2/15/2002 MEMS 2002 conference reportOshatz and Scheeff

MEMS 2002 Conference Report

Daryl Oshatz and Mark Scheeff

more information at:www-eng.lbl.gov/~dw/if/ideas/mems

2/15/2002 MEMS 2002 conference reportOshatz and Scheeff

Working definition of MEMS(Micro-Electro-Mechanical Systems)

•Integrated systems of sensing, actuation and computation

•Usually use a batch fabrication, lithographic process

•Usually based on a silicon wafer (LIGA is one exception)

•Remove material from wafer OR

•Build a structure on top of that wafer

•Milli scale, not nano-scale

•Can generally still use bulk properties of material

2/15/2002 MEMS 2002 conference reportOshatz and Scheeff

Conference Overview•500ish attendees, mostly academic•3 days in Las Vegas•New field, reasonably approachable people•Single track:

•Papers in the morning•Posters in the afternoon

•The Food was lousy

2/15/2002 MEMS 2002 conference reportOshatz and Scheeff

Conference Topics•biomedical mems •fluidic components and microsystems, •biomedical/fluidic BioMEMS •power mems •acoustics and sensors •technology/material/packaging ·optical mems •actuators •RF/wireless •micro chemical analysis systems

2/15/2002 MEMS 2002 conference reportOshatz and Scheeff

What we Saw, 10,000 ft view

• We got used to saying “Wow”• If you can think of it, its probably been done

– (but maybe as an isolated piece)– (but maybe poorly, or in an expensive fashion)– (and probably not driven by a specific app)

• Significant maturation in last 3-5 years

2/15/2002 MEMS 2002 conference reportOshatz and Scheeff

Where are MEMS coming from?

• Universities making cool devices• Companies bring talent in house for specific

product needs• Companies will make something for you

– Memscap, Corning, Applied MEMS etc.

2/15/2002 MEMS 2002 conference reportOshatz and Scheeff

A few devices from the labMicro-pumps, pneumatic single use power supplies, beam steering units, wireless communication MEMS, wireless powered mems, fluidic mixer,reaction chambers, hinge mechanisms, 3D mems, self assembling (via solder) mems, microelectrode arrays, microneedle arrays (claim: no pain!), chemicalsensors, resonators, wings with tiny check-valves, thermoacoustic refrigerator, rotary motors, linear “stepper” motors, high-frequency filters, opticalswitches, cantilever data storage, microcombustors, micro-turbines, pressure sensors (absolute and relative), microphones, stress sensor, laser cavity tuners.

2/15/2002 MEMS 2002 conference reportOshatz and Scheeff

A few devices from Industry•Pressure sensors, particularly for small applications or high temp environments.

•Mass flow sensors, based on hot wire anemometers

•Acceleration sensors, usually for vehicle air bag deployment

•Rate gyros, usually for vehicle stability control. Many designs

•Infrared imaging sensor for room temp sensing

•Digital Micromirror device from TI

•Tiny valves

2/15/2002 MEMS 2002 conference reportOshatz and Scheeff

Funding (North American)

•DARPA•NIH

•NSF

•corporations

2/15/2002 MEMS 2002 conference reportOshatz and Scheeff

Directions in MEMS

“This stuff is so cool, why can’t I buy it”–Packaging difficult–Needs to be application driven–Need to design a whole system–Promise of CMOS batch process gives way to sometimes specialized work.–Not as cheap as you’d like…

2/15/2002 MEMS 2002 conference reportOshatz and Scheeff

Some Highlights – a broad range of technology is out there

• Electronic Fountain Pen – the only functional MEMS system being carried around in someone’s pocket at the conference

• Led-Spec – Flaky but clever prototype for spectroscopic detection of drinking water contaminants using on-chip glow discharge

• Hybrid Living/Non-Living Devices – muscle-MEMS, nano-stepper motor powered by and ATP synthase molecule.

2/15/2002 MEMS 2002 conference reportOshatz and Scheeff

Electronic Fountain PenGunther Waibel, HSG-IMIT - Germany

2/15/2002 MEMS 2002 conference reportOshatz and Scheeff

LED-SpEC(liquid electrode spectral emission chip) Chester G. Wilson, Univ. of Wisconsin, Madison

• Water from sample used as anode and cathode (no wear of electrodes)

• Water and impurities are sputtered into glow discharge in air at atmosphere

• Optical fiber brings signal out to pager sized spectrometer

2/15/2002 MEMS 2002 conference reportOshatz and Scheeff

Opportunities•Focus on systems with a funding source and end-users in mind

–For our own needs?–As demonstration of important tech?

•Leverage existing skills to bring something to the table

–Packaging–Integrating electronics with sensors

2/15/2002 MEMS 2002 conference reportOshatz and Scheeff

Opportunities

•An LBNL Microsystems Applications Group?•Dovetails with “molecular foundry”, nano-everything, mesoscale machining? •Exploit the space between a simple, flaky prototype and a fully functional product

2/15/2002 MEMS 2002 conference reportOshatz and Scheeff

Some Contacts

• Prof. Liwei Lin (Co-director of BSAC) is ready for us to make the next move – “tell me what you want”

• SANDIA – Chris Dyck RF Microsystems group has extended an invitation for a group of LBNL folks to take a tour of the Albuquerque facilities

• Business cards and enthusiasm were flowing…

2/15/2002 MEMS 2002 conference reportOshatz and Scheeff

Questions for the Group

• What’s the path forward?– A major commitment, investment in a program,

buy credibility?– Incremental commitment, proposals, interns?

• In house work? Collaborations?• Why would someone work with us?• How would we develop MEMS skills?