Hitachi High-Tech Science Corporation’s

FT-110A XRF for Coating Thickness QC (Eastern Applied Research, Inc. is responsible for the contents of this presentation.

Certain material is used with the permission of Hitachi High-Tech Science Corporation.)

Seiko Connection

Hitachi High-Tech Science Corporation continues the Seiko Nano-

Technologies XRF tradition, and Eastern Applied Research, Inc. is

a distributor of Hitachi High-Tech Science Corporation products.

High Precision

Innovation Reliability

Longevity

Building on Tradition

Users of the Seiko SFT-3200 and SFT-9200 series will

recognize many of the same benefits (and more) in the Hitachi FT-110A

SFT-3200

SFT-9200 Hitachi FT-110A

FT110A Top Benefits

1. High Throughput, due to excellent autofocus option

2. Micro-Spot coating thickness measurements (electronics, etc)

3. Measure Up to 5 Layers with standards-less FP

4. Easy Positioning by unique wide view image option

5. Simplifies Testing of complex sample designs

Specifications

Full Specifications: http://www.easternapplied.com/hitachi-FT110A-xrf-analyzer

Measurement Direction Top-Down

Measurable Elements Ti (22) – Bi (83)

Atmosphere Air

X-ray System Small, air cooled tube, W Target

Tube Current Maximum 1000uA (variable)

Primary Filter Automatic switching, on/off

Detector Technology Proportional counter

Collimator Size (beam size) 0.1 and 0.2 mm (options available)

Maximum Sample Size 19.68” x 15.74” x 5.90” (W-D-H)

Withstand Load 22lbs (10kg)

Motorized XY Stage Drive 9.84x7.87” (optional movement)

Repeatability +/- 5um

Speed 1.57”/sec (40mm/sec)

Make It Your XRF

Motorized

XY Stage

Fixed

XY Stage

Enclosed

Chamber

Slotted

Chamber

OR

OR

Collimator B

0.05, 0.1, 0.2 &

0.025x0.4mm

X-ray Tube 4 holes

Collimator A

0.1 & 0.2mm

X-ray Tube 2

holes

OR

Make It Your XRF

Narrow

View

Lens

Wide

View

Lens

Meas. Sample

Dual

Images

Meas. Sample

Narrow

View

Lens Single

Image OR

With

Standard

Samples

Standard

Free Method No Need OR

Auto

Focus

Laser

Pointer OR

Highlighted Features

Auto-Focus

Wide View Optics (Dual Image)

Standard-less FP Method

X-ray

tube

CCD camera

When the height within the

measurement range differs, the

camera automatically focuses,

thus allowing rapid measuring.

Distance measurement is done at

the time of auto focus therefore

measurement results are

corrected in response to distance.

Automatic

Focus

before focus

after focus

Auto-Focus

Auto-Focus range is 3.14” (80mm)

Time is within 3 seconds

70% reduction in time from conventional XRF

Focusing

Click Click

Does not focus when a sample is set Focusing

Auto-Focus

Automatic

vertical drive

of camera

after distance

measurement

Z Range

5.9”

X-ray

box Camera axis

range 3.14”

X-ray

Generator

Table

Plate

Mirror

X-rays

Sample 1

X-ray

box

X-ray

Generator

X-rays

Sample 2

Optic

Axis

Automatic downward drive of

camera head after distance

measurement

Autofocus Function Auto Approach Function

Focal length Au (mm) Ni (mm) Au Error Ni Error

Optimum 0.131 2.152 - -

+10mm 0.128 2.188 2.67% 1.65%

+20mm 0.126 2.199 3.82% 2.13%

+40mm 0.126 2.191 3.82% 1.76%

+60mm 0.132 2.127 0.76% 1.17%

+80mm 0.138 2.054 4.96% 4.50%

Effects of distance correction function on each focal point

(Average of 20 repetitions)

The error within 5% has been achieved for a standard distance within 80mm

Auto-Focus

Why Add Wide-View Observation?

Efficiency

Wide View

Save operator time and potential mistakes

Streamline the process of sample positioning when measuring smaller

points within a larger area (ie populated circuit board)

Performance:

Imaging Time: Max 20 seconds

Resolution: 200mm

Position Accuracy: ±2mm

Digital Zoom: 0.2～5.7X

Wide View Narrow View

Sample

7.87”

200mm

9.84”

250mm

0.20”

5.3mm

0.27”

7.1mm

Wide field observation image

Narrow field observation image

First, acquire a wide field image of the entire sample stage.

Then you select a narrow field image from the wide field image

Wide View

Step 1:

capture entire sample image

Wide field image

By capturing a maximum

9.84 x 7.87 ” sample image,

multiple point measurements

and positioning of large

sample is made easy.

Wide field image

Step 2:

expanded wide field image

Scrolling the mouse easily

expands the wide field

images, such as for

measurement locations

Narrow field image

Step 3:

verify micro areas

After moving the stage from

the wide field image to the

measurement location, set

detailed positioning of

microscopic area within the

narrow field image.

Wide View

As a result, a sensitivity coefficient must be obtained when creating

conditions and by periodically measuring standard samples

Proportional Counter detection systems are the most popular approach

to maximize throughput for coating measurements.

• Large peak overlap

(separation is essential)

• Effects of temperature change is large

due to use of a gas

However…

Disadvantage of Prop-Count could be

Combined spectrum of elements A and B

F(x) = αf (x)＋βg (x)

F(x)

αf (x) βg (x)

Channel

Film Analysis FP

NOW, the Hitachi FT-110A includes a newly developed separation process that

combines with the characteristics of the proportional counter and enables

measuring by a sensitivity coefficient registered beforehand.

Improved performance by omitting prior operations

In order to acquire a sensitivity coefficient before

the Hitachi FT-110A…standards and time were required

Film Analysis FP

Accuracy and reproducibility of 20 repetitions measuring Sn thin film

Time 10 seconds 40 seconds

Standards Sn: 1.01mm

Average 1.08mm 1.09mm

SD 0.027 0.011

Coef of Var 2.11% 1.01%

Range 0.09mm 0.03mm

Accuracy 6.4% 7.5%

The newly improved Film Analysis FP method contributes to performance

but cannot be employed if accuracy is not maintained

Method Voltage Current Collimator Filter

Film FP 50kV 625mA 0.1mm OFF

Film Analysis FP

Application CV (%)

1st Layer Au (1.03um) 1.07

2nd Layer Ni (4.96um) 1.13

Base Cu

1st Layer Sn (4.83um） -3.7

Base Cu

Examples of Standardless FP Applications

Conditions:

• 0.1mm Collimator

• Primary Filter Off

• Readings : 30

The Hitachi FT-110A offers newly developed thin film FP software

that allows for standard-less analysis

of up to ten (10) elements in a maximum of five (5) layers

Standardless FP

Slotted Chamber enables measurement of large printed

circuit boards up to 23.6” (W), 23.6” (D), 0.59” (H)

Table Plate

27.5” (W) x 23.6” (D)

Chamber Door

Chassis Cover

Slot

1.37”

Slotted Chamber

Standard, Enclosed, Design enables measurement of

samples up to 19.6” (W), 15.7” (D), 5.9” (H).

0.66”

0.39”

0.31”

Example Configurations

of the Hitachi FT-110A

Configurations

Fixed

XY Stage

Laser Pointer Standard Free

No Need + +

X-ray Tube

Collimator A

0.1 & 0.2mm

Enclosed

Chamber

Meas. Sample

Narrow

View

Lens

Single Image

+ + +

Fastener Industry

Zn/Fe

Ni/Cu

Ni/Brass

Cu/Fe

NiP/Fe

NiP/Brass

Bolts

Nuts

Screws

Springs

ZnNi/Fe Zn/Fe

Fixed

XY Stage

Auto Focus Standard Free

No Need

Meas. Sample

Narrow

View

Lens

Single Image

+ + +

Enclosed

Chamber Collimator A

0.1 & 0.2mm

+ +

Automotive Parts

Al/Fe 10µm / Substrate

200µm / Substrate Cr/Fe 0.25µm / Substrate

25µm / Substrate

Au/Ni [Cu] 0.05µm / Substrate

8µm / Substrate Ni/Cu 0.5µm / Substrate

30µm / Substrate

Ag/Cu [Ni] 0.5µm / Substrate

70µm / Substrate Ni/CuZn 0.5µm / Substrate

30µm / Substrate

Ag/Al 2µm / Substrate

70µm / Substrate Ni/CuSn 0.5µm / Substrate

30µm / Substrate

Cd/Fe 1µm / Substrate

15µm / Substrate Ni/Fe 0.5µm / Substrate

40µm / Substrate

Cu/Fe 1µm / Substrate

30µm / Substrate NiP/Cu 0.5µm / Substrate

30µm / Substrate

Cu/CuZn 1µm / Substrate

30µm / Substrate NiP/CuZn 0.5µm / Substrate

30µm / Substrate

Cu/Epoxy 1µm / Substrate

30µm / Substrate NiP/CuSn 0.5µm / Substrate

30µm / Substrate

Single Layer Coating

Au/Ni/Cu

Au/Ni/CuSn

Au/Pd-Ni/Ni/CuSn

Sn-Pb/Ni/CuSn

Ag/Ni/CuSn

Ag/Cu

Meas. Sample

Narrow

View

Lens

Wide

View

Lens

Dual Images Motorized

XY Stage

Laser Pointer With Standard

Samples

+ + +

Enclosed

Chamber X-ray Tube

Collimator B

0.05, 0.1, 0.2 &

0.025x0.4mm

+ +

Electronics

Cr/Ni/Cu/Fe

Cr/Ni/Cu/PLASTIC

Ni/Cu/Fe

Cu/Plastic

Cu/Fe

Au/Ni/PLASTIC

Fixed

XY Stage

Auto Focus

Meas. Sample

Narrow

View

Lens

Single Image

+ +

X-ray Tube Collimator A

0.1 & 0.2mm

Standard Free

No Need

Enclosed

Chamber

+ + +

Appliance Industry

SnPb/Ni/Cu

SnPb/Cu

Sn/Cu

Au/Ni/Cu

Slotted

Chamber

Auto Focus Motorized

XY Stage

With Standard

Samples

+ + +

Meas. Sample

Narrow

View

Lens

Wide

View

Lens

Dual Images

X-ray Tube

Collimator B

0.05, 0.1, 0.2 &

0.025x0.4mm

+ +

Printed Circuit Board

Au/Ni/Brass

SnPb/Cu

Ag/Cu

Cu/Fe

Ni/Cu/Fe

Motorized

XY Stage

Laser Pointer With Standard

Samples

Collimator A

0.1 & 0.2mm Enclosed

Chamber

Meas. Sample

Narrow

View

Lens

Single Image

+ + + + +

Small Electronics

Sn/Cu

Sn/Cu/Fe

Sn/Ni/Al

Ag/Ni/Brass

Ag/Ni/Al

Enclosed

Chamber

Fixed

XY Stage

Meas. Sample

Narrow

View

Lens

Single Image Laser Pointer With Standard

Samples

Collimator A

0.1 & 0.2mm

+ + + + +

Large Electronics

Au/Ni/Cu

Au/Ni/Fe

SnPb/CuSn

SnPb/Ni/CuSn

NiP/Fe

Ni/Fe

Enclosed

Chamber

Fixed

XY Stage

Meas. Sample

Narrow

View

Lens

Wide

View

Lens

Dual Images Laser Pointer With Standard

Samples Collimator B

0.05, 0.1, 0.2 &

0.025x0.4mm

+ + + + +

Components

Au/Ni/Cu 0.05µm / 2µm / Substrate

3µm / 6µm / Substrate

Au/Pd/Ni 0.05µm / 2µm / Substrate

3µm / 6µm / Substrate

Ag/Ni/Cu 0.5µm / 2µm / Substrate

10µm / 6µm / Substrate

Ag/Ni/CuSn 0.5µm / 2µm / Substrate

10µm / 6µm / Substrate

Ni/Cu/Fe 0.5µm / 2µm / Substrate

20µm /20µm / Substrate

Ni/Cu/Plastic 0.5µm / 2µm / Substrate

20µm /20µm / Substrate

NiP/Cu/Fe 0.5µm / 2µm / Substrate

20µm /20µm / Substrate

NiP/Cu/Zn 0.5µm / 2µm / Substrate

20µm /20µm / Substrate

Multi-Layer Coatings

Cr/Ni/Cu/Plastic

Enclosed

Chamber

Fixed

XY Stage

Meas. Sample

Narrow

View

Lens

Single Image Laser Pointer Standard Free

No Need

X-ray Tube

Collimator A

0.1 & 0.2mm

+ + + + +

Automotive Design

Au/Ni/CuZn

Au/Pd/Ni/SnPb

Au/Pt/Ni/SnPb

Ag/Ni/Cu/SnPb

Pt/Ni/CuZn

Enclosed

Chamber

Fixed

XY Stage

Meas. Sample

Narrow

View

Lens

Single Image Laser Pointer With Standard

Samples X-ray Tube

Collimator A

0.1 & 0.2mm

+ + + + +

Jewelry

SnPb/Cu 0.5µm / Substrate

30µm / Substrate

SnPb/CuSn 0.5µm / Substrate

30µm / Substrate

SnPb/Ni/CuSn 0.5µm / 2µm / Substrate

15µm / 5µm / Substrate

ZnNi/Fe 5 µm / Substrate

15µm / Substrate

SnZn/Fe 2 µm / Substrate

15µm / Substrate

Alloy Coatings

Contact Info

FT-110A Info and Literature:

http://www.easternapplied.com/hitachi-FT110A-xrf-analyzer

Contact Eastern Applied Research Inc

for literature, demonstrations, discussions:

http://www.easternapplied.com/

716-201-1115 ~ sales@easternapplied.com