Agilent 7500 ICP-MSAgilent 7500 ICP-MS

Date: 28JUL2005

Page 2

What is ICP-MS?What is ICP-MS?

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18

1 HHe

1

2 Li Be B C N O FNe

2

3 Na

Mg

Al Si P S Cl Ar 3

4 K Ca Sc Ti V CrMn

Fe Co NiCu

Zn Ga Ge AsSe

Br Kr 4

5 Rb

St Y ZrNb

Mo Tc Ru RhPd

Ag

Cd In Sn SbTe

IXe

5

6 Cs Ba L Hf Ta W Re Os Ir PtAu

Hg

Tl Pb BiPo

AtRn

6

7 Fr Ra A RfDb

Sg Bh Hs Mt 7

L LaCe

PrNd

Pm

Sm

Eu GdTb

Dy

Ho

ErTm

Yb Lu

A AcTh

Pa

U Np PuAm

Cm

Bk

Cf EsFm

Md

No

Lr

Page 3

Atomic Spectroscopy (I)Atomic Spectroscopy (I)

Atomic Absorption Spectroscopy

Graphite Furnace AAS

Inductively Coupled Plasma -

Optical Emission Spectroscopy

Nucleus

Electron

ICP-Mass Spectroscopy

Page 4

Atomic Spectroscopy (II)Atomic Spectroscopy (II)

ICP-MSFAASHigh Precision

GFAAS

High Sensitivity

Low Detection Limits

ICP-OES

Multi-element Simultaneous Analysis

Spectral Interferences

Quantitation

Sensitivity

Page 5

ICP-MS Schematic DiagramICP-MS Schematic Diagram

1. Nebulizer

2. Spray Chamber3. Plasma

4. Off-axis Lens 6. ORS7. Mass Filter

8. Detector5. Isolation Valve

Page 6

Sample Introduction DeviceSample Introduction Device

To ICPBabingtonNebulizer

Sample solution

Ar carrier gas

Peltier cooling device

Cooling water

Al insulation

cover

Ar blend gas

Page 7

Mass flow ControlMass flow Control

2. Spray Chamber 4. Interface6. Ion Lenses

Plasma Gas (15~16L/min)

Carrier Gas (1.2L/min) +

Sample Blend Gas (0.6L/min)

Auxiliary Gas (1L/min)

Page 8

Ionization by PlasmaIonization by Plasma

2. Spray Chamber

+1. Drying

2. Decomposition

3. Atomization

4. Ionization

ID 2.5mm, Flow 0.2~0.4ml/min

Page 9

Distribution of PlasmaDistribution of Plasma

-8 -6 -4 -2 0 2 4 6 8

Distance from Center(mm)

Inte

nsi

ty(%

) Sample27.12MHz

40MHz

27.12MHz

40MHz

S

S

Page 10

Work coil

Shield plate

Cool PlasmaCool Plasma

Torch

Interference

39K 38Ar1H

40Ca 40Ar

56Fe 40Ar16O

0

6

12

18

K Ca Fe Ar

Element

Pote

ntia

l

Page 11

Cool PlasmaCool Plasma

Normal Plasma Cool Plasma

• Forward Power: 1300W

• Sampling Depth: 7mm

• Carrier Gas Flow: 1.2ml/min

• Forward Power: 900W

• Sampling Depth: 13mm

• Carrier Gas Flow: 1.7ml/min

Shield plate

Page 12

Ionization EfficiencyIonization Efficiency

0.0000001

0.000001

0.00001

0.0001

0.001

0.01

0.1

1

10

100

4,500 5,000 5,500 6,000 6,500 7,000 7,500

Electron Temperature(K)

Ioniz

ation E

ffici

ency

(%)

Mg

Fe

As

Cl

Ar

Mg, Fe, As

Cl

Ar

Page 13

Optimum gas flowOptimum gas flowS

en

sit

ivit

y

Co

ArH

ArO

Carrier gas flow

Page 14

Extraction LensExtraction Lens

Skimmer cone

Twin Extraction LensesSampling cone

Page 15

Why need ORS?Why need ORS?

There are some applications where

cool plasma does not meet current and

future required performance levels for

certain analytes:

several interfered analytes in high

(100-1000ppm) Si matrices

interfered analytes (Ti, Zn) in high

matrix acids H2SO4 and H3PO4

Interference Matrix39K 38Ar1H UPW

40Ca 40Ar UPW56Fe 40Ar16O UPW51V 35Cl16O HCl

52Cr 35Cl16O1H HCl75As 40Ar35Cl HCl48Ti 32S16O H2SO4

64Zn 32S16O16O H2SO4

63Cu 31P16O16O H3PO4

68Zn 31P18O18O1H H3PO4

24Mg 12C12C Organics52Cr 40Ar12C Organics

Agilent’s Octopole Reaction Cell can remove these interferences…

Page 16

Off-axis LensOff-axis Lens

Page 17

DissociationDissociation

As

Ar

Cl

ArCl

75amu

ArCl

75amu

75amu

40amu

35amu

He

Page 18

Energy TransferEnergy Transfer

As75amu

ArCl

75amu

Electric Potential

(Quadrupole)

He

Page 19

Reaction modeReaction mode

Charge Transfer

Ar+ + H2 H2+ + Ar

(neutral)

Proton Transfer

Ar2+ + H2 Ar2H+ + H

(80amu) (81amu)

Page 20

Mass FilterMass Filter

3MHz

• True Hyperbolic Quadrupole

• 3MHz RF Generator

• Peak Shape

• Abundance Sensitivity

Page 21

Dual Electron MultiplierDual Electron Multiplier

Dynode

ee

M+

Fast Analogue

Detection

Pulse Counting

Detection

Page 22

Wide Dynamic RangeWide Dynamic Range

1ppt

1000ppm

• Dynamic Range: 9 orders

• Analog Mode

• Pulse Counting Mode

• Solid type Multiplier

Page 23

ICP-MS Schematic DiagramICP-MS Schematic Diagram

1. Nebulizer

2. Spray Chamber3. Plasma

4. Off-axis Lens 6. ORS7. Mass Filter

8. Detector5. Isolation Valve

Page 24

FlexibilityFlexibility

[HPLC-ICP-MS]

[GC-ICP-MS] [Organic Kit]

[ORS Technology]

[I-Autosampler]

Page 25

Sample TypeSample Type

• Waters

• Chemicals

• Semiconductor

• Food

• Geological

• Clinical

• Forensic

• Petrochemical

• Nuclear