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SPECTRALPRODUCTSINTRODUCTION
111 Highland Drive, Putnam, CT 06260, USA (East Office)2659A Pan American Freeway NE, Albuquerque, NM 87107, USA (West Office)
www.spectralproducts.com
SPECTRAL PRODUCTS 2015INTRODUCTION
1972 Founded CVI Laser Corp in Albuquerque, NM to make high power laser
coatings near Sandia and Los Alamos National Labs.
1980 Won the US National Small Business of the Year Award.1987 Started CVI Instruments Division producing computer controlled monochromators (the first total microprocessor-controlled and direct drive scanning type).2000 Started Spectral Products division producing miniature spectrometers.2003 Sold CVI Laser Continued Spectral Products in Putnam, CT & Albuquerque, NM Founded Korea Spectral Products (KSP) in Seoul, S. Korea2004 Developed OES systems for in-situ monitoring plasma deposition process
control in semiconductor industry.
2005 Provided multi-channel OES systems to SAMSUNG Electronics production
lines (~800-1000 sets, ~2500-3000 spectrometers) through KSP.
2007 Provided SPOES (Self Plasma Optical Emission Spectroscopy) systems to
semiconductor industry (SAMSUNG, LG-Philips, Hynix)
Developed analyzing system for measuring the concentration of total N, total P,
and total K from livestock’s liquid type waste using IR spectrometers.
Began to provide NPK analyzers to the Rural Development Administration of S.
Korea and its national labs through KSP
2009 Developed high performance spectrometer systems f or in-situ measurement of
LED characteristic on wafer stage and provided them to semiconductor industry
(SAMSUNG) through KSP
2010 Developed the UV-VIS spectroscopic system for measuring maturity of liquid
type fertilizer (livestock’ waste)
2011 Provided the liquid fertilizer maturity measurement systems to the Rural
Development Administration of S. Korea and its national labs through KSP
2012 Developed the SROES (Spatially Resolvable Optical Emission Spectrometer) and provided them to semiconductor industry (SAMSUNG) through KSP 2014 Developing High-speed screening apparatus for a Raman analysis-based high-speed multiple drug with Korea Research Institute of Chemical Technology in S. Korea through KSP
Technical Leader in Spectroscopy World
OES, EPDColorUV/VIS
NIRSMid-IR
Raman
Semiconductor
BT & NT Environment
LED & OLED
Field Of Business
SPECTRAL PRODUCTS 2015INTRODUCTION
Technical Leader in Spectroscopy World
Traceable Optical Alignment & Calibration
NIST
SPECTRAL PRODUCTS 2015INTRODUCTION
Technical Leader in Spectroscopy World
Manufacturing
& Quality Control
SPECTRAL PRODUCTS 2015INTRODUCTION
Technical Leader in Spectroscopy World
Mechanical Design and Optimization
Opto
SPECTRAL PRODUCTS 2015INTRODUCTION
Technical Leader in Spectroscopy World
Electronics Design for Sensor and Optical System
SPECTRAL PRODUCTS 2015INTRODUCTION
Technical Leader in Spectroscopy World
Optical System Design and Simulation
SPECTRAL PRODUCTS 2015INTRODUCTION
Technical Leader in Spectroscopy World
Measurement and Analysis Software
SPECTRAL PRODUCTS 2015INTRODUCTION
Technical Leader in Spectroscopy World
R&D of Optical Measurement System
SPECTRAL PRODUCTS 2015INTRODUCTION
Technical Leader in Spectroscopy World
Spatial Resolution by location
Spatial Resolution
SPEA™400A
Commercial and Applicable SPEA System in Real Production
Field Automatic SPEA System for Diagnosis
& In-Situ Monitoring Plasma Uniformity Based OES & EPD
PhysicalDimensions 248.5mm X 103.04mm X 86.5mmWeight 3.2 Kg
Optical Input systemMeasurement Scanning range 350mm ~ 4000mm
Spatial Resolution 20mm ~ 70mm @500mm(Depends on Setup & Distance)
Wavelength Range Max. 320~1050nm @ VISMax. 200~1050nm @ UV
Power requirementSource voltage 100 - 240V, 47 - 64HzPower consumption Less than 50W
Environment conditionTemperature range 0℃ - 50℃Maximum Humidity <40℃ : ≤80%, >40℃ - 50℃ :
≤60%
SPECTRAL PRODUCTS 2015INTRODUCTION
Technical Leader in Spectroscopy World
In semiconductor manufacturing, spectrometers are used for measuring the emission spectrum from a plasma chamber in real time and for diagnosis of manufacturing processes and analysis of materials such as optical emission spectrometer (OES) and end point detection (EPD).
OES & EPD
SPECTRAL PRODUCTS 2015INTRODUCTION
Technical Leader in Spectroscopy World
Colorimetry & Photome-try
As the LED, OLED and display business grows, it becomes
very important to measure and analyze the colorimetric and
photometric characteristics of them. Spectral Products have
been providing the measurement systems for analyzing the
colorimetric and photometric values of various samples. With
SP's spectrometers and some accessories, the optical
properties of various colors in the CIE color coordinates can
be achieved easily.
SPECTRAL PRODUCTS 2015INTRODUCTION
Technical Leader in Spectroscopy World
Spectrometers are being used in the manufacturing of semiconductor and display devices, optical monitoring system of optical coatings, and surface plasma resonance (SPR) systems. Wide range of selections for our spectrometers and monochromators makes it possible to build spectroscopic ellipsometer systems efficiently.
Film Thickness Mea-surement
SPECTRAL PRODUCTS 2015INTRODUCTION
Technical Leader in Spectroscopy World
FluorescenceRaman
Spectroscopy
The measurements of fluorescence,
phosphorescence, and opto-chemical
emission spectrum are required in
many applications like organic and
inorganic fluorescence property
studies, chemical property analysis,
and the research for the components
and their lifetimes of some gases.
Spectrometer systems are the
basic instruments for
measuring Raman scattering
in the chemical components
analysis, the researches for
the structure, stability and
biological properties of various
materials.
SPECTRAL PRODUCTS 2015INTRODUCTION
Technical Leader in Spectroscopy World
Environment
SM301-FCM [NPK Analyzer for liquid fer-
tilizer]
• No need for physical and/or chemical pre/post treatment• Can measure the total N, total P, and total K in a couple minutes at the same time• Compact and portable
LMQ2000 [Liquid Fertilizer Maturity measurement
system]
• Measuring maturity of liquid type fertil-izer• Manufactured for the first time in the world and can be industrial standard• Can measure “ammonia” and “hydro-gen sulfide” in real time
SPECTRAL PRODUCTS 2015INTRODUCTION
Technical Leader in Spectroscopy World