Wally wins without any effort.
Move your own stuff if you know what’s good for you.
ECE Clean Room Safety ECE Clean Room Safety
Many hazardous materials exist in Many hazardous materials exist in the clean roomthe clean room
The safety of everyone working in The safety of everyone working in the clean room is top prioritythe clean room is top priority
Everyone working in the clean room Everyone working in the clean room must know the hazards and how to must know the hazards and how to deal with themdeal with them
Material Safety Data Sheet - MSDSMaterial Safety Data Sheet - MSDS
Mandated by the Federal governmentMandated by the Federal government Employees must have accessEmployees must have access All hazardous materials All hazardous materials MUSTMUST have a MSDS have a MSDS
associated with itassociated with it MSDS details all hazards, safety requirements, MSDS details all hazards, safety requirements,
exposure limits, spill or leakage procedures, etc. exposure limits, spill or leakage procedures, etc. CARC Clean Room MSDS sheets are located in my CARC Clean Room MSDS sheets are located in my
officeoffice You can view them in my office or you can get You can view them in my office or you can get
them on-line from each manufacturer of the them on-line from each manufacturer of the hazardous materialhazardous material
The safety office and Brocker Health Center do The safety office and Brocker Health Center do NOTNOT have all of the MSDS sheets for the entire have all of the MSDS sheets for the entire University. Each lab is responsible for their MSDS University. Each lab is responsible for their MSDS
Material Safety Data Sheet – MSDS
showing hazardous and required
protective equipment
Shuttle Stop
CAMERON HALLCAMERON HALL
Main entrance
Second floor
entrance
CAMERON – Best entrance to the CAMERON – Best entrance to the clean roomclean room
Craver Road
Parking Lot L-16
second floor
entrance
ECE Clean Room SafetyECE Clean Room Safety
John’s office
Second floor
entrance to
Cameron
Manual pull fire alarm
CAMERON’s Clean Room.CAMERON’s Clean Room.
The clean room is The clean room is located on the 2located on the 2ndnd floor, room 201F, floor, room 201F, of the CARC of the CARC building.building.
Access to the clean Access to the clean room is restricted.room is restricted.
Access is through a Access is through a UNC – Charlotte ID UNC – Charlotte ID card reader.card reader.
Front window of clean room
Front door to clean
room
Card reader door lock
Engr 1202 students sign in each Engr 1202 students sign in each time they enter the clean room on time they enter the clean room on
the clipboard shown belowthe clipboard shown below
ECE Clean Room SafetyECE Clean Room Safety Fire alarm includes strobe Fire alarm includes strobe
light and loud alarmlight and loud alarm If the alarm sounds, you If the alarm sounds, you
must leave the buildingmust leave the building If an emergency condition If an emergency condition
exists, it is OK to leave the exists, it is OK to leave the building with your clean building with your clean room garmentsroom garments
If there appears to be no If there appears to be no emergency – remove clean emergency – remove clean room garments before room garments before leaving the buildingleaving the building
Most alarms are false Most alarms are false alarms but all alarms must alarms but all alarms must be treated as a serious be treated as a serious conditioncondition
Fire alarm inside clean room
ECE Clean Room SafetyECE Clean Room Safety
Rear clean room exit Rear fire
alarm
ECE Clean Room SafetyECE Clean Room Safety
Inside the clean Inside the clean room is a safety room is a safety stationstation1.1. Deluge showerDeluge shower
2.2. HF safety instructionsHF safety instructions
3.3. Burn and HF salveBurn and HF salve
4.4. First aid kitFirst aid kit
5.5. Chemical spill kitChemical spill kit
6.6. Eye washEye wash
7.7. Hose washHose wash
Liquid NitrogenLiquid Nitrogen
Portable liquid
nitrogen tank
Hazards of Liquid NitrogenHazards of Liquid Nitrogen
Extremely cold, about -180Extremely cold, about -18000CC Can cause immediate human tissue Can cause immediate human tissue
damage – frost bitedamage – frost bite Leakage or spill in a closed area can Leakage or spill in a closed area can
cause the oxygen to be displaced cause the oxygen to be displaced with resulting asphyxiationwith resulting asphyxiation
Deionized (DI) WaterDeionized (DI) Water
Resistivity meter
City water feed
Supply and
return DI water to
CR
Carbon filters
UV sterilizer
DI water polisher,
set 1
DI water polisher,
set 2
Recirculation water pump
Gas Cylinders inside CARC Gas Cylinders inside CARC Clean RoomClean Room
Gas pressure regulators
Hazardous Gases used in Hazardous Gases used in MicroelectronicsMicroelectronics
Hazardous gases in the Hazardous gases in the CARC Clean Room – all CARC Clean Room – all high purityhigh purity
1.1. NitrogenNitrogen2.2. OxygenOxygen3.3. HeliumHelium4.4. ArgonArgon5.5. HydrogenHydrogen6.6. AmmoniaAmmonia7.7. MethaneMethane8.8. ChlorineChlorine9.9. AcetyleneAcetylene10.10. Carbon DioxideCarbon Dioxide11.11. Carbon MonoxideCarbon Monoxide12.12. FreonFreon
Hazardous gases NOT in Hazardous gases NOT in the CARC Clean Roomthe CARC Clean Room
1.1. SilaneSilane2.2. PhosphinePhosphine3.3. ArsineArsine4.4. DiboraneDiborane5.5. CyanideCyanide6.6. FluorineFluorine
Hazardous Chemicals in the CARC Hazardous Chemicals in the CARC Clean RoomClean Room
AcidsAcids1.1. Hydrofluoric AcidHydrofluoric Acid2.2. Sulfuric AcidSulfuric Acid3.3. Acetic AcidAcetic Acid4.4. Nitric AcidNitric Acid5.5. Hydrochloric AcidHydrochloric Acid6.6. Chromic AcidChromic Acid7.7. Phosphoric AcidPhosphoric Acid
BasesBases1.1. Photoresist Developer Photoresist Developer
(NaOH)(NaOH)2.2. Potassium HydroxidePotassium Hydroxide3.3. Ammonium HydroxideAmmonium Hydroxide
OxidizersOxidizers1.1. Hydrogen PeroxideHydrogen Peroxide
Flammable solventsFlammable solvents1.1. AcetoneAcetone2.2. MethanolMethanol3.3. Trichloroethyene-TCETrichloroethyene-TCE4.4. IsopropanolIsopropanol5.5. EthaneEthane
Light SensitiveLight Sensitive1.1. Positive photoresistPositive photoresist2.2. Negative photoresistNegative photoresist
Chemical StorageChemical Storage
Chemical resistant plastic cabinets
Flammable storage inside CARC Flammable storage inside CARC Clean RoomClean Room
Metal fire-proof cabinets for flammables
Student working with chemicalsStudent working with chemicals
Fume exhaust laminar
flow work station
Chemical goggles
Chemical gloves
Face shield
Correctly labeled
containersFront
exhaust panels
Anyone not wearing eye protection when working with chemicals will be removed from the clean room
UNC – Charlotte UNC – Charlotte Microelectronics Clean RoomMicroelectronics Clean Room
Electrical and Computer Electrical and Computer EngineeringEngineering
Clean Room Gowning Clean Room Gowning ProcedureProcedure
Reasons for gowning.Reasons for gowning. To keep the clean room free of To keep the clean room free of
contaminationcontamination The human body is a bad contaminate for The human body is a bad contaminate for
microelectronicsmicroelectronics– Particles and dirtParticles and dirt– Dead skin from your bodyDead skin from your body– Hair particlesHair particles– Skin oilsSkin oils– Pollen, dust, moisture from your breathPollen, dust, moisture from your breath
As a protection from hazardous materials in As a protection from hazardous materials in the Clean Room.the Clean Room.– Some protection from dangerous chemicalsSome protection from dangerous chemicals– Protection of clothing from chemical stainsProtection of clothing from chemical stains
Tacky Mats are located in the Tacky Mats are located in the gowning area of the clean room.gowning area of the clean room.
Tacky Mats are set Tacky Mats are set in place to remove in place to remove any dirt particles any dirt particles from the bottom of from the bottom of your shoes before your shoes before entering the entering the gowning area and gowning area and clean room.clean room.
Tacky Mats should Tacky Mats should be replaced when be replaced when dirtydirty
Coat HangersCoat Hangers
Coat hangers are a Coat hangers are a available to hang available to hang your coat, book your coat, book bag, or anything bag, or anything else that needs to else that needs to be hung up.be hung up.
LockersLockers The lockers are available The lockers are available
to store any valuable items to store any valuable items that aren’t permitted in the that aren’t permitted in the clean room.clean room.
You can take into the clean You can take into the clean room notebooks, pens or room notebooks, pens or markers, and camerasmarkers, and cameras
You can NOT take into the You can NOT take into the clean room books, back clean room books, back packs, pencils, food, packs, pencils, food, drinks, coats, hats, IPods, drinks, coats, hats, IPods, MP3 players, cigarettes, MP3 players, cigarettes, tobacco, hand lotion, etc.tobacco, hand lotion, etc.
The gown dressing order. The gown dressing order.
1.1. Face MaskFace Mask
2.2. Safety GlassesSafety Glasses
3.3. HoodHood
4.4. CoverallCoverall
5.5. Shoe covers/bootsShoe covers/boots
6.6. Clean room glovesClean room gloves
Choosing the right size.Choosing the right size. Coveralls, hoods, and Coveralls, hoods, and
boots are in lockers by boots are in lockers by sizesize
ComfortComfort– For coveralls choose For coveralls choose
one size larger than one size larger than what you normally what you normally would wear.would wear.
Boots are available in Boots are available in large and Xlarge only.large and Xlarge only.
Hoods are available in Hoods are available in medium and large medium and large only.only.
Face Mask - FirstFace Mask - First The face mask protects The face mask protects
the clean room from the clean room from any contaminants that any contaminants that may come from your may come from your breath.breath.
A metal strip on top of A metal strip on top of the mask is formed the mask is formed over the nose.over the nose.
Elastic ear loops Elastic ear loops secure the mask.secure the mask.
The mask is pulled The mask is pulled below the chin.below the chin.
Masks are disposed of Masks are disposed of after use.after use.
Safety Goggles - SecondSafety Goggles - Second
Safety Goggles are Safety Goggles are worn to protect worn to protect your eyes from any your eyes from any hazardous hazardous chemicals or chemicals or particles that may particles that may inflict damage to inflict damage to your eyes.your eyes.
Hood Hood
The Hood protects The Hood protects the clean room the clean room from any particles from any particles from your head from your head and hair.and hair.
The hood covers The hood covers the entire head.the entire head.
The hood is worn The hood is worn inside the coverall.inside the coverall.
Coverall - FourthCoverall - Fourth
Coveralls cover the Coveralls cover the entire body. They entire body. They provide partial provide partial protection from protection from hazardous hazardous chemicals chemicals
Coveralls are used Coveralls are used to protect the clean to protect the clean room from any room from any particles generated particles generated by the body.by the body.
Shoe covers/boots - FifthShoe covers/boots - Fifth
Boots are worn to Boots are worn to protect the clean protect the clean room from any dirt room from any dirt that may be on that may be on your shoes.your shoes.
All snaps must be All snaps must be used to prevent used to prevent tripping over tripping over dangling straps.dangling straps.
Clean Room Gloves - LastClean Room Gloves - Last Clean room gloves are Clean room gloves are
available in three sizes, small, available in three sizes, small, medium, and largemedium, and large
Clean room latex gloves Clean room latex gloves provide some protection for provide some protection for your hands from hazardous your hands from hazardous materials. They are materials. They are NOTNOT chemical gloves.chemical gloves.
Gloves are used to protect the Gloves are used to protect the clean room from any dirt, clean room from any dirt, dust, or oils that may be on dust, or oils that may be on your hands.your hands.
Clean Room gloves are Clean Room gloves are discarded whenever they are discarded whenever they are torn or dirty.torn or dirty.
Special non – latex gloves are Special non – latex gloves are available fro people that are available fro people that are allergic to latex.allergic to latex.
Completed GownCompleted Gown
After all gowning is complete you can now enter the clean room.After all gowning is complete you can now enter the clean room. You are not allowed into the clean room unless you are completely gownedYou are not allowed into the clean room unless you are completely gowned
Returning hoods, coveralls, and boots to the Returning hoods, coveralls, and boots to the proper lockers and stations.proper lockers and stations.
All coveralls, All coveralls, hoods, and boots hoods, and boots are returned are returned by by sizesize to the to the appropriate locker.appropriate locker.
Gloves and the Gloves and the face mask are face mask are discarded in the discarded in the trash container.trash container.
ConclusionConclusion
You should now know…You should now know…
– Where the Clean Room is.Where the Clean Room is.– About CARC’s Clean Room.About CARC’s Clean Room.– What is an MSDSWhat is an MSDS– Reasons for gowning.Reasons for gowning.– What are the tacky mats.What are the tacky mats.– Where are the coat hangers.Where are the coat hangers.– Where are the lockers.Where are the lockers.– The gown dressing order.The gown dressing order.– How to find the safety shower, eye wash, and hand sprayHow to find the safety shower, eye wash, and hand spray– How and where to store and use chemicalsHow and where to store and use chemicals– Where dangerous gases are storedWhere dangerous gases are stored– What hazardous materials might be in the clean roomWhat hazardous materials might be in the clean room– What to do if there is an accidentWhat to do if there is an accident
Safety Test Safety Test
Read all safety notes under Engr Read all safety notes under Engr 1202 guidelines at the web site1202 guidelines at the web site
25 questions, multiple choice25 questions, multiple choice Must pass the safety test to be able Must pass the safety test to be able
to work in the clean roomto work in the clean room