and Thin Films IST forms a part of various internal and external networks
which function with different points of emphasis in the field where business, science
and politics interact and even clash. Within the Fraunhofer Society the institute pools
its competences with those of other Fraunhofer institutes in, amongst other things, the
Fraunhofer Group for Light & Surfaces and in various Fraunhofer alliances in order to
be able to offer customers and partners optimal - and even cross-technology – solutions
for their specific tasks.
In addition the Fraunhofer IST also keeps an eye open for future scientists and
researchers. For this reason the institute networks intensively with educators, students
and schoolchildren in order to arouse an enthusiasm for the natural sciences and
engineering at an early age and to encourage the upcoming generation of scientist.
THE FRAUNHOFER IST IN NETWORKS
With its clearly defined mission of application-oriented
research and its focus on key technologies of relevance to the
future, the Fraunhofer-Gesellschaft plays a prominent role
in the German and European innovation process. Applied
research has a knock-on effect that extends beyond the direct
benefits perceived by the customer: Through their research
and development work, the Fraunhofer Institutes help to re-
inforce the competitive strength of the economy in their local
region, and throughout Germany and Europe. They do so by
promoting innovation, strengthening the technological base,
improving the acceptance of new technologies, and helping to
train the urgently needed future generation of scientists and
engineers.
As an employer, the Fraunhofer-Gesellschaft offers its staff
the opportunity to develop the professional and personal
skills that will allow them to take up positions of responsibility
within their institute, at universities, in industry and in society.
Students who choose to work on projects at the Fraunhofer
Institutes have excellent prospects of starting and developing
a career in industry by virtue of the practical training and
experience they have acquired.
The Fraunhofer-Gesellschaft is a recognized non-profit
organization that takes its name from Joseph von Fraunhofer
(1787–1826), the illustrious Munich researcher, inventor and
entrepreneur.
Research of practical utility lies at the heart of all activities
pursued by the Fraunhofer-Gesellschaft. Founded in 1949,
the research organization undertakes applied research
that drives economic development and serves the wider
benefit of society. Its services are solicited by customers and
contractual partners in industry, the service sector and public
administration.
At present, the Fraunhofer-Gesellschaft maintains 67
institutes and research units. The majority of the nearly
24,000 staff are qualified scientists and engineers, who work
with an annual research budget of more than 2.1 billion
euros. Of this sum, more than 1.8 billion euros is generated
through contract research. More than 70 percent of the
Fraunhofer-Gesellschaft’s contract research revenue is derived
from contracts with industry and from publicly financed
research projects. Almost 30 percent is contributed by the
German federal and Länder governments in the form of base
funding, enabling the institutes to work ahead on solutions to
problems that will not become acutely relevant to industry and
society until five or ten years from now.
International collaborations with excellent research partners
and innovative companies around the world ensure direct
access to regions of the greatest importance to present and
future scientific progress and economic development.
THE FRAUNHOFER-GESELLSCHAFT AT A GLANCE
T H E F R A U N H O F E R I S T I N N E T W O R K S
91
Competence by Networking
Six Fraunhofer institutes cooperate in the Fraunhofer Group
Light & Surfaces. Co-ordinated competences allow quick and
flexible alignment of research work on the requirements of
different fields of application to answer actual and future
challenges, especially in the fields of energy, environment,
production, information and security. This market-oriented
approach ensures an even wider range of services and creates
synergetic effects for the benefit of our customers.
Core Competences of the Group
� Surface and coating functionalization
� Laser-based manufacturing processes
� Laser development and nonlinear optics
� Materials in optics and photonics
� Microassembly and system integration
� Micro and nano technology
� Carbon technology
� Measurement methods and characterization
� Ultra precision engineering
� Material technology
� Plasma and electron beam sources
Business Areas
� Ablation and cutting
� Imaging and illumination
� Additive manufacturing
� Light sources and laser systems
� Lithography
� Material testing and analytics
� Medical engineering and biophotonics
� Micro systems and sensors
� Opticals systems and instrumentation
� Tooling and mold making
Fraunhofer Institute for Applied Optics
and Precision Engineering IOF2
The Fraunhofer IOF develops innovative optical systems to
control light from the generation to the application. The
service range covers the entire photonic process chain from
optomechanical and opto-electrical system design to the
manufacturing of customized solutions and prototypes. The
institute works in the five business fields of Optical Compo-
nents and Systems, Precision Engineering Components and
Systems, Functional Surfaces and Layers, Photonic Sensors and
Measuring Systems and Laser Technology.
www.iof.fraunhofer.de
Fraunhofer Institute for Organic Electronics,
Electron Beam and Plasma Technology FEP3
Fraunhofer Technology FEP works on innovative solutions in
the fields of vacuum coating, surface treatment as well as
organic semiconductors. The core competences electron beam
technology, sputtering, plasma-activated deposition and high-
rate PECVD as well as technologies for organic electronics
and IC / system design provide a basis for these activities.
Fraunhofer FEP continuously enhances them and makes
them available to a wide range of industries: mechanical
engineering, transport, biomedical engineering, architecture
and preservation, packaging, environment and energy, optics,
sensor technology and electronics as well as agriculture.
www.fep.fraunhofer.de
FRAUNHOFER GROUP LIGHT & SURFACES
1 2 3
92
Fraunhofer Institute for Laser Technology ILT4
With more than 400 patents since 1985 the Fraunhofer Insti-
tute for Laser Technology ILT develops innovative laser beam
sources, laser technologies, and laser systems for its partners
from the industry. The technology areas cover the following
topics: laser and optics, medical technology and biophotonics,
laser measurement technology and laser material processing.
This includes laser cutting, caving, drilling, welding and solder-
ing as well as surface treatment, micro processing and rapid
manufacturing. Furthermore, the Fraunhofer ILT is engaged in
laser plant technology, process control, modeling as well as in
the entire system technology. www.ilt.fraunhofer.de
Fraunhofer Institute for Surface Engineering
and Thin Films IST5
As an innovative R&D partner the Fraunhofer IST offers com-
plete solutions in surface engineering which are developed in
cooperation with customers from industry and research. The
IST’s “product” is the surface, optimized by modification, pat-
terning, and/or coating for applications in the business units
mechanical engineering, tools and automotive technology,
aerospace, energy and electronics, optics, and also life science
and ecology. The extensive experience of the Fraunhofer IST
with thin film deposition and film applications is complement-
ed by excellent capabilities in surface analysis and in simulating
vacuum-based processes. www.ist.fraunhofer.de
Fraunhofer Institute for Physical
Measurement Techniques IPM6
The Fraunhofer IPM develops tailor-made measuring
techniques, systems and materials for industry. In this way
the institute enables their customers to minimize the use of
energy and resources while at the same time maximizing
quality and reliability. Fraunhofer IPM makes processes more
ecological and at the same time more economical. Many
years of experience with optical technologies and functional
materials form the basis for high-tech solutions in the fields
of production control, materials characterization and testing,
object and shape detection, gas and process technology as
well as functional materials and systems.
www.ipm.fraunhofer.de
Fraunhofer Institute for Material and Beam Technology IWS1
The Fraunhofer Institute for Material and Beam Technology is
known for its innovations in the business units joining and cut-
ting as well as in the surface and coating technology. Across
all business units our interdisciplinary topics include energy
storage systems, energy efficiency, additive manufacturing,
lightweight construction and big data. Our special feature
is the expertise of our scientists in combining the profound
know-how in materials engineering with the extensive experi-
ence in developing system technologies. Every year, numerous
solutions with regard to laser material processing and coating
technology have been developed and have found their way
into industrial applications. www.iws.fraunhofer.de
CONTACTGROUP CHAIRMAN
Prof. Dr. Reinhard Poprawe
Phone +49 241 8906-110
GROUP ASSISTANT
Gabriela Swoboda
Phone +49 241 8906-8347
www.light-and-surfaces.fraunhofer.de
4 5 6
93
Support ing young sc ient ists : for the Fraunhofer Inst i tute for Surface Engineer ing and Thin F i lms IST this
means not only being act ive as superv isors and in a univers i ty context, i t means introducing young people
to sc ient if ic topics, removing their in i t ia l reservat ions, and giv ing them the chance to become interested
in industr ia l research. The support and superv is ion of school chi ldren and students who are interested in
the research areas covered by the Fraunhofer IST was as important in 2015 as ever, and an indispensable
part of work at the inst i tute.
Future day for boys and girls at the Fraunhofer IST
This year, the Fraunhofer IST and WKI once again opened their
doors for the “Future Day for Boys and Girls.” The “Future
Day” introduces school children to the world of science. A
total of 21 young scientists – 13 girls and 8 boys – immersed
themselves in the fascinating world of research at the two
Fraunhofer institutes. Armed with white coats and protective
goggles, they passed the large coating plants and the yellow
rooms to the two institutes’ laboratories. Various experiments
and hands-on activities at the Fraunhofer IST enabled the
children to pretreat plastic cars with the atmospheric pressure
plasma process and subsequently copper metallize them
without using electricity. They were also given the chance to
selectively functionalize plastic film. The boy and girls were
given the plastic cars to take home at the end of the day and
maybe this has kindled a scientific spark in one of our visitors.
Children’s day of light
Light – what is it actually? Why is this sweater green? Or that
t-shirt pink? Why do butterflies’ wings shine so blue – without
any kind of dye? What lights up sheet lighting? And what
does this have to do with lighting, fluorescent tubes, and the
work at the Fraunhofer Institute for Surface Engineering and
Thin Films IST? Professor Günter Bräuer answered these and
lots of other questions during a children’s lecture on July 3,
2015. The lecture took place within the framework of the
“International Year of Light 2015.” The 40 young participants
were shown pictures and examples and took part in lots of
exiting experiments and presentations that should not be tried
at home. So, for instance, various gasses were made to light
up in a microwave.
SUPPORTING AND TRAINING YOUNG SCIENTISTS AT THE FRAUNHOFER IST
1 2
94
A visit from the TU Braunschweig’s Career Service
In 2015, as in the previous year, the Fraunhofer IST received
a visit from about 10 scientifically interested students and
graduates from the Technical University of Braunschweig. The
event organized by the TU Braunschweig’s Career Service aims
to give the students and graduates the chance to experience
and gain the world of work. At the Fraunhofer IST, TU
graduate Eike Meyer-Kornblum talked about his work at the
institute and his duties within the work group “Micro- and
sensor technology.” Afterwards of the graduates and students
were given an impression of the work of some the researchers
and of the various laboratories at the Fraunhofer IST.
1 Prof. Dr. Bräuer at the
children’s’ lecture.
2 An exhibit shown during
the children’s lecture: illumi-
nated plasma in a glass mug.
3 Eike Meyer-Kornblum
gives a short introduction
into his area of work at the
Fraunhofer IST.
3
T H E F R A U N H O F E R I S T I N N E T W O R K S
95
The network of competence INPLAS e. V. is accredited as a network in the program “go-cluster” by the Federal
Ministry of Economics (BMWi) in Germany. The administrative offices of INPLAS are situated at the
Fraunhofer IST. The network comprises 50 members from the areas of industry and science. There are also
200 people, 74% of whom work in industry, who participate in various activities affi l iated with the network.
In 2015 INPLAS looked back at ten years of successful
networking. This anniversary was celebrated in June. A few of
the highlights of the many activities, projects and events which
have always been aimed at making plasma technology more
widely known and to promote its industrial application will be
introduced in the following paragraphs::
10 Years of INPLAS
More than 50 members, experts and partners came together
to celebrate INPLAS’s tenth anniversary in Braunschweig from
June 11 to 12, 2015. The guests had been introduced to
Braunschweig on the occasion of a river boat tour, subsequently
they attended lectures on the successes of plasma technology
in various areas of application. The guests discussed current and
planned research projects with MinR Dr Frank Schlie-Roosen
from the Federal Ministry of Education and Research.
6th International Conference on Fundamentals and
Applications of HIPIMS in Braunschweig
In 2015, the 6th international conference on High Power
Impulse Magnetron Sputtering (HIPIMS) took place in Braun-
schweig again. The organizers welcome 130 participants and
19 exhibitors from 26 countries worldwide at the Stadthalle
in Braunschweig. INPLAS would once again like to take this
opportunity to thank all of the sponsors, lecturers, exhibitors
and guests, as well as the conference committee, for their
involvement and participation.
»Cells Meet Surface 3« in Braunschweig
The symposium “Cells Meet Surface“ took place at the
Fraunhofer IST for the first time. “Cells Meet Surface” is
a successful event in Braunschweig which is organized by
the Helmholtz Centre for Infection Research, the Klinikum
Braunschweig and the Berufsverband Deutscher Transfusion-
smediziner (the Professional Association of German Transfusi-
ologists). Around 50 participants from all over Europe met to
discuss the topics “Surface Modification”, “Cells on Surface”
and “Medicine” and to work on the further development of
research papers.
“WaferBond” 2015 in Braunschweig
INPLAS, the Fraunhofer IST and the Institute for Surface
Technology of the Technical University Braunschweig are the
joint organizers of the international conference WaferBond.
The conference took place from December 7 to 9, 2015 in
the Haus der Wissenschaft (the House of Science) in Braun-
schweig. Waferbonding is a process step in semiconductor and
microsystem manufacture and is used mainly in microsystem
technology to create the requisite cavities for sensors.
Active work of the work groups
The INPLAS work groups allow members, especially partners
from industry, to come together to discuss and promote
joint topics. The work group “Innovative Plasma Sources and
Processes” met in spring at the Bühler Alzenau GmbH under
THE NETWORK OF COMPETENCE INDUSTRIAL PLASMA SURFACE TECHNOLOGY E. V. – INPLAS
1
96
the direction of Dr. Cord, Singulus Technologies AG, and in
autumn at the Fraunhofer IST in Braunschweig. The topics of
the year were microwave plasma processes and connections
between layer properties and sputter pulse techniques.
The work group “Tool Coatings” met in Dortmund at the
DortmunderOberflächenCentrum DOC (Dortmund Surface
Technology Center) and at the INP in Greifswald under the di-
rection of Hanno Paschke from the DOC, Fraunhofer IST. Here,
the work group developed a project proposal on the subject of
pretreatment processes for intricately formed cutting tools.
The work group “Combined Surface Technologies” discussed
the subjects structuring and functionalization of light alloy
surfaces and corrosion protection at the Axalta Coating
Systems Germany GmbH in Wuppertal, as well as dispersion
coating with sub-micrometers and nanoparticles, intrinsic
self-healing and hybrid joining processes, and magnesium
surface treatment at Dörken MKS Systems GmbH & Co. KG in
Herdecke.
Further press and publicity activities / service projects:
� The project “Cross Clustering” with the cluster special machines and plant engineering Saxony-Anhalt (SMAB) in Magdeburg
� IP4Plasma, EU project, involvement in the work package “Dissemination”
� 33rd meeting of Industrie-Arbeitskreis Werkzeugbeschich-tungen und Schneidstoffe (IAK, the Industrial Work Group for Tool Coatings and Cutting tools) with the partners including the Institute for Machine Tools and Factory Management (IWF) of the Technical University of Berlin, the Fraunhofer Institute for Production Systems and Design Technology IPK and the Fraunhofer Institute for Surface Engineering and Thin Films IST
� PlasmaGermany meetings and work shops
1 10 years of INPLAS e. V.
CONTACTDipl.-Ing. Carola Brand
Managing director
Phone +49 531 2155-574
Dr. Jochen Borris
M. A. Sabrina Kühne
www.inplas.de
97
PUBLICATIONSMEMBERSHIPSArbeitsgemeinschaft Wärmebehandlung und
Werkstofftechnik e. V.
www.awt-online.org
Deutsche Gesellschaft für Materialkunde e. V.
www.dgm.de
Deutsche Glastechnische Gesellschaft (DGG)
www.hvg-dgg.de
Deutsche Gesellschaft für Elektronenmikroskopie e. V.
www.dge-homepage.de
Deutsche Forschungsgesellschaft für
Oberflächenbehandlung e. V.
www.dfo-online.de
Deutsche Gesellschaft für Galvano- und
Oberflächentechnik e. V.
www.dgo-online.de
Europäische Forschungsgesellschaft
Dünne Schichten e. V. (EFDS)
www.efds.org
European Photocatalysis Federation EPF
www.photocatalysis-federation.eu
Fachverband Angewandte Photokatalyse
www.vdmi.de/deutsch/produkte/angewandte-photokatalyse.html
F.O.M Forschungsvereinigung Feinmechanik, Optik und
Medizintechnik e. V.
www.forschung-fom.de
ForschungRegion Braunschweig e. V.
www.forschungregion-braunschweig.de
Forschungsgemeinschaft Werkzeug und Werkstoffe e. V.
(FGW)
www.fgw.de
Forschungsvereinigung Räumliche Elektronische
Baugruppen 3-D MID e. V.
www.faps.uni-erlangen.de/mid
Fraunhofer-Allianz Adaptronik
www.adaptronik.fraunhofer.de
Fraunhofer-Allianz autoMOBILproduktion
www.automobil.fraunhofer.de
Fraunhofer-Allianz Numerische Simulation von Produkten,
Prozessen
www.nusim.fraunhofer.de
Fraunhofer-Allianz Photokatalyse
www.photokatalyse.fraunhofer.de
Fraunhofer-Allianz Proteinchips
www.proteinchips.fraunhofer.de
Fraunhofer-Allianz Reinigungstechnik
www.allianz-reinigungstechnik.de
Fraunhofer-Allianz Space
www.space.fraunhofer.de
Fraunhofer-Allianz SysWasser
www.syswasser.de
98
Fraunhofer-Netzwerk Elektrochemie
www.elektrochemie.fraunhofer.de
Fraunhofer-Netzwerk Nachhaltigkeit
www.fraunhofer.nachhaltigkeit.de
Fraunhofer-Verbund Light & Surfaces
www.light-and-surfaces.fraunhofer.de
German Flatpanel Display Forum DFF
www.displayforum.de
German Water Partnership
www.germanwaterpartnership.de
Göttinger Research Council
www.uni-goettingen.de
International Council for Coatings on Glass e. V.
www.iccg.eu
Kompetenznetz Industrielle Plasma-Oberflächentechnik e. V.
(INPLAS)
www.inplas.de
Materials Valley e. V.
www.materials-valley-rheinmain.de
Measurement Valley e. V.
www.measurement-valley.de
Nano- und Materialinnovation Niedersachsen e. V. (NMN)
www.nmn-ev.de
Nanotechnologie Kompetenzzentrum Ultrapräzise
Oberflächenbearbeitung CC UPOB e. V.
www.upob.de
NANOfutures European Technology Integration and Innovation
Platform (ETIP) in Nanotechnology
www.nanofutures2010.eu
PhotonicNet GmbH – Kompetenznetz Optische Technologien
www.photonicnet.de
Plasma Germany
www.plasmagermany.org
Spectaris – Verband der Hightech-Industrie
www.spectaris.de/
Wissens- und Innovations-Netzwerk Polymertechnik (WIP)
www.wip-kunststoffe.de/
Zentrum für Mikroproduktion e. V. (ZeMPro)
www.microcompany.de
BOARD MEMBERSHIPSBandorf, R.: COST Action MP1004, Management Committee
Delegate.
Bandorf, R.: Forschungsvereinigung Räumliche Elektronische
Baugruppen 3-D MID e. V., Mitglied.
Bandorf, R.: International Conference on HIPIMS, Conference
Chairman.
Bandorf, R.: OTTI-Fachforum Kathodenzerstäubung, Dozent.
Bandorf, R.: Society of Vacuum Coaters, Assistant Program
Chairman.
Bandorf, R.: Society of Vacuum Coaters, Volunteer Mentor.
P U B L I C A T I O N S
99
Bandorf, R.: Society of Vacuum Coaters, Dozent.
Bandorf, R.: Zentrum für Mikroproduktionstechnik e. V.,
Mitglied.
Bewilogua, K.: OTTI-Fachforum PVD- und CVD-Beschich-
tungsverfahren für tribologische Systeme, Fachliche Leitung.
Brand, C.: Europäische Forschungsgesellschaft Dünne Schicht-
en e. V. (EFDS), Mitglied.
Brand, C.: Kompetenznetz Industrielle Plasma-Oberflächen-
technik INPLAS e. V., Geschäftsführerin.
Brand, C.: Plasma Germany, Mitglied des Koordinierungs-
ausschusses.
Brand, J.: Gesellschaft für Tribologie (GfT), Mitglied.
Brand, J.: International Colloquium Tribology, Tribology and
Lubrication Engineering, Mitglied im Programme Planning
Committee.
Bräuer, G.: European Joint Committee on Plasma and Ion
Surface Engineering (EJC / PISE), Chairman.
Bräuer, G.: International Conference on Coatings on Glass and
Plastics (ICCG), Vorsitzender des Organisationskomitees.
Bräuer, G.: International Council for Coatings on Glass (ICCG)
e. V., Vorstandsvorsitzender.
Bräuer, G.: Institut für Solarenergieforschung, Mitglied des
Beirats.
Bräuer, G.: Kompetenznetz Industrielle Plasmaoberflächen-
technik (INPLAS), Vorstandsvorsitzender.
Bräuer, G.: Nano- und Materialinnovationen Niedersachsen
e. V. (NMN), Mitglied des Vorstands.
Bräuer, G.: Zeitschrift »Vakuum in Forschung und Praxis«,
Mitglied des Kuratoriums.
Bräuer, G.: Zentrum für Mikroproduktionstechnik e. V.,
Mitglied des Vorstands.
Diehl, W.: Deutsche Forschungsgesellschaft für Oberflächen-
behandlung DFO, stellvertretender Präsident.
Diehl, W.: Europäische Forschungsgesellschaft Dünne
Schichten e. V. (EFDS), Mitglied des Vorstands.
Diehl, W.: Plasma Germany, Mitglied des Koordinierungs-
ausschusses.
Diehl, W.: RETECZA NPO, Pretoria SA, Vorsitzender des Boards.
Diehl, W.: Society of Vacuum Coaters (SVC), USA, President.
Diehl, W.: Technologietransferkreis ForschungRegion Braun-
schweig, Mitglied.
Dietz, A.: Arbeitsgemeinschaft Elektrochemischer Forschung
(AGEF), Mitglied.
Dietz, A.: Deutsche Gesellschaft für Galvano- und Ober-
flächentechnik e. V. (DGO), Mitglied des Vorstands.
Dietz, A.: Deutsche Gesellschaft für Galvano- und Ober-
flächentechnik e. V. (DGO), stellvertretender Vorsitzender
Ortsgruppe Niedersachsen.
100
Dietz, A.: Fachausschuss »Forschung« der DGO, Mitglied.
Dietz, A.: Fachausschuss »Kombinationsschichten« der DGO,
Mitglied.
Eichler, M.: Conference on Wafer Bonding for Microsystems
3D- and Wafer Level Integration, Local Chairman.
Gäbler, J.: DIN Normenausschuss 062 Materialprüfung,
Arbeitsausschuss 01-72 »Chemische und elektrochemische
Überzüge«, Mitglied.
Gäbler, J.: DIN Normenausschuss NA 062 Materialprüfung,
Arbeitsausschuss NA 062-01-64 AA Arbeitsausschuss Kohlen-
stoffschichten, stellvertretender Obmann.
Gäbler, J.: European Technology Platform for Advanced
Materials and Technologies EuMaT, Mitglied.
Gäbler, J.: European Technology Platform NANOfutures,
Mitglied.
Gäbler, J.: ISO Technical Committee TC 107 »Metallic and
other inorganic coatings«, P-Member.
Gäbler, J.: VDI-Richtlinien-Fachausschuss »CVD-Diamant -
Werkzeuge«, Mitglied.
Keunecke, M.: SAE International, Mitglied.
Keunecke, M.: Society of Vacuum Coaters, Session Chairman.
Keunecke, M.: Society of Vacuum Coaters, Dozent.
Keunecke, M.: EFDS-Fachausschuss »Tribologische Schichten«,
Mitglied.
Klages, C.-P.: Nano- und Materialinnovationen Niedersachsen
e. V. (NMN), Fachbeirat Oberflächen.
Klages, C.-P.: Europäische Forschungsgesellschaft Dünne
Schichten e. V. (EFDS), Mitglied des wissenschaftlichen Beirats.
Lachmann, K.: COST Action MP1101 »Biomedical Applications
of Atmospheric Pressure Plasma Technology«, Management
Committee, Substitute.
Neumann, F.: Europäisches Komitee für Normung, CEN / TC
386 »Photocatalysis«, Mitglied.
Neumann, F.: Europäisches Komitee für Normung, CEN / TC
386 »Photocatalysis«, Delegierter des Technischen Komitees.
Neumann, F.: European Photocatalysis Federation EPF,
Mitglied.
Neumann, F.: DIN Deutsches Institut für Normung e. V.,
Normenausschuss 062 Materialprüfung, Arbeitsausschuss NA
062-02-93 AA »Photokatalyse«, Mitglied.
Neumann, F.: DIN Deutsches Institut für Normung e. V.,
Normenausschuss 062 Materialprüfung, Arbeitsausschuss NA
062-02-93 AA »Photokatalyse«, Leitung des Arbeitskreises
»Photokatalytische Selbstreinigung«.
Neumann, F.: DIN Deutsches Institut für Normung e. V.,
Normenausschuss 062 Materialprüfung, Arbeitsausschuss NA
062-02-93 AA »Photokatalyse«, stellvertretender Obmann.
Neumann, F.: Fachverband Angewandte Photokatalyse (FAP),
Forschungsausschuss, Mitglied.
P U B L I C A T I O N S
101
Paschke, H.: Fachausschuss FA10 »Funktionelle Schichten« der
Arbeitsgemeinschaft Wärmebehandlung und Werkstofftechnik
e. V. AWT, Mitglied.
Paschke, H.: Industrie-Arbeitskreis »Werkzeugbeschichtungen
und Schneidstoffe«, Leitung.
Paschke, H.: Kompetenznetz Industrielle Plasma-Oberflächen-
technik INPLAS e. V., Arbeitsgruppenleiter Werkzeuge.
Paschke, H.: Kompetenznetzwerk für Oberflächentechnik
»netzwerk-surface.net«, wissenschaftlicher Beirat (Sprecher).
Paschke, H.: Regionale Netzwerk-Initiative »In|Die Region-
Ruhr«, Mitglied.
Schäfer, L.: Beirat der CONDIAS GmbH, Mitglied.
Schäfer, L.: Industriearbeitskreis »Werkzeugbeschichtungen
und Schneidstoffe«, Mitglied.
Schäfer, L.: VDI-Richtlinien-Fachausschuss »CVD-Diamant -
Werkzeuge«, Mitglied.
Schäfer, L.: Nano- und Materialinnovationen Niedersachsen
e. V. (NMN), Mitglied.
Schäfer, L.: Nanotechnologie-Kompetenzzentrum Ultrapräzise
Oberflächenbearbeitung CC UPOB e. V., Mitglied.
Schäfer, L.: RETECZA NPO, Pretoria SA, Mitglied.
Sittinger, V.: Europäische Forschungsgesellschaft Dünne
Schichten e. V. (EFDS), Workshop »Dünnschicht-Technologie
für Energiesysteme – Wandlung, Speicherung, Effizienz,
V2013«, Chairman, Programmkomitee.
Sittinger, V.: Europäische Forschungsgesellschaft Dünne
Schichten e. V. (EFDS), Workshop »Dünnschicht-Techno-
logie für Energiesysteme – solare Anwendungen, V2013«,
Programmkomitee.
Sittinger, V.: Europäische Forschungsgesellschaft Dünne
Schichten e. V. (EFDS), Workshop »Transparente leitfähige
Materialien (TCO / TCM) – Festkörperphysikalische Grundlagen
und Technologien«, Chairman, Programmkomitee.
Sittinger, V.: EFDS-Fachausschuss »Dünnschichttechnik für
Großflächenbeschichtungen«, stellvertretende Leitung.
Sittinger, V.: European Photovoltaic Solar Energy Conference
and Exhibition, Scientific Committee, Paper Review Expert.
Sittinger, V.: Society of Vacuum Coaters, Session Chairman.
Sittinger, V.: Society of Vacuum Coaters, Volunteer Mentor.
Stein, C.: VDI-Arbeitskreis »Schneidstoffanwendungen«,
Mitglied.
Thomas, M.: Anwenderkreis Atmosphärendruckplasma (AK-
ADP), Mitglied.
Thomas, M.: EFDS-Fachausschuss »Atmosphärendruck
Plasmatechnologien«, Mitglied.
Thomas, M.: International Conference on Plasma Surface
Engineering, International Program Committee IPC, Mitglied.
Thomas, M.: Conference Cells meet Surfaces 3, Chairman,
Programmkomitee.
Viöl, W.: Bundesministerium für Bildung und Forschung BMBF,
Mitglied des Programmbeirats.
102
Viöl, W.: Deutsche Gesellschaft für Plasmatechnologie e. V.
DGPT, Mitglied des Vorstands.
Viöl, W.: DFG Fachkollegien, Mitglied.
Viöl, W.: Gesellschaft Deutscher Naturforscher und Ärzte e. V.
GDNÄ, Mitglied im Fachbeirat.
Viöl, W.: HAWK Hochschule für angewandte Wissenschaft
und Kunst Hildesheim / Holzminden / Göttingen, Vizepräsident
für Forschung und Transfer.
Viöl, W.: Hochschulrektorenkonferenz Forschungskommission
Fachhochschulen.
Viöl, W.: Kompetenznetz für Nachhaltige Holznutzung (NHN)
e. V., Vorstandsmitglied.
Viöl, W.: Kompetenznetz Industrielle Plasma-Oberflächentech-
nik INPLAS e. V., Kassenwart.
Viöl, W.: Nationales Zentrum für Plasmamedizin, Kuratoriums-
mitglied.
Viöl, W.: Nano und Materialinnovationen Niedersachsen e. V.
NMN, Mitglied des Fachbeirats.
Viöl, W.: Spectaris – Verband der Hightech-Industrie, Fachver-
band Photonik, Mitglied des Lenkungsausschusses.
Viöl. W.: Amt für regionale Landesentwicklung Braunschweig,
Mitglied Fachbeirat Südniedersachsen.
Viöl. W.: Nationales Zentrum für Plasmamedizin, Vorstands-
mitglied.
INTERNATIONAL GUESTSHerr Prof. Dr. Oualid Baghriche, Laboratory of innovative
Techniques of Environmental Preservation, University of
Constantine, Constantine, Algeria, 1. Juni – 31. August 2015.
Frau Tereza Sázavská, Centre for Nanomaterials, Advanced
Technologies and Innovations, Technical University of Liberec,
Liberec, Czech Republic, 26. – 30. Oktober 2015.
Frau Michaela Jakubičková, Centre for Nanomaterials,
Advanced Technologies and Innovations, Technical University
of Liberec, Liberec, Czech Republic, 26. – 30. Oktober 2015.
PUBLICATIONSAbraham, T.; Weber, M.; Bräuer, G.; Leisner, M.; Blust, M.;
Lorentz, B.; Albers, A. (2015): Tribologische Untersuchung
und Bewertung von faserverstärkten Polymeren für die
Leichtbauhydraulik. In: Reibung, Schmierung und Verschleiß:
Forschung und praktische Anwendungen. Band I, S. 12/1.
Altgen, D.; Bellmann, M.; Wascher, R.; Viöl, W.; Mai, C.
(2015): Enhancing mechanical properties of particleboards
using plasma treated wood particles. In: European journal of
wood and wood products 73 (2), pp. 219 – 223. DOI: 10.1007/
s00107-015-0879-z.
Bandorf, R. (2015): HIPIMS – an ionized sputtering technology
arriving in industry. In: 2015 HDPF, 20 S.
Bandorf, R. (2015): HIPIMS – Hochleistungs-Impuls-
Magnetronsputtern. In: Kathodenzerstäubung – der Schlüssel
für innovative Dünnschichtprodukte, S. 99 – 143.
Bandorf, R.; Waschke, S.; Carreri, F. C.; Vergöhl, M.; Grund-
meier, G.; Bräuer, G. (2015): Direct metallization of PMMA
P U B L I C A T I O N S
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with aluminum films using HIPIMS. In: Surface and coatings
technology (Article in Press. Published online October 2015.
DOI: 10.1016/j.surfcoat.2015.10.070, 5 S.).
Bandorf, R.; Waschke, S.; Vergöhl, M.; Grundmeier, G.; Bräuer,
G. (2015): Haftfeste Direktmetallisierung von Kunststoffen
durch Beschichtung mit Ionen. In: Vakuum in Forschung und
Praxis 27 (4), S. 18 – 22. DOI: 10.1002/vipr.201500587.
Barth, N.; Zimmermann, M.; Becker, A. E.; Graumann, T.;
Garnweitner, G.; Kwade, A. (2015): Influence of TiO2 nanopar-
ticle synthesis on the properties of thin coatings. In: Thin solid
films 574, pp. 20 – 27. DOI: 10.1016/j.tsf.2014.11.038.
Bräuer, G. (2015): 10th Asian-European International
Conference on Plasma Surface Engineering (AEPSE 2015) in
Jeju (Südkorea). In: Vakuum in Forschung und Praxis 27 (6),
S. 51 – 52. DOI: 10.1002/vipr.201590067.
Bräuer, G. (2015): Grundlagen der Kathodenzerstäubung. In:
Kathodenzerstäubung – der Schlüssel für innovative Dünn-
schichtprodukte, S. 1 – 22.
Bräuer, G. (2015): Magnetronzerstäubung. In: Kathodenzer-
stäubung – der Schlüssel für innovative Dünnschichtprodukte,
S. 23 – 48.
Carreri, F. C.; Bandorf, R.; Gerdes, H.; Vergöhl, M.; Bräuer, G.
(2015): Highly insulating alumina films by a bipolar reactive
MF sputtering process with special arc handling. In: Surface
and coatings technology (Article in Press. Published online
September 2015. DOI: 10.1016/j.surfcoat.2015.09.036, 5 S.).
Carreri, F. C.; Sabelfeld, A.; Gerdes, H.; Bandorf, R.; Vergöhl,
M.; Bräuer, G. (2015): HIPIMS ITO films from a rotating cylin-
drical cathode. In: Surface and coatings technology (Article
in Press. Published online October 2015. DOI: 10.1016/j.
surfcoat.2015.10.069, 8 S.).
Dahle, S.; Hirschberg, J.; Viöl, W.; Maus-Friedrichs, W. (2015):
Gas purification by the plasma-oxidation of a rotating sacrifi-
cial electrode. In: Plasma sources science & technology 24 (3),
pp. 035021, 10 S. DOI: 10.1088/0963-0252/24/3/035021.
Dietz, A. (2015): Kombinierte Verfahren – Alternativen zur
Kunststoffmetallisierung? In: Journal für Oberflächentechnik
(Special Kombinierte Oberflächen), S. 10 – 12. DOI: 10.1007/
s35144-015-0580-3.
Dillmann, H.; Eichler, M.; Klages, C.-P. (2015): Application of
polyelectrolyte multilayers for temporary wafer bonding. In:
WaferBond’15, pp. 39 – 40.
Eichler, M.; Nagel, K.; Reim, L. C.; Klages, C.-P. (2015): Control
of surface free energy by patterned etching or coating. In:
WaferBond’15, pp. 77 – 78.
Gäbler, J.; Höfer, M.; Armgardt, M.; Pleger, S.; Schäfer, L.
(2015): Hot-filament chemical vapor deposition of micro-
crystalline diamond layers for grinding applications. Poster
presented at 8th Hot-wire (Cat) Chemical Vapor Deposition
Conference, 13th – 16th October 2014, Braunschweig, Germa-
ny. Online verfügbar unter https://www.scienceopen.com/
document\_file/732ead9b-2f98-4664-8775-d5deb48b8595/
ScienceOpen/Gaebler\_et\_al\_HWCVD\_2014.pdf.
Gerhard, C.; Brückner, S.; Wieneke, S.; Viöl, W. (2015): Atmo-
spheric pressure plasma-enhanced laser ablation of glasses. In:
Laser ablation, pp. 151 – 164.
Gerhard, C.; Hermann, J.; Sarnet, T.; Nardini, J. C.; Viöl, W.
(2015): Detection of lead and arsenic soil pollution in aban-
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doned industrial poles to the south of Marseille, France by
laser-induced breakdown spectroscopy. In: Scottish journal of
arts, social sciences and scientific studies 26 (1), pp. 96 – 110.
Gerhard, C.; Wieneke, S.; Viöl, W. (2015): Hohe Qualität durch
Laser-Plasma-Hybridstrukturierung. Verfahren zur Glasbearbei-
tung. In: Journal für Oberflächentechnik (1), S. 46 – 47.
Gerhard, C.; Wieneke, S.; Viöl, W. (2015): Plasmabehandlung
von Glasoberflächen. Modifikation topographischer und che-
mischer Glaseigenschaften durch Niedertemperaturplasmen
bei Atmosphärendruck. In: DGG-Journal 14 (4), S. 10 – 12.
Grumbt, G.; Zenker, R.; Biermann, H.; Weigel, K.; Bewilogua,
K.; Bräuer, G. (2015): Electron beam hardening of PVD-coated
steels. Improved load-supporting capacity for Ti1 – xAlxN
layers. In: Surface and coatings technology 283, pp. 201 – 209.
DOI: 10.1016/j.surfcoat.2015.10.077.
Haydn, M.; Ortner, K.; Franco, T.; Schafbauer, W.; Behrens, A.;
Dittmar, B.; Hummel, S.; Sulik, M.; Rüttinger, M.; Venskutonis,
A.; Sigl, L. S. (2015): Metal-supported palladium membranes
for hydrogen separation. In: Powder metallurgy 58 (4),
pp. 250 – 253. DOI: 10.1179/0032589915Z.000000000247.
Henkel, B.; Neubert, T.; Zabel, S.; Lamprecht, C.; Selhuber-
Unkel, C.; Rätzke, K.; Strunskus, T.; Vergöhl, M.; Faupel, F.
(2015): Photocatalytic properties of titania thin films prepared
by sputtering versus evaporation and aging of induced oxygen
vacancy defects. In: Applied catalysis / B (Article in Press. Pub-
lished online June 2015. DOI: 10.1016/j.apcatb.2015.06.041,
5 S.).
Henze, S.; Gäbler, J.; Uhlmann, E. (2015): Schichthaftungs-
prüfung von CVD-Dünnschichtdiamantwerkzeugen mit
Siliziumcarbid-Zwischenschicht. In: Diamond business (2),
S. 82 – 89.
Hergelová, B.; Jung, A.; Thomas, M.; Weirauch, W.; Klages,
C.-P. (2015): Studies on plasma reduction of metal compounds
at atmospheric pressure. In: 22nd International Symposium on
Plasma Chemistry, pp. ITN-07
Hergelová, B.; Zahoranova, A.; Kovacik, D.; Stupavska, M.;
Cernak, M. (2015): Polylactic acid surface activation by
atmospheric pressure dielectric barrier discharge plasma. In:
Open chemistry 13 (1), pp. 564 – 569. DOI: 10.1515/chem-
2015-0067.
Herrmann, A.; Lachmann, K.; Fischer, L.; Kovac, J.; Thomas, M.
(2015): Area-selective epoxy coatings by DBD-PECVD in 3D
cavities for protein coupling. In: Surface innovations 3 (4),
pp. 206 – 214. DOI: 10.1680/jsuin.15.00010.
Hirschberg, J.; Gerhard, C.; Braun, A.; Grottker, S.; Krupp, A.;
Emmert, S.; Viöl, W. (2015): Validation of the suitability of
stripped lipid as a skin model in plasma medical investigations.
In: Open journal of applied sciences (5), pp. 40 – 49. DOI:
10.4236/ojapps.2015.52005.
Keunecke, M.; Bialuch, I.; Stein, C.; Bewilogua ,K.; Bräuer, G.;
Augustin, W.; Scholl, S. (2015): Modified diamond-like carbon
coatings (a-C:H:X) for anti-fouling applications. In: 58th Annual
Technical Conference Proceedings, Santa Clara, CA, April
25 – 30.
Knechtel, Roy; Eichler, Marko (Hg.) (2015): WaferBond’15.
Conference on Wafer Bonding for Microsystems, 3D- and
Wafer Level Integration ; 7th – 9th December 2015, Braun-
P U B L I C A T I O N S
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schweig, Germany; [book of abstracts]: WaferBond’15
<2015, Braunschweig>. Fraunhofer-Institut für Schicht- und
Oberflächentechnik (IST). Braunschweig.
Kondruweit, S.; Viehmeier, D. (2015): 25 Jahre Fraunhofer IST.
Schichten für unsere Zukunft. In: Vakuum in Forschung und
Praxis 27 (6), S. 27 – 35. DOI: 10.1002/vipr.201500597.
Krügener, K.; Schwerdtfeger, M.; Busch, S. F.; Soltani, A.;
Castro-Camus, E.; Koch, M.; Viöl, W. (2015): Terahertz meets
sculptural and architectural art. Evaluation and conservation of
stone objects with T-ray technology. In: Scientific reports (5),
p. 14842. DOI: 10.1038/srep14842.
Laukart, A.; Harig, T.; Höfer, M.; Schäfer, L. (2015): Strategy
for silicon based hot-wire chemical vapor deposition without
wire silicide formation. In: Thin solid films 575, pp. 38 – 41.
DOI: 10.1016/j.tsf.2014.10.026.
Laukart, A.; Thomas, M.; Schwarting, U.; Klages, C.-P. (2015):
Hydrophobic and release films from HDMDSO. In: 22nd Interna-
tional Symposium on Plasma Chemistry, pp. P-III-6-30.
Le Meur, V.; Loewenthal, L.; Gerhard, C.; Viöl, W. (2015): On
the debris formation during atmospheric pressure plasma-
assisted laser engraving of stainless steel. In: Laser ablation,
pp. 165 – 178.
Moreira, J. M. R.; Fulgêncio, R.; Alves, P.; Machado, I.;
Bialuch, I.; Melo, L. F. et al. (2015): Evaluation of SICAN
performance for biofouling mitigation in the food industry. In:
Food control (Article in Press. Published online October 2015.
DOI: 10.1016/j.foodcont.2015.10.023, 7 S.).
Neubert, T.; Lips, J.; Bandorf, R.; Sabelfeld, A.; Vergöhl, M.;
Rohwer, K.; Simon, A. (2015): Deposition of complex optical
interference filters on polymer substrates by magnetron
sputtering and PECVD processes. In: 58th Annual Technical
Conference Proceedings, Santa Clara, CA, April 25 – 30.
Paschke, H.; Weber, M.; Yilkiran, T. (2015): Neue Konzepte
zur Verschleißreduzierung bei Werkzeugen der Warmmassiv-
umformung. In: Tribologie und Schmierungstechnik 62 (2),
S. 61 – 66.
Paschke, H.; Yilkiran, T.; Lippold, L.; Brunotte, K.; Weber, M.;
Bräuer, G.; Behrens, B.-A. (2015): Adapted surface properties
of hot forging tools using plasma technology for an effective
wear reduction. In: Wear 330 – 331, pp. 429 – 438. DOI:
10.1016/j.wear.2015.02.009.
Pflug, A. (2015): Simulation von Plasmaprozessen. In:
Kathoden zerstäubung – der Schlüssel für innovative Dünn-
schichtprodukte, S. 145 – 176.
Pflug, A.; Höfer, M.; Harig, T.; Armgardt, M.; Britze, C.;
Siemers, M.; Melzig, T.; Schäfer, L. (2015): Modeling of gas
flow and deposition profile in HWCVD processes. In: Thin solid
films 595, pp. 266 – 271. DOI: 10.1016/j.tsf.2015.08.004.
Pflug, A.; Siemers, M.; Melzig, T.; Sittinger, V.; Schäfer, L.
(2015): Heuristic modeling of the doping efficiency in sput-
tered TCO layers. In: Surface and coatings technology 267,
pp. 81 – 89. DOI: 10.1016/j.surfcoat.2014.11.046.
Rösemann, N.; Ortner, K.; Petersen, J.; Schadow, T.; Bäker, M.;
Bräuer, G.; Rösler, J. (2015): Influence of bias voltage and
oxygen flow rate on morphology and crystallographic
properties of gas flow sputtered zirconia coatings. In: Surface
and coatings technology 276, pp. 668 – 676. DOI: 10.1016/j.
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Siebeneck, K.; Augustin, W.; Scholl, S.; Richter, K.; Müller, R.;
Landgrebe, D. et al. (2015): Beschichtung contra Fouling. In:
Umformtechnik 49 (5), S. 24 – 25.
Sittinger, V. (2015): Variable Glasbeschichtungen für beschlag-
freie Scheiben. In: Laser Magazin (1), S. 55 – 56.
Sittinger, V.; Pflug, A.; Dewald, W.; Jung, S.; Britze, C.; Kaiser,
A.; Werner, W.; Szyszka, B.; Bräuer, G. (2015): Rotatable serial
co-sputtering of doped titania. In: Vacuum 114, pp. 158 – 161.
DOI: 10.1016/j.vacuum.2014.12.007.
Sittinger, V.; Pflug, A.; Schulz, C.; Siemers, M.; Melzig, T.;
Meyer, B.; Kronenberger, A.; Oberste Berghaus, J.; De
Bosscher, W. (2015): Growth condition of amorphous ZTO
films from rotatable targets. In: Surface and coatings technolo-
gy 267, pp. 75 – 80. DOI: 10.1016/j.surfcoat.2014.12.014.
Talledo, A.; Asencios, J.; Paucar, K.; Lopez, A.; Benndorf, C.;
Nuñez, R.; Petersen, J. (2015): Hardness enhancement and
corrosion current of multilayer coatings based on titanium
nitride. In: Journal of materials science and engineering / A 5
(7 / 8), pp. 257 – 268. DOI: 10.17265/2161-6213/2015.7-
8.002.
Tasche, D.; Weihs, T.; Viöl, W. (2015): Fundamentals of laser
ablation. In: Laser ablation, pp. 1 – 22.
Thomas, M. (2015): Atmosphärendruckplasmen für die
Restaurierung? In: Restauro (4), S. 52 – 55.
Tiede, R.; Helmke, A.; Wandke, D.; Viöl, W.; Emmert, S.
(2015): PlasmaDerm. Kaltes Atmosphärendruckplasma als
Spitzeninnovation. In: Spitzenforschung in der Dermatologie,
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Tiefensee, F.; Kaden, D.; Jakob, A.; Quenzer, H.-J.; Jung, Th.
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Multiple scale modeling of Al2O3 thin film growth in an ion
beam sputtering process. In: Optical Systems Design 2015,
pp. 9627 – 9658.
Turowski, M.; Jupe, M.; Ehlers, H.; Melzig, T.; Pflug, A.;
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Optical Systems Design 2015, pp. 962707-1 – 962707-10.
Turowski, M.; Jupe, M.; Melzig, T.; Moskovkin, P.; Daniel, A.;
Pflug, A. et al. (2015): Practice-oriented optical thin film
growth simulation via multiple scale approach. In: Thin solid
films 592, pp. 240 – 247. DOI: 10.1016/j.tsf.2015.04.015.
Uhlmann, E.; Leyens, C.; Gäbler, J.; Stawiszynski B.; Oyanedel
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für die Drehbearbeitung. In: Werkstatt + Betrieb 148 (10),
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Vergöhl, M. (2015): Magnetron-Zerstäubung für präzise
optische Beschichtungen. In: Kathodenzerstäubung – der
Schlüssel für innovative Dünnschichtprodukte, S. 49 – 85.
Vergöhl, M.; Bruns, S.; Rademacher, D.; Bräuer, G. (2015):
Industrial-scale deposition of highly uniform and precise optical
interference filters by the use of an improved cylindrical mag-
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Wallenhorst, L.; Dahle, S.; Vovk, M.; Wurlitzer, L.; Loewenthal,
L.; Mainusch, N.; Gerhard, C.; Viöl, W. (2015): Characterisation
of PMMA / ATH layers realised by means of atmospheric
pressure plasma powder deposition. In: Advances in condensed
matter physics, pp. 980482, 12 p. DOI: 10.1155/2015/980482.
Wascher, R.; Leike, N.; Avramidis, G.; Wolkenhauer, A.;
Militz, H.; Viöl, W. (2015): Improved DMDHEU uptake of
beech veneers after plasma treatment at atmospheric pressure.
In: European journal of wood and wood products 73 (4),
pp. 433 – 437. DOI: 10.1007/s00107-015-0916-y.
LECTURES, POSTERSAbraham, T.; Weber, M.; Bräuer, G.; Leisner, R.; Blust, M.;
Lorentz, B.; Albers, A.: Tribologische Untersuchung und Bewer-
tung von faserverstärkten Polymeren für die Leichtbauhydraulik
(Vortrag), 56. Tribologie-Fachtagung, Göttingen, Deutschland,
September 2015.
Arlt, O.; Gerhard, C.; Wieneke, S.; Viöl, W.: Analysis of the
bonding durability of lapped surfaces and lacquer by different
surface mechanism aspects, 2nd European Seminar on Precision
Optics Manufacturing, Teisnach, 14. – 15. April 2015.
Avramidis, G.; Viöl, W.: Plasmaanwendungen auf Holz und
Holzwerkstoffen, 22. Workshop des ak-adp zum Thema
Oberflächentechnik für die Praxis, Jena, Deutschland, 18. – 19.
März 2015.
Bandorf, R.: High density plasmas for advanced coatings
(eingeladener Vortrag), AEPSE 2015, Jeju, Süd-Korea, Septem-
ber 2015.
Bandorf, R.; Gerdes, H.; Gerstenberg, J.; Ortner, K.; Bräuer, G.:
Highly Ionized Gas Flow Sputtering of Alumina Coatings
(Poster), 6th International Conference on Fundamentals and
Industrial Applications of HIPIMS, Braunschweig, Deutschland,
10. – 11. Juni 2015.
Bandorf, R.; Waschke, S.; Gerdes, H.; Grundmeier, G.;
Bräuer, G.: Adherent Metallization of Plastic using HIPIMS
(Vortrag), 58th Annual Technical Conference of the Society of
Vacuum Coaters, Santa Clara, USA, 25. – 30. April 2015.
Biehl, S.; Rumposch, C.; Paetsch, N.; Meyer-Kornblum, E.:
Multifunktionale Dünnschichtsensormodule zur Überwachung
von Produktionsprozessen (Vortrag), Mikrosystemtechnik
Kongress, Karlsruhe, Deutschland, 26. – 28. Oktober 2015.
Biehl, S.; Rumposch, C.; Paetsch, N.: Multifunctional thin film
sensor system as monitoring system in production (Vortrag),
SPIE Microtechnologies ”Smart Sensors, Actuators, and MEMS
VII“, Barcelona, Spanien, 4. – 6. Mai 2015.
Biehl, S.: Unterlegscheibensensorik universell und individuell
(Vortrag), Workshop »Smarte Lösungen« der Fraunhofer
Allianz Adaptronik, Darmstadt, Deutschland, 7.Oktober 2015.
Biehl, S.: Vielfältige Applikationen der Dünnschichtsensorik,
(Vortrag), Jubiläumsworkshop des Zentrums für Mikroproduk-
tion, Clausthal-Zellerfeld, Deutschland, 17. – 18. Juni 2015.
Bräuer, G.: Grundlagen der Kathodenzerstäubung, OTTI-Semi-
nar »Kathodenzerstäubung«, Braunschweig, Deutschland, 25.
Februar 2015.
Bräuer, G.: Magnetronzerstäubung, OTTI-Seminar »Kathoden-
zerstäubung«, Braunschweig, Deutschland, 25. Februar 2015.
108
Bräuer, G.: Vacuum-Coated Glass – Added Value to a Unique
Material, Sheffield Hallam University, Sheffield, UK, 24. März
2015.
Bräuer, G.: Advanced Coating Designs for Hybrid Deposition
Processes, 42nd International Conference on Metallurgical
Coatings and Thin Films ICMCTF, San Diego, CA, USA,
23. April 2015.
Bräuer, G.: Über das Licht (Kindervorlesung), Braunschweig,
Deutschland, 3. Juli 2015.
Bräuer, G.: Functional Coatings and Plasma Treatment of
Surfaces – Trends and Recent Applications, 13th International
Symposium on Sputtering and Plasma Processes ISSP, Kyoto,
Japan, 8. Juli 2015.
Bräuer, G.: Combining Plasma with other Deposition
Techniques – Advanced Surfaces by Hybrid Processes, 10th In-
ternational Conference on Plasma Surface Engineering AEPSE,
Jeju Island, Südkorea, 22. September 2015.
Can, M.; Wallenhorst L.; Viöl, W.; Militz, H.; Sivrikaya, H.:
Improving the performance of Scotch pine wood surface,
3. Ulusal Mobilya Kongresi, Konya, Türkei, 10. – 12. April 2015.
Carreri, F. C.; Gerdes, H.; Bandorf, R.; Vergöhl, M.; Bräuer, G.:
Reactive HIPIMS of Aluminum Oxide from Rotating Cathodes
(Poster), 4th Magnetron, Ion processing & Arc Technologies
European Conference & 14th International Symposium on Re-
active Sputter Deposition, Paris, Frankreich, 8. – 11. Dezember
2015.
Carreri, F. C.; Sabelfeld, A.; Gerdes, H.; Bandorf, R.;
Vergöhl, M.; Bräuer, G.: HIPIMS ITO from a rotating cylindrical
cathode (Vortrag), 58th Annual Technical Conference of the
Society of Vacuum Coaters, Santa Clara, CA, USA, 25. – 30.
April 2015.
Carreri, F. C.; Schröder, E.; Bandorf, R.; Bräuer, G.: HIPIMS ITO
Films from a Rotatable Target for Applications in Strain Gauges
(Poster), 6th International Conference on Fundamentals and
Industrial Applications of HIPIMS, Braunschweig, Deutschland,
10. – 11. Juni 2015.
Diehl, W.; Bandorf, R.; Biehl, S.; Brand, J.; Jung, T.; Keunecke,
M.; Neumann, F.; Sittinger, V.; Vergöhl, M.; Bräuer, G.: Plasma
Technologies – Functional Coatings for Automotive Applica-
tions (Vortrag), 8th International Conference on Advanced
Materials, ROCAM 2015, Bucharest, Romania, 7. – 10. Juli
2015.
Dietz, A.; Moustafa, E.: Galvanische Hartverchromung aus
wässrigen Cr(III)-Elektrolyten (Vortrag), ZVO-Oberflächentage,
Berlin, Deutschland, September 2015.
Duckstein R.; Lachmann K.; Thomas M.; Weidlich R.; Klages
C.-P.: Herstellung von mechanisch robusten superhydrophoben
Oberflächen durch Kombination eines Prägeprozesses mit
einer anschließenden Oberflächenbeschichtung mittels
Atmosphärendruck-Plasmaverfahren, 11. ThGOT Thementage
Grenz- und Oberflächentechnik, Zeulenroda, Deutschland,
15. – 17. September 2015.
Duckstein, R.; Lachmann, K.; Thomas, M.; Klages, C.-P.:
Investigations into the mechanism of atmospheric pressure
plasma enhanced chemical vapor deposition of pNiPAAm on
polypropylene, Pacific Polymer Conference 14, Kauai, Hawaii
USA, 9. – 13. Dezember 2015.
P U B L I C A T I O N S
109
Eichler, M.; Fischer, V.; Paulmann, S.; Stammen, E.;
Thomas, M.; Kotula, S.; Khosravi, Z.; Hinze, A.; Grishin, A.;
Lachmann, K.; Borris, J.; Dohse, A.; Nagel K.; Klages C.-P.:
Oberflächenfunktionalisierungen von technischen Kunststof-
fen für die Haftungsvermittlung (Vortrag), ak-adp Workshop
Haftung durch Oberflächenfunktionalisierung Innovative:
Plasmaanwendungen zur Haftungsverbesserung, Erfurt,
Deutschland, November 2015.
Eichler, M.; Nagel, K.; Reim, L. C.; Klages, C-P.: Control of
surface free energy by patterned etching or coating (Vortrag),
Conference on wafer bonding for microsystems 3D- wafer
level integration, Braunschweig, Deutschland, Dezember
2015.
Eichler, M.; Thomas, M.; Nagel, K.; Gabriel, M.; Klages, C-P.:
SELECT: Commercialized Tool for Patterned Plasma Surface
Engineering (Vortrag), Micro Plasma & MicroNano structures
workshop 2015, Gent, Belgien, November 2015.
Flade, E.: Plasma-Partikeltechnik – neue Möglichkeiten zur
Beschichtung von Kunststoffen (Vortrag), Niedersächsisches
Forum Kunststofftechnik 2015, Optimierte Oberflächen,
Göttingen, Deutschland, 18. September 2015.
Gäbler, J.; Höfer, M.; Schäfer, L.; Sittinger, V.: CVD-
Diamantbeschichtungen als Konstruktionselement für extreme
Beanspruchungen (Vortrag), Werkstoffwoche, Dresden,
Deutschland, September 2015.
Gerdes, H.; Bandorf, R.; Mark, M.; Schütte, T.; Bräuer, G.: Dif-
ferent Approaches for Controlling a Reactive Sputter Process
with MF Superimposed HIPIMS (Vortrag), 58th Annual Technical
Conference of the Society of Vacuum Coaters, Santa Clara,
CA, USA, 25. – 30. April 2015.
Gerdes, H.; Bandorf, R.; Vergöhl, M.; Barati, V.; Mark, M.;
Schütte, T.; Bräuer, G.: Plasma characterization of sputtered
aluminum with a MF superimposed HIPIMS process from
industrial sized rotatables (Vortrag), 42th International Confer-
ence on Metallurgical Coatings and Thin Films ICMCTF, San
Diego, CA, USA, 20. – 24. April 2015.
Gerdes, H.; Bandorf, R.; Vergöhl, M.; Bräuer, G.: Reactive
HIPIMS: Challenges and industrial solutions (eingeladener
Vortrag), 9th Symposium on Vacuum based Science and
Technology, Kolberg, Polen, 17. – 19. November 2015.
Gerdes, H.; Petersen, M.; Heckmann, U.; Bandorf, R.; Gwozdz,
V.; Schnabel, S.; Bräuer, G.: Me-DLC Films as Material for High-
ly Sensitive Temperature Compensated Strain Gauges (Poster),
Jubiläumsworkshop des Zentrums für Mikroproduktion,
Clausthal-Zellerfeld, Deutschland, 17. – 18. Juni 2015.
Gerdes, H.; Täsch, M.; Bandorf, R.; Bräuer, G.: Highly Ionized
Deposition of Chromium-Nitride (Vortrag), 6th International
Conference on Fundamentals and Industrial Applications of
HIPIMS, Braunschweig, Deutschland, 10. – 11. Juni 2015.
Gerhard, C.; Heine, J.; Bellmann, M.; Wieneke, S.; Viöl, W.:
Direct DBD plasma activation of plane and curved automotive
polymers, 17. Fachtagung für Plasmatechnologie, Kiel,
Deutschland, 23. – 25. Februar 2015.
Gerhard, C.; Sarnet, T.; Viöl, W.; Hermann, J.: Mesures LIBS
des polluants dans les Calanques Marseillaises, Journées LIBS
France 2015, Verneuil en Halatte, France, 17. – 18. Juni 2015.
Gerhard, C.; Viöl, W.: Plasma treatment of glass surfaces for
enhanced coupling of laser irradiation, 7th Workshop Living
Glass Surfaces, Ilmenau, Deutschland, 7. – 8. Oktober 2015.
110
Gerhard, C.; Wieneke, S.; Viöl, W.: Plasma-assisted nano-
second laser structuring of photovoltaic cover glasses, 4th
Int. Symp. on Energy Challenges & Mechanics, Aberdeen,
Scotland, 11. – 13. August 2015.
Grumbt, G.; Zenker, R.; Weigel, K.; Bewilogua, K.: Kombina-
tion von PVD-Beschichtung und EB-Härten zur Verbesserung
der Stützwirkung des Stahlsubstrates und der Haftfestigkeit
der Dünnschichten, 3. Kolloquium Thermische Elektronen-
strahltechnologien, Freiberg, Deutschland, 21. – 22. Januar
2015.
Hergelová, B.; Jung, A.; Thomas, M.; Weirauch, R.; Klages,
C.-P.: Studies on plasma reduction of metal compounds at
atmospheric pressure (Vortrag), 22nd International Symposium
on Plasma Chemistry (ISPC), Antwerp, Belgium, Juli 2015.
Hergelová, B.; Klages, C.-P.: Reducing plasma surface treat-
ments of inorganic materials (Vortrag), 3rd RAPID Symposium,
Perpignan, Frankreich, Oktober 2015.
Herrmann, A.; Franke, M.; Nagel, K.; Thomas, M.; Eichler, M.;
Lachmann, K.; Klages, C.-P.: Plasma induced surface
polymerization of C=C containing monomers with chemical
reactive groups via locally separated plasma and coating
zone (Poster), 14th Pacific Polymer Conference, Kauai, Hawaii,
9. – 13. Dezember 2015.
Herrmann, A.; Lachmann, K.; Mayer, A.; Fischer, L.; Thomas,
M.; Klages, C.-P.; Singh, M.: Ortsselektive Modifikation von
funktionalen Oberflächen für biomedizinische Anwendungen
(Poster), 9. Deutsches BioSensor Symposium, München,
Deutschland, 11. – 13. März 2015.
Hoffmeister, J.; Brückner, S.; Gerhard, C.; Wieneke,
S.; Viöl, W.: Einfluss des thermischen Linseneffektes in
einer DBD-Plasmasäule auf koaxial geführte Laserstrahlung,
17. Fach tagung für Plasmatechnologie, Kiel, Deutschland,
23. – 25. Februar 2015.
Keunecke, M.: Entwicklung von Werkzeugbeschichtungen
für das Hochgeschwindigkeitsscherschneiden von
Blechwerk stoffen, 33. Treffen des Industrie-Arbeitskreises
Werkzeug beschichtungen und Schneidstoffe, Braunschweig,
Deutschland, 5. November 2015.
Keunecke, M.: Reibungs- und verschleißreduzierende DLC-
Beschichtungen und deren Wechselwirkung mit Öladditiven
für Anwendungen im Verbrennungsmotor, DGM Arbeitskreis
Tribologie, IWIS, München, Deutschland, 25. März 2015.
Keunecke, M.; Bialuch, I.; Stein, C.; Bewilogua, K.; Bräuer,
G.: Modified Diamond-Like Carbon coatings (a-C:H:X) for
anti-fouling applications, 58th SVC Techcon 2015, Santa Clara,
CA, USA, 28. April 2015.
Keunecke, M.: Foulingminderung und -vermeidung durch
DLC-basierte Beschichtungen, Infotag »Antifouling«,
DECHEMA, Frankfurt am Main, Deutschland, 23. Juni 2015.
Lucas, S.; Pflug, A.; von Keudell, A.: Computer Simulation and
Experimental Validation of Mechanical Properties of Titanium
Films Grown by HiPIMS (Vortrag / Keynote), 4th Magnetron,
Ion processing & Arc Technologies European Conference &
14th International Symposium on Reactive Sputter Deposition
(RSD-MIATEC), Paris, Frankreich, 8. – 11. Dezember 2015.
Mainusch, N.; Christ, T.; Siedenburg T.; Papenburg, G.;
Harms N.; Viöl, V.: Novel probe and method to characterize
electrical resistances in battery electrodes (Poster), 3. Dresdner
Konferenz »Zukunft Energie«, Dresden, Deutschland,
10. – 11. November 2015.
P U B L I C A T I O N S
111
Mainusch, N.: Plasma-Partikeltechnik: Neue Ansätze und
Optionen für die Plasmabeschichtung (Vortrag), Plasma
Germany – Frühjahrssitzung 2015, Göttingen, Deutschland, 11.
Mai 2015.
Melzig, T.; Pflug, A.; Siemers, M.; Lucas, S.; Moskovkin,
P.; Daniel, A.; Jupé, M.; Turowski, M.: Holistic approach of
plasma, transport and film growth simulation, 58th Annual
Technical Conference of the Society of Vacuum Coaters
(Vortrag), Santa Clara, CA, USA, 25. – 30. April 2015.
Neumann, F.; Graumann, T.: An overview of the activities
of Fraunhofer in the field of photocatalysis development
(eingeladener Vortrag), Centre for Nanomaterials, Advanced
Technologies and Innovations, Technical University of Liberec,
Liberec, Czech Republic, 22. April 2015.
Neumann, F.: Preparation and properties of PVD-coatings for
photocatalytic self-cleaning and antimicrobial applications
(eingeladener Vortrag), Symposium Recent Advances in
Surface Sterilization and Disinfection, Freising, Deutschland,
19. – 20. November 2015.
Pflug, A.; Melzig, T.; Siemers, M.; Schiffmann, K.; Vergöhl, M.;
Moskovkin, P.; Tonneau, R.; Lucas, S.; Daniel, A.; Archambeau,
C.; Turowski, M.; Jupé, M.; Ristau, D.: Representation of TiO2
thin film deposition in a virtual sputter coater, 4th Magnetrion,
Ion processing & Arc Technologies European Conference &
14th International Symposium on Reactive Sputter Deposition
(Vortrag), Paris, Frankreich, 8. – 11. Dezember 2015.
Pflug, A.; Siemers, M.; Melzig, T.; Höfer, M.; Armgardt, M.;
Schäfer, L.; Vergöhl, M.: Model based process development
for synthesis of smart materials, World Congress of Smart
Materials (eingeladener Vortrag), Busan, Korea, 23. – 25. März
2015.
Pflug, A.; Siemers, M.; Melzig, T.; Neubert, T.; Schäfer, L.;
Vergöhl, M.: Plasmasimulation im Beschichtungsprozess, Pho-
tonicNet-Workshop »Simulationen in der Dünnschichttechnik«
(eingeladener Vortrag), Laserzentrum Hannover, Deutschland,
25. Februar 2015.
Pflug, A.; Siemers, M.; Melzig, T.; Schäfer, L.; Rademacher, D.;
Zickenrott, T.; Vergöhl, M.: Simulation von Plasmaprozessen,
OTTI-Seminar »Kathodenzerstäubung« (eingeladener Vortrag),
Braunschweig, Deutschland, 26. Februar 2015.
Pflug, A.; Siemers, M.; Melzig, T.; Vergöhl, M.: Simulation
von Niederdruck-Beschichtungsprozessen, EFDS-Workshop
»Einsatz von Simulationsmethoden im industriellen Umfeld«
(eingeladener Vortrag), Dresden, Deutschland, 9. Juni 2015.
Schäfer, L.; Vergöhl, M.: Model based process development
for synthesis of smart materials, World Congress of Smart
Materials (eingeladener Vortrag), Busan, Korea, 23. – 25. März
2015.
Schäfer, L.: Hot-Filament CVD of Diamond – From Research
to Products, (Keynote Lecture), 9th International Conference
on New Diamond and Nano Carbons NDNC 2015, Shizuoka,
Japan, 24. – 28. Mai 2015.
Schiffmann, K. I.: Analyse- und Prüfverfahren für tribologische
Schichten – Methoden und Beispiele aus der Praxis, »NMN
Workshop: Forschung meets KMU – Analytik und tribologische
Kontaktsysteme« (Vortrag), Dortmund, Deutschland, 24. Juni
2015.
Siedenburg, T.; Mainusch, N.; Christ, T.; Viöl, W.: Versatile
PVD device to tailor Lithium battery micron particles, 17.
Fach tagung für Plasmatechnologie, Kiel, Deutschland,
23. – 25. Februar 2015.
112
Siemers, M.; Pflug, A.; Melzig, T.: Drift waves in magnetron
sputtering plasmas, 58th Annual Technical Conference of the
Society of Vacuum Coaters (Vortrag), Santa Clara, CA, USA,
25. – 30. April 2015.
Stein, C.; Keunecke, M.; Bewilogua K.; Bräuer, G.: Cubic
boron nitride (c-BN) + nanostructured nitride hard coatings for
high temperature tool applications (Vortrag), 10th Asian-Euro-
pean Conference on Plasma Surface Engineering, Jeju Island,
Korea, 20. – 24. September 2015.
Tasche, D.; Gerhard, C.; Ihlemann, J.; Viöl, W.: The influence of
plasma pre-treatment on the laser ablation of fused silica, 20th
International Colloquium on Plasma Processes, Saint-Etienne,
France, 1. – 5. Juni 2015.
ten Bosch, L.; Avramidis, G.; Pfohl, K.; Wieneke, S.; Viöl, W.;
Karlovsky, P.: Conference Paper, Conference: 37th Mycotoxin
Workshop, At Bratislava, Slovakia, June 2015.
Thomas, M.; Eichler, M.; Lachmann, K.; Borris, J.; Laukart, A.;
von Hausen, M.; Cerezuela-Barreto, M.; Khosravi, Z.; Klages,
C.-P.: Surface technology with DBD type processes – Potentials
and applications (Vortrag), 17. Fachtagung für Plasmatechnol-
ogie, Kiel, Deutschland, 23. – 25. Februar 2015.
Thomas, M.; Förster, F.: Grundlagen und Anwendungen von
Atmosphärendruck-Plasma-Vorbehandlung (eingeladener
Vortrag), 10. Textilveredlertag, Friedrichshafen, Deutschland,
15. – 16. Mai 2015.
Thomas, M.: Atmospheric pressure plasma processes (einge-
ladener Vortrag), International Sales Workshop, Lunderskov,
Dänemark, 13. April 2015.
Thomas, M.: The Fraunhofer-Gesellschaft – Application
oriented research and the use for SME (eingeladener Vortrag),
International Sales Workshop, Lunderskov, Dänemark,
13. April 2015.
Tiede, R.; Mann, M.; Laspe, P.; Hirschberg, J.; Viöl, W.; von
Woedtke, T.; Emmert, S.: Gentoxicity and mutagenicity of a
plasma jet and DBD source and alleviation of chronic venous
leg ulcers with a DBD plasma generator, 2nd International
Workshop on Plasma for Cancer Treatment, Nagoya, Japan,
16. – 17. März 2015.
Turowski, M.; Jupé, M.; Ehlers, H.; Melzig, T.; Pflug, A.;
Ristau, D.: Simulation in Thin Film Technology, SPIE Optical
Systems Design (eingeladener Vortrag), Jena, Deutschland,
7. – 10. September 2015.
Turowski, M.; Jupé, M.; Melzig, T.; Pflug, A.; Ristau, D.: Mul-
tiple scale modeling of Al2O3 thin film growth in an ion beam
sputtering process (Vortrag), SPIE Optical Systems Design
(eingeladener Vortrag), Jena, Deutschland, 7. – 10. September
2015.
Ulrich, S.; Werner, W.; Heintze, M.: Square or sine wave:
impact of power supply type in dual magnetron sputtering of
TiO2 (eingeladener Vortrag), 6th Power Electronics for Plasma
Engineering Conference (PE²), Ditzingen, Deutschland, 5. Mai
2015.
Ulrich, S.; Werner, W.; Heintze, M.: Square or sine wave:
impact of power supply type in dual magnetron sputtering
of TiO2 (eingeladener Vortrag), INPLAS Workshop der AG
»Neuartige Plasmaquellen und -prozesse«, Fraunhofer IST,
Braunschweig, Deutschland, 29. Oktober 2015.
P U B L I C A T I O N S
113
Plasma Surface Engineering, Jeju Island, Korea, 20. – 24. Sep-
tember 2015.
Wascher, R.; Avramidis, G.; Militz, H.; Viöl, W.: Impact of air
plasma treatment at atmospheric pressure on wood and wood
extractives, 8th European Conference on Wood Modification,
Aalto, Finland, 26. – 27. Oktober 2015.
Weber, M.: Einsatz von Rockwell-, Ritz- und Impact-Tests
für die Entwicklung neuer Schichtsysteme, EFDS-Workshop
»Messung der Schichthaftung«, Dresden, Deutschland,
24. Juni 2015.
Weber, M.: Entwicklung von Werkzeugwerkstoffen und
Beschichtungen mit optimiertem Antihaftverhalten für die
Umformung von TiAl6V4 bei 700 °C bis 900 °C unter Schutz-
gasatmosphäre, DGM Fachausschuss Titan, Braunschweig,
Deutschland, 24. September 2015.
Weber, M.: Optimierte Feinschneidwerkzeuge durch Tieftem-
peraturbehandlungen, 33. Treffen des Industrie-Arbeitskreises
Werkzeugbeschichtungen und Schneidstoffe, Braunschweig,
Deutschland, 5. November 2015.
Wieneke, S.; Gerhard, C.; Viöl, W.: Behandlung von Ober-
flächen mit Laser-Plasma-Hybridtechnologie, 22. Workshop
des ak-adp zum Thema Oberflächentechnik für die Praxis,
Jena, Deutschland, 18. – 19. März 2015.
Yang, Y.; Pflug, A.; Liu, J.; Siemers, M.; Melzig, T.; Zhou, X.;
Panjan, M.; Anders, A.: Spontaneous formation of ionization
waves in low current magnetron sputtering, 4th Magnetrion,
Ion processing & Arc Technologies European Conference &
14th International Symposium on Reactive Sputter Deposition
(Vortrag), Paris, Frankreich, 8. – 11. Dezember 2015.
Viöl, W.; Hemke, A.; Wandke, D.: it Plasmaderm | medical ef-
fects of plasma on skin, Symposium CELLS MEET SURFACE 3,
Braunschweig, Deutschland, 6. – 7. Mai 2015.
Viöl, W.: Entwicklung von Batteriematerialien, Industry Day
Landesinitiative Energiespeicher und -systeme, Hannover,
Deutschland, 4. Februar 2015.
Viöl, W.: Laserstrahlquellen, Strahlformung und -charakteri-
sierung, Seminar Technische Optik in der Praxis, Göttingen,
Deutschland, 15. – 16. September 2015.
Viöl, W.: Plasma technology | future technology, 7th Training
school on plasma modification of wood and wood based
materials in the frame of COST Action FP1006, Göttingen,
Deutschland, 10. – 12. März 2015.
Viöl, W.: Plasmabehandlung von Holz und Holzwerkstoffen,
Seminar des Fraunhofer-Instituts für Holzforschung,
Wilhelm-Klauditz-Institut WKI, Braunschweig, Deutschland,
2. Februar 2015.
Viöl, W.: The applications center for plasma and photonic,
7th Training school on plasma modification of wood and
wood based materials in the frame of COST Action FP1006,
Göttingen, Deutschland, 10. – 12. März 2015.
Wandke, D.; Helmke, A.; Däschlein, G.; Kopp, M.; Awako-
wicz, P.; Emmert, S.; Schäfer, A., Viöl, W.: Plasmaderm – from
research to market – Anforderungen an ein Medizinprodukt,
17. Fachtagung für Plasmatechnologie, Kiel, Deutschland,
23. – 25. Februar 2015.
Wascher, R.; Avramidis, G.; Kühn, C.; Militz, H.; Viöl, W.:
Penetration and distribution of modification agents within air
plasma-treated wood, 10th Asian-European Conference on
114
DISSERTATIONSWegewitz, L.: Plasmainduzierte Modifikation selbstorgan-
isierender Polystyrolkugeln mittels dielektrisch behinderter
Entladung. Clausthal: Shaker-Verlag, 2015. Zugl: Clausthal,
Technische Universität, Dissertation, 2015.
DIPLOMA THESISBrandes, J.: Herstellung von ZnO:Al-Frontkontakten mittels
HPMF Technologie und Erstellung von CAD Zeichnungen für
die Integration eines Doppelrohrmagnetronsystem in eine
Inline-Anlage. Technische Universität Braunschweig, Juni 2015.
Schröder, E.: Abscheidung und Charakterisierung von
Indium-Zinn-Oxid (ITO) für die Anwendung in Dehnungs-
messstreifen. Technische Universität Braunschweig, November
2015.
MASTER’S THESISArend, N.: Entwicklung eines C-DLC Schichtsystems zur Ver-
schleißminimierung im Dieselinjektor mittels PVD. Technische
Universität Braunschweig, August 2015.
Gerstenberg, J.: Prozessentwicklung und Charakterisierung
für die ionisierte Abscheidung von haftfesten, antibakteriellen
Schichten auf Gewebe. Fachhochschule Südwestfalen,
Iserlohn, Dezember 2015.
Kühn, C.: Untersuchungen zum Tränkverhalten und zu
mechanischen Eigenschaften von Holzfurnieren und daraus
hergestellten Sperrholzplatten nach einer Plasmabehandlung
unter Atmosphärendruck. HAWK Hochschule für angewandte
Wissenschaft und Kunst Hildesheim / Holzminden / Göttingen,
Oktober 2015.
Leike, N.: Entwicklung und Erprobung eines automatisierten
Prüfstandes zur Bestimmung der Flüssigkeitsaufnahme mit
integrierter Messwerterfassung. HAWK Hochschule für an-
gewandte Wissenschaft und Kunst Hildesheim / Holzminden /
Göttingen, Januar 2015.
Machemehl, P.: Grundlagenuntersuchung zur Optimierung
von Dieselaggregaten durch DLC-beschichtete Kolbenringe.
Technische Universität Braunschweig, August 2015.
Mejauschek, M.: Entwicklung von partiellen Plasmadiffusions-
behandlungen für Gesenkschmiedewerkzeuge. Technische
Universität Braunschweig, Januar 2015.
Meyer-Kornblum, E.: Entwicklung eines Dünnschicht-
Kraft sensorsystems mit integrierter Messelektronik und
telemetrischer Datenübertragung auf Basis von Bluetooth Low
Energy. Technische Universität Braunschweig, Juni 2015.
Paulmann, S.: Untersuchungen zur Atmosphärendruck-
plasma-Vorbehandlung von Hochleistungskunststoffen für
dauerhaft hochfeste Verklebungen. Technische Universität
Braunschweig, Juni 2015.
Queirazza, N. Konstruktion und Aufbau eines Messstandes
zur Bestimmung elektrischer Durchgangs- bzw. Kontaktwid-
erstände in Abhängigkeit der Flächenpressung von plasma-
nitrierten nichtrostenden Stählen. Technische Universität
Braunschweig, Januar 2015.
Rodriguez Carrillo, N.: Untersuchungen zu Wachstum und
Wassergehalt von Polyelektrolyt-Multischichten. Technische
Universität Braunschweig, Mai 2015.
P U B L I C A T I O N S
115
Schmidt, K.: Pikosekundenlaser-Plasma-Hybrid-Ablation von
carbonfaserverstärktem Kunststoff. HAWK Hochschule für an-
gewandte Wissenschaft und Kunst Hildesheim / Holzminden /
Göttingen, Oktober 2015.
Schumacher, F.: Untersuchung der tribologischen Eigen-
schaften verschiedener Beschichtungen im Einsatz auf Kolben-
ringen gegen eine thermisch gespritzte Zylinderlaufbahn.
Technische Universität Braunschweig, November 2015.
Täsch, M.: Ionisierte Abscheidung von CrN-Schichten. Tech-
nische Universität Braunschweig, Juli 2015.
BACHELOR’S THESISFast, K.: Analyse des Einflusses einer direkten Argon-Plasma-
entladung auf die Oberfläche von Quarzglasoptiken bei
unterschiedlichen Umgebungsdrücken. HAWK Hochschule
für angewandte Wissenschaft und Kunst Hildesheim / Holz-
minden / Göttingen, November 2015.
Gröninger, A.: Entwicklung von hartmagnetischen Sm-Co-
Schichten auf Metallband für hochgenaue Positionierungssys-
teme. Technische Universität Braunschweig, September 2015.
Heymann, K.: Evaluation einer mit sinus- und pulsförmiger
Hochspannung angeregten dielektrischen Barriereentladung.
HAWK Hochschule für angewandte Wissenschaft und Kunst
Hildesheim / Holzminden / Göttingen, Oktober 2015.
Hoffmeister, T.: Experimentelle Untersuchung der Behan-
dlungsgüte einer neuartigen, flexiblen Plasmaquelle zur
Behandlung dreidimensionaler Körper. HAWK Hochschule
für angewandte Wissenschaft und Kunst Hildesheim / Holz-
minden / Göttingen, Juni 2015.
Holburg, J.: Charakterisierung einer Hochdruckdüse zur
Erzeugung weicher Röntgenstrahlung mittels laserinduzierter
Plasmen. HAWK Hochschule für angewandte Wissenschaft
und Kunst Hildesheim / Holzminden / Göttingen, September
2015.
Kranert, F.: Entwicklung eines Aufbaus zur LED-basierten
chromatisch codierten Hochgeschwindigkeitsphotographpie.
HAWK Hochschule für angewandte Wissenschaft und Kunst
Hildesheim / Holzminden / Göttingen, September 2015.
Krupp, A.: Studie zu in vitro und in vivo Plasmabehandlung ku-
taner Lipide mittels DBD. HAWK Hochschule für angewandte
Wissenschaft und Kunst Hildesheim / Holzminden / Göttingen,
Juni 2015.
Lips, J.: Organisch-Keramische Mischschichten für optische
Interferenzstapel. Technische Universität Braunschweig,
August 2015.
Lukow, C.: Transfer von RF-PACVD-Prozessen zur Abscheidung
von modifizierten DLC Schichten auf eine industrielle Beschich-
tungsanlage mittels statistischer Versuchsplanung. Technische
Universität Braunschweig, Juli 2015.
Preuß, P.: Bürstendispergierer. HAWK Hochschule für ange-
wandte Wissenschaft und Kunst Hildesheim / Holzminden /
Göttingen, Oktober 2015.
Ritter, J.: Veränderung von SERS-aktiven Substraten durch
Plasmareinigung. HAWK Hochschule für angewandte
Wissenschaft und Kunst Hildesheim / Holzminden / Göttingen,
März 2015.
116
Scheglov, A.: Einfluss einer Atmosphärendruck-Plasmabe-
handlung auf die Stöchiometrie und Konstitution von pro-
teinogenen Aminosäuren. HAWK Hochschule für angewandte
Wissenschaft und Kunst Hildesheim / Holzminden / Göttingen,
September 2015.
Susdalzew, A.: Charakterisierung von Plasmapolymeren aus
trans-2-Hexen-1-al. Technische Universität Braunschweig, Juli
2015.
von Hörsten, A.: Detektion von Ruß mittels Extinktions-
messungen zur Quantifizierung von bildgebender laser-
induzierten Inkandeszenz. HAWK Hochschule für angewandte
Wissenschaft und Kunst Hildesheim / Holzminden / Göttingen,
September 2015.
PATENT APPLICATIONSFlade, E.; Paulus, J.; Viöl, W.; Mainusch, N.; Siedenburg, T.;
Torge, C.: Vorrichtung und Verfahren zur reversiblen Kontak-
tierung.
Olfe, J.; Schmich, F.; Brand, J.; Kaestner, P.; Speck, T.: Plasma-
nitrieren von Aluminium und anderen Werkstoffen mit
bionisch inspirierter Mikrostrukturierung der Oberfläche.
Seeboth, A.; Lötzsch, D.; Rabe, C.; Frach, P.; Gittner, M.;
Bartzsch, H.; Barré de la, R.; Bartmann, R.; Vergöhl, M.;
Bruns, S.; Neubert, T.; Fischer, J.; Schottner, G.: Elektrisch
steuerbarer Interferenzfarbfilter und dessen Verwendung.
Vergöhl, M.; Bruns, S.; Kricheldorf, H.-U.; Schäfer, L.;
Höfer, M.; Armgardt, M.: Beschichteter Gegenstand und
Verfahren zur Herstellung eines beschichteten Gegenstands.
Viöl, W.; Damm, R.; Haese, C.: Vorrichtung zur Erzeugung eines
Plasma-Jets und Verfahren zur Oberflächenbehandlung.
Viöl, W.; Wieneke, S.; Damm, R.; ten Bosch, L.; Loewenthal, L.:
Reinigungsgerät und Verfahren zur Reinigung.
P U B L I C A T I O N S
117
PICTURE INDEXP. 2 Jan Benz, Fraunhofer IST
P. 3 Jan Benz, Fraunhofer IST
P. 6 Uwe Kampfer, Fraunhofer WKI
P. 6 Fraunhofer IST
P. 7 Jan Benz, Fraunhofer IST
P. 8 Dirk Mahler / Fraunhofer
P. 8 Jan Benz, Fraunhofer IST
P. 9 Eileen Kaster, Fraunhofer IST
P. 10 Ronja Grünke, Fraunhofer IST
P. 11 Prof. Wolfgang Diehl, Fraunhofer IST
P. 12 Falko Oldenburg, Fraunhofer IST
P. 13 thyssenkrupp Steel Europe AG
P. 14 Elke Bürger, Fraunhofer IST
P. 15 Volkswagen AG
P. 16 Jan Benz, Fraunhofer IST
P. 18 Falko Oldenburg, Fraunhofer IST
P. 24 Jan Benz, Fraunhofer IST
P. 24 Jan Benz, Fraunhofer IST
P. 25 Jan Benz, Fraunhofer IST
P. 25 Falko Oldenburg, Fraunhofer IST
P. 26 Falko Oldenburg, Fraunhofer IST
P. 27 Ronald Frommann, Fraunhofer
P. 28 Rainer Meier, BFF Wittmar
P. 28 Falko Oldenburg, Fraunhofer IST
P. 29 Jan Benz, Fraunhofer IST
P. 30 Ulrike Balhorn, Fraunhofer IST
P. 31 Ulrike Balhorn, Fraunhofer IST
P. 32 Rainer Meier, BFF Wittmar
P. 34 Manuela Lingnau, Fraunhofer WKI
P. 34 Eike Meyer-Kornblum, Fraunhofer IST
P. 35 Manuela Lingnau, Fraunhofer WKI
P. 36 Falko Oldenburg, Fraunhofer IST
P. 36 Manuela Lingnau, Fraunhofer WKI
P. 38 Krees Nagel, Fraunhofer IST
P. 38 Falko Oldenburg, Fraunhofer IST
P. 42 Rainer Meier, BFF Wittmar
P. 44 Fraunhofer ILT
P. 45 Falko Oldenburg, Fraunhofer IST
P. 46 Jan Benz, Fraunhofer IST
P. 48 Falko Oldenburg, Fraunhofer IST
P. 50 Thammo Siedenburg, Fraunhofer IST
P. 50 Tom O´Donnell / Nils Mainusch, Fraunhofer IST
P. 51 Nils Mainusch, Fraunhofer IST
P. 52 Jan Benz, Fraunhofer IST
P. 54 Falko Oldenburg, Fraunhofer IST
P. 56 Falko Oldenburg, Fraunhofer IST
P. 56 Jan Benz, Fraunhofer IST
P. 57 Jan Benz, Fraunhofer IST
P. 58 Jan Benz, Fraunhofer IST
P. 60 Ronja Grünke, Fraunhofer IST
P. 61 Falko Oldenburg, Fraunhofer IST
P. 62 Hans-Jürgen Kramer, MTJ Medizintechnik & Service GmbH
118
E D I T O R I A L N O T E S
P. 63 Fraunhofer IST
P. 64 Dr. Ernst-Rudolf Weidlich, GRT GmbH & Co. KG
P. 65 Rowena Duckstein, Fraunhofer IST
P. 66 Falko Oldenburg, Fraunhofer IST
P. 68 Jan Benz, Fraunhofer IST
P. 68 Rainer Meier, BFF Wittmar
P. 69 Falko Oldenburg, Fraunhofer IST
P. 70 Rainer Meier, BFF Wittmar
P. 70 Jan Benz, Fraunhofer IST
P. 71 Falko Oldenburg, Fraunhofer IST
P. 76 Rainer Meier, BFF Wittmar
P. 78 Falko Oldenburg, Fraunhofer IST
P. 79 Falko Oldenburg, Fraunhofer IST
P. 80 Falko Oldenburg, Fraunhofer IST
P. 82 Kurt Fuchs / Fraunhofer-Gesellschaft
P. 83 Claudia Siatkowski, INPLAS e. V.
P. 84 Florian Aue / Pressestelle HAWK
P. 84 Fraunhofer IST
P. 85 Fraunhofer IST
P. 86 Manuela Lingnau, Fraunhofer WKI
P. 87 Fraunhofer IST
P. 94 Holger Gerdes, Fraunhofer IST
P. 95 Falko Oldenburg, Fraunhofer IST
P. 96 Ulrike Balhorn, Fraunhofer IST
119
EDITORIAL NOTESFraunhofer Institute for Surface Engineering
and Thin Films IST
Director of the Institute
Prof. Dr. Günter Bräuer
Deputy Director of the Institute
Prof. Wolfgang Diehl
Bienroder Weg 54 E
38108 Braunschweig
Phone +49 531 2155-0
Fax +49 531 2155-900
www.ist.fraunhofer.de
Editorial and Coordination
Dr. Simone Kondruweit
M. A. Daniela Viehmeier
Layout
Dipl.-Des. Falko Oldenburg
gutenberg beuys feindruckerei GmbH
www.feindruckerei.de
© Fraunhofer IST 2016
