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SPECTRAL PRODUCTS INTRODUCTION 111 Highland Drive, Putnam, CT 06260, USA (East Office) 2659A Pan...

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OES, EPD Color UV/VIS NIRS Mid-IR Raman Semiconductor BT & NT Environment LED & OLED Field Of Business SPECTRAL PRODUCTS 2015 INTRODUCTION Technical Leader in Spectroscopy World
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SPECTRAL PRODUCTS INTRODUCTION 111 Highland Drive, Putnam, CT 06260, USA (East Office) 2659A Pan American Freeway NE, Albuquerque, NM 87107, USA (West Office) www.spectralproducts.com
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Page 1: SPECTRAL PRODUCTS INTRODUCTION 111 Highland Drive, Putnam, CT 06260, USA (East Office) 2659A Pan American Freeway NE, Albuquerque, NM 87107, USA (West.

SPECTRALPRODUCTSINTRODUCTION

111 Highland Drive, Putnam, CT 06260, USA (East Office)2659A Pan American Freeway NE, Albuquerque, NM 87107, USA (West Office)

www.spectralproducts.com

Page 2: SPECTRAL PRODUCTS INTRODUCTION 111 Highland Drive, Putnam, CT 06260, USA (East Office) 2659A Pan American Freeway NE, Albuquerque, NM 87107, USA (West.

SPECTRAL PRODUCTS 2015INTRODUCTION

1972 Founded CVI Laser Corp in Albuquerque, NM to make high power laser

coatings near Sandia and Los Alamos National Labs.

1980 Won the US National Small Business of the Year Award.1987 Started CVI Instruments Division producing computer controlled monochromators (the first total microprocessor-controlled and direct drive scanning type).2000 Started Spectral Products division producing miniature spectrometers.2003 Sold CVI Laser Continued Spectral Products in Putnam, CT & Albuquerque, NM Founded Korea Spectral Products (KSP) in Seoul, S. Korea2004 Developed OES systems for in-situ monitoring plasma deposition process

control in semiconductor industry.

2005 Provided multi-channel OES systems to SAMSUNG Electronics production

lines (~800-1000 sets, ~2500-3000 spectrometers) through KSP.

2007 Provided SPOES (Self Plasma Optical Emission Spectroscopy) systems to

semiconductor industry (SAMSUNG, LG-Philips, Hynix)

Developed analyzing system for measuring the concentration of total N, total P,

and total K from livestock’s liquid type waste using IR spectrometers.

Began to provide NPK analyzers to the Rural Development Administration of S.

Korea and its national labs through KSP

2009 Developed high performance spectrometer systems f or in-situ measurement of

LED characteristic on wafer stage and provided them to semiconductor industry

(SAMSUNG) through KSP

2010 Developed the UV-VIS spectroscopic system for measuring maturity of liquid

type fertilizer (livestock’ waste)

2011 Provided the liquid fertilizer maturity measurement systems to the Rural

Development Administration of S. Korea and its national labs through KSP

2012 Developed the SROES (Spatially Resolvable Optical Emission Spectrometer) and provided them to semiconductor industry (SAMSUNG) through KSP 2014 Developing High-speed screening apparatus for a Raman analysis-based high-speed multiple drug with Korea Research Institute of Chemical Technology in S. Korea through KSP

Technical Leader in Spectroscopy World

Page 3: SPECTRAL PRODUCTS INTRODUCTION 111 Highland Drive, Putnam, CT 06260, USA (East Office) 2659A Pan American Freeway NE, Albuquerque, NM 87107, USA (West.

OES, EPDColorUV/VIS

NIRSMid-IR

Raman

Semiconductor

BT & NT Environment

LED & OLED

Field Of Business  

SPECTRAL PRODUCTS 2015INTRODUCTION

Technical Leader in Spectroscopy World

Page 4: SPECTRAL PRODUCTS INTRODUCTION 111 Highland Drive, Putnam, CT 06260, USA (East Office) 2659A Pan American Freeway NE, Albuquerque, NM 87107, USA (West.

Traceable Optical Alignment & Calibration

NIST

SPECTRAL PRODUCTS 2015INTRODUCTION

Technical Leader in Spectroscopy World

Page 5: SPECTRAL PRODUCTS INTRODUCTION 111 Highland Drive, Putnam, CT 06260, USA (East Office) 2659A Pan American Freeway NE, Albuquerque, NM 87107, USA (West.

Manufacturing

& Quality Control

SPECTRAL PRODUCTS 2015INTRODUCTION

Technical Leader in Spectroscopy World

Page 6: SPECTRAL PRODUCTS INTRODUCTION 111 Highland Drive, Putnam, CT 06260, USA (East Office) 2659A Pan American Freeway NE, Albuquerque, NM 87107, USA (West.

Mechanical Design and Optimization

Opto

SPECTRAL PRODUCTS 2015INTRODUCTION

Technical Leader in Spectroscopy World

Page 7: SPECTRAL PRODUCTS INTRODUCTION 111 Highland Drive, Putnam, CT 06260, USA (East Office) 2659A Pan American Freeway NE, Albuquerque, NM 87107, USA (West.

Electronics Design for Sensor and Optical System

SPECTRAL PRODUCTS 2015INTRODUCTION

Technical Leader in Spectroscopy World

Page 8: SPECTRAL PRODUCTS INTRODUCTION 111 Highland Drive, Putnam, CT 06260, USA (East Office) 2659A Pan American Freeway NE, Albuquerque, NM 87107, USA (West.

Optical System Design and Simulation

SPECTRAL PRODUCTS 2015INTRODUCTION

Technical Leader in Spectroscopy World

Page 9: SPECTRAL PRODUCTS INTRODUCTION 111 Highland Drive, Putnam, CT 06260, USA (East Office) 2659A Pan American Freeway NE, Albuquerque, NM 87107, USA (West.

Measurement and Analysis Software

SPECTRAL PRODUCTS 2015INTRODUCTION

Technical Leader in Spectroscopy World

Page 10: SPECTRAL PRODUCTS INTRODUCTION 111 Highland Drive, Putnam, CT 06260, USA (East Office) 2659A Pan American Freeway NE, Albuquerque, NM 87107, USA (West.

R&D of Optical Measurement System

SPECTRAL PRODUCTS 2015INTRODUCTION

Technical Leader in Spectroscopy World

Page 11: SPECTRAL PRODUCTS INTRODUCTION 111 Highland Drive, Putnam, CT 06260, USA (East Office) 2659A Pan American Freeway NE, Albuquerque, NM 87107, USA (West.

Spatial Resolution by location

Spatial Resolution

SPEA™400A

Commercial and Applicable SPEA System in Real Production

Field Automatic SPEA System for Diagnosis

& In-Situ Monitoring Plasma Uniformity Based OES & EPD

PhysicalDimensions 248.5mm X 103.04mm X 86.5mmWeight 3.2 Kg

Optical Input systemMeasurement Scanning range 350mm ~ 4000mm

Spatial Resolution 20mm ~ 70mm @500mm(Depends on Setup & Distance)

Wavelength Range Max. 320~1050nm @ VISMax. 200~1050nm @ UV

Power requirementSource voltage 100 - 240V, 47 - 64HzPower consumption Less than 50W

Environment conditionTemperature range 0℃ - 50℃Maximum Humidity <40℃ : ≤80%, >40℃ - 50℃ :

≤60%

SPECTRAL PRODUCTS 2015INTRODUCTION

Technical Leader in Spectroscopy World

Page 12: SPECTRAL PRODUCTS INTRODUCTION 111 Highland Drive, Putnam, CT 06260, USA (East Office) 2659A Pan American Freeway NE, Albuquerque, NM 87107, USA (West.

In semiconductor manufacturing, spectrometers are used for measuring the emission spectrum from a plasma chamber in real time and for diagnosis of manufacturing processes and analysis of materials such as optical emission spectrometer (OES) and end point detection (EPD).

OES & EPD

SPECTRAL PRODUCTS 2015INTRODUCTION

Technical Leader in Spectroscopy World

Page 13: SPECTRAL PRODUCTS INTRODUCTION 111 Highland Drive, Putnam, CT 06260, USA (East Office) 2659A Pan American Freeway NE, Albuquerque, NM 87107, USA (West.

Colorimetry & Photome-try

As the LED, OLED and display business grows, it becomes

very important to measure and analyze the colorimetric and

photometric characteristics of them. Spectral Products have

been providing the measurement systems for analyzing the

colorimetric and  photometric values of various samples. With

SP's spectrometers and some accessories, the optical

properties of various colors in the CIE color coordinates can

be achieved easily.

SPECTRAL PRODUCTS 2015INTRODUCTION

Technical Leader in Spectroscopy World

Page 14: SPECTRAL PRODUCTS INTRODUCTION 111 Highland Drive, Putnam, CT 06260, USA (East Office) 2659A Pan American Freeway NE, Albuquerque, NM 87107, USA (West.

Spectrometers are being used in the manufacturing of semiconductor and display devices, optical monitoring system of optical coatings, and surface plasma resonance (SPR) systems. Wide range of selections for our spectrometers and monochromators makes it possible to build spectroscopic ellipsometer systems efficiently.

Film Thickness Mea-surement

SPECTRAL PRODUCTS 2015INTRODUCTION

Technical Leader in Spectroscopy World

Page 15: SPECTRAL PRODUCTS INTRODUCTION 111 Highland Drive, Putnam, CT 06260, USA (East Office) 2659A Pan American Freeway NE, Albuquerque, NM 87107, USA (West.

FluorescenceRaman

Spectroscopy

The measurements of fluorescence,

phosphorescence, and opto-chemical

emission spectrum are required in

many applications like organic and

inorganic fluorescence property

studies, chemical property analysis,

and the research for the components

and their lifetimes of some gases.

Spectrometer systems are the

basic instruments for

measuring Raman scattering

in the chemical components

analysis, the researches for

the structure, stability and

biological properties of various

materials.

SPECTRAL PRODUCTS 2015INTRODUCTION

Technical Leader in Spectroscopy World

Page 16: SPECTRAL PRODUCTS INTRODUCTION 111 Highland Drive, Putnam, CT 06260, USA (East Office) 2659A Pan American Freeway NE, Albuquerque, NM 87107, USA (West.

Environment

SM301-FCM [NPK Analyzer for liquid fer-

tilizer]

• No need for physical and/or chemical pre/post treatment• Can measure the total N, total P, and total K in a couple minutes at the same time• Compact and portable

LMQ2000 [Liquid Fertilizer Maturity measurement

system]

• Measuring maturity of liquid type fertil-izer• Manufactured for the first time in the world and can be industrial standard• Can measure “ammonia” and “hydro-gen sulfide” in real time

SPECTRAL PRODUCTS 2015INTRODUCTION

Technical Leader in Spectroscopy World


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