Front-End Technology & Manufacturing YT LAIEAGLE QUAD SITE

TESTING PROJECTYT Lai

EAGLE TESTER QUAD SITE TESTING PROJECT [ KSXX- 2006 ]

Front-End Technology & Manufacturing YT LAIEAGLE QUAD SITE

TESTING PROJECTYT Lai

EAGLE QUAD SITE TESTING DEVICE : KSXX FAMILY

There are total 9 KSXX Family KS12,KSAD,KS18,KS25,KS28,KS03,KS33,KS3C,KS05 Diffused in AMK5 Fab – 5 inch wafer Gross dice = 2856 Division = MPA Original testing platform :- Single site – QT100 :- 7 KSXX Family

KS18,KS25,KS28,KS03,KS33,KS3C,KS05 KS12 & KSAD unable to test due to QT100 tester limitation for low VOUT VR devices QT100 Statistical Test Time :- 330ms [Short] 450ms [Full]

Single site – QT200 :- ALL 9 KSXX Family KS12,KSAD,KS18,KS25,KS28,KS03,KS33,KS3C,KS05 QT200 Statistical Test Time :- 250ms [Short] 360ms [Full]

Front-End Technology & Manufacturing YT LAIEAGLE QUAD SITE

TESTING PROJECTYT Lai

EAGLE & QT200 KSXX SETUP COMPARISON

QT200 tester (Original tester setup) :-1. EG2001 prober with ADNET2. Single die testing with normal blade pin probe card [BeCu pin]3. Tester + Testhead[U1934] + Loadboard [ S4670c]4. 3 variables factor hardware + probe card – Complicate R&R

Eagle tester (Improvement tester setup) :- 1. EG2001 prober with ADNET

2. Quad site testing with 1X4 epoxy probe card [WR pin]3. Tester + Application board4. 2 variables factor hardware + probe card – Better R&R control

Front-End Technology & Manufacturing YT LAIEAGLE QUAD SITE

TESTING PROJECTYT Lai

EAGLE & QT200 KSXX PROBE CARD COMPARISON

QT200 tester:-1. Single die testing with normal blade pin probe card2. Total 11 blade pins [5 tungsten pin + 6 BK 3mil pin] for

single die probe card3. Cost single die prober card = 11 X US 5.00 = US 554. Cost Quad site blade pin probe card = 4 X US 55 = US 220

Eagle tester :- 1. Quad site testing with 1X4 epoxy probe card2. Cost Quad site epoxy probe card = US 665

Front-End Technology & Manufacturing YT LAIEAGLE QUAD SITE

TESTING PROJECTYT Lai

EAGLE & QT200 TEST TIME COMPARISON

Full Test Statistical Test Eagle Test TimeEagle Quad Site QT200 Single Site Saving % per wafer

KSAD 5 min 30 s 24 min 77%KS33 5 min 22 min 77%

Without Zapping per wafer

Full Test Statistical Test Eagle Test TimeEagle Quad Site QT200 Single Site Saving % per wafer

KSAD 6 min 10 s 28 min 40 s 79%KS33 5 min 30 s 26 min 30 s 79%

With Zapping per wafer

Eagle tester saving average 80% test time Capacity calculation base on 80% test time saving :- 1 X Eagle tester = 5 X QT200 tester

Front-End Technology & Manufacturing YT LAIEAGLE QUAD SITE

TESTING PROJECTYT Lai

EAGLE & QT200 COST COMPARISON

QT200 + EG2001 :-1. US 100K + US 40K = US 140K

Eagle + EG2001 :- 1. [4 SITE] = US 150K + US 40K = US 190K2. [8 SITE] = US 205K + US 40K = US 245K3. [16 SITE] = US 340K + US 40K = US 380K

Comparison 4 Site Eagle Tester :- Testing Capacity 1 X Eagle [4 site] = 5 X QT200 [1 site] 1 X EAGLE [ US190K ] = 5 X QT200 [ 140K X 5 = US 700K] Same capacity 1 EAGLE save = US 700K-190K = US 510K

Front-End Technology & Manufacturing YT LAIEAGLE QUAD SITE

TESTING PROJECTYT Lai

EAGLE VS QT200 SPACING SAVING COMPARISON

Eagle setup dimension L = 115 cm W1 = 90 cm W2 = 100 cm WT = 190 cm Eagle dimension= 0.77 m2

Eagle

EG2001

W1

L

PC

W2

Production / Clean Room Area

Grey Area

WTQT200

EG2001

W1

L

W2

Production / Clean Room Area

Grey Area

WT

QT200 setup dimension L = 115 cm W1 = 90 cm W2 = 100 cm WT = 190 cm QT200 dimension=0.55 m2

TESTING CAPACITY 1 X Eagle = 5 X QT200 4 QT200 SETUP SPACING AREA SAVING 4 QT200 = 4 X [ L X WT ] = 4 X [115 X 190 ] = 8.74 m2

Front-End Technology & Manufacturing YT LAIEAGLE QUAD SITE

TESTING PROJECTYT Lai

EAGLE VS QT200 CORRELATION RESULTS KSAD Map Comparison between QT200 & Eagle

EAGLE_W634168_MAP_21

2828 - 98.9%

QT200_W634168_MAP_21

2832 – 99.1%

Front-End Technology & Manufacturing YT LAIEAGLE QUAD SITE

TESTING PROJECTYT Lai

EAGLE VS QT200 CORRELATION RESULTS KSAD Map Comparison between QT200 & Eagle

EAGLE_W634168_MAP_22

2830 – 99.0%

QT200_W634168_MAP_22

2826 – 98.8%

Front-End Technology & Manufacturing YT LAIEAGLE QUAD SITE

TESTING PROJECTYT Lai

EAGLE VS QT200 CORRELATION RESULTS KS33 Map Comparison between QT200 & Eagle

EAGLE_W63709X_MAP_24

2838 - 99.3%

QT200_W63709X_MAP_24

2840 – 99.3%

Front-End Technology & Manufacturing YT LAIEAGLE QUAD SITE

TESTING PROJECTYT Lai

EAGLE VS QT200 CORRELATION RESULTS KS33 Map Comparison between QT200 & Eagle

EAGLE_W63709X_MAP_25

2832 - 99.1%

QT200_W63709X_MAP_25

2834 – 99.1%

Front-End Technology & Manufacturing YT LAIEAGLE QUAD SITE

TESTING PROJECTYT Lai

EAGLE Advantage

Test Time / Capacity Saving EAGLE 4 time faster test time than QT200 per wafer 1 EAGLE tester = 5 QT200 tester testing capacity

Spacing Capacity Saving 1 EAGLE tester able to save 4 QT200 tester spacing capacity 4 QT200 spacing = 8.74 m2

Cost Saving 1 EAGLE [US 190K] = 5 QT200 [US700K] Cost saving 1 EAGLE = US 510K

Contact improvement on probe card pin life span QT200 - BeCu pin PC [Single dice] = Average 75 wafers EAGLE - BeCu pin Epoxy PC [Quad site] = Test up to 150 wafers EAGLE - In-house built WR pin PC [Quad site] = Test up to 321 wafers