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09/11/2010 1 Synthetic Processes of Nanomaterials Dr Montree Sawangphruk (DPhil) Chemical Engineering, Kasetsart University, Room #1209-5, email:[email protected] http://pirun.ku.ac.th/~fengmrs/ Outline Introduction Formation of Clusters and Nanoparticles from a Supersaturated Vapour Techniques for Cluster Formation Scaling Laws Nanoparticles and Films Produced by Sputtering and Thermal Evaporation and Laser Methods Chemical vapour deposition (CVD) Physical Vapour Deposition (PVD) Atomic Layer Deposition (ALD) Molecular Beam Epitaxy (MBE) Top-down approach Grinding/Milling Lithography Bottom-up approach (Wet Chemistry) Sol-gel process Electrochemical deposition Homework! (a 2-page report)
Transcript

09/11/2010

1

Synthetic Processes of Nanomaterials

Dr Montree Sawangphruk (DPhil)

Chemical Engineering, Kasetsart University, Room #1209-5, email:[email protected]

http://pirun.ku.ac.th/~fengmrs/

Outline

Introduction

Formation of Clusters and

Nanoparticles from a

Supersaturated Vapour

Techniques for Cluster

Formation

Scaling Laws

Nanoparticles and Films Produced

by Sputtering and Thermal

Evaporation and Laser Methods

Chemical vapour deposition

(CVD)

Physical Vapour Deposition

(PVD)

Atomic Layer Deposition (ALD)

Molecular Beam Epitaxy (MBE)

Top-down approach

Grinding/Milling

Lithography

Bottom-up approach (Wet

Chemistry)

Sol-gel process

Electrochemical deposition

Homework! (a 2-page report)

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Formation of Clusters and Nanoparticles

from a Supersaturated Vapor

The sizes of the nanoparticles made by these techniques

cover the entire range from dimers to nanoparticles

which are ≤100 nm in diameter.

The term cluster, as used here, is mainly reserved for

smaller nanoparticles containing fewer than 104 atoms or

molecules.

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Classical Nucleation Theory for Cluster

Formation

Nucleation of new particles from a continuous phase can

occur heterogeneously or homogeneously.

Heterogeneous nucleation from a vapour phase can

occur on foreign nuclei or dust particles, ions or surfaces.

Homogeneous nucleation occurs in the absence of any

foreign particles or ions when the vapour molecules

condense to form embryonic droplets or nuclei.

Classical Nucleation Theory for Cluster

Formation

Classical nucleation theory can be applied to describe the synthesis of nanoparticles in liquids.

This theory is based on the assumption (known as the capillarity approximation) that embryonic clusters of the new phase can be described as spherical liquid drops with the bulk liquid density inside and the vapour density outside.

The free energy of these clusters, relative to the vapour, is the sum of two terms: a positive contribution from the surface free energy and a negative contribution from the bulk free energy difference between the supersaturated vapour and the liquid.

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∆G=-nϕ + σA(n)

nucleus=cluster

σ is the interfacial tension or surface energy per unit area

n is the number of particles

A is the surface area of cluster

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Classical Nucleation Theory for Cluster

Formation

From experiments,

∆G=-nkBT lnS+4πσ(3υ/4π)2/3n2/3

where σ is the interfacial tension or surface energy per

unit area, A is the surface area of the cluster, ʋ is the

volume per molecule in the bulk liquid, kB is the Boltzmann

constant, T is the temperature, and S, the supersaturation, is

S=P/Pe

P is the vapour pressure and Pe is the equilibrium or 'saturation' vapour pressure

at the temperature of the vapour.

Classical Nucleation Theory for Cluster

Formation

The smallest cluster of size n* which can grow with a decrease in free energy is determined from the condition ∂∆G/∂n = 0. It follows that

∆G(n*)=16πσ3υ2/3(kBT ln S)2

n*=32πσ3ʋ2/3(kBT lnS)3

r*=2σʋ/(kBT lnS)

S, the supersaturation, is P/Pe

ʋ is the volume per molecule in the bulk liquid

P is the vapour pressure and Pe is the equilibrium or 'saturation' vapour pressure

at the temperature of the vapour.

Note

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Classical Nucleation Theory for Cluster

Formation

∆G(n*)=16πσ3υ2/3(kBT ln S)2

For S > 1, increasing S reduces the barrier height ∆G(n*)and

the critical size n*, and increases the probability that

fluctuations will allow some clusters to grow large

enough to overcome the barrier and grow into stable

droplets.

Classical Nucleation Theory for Cluster

Formation

Figure 2.1 Free energy of formation as a function of size for several metals for a supersaturation ratio S = 50. Note there is an energy barrier that must be overcome in order to form a stable cluster.

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Classical Nucleation Theory for Cluster

Formation

Note that S can be increased either by increasing P or decreasing Pe.

The pressure P can be increased by increasing the rate at which atoms are placed in the vapour or decreasing the rate at which they leave the region where the particle nucleation and growth is occurring.

The pressure Pe can be decreased by decreasing T since Pe is approximately given by

Pe=P0eL(0)/RT

where the latent heat per mole has been approximated by its zero-temperature value L(0), P0 is a constant, and R is the gas constant.

Classical Nucleation Theory for Cluster

Formation

The rate of homogeneous nucleation J, defined as the number of drops nucleated per cubic centimetre per second, is given by

J=K exp[-∆G(n*)/kBT]

The factor K incorporates both the effective collision rate of vapour molecules with a nucleus of size n* and the departure of the cluster distribution from equilibrium.

A critical supersaturation, Sc, can be defined as the supersaturation at which J = 1 cm–3 s–1. Setting J = 1 cm–3 s–1 in equation above, Sc can be obtained using macroscopic values for the surface tension, liquid density, and Pe.

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Nanoparticles Produced by Sputtering and

Thermal Evaporation and Laser Methods

The Classical Nucleation Theory discusses the

formation and collection of nanoparticles produced from

a supersaturated vapour produced by thermal

evaporation, sputtering, laser methods, etc.

Scaling Laws

Because of the absence of an exact theory for cluster nucleation and growth, scaling laws are useful for determining the onset conditions for cluster formation.

ζ*=(rch)3-q(Tch)1.5-0.25q

where q (0.5 < q < 1) is a parameter determined experimentally from cluster beam measurements in which the nozzle diameter is varied at constant temperature T0, rch = (m/ρ)1/3, Tch = ΔH0/kB, m is the atomic mass, ρ is the density of the solid, and ΔH0

D is the sublimation enthalpy per atom at 0 K.

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Scaling Laws

Empirically it has been found that for: ζ* < 200 no clustering observed

200 < ζ* < 1000 clustering occurs

1000 < ζ* massive condensation occurs with the cluster size > 100 atoms/cluster.

Cluster formation and growth are favoured by decreasing T0and increasing d.

ζ*=(rch)3-q(Tch)1.5-0.25q

Chemical vapor deposition (CVD)

CVD is a chemical process used to produce high-purity,

high-performance solid materials. The process is often

used in the semiconductor industry to produce thin films.

In a typical CVD process, the wafer (substrate) is exposed

to one or more volatile precursors, which react and/or

decompose on the substrate surface to produce the

desired deposit.

Frequently, volatile by-products are also produced, which are removed by gas flow through the reaction chamber.

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CVD

In CVD, the vaporized precursors are introduced into a CVD

reactor and adsorb onto a substance held at an elevated

temperature.

These adsorbed molecules will either thermally decompose or

react with other gases/vapours to form crystals.

The CVD process consists of three steps: (a) mass transport

of reactants to the growth surface through a boundary layer

by diffusion, (b) chemical reactions on the growth surface, and

(c) removal of the gas-phase reaction by-products from the

growth surface.

CVD

Nucleation in the gas phase is homogeneous, whereas

nucleation on the substrate is heterogeneous.

Catalysts, usually transition metal particles such as Fe, Ni,

and Co, are also used in the CVD process.

Strained-induced Stranski−Krastanow growth is used to

produce nanoparticles in the CVD process.

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CVD

A typical CVD process involving five steps: (1) mass transportation of reactants delivered from the gas/liquid source

to the substrate surface;

(2) the adsorption of reactants on the substrate surface;

(3) the chemical reaction on the substrate surface to form the desired film;

(4) desorption of by-products of the chemical reaction from the substrate surface; and

(5) pumping away of the by-products and unreacted reactant.

Watching a CNT Growing by CVD (video)

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CVD (5-min Video)

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Ex. 1 GaN nanotubes were also successfully

produced by CVD.

This reaction was carried out in a conventional furnace with a horizontal quartz tube, where a 4:1 molar mixture of Ga and Ga2O3was placed in an alumina crucible and covered with a porous alumina plate with 3−5 mm diameter channels.

The carbon nanotubes were placed on the porous alumina plate.

The crucible was placed in the hot zone inside the quartz tube and was held in a flowing ammonia atmosphere (400 standard cm3/min) at 1173 K for 1 h.

The Ga2O gas generated from the Ga−Ga2O3 powder mixture flies up toward the region of carbon nanotubes through the porous plate and reacts with the nanotubes and the NH3 gas and produces GaNnanotubes.

GaN nanotubes

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TEM images of the starting carbon nanotube

materials and the resulting GaN nanotubes.

(A) Carbon nanotubes used as starting material and (B) GaN nanorods produced

by CVD.

Substances commonly deposited for Integrated Circuits (ICs)

Polysilicon

Polycrystalline silicon is deposited from silane (SiH4), using the

following reaction:

SiH4 → Si + 2 H2 This reaction is usually performed in LPCVD

systems, with either pure silane feedstock, or a solution of

silane with 70-80% nitrogen. Temperatures between 600 and

650 °C and pressures between 25 and 150 Pa yield a growth

rate between 10 and 20 nm per minute.

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Types of chemical vapor deposition

A number of forms of CVD are in wide use and are frequently referenced in the literature. These processes differ in the means by which chemical reactions are initiated (e.g., activation process) and process conditions.

Classified by operating pressure Atmospheric pressure CVD (APCVD) - CVD processes at atmospheric

pressure.

Low-pressure CVD (LPCVD) - CVD processes at sub-atmospheric pressures. Reduced pressures tend to reduce unwanted gas-phase reactions and improve film uniformity across the wafer. Most modern CVD processes are either LPCVD or UHVCVD.

Ultrahigh vacuum CVD (UHVCVD) - CVD processes at a very low pressure, typically below 10−6 Pa (~10−8 torr). Note that in other fields, a lower division between high and ultra-high vacuum is common, often 10−7 Pa.

Ex. 2 Silicon dioxide

Silicon dioxide can be deposited by several different

processes. Common source gases include silane and

oxygen, dichlorosilane (SiCl2H2) and nitrous oxide (N2O),

or tetraethylorthosilicate (TEOS; Si(OC2H5)4).

The reactions are as follows:

SiH4 + O2 → SiO2 + 2 H2

SiCl2H2 + 2 N2O → SiO2 + 2 N2 + 2 HCl

Si(OC2H5)4 → SiO2 + byproducts

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Ex. 3 Silicon nitride

Silicon nitride is often used as an insulator and chemical

barrier in manufacturing ICs. The following two reactions

deposit nitride from the gas phase:

3 SiH4 + 4 NH3 → Si3N4 + 12 H2 3

SiCl2H2 + 4 NH3 → Si3N4 + 6 HCl + 6 H2

Another two reactions may be used in plasma to deposit

SiNH:

2 SiH4 + N2 → 2 SiNH + 3 H2

SiH4 + NH3 → SiNH + 3 H2

Ex. 4 Metals

CVD processes for molybdenum, tantalum, titanium,

nickel, and tungsten are widely used.

2 MCl5 + 5 H2 → 2 M + 10 HCl

The usual source for tungsten is tungsten hexafluoride,

which may be deposited in two ways:

WF6 →W + 3 F2

WF6 + 3 H2 →W + 6 HF

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Physical Vapour Deposition (PVD)

PVD involves condensation from the vapour phase.

The process does not involve a chemical reaction.

The PVD process is composed of three main steps:

(a) generating a vapour phase by evaporation or sublimation of

the material,

(b) transporting the material from the source to the substrate,

and

(c) formation of the particle and/or film by nucleation and

growth.

Physical Vapour Deposition (PVD)

Different techniques have been used to evaporate the

source such as electron beam, thermal energy, sputtering,

cathodic arc plasma, and pulsed laser.

Si nanowire, GeO2 nanowire, Ga2O3 nanowire, ZnO

nanorod, GaO nanobelt and nanosheet, SnO2 nanowire,

nanoribbon, nanotube, etc., have been synthesized using

PVD.

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Thermal Evaporation

Thermal evaporation consists of two steps: Material is evaporated from a hot source and then condenses on a relatively cold surface.

The most commonly observed thermal evaporation is the evaporation and condensation of water on the lid of the cooking pot.

In film deposition, thermal evaporation usually takes place in a high vacuum system. Because the energy source is purely thermal energy, the equipment setup is relatively simple.

The deposition species are atoms and ions—usually these atoms and ions do not collide with each other on their journey from the source to the substrate due to high vacuum.

Thermal Evaporation

The advantages of this method are the high deposition

rate and large substrate size.

The downside is that the materials to be deposited are

limited to those with low sublimation or evaporation

temperatures.

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Sputtering

Whereas the mechanism for evaporation is thermal

energy, sputtering is based on momentum transfer.

During sputtering, the high-energy ions bombard the

target surface and transfer an amount of kinetic energy

that far exceeds the chemical bonding strength of the

target materials.

Therefore, the source material is ‗‗decomposed‘‘ or

‗‗sputtered‘‘ from the target and deposited on the

substrate.

Schematics of dc sputtering PVD process

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PVD animation

Atomic Layer Deposition (ALD)

Definition of ALD

Brief history of ALD

ALD process and equipments

ALD applications

Summary

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Definition of ALD

ALD is a method of applying thin films to various substrates with atomic scale precision.

Similar in chemistry to chemical vapor deposition (CVD), except that the ALD reaction breaks the CVD reaction into two half-reactions, keeping the precursor materials separate during the reaction.

ALD film growth is self-limited and based on surface reactions, which makes achieving atomic scale deposition control possible.

By keeping the precursors separate throughout the coating process, atomic layer thickness control of film grown can be obtained as fine as atomic/molecular scale per monolayer.

Brief History of ALD

Introduced in 1974 by Dr. Tuomo Suntola and co-workers

in Finland to improve the quality of ZnS films used in

electroluminescent displays.

Recently, it turned out that ALD also produces outstanding

dielectric layers and attracts semiconductor industries for

making High-K dielectric materials.

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ALD Process and Equipments

Releases sequential precursor gas pulses to deposit a film one layer at a time on the substrate.

The precursor gas is introduced into the process chamber and produces a monolayer of gas on the wafer surface. A second precursor of gas is then introduced into the chamber reacting with the first precursor to produce a monolayer of film on the wafer surface.Two fundamental mechanisms: Chemisorption saturation process Sequential surface chemical reaction process

Example: ALD cycle for Al2O3 deposition

Since each pair of gas pulses (one cycle) produces exactly one monolayer of film, the thickness of the resulting film may be precisely controlled by the number of deposition cycles.

ALD Process and Equipments

• Example: ALD cycle for Al2O3 deposition (Step 1a)

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ALD Process and Equipments

• Example: ALD cycle for Al2O3 deposition (Step 1b)

ALD Process and Equipments

4/25/06EE 518 Class Presentation50

• Example: ALD cycle for Al2O3 deposition (Step 1c)

Ref: "Atomic Layer Deposition," Cambridge NanoTech Inc., 24 April 06. <http://www.cambridgenanotech.com/>.

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ALD Process and Equipments

• Example: ALD cycle for Al2O3 deposition (Step 2a)

ALD Process and Equipments

• Example: ALD cycle for Al2O3 deposition (Step 2b)

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ALD Process and Equipments

• Example: ALD cycle for Al2O3 deposition (Step 2c)

ALD Process and Equipments

• Example: ALD cycle for Al2O3 deposition (after 3 cycles)

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ALD Process and Equipments

Four main types of ALD reactors

Closed system chambers (most common) The reaction chamber walls are designed to effect the

transport of the precursors.

• Open system chambers

• Semi-closed system chambers

• Semi-open system chambers

Schematic of a closed ALD system

The Verano 5500™A 300-mm ALD system by Aviza Technology, Inc.

ALD Applications

High-K dielectrics for CMOS

Semiconductor memory (DRAM)

Deposition in porous structures

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Candidates for High-K dielectrics

Film Precursors

Al2O3 Al(CH)3, H2O or O3

HfO2 HfCl4 or TEMAH, H2O

ZrO2 ZrCl4, H2O

ALD Applications

High-K dielectrics for CMOS

• Reduces leakage current

• Faster switching speed

• Cooler transistors

Summary of ALD

Advantages Stoichiometric films with large area uniformity and 3D

conformality.

Precise thickness control.

Low temperature deposition possible.

Gentle deposition process for sensitive substrates.

Disadvantages Deposition Rate is slower than CVD.

Number of different material that can be deposited is fair compared to MBE.

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Molecular Beam Epitaxy

Method of depositing a monocrystalline film.

Greek root: epi means ―above‖ and taxis means ―ordered‖.

Grown from: gaseous or liquid precursors.

Substrate acts as a seed crystal: film follows that !

Two kinds: Homoepitaxy (same composition) and

Heteroepitaxy (different composition).

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Epitaxy

Homoepitaxy:

To grow more purified films than the substrate

To fabricate layers with different doping levels

Heteroepitaxy:

To grow films of materials of which single crystals cannot be grown.

To fabricate integrated crystalline layers of different materials

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Epitaxy

Vapor Phase Epitaxy (VPE)

SiCl4(g) + 2H2(g) ↔ Si(s) + 4HCl(g) (at 12000C)

#VPE growth rate: proportion of the two source gases

Liquid Phase Epitaxy (LPE)

Czochralski method (Si, Ge, GaAs)

# Growing crystals from melt on solid substrates

# Compound semiconductors (ternary and quaternary III-Vcompounds on GaAs substrates)

Molecular Beam Epitaxy (MBE)

# Evaporated beam of particles

#Very high vacuum (10-8 Pa); condense on the substrate

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Molecular Beam Epitaxy

Source: William R. Wiley Environmental Molecular Sciences Laboratory, Pacific Northwest National Laboratory, Richland, WA62

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Molecular Beam Epitaxy: Idea !

Objective: To deposit single crystal thin films !

Inventors: J.R. Arthur and Alfred Y. Chuo (Bell Labs, 1960)

Very/Ultra high vacuum (10-8 Pa)

Important aspect: slow deposition rate (1 micron/hour)

Slow deposition rates require proportionally better

vacuum.

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Molecular Beam Epitaxy: Process

Ultra-pure elements are heated in separate quasi-

knudson effusion cells (e.g., Ga and As) until they begin

to slowly sublimate.

Gaseous elements then condense on the wafer, where

they may react with each other (e.g., GaAs).

The term ―beam‖ means the evaporated atoms do not

interact with each other or with other vacuum chamber

gases until they reach the wafer.

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Example: In2O3 on Y-stabilized ZrO2(100) by MBE

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Top-Down Approach

Milling is a typical top-down method in making nanoparticles.

Etching/lithography

The biggest problem with top-down approach is the imperfection of the surface structure. It is well known that the conventional top-down techniques such as lithography can cause significant crystallographic damage to the processed patterns.

For example, nanowires made by lithography is not smooth and may contain a lot of impurities and structural defects on surface.

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Top-Down Approach

Such imperfections would have a significant impact on physical properties and surface chemistry of nanostructures and nanomaterials, since the surface over volume ratio in nanostructures and nanomaterials is very large.

The surface imperfection would result in a reduced conductivity due to inelastic surface scattering, which in turn would lead to the generation of excessive heat and thus impose extra challenges to the device design and fabrication.

Ball milling

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Grinding media

Stainless steel –very effective due to their high density

and low contamination of the material being processed,

Stainless steel balls are unsuitable for some applications,

including: Black powder and other flammable materials require

non-sparking lead, antimony, brass, or bronze grinding media

Contamination by iron of sensitive substances such as ceramic

raw materials.

Alumina (90–95% alumina) is widely used in the ceramic

industry to grind clay bodies, frits, glazes and other

ingredients.

Ball Mill

A ball mill is a type of grinder, a cylindrical device , used to

grind materials into extremely fine powder for use in mineral

dressing processes, paints, pyrotechnics, and ceramics.

Ball mills rotate around a horizontal axis, partially filled with

the material to be ground plus the grinding medium. Different

materials are used as media, including ceramic balls and

stainless steel balls.

High-quality ball mills are potentially expensive and can grind

mixture particles to as small as 5 nm, enormously increasing

surface area and reaction rates.

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Nanolithography: Top-Down Approach

Nanolithography has been used to advance areas of modern science and technology such as the production of integrated circuits, information storage devices, video screens, microelectromechanical systems (MEMS), miniaturized sensors, microfluidic devices, biochips, photonic bandgap structures, and diffractive optical elements.

Generally, nanolithography can be divided into two categories based on the patterning strategy used: parallel replication and serial writing.

Parallel replication methods such as photolithography, contact printing, and nanoimprint lithography are useful for high throughput, large-area patterning.

Nanolithography: Top-Down Approach

However, most of these methods can only duplicate

patterns, which are predefined by serial writing

approaches and thus cannot be used to arbitrarily

generate different patterns (that is, one photomask leads

to one set of feature sizes for a given wavelength).

In contrast, serial writing methods, such as scanning probe

lithography (SPL) can create patterns with high resolution

and precise registration, but they are limited in

throughput.

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Parallel Replication

Schematic of the photolithography fabrication process.

Parallel Replication

Parallel replication methods duplicate predefined patterns,

which are the mask reticles in photolithography or the

molds in contact printing and nanoimprint lithography.

Photolithography is the oldest top-down method. It uses

light shining through the masked area on a photoresist

coated substrate (a Si wafer).

The substrate is covered by a photoresist, which is the

key to the photolithography process.

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Parallel Replication

The photoresist is an organic-based compound.

The limitation of the photolithography technique is the

dimension of patterns.

The size of pattern that can be produced is up to the

wavelength of the light, which limited to about 37 nm. The

process can be done only on a hard flat surface and in a

provided facility.

Microcontact printing

Schematic illustrating the transfer of alkanethiol molecules from an elastomeric stamp to a substrate.

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Nanoimprint lithography

Nanoimprint lithography is a high-throughput, high-resolution parallel

patterning method in which the surface pattern of a stamp is replicated

into a material by mechanical contact and 3D material displacement.

Imprint lithography has two steps: imprint and pattern transfer.

AFM Lithography Among the nanofabrication techniques available, scanning probe lithography

(SPL) is another highly promising approach at the nanometer scale writing using sharp probe tips with an atomic force microscope (AFM).

The advantages of AFM lithography are several-fold. First, it is simple, can be carried out under ambient conditions, and does not require sophisticated machinery.

Second, AFM lithography can enable nanofabrication with feature sizes at or below the 10-nm level.

Third, an AFM is capable of high-resolution, real-space imaging and can ensure alignment accuracy at the nanometer level for overlayers.

The speed and throughput of AFM have also experienced significant improvements over the years with parallel operations of probe-tip arrays.

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AFM Lithography

Thermomechanical writing by AFM: (a) AFM image of a

sub-100-nm dot array written on polycarbonate using an

electrically heated sharp-cantilever tip with 35-mW, 4-ms

pulses and (b, c) schematics of IBM‘s Millipede.

Bottom-up approach

The colloidal dispersion is a good example of bottom-up approach in the synthesis of nanoparticles.

Bottom-up approach is often emphasized in nanotechnology literature, though bottom-up is nothing new in materials synthesis.

Typical material synthesis is to build atom by atom on a very large scale, and has been in industrial use for over a century.

Bottom-up approach refers to the build-up of a material from the bottom: atom-by-atom, molecule-by-molecule, or cluster-by-cluster.

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Bottom-up approach

Bottom-up approach also promises a better chance to

obtain nanostructures with less defects, more

homogeneous chemical composition, and better short

and long range ordering.

This is because the bottom-up approach is driven mainly

by the reduction of Gibbs free energy, so that

nanostructures and nanomaterials such produced are in a

state closer to a thermodynamic equilibrium state.

Sol-gel Process

Sol-gel consists of two words (sol and gel). A sol is defined as a dispersion of solid particles having the size below 1 µm in a liquid media (i.e., water, acetone, acetonitrile, and ethanol) where the Brownian motions suspend the colloidal particles while a gel is a state where both liquid and solid are dispersed in each other, leading to a solid network, which contains liquid components.

The sol-gel process is a facile wet-chemical technique, which is typically used in the field of nanomaterials.

It can be used for producing nanocolloids of metals, and metal oxides.

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Nanoscale dispersion (video)

(Real-time Video of nanoparticles suspended in water)

Nanoparticles produced using Sol-gel process

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Milestones of Sol-gel Process

Back to the mid-1800s, Ebelman and Graham made silica gel

(SiO2) by using the simple hydrolysis reaction of tetraethyl

orthosilicate (TEOS), Si(OC2H5)4, under the mild acidic

reaction.

Afterwards, this reaction became known as the first reaction

of sol-gel process.

In the 1950s and 1960s, Roy employed the sol-gel process in

producing the highly homogeneous colloidal gels of ceramic

oxides, which involved Al, Si, Ti, Zr, etc., that could not be made

by using the conventional ceramic powder methods.

Milestones of Sol-gel Process

In the meantime, the colloidal silica powder named Du Pont‘s colloidal Ludox spheres was marketed for the first time from the Iler‘s pioneering work in the silica chemistry.

Stober et al. (1992) had in addition done more challenging work using the sol-gel process in controlling the morphology and size of colloids yielding the so-called Stober spherical silica powder.

Unquestionably, this finding has led to current frontier research in the field of nanoscience and nanotechnology known as the bottom-up approach for which nanomaterials are produced from chemical monomer precursors.

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Sol-gel Deposition

There are four steps in general for the sol-gel coating process as follows:

(i) the desired colloidal nanomaterials are firstly dispersed in a liquid media to form a sol.

(ii) the deposition of the sol suspension produces coatings on the substrates by spraying, dipping, dropping or spinning.

(iii) the particles in the sol are polymerized through the removal of the stabilizing components and produce a gel in a state of a continuous network.

(iv) the final heat treatments pyrolyze the remaining organic or inorganic components and form an amorphous or crystalline nanomaterials on the desired substrates.

Sol-gel Technology

Owing to the simplicity and low cost of the sol-gel process,

sol-gel technology has significantly impacted on the fields of

engineering ceramics and glass.

There are many current companies all around the world based

on the sol-gel technology such as Advanced Industrial

Materials (Canada), Aspen Systems, Inc. (USA), Gaematech. Co.,

LTD (Korea), Heptagon (Finland), Inorgtech (UK), NTera LTD

(Ireland), NTC Nanotech Coatings GmbH (Germany), SolSens

Ltd. (Switzerland), Sol-Gel Technologies (Israel), and Sustainable

Technologies Australia Ltd (Australia).

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Sol—Gel Processing of Silica

The sol-gel process for preparing silica and silicates from metal alkoxide

precursors is reviewed and compared to the processing of aqueous

silicates as described by Iler.

Sol-gel processing combines control of composition and microstructure at

the molecular level with the ability to shape material in bulk, powder, fiber,

and thin-film form.

In sol-gel processing of metal alkoxides, hydrolysis reactions replace an

alkoxide group with a hydroxyl group.

Subsequent condensation reactions involving the hydroxyl groups produce

siloxane bonds.

Sol—Gel Processing of Silica

The structure of the evolving silicates is a consequence of the successive

polymerization, gelation, aging, drying, and heating steps.

Often the structures of polymers, gels, and dried gels (either xerogels or

aerogels) may be characterized on the 1-20-nm length scale by a mass or

surface fractal dimension.

On longer length scales, dried gels are micro- or mesoporous, with surface

areas often exceeding 800 m2/g.

During heating, these gels undergo continued polymerization, structural

relaxation, and viscous sintering; dense amorphous silica essentially

indistinguishable from its conventionally prepared counterpart ultimately results.

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Sol-gel process

•Aerogel is derived from a

gel in which the liquid

component of the gel has

been replaced with a gas.

•The result is an

extremely low-density

solid, with a notable

effectiveness as a thermal

insulator.

A xerogel is a solid formed from a gel by

drying with unhindered shrinkage.

It usually retains high porosity and enormous

surface area along with very small pore size

(1-10 nm).

A sol is a colloidal suspension of solid particles

in a continuous liquid medium.

Sol-gel Process

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Hydrolysis

Hydrolysis: The hydrolysis process may start with a

mixture of metal alkoxides and water in a solvent (usually

alcohol) at ambient or slightly higher temperature. An

acid or basic catalyst may be added to increase the

reaction rate.

Polymerisation

Polymerisation: At this stage, neighbouring molecules are

condensed, water and alcohol are removed from them

and the metal–oxide bonds are formed. The polymer

network grows to colloidal dimensions in the liquid state

(sol).

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Gelification

Gelification: In this stage, the polymer network keeps

growing until a three dimensional network is formed

through the ligand. The system becomes slightly stiff,

which is a typical feature of a gel upon removal of the sol

solvent. The solvent, water and alcohol molecules remain,

however, inside the gel pores. The addition of smaller

polymer units to the main network continues

progressively with gel ageing.

Drying

Drying: Water and alcohol are removed at mild

temperatures (<470 K), giving rise to hydroxylated metal

oxides with a residual organic content. If the aim is to

prepare an aerogel with high specific surface and low

density, the solvent must be removed under supercritical

conditions.

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Dehydration

Dehydration: This stage is performed between 670 and

1070K to remove the organic residue and chemically

bonded water. The result is a metal oxide in glass or

microcrystalline form, with microporosity higher than 20–

30%.

Densification

Densification: At temperatures above 1270K we can

obtain dense materials, due to the reaction between the

various components of the precursor in the previous

stage.

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Mechanisms

Silver Nanostructures

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Electrochemical deposition

Electrochemical deposition is a low-cost and simple technique, which is well known as an effective method for producing coatings of metals and alloys by reducing metal ions from aqueous electrolytes with an external applied potential or current.

It is used for example to improve corrosion resistance or specific physical and mechanical properties.

Traditional applications have been in the aerospace, automotive, oil and gas, and chemical processing industries.

Electrochemical deposition

An interesting early paper found in the literature by

Cavallaro and Bolognesi was concerned with the

electrochemical deposition of Zn crystals.

More interestingly, not only metals, but also metal oxides

including semiconductors and insulators can be produced

by this technique.

This is very applicable to the field of nanotechnology,

which is often involved with advanced semiconductor

materials.

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Electrochemical deposition

Electrochemical deposition

The electrochemical deposition is based on an

electrochemical reaction forming a solid phase from liquid

phase or even sometimes from gas phase (e.g., O2

bubbling gas).

solidM

electrodezeM solution

Z

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Electrochemical Deposition

WERECE

v

M+ A- M+

e-WERE

CE

A-

The principle “when solutions containing H2O, H2O2, NO3- or O2 are subject to

electrolysis at negative potentials, reduction to OH- occurs raising the local pH at the electrode surface. Precipitation of hydroxide, followed by dehydration occurs to form oxide films.”

Metal oxides

2M+ + 2OH- → 2MOH → M2O +H2O

M3+ + 3OH- → M(OH)3 → MO2 +H2O+1/2H2

i

E VS SCE

CE = Counter electrode

RE = Reference electrode

WE =Working electrode

V = Applied Potential

Electrodeposited thin films

Fig. 1 (a) Pr2O3/eosin Y@GCE; (b) CeO2/eosin Y@ITO; (c) Pr2O3/eosin Y@BDDE

Fig. 2 AFM images of (a) Pr2O3/eosin Y@BDDE and (b) Pr2O3@BDDE

(a) (b) (c)

The addition of eosin Y leads to the nanostructured metal oxides

5µm 30µm

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Applications of electrodeposited thin films

Organic-inorganic hybrid materials promise both the superior carrier mobility of inorganic semiconductors and the processability of organic materials

(Ref: Science,1999, 286,945 - 947).

Three-Way Catalyst Solid Fuel Cell Gas Sensor

Organic-inorganic light-emitting devices

Self-assembly Synthesis of Nanomaterials at Solid-

Liquid Interfaces

C.E. W.E.

W.E.

Ag+SDS

Liquid-Solid Interface

Ag nanowire

Langmuir 2006, 22, 9427 -9430; Langmuir 2005, 21, 9618-9624

Ag used as a catalyst

to convert ethylene

to ethoxide

Ref: Nature Materials 7, 236-241 (2008).

Silver Textile Factory

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Homework!

A 2-page Report

Topics are related to ‗Syntheses of Nanomaterials‘

Template of the report

Synthesis of ........

Methodology Processes and Principles......

Results: SEM, TEM, AFM (images)

References

Sources: ISI web of science and Scopus

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References Nanomaterials and Nanochemistry by C. Brechignac, P. Houdy, and M.

Lahmani, Springer (2006)

Nanoscale Devices by G.F. Cerofolini, Springer (2009) Chapters 1-3 and 9-12

Nanocomposite Science and Technology by P.M. Ajayan, L.S. Schadler, and P.V. Braun (2003) Chapters 1-3

Handbook of Nanoscience, Engneering, and Technology (second edition)by W. A. Goddard III, D. W. Brenner, S. E. Lyshevski, and G.J. Iafrate, CRC Press (2007) Chapter 1

Carbon Nanotubes Properties and Applications by M. J. O’Connell, CRC Press (2006) Chapters1, 4, 7, and 9

Nanotechnology: An Introduction to Nanostructuring Techniques by M. Kohler and W Fritzsche, WILEY-VCH (2004) Chapter 1


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