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CMOS VLSIDigital Design Slide 1
CMOS VLSI Design
Digital Design
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CMOS VLSIDigital Design Slide 2
Overview
Physical principles
Combinational logic
Sequential logic
Datapath Memories
Trends
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CMOS VLSIDigital Design Slide 3
Dopants
Silicon is a semiconductor
Pure silicon has no free carriers and conducts poorly
Adding dopants increases the conductivity
Group V: extra electron (n-type) Group III: missing electron, called hole (p-type)
As SiSi
Si SiSi
Si SiSi
B SiSi
Si SiSi
Si SiSi
-
+
+
-
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CMOS VLSIDigital Design Slide 4
nMOS Operation
Body is commonly tied to ground (0 V)
When the gate is at a low voltage:
P-type body is at low voltage
Source-body and drain-body diodes are OFF No current flows, transistor is OFF
n
p
GateSource Drain
bulk Si
SiO2
Polysilicon
nD
0
S
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CMOS VLSIDigital Design Slide 5
Transistors as Switches
We can view MOS transistors as electricallycontrolled switches
Voltage at gate controls path from source to drain
g
s
d
g = 0
s
d
g = 1
s
d
g
s
d
s
d
s
d
nMOS
pMOS
OFFON
ONOFF
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CMOS VLSIDigital Design Slide 6
CMOS Inverter
A Y
0
1
A Y
NDA Y
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CMOS VLSIDigital Design Slide 7
Inverter Cross-section
Typically use p-type substrate for nMOS transistors
Requires n-well for body of pMOS transistors
n
p substrate
p
n well
A
YGND VDD
n p
SiO2
n diffusion
p diffusion
polysilicon
metal1
nMOS transistor pMOS transistor
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CMOS VLSIDigital Design Slide 8
Inverter Mask Set
Transistors and wires are defined bymasks
Cross-section taken along dashed line
GND VDD
Y
s strate ta ell tanM transistor M transistor
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CMOS VLSIDigital Design Slide 9
Fabrication Steps
Start with blank wafer
Build inverter from the bottom up
First step will be to form the n-well
Cover wafer with protective layer of SiO2 (oxide) Remove layer where n-well should be built
Implant or diffuse n dopants into exposed wafer
Strip off SiO2
p substrate
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CMOS VLSIDigital Design Slide 10
Oxidation
Grow SiO2 on top of Si wafer
900 1200 C with H2O or O2 in oxidation furnace
p substrate
SiO2
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CMOS VLSIDigital Design Slide 11
Photoresist
Spin on photoresist
Photoresist is a light-sensitive organic polymer
Softens where exposed to light
p substrate
SiO2
Photoresist
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CMOS VLSIDigital Design Slide 12
Lithography
Expose photoresist through n-well mask
Strip off exposed photoresist
p substrate
SiO2
Photoresist
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CMOS VLSIDigital Design Slide 13
Etch
Etch oxide withhydrofluoric acid (HF)
Seeps through skin and eats bone; nasty stuff!!!
Only attacks oxide where resist has been exposed
p substrate
SiO2
Photoresist
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CMOS VLSIDigital Design Slide 14
Strip Photoresist
Strip off remaining photoresist
Use mixture of acids called piranah etch
Necessary so resist doesnt melt in next step
p substrate
SiO2
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CMOS VLSIDigital Design Slide 15
n-well
n-well is formed with diffusion or ion implantation
Diffusion
Place wafer in furnace with arsenic gas
Heat until As atoms diffuse into exposed Si Ion Implanatation
Blast wafer with beam ofAs ions
Ions blocked by SiO2, only enter exposed Si
n well
SiO2
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CMOS VLSIDigital Design Slide 16
Simplified Design Rules
Conservative rules to get you started
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CMOS VLSIDigital Design Slide 17
Complementary CMOS
Complementary CMOS logic gates
nMOSpull-down network
pMOSpull-up network
a.k.a. static CMOS
pMOSpull-upnetwork
output
inputs
nMOSpull-downnetwork
Pull-up OFF Pull-up ON
Pull-down OFF Z (float) 1
Pull-down ON 0 X (crowbar)
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CMOS VLSIDigital Design Slide 18
Example: NAND3
Horizontal N-diffusion and p-diffusion strips
Vertical polysilicon gates
Metal1 VDD rail at top
Metal1 GND rail at bottom 32 P by 40 P
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CMOS VLSIDigital Design Slide 19
I-V Characteristics
In Linear region, Ids depends on
How much charge is in the channel?
How fast is the charge moving?
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CMOS VLSIDigital Design Slide 20
Channel Charge
MOS structure looks like parallel plate capacitorwhile operating in inversion
Gate oxide channel
Qchannel = CV C = Cg = IoxWL/tox = CoxWL
V = Vgc Vt = (Vgs Vds/2) Vt
+ +
-ty dy
+
Vgd
g t
+ +
s rc
-
Vgs-
dr i
Vds
ch l-
Vg
Vs Vd
g
+ +
-ty dy
W
L
t x
SiO2 g t xid(g d i s l t r, Iox = 3.9)
polysilicongate
Cox = Iox / tox
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CMOS VLSIDigital Design Slide 21
Carrier velocity
Charge is carried by e-
Carrier velocityvproportional to lateral E-fieldbetween source and drain
v= QE Q called mobility
E = Vds/L
Time for carrier to cross channel:
t= L / v
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CMOS VLSIDigital Design Slide 22
nMOS Linear I-V
Now we know
How much charge Qchannel is in the channel
How much time teach carrier takes to cross
channel
ox 2
2
ds
ds gs t ds
ds gs t ds
QIt
W VC V V V
L
VV V V
Q
F
!
!
!
ox=W
F
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CMOS VLSIDigital Design Slide 23
Example
Example: a 0.6 Qm process from AMI semiconductor
tox = 100
Q = 350 cm2/V*s
Vt = 0.7 V Plot Ids vs. Vds
Vgs = 0, 1, 2, 3, 4, 5
Use W/L = 4/2 P
14
2
8
3.9 8.85 10350 120 /
100 10ox
W W WC A V
L L L F Q Q
y ! ! !
0 1 2 3 4 50
0 .5
1
1 .5
2
2 .5
Vds
Ids
(mA)
Vgs = 5
Vgs = 4
Vgs = 3
Vgs
= 2
Vgs = 1
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CMOS VLSIDigital Design Slide 24
Capacitance
Any two conductors separated by an insulatorhavecapacitance
Gate to channel capacitor is very important
Creates channel charge necessary for operation Source and drain have capacitance to body
Across reverse-biased diodes
Called diffusion capacitance because it is
associated with source/drain diffusion
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CMOS VLSIDigital Design Slide 25
Gate Capacitance
Approximate channel as connected to source
Cgs = IoxWL/tox = CoxWL = CpermicronW
Cpermicron is typically about 2 fF/Qm
+ +
-ty y
ti t i
( i s l t r, I . I )
lysilict
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CMOS VLSIDigital Design Slide 26
Diffusion Capacitance
Csb, Cdb Undesirable, calledparasiticcapacitance
Capacitance depends on area and perimeter
Use small diffusion nodes Comparable to Cg
for contacted diff
C g for uncontacted
Varies with process
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CMOS VLSIDigital Design Slide 27
RC Delay Model
Use equivalent circuits forMOS transistors
Ideal switch capacitance and ON resistance
Unit nMOS has resistance R, capacitance C
Unit pMOS has resistance 2R, capacitance C Capacitance proportional to width
Resistance inversely proportional to width
kg
s
d
g
s
d
kCkC
kC
R/k
kg
s
d
g
s
d
kC
kC
kC
2R/k
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CMOS VLSIDigital Design Slide 28
Introduction
Chips are mostly made of wires called interconnect
In stick diagram, wires set size
Transistors are little things under the wires
Many layers of wires Wires are as important as transistors
Speed
Power
Noise Alternating layers run orthogonally
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CMOS VLSIDigital Design Slide 29
Wire Capacitance
Wire has capacitance per unit length
To neighbors
To layers above and below
Ctotal = Ctop Cbot 2Cadj
layer n
layer n
layer n-
Cadj
Ctop
Cbot
ws
t
h1
h2
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CMOS VLSIDigital Design Slide 30
Lumped Element Models
Wires are a distributed system Approximate with lumped element models
3-segment T-model is accurate to 3% in simulation L-model needs 100 segments for same accuracy! Use single segment T-model forElmore delay
C
R
C/N
R/N
C/N
R/N
C/N
R/N
C/N
R/N
R
C
L-model
R
C/2 C/2
R/2 R/2
C
N segments
T-model T-model
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CMOS VLSIDigital Design Slide 31
Crosstalk
A capacitor does not like to change its voltageinstantaneously.
A wire has high capacitance to its neighbor.
When the neighbor switches from 1-> 0 or 0->1,the wire tends to switch too.
Called capacitive couplingorcrosstalk.
Crosstalk effects
Noise on nonswitching wires Increased delay on switching wires
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CMOS VLSIDigital Design Slide 32
Coupling Waveforms
Aggressor
Victim (undriven): 50%
Victim (half size driver): 16%
Victim (equal size driver): 8%
Victim (double size driver): 4%
t(ps)
0 200 400 600 800 1000 1200 1400 1800 2000
0
0.3
0.6
0.9
1.2
1.5
1.8
Simulated coupling forCadj =Cvictim
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CMOS VLSIDigital Design Slide 33
Introduction
What makes a circuit fast?
I = C dV/dt -> tpd w (C/I) (V
low capacitance
high current small swing
Logical effort is proportional to C/I
pMOS are the enemy!
High capacitance for a given current Can we take the pMOS capacitance off the input?
Various circuit families try to do this
B
A
11
4
4
Y
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CMOS VLSIDigital Design Slide 34
Pseudo-nMOS
In the old days, nMOS processes had no pMOS
Instead, use pull-up transistor that is always ON
In CMOS, use a pMOS that is always ON
Ratio issue Make pMOS about effective strength of
pulldown network
Vout
Vin
16/2
P/2
Ids
load
.
.6
.
1.2 1.
1.8
.
.6
.
1.2
1.
1.8
P
24
P 4
P
14
Vin
Vout
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CMOS VLSIDigital Design Slide 35
Dynamic Logic
Dynamicgates uses a clocked pMOS pullup
Two modes:precharge and evaluate
1
2A Y4/
2/A
Y1
1
AYJ
St tic Ps - M S Dy ic
J Pr charg Eval at
Y
Pr charg
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CMOS VLSIDigital Design Slide 36
Pass Transistor Circuits
Use pass transistors like switches to do logic
Inputs drive diffusion terminals as well as gates
CMOS Transmission Gates: 2-input multiplexer
Gates should be restoring
A
B
S
S
S
Y
A
B
S
S
S
Y
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CMOS VLSIDigital Design Slide 37
Sequencing
Combinational logic
output depends on current inputs
Sequential logic
output depends on current and previous inputs Requires separating previous, current, future
Called state ortokens
Ex: FSM, pipeline
CL
clk
in out
clk clk clk
CL CL
PipelineFinite State Machine
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CMOS VLSIDigital Design Slide 38
Sequencing Overhead
Use flip-flops to delay fast tokens so they movethrough exactly one stage each cycle.
Inevitably adds some delay to the slow tokens
Makes circuit slower than just the logic delay Called sequencing overhead
Some people call this clocking overhead
But it applies to asynchronous circuits too
Inevitable side effect of maintaining sequence
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CMOS VLSIDigital Design Slide 39
Sequencing Elements
Latch: Level sensitive
a.k.a. transparent latch, D latch
Flip-flop: edge triggered
A.k.a. master-slave flip-flop, D flip-flop, D register Timing Diagrams
Transparent
Opaque
Edge-trigger
D
l
p
atch
clk clk
D
clk
D
(latch)
(fl p)
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CMOS VLSIDigital Design Slide 40
Latch Design
Buffered output
No backdriving
Widely used in standard cells
Very robust (most important)
- Rather large
- Rather slow (1.5 2 FO4 delays)- High clock loading
J
J
Q
DX
J
J
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CMOS VLSIDigital Design Slide 41
Sequencing Methods
Flip-flops
2-Phase Latches
Pulsed Latches
Flip-Flops
Flop
Latch
Flop
clk
J1
J2
Jp
clk clk
atch
atch
Jp
Jp
J1
J1
J2
2
-Phas
Transpar
nt
atch
s
P
ls
atch
s
inati nal ! ic
inati
nal
! ic
inati
nal ! ic
inati
nal
!ic
atch
atch
Tc
Tc/2
tnonov
" rlapt
nonov" rlap
tpw
Half-
ycl#1 Half-
ycl
#1
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CMOS VLSIDigital Design Slide 42
Summary
Flip-Flops:
Very easy to use, supported by all tools
2-Phase Transparent Latches:
Lots of skew tolerance and time borrowing Pulsed Latches:
Fast, some skew tol & borrow, hold time risk
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CMOS VLSIDigital Design Slide 43
Full Adder Design I
Brute force implementation from eqns
out ( , , )
S A B C
C MAJ A B C
!
!
ABC
S
Cout
MAJ
ABC
A
B BB
A
C SC
CC
B BB
A A
A B
C
B
A
CBA A B C
CoutC
A
A
BB
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CMOS VLSIDigital Design Slide 44
Carry-Skip Adder
Carry-ripple is slow through all N stages
Carry-skip allows carry to skip over groups of n bits
Decision based on n-bit propagate signal
Cin
S4:1
P4:1
A4:1 B4:1
S $ :5
P8:5
A8:5 B8:5
S12:9
P12:9
A12:9 B12:9
S16:13
P16:13
A16:13 B16:13
CoutC4 1
0
C8
1
0
C12 1
0
1
0
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CMOS VLSIDigital Design Slide 45
Tree Adder
If lookahead is good, lookahead across lookahead!
Recursive lookahead gives O(log N) delay
Many variations on tree adders
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CMOS VLSIDigital Design Slide 46
Memory Arrays
MemoryArrays
Random Access Memory Serial Access Memory Content Addressable Memory(CAM)
Read/Write Memory
(RAM)(Volatile)
Read OnlyMemory
(ROM)(Nonvolatile)
Static RAM(SRAM)
Dynamic RAM(DRAM)
Shift Registers Queues
First InFirst Out(FIFO)
Last InFirst Out(LIFO)
Serial InParallel Out
(SIPO)
Parallel InSerial Out
(PISO)
Mask ROM ProgrammableROM
(PROM)
ErasableProgrammable
ROM(EPROM)
ElectricallyErasable
ProgrammableROM
(EEPROM)
Flash ROM
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CMOS VLSIDigital Design Slide 47
Array Architecture
2n words of 2m bits each
If n >> m, fold by 2k into fewerrows of more columns
Good regularity easy to design
Veryhigh density if good cells are used
row
decoder
column
decoder
n
n-kk
2m bits
columncircuitry
bitline conditioning
memory cells:2n-k rows x2m % k columns
bitlines
wordlines
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CMOS VLSIDigital Design Slide 48
6T SRAM Cell
Cell size accounts for most of array size Reduce cell size at expense of complexity
6T SRAM Cell Used in most commercial chips
Data stored in cross-coupled inverters Read:
Precharge bit, bit_b Raise wordline
Write: Drive data onto bit, bit_b Raise wordline
bit bit_b
word
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CMOS VLSIDigital Design Slide 49
SRAM Sizing
High bitlines must not overpower inverters duringreads
But low bitlines must write new value into cell
bit bit b
med
A
weak
strong
med
A b
word
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CMOS VLSIDigital Design Slide 50
Decoders
n:2n decoder consists of 2n n-input AND gates
One needed for each row of memory
Build AND from NAND or NOR gates
Static CMOS Pseudo-nMOS
word0
word1
word2
word3
A0A1
A1
word
A01 1
1/2
2
4
8
1&
word
A0
A1
1
1
11
4
8word0
word1
word2
word3
A0A1
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CMOS VLSIDigital Design Slide 51
Decoder Layout
Decoders must be pitch-matched to SRAM cell
Requires very skinny gates
GND
VDD
word
buffer inverterNAND gate
A0A0A1A2A3 A2A3 A1
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CMOS VLSIDigital Design Slide 52
Sense Amplifiers
Bitlines have many cells attached
Ex: 32-kbit SRAMhas 256 rows x 128 cols
128 cells on each bitline
tpdw
(C/I)(
V Even with shared diffusion contacts, 64C ofdiffusion capacitance (big C)
Discharged slowly through small transistors(small I)
Sense amplifiers are triggered on small voltageswing (reduce (V)
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CMOS VLSIDigital Design Slide 53
Queues
Queues allow data to be read and written at differentrates.
Read and write each use their own clock, data
Queue indicates whether it is full or empty
Build with SRAM and read/write counters (pointers)
Queue
rite lk
riteData
Read lk
ReadData
EMPTY
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CMOS VLSIDigital Design Slide 54
CAMs
Extension of ordinary memory (e.g. SRAM)
Read and write memory as usual
Also match to see which words contain a key
AM
adr data/key
atch
read
write
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CMOS VLSIDigital Design Slide 55
10T CAM Cell
Add four match transistors to 6T SRAM
56 x 43 P unit cell
bit bit_b
word
match
cell
cell_b
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CMOS VLSIDigital Design Slide 56
CAM Cell Operation
Read and write like ordinary SRAM
For matching:
Leave wordline low
Precharge matchlines Place key on bitlines
Matchlines evaluate
Miss line
Pseudo-nMOS NOR of match lines Goes high if no words match
row
decoder
weak
missmatch0
match1
match2
match3
clk
column circuitry
CAM cell
address
data
read/write
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CMOS VLSIDigital Design Slide 57
ROM Example
4-word x 6-bit ROM
Represented with dot diagram
Dots indicate 1s in ROM
Word 0: 010101
Word 1: 011001
Word 2: 100101
Word 3: 101010
ROMArray
2:4DEC
A0A1
Y0Y1Y2Y3Y4Y5
weakpseudo-nMOS
pullups
Looks like 6 4-input pseudo-nMOS NORs
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CMOS VLSIDigital Design Slide 58
PLAs
AProgrammable LogicArrayperforms any functionin sum-of-products form.
Literals: inputs & complements
Products / Minterms: AND of literals
Outputs: OR ofMinterms
Example: Full Adder
out
s abc abc abc abc
c ab bc ac
!
!
AND Plane OR Plane
abc
abc
abc
abc
ab
bc
ac
sa b cout
c
Minter
'
s
Inputs Outputs
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CMOS VLSIDigital Design Slide 59
PLA Schematic & Layout
AND Plane OR Plane
abc
abc
abc
abc
ab
bc
ac
s
a b c
outc
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CMOS VLSIDigital Design Slide 60
Ideal nMOS I-V Plot
180 nm TSMC process
Ideal Models
F = 155(W/L) QA/V2
Vt = 0.4 V
VDD = 1.8 V
Ids (QA)
Vds0 0.3 0.6 0.9 1.2 1.5 1.8
100
200
300
400
Vgs = 0.6Vgs = 0.9
Vgs = 1.2
Vgs = 1.5
Vgs = 1.8
0
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CMOS VLSIDigital Design Slide 61
Simulated nMOS I-V Plot
180 nm TSMC process
BSIM 3v3 SPICE models
What differs?
Less ON current No square law
Current increases
in saturation
Vds
0 0.3 0. 0. 1.2 1.
Vgs 1.8
Ids (QA)
0
50
100
150
200
250
Vgs
1.5
Vgs 1.2
Vgs 0.
Vgs 0.
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CMOS VLSIDigital Design Slide 62
Velocity Saturation
We assumed carrier velocity is proportional to E-field
v= QElat = QVds/L
At high fields, this ceases to be true
Carriers scatter off atoms Velocity reaches vsat Electrons: 6-10 x 106 cm/s
Holes: 4-8 x 106 cm/s
Better modelEsat0
0
slope Q
Elat
R
2Esat 3Esat
Rsat
Rsat / 2
latsat sat
lat
sat
1
Ev v E
E
E
! !
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CMOS VLSIDigital Design Slide 63
Channel Length Modulation
Reverse-biased p-n junctions form a depletion region
Region between n and p with no carriers
Width of depletion Ld region grows with reverse bias
Leff= L Ld Shorter Leffgives more current
Ids increases with Vds Even in saturation
n+
p
GateSource Drain
ulk Si
n+
VDDGND VDD
GND
LLeff
Depletion Regionidth: Ld
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CMOS VLSIDigital Design Slide 64
Body Effect
Vt: gate voltage necessary to invert channel
Increases if source voltage increases becausesource is connected to the channel
Increase in Vt
with Vs
is called the bodyeffect
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CMOS VLSIDigital Design Slide 65
OFFTransistorBehavior
What about current in cutoff?
Simulated results
What differs?
Current doesnt goto 0 in cutoff
Vt
Sub-threshold
Slope
Sub-threshold
Region
SaturationRegion
Vds 1.8
Ids
Vgs
0 0.3 0. 0. 1.2 1.5 1.8
10 pA
100 pA
1 nA
10 nA
100 nA
1QA
10QA
100QA
1 A
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CMOS VLSIDigital Design Slide 66
Leakage Sources
Subthreshold conduction
Transistors cant abruptly turn ON or OFF
Junction leakage
Reverse-biased PN junction diode current Gate leakage
Tunneling through ultrathin gate dielectric
Subthreshold leakage is the biggest source inmodern transistors
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CMOS VLSIDigital Design Slide 67
Low Power Design
Reduce dynamic power
E: clock gating, sleep mode
C: small transistors (esp. on clock), short wires
VDD: lowest suitable voltage f: lowest suitable frequency
Reduce static power
Selectively use ratioed circuits
Selectively use low Vt devices Leakage reduction:
stacked devices, body bias, low temperature
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CMOS VLSIDigital Design Slide 68
Chip-to-Package Bonding
Traditionally, chip is surrounded bypadframe
Metal pads on 100 200 Qm pitch
Gold bond wires attach pads to package
Leadfram
e distributes signals in package Metal heatspreaderhelps with cooling
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CMOS VLSIDigital Design Slide 69
Bidirectional Pads
Combine input and output pad
Need tristate driver on output
Use enable signal to set direction
Optimized tristate avoids huge series transistorsPAD
Din
Dout
En
Dout
En Y
Dout
NAND
NOR
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CMOS VLSIDigital Design Slide 70
Device Scaling
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Interconnect Delay