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Scalability of CO2 amplifiers to generate stable
> 500W extreme ultraviolet (EUV) beams
Koji Yasui1, Ph.D
Naoyuki Nakamura2, Jun-ichi Nishimae2
Masashi Naruse3, Kazuo Sugihara3, Masato Matsubara3
1Mitsubishi Electric Corporation, Head quarter, Tokyo, Japan 2Mitsubishi Electric Corporation, Advanced technology R&D center, Hyogo, Japan 3Mitsubishi Electric Corporation, Nagoya works, Nagoya, Japan
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1. We are supplying advanced machines for fast-growing
market such as smart phones.
2. Today IoT/AI market is emerging and we are preparing
for the new demands.
Introduction
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Contents
Introduction
1. Why we need EUVL for IoT/AI era
2. Our progress for EUVL success
3. Toward > 500W EUV beams
Summary
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1. Why we need EUVL for IoT/AI era
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CPS
Physic
al
Smart Ecosystem
CPS
CPS:Cyber Physical System, AI:Artificial Intelligence
AI
AIComparable with
today's super computer
Comparable with today's human brains
We need low-cost high-end devices for our machines
1. Why we need EUVL for IoT/AI era
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1. Why we need EUVL for IoT/AI era
http://www.jdzb.de/en/events/single-view/id/1632/
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Total Optimization Model
A-
Model
B-
Model
T-
ModelR-
Model
A-
CompanyUniversity
Research
Institute
Cyber
Space
B-
Company
PD-Model F-Model S-Model SS-Model
Under
Development
Trial model
Proposed
1. Why we need EUVL for IoT/AI era
Middle
Goal
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Machine
Model
Factory
Model
Design
Model
C-
Machine
F-
FactoryB-
Company D-
MachineA-
CompanyE-
Factory
Final
Goal
Customer
Business Physical Space
Products, ServiceMarketing Data
CPS
CPS
CPS
CPS
CPS
Integrator
CPS
Smart
Ecosystem
B-
Company
C-
Machine
E-
Factory
1. Why we need EUVL for IoT/AI era
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Physic
al S
pace
Engineering Model Data analysis approach
Experiments
Analysis / Theory Proposal Supported
by computers
and statistics
Manufacturing
Assemble
Distributing Sales
data AIIoT
Semiconductor
Chips
Modeling requires advanced theories and calculation powers
EUV-Lithography
Cut Add Paint Logistics
1. Why we need EUVL for IoT/AI era
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2. Our progress for EUVL success
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2. Our progress for EUVL success
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(2)Stable operations
(1)Higher gain (1)High power >25kW
with better efficiency
(2)Lower loss
Technological Advantages User Advantages
(3)High EUV power
with better efficiency
(3)Better beam shapesToday Also presented by Gigaphoton Inc.
Today
2. Our progress for EUVL success
Today
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Laser Tube
Amplified Diffraction Beam
Main Laser Beam
Fast-axial-flow CO2 laser
反射型アパーチャ
Main Laser Beam
Designated Absorber
DiffractionCleaner
Transverse-gas-flow CO2 laser
Amplified
Diffraction BeamFar Field
Pattern
Better beam shapes improved for fine metal cutting
applications are also effective for efficient EUV generation
2. Our roll for EUVL success
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2. Our roll for EUVL success
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2. Our roll for EUVL success
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(2)Stable operations
(1)Higher gain (1)High power >25kW
with better efficiency
(2)Lower loss
Technological Advantages User Advantages
(3)High EUV power
with better efficiency
(3)Better beam shapesToday Also presented by Gigaphoton Inc.
Today
2. Our progress for EUVL success
Today
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3. Toward > 500W EUV beams
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3. Toward > 500W EUV beams
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3. Toward > 500W EUV beams
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3. Toward > 500W EUV beams
Possible technological bottlenecks toward higher power
generation and prospects.
1. Beam shape degradation Within our estimation
2. Higher electric powers
OK
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)(
111
11
1
lr
eMM
eeelW
v
vv
lWMv
lrM
v
lrM
v
l
LM
eev
WM v
WM
v
LM
1
11
11
0
0.5
1
1.5
2
2.5
3
0 5 10 15 20 25 30
Laser Beam Intensity M ( I/IS)
Effective E
xcitation D
ensity
(a.u
.)
Transverse Flow Laser
Fast Axial Flow Laser
Wall Cooling Laser= 1
IS : Saturation Intensity
Theoretical calculation to explain electrical input power
reduction of > 50% compared with other CO2 lasers
3. Toward > 500W EUV beams
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3. Toward > 500W EUV beams
1. Beam shape degradation Within our estimation
2. Higher electric powers Within conventional powers
even at 40kW
OK
OK
3. Extraction degradation
Possible technological bottlenecks toward higher power
generation and prospects.
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3. Toward > 500W EUV beams
0
10
20
30
40
50
60
1 2 3 4 5 6 7
Our design
Lase
r o
utp
ut
po
wer
[kW
]
Number of stages of amplifiers
Scalable amplification system by increasing the number
of stages of amplifiers can be easily configured
Other design
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3. Toward > 500W EUV beams
Higher optical transmission efficiency
is the essential property for high-power amplifiers
High-power amplifier(assuming power extraction ability of 10kW )
Complex structures tend toreduce transmission efficiency
IN 40kW
OUT h100%: 50kWh90% : 45kWh80% : 40kW
(no gain)
The ultimately simple structure of our amplifierallows for the highest transmission efficiency
and lead to scalable amplifier system
IN 40kW
OUT~50kW
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1
1.1
1.2
1.3
1.4
1.5
1.6
30 35 40 45 50
3. Toward > 500W EUV beams
( Sm
all s
ign
al g
ain
[re
l.] )
Ris
k o
f se
lf o
scill
atio
n
Laser output power [kW]
The output power can be increased without significantly
increasing the risk of self-oscillation
Our design
Other design
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3. Toward > 500W EUV beams
0.5
0
10
20
30
40
50
60
1 1.1 1.2 1.3 1.4 1.5 1.6 1.7 1.8 1.9 2
lase
r o
utp
ut
po
wer
(kW
)
smal
l sig
nal
gai
n (
rel.)
transverse flow parameter (rel.)
0
1
2
1.5
The output power can be increased without significantly
increasing the risk of self-oscillation
Our design
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3. Toward > 500W EUV beams
1. Beam shape degradation Within our estimation
2. Higher electric powers
OK
3. Extraction degradation Within our estimation OK
Within conventional powers
even at 40kW OK
Possible technological bottlenecks toward higher power
generation and prospects.
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Summary1. Scalability of CO2 amplifiers to generate > 500W EUV beams that are
required in the near future for high-volume-manufacturing of IoT/AI
devices are discussed.
2. We consider that with the emerging application fields related to IoT/AI
technology, EUV lithography has become essential technology.
3. We have shown that CO2 amplifiers with transverse-gas-flow
configuration could solve technological bottlenecks to enhance the EUV
powers more than 500W.
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One appendix
Digital pre-pulsing technology based on controllable
digital picosecond lasers are also going to be proposed
in the near future for better EUV efficiency.
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Acknowledgements
・A part of this work was supported by The New Energy and Industrial Technology Development Organization (NEDO, Japan)
・The experiments were performed by research members of Mitsubishi Electric corp. and Gigaphoton Inc.
Thank you very much for your attention