SUSTAINABLE

PRODUCTIVITY

Dereck D Devlin

General manager

Atlas Copco Taiwan

September 2nd 2015

Customer’s Needs

– Reduce the Electricity Charges for production

– Continues reliable operation, reduce down time

– Increase overall efficiency of plant room and utilities

– Utilize latest technology's

– Reduce Life Cycle Costs

SUSTAINABLE PRODUCTIVITY Working with Customers to ensure the most sustainable productivity is sustainable and efficent

3

Typical applications of compressed dry air (CDA)

- Pressure range : from 7 to 10,5 bars

- PDP : -40°C average to -70°C for critical applications

- Application : Cooling, purging, pneumatics tools

- Cooling : Scanning lens, bonding tips

- Purging : vacuum pumps, venturi pumps

- Pneumatics : instrumentation IC functionality, ageing test, power &

performance, assembly process

- Pneumatics : chips sorting, packaging

- Rough vacuum : pick and place, wire bonding

- ZG booster for cooling of the scanning lens (SCAD)

- ZS low pressure for WWT

COMPRESSED AIR AND UTILITY VACUUM

Around 10%-12% of the electrical energy in industry today is used to generate compressed Air

and vacuum.

Air leaks account for a mayor energy waste, a 10mm hole in a system can waste around 5% of

your total air demand both in compressed air and vacuum.

Generating too high a pressure can be wasteful too!

– 1 bar increase in air pressure costs 7% increase in energy.

Running equipment when not needed can waste substantial amounts of energy, a typical

vacuum pump running unloaded consumes 90% of the full load demand

5

WHAT IS HYBRID? What is the most efficient car technology?

What is the most efficient compressor room?

Diesel & Elecric drive hybrid

Turbo & ZR VSD hybrid

2 main applications of rough vacuum :

Pick and place of the chips after sawing operation : -24 inch of mercury at point of use

Wire and Die bonding dry process : Tray holding : -22 Inch of Mercury

Main technology used : Vacuum venturi (CDA) and liquid ring

Main targets : Reduce water moisture contents and reduce CDA usage (number of air ejectors). Convert from Vacuum

Venturi to Plant Vacuum.

Rough SER calculations shows a benefit of 30% when using GV screw instead of Liquid Ring (3,6 KW /100cfm versus

5,2)

PPM level (60% of total N2 usage) : Ideally less than 0.5 PPM for purging process and wafer storage cabinets to prevent

oxidation

6

Rough vacuum …

.. And N2 “rough” purity gas application :

ROUGH VACUUM RANGE

Optimal operating range from 400mbar(a) to 10mbar(a)

Nominal displacement : 390 - 1694m3/h

Air cooled version

Noise level 62 -79 db(A)

Energy savings (average of 50%)

- Variable speed drive (VSD)

- Plug and play system

- Elektronikon MK5 Graphic

- Provided with an inlet filter, inlet valve and canopy (low noise

level)

- Best in class in oil retention

- Humid version and Turbo version

7

GHS 350-1900 VSD+ –Oil sealed rotary screw pumps with variable speed drive

VARIABLE SPEED

Variable speed drive

Set point control

8

Average 50% energy savings

Optimize the energy you use to maintain

your process vacuum level and optimize

your process efficiency and performance

FEATURE BENEFIT

ENERGY EFFICIENCY

Use the energy efficently

– Recover heat of compression by using the cooling water to heat boiler feed water

– Generate Air at the optimum pressure for the application don’t waste power pressurizing to a higher level

than needed

– Slow down the units to the demand needed with Variable speed equipment

– Ensure maintenance is optimized and the systems checked for leaks

– Modern well maintained equipment can give over 30% energy savings

10

COMMITTED TO

SUSTAINABLE PRODUCTIVITY.